CN215720467U - Active and passive combined type vibration reduction base - Google Patents
Active and passive combined type vibration reduction base Download PDFInfo
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- CN215720467U CN215720467U CN202122194848.0U CN202122194848U CN215720467U CN 215720467 U CN215720467 U CN 215720467U CN 202122194848 U CN202122194848 U CN 202122194848U CN 215720467 U CN215720467 U CN 215720467U
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- 239000000919 ceramic Substances 0.000 claims abstract description 21
- 238000013016 damping Methods 0.000 claims abstract description 18
- 238000002955 isolation Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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Abstract
The utility model provides an active and passive combined type vibration damping base which comprises a base frame body, a supporting block, piezoelectric ceramics, a voice coil motor, a spring, rubber and a top plate, wherein the supporting block is positioned in the base frame body, the piezoelectric ceramics are arranged between the bottom of the supporting block and the base frame body, the voice coil motor and the spring are respectively arranged between the left side surface, the right side surface, the front side surface and the rear side surface of the supporting block and the base frame body, the rubber is arranged in the middle above the supporting block, and the top plate is arranged above the rubber. The utility model adopts a large-damping rubber structure as a passive vibration damper, simultaneously adopts piezoelectric ceramics and a voice coil motor to carry out active vibration damping on three degrees of freedom, realizes base vibration damping in an active and passive combined mode, and has wide vibration damping band range, and the effective vibration damping within the range of 2-150 Hz can reach more than 90 percent. And the spring device can filter the base load resonance without tuning. The base is simple in structure, convenient to control and wide in application range, and can still be applied under the condition that the load reaches 2T.
Description
Technical Field
The utility model relates to the technical field of vibration isolation devices, in particular to an active and passive combined vibration damping base.
Background
At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.
The vibration isolator can be directly used as a low-pass filter, the filter can effectively filter the environmental vibration interference above the natural frequency of the vibration isolator, but the suppression effect on the vibration interference near the natural frequency of the vibration isolator is weak, and even the phenomenon that the vibration amplitude is amplified due to the resonance phenomenon sometimes occurs. Therefore, in order to obtain better vibration isolation effect of the system in the low frequency band, a method of lowering its natural frequency is generally adopted, so as to avoid resonance at some frequencies.
However, how to make the vibration isolator better isolate the vibration interference transmitted from the base station to the load and have better positioning accuracy is a problem which needs to be solved.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an active and passive combination formula damping base to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized as follows:
the active and passive combined vibration damping base comprises a base frame body, supporting blocks, piezoelectric ceramics, a voice coil motor, springs, rubber and a top plate, wherein the supporting blocks are located inside the base frame body, the piezoelectric ceramics are arranged between the bottom of each supporting block and the base frame body, the voice coil motor and the springs are respectively arranged between the left side face, the right side face, the front side face and the rear side face of each supporting block and the base frame body, the rubber is arranged in the middle of the upper portion of each supporting block, and the top plate is arranged above the rubber.
Furthermore, three speed sensors are arranged above the supporting block, are orthogonal to each other and are respectively used for acquiring speed signals of three degrees of freedom, namely, up-down, left-right and front-back.
Furthermore, the piezoelectric ceramics at the bottom of the supporting block and the two voice coil motors on the side surfaces of the supporting block are orthogonal to each other.
Furthermore, a decoupling device is arranged between the supporting block and the piezoelectric ceramic, a decoupling device is arranged between the supporting block and the voice coil motor, and a decoupling device is arranged between the supporting block and the spring.
Furthermore, the piezoelectric ceramic, the voice coil motor and the speed sensor are all connected with the digital controller through cables.
Further, the base frame is rectangular.
The utility model has the beneficial effects that:
the active and passive combined vibration attenuation base adopts a large-damping rubber structure as a passive vibration attenuation device, and simultaneously adopts piezoelectric ceramics and a voice coil motor to carry out active vibration attenuation on three degrees of freedom, so that the base realizes vibration attenuation in an active and passive combined mode, the vibration attenuation band range is wide, and the effective vibration attenuation within the range of 2-150 Hz can reach more than 90 percent. And the spring device can filter the base load resonance without tuning. The base is simple in structure, convenient to control and wide in application range, and can still be applied under the condition that the load reaches 2T.
Drawings
Fig. 1 is a schematic structural diagram of an active and passive combined vibration damping base according to the present invention.
In the figure, 1-a base frame body, 2-a supporting block, 3-piezoelectric ceramics, 4-a voice coil motor, 5-a spring, 6-rubber, 7-a top plate, 8-a speed sensor, 91-a decoupling device, 92-a decoupling device, 93-a decoupling device and 10-a digital controller.
Detailed Description
The technical solution of the present invention will be described in detail and fully with reference to the following examples, and it should be understood that the described examples are only a part of the examples of the present invention, and not all of the examples. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in fig. 1, the active and passive combined vibration damping base comprises a base frame body 1, a supporting block 2, piezoelectric ceramics 3, a voice coil motor 4, a spring 5, rubber 6 and a top plate 7, wherein the supporting block 2 is located inside the base frame body 1, the piezoelectric ceramics 3 is arranged between the bottom of the supporting block 2 and the base frame body 1, the voice coil motor 4 and the spring 5 are respectively arranged between the left side surface, the right side surface, the front side surface and the rear side surface of the supporting block 2 and the base frame body 1, the rubber 6 is arranged in the middle of the upper portion of the supporting block 2, and the top plate 7 is arranged above the rubber 6.
Three speed sensors 8 are arranged above the supporting block 2, and the three speed sensors 8 are orthogonal to each other and are respectively used for acquiring speed signals of three degrees of freedom, namely, up-down, left-right, and front-back.
The piezoelectric ceramics 3 at the bottom of the supporting block 2 is orthogonal to the two voice coil motors 4 on the side surfaces of the supporting block 2.
A decoupling device 91 is arranged between the supporting block 2 and the piezoelectric ceramic 3, a decoupling device 92 is arranged between the supporting block 2 and the voice coil motor 4, and a decoupling device 93 is arranged between the supporting block 2 and the spring 5.
The piezoelectric ceramic 3, the voice coil motor 4 and the speed sensor 8 are all connected with the digital controller 10 through cables.
The base frame 1 is rectangular.
During operation, semiconductor production equipment is placed on the active and passive combined type vibration reduction base top plate 7, speed signals of three degrees of freedom in the vertical direction and the horizontal direction are collected through the speed sensor 8, the collected signals are transmitted to the digital controller 10, the piezoelectric ceramic 3 and the voice coil motor 4 are controlled by the digital controller 10 to keep the supporting block 2 vibrating, and the purpose of vibration reduction is achieved.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the utility model, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (6)
1. The active and passive combined vibration damping base comprises a base frame body, supporting blocks, piezoelectric ceramics, a voice coil motor, springs, rubber and a top plate and is characterized in that the supporting blocks are located inside the base frame body, the piezoelectric ceramics are arranged between the bottom of each supporting block and the base frame body, the voice coil motor and the springs are respectively arranged between the left side face, the right side face, the front side face and the rear side face of each supporting block and the base frame body, the rubber is arranged in the middle of the upper portion of each supporting block, and the top plate is arranged above the rubber.
2. The active and passive combined vibration damping base according to claim 1, wherein three speed sensors are arranged above the supporting block, and the three speed sensors are orthogonal to each other and are respectively used for acquiring speed signals of three degrees of freedom, namely, up and down, left and right, and front and back.
3. The active-passive combined vibration damping base plate as claimed in claim 1, wherein the piezoelectric ceramics at the bottom of the supporting block and the two voice coil motors at the side of the supporting block are orthogonal to each other.
4. The active-passive combined vibration damping base according to claim 1, wherein a decoupling device is arranged between the supporting block and the piezoelectric ceramic, a decoupling device is arranged between the supporting block and the voice coil motor, and a decoupling device is arranged between the supporting block and the spring.
5. The active-passive combined vibration damping base plate as claimed in claim 1, wherein the piezoelectric ceramic, the voice coil motor and the speed sensor are all connected with a digital controller through cables.
6. The active and passive combined vibration damping mount according to claim 1, wherein the mount frame is rectangular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122194848.0U CN215720467U (en) | 2021-09-11 | 2021-09-11 | Active and passive combined type vibration reduction base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122194848.0U CN215720467U (en) | 2021-09-11 | 2021-09-11 | Active and passive combined type vibration reduction base |
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| Publication Number | Publication Date |
|---|---|
| CN215720467U true CN215720467U (en) | 2022-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202122194848.0U Active CN215720467U (en) | 2021-09-11 | 2021-09-11 | Active and passive combined type vibration reduction base |
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| CN (1) | CN215720467U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117553098A (en) * | 2024-01-11 | 2024-02-13 | 中国科学院长春光学精密机械与物理研究所 | Tandem piezoelectric actuation vibration isolator |
-
2021
- 2021-09-11 CN CN202122194848.0U patent/CN215720467U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117553098A (en) * | 2024-01-11 | 2024-02-13 | 中国科学院长春光学精密机械与物理研究所 | Tandem piezoelectric actuation vibration isolator |
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Address after: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: 116000 room a434, 4th floor, saibole building, 133 Guangxian Road, high tech Industrial Park, Dalian, Liaoning Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |
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| CP01 | Change in the name or title of a patent holder |