CN205166404U - Three -dimensional oval little feed movement platform of piezoelectricity drive - Google Patents
Three -dimensional oval little feed movement platform of piezoelectricity drive Download PDFInfo
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- CN205166404U CN205166404U CN201520919504.3U CN201520919504U CN205166404U CN 205166404 U CN205166404 U CN 205166404U CN 201520919504 U CN201520919504 U CN 201520919504U CN 205166404 U CN205166404 U CN 205166404U
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- flexible hinge
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Abstract
The utility model relates to a three -dimensional oval little feed movement platform of piezoelectricity drive belongs to the complicated machining optical element technical field of ultra -precise cutting process and difficult processing material. Have the mutual symmetric distributions of the flexible hinge of the round flexible hinge of two alignment withs and the two pairs of straight beam types respectively in work piece base and work piece base outer lane both sides, X and the ascending piezoelectric stack in Y axle side pass through piezoelectric stack pretension hole by pretension mounting screw on flexible hinge platform, piezoelectric stack installs on the base through two wedges in the Z axle orientation, the work piece base is at the Z ascending initial height -adjustable in axle side. The utility model discloses utilize flexible hinge platform to accomplish the transmission that the microbit was moved, thus furthest's reduction microbit move in the transmittance process loss in the precision and compensate piezoceramics and feed the shortcoming that the stride is little, three -dimensional oval little feed movement platform movement is level and smooth for the piezoelectricity driven, resolution ratio is high, rigidity is good.
Description
Technical field
The utility model belongs to Ultra-precision machining and the complicated optical effect correction technical field of difficult-to-machine material, particularly relates to a kind of Piezoelectric Driving three-dimensional elliptical Fine Feed motion platform.
Background technology
Accurate, Ultraprecision Machining is the advanced manufacturing technology adapting to Modern High-Tech's development need and grow up.Its comprehensive modern electronic technology, measuring technique and computer technology etc. is indispensable key link in sophisticated technology production development, one of most important part in machinery manufacturing industry especially.No matter it is in national defense and military industrial expansion, or in the construction of national economy, there is its application prospect extremely widely.
High accuracy, high-resolution accurate Fine Feed system occupy extremely important status in sophisticated industry production in modern age and field of scientific study.It is the key link directly affecting precision, Ultra-precision machining level, accurate measurement level and the super large-scale integration level of production.Its all technical is the important symbol of various countries' high technology development level simultaneously.So be very urgent to the research carrying out accurate feeding system, there is very important realistic meaning.Be conducive to reducing the gap with advanced country's same industry, promote the raising of China's precision instrumentation, precision and ultra-precision machining level.Fine Feed technology may be used on various small parts and mould machining, can be applicable to various microcavity mould Milling Process, can be applicable to electronic devices and components processing (processing of such as silicon wafer), can be applicable to Aero-Space precision and to admire the processing etc. of alloy structure part, there is very large market and application, be conducive to the development promoting China's manufacturing technology, promote the research of China's nanometer technology aspect.
A large amount of scientific worker are devoted to the research of Fine Feed technology for many years both at home and abroad, make Fine Feed technology achieve significant progress.The implementation method of Fine Feed is varied, is mainly divided into mechanical type and the large class of electromechanical two.Machine driving adopts accurate transmission mechanism or increases the method for deceleration device, and this is a kind of way of improvement, it can not overcome exist in mechanical mechanism friction, gap, creep in motion and the problem such as resolution ratio is not high.Therefore realize high-precision Fine Feed very difficult, effect is also undesirable.Though adopt the mode of elastic deformation not friction, gap and creep, can only low frequency state be operated in, and need external force to drive due to elastic mechanism, in most of the cases be not easy to control.
In recent years, flexible hinge has become very powerful and exceedingly arrogant topic, because its volume is little, mechanical friction, gapless and autokinesis height become and improved an importance that is accurate, Ultra-precision Turning feed accuracy, started workbench and entered the nano level New Times.
Take piezoelectric ceramics as the Fine Feed technology of driving element be the technology generally used in Ultra-precision Turning.This technology was just successfully applied in ultra precision diamond turning machine transverse feed mechanism as far back as 1975 by 3L laboratory of the U.S. (LaurenceLivermoreNationLaboratory).Within 1984, Japanese E.Kouno devises the Fine Feed system for mismachining tolerance servo compensation.U.S. 3L laboratory S.R.Patterson in 1985 and other people cooperation research and development success fast servo tool, be mainly used in the feeding resolution ratio and the precision that improve super precision lathe.Nineteen ninety Japanese Y.Okazaki publishes an article and describes a kind of novel micro-feeding tool holder, and its structure is more novel, has good performance.Within 1991, American ThomasA.Dowrj proposes a kind of quick knife rest for processing symmetrical centre surface without spin, this knife rest advantage has higher-frequency to ring speed, ThomasA.Dowrj thinks that the quality of knife rest moving component and knife rest rigidity are the principal elements affecting frequency response speed, and this knife rest open loop frequency response speed is better than 2KHz.China also starts the research utilizing Piezoelectric Ceramic microfeed technology the eighties.Within 1985, the Changsha National University of Defense technology have developed piezoelectric ceramics turning Fine Feed system.The micro-feeding tool holder used in turning machining of Harbin Institute of Technology's development, adopts electrostriction ceramics to drive, and supporting tool bit part is a pair elastic membrane, and its stress can be reduced to two fixed end beam and load in centre, and mid portion is rigid body, does not produce distortion.This knife rest adopts integrated structure design, and structure is simple, compact, and volume is little, is easy to control, easy to use.Its range is 5um, feeding resolution ratio 0.02um.
Improving the feed accuracy of lathe, is the problem needing solution at present badly, is the inexorable trend adapting to modern industry processing request, to the competitiveness important in inhibiting improving modern manufacturing industry.So how to improve the machining accuracy of lathe on existing lathe, meet growing requirement on machining accuracy, become a manufacturing key problem.
Summary of the invention
The utility model provides a kind of Piezoelectric Driving three-dimensional elliptical Fine Feed motion platform, thus realizes high accuracy and high-resolution Ultra-precision machining.
The technical scheme that the utility model is taked is: right plate is fixedly connected with base respectively with bottom left plate, flexible hinge platform is connected with above right plate and left plate, straight round flexible hinge one and straight round flexible hinge two one end respectively with the symmetrical both sides being connected to workpiece pedestal of straight round flexible hinge three and straight round flexible hinge four one end, the other end of these four straight round flexible hinges is connected with workpiece pedestal outer ring respectively, straight beam type flexible hinge one and straight beam type flexible hinge two one end respectively with the symmetrical both sides being connected workpiece pedestal outer ring of straight beam type flexible hinge three and straight beam type flexible hinge four one end, the other end of these four straight beam type flexible hinges is connected with flexible hinge platform outer ring respectively, piezoelectric stack in X-direction and the piezoelectric stack in Y direction are respectively by bolt passing hole one, hole two pretension is arranged on flexible hinge platform outer ring, piezoelectric stack top in Z-direction is connected with workpiece pedestal bottom, bottom is connected with wedge block, this wedge block is arranged in fine setting guide rail, the push rod of wedge block is through the fine setting screw on fine setting top board.
The utility model base there is the base fixing hole for jack connection bed.
The utility model workpiece pedestal there is the screw for fixation workpiece.
The piezo-electric effect that the utility model make use of piezoceramic material produces micrometric displacement, because its displacement resolution had is high, volume is little, large feature of exerting oneself, the system that simultaneously can ensure has higher precision, driving force and relative simple control mode.The compact conformation that the utility model utilizes flexible hinge to possess, without wearing and tearing, without the feature of transmission idle running, devise flexible hinge platform to complete the transmission of micrometric displacement, reduce the loss in micrometric displacement transmittance process in precision to greatest extent thus make up the little shortcoming of piezoelectric ceramics feeding stride.By to the piezoelectric stack input signal Direct driver flexible hinge platform on X, Y and Z-direction, make the workpiece be positioned on Fine Feed motion platform produce three-dimensional elliptical movement locus, realize Ultra-precision machining and the complicated optical effect correction of difficult-to-machine material.
The utility model has the advantages that:
(1) the three-dimensional elliptical Fine Feed motion platform motion smoothing of Piezoelectric Driving, resolution ratio is high, good rigidity.Flexible hinge platform of the present utility model is by piezoelectric stack Direct driver, and flexible hinge is as guiding mechanism.
(2) overall flexibility device is flexible hinge motion platform, and overall structure is relatively simple, and be easy to manufacture, the volume of flexible apparatus is little, and quality is little, is easy to the high frequency processing realizing flexible apparatus, reduces owing to assembling the error caused simultaneously.
(3) X carries out pretension by the pretension bolt along respective axis direction respectively to the piezoelectric stack of, Y-direction and Z-direction, and pretension process is all separate, simple and reliable, is easy to realize.
(4) three-dimensional elliptical flexible apparatus of the present utility model is driven by piezoelectric stack, and three-dimensional elliptical can be adjusted by the parameter of piezoelectric stack drive singal, the position of space three-dimensional ellipse, not by the restriction of piezoelectricity configuration mode, can adjust arbitrarily.
(5) in three-dimensional elliptical flexible apparatus of the present utility model, three piezoelectric stacks drive orthogonal, drive independently flexible hinge respectively, there is not coupling each other, can realize the control accuracy that flexible apparatus is higher.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model;
Fig. 2 is the structural representation of the utility model base;
Fig. 3 is the structural representation of the utility model wedge block;
Fig. 4 is the structural representation of the utility model flexible hinge platform;
Fig. 5 is the utility model control block diagram.
Detailed description of the invention
Right plate 23 to be fixedly connected with base 1 respectively with bottom left plate, flexible hinge platform 4 is connected with above right plate 2 and left plate 3, straight round flexible hinge one 401a and straight round flexible hinge two 401b one end respectively with the symmetrical both sides being connected to workpiece pedestal 403 of straight round flexible hinge three 401c and straight round flexible hinge four 401d one end, the other end of these four straight round flexible hinges is connected with workpiece pedestal outer ring 404 respectively
Straight beam type flexible hinge one 402a and straight beam type flexible hinge two 402b one end respectively with the symmetrical both sides being connected workpiece pedestal outer ring 404 of straight beam type flexible hinge three 402c and straight beam type flexible hinge four 402d one end, the other end of these four straight beam type flexible hinges is connected with flexible hinge platform outer ring 407 respectively, piezoelectric stack 501 in X-direction and the piezoelectric stack 502 in Y direction are respectively by bolt passing hole one 4b, hole two 4a pretension is arranged on flexible hinge platform outer ring 407, piezoelectric stack 503 top in Z-direction is connected with workpiece pedestal 403 bottom, bottom is connected with wedge block 6, this wedge block 6 is arranged in fine setting guide rail 103, the push rod of wedge block 6 is through the fine setting screw 101 on fine setting top board 102.
Base there is the base fixing hole 104 for jack connection bed.
Workpiece pedestal 403 there is the screw 406 for fixation workpiece.
During work, by base 1, three-dimensional elliptical Fine Feed motion platform is arranged on lathe, trade union college is on flexible hinge platform, and drive the three-dimensional elliptical producing high frequency to move by three mutually perpendicular piezoelectric stacks, the drive singal of three piezoelectric stacks is as follows:
According to (1) formula, by these three piezoelectric stack drive singal y of active accommodation
1, y
2, y
3initial phase
make the phase difference between each initial phase not be 0, then three-dimensional Fine Feed motion platform will drive the workpiece be located thereon to produce three-dimensional elliptical movement locus.
Fig. 5 shows the control system block diagram of the simplification that the utility model adopts, and wherein mainly includes: several link composition such as PMAC motion controller, piezoelectric stack, flexible hinge platform, micro-displacement sensor.
According to Fig. 1-Fig. 5, the detailed description of the invention of device described in the utility model is as follows:
1. with trip bolt, three-dimensional elliptical Fine Feed motion platform is fixed on lathe by the connection screw on base 1, workpiece to be processed is placed on flexible hinge platform, and by trip bolt, workpiece to be processed is fixed on workpiece pedestal 403, by being positioned at micro-adjusting mechanism on base flexible hinge platform 4 carried out to the adjustment of initial position.
2. apply control signal by driving to three piezoelectric stacks, adjustment piezoelectric stack applies the parameter of signal, makes flexible hinge platform produce desirable space three-dimensional elliptical orbit, carries out Laser Processing.
3. be used for setting and show the shift value that three-dimensional elliptical Fine Feed motion platform wants feeding by PMAC motion controller, motion controller sends signal through power amplifier, pass to piezoelectric stack, piezoelectric stack is made to produce dither, under the effect of three mutually perpendicular piezoelectric stacks, drive micro-feed stage to produce elliptical trajectory, the displacement detected is fed back to motion controller correction by micro-displacement sensor again, until be stabilized within the scope of the control accuracy of setting.
Claims (3)
1. a Piezoelectric Driving three-dimensional elliptical Fine Feed motion platform, it is characterized in that: right plate is fixedly connected with base respectively with bottom left plate, flexible hinge platform is connected with above right plate and left plate, straight round flexible hinge one and straight round flexible hinge two one end respectively with the symmetrical both sides being connected to workpiece pedestal of straight round flexible hinge three and straight round flexible hinge four one end, the other end of these four straight round flexible hinges is connected with workpiece pedestal outer ring respectively, straight beam type flexible hinge one and straight beam type flexible hinge two one end respectively with the symmetrical both sides being connected workpiece pedestal outer ring of straight beam type flexible hinge three and straight beam type flexible hinge four one end, the other end of these four straight beam type flexible hinges is connected with flexible hinge platform outer ring respectively, piezoelectric stack in X-direction and the piezoelectric stack in Y direction are respectively by bolt passing hole one, hole two pretension is arranged on flexible hinge platform outer ring, piezoelectric stack top in Z-direction is connected with workpiece pedestal bottom, bottom is connected with wedge block, this wedge block is arranged in fine setting guide rail, the push rod of wedge block is through the fine setting screw on fine setting top board.
2. a kind of Piezoelectric Driving three-dimensional elliptical Fine Feed motion platform according to claim 1, is characterized in that: described base has the base fixing hole for jack connection bed.
3. a kind of Piezoelectric Driving three-dimensional elliptical Fine Feed motion platform according to claim 1 and 2, is characterized in that: described workpiece pedestal has the screw for fixation workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520919504.3U CN205166404U (en) | 2015-11-17 | 2015-11-17 | Three -dimensional oval little feed movement platform of piezoelectricity drive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520919504.3U CN205166404U (en) | 2015-11-17 | 2015-11-17 | Three -dimensional oval little feed movement platform of piezoelectricity drive |
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| Publication Number | Publication Date |
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| CN205166404U true CN205166404U (en) | 2016-04-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520919504.3U Withdrawn - After Issue CN205166404U (en) | 2015-11-17 | 2015-11-17 | Three -dimensional oval little feed movement platform of piezoelectricity drive |
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| Country | Link |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105252285A (en) * | 2015-11-17 | 2016-01-20 | 长春工业大学 | Piezoelectric-driven three-dimensional elliptic micro-feed motion platform |
| CN109530198A (en) * | 2019-01-10 | 2019-03-29 | 河北工业大学 | A kind of submissive shaking platform of two dimension that wedge shape pre-tightens |
| CN110806222A (en) * | 2019-11-12 | 2020-02-18 | 山东大学 | Fine-adjustment mounting equipment for bipolar plate capacitive sensor |
-
2015
- 2015-11-17 CN CN201520919504.3U patent/CN205166404U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105252285A (en) * | 2015-11-17 | 2016-01-20 | 长春工业大学 | Piezoelectric-driven three-dimensional elliptic micro-feed motion platform |
| CN109530198A (en) * | 2019-01-10 | 2019-03-29 | 河北工业大学 | A kind of submissive shaking platform of two dimension that wedge shape pre-tightens |
| CN109530198B (en) * | 2019-01-10 | 2024-04-09 | 河北工业大学 | Wedge-shaped pre-tightening two-dimensional compliant vibration platform |
| CN110806222A (en) * | 2019-11-12 | 2020-02-18 | 山东大学 | Fine-adjustment mounting equipment for bipolar plate capacitive sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160420 Effective date of abandoning: 20180227 |