CN102537207A - Balance mass body - Google Patents
Balance mass body Download PDFInfo
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- CN102537207A CN102537207A CN2010105925388A CN201010592538A CN102537207A CN 102537207 A CN102537207 A CN 102537207A CN 2010105925388 A CN2010105925388 A CN 2010105925388A CN 201010592538 A CN201010592538 A CN 201010592538A CN 102537207 A CN102537207 A CN 102537207A
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- mass body
- liquid
- balancing mass
- housing
- vibration
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Abstract
The invention provides a balance mass body, which is used in a vibration absorbing table, and is placed between a worktable and a base frame to eliminate the counterforce generated on the base frame by the worktable. The balance mass body comprises a shell and a liquid, wherein the liquid is filled in the shell, and the density of the liquid is larger than or equal to 13.6 g/cm<3>. According to the invention, the balance mass body provided by the invention is small in volume, saves space, saves shell materials and saves production cost under the condition of identical mass; the high-density liquid has high damping, so as to well isolate vibration or even completely isolate vibration, thus the stability of the base frame is guaranteed; and by adopting the balance mass body provided by the invention, the influence of temperature change on the self volume is reduced and the system error is lowered.
Description
Technical field
The present invention relates to a kind of vibration damping structure, and be particularly related to a kind of balancing mass body that is used for vibration damping equipment.
Background technique
Traditional lithography machine worktable adopts the guide rail technology of multilayer mostly, and the bottom of platform directly is connected with shock mitigation system.But along with the silicon chip diameter is increased to 300mm from 200mm; Requiring of the raising that productive rate requires and live width and alignment precision is increasingly high; The influence that directly brings is the increase of work stage movement travel, the raising of movement velocity and more high-precision requirement; Like this, also increasingly high to the requirement of shock mitigation system.
Yet the cushioning ability cost that will improve shock mitigation system is higher, and difficulty is also bigger simultaneously.Therefore, the balancing mass body technique that is used to offset the motion counter-force grows up thereupon.The balancing mass body technique is to utilize principle of momentum conservation: the stator of motor is installed on the bigger balancing mass body of quality, and mover and balancing mass body support with air-bearing respectively; Under the effect of the mutual power of mover and stator, motion in the opposite direction respectively.
A kind of balancing damping station of the prior art comprises basic framework, auxiliary balance mass, main balancing mass body, plane balancing mechanism, worktable and two connecting rod straightening mechanisms; Auxiliary balance mass one end face is connected on the basic framework, and the other end is connected with main balancing mass body; Two connecting rod straightening mechanisms are fixed on the auxiliary balance mass through fixed pedestal, and the other end connecting rod is connected with main balancing mass body; Plane balancing mechanism is arranged on the main balancing mass body, and connects worktable.Upper strata master's balancing mass body is used for active force X, Y and the Rz that the motion of balance work stage produces.Lower floor's auxiliary balance mass is just auxiliary as one.
The balancing mass body all is solid slug, in order to increase the quality of balancing mass body, need constantly increase the volume of balancing mass body; So just must occupy a large amount of spaces; Make the internal activity space of whole device diminish, and the damping of metal quality piece is little, effectiveness in vibration suppression is poor.Therefore the structures shape of its balancing mass body its separating vibration fully.
Summary of the invention
The present invention proposes a kind of balancing mass body, and housing has hollow-core construction, full of liquid, and under the situation of equal in quality, volume is little, conserve space, better separating vibration.
In order to achieve the above object, the present invention proposes a kind of balancing mass body, comprising:
Housing; And
Liquid is full of in the housing,
Wherein density of liquid is more than or equal to 13.6g/cm
3
Furtherly, the balancing mass body also comprises:
Lining fits tightly housing and coats liquid, isolates housing and contacts with liquid.
Furtherly, wherein lining is a resilient bushing, has a plurality of pores.
Furtherly, wherein lining is an organic polymer material.
Furtherly, the balancing mass body is used for vibration-damped table, and wherein vibration-damped table comprises basic framework and work stage, and work stage is connected in basic framework movably, and the balancing mass body is arranged between basic framework and the work stage.
Furtherly, liquid is liquid mercury.
The balancing mass body that the present invention proposes, under the situation of equal in quality, volume is little, and conserve space is practiced thrift case material, practices thrift to produce to rise this.And highdensity liquid damping is big, and better separating vibration, even complete separating vibration is to guarantee the stability of basic framework.Balancing mass body provided by the present invention can also reduce the influence of temperature variation for himself volume, reduces systematic error.
Description of drawings
Shown in Figure 1 is the plan view of using the vibration-damped table of balancing mass body of the present invention.
Cross-sectional view for balancing mass body in the preferred embodiment of the present invention shown in Figure 2.
Shown in Figure 3 is the part sectioned view of the balancing mass body in the second embodiment of the invention.
Embodiment
In order more to understand technology contents of the present invention, special act specific embodiment also cooperates appended graphic explanation following.
Please referring to Fig. 1, shown in Figure 1 is the plan view of using the vibration-damped table of balancing mass body of the present invention.
Vibration-damped table comprises basic framework 5, work stage 6 and balance mass 4.Work stage 6 is connected in basic framework 5 movably, and balancing mass body 4 is arranged between basic framework 5 and the work stage 6, and when work stage 6 motions, balancing mass body 4 carries out corresponding actions, eliminates the reaction force that work stage 6 motions produce basic framework 5.
Please referring to Fig. 2, shown in Figure 2 is the cross-sectional view of balancing mass body in the preferred embodiment of the present invention.
The present invention proposes a kind of balancing mass body 4, comprises housing 1 and liquid 3, full of liquid 3 in the housing 1.The mode that liquid 3 injects housing 1 for example is: housing 1 has liquid filling hole (figure does not show), and liquid 3 is infused in the housing 1 through liquid filling hole, and the sealing hand-hole.
Housing 1 can be any shape, for example sphere, the square bodily form, cuboid shape, triangular taper, so long as can be used in the concrete geometrical shape of transmitting vibrations, all within the scope that the present invention discussed.
The density of liquid 3 is bigger, and numerical value is more than or equal to 13.6g/cm
3, like this, the damping of liquid 3 is bigger, separating vibration, even complete separating vibration better.Preferable, liquid 3 can be liquid mercury.
Balancing mass body 4 can also comprise lining 2, is close on the inwall of housing 1, is used for contacting of fluid partitioning 3 and shell 1.Wherein can also be provided with locking unit between lining 2 and the housing 1, lining 2 and housing 1 are fitted tightly.
Shown in Figure 3 is the part sectioned view of the balancing mass body in the second embodiment of the invention.
Balancing mass body among second embodiment and the difference among first embodiment are: lining 8 is for resilient bushing and have a plurality of pores 10.For example it is a kind of organic polymer material, utilizes stabilizer to form many small pores.Lining 8 fits tightly on housing 7, is used for fluid partitioning 9 and directly contacts with housing.
Such design is in order to solve when temperature changes, and can cause liquid volume different, and the technical problem of the systematic error that causes.In order to compensate the caused error of this thermal distortion, the change in volume of the pore compensation liquid in the lining 10 makes the volume of whole balancing mass body bigger variation can not take place or eliminate this variation.
The balancing mass body that the present invention proposes, under the situation of equal in quality, volume is little, and conserve space is practiced thrift case material, practices thrift to produce to rise this.And highdensity liquid damping is big, and better separating vibration, even complete separating vibration is to guarantee the stability of basic framework.Balancing mass body provided by the present invention can also reduce the influence of temperature variation for himself volume, reduces systematic error.
Though the present invention discloses as above with preferred embodiment, so it is not in order to limit the present invention.Have common knowledge the knowledgeable in the technical field under the present invention, do not breaking away from the spirit and scope of the present invention, when doing various changes and retouching.Therefore, protection scope of the present invention is as the criterion when looking claims person of defining.
Claims (6)
1. a balancing mass body is characterized in that, comprising:
Housing; And
Liquid is full of in the said housing,
Wherein said density of liquid is more than or equal to 13.6g/cm
3
2. balancing mass body according to claim 1 is characterized in that, also comprises:
Lining fits tightly said housing and coats said liquid, isolates said housing and contacts with said liquid.
3. balancing mass body according to claim 2 is characterized in that wherein said lining is a resilient bushing, has a plurality of pores.
4. according to the described balancing mass body of claim 3, it is characterized in that wherein said lining is an organic polymer material.
5. balancing mass body according to claim 1; It is characterized in that; Said balancing mass body is used for vibration-damped table; Wherein vibration-damped table comprises basic framework and work stage, and said work stage is connected in said basic framework movably, and said balancing mass body is arranged between said basic framework and the said work stage.
6. balancing mass body according to claim 1 is characterized in that, wherein said liquid is liquid mercury.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105925388A CN102537207A (en) | 2010-12-16 | 2010-12-16 | Balance mass body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105925388A CN102537207A (en) | 2010-12-16 | 2010-12-16 | Balance mass body |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102537207A true CN102537207A (en) | 2012-07-04 |
Family
ID=46344886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010105925388A Pending CN102537207A (en) | 2010-12-16 | 2010-12-16 | Balance mass body |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102537207A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104753011A (en) * | 2015-04-07 | 2015-07-01 | 王艳华 | Anti-vibration hammer for high-voltage transmission line |
| CN112576457A (en) * | 2019-09-27 | 2021-03-30 | 北京金风科创风电设备有限公司 | Frequency modulation damper, wind generating set and frequency modulation method of frequency modulation damper |
| CN112576458A (en) * | 2019-09-27 | 2021-03-30 | 北京金风科创风电设备有限公司 | Frequency modulation damper, wind generating set and frequency modulation method of frequency modulation damper |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54147377A (en) * | 1978-05-09 | 1979-11-17 | Brother Ind Ltd | Method of fabricating equilibrium ring |
| CN87214285U (en) * | 1987-10-12 | 1988-06-08 | 许卫星 | Vibration-eliminating boring lever |
| SU1439322A1 (en) * | 1987-03-23 | 1988-11-23 | Центр Методологии Изобретательства | Vibration damper |
| CN101290477A (en) * | 2008-05-20 | 2008-10-22 | 上海微电子装备有限公司 | Balancing damping station |
| US20100051778A1 (en) * | 2008-09-03 | 2010-03-04 | Albert Taan Wu | Controlled Space with Anti-Shock Function for Automotive Electronics |
-
2010
- 2010-12-16 CN CN2010105925388A patent/CN102537207A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54147377A (en) * | 1978-05-09 | 1979-11-17 | Brother Ind Ltd | Method of fabricating equilibrium ring |
| SU1439322A1 (en) * | 1987-03-23 | 1988-11-23 | Центр Методологии Изобретательства | Vibration damper |
| CN87214285U (en) * | 1987-10-12 | 1988-06-08 | 许卫星 | Vibration-eliminating boring lever |
| CN101290477A (en) * | 2008-05-20 | 2008-10-22 | 上海微电子装备有限公司 | Balancing damping station |
| US20100051778A1 (en) * | 2008-09-03 | 2010-03-04 | Albert Taan Wu | Controlled Space with Anti-Shock Function for Automotive Electronics |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104753011A (en) * | 2015-04-07 | 2015-07-01 | 王艳华 | Anti-vibration hammer for high-voltage transmission line |
| CN106848972A (en) * | 2015-04-07 | 2017-06-13 | 杨佳雯 | A kind of damper for ultra-high-tension power transmission line |
| CN106936107A (en) * | 2015-04-07 | 2017-07-07 | 李乔利 | A kind of anti-vibration hammer for high-voltage power transmission lines |
| CN112576457A (en) * | 2019-09-27 | 2021-03-30 | 北京金风科创风电设备有限公司 | Frequency modulation damper, wind generating set and frequency modulation method of frequency modulation damper |
| CN112576458A (en) * | 2019-09-27 | 2021-03-30 | 北京金风科创风电设备有限公司 | Frequency modulation damper, wind generating set and frequency modulation method of frequency modulation damper |
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Application publication date: 20120704 |