CN218152146U - Active and passive double-freedom-degree micro-vibration prevention base - Google Patents
Active and passive double-freedom-degree micro-vibration prevention base Download PDFInfo
- Publication number
- CN218152146U CN218152146U CN202222210738.3U CN202222210738U CN218152146U CN 218152146 U CN218152146 U CN 218152146U CN 202222210738 U CN202222210738 U CN 202222210738U CN 218152146 U CN218152146 U CN 218152146U
- Authority
- CN
- China
- Prior art keywords
- baffle
- base
- active
- air spring
- degree
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000002265 prevention Effects 0.000 title claims abstract description 12
- 229910000831 Steel Inorganic materials 0.000 claims description 10
- 239000010959 steel Substances 0.000 claims description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 238000002955 isolation Methods 0.000 abstract description 20
- 230000000694 effects Effects 0.000 abstract description 2
- 229910001294 Reinforcing steel Inorganic materials 0.000 description 5
- 230000003014 reinforcing effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Landscapes
- Vibration Prevention Devices (AREA)
Abstract
The utility model provides an active and passive two-degree-of-freedom micro-vibration prevention base, including roof, baffle, base and air spring, the baffle is two parallel arrangement in roof bottom both sides, air spring is two outsides of arranging at the baffle respectively, be connected with the top gasbag between air spring and the roof bottom, be connected with the lateral part gasbag between air spring and the baffle, the air spring bottom is connected with the base top, install support piece in the middle of the base top, be connected with voice coil motor A between support piece top and the roof bottom, be connected with voice coil motor B between support piece both sides and the baffle, position sensor and speedtransmitter are installed to the roof bottom, the controller is installed at the base top. The utility model discloses stability is high, and the location is accurate, and the vibration isolation bandwidth has better vibration isolation effect to 0.5Hz- (150Hz) vibration interference, and can realize the level to and perpendicularly to two degrees of freedom vibration isolations, application scope is wider.
Description
Technical Field
The utility model relates to a vibration isolation device technical field specifically is an active and passive two-degree-of-freedom anti-microvibration base.
Background
At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.
The micro-vibration caused by the vibration of the external environment and the reaction force inside the equipment is one of the key factors restricting the measurement precision of the ultra-precision instrument and the manufacturing precision of the ultra-precision machining equipment, and the high-performance precise isolation micro-vibration technology becomes a core key technology in the fields of precision engineering, ultra-precision manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is the core of the vibration isolation platform, and passive vibration isolation is adopted for medium-high frequency vibration, so that the passive vibration isolation structure is simple, the work is reliable, the power supply is not relied on, and the medium-high frequency vibration interference can be effectively isolated. Active vibration isolation is mostly adopted for low-frequency vibration and even ultra-low-frequency vibration. However, the environment of the precision instrument is not single high-frequency vibration or low-frequency vibration, but is a complex vibration environment with multiple frequencies, and the existing vibration isolation platform mainly aims at single high-frequency or low-frequency vibration and has poor vibration isolation capability for the complex vibration environment.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide an active and passive two degree of freedom prevent microvibration base to solve the problem that exists among the above-mentioned background art.
The technical scheme of the utility model is realized like this:
the utility model provides an active and passive two-degree-of-freedom micro-vibration prevention base, includes roof, baffle, base and air spring, the baffle is two parallel arrangement in roof bottom both sides, air spring is two and arranges the outside at the baffle respectively, be connected with the top gasbag between air spring and the roof bottom, be connected with the lateral part gasbag between air spring and the baffle, the air spring bottom is connected with the base top, install support piece in the middle of the base top, be connected with voice coil motor A between support piece top and the roof bottom, be connected with voice coil motor B between support piece both sides and the baffle, position sensor and speedtransmitter are installed to the roof bottom, the controller is installed at the base top.
Furthermore, the top plate is a rectangular frame body without a top cover and made of a stainless steel plate, and a rectangular hole is formed in the bottom of the top plate.
Further, the baffle is made into a rectangular frame body without a top cover by a stainless steel plate, and the top of the baffle is aligned with the rectangular hole and welded and fixed.
Furthermore, the top plate and the baffle are connected to form a pi-shaped structure integrally.
Furthermore, the top plate is internally welded with transverse steel bars and longitudinal steel bars.
Furthermore, the baffle internally welded has vertical reinforcing bar, vertical reinforcing bar passes in the baffle inserts the roof and with horizontal reinforcing bar, vertical reinforcing bar vertical welding fixed.
Furthermore, concrete is poured inside the top plate and the baffle plate.
Furthermore, the controller is connected with the position sensor, the speed sensor, the voice coil motor A and the voice coil motor B through cables.
The beneficial effects of the utility model are that:
the utility model realizes load through the top plate and the air spring in the vertical direction, realizes vertical high-frequency passive vibration isolation through the top air bag, and realizes high-frequency passive vibration isolation through the side air bag in the horizontal direction; and voice coil motors are arranged vertically and horizontally to realize low-frequency active vibration isolation. The utility model discloses simple structure, stability is high, and the location is accurate, and the vibration isolation bandwidth has better vibration isolation effect to 0.5Hz to 150Hz vibration interference, and can realize the level to with perpendicular to two degrees of freedom vibration isolations, application scope is wider.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a cross-sectional view of the top plate of the present invention.
In the figure, 1-a top plate, 101-a baffle plate, 102-a transverse steel bar, 103-a longitudinal steel bar, 104-a vertical steel bar, 105-concrete, 106-a rectangular hole, 2-a base, 3-an air spring, 301-a top air bag, 302-a side air bag, 4-a supporting piece, 5-a voice coil motor A, 6-a voice coil motor B, 7-a position sensor, 8-a speed sensor and 9-a controller.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
As shown in fig. 1-2, an active and passive double-degree-of-freedom micro-vibration prevention base comprises a top plate 1, baffles 101, a base 2 and air springs 3, wherein the baffles 101 are arranged on two sides of the bottom of the top plate 1 in parallel, the air springs 3 are arranged on two outer sides of the baffles 101 respectively, a top airbag 301 is connected between the air springs 3 and the bottom of the top plate 1, a side airbag 302 is connected between the air springs 3 and the baffles 101, the bottom of the air springs 3 is connected with the top of the base 2, a supporting piece 4 is installed in the middle of the top of the base 2, a voice coil motor A5 is connected between the top of the supporting piece 4 and the bottom of the top plate 1, a voice coil motor B6 is connected between two sides of the supporting piece 4 and the baffles 101, a position sensor 7 and a speed sensor 8 are installed at the bottom of the top plate 1, and a controller 9 is installed at the top of the base 2.
The top plate 1 is a rectangular frame body without a top cover made of stainless steel plates, and a rectangular hole 106 is formed in the bottom of the top plate 1.
The baffle 101 is made of a stainless steel plate into a rectangular frame without a top cover, and the top of the baffle 101 is aligned with the rectangular hole 106 and is welded and fixed.
The top plate 1 is connected with the baffle plate 101 to form a pi-shaped structure integrally.
The transverse reinforcing steel bars 102 and the longitudinal reinforcing steel bars 103 are welded in the top plate 1.
Vertical reinforcing steel bars 104 are welded inside the baffle 101, penetrate through the baffle 101, are inserted into the top plate 1, and are vertically welded and fixed with the transverse reinforcing steel bars 102 and the longitudinal reinforcing steel bars 103.
Concrete 105 is poured inside the top plate 1 and the baffle plate 101.
And the controller 9 is connected with the position sensor 7, the speed sensor 8, the voice coil motor A5 and the voice coil motor B6 through cables.
When the device works, a precision instrument is placed on the top plate 1, the air spring 3 bears the weight, and the vertical and horizontal high-frequency vibration isolation is realized through the top air bag 301 and the side air bag 302; during the low frequency vibration source, gather vibration signal through position sensor 7, velocity sensor 8, then give controller 9 with signal transmission, by controller 9 control voice coil motor A5, the drive of voice coil motor B6, realize vertical and level to the low frequency vibration isolation.
The above description is only for the preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. The utility model provides an active and passive two-degree-of-freedom micro-vibration prevention base, includes roof, baffle, base and air spring, its characterized in that, the baffle is two parallel arrangement in roof bottom both sides, air spring is two and arranges the outside at the baffle respectively, be connected with the top gasbag between air spring and the roof bottom, be connected with the lateral part gasbag between air spring and the baffle, the air spring bottom is connected with the base top, install support piece in the middle of the base top, be connected with voice coil motor A between support piece top and the roof bottom, be connected with voice coil motor B between support piece both sides and the baffle, position sensor and speedtransmitter are installed to the roof bottom, the controller is installed at the base top.
2. The active and passive double-degree-of-freedom micro-vibration prevention base as claimed in claim 1, wherein the top plate is a rectangular frame without a top cover made of stainless steel plates, and rectangular holes are formed in the bottom of the top plate.
3. The active and passive double-degree-of-freedom micro-vibration prevention base as claimed in claim 1, wherein the baffle is a rectangular frame without a top cover made of stainless steel plates, and the top of the baffle is aligned with and welded to the rectangular hole.
4. The active and passive double-degree-of-freedom micro-vibration prevention base as claimed in claim 1, wherein the top plate and the baffle are connected to form a pi-shaped structure as a whole.
5. The active and passive double-degree-of-freedom micro-vibration prevention base as claimed in claim 1, wherein transverse steel bars and longitudinal steel bars are welded inside the top plate.
6. The active and passive double-degree-of-freedom micro-vibration prevention base as claimed in claim 1, wherein vertical steel bars are welded inside the baffle, penetrate through the baffle, are inserted into the top plate and are welded and fixed with the transverse steel bars and the longitudinal steel bars in a perpendicular mode.
7. The active and passive double-degree-of-freedom micro-vibration prevention base as claimed in claim 1, wherein concrete is poured inside the top plate and the baffle.
8. The active and passive double-degree-of-freedom micro-vibration preventing base as claimed in claim 1, wherein the controller is connected with the position sensor, the speed sensor, the voice coil motor A and the voice coil motor B through cables.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222210738.3U CN218152146U (en) | 2022-08-23 | 2022-08-23 | Active and passive double-freedom-degree micro-vibration prevention base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222210738.3U CN218152146U (en) | 2022-08-23 | 2022-08-23 | Active and passive double-freedom-degree micro-vibration prevention base |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218152146U true CN218152146U (en) | 2022-12-27 |
Family
ID=84553766
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222210738.3U Active CN218152146U (en) | 2022-08-23 | 2022-08-23 | Active and passive double-freedom-degree micro-vibration prevention base |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218152146U (en) |
-
2022
- 2022-08-23 CN CN202222210738.3U patent/CN218152146U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210575402U (en) | Novel shock attenuation formula transformer | |
| CN112032248A (en) | Integral self-attached anti-swing vertical three-dimensional shock isolation system | |
| JP6949404B2 (en) | New 3D anti-vibration device | |
| CN218152146U (en) | Active and passive double-freedom-degree micro-vibration prevention base | |
| CN107606018A (en) | A kind of hourglass shape electromagnetism vibration isolator | |
| CN212536538U (en) | Integral self-attached anti-swing vertical three-dimensional shock isolation system | |
| JP4421130B2 (en) | Vibration isolation method and apparatus | |
| CN219840978U (en) | Energy dissipation vibration reduction damper and steel structure pedestrian bridge | |
| CN215720467U (en) | Active and passive combined type vibration reduction base | |
| CN218094025U (en) | Stewart structure-based large-load active and passive micro-vibration prevention platform | |
| CN211369126U (en) | Energy consumption device for wall | |
| CN217713477U (en) | Active and passive micro-vibration prevention base based on air floatation | |
| CN217003695U (en) | Single-degree-of-freedom active and passive combined vibration isolation base | |
| CN217207523U (en) | Active and passive composite three-degree-of-freedom vibration isolation platform | |
| CN210344155U (en) | Shock attenuation bearing structure for electrical machinery equipment | |
| CN217633633U (en) | Active micro-vibration prevention base for precision instrument | |
| CN219139698U (en) | Double-freedom-degree active micro-vibration prevention base based on magnetic levitation | |
| CN217207503U (en) | Three-degree-of-freedom active and passive parallel micro-vibration prevention base | |
| CN203171801U (en) | Positioning device for window frame of precast concrete element | |
| CN217713497U (en) | Magnetic suspension vibration isolation base for precision instrument | |
| CN217003696U (en) | Three-degree-of-freedom active and passive vibration isolation base for precision instrument | |
| CN102537207A (en) | Balance mass body | |
| CN219139697U (en) | Active and passive parallel vibration isolation base based on magnetic levitation-air bag | |
| CN209787658U (en) | electric automatization electric cabinet | |
| CN214331324U (en) | Nested formula vibration isolation device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230314 Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Electronic Engineering Technology Co.,Ltd. Address before: 116000 16 Zhenxing street, Haiwan Industrial Zone, Pulandian District, Dalian, Liaoning Province Patentee before: DALIAN DEETOP HEAVY INDUSTRY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee after: Dalian Dituo Precision Technology Co.,Ltd. Address before: No. 16, Zhenxing Street, Pulandian District, Dalian, Liaoning Province, 116000 Patentee before: Dalian Dituo Electronic Engineering Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |