CN202771265U - Large stroke and high precision microchecker - Google Patents
Large stroke and high precision microchecker Download PDFInfo
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- CN202771265U CN202771265U CN 201220468603 CN201220468603U CN202771265U CN 202771265 U CN202771265 U CN 202771265U CN 201220468603 CN201220468603 CN 201220468603 CN 201220468603 U CN201220468603 U CN 201220468603U CN 202771265 U CN202771265 U CN 202771265U
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- 239000000919 ceramic Substances 0.000 claims description 12
- 238000004891 communication Methods 0.000 claims description 12
- 238000004556 laser interferometry Methods 0.000 claims description 11
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
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- Details Of Measuring And Other Instruments (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
A large stroke and high precision microchecker is provided. The microchecker is characterized in that the microchecker comprises a macro motion part, a micro motion part and a micro computer control device, the macro motion part comprises a linear guide rail, a macro motion bench driven by a precision ball screw mechanism, and a grating measuring device, the micro motion part comprises a micro motion driving mechanism arranged on the macro motion bench, a workpiece fixing device driven by the micro motion driving mechanism and a laser interference measuring instrument, an electric signal output end of the grating measuring device and an electric signal output end of the laser interference measuring instrument are respectively connected with an electric signal input of the micro computer control device, and a control electric signal output end of the micro computer control device is respectively connected with a control electric signal input end of the precision ball screw mechanism and a control electric signal input end of the micro motion driving mechanism. compared with the prior art, displacement capable of outputting nanometer magnitude is realized, the driving force and the motion scope are large, resolution ratio and control precision are high, and micro positioning can be conveniently realized.
Description
Technical field
The utility model relates to a kind of micromotion platform device.
Background technology
From last century end, manufacturing technology is towards ultraprecise, microminiaturized direction, biotechnology is towards genome analysis direction and microelectric technique towards ultra-large integrated-type future development, these fields have proposed Secretary to inching gear, it is the accurately displacement of output nanometer magnitude of micropositioner, and large as far as possible driving force and range of movement will be arranged, high resolution and control accuracy are arranged, thereby can realize easily microposition and nano measurement.
At present, the most dependence on import of the employed micropositioner of China manufacturing enterprise and scientific research institutions, expensive, maintenance and inconvenient debugging, and the shortcoming such as the micropositioner ubiquity precision that domestic design is produced is low, range of application is narrow, so market share is not high, is difficult to a large amount of the input and uses.
Summary of the invention
Goal of the invention of the present utility model is to adapt to the needs of Precision Machining manufacturing and location, in conjunction with correlation techniques such as machinery, electronics, optical measurement, Based Intelligent Control, design a kind of displacement of energy output nanometer magnitude, possess larger driving force and range of movement, high resolution and control accuracy can realize the large stroke of microposition, high-precision micropositioner easily.
The utility model is achieved in that and comprises grand motion parts, the micromotion part, micro-computer controlling apparatus, grand motion parts comprises line slideway, grand moving platform by the drive of precision ball screw mechanism, the grating measuring device, micromotion partly comprises the fine motion driving mechanism that is arranged on the grand moving platform, workpiece fixing apparatus by the drive of fine motion driving mechanism, the laser interferometry instrument, the electric signal output of grating measuring device, the electric signal output of laser interferometry instrument links to each other with the electric signal input of micro-computer controlling apparatus respectively, and the control electric signal output of micro-computer controlling apparatus is inputted with the control electric signal of precision ball screw mechanism respectively, the control electric signal input of fine motion driving mechanism links to each other.
During use, workpiece is mounted to the workpiece fixing apparatus, and micro-computer controlling apparatus sends movement instruction, the AC servo motor running in the control precision ball screw mechanism, the rotation of motor will make grand moving platform do the straight-line feed motion, thereby realize the function of the large stroke of workpiece fixing apparatus.The actual displacement of grand moving platform records through the grating measuring device, returns to micro-computer controlling apparatus, forms closed-loop control, and control algolithm will adopt intelligent PID algorithm, to improve kinematic accuracy.The motion of workpiece fixing apparatus also is the instruction of sending according to computing machine, after micro-computer controlling apparatus is processed, realize workpiece fixing apparatus nanoscale straight-line feed or rotation by the fine motion driving mechanism again, its actual micrometric displacement is recorded by the laser interferometry instrument, and be back to micro-computer controlling apparatus, carry out error compensation, reach the purpose of closed-loop control.
Here, the fine motion driving mechanism comprises the Three Degree Of Freedom mobile unit that is arranged on more than the cover of three on the grand moving platform, three cover fine motion propulsion system, the Three Degree Of Freedom mobile unit comprises the guide groove that is fixed on the grand moving platform, be slidingly arranged in intermediate member on the guide groove by the first guide rail, rotation is arranged on the rotating disk on the intermediate member, be arranged on the second guide rail on the rotating disk, be slidingly arranged in pedestal on the second guide rail by guide groove, the second guide rail is mutually vertical with the first guide rail, wherein the first guide rail of two adjacent Three Degree Of Freedom mobile units is parallel to each other, and perpendicular to the first guide rail of other Three Degree Of Freedom mobile unit, the fine motion propulsion system comprise the column that is fixed on the grand moving platform, be arranged on the piezoelectric ceramics between column and intermediate member.The Three Degree Of Freedom mobile unit is polygon and distributes, and the quantity on polygonal limit is identical with the quantity of Three Degree Of Freedom mobile unit.
During work, by the different stroke of the piezoelectric ceramics on the three cover fine motion propulsion system, realize the micromotions such as the moving forward and backward of workpiece fixing apparatus, move left and right, rotation.
Here, for convenient control, micro-computer controlling apparatus comprises the PC controller, grand motion control board, the micromotion control panel, the electric signal output of grating measuring device, the electric signal output of laser interferometry instrument is inputted with the electric signal of grand motion control board respectively, the electric signal input of micromotion control panel links to each other, the control electric signal output of grand motion control board, the output of the control electric signal of micromotion control panel respectively with precision ball screw mechanism on the control electric signal input of servo driving plate, the input of the control electric signal of the piezoelectric ceramic actuator on the piezoelectric ceramics links to each other, the electrical signal communication end of PC controller respectively with the electrical signal communication end of grand motion control board, the electrical signal communication end of micromotion control panel links to each other.
Here, be connected with flexible, hinged at intermediate member and grand moving interstation.Adopt flexible, hinged, intermediate member stably is arranged on the grand moving platform, simultaneously, can carry out little movement in certain amplitude again.
The utility model compared with the prior art, have can output nanometer the displacement of magnitude, possess larger driving force and range of movement, high resolution and control accuracy can realize the advantage of microposition easily.
Description of drawings
Fig. 1 is the systematic schematic diagram of the utility model micropositioner;
Fig. 2 is the structural representation of fine motion driving mechanism;
Fig. 3 is the structural representation of Three Degree Of Freedom mobile unit
Embodiment:
Now in conjunction with the accompanying drawings and embodiments the utility model is done and is described in further detail:
The utility model comprises grand motion parts 1, micromotion part 2, micro-computer controlling apparatus 3, grand motion parts 1 comprises line slideway 4, grand moving platform 6 by 5 drives of precision ball screw mechanism, grating measuring device 7, micromotion part 2 comprises the fine motion driving mechanism 8 that is arranged on the grand moving platform 6, workpiece fixing apparatus 9 by 8 drives of fine motion driving mechanism, laser interferometry instrument 10, the electric signal output of grating measuring device 7, the electric signal output of laser interferometry instrument 10 links to each other with the electric signal input of micro-computer controlling apparatus 3 respectively, and the control electric signal output of micro-computer controlling apparatus 3 is inputted with the control electric signal of precision ball screw mechanism 5 respectively, the control electric signal input of fine motion driving mechanism 8 links to each other.
Fine motion driving mechanism 8 comprises that being arranged on three on the grand moving platform 6 overlaps Three Degree Of Freedom mobile unit 11, three cover fine motion propulsion system 12, Three Degree Of Freedom mobile unit 11 comprises the guide groove 13 that is fixed on the grand moving platform 6, be slidingly arranged in intermediate member 15 on the guide groove 13 by the first guide rail 14, rotation is arranged on the rotating disk 16 on the intermediate member 15, be arranged on the second guide rail 17 on the rotating disk 16, be slidingly arranged in pedestal 19 on the second guide rail 17 by guide groove 18, the second guide rail 17 is mutually vertical with the first guide rail 14, three cover Three Degree Of Freedom mobile units (equilateral triangle) triangular in shape distribute, wherein the first guide rail 14 of two adjacent Three Degree Of Freedom mobile unit 11a is parallel to each other, and perpendicular to the first guide rail 14 of other Three Degree Of Freedom mobile unit 11b, fine motion propulsion system 12 comprise the column 20 that is fixed on the grand moving platform 6, be arranged on the piezoelectric ceramics 21 of 15 of column 20 and intermediate members.Be connected with flexible, hinged 22 at intermediate member 15 and 6 of grand moving platforms.
Micro-computer controlling apparatus 3 comprises PC controller 23, grand motion control board 24, micromotion control panel 25, the electric signal output of grating measuring device 7, the electric signal output of laser interferometry instrument 10 is inputted with the electric signal of grand motion control board 24 respectively, the electric signal input of micromotion control panel 25 links to each other, the control electric signal output of grand motion control board 24, the output of the control electric signal of micromotion control panel 25 respectively with precision ball screw mechanism 5 on the control electric signal input of servo driving plate, the input of the control electric signal of the piezoelectric ceramic actuator on the piezoelectric ceramics 21 links to each other, the electrical signal communication end of PC controller 23 respectively with the electrical signal communication end of grand motion control board 24, the electrical signal communication end of micromotion control panel 25 links to each other.
Claims (8)
1. large stroke, high-precision micropositioner, it is characterized in that comprising grand motion parts, the micromotion part, micro-computer controlling apparatus, grand motion parts comprises line slideway, grand moving platform by the drive of precision ball screw mechanism, the grating measuring device, micromotion partly comprises the fine motion driving mechanism that is arranged on the grand moving platform, workpiece fixing apparatus by the drive of fine motion driving mechanism, the laser interferometry instrument, the electric signal output of grating measuring device, the electric signal output of laser interferometry instrument links to each other with the electric signal input of micro-computer controlling apparatus respectively, and the control electric signal output of micro-computer controlling apparatus is inputted with the control electric signal of precision ball screw mechanism respectively, the control electric signal input of fine motion driving mechanism links to each other.
2. large stroke according to claim 1, high-precision micropositioner, it is characterized in that the fine motion driving mechanism comprises the Three Degree Of Freedom mobile unit that is arranged on more than the cover of three on the grand moving platform, three cover fine motion propulsion system, the Three Degree Of Freedom mobile unit comprises the guide groove that is fixed on the grand moving platform, be slidingly arranged in intermediate member on the guide groove by the first guide rail, rotation is arranged on the rotating disk on the intermediate member, be arranged on the second guide rail on the rotating disk, be slidingly arranged in pedestal on the second guide rail by guide groove, the second guide rail is mutually vertical with the first guide rail, wherein the first guide rail of two adjacent Three Degree Of Freedom mobile units is parallel to each other, and perpendicular to the first guide rail of other Three Degree Of Freedom mobile unit, the fine motion propulsion system comprise the column that is fixed on the grand moving platform, be arranged on the piezoelectric ceramics between column and intermediate member.
3. large stroke according to claim 2, high-precision micropositioner is characterized in that the Three Degree Of Freedom mobile unit is polygon and distributes, and the quantity on polygonal limit is identical with the quantity of Three Degree Of Freedom mobile unit.
4. large stroke according to claim 2, high-precision micropositioner is characterized in that the Three Degree Of Freedom mobile unit is three covers, the distribution triangular in shape of three cover Three Degree Of Freedom mobile units.
5. large stroke according to claim 4, high-precision micropositioner is characterized in that three cover Three Degree Of Freedom mobile units are equilateral triangle and distribute.
6. according to claim 1 and 2 or 3 or 4 or 5 described large strokes, high-precision micropositioner, it is characterized in that being connected with flexible, hinged at intermediate member and grand moving interstation.
7. according to claim 1 and 2 or 3 or 4 or 5 described large strokes, high-precision micropositioner, it is characterized in that micro-computer controlling apparatus comprises the PC controller, grand motion control board, the micromotion control panel, the electric signal output of grating measuring device, the electric signal output of laser interferometry instrument is inputted with the electric signal of grand motion control board respectively, the electric signal input of micromotion control panel links to each other, the control electric signal output of grand motion control board, the output of the control electric signal of micromotion control panel respectively with precision ball screw mechanism on the control electric signal input of servo driving plate, the input of the control electric signal of the piezoelectric ceramic actuator on the piezoelectric ceramics links to each other, the electrical signal communication end of PC controller respectively with the electrical signal communication end of grand motion control board, the electrical signal communication end of micromotion control panel links to each other.
8. large stroke according to claim 6, high-precision micropositioner, it is characterized in that micro-computer controlling apparatus comprises the PC controller, grand motion control board, the micromotion control panel, the electric signal output of grating measuring device, the electric signal output of laser interferometry instrument is inputted with the electric signal of grand motion control board respectively, the electric signal input of micromotion control panel links to each other, the control electric signal output of grand motion control board, the output of the control electric signal of micromotion control panel respectively with precision ball screw mechanism on the control electric signal input of servo driving plate, the input of the control electric signal of the piezoelectric ceramic actuator on the piezoelectric ceramics links to each other, the electrical signal communication end of PC controller respectively with the electrical signal communication end of grand motion control board, the electrical signal communication end of micromotion control panel links to each other.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220468603 CN202771265U (en) | 2012-09-14 | 2012-09-14 | Large stroke and high precision microchecker |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220468603 CN202771265U (en) | 2012-09-14 | 2012-09-14 | Large stroke and high precision microchecker |
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| Publication Number | Publication Date |
|---|---|
| CN202771265U true CN202771265U (en) | 2013-03-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201220468603 Expired - Lifetime CN202771265U (en) | 2012-09-14 | 2012-09-14 | Large stroke and high precision microchecker |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102830711A (en) * | 2012-09-14 | 2012-12-19 | 袁庆丹 | Large-stroke and high-precision micro-motion platform |
| CN109580198A (en) * | 2018-12-12 | 2019-04-05 | 上海精密计量测试研究所 | A kind of microswitch automatic detection device |
| CN110375642A (en) * | 2019-07-31 | 2019-10-25 | 北京航空航天大学 | A kind of interferometer piezoelectric ceramic control device and its control method |
-
2012
- 2012-09-14 CN CN 201220468603 patent/CN202771265U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102830711A (en) * | 2012-09-14 | 2012-12-19 | 袁庆丹 | Large-stroke and high-precision micro-motion platform |
| CN109580198A (en) * | 2018-12-12 | 2019-04-05 | 上海精密计量测试研究所 | A kind of microswitch automatic detection device |
| CN110375642A (en) * | 2019-07-31 | 2019-10-25 | 北京航空航天大学 | A kind of interferometer piezoelectric ceramic control device and its control method |
| CN110375642B (en) * | 2019-07-31 | 2020-12-08 | 北京航空航天大学 | A piezoelectric ceramic control device for an interferometer and a control method thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20130306 Effective date of abandoning: 20140716 |
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| RGAV | Abandon patent right to avoid regrant |