CN217207502U - Low-frequency micro-vibration prevention base for precision instrument - Google Patents
Low-frequency micro-vibration prevention base for precision instrument Download PDFInfo
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- CN217207502U CN217207502U CN202221072987.4U CN202221072987U CN217207502U CN 217207502 U CN217207502 U CN 217207502U CN 202221072987 U CN202221072987 U CN 202221072987U CN 217207502 U CN217207502 U CN 217207502U
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- backup pad
- roof
- low frequency
- support column
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- 230000002265 prevention Effects 0.000 title description 4
- 239000002184 metal Substances 0.000 claims abstract description 17
- 238000006073 displacement reaction Methods 0.000 claims abstract description 9
- 229910001220 stainless steel Inorganic materials 0.000 claims description 9
- 239000010935 stainless steel Substances 0.000 claims description 9
- 238000002955 isolation Methods 0.000 abstract description 18
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
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Abstract
The utility model provides a little vibration base is prevented to low frequency for precision instrument, including roof and base, four angles in roof bottom are connected with metal spring respectively, the metal spring bottom is connected with air spring, the air spring bottom is connected with the base top surface, roof bottom intermediate position is connected with first backup pad, first backup pad bottom is connected with the support column, the support column is three and is isosceles triangle and arranges, the support column bottom is connected with the second backup pad, second backup pad bottom intermediate junction has the piezoelectric actuator, the piezoelectric actuator bottom is connected with the base top surface, the roof bottom still is connected with speedtransmitter and displacement sensor, the controller is still installed to the base top surface. The utility model discloses simple structure, the cost of manufacture is low, can obtain great vibration isolation bandwidth, can realize 0.5Hz ~150Hz vibration isolation, and system natural frequency can be less than 0.5 Hz.
Description
Technical Field
The utility model relates to a vibration isolation device technical field specifically is a low frequency micro-vibration prevention base for precision instruments.
Background
At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.
The micro-vibration caused by the vibration of the external environment and the reaction force inside the equipment is one of the key factors restricting the measurement precision of the ultra-precision instrument and the manufacturing precision of the ultra-precision processing equipment, and the high-performance precise micro-vibration isolation technology becomes a core key technology in the fields of precision engineering, ultra-precision manufacturing and the like. The vibration isolator can be directly used as a low-pass filter, the filter can effectively filter the environmental vibration interference above the natural frequency of the vibration isolator, but the suppression effect on the vibration interference near the natural frequency of the vibration isolator is weak, and even the phenomenon that the vibration amplitude is amplified due to the resonance phenomenon sometimes occurs. Therefore, in order to obtain better vibration isolation effect of the system in the low frequency band, a method of lowering its natural frequency is generally adopted, so as to avoid resonance at some frequencies. The spring is used as a common elastic element, is widely applied to damping parts of various vibration devices, and has the characteristics of good stability, low noise, obvious vibration isolation effect, long service life and the like. However, the performance of the existing spring vibration isolation is not ideal in the aspect of low-frequency vibration isolation, which results in that the further application of the existing spring vibration isolation in the field of ultra-low frequency is limited to a great extent, and the existing active vibration isolation device has the problems of complex structure, high cost, narrow vibration isolation band and the like.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a low frequency micro-vibration prevention base for precision instruments to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized like this:
the utility model provides a micro-vibration base is prevented to low frequency for precision instrument, includes roof and base, four angles in roof bottom are connected with metal spring respectively, the metal spring bottom is connected with air spring, the air spring bottom is connected with the base top surface, roof bottom intermediate position is connected with first backup pad, first backup pad bottom is connected with the support column, the support column is three and is isosceles triangle and arranges, the support column bottom is connected with the second backup pad, second backup pad bottom intermediate junction has the piezoelectric driver, the piezoelectric driver bottom is connected with the base top surface, the roof bottom still is connected with speedtransmitter and displacement sensor, the controller is still installed to the base top surface.
Further, the top plate is made of a stainless steel plate into a rectangular structure.
Further, the base is made of a stainless steel plate into a rectangular structure.
Further, a decoupling device is further installed between the metal spring and the top plate.
Furthermore, a cushion block is further installed between the metal spring and the air spring, and the cushion block is a rubber cushion block.
Further, the first supporting plate and the second supporting plate are made of stainless steel plates into round structures.
Further, the controller is connected with the speed sensor, the displacement sensor and the piezoelectric driver through cables.
The utility model has the advantages that:
the utility model discloses lead to metal spring and air spring series connection on vertical, greatly reduced the natural frequency of system, realize high frequency vibration isolation to utilize piezoelectric actuator to carry out the low frequency vibration isolation, the support column of triangular distribution can improve the stability of system simultaneously, obtains high accuracy location; the utility model discloses simple structure, the cost of manufacture is low, can obtain great vibration isolation bandwidth, can realize 0.5Hz ~150Hz vibration isolation, and system natural frequency can be less than 0.5 Hz.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a sectional view of the part a-a of the present invention.
In the figure, 1-a top plate, 2-a metal spring, 3-an air spring, 4-a base, 5-a first supporting plate, 6-a supporting column, 7-a second supporting plate, 8-a piezoelectric driver, 9-a decoupling device, 10-a cushion block, 11-a speed sensor, 12-a displacement sensor and 13-a controller.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1-2, a low frequency micro-vibration preventing base for precision instruments, includes roof 1 and base 4, four angles in roof 1 bottom are connected with metal spring 2 respectively, metal spring 2 bottom is connected with air spring 3, 3 bottoms of air spring are connected with 4 top surfaces of base, roof 1 bottom intermediate position is connected with first backup pad 5, 5 bottoms of first backup pad are connected with support column 6, support column 6 is three and is isosceles triangle-shaped and arranges, 6 bottoms of support column are connected with second backup pad 7, 7 bottoms intermediate connections of second backup pad have piezoelectric driver 8, 8 bottoms of piezoelectric driver are connected with 4 top surfaces of base, roof 1 bottom still is connected with speedtransmitter 11 and displacement sensor 12, base 2 top surface still installs controller 13.
The top plate 1 is made of a stainless steel plate into a rectangular structure.
The base 4 is made of stainless steel plate into a rectangular structure.
And a decoupling device 9 is also arranged between the metal spring 2 and the top plate 1.
And a cushion block 10 is further arranged between the metal spring 2 and the air spring 3, and the cushion block 10 is a rubber cushion block.
The first supporting plate 5 and the second supporting plate 7 are both made of stainless steel plates into round structures.
The controller 13 is connected with the speed sensor 11, the displacement sensor 12 and the piezoelectric driver 8 through cables.
During operation, a precision instrument is installed on the top plate 1, high-frequency vibration isolation is achieved vertically through the metal spring 2, the air spring 3 and the cushion block 10, vibration signals are collected through the speed sensor 11 and the displacement sensor 12, the collected signals are transmitted to the controller 13, and the controller 13 controls the piezoelectric driver 8 to drive the piezoelectric driver to achieve low-frequency vibration isolation vertically.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. The utility model provides a micro-vibration base is prevented to low frequency for precision instruments, includes roof and base, its characterized in that, four angles in roof bottom are connected with metal spring respectively, the metal spring bottom is connected with air spring, the air spring bottom is connected with the base top surface, roof bottom intermediate position is connected with first backup pad, first backup pad bottom is connected with the support column, the support column is three and is isosceles triangle and arranges, the support column bottom is connected with the second backup pad, second backup pad bottom intermediate junction has the piezoelectric actuator, the piezoelectric actuator bottom is connected with the base top surface, the roof bottom still is connected with speedtransmitter and displacement sensor, the controller is still installed to the base top surface.
2. A low frequency anti-fretting base for precision instruments according to claim 1, wherein the top plate is made of stainless steel plate in a rectangular configuration.
3. A low frequency anti-fretting base for precision instruments according to claim 1, wherein the base is made of stainless steel plate in a rectangular configuration.
4. The low frequency anti-fretting base for precision instruments according to claim 1, wherein a decoupling means is further installed between the metal spring and the top plate.
5. The low-frequency anti-micro-vibration base for the precision instrument as claimed in claim 1, wherein a cushion block is further installed between the metal spring and the air spring, and the cushion block is a rubber cushion block.
6. The low frequency anti-fretting base for precision instruments according to claim 1, wherein the first and second support plates are made of stainless steel plate in a circular configuration.
7. The low frequency anti-fretting base for precision instruments according to claim 1, wherein the controller is connected to the velocity sensor, the displacement sensor, and the piezoelectric actuator by cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221072987.4U CN217207502U (en) | 2022-05-07 | 2022-05-07 | Low-frequency micro-vibration prevention base for precision instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221072987.4U CN217207502U (en) | 2022-05-07 | 2022-05-07 | Low-frequency micro-vibration prevention base for precision instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217207502U true CN217207502U (en) | 2022-08-16 |
Family
ID=82777225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221072987.4U Active CN217207502U (en) | 2022-05-07 | 2022-05-07 | Low-frequency micro-vibration prevention base for precision instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217207502U (en) |
-
2022
- 2022-05-07 CN CN202221072987.4U patent/CN217207502U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230210 Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Electronic Engineering Technology Co.,Ltd. Address before: 116000 16 Zhenxing street, Haiwan Industrial Zone, Pulandian District, Dalian, Liaoning Province Patentee before: DALIAN DEETOP HEAVY INDUSTRY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |