CN204221489U - Linear electric motors are the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether - Google Patents

Linear electric motors are the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether Download PDF

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Publication number
CN204221489U
CN204221489U CN201420723980.3U CN201420723980U CN204221489U CN 204221489 U CN204221489 U CN 204221489U CN 201420723980 U CN201420723980 U CN 201420723980U CN 204221489 U CN204221489 U CN 204221489U
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platform
grand
micro
stator
electric motors
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Chinese (zh)
Inventor
白有盾
杨志军
陈新
王梦
高健
李涵雄
李成祥
王江龙
黄宇涵
刘浩文
余明峰
李振新
钟裕导
刘伟光
杨海东
管贻生
陈新度
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Guangdong University of Technology
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Guangdong University of Technology
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Abstract

The utility model proposes a kind of linear electric motors grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, comprise X/Y to pedestal, X/Y direction guiding rail, slide block, U-shaped linear motor stator electric, grand mover, fine motion mover and grand micro-unified platform.Described macro-moving stage and described micromotion platform are connected by elastic component and form unified platform, be arranged on X to the stator of pedestal be macro-moving stage mover with control the mover of micromotion platform X to micromotion and share, Y-direction carries out accurate displacement compensation by piezoelectric ceramics or decoupling zero voice coil motor, when grand fine motion drives simultaneously, overall high-speed motion on a large scale can be realized; When there is movement warp, micromotion platform, because inertia is little, without friction, realize accurate displacement output by elastic deformation, can drives separately and realize high frequency motion deviation compensation.Controlled by compound motion, two-dimensional high speed precise motion can be realized, install and use mode consistent with traditional platform, conveniently apply.

Description

Linear electric motors are the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether
Technical field
The utility model relates to precision movement platform, particularly relates to the linear electric motors grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether.
Background technology
Along with the progress of science and technology, the requirement of people to product is more and more higher, impel the requirement on machining accuracy of manufacturer to product also more and more higher, in existing equipment, the stroke of feeding with high precision motion platform is general shorter, and the precision of the common grand sports equipment of Long Distances cannot practical requirement, if adopt special large stroke and high precision sports equipment, the manufacturing cost of product will significantly increase.For above-mentioned present situation, a kind ofly the micromotion phase compound of the grand motion of Long Distances general precision and the little stroke of high accuracy can be realized large stroke and high precision feeding, and there is the favor that multidirectional motion platform is more and more subject to industry.
Utility model content
The purpose of this utility model is to propose the linear electric motors grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, adopts and shares the feeding that stator realizes the large stroke and high precision of two-dimentional macro/micromotion.
For reaching this object, the utility model by the following technical solutions:
Linear electric motors are the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, comprises X to pedestal, Y-direction pedestal and unified platform;
Described unified platform comprises grand dynamic outside framework and micromotion platform, described micromotion platform comprises X to microfluidic platform, X to shell fragment group, Y-direction microfluidic platform, Y-direction shell fragment group and Y-direction micro-move device, there is flexible described X and be arranged at the both sides of described X to microfluidic platform to shell fragment group, its one end is connected to the madial wall of described grand dynamic outside framework, and the other end is connected to described X to microfluidic platform; Have the both sides that flexible described Y-direction shell fragment group is arranged at described Y-direction microfluidic platform, its one end is connected to the madial wall of described X to microfluidic platform, and the other end is connected to described Y-direction microfluidic platform; Described X is mutually vertical with Y-direction shell fragment group to shell fragment group, and the workbench for place work piece is rigidly connected in described Y-direction microfluidic platform;
Described X is provided with X direction guiding rail, X to slide block and X to U-shaped linear electric motors to pedestal, described X to slide block slidably in described X direction guiding rail, described X comprises X to stator, grand dynamic outside framework mover, X to micromotion platform mover and connector to U-shaped linear electric motors, and X shares same described X to stator to motion and X to micromotion;
Described grand dynamic outside framework is fixedly installed in described X to slide block, and be connected to described grand dynamic outside framework mover by described connector, to control it to micromotion platform mover and described X to stator by described grand dynamic outside framework mover, described X and slide on described X direction guiding rail and realize X to grand motion;
Described X is fixed on described X to micromotion platform mover to microfluidic platform by described connector, and by described X to micromotion platform mover control its described X to stator X to micromotion;
Described Y-direction micro-move device comprises Y-direction micro-move device mover and Y-direction micro-move device stator, described Y-direction micro-move device stator is fixed on described X to microfluidic platform, described Y-direction micro-move device mover connects described Y-direction microfluidic platform, and described Y-direction microfluidic platform controls its micromotion in Y-direction by described Y-direction micro-move device;
Described Y-direction pedestal is provided with Y-direction guide rail, Y-direction slide block and the U-shaped linear electric motors of Y-direction, described Y-direction slide block is slidably in described Y-direction guide rail, and described X controls it by the U-shaped linear electric motors of described Y-direction to the middle part of pedestal and slides on described Y-direction guide rail by being fixed on described Y-direction slide block and realize the grand motion of Y-direction.
Illustrate further, described grand dynamic outside framework mover is provided with two, is separately positioned on the two ends of the direction of feed of described grand dynamic outside framework.
Illustrate further, described X is integral type structure to microfluidic platform, described X to shell fragment group, described Y-direction microfluidic platform, described Y-direction shell fragment group, described workbench and described grand dynamic outside framework.
Illustrate further, described X is to respective shell fragment in shell fragment group and Y-direction shell fragment group and is arranged in parallel, and the length direction of shell fragment is respectively perpendicular to the direction of feed of X to microfluidic platform and Y-direction microfluidic platform.
Illustrate further, described grand dynamic outside framework is provided with X to groove at itself and described X to the connection of shell fragment group, makes the inner side of described grand dynamic outside framework form thinner deformable X to microfluidic platform elastic component.
Illustrate further, described grand dynamic outside framework is provided with and regulates X to the X of microfluidic platform resilient member deforms degree to frequency adjustment mechanism.
Illustrate further, described X is through the bolt of described X to groove to frequency adjustment mechanism, and its two ends are connected to the both sides of described X to groove.
Illustrate further, described Y-direction microfluidic platform within it corner is provided with the embedded hole slot of circular arc.
Illustrate further, be respectively arranged with X to displacement transducer and Y-direction displacement transducer at described X to the end of the direction of feed of microfluidic platform and described Y-direction microfluidic platform.
Illustrate further, described X is differential capacitance sensor or photoelectric sensor to displacement transducer or described Y-direction displacement transducer, and described Y-direction micro-move device is piezoelectric ceramic actuator or voice coil motor.
The utility model proposes a kind of linear electric motors grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, comprise X/Y to pedestal, X/Y direction guiding rail, slide block, U-shaped linear motor stator electric, grand mover, fine motion mover and grand micro-unified platform.Described macro-moving stage and described micromotion platform are connected by elastic component and form unified platform, be arranged on X to the stator of pedestal be macro-moving stage mover with control the mover of micromotion platform X to micromotion and share, Y-direction carries out accurate displacement compensation by piezoelectric ceramics or decoupling zero voice coil motor, when grand fine motion drives simultaneously, overall high-speed motion on a large scale can be realized; When there is movement warp, micromotion platform, because inertia is little, without friction, realize accurate displacement output by elastic deformation, can drives separately and realize high frequency motion deviation compensation.Controlled by compound motion, two-dimensional high speed precise motion can be realized, install and use mode consistent with traditional platform, conveniently apply.
The beneficial effects of the utility model: 1, X shares same stator to grand motion and X to micromotion, structure is simple, and the driving force provided is larger, and load capacity is also larger, and more enterprise accepts; 2, grand dynamic outside framework and the integrated platform of micromotion platform, obtained through the mode such as milling, spark machined by whole block material, avoid the rigging error of part, can improve Platform movement precision; 3, the motion platform of two-dimensions directly overlaps at middle part, and good rigidity is applicable to working space among a small circle.
Accompanying drawing explanation
Fig. 1 is the structural representation of an embodiment of the present utility model;
Fig. 2 is the fractionation structural representation of an embodiment of the present utility model;
Fig. 3 is the structural representation of the micromotion platform of an embodiment of the present utility model.
Wherein: X is to pedestal 1, Y-direction pedestal 2, unified platform 3, grand dynamic outside framework 31, micromotion platform 4, X is to microfluidic platform 41, X is to shell fragment group 42, Y-direction microfluidic platform 43, Y-direction shell fragment group 44, Y-direction micro-move device 45, X is to displacement transducer 46, Y-direction displacement transducer 47, X direction guiding rail 11, X is to slide block 12, X is to U-shaped linear electric motors 13, X is to stator 131, grand dynamic outside framework mover 132, X is to micromotion platform mover 133, connector 134, Y-direction guide rail 21, Y-direction slide block 22, the U-shaped linear electric motors 23 of Y-direction, X is to groove 311, X is to microfluidic platform elastic component 312, hole slot 431.
Detailed description of the invention
The technical solution of the utility model is further illustrated by detailed description of the invention below in conjunction with accompanying drawing.
As shown in Figure 1 or 2, linear electric motors are the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, comprises X to pedestal 1, Y-direction pedestal 2 and unified platform 3;
Described unified platform 3 comprises grand dynamic outside framework 31 and micromotion platform 4, as shown in Figure 3, described micromotion platform 4 comprises X to microfluidic platform 41, X to shell fragment group 42, Y-direction microfluidic platform 43, Y-direction shell fragment group 44 and Y-direction micro-move device 45, there is flexible described X and be arranged at the both sides of described X to microfluidic platform 41 to shell fragment group 42, its one end is connected to the madial wall of described grand dynamic outside framework 31, and the other end is connected to described X to microfluidic platform 41; Have the both sides that flexible described Y-direction shell fragment group 44 is arranged at described Y-direction microfluidic platform 43, its one end is connected to the madial wall of described X to microfluidic platform 41, and the other end is connected to described Y-direction microfluidic platform 43; Described X is mutually vertical with Y-direction shell fragment group 44 to shell fragment group 42, and the workbench for place work piece is rigidly connected in described Y-direction microfluidic platform 43;
Described X is provided with X direction guiding rail 11, X to slide block 12 and X to U-shaped linear electric motors 13 to pedestal 1, described X to slide block 12 slidably in described X direction guiding rail 11, described X comprises X to U-shaped linear electric motors 13 and shares same described X to stator 131 to motion and X to micromotion to micromotion platform mover 133 and connector 134, X to stator 131, grand dynamic outside framework mover 132, X;
Described grand dynamic outside framework 31 is fixedly installed in described X to slide block 12, and be connected to described grand dynamic outside framework mover 132 by described connector 134, to control it to micromotion platform mover 133 and described X to stator 121 by described grand dynamic outside framework mover 132, described X and slide on described X direction guiding rail 11 and realize X to grand motion;
Described X is fixed on described X to micromotion platform mover 133 to microfluidic platform 41 by described connector 134, and by described X to micromotion platform mover 133 control its described X to stator 131 X to micromotion;
Described Y-direction micro-move device 45 comprises Y-direction micro-move device mover and Y-direction micro-move device stator, described Y-direction micro-move device stator is fixed on described X to microfluidic platform 41, described Y-direction micro-move device mover connects described Y-direction microfluidic platform 43, and described Y-direction microfluidic platform 43 controls its micromotion in Y-direction by described Y-direction micro-move device 45;
Described Y-direction pedestal 2 is provided with the U-shaped linear electric motors 23 of Y-direction guide rail 21, Y-direction slide block 22 and Y-direction, described Y-direction slide block 22 is slidably in described Y-direction guide rail 21, and described X controls it by the U-shaped linear electric motors of described Y-direction 23 to the middle part of pedestal 1 and slides on described Y-direction guide rail 21 by being fixed on described Y-direction slide block 22 and realize the grand motion of Y-direction.
Based on the two-dimentional macro/micromotion that U-shaped linear electric motors realize, can the range of movement of Long Distances, inertia is little, fast response time, comprising the adjustment of the grand motion Long Distances to grand dynamic outside framework 31, also comprise simultaneously and on micromotion, precision positioning is realized to micromotion platform 4, make the utility model linear electric motors be total to the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator and can realize on a large scale and running fix accurately.Controller sends displacement commands to grand dynamic outside framework 31 and micromotion platform 4, the integrated design of grand dynamic outside framework 31 and micromotion platform 4, grand dynamic outside framework 31 is made to realize moving to desired location to together with drive micromotion platform 4 while the grand motion of the two dimension of Y-direction at X under the drive of the U-shaped linear electric motors of Y-direction pedestal 2 to pedestal 1 at X, power is provided to realize high-speed motion together by multiple mover, the driving force provided is larger, load capacity is also larger, when micromotion platform 4 arrives desired location, controller sends signal to X to micromotion platform mover 133 and Y-direction micro-move device 45, micromotion platform 4 Active and Real-time is driven to compensate the relative desired location X of grand dynamic outside framework 31 to the fluctuation with Y-direction displacement, until the workpiece being placed on workbench arrives desired location, realize the high dynamic accuracy that linear electric motors are total to the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator.Grand micro-two-dimensional stage directly overlaps, good rigidity.
Grand dynamic outside framework mover 132 and X share same stator 131 to micromotion platform mover 133, and structure is simple, reduce the quality of micromotion platform, larger driving force can be produced, improve load capacity, and grand micro-complex method there is not difference with traditional machine tool in practical, more industry accepted.Grand dynamic outside framework 31 forms unified platform with described micromotion platform 4, is obtained, avoids the rigging error of part, can improve Platform movement precision by whole block material through the mode such as milling, spark machined.
Illustrate further, described grand dynamic outside framework mover 132 is provided with two, is separately positioned on the two ends of the direction of feed of described grand dynamic outside framework 31.Micromotion platform 4 is arranged on the frame mid portion of grand dynamic outside framework 31, is therefore provided with two grand dynamic outside framework movers 132, is separately positioned on the two ends of the direction of feed of grand dynamic outside framework 31, makes the stressed more balanced of grand dynamic outside framework 31, and response is faster, more stable.
Illustrate further, described X is integral type structure to microfluidic platform 41, described X to shell fragment group 42, described Y-direction microfluidic platform 43, described Y-direction shell fragment group 44, described workbench and described grand dynamic outside framework 31.The integrated design of grand dynamic outside framework 31 and micromotion platform 4, compact conformation, is obtained through the mode such as milling, spark machined by whole block material, avoids the rigging error of part, can improve Platform movement precision.
Illustrate further, described X is to respective shell fragment in shell fragment group 42 and Y-direction shell fragment group 44 and is arranged in parallel, and the length direction of shell fragment is respectively perpendicular to the direction of feed of X to microfluidic platform 42 and Y-direction microfluidic platform 43.The X be arranged in parallel separately motion in two dimension to shell fragment group 42 and the effective spacing micromotion platform 4 of Y-direction shell fragment group 44, under the restraining function of described X to shell fragment group 42 and Y-direction shell fragment group 44, the workbench on described micromotion platform 4 is suppressed in the motion of non-direction of feed.
Illustrate further, described grand dynamic outside framework 31 is provided with X to groove 311 at itself and described X to the connection of shell fragment group 42, makes the inner side of described grand dynamic outside framework 31 form thinner deformable X to microfluidic platform elastic component 312.Be provided with deformable X to microfluidic platform elastic component 312, make micromotion platform 4 have dynamic adjustable at structural natural frequencies.
Illustrate further, described grand dynamic outside framework 31 is provided with and regulates X to the X of microfluidic platform elastic component 312 degree of deformation to frequency adjustment mechanism 313.Change X by X to frequency adjustment mechanism 313 and can to change mechanism's intrinsic frequency in above-mentioned micromotion to the tightness of shell fragment group 42, thus change the kinetic characteristic of micromotion platform 4.
Illustrate further, described X is through the bolt of described X to groove 311 to frequency adjustment mechanism 313, and its two ends are connected to the both sides of described X to groove 311.Described bolt can produce displacement by manual adjustments length direction, changes the degree of deformation of X to microfluidic platform elastic component 312, and then changes X to the shell fragment tensile force of shell fragment group 42, realizes the dynamic conditioning of the structural natural frequencies to micromotion platform 4.
Illustrate further, described Y-direction microfluidic platform 43 within it corner is provided with the embedded hole slot 431 of circular arc.Above-mentioned hole slot 431 arranges the shell fragment tensile force that frequency regulation arrangement that object is to ensure in the utility model can regulate Y-direction shell fragment group 44 preferably.
Illustrate further, be respectively arranged with X to displacement transducer 46 and Y-direction displacement transducer 47 at described X to the end of the direction of feed of microfluidic platform 42 and described Y-direction microfluidic platform 43.For described detection X to microfluidic platform 42 and Y-direction microfluidic platform 43 at X to the micrometric displacement with Y-direction.
Illustrate further, described X is differential capacitance sensor or photoelectric sensor to displacement transducer 46 or described Y-direction displacement transducer 47.Differential capacitance sensor mechanical displacement is few, and precision is high, and anti-interference is better, and photoelectric sensor has the advantages such as precision is high, reaction is fast, noncontact, and structure is simple, and volume is little, all can be used as the selection of displacement transducer.Described Y-direction micro-move device is piezoelectric ceramic actuator or voice coil motor.
Below know-why of the present utility model is described in conjunction with specific embodiments.These describe just in order to explain principle of the present utility model, and can not be interpreted as the restriction to the utility model protection domain by any way.Based on explanation herein, those skilled in the art does not need to pay performing creative labour can associate other detailed description of the invention of the present utility model, and these modes all will fall within protection domain of the present utility model.

Claims (10)

1. the linear electric motors grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, is characterized in that: comprise X to pedestal, Y-direction pedestal and unified platform;
Described unified platform comprises grand dynamic outside framework and micromotion platform, described micromotion platform comprises X to microfluidic platform, X to shell fragment group, Y-direction microfluidic platform, Y-direction shell fragment group and Y-direction micro-move device, there is flexible described X and be arranged at the both sides of described X to microfluidic platform to shell fragment group, its one end is connected to the madial wall of described grand dynamic outside framework, and the other end is connected to described X to microfluidic platform; Have the both sides that flexible described Y-direction shell fragment group is arranged at described Y-direction microfluidic platform, its one end is connected to the madial wall of described X to microfluidic platform, and the other end is connected to described Y-direction microfluidic platform; Described X is mutually vertical with Y-direction shell fragment group to shell fragment group, and the workbench for place work piece is rigidly connected in described Y-direction microfluidic platform;
Described X is provided with X direction guiding rail, X to slide block and X to U-shaped linear electric motors to pedestal, described X to slide block slidably in described X direction guiding rail, described X comprises X to stator, grand dynamic outside framework mover, X to micromotion platform mover and connector to U-shaped linear electric motors, and X shares same described X to stator to motion and X to micromotion;
Described grand dynamic outside framework is fixedly installed in described X to slide block, and be connected to described grand dynamic outside framework mover by described connector, to control it to micromotion platform mover and described X to stator by described grand dynamic outside framework mover, described X and slide on described X direction guiding rail and realize X to grand motion;
Described X is connected and fixed to micromotion platform mover to microfluidic platform by described connector and described X, and by described X to micromotion platform mover control its described X to stator place X to micromotion;
Described Y-direction micro-move device comprises Y-direction micro-move device mover and Y-direction micro-move device stator, described Y-direction micro-move device stator is fixed on described X to microfluidic platform, described Y-direction micro-move device mover connects described Y-direction microfluidic platform, and described Y-direction microfluidic platform controls its micromotion in Y-direction by described Y-direction micro-move device;
Described Y-direction pedestal is provided with Y-direction guide rail, Y-direction slide block and the U-shaped linear electric motors of Y-direction, described Y-direction slide block is slidably in described Y-direction guide rail, and described X slides on described Y-direction guide rail to the middle part of pedestal realize the grand motion of Y-direction by being fixed on described Y-direction slide block and controlling it by the U-shaped linear electric motors of described Y-direction.
2. the linear electric motors according to claim 1 grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, is characterized in that: described grand dynamic outside framework mover is provided with two, is separately positioned on the two ends of the direction of feed of described grand dynamic outside framework.
3. the linear electric motors according to claim 1 grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, is characterized in that: described X is integral type structure to microfluidic platform, described X to shell fragment group, described Y-direction microfluidic platform, described Y-direction shell fragment group, described workbench and described grand dynamic outside framework.
4. the linear electric motors according to claim 1 grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, it is characterized in that: described X is to respective shell fragment in shell fragment group and Y-direction shell fragment group and is arranged in parallel, and the length direction of shell fragment is respectively perpendicular to the direction of feed of X to microfluidic platform and Y-direction microfluidic platform.
5. the linear electric motors according to claim 1 grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, it is characterized in that: described grand dynamic outside framework is provided with X to groove at itself and described X to the connection of shell fragment group, makes the inner side of described grand dynamic outside framework form thinner deformable X to microfluidic platform elastic component.
6. the linear electric motors according to claim 5 grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, is characterized in that: described grand dynamic outside framework is provided with and regulates X to the X of microfluidic platform resilient member deforms degree to frequency adjustment mechanism.
7. the linear electric motors according to claim 6 grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, is characterized in that: described X is through the bolt of described X to groove to frequency adjustment mechanism, and its two ends are connected to the both sides of described X to groove.
8. the linear electric motors according to claim 1 grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, is characterized in that: described Y-direction microfluidic platform within it corner is provided with the embedded hole slot of circular arc.
9. the linear electric motors according to claim 1 altogether grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator, is characterized in that: be respectively arranged with X to displacement transducer and Y-direction displacement transducer at described X to the end of the direction of feed of microfluidic platform and described Y-direction microfluidic platform.
10. the linear electric motors according to claim 9 grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether, it is characterized in that: described X is differential capacitance sensor or photoelectric sensor to displacement transducer or described Y-direction displacement transducer, and described Y-direction micro-move device is piezoelectric ceramic actuator or voice coil motor.
CN201420723980.3U 2014-11-26 2014-11-26 Linear electric motors are the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether Withdrawn - After Issue CN204221489U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104440344A (en) * 2014-11-26 2015-03-25 广东工业大学 Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor
CN108173408A (en) * 2018-01-18 2018-06-15 苏州大学 A kind of Three Degree Of Freedom locating platform

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104440344A (en) * 2014-11-26 2015-03-25 广东工业大学 Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor
CN108173408A (en) * 2018-01-18 2018-06-15 苏州大学 A kind of Three Degree Of Freedom locating platform
CN108173408B (en) * 2018-01-18 2023-10-24 苏州大学 Three-degree-of-freedom positioning platform

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