CN206200568U - A kind of three-dimensional elliptical micro-displacement motion platform of three piezoelectricity vertical drive - Google Patents
A kind of three-dimensional elliptical micro-displacement motion platform of three piezoelectricity vertical drive Download PDFInfo
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- CN206200568U CN206200568U CN201621210357.3U CN201621210357U CN206200568U CN 206200568 U CN206200568 U CN 206200568U CN 201621210357 U CN201621210357 U CN 201621210357U CN 206200568 U CN206200568 U CN 206200568U
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Abstract
The utility model is related to a kind of three-dimensional elliptical micro-displacement motion platform of three piezoelectricity vertical drive, belongs to micro-nano with super hot investment casting and multiaxial motion platform precision control field.Including base, right plate, left plate, upper plate and micromatic setting, X-axis and Y-axis piezoelectric stack are fixed on upper plate, two piezoelectric stacks of Z axis piezoelectric stack and other are vertical, input signal drives three piezoelectric stacks to produce dither, the workpiece on workpiece pedestal is driven to produce elliptical trajectory in three dimensions, advantage is that structure is novel, rigidity is high, stationarity is good, four flexible hinge Central Symmetry distributions, the kinematic accuracy of easily controllable micro-displacement motion platform, it is easy to control micro-displacement motion platform elliptical orbit in three dimensions.
Description
Technical field
The utility model belongs to micro-nano and super hot investment casting and multiaxial motion platform precision control field, more particularly to
A kind of three-dimensional elliptical micro-displacement motion platform of three piezoelectricity vertical drive.
Background technology
In recent years, precision and ultra-precision machining technology is increasingly becoming important part in machinery manufacturing industry, its developing water
Flat being even more weighs one of important symbol for national manufacturing industry level.Precision and ultra-precision machining is with a wide range of applications,
Its Ultraprecision Machining is not only applicable to the machining of various small parts and mould, the milling of microcavity mould and adds
The development of the national economy fields such as work, the processing (processing of such as silicon wafer) of electronic component, for national defence, aerospace industry
Middle processing laser fusion speculum, tactical missile and manned spaceship sphere, aspherical heavy parts etc. also have and weigh very much
The meaning wanted.
With the fast development of type of drive and flexible apparatus, in precision and ultra-precision machining high accuracy, it is high-resolution
Accurate Fine Feed system turns into one of direction of the supreme arrogance of a person with great power in sophisticated industry in recent years and field of scientific study.On the other hand with
Developing rapidly for extensive and super large-scale integration, the demand of Non-optical surfaces increasingly increases so that accurate Fine Feed
System has obtained swift and violent development.Accurate Fine Feed system is not only widely used in various fine measuring instruments, and can fill
When the actuator in control system.By on accurate ultra lathe install Fine Feed system, including micro-feeding tool holder structure,
Fine Feed work stage etc., can significantly improve precision and ultra-precision machining precision, and the raising for ultra-precision machine tool machining accuracy has
It is of great significance.
A large amount of experts and scholars were studied lathe precision Fine Feed system both at home and abroad in recent years so that accurate Fine Feed
Technical merit is greatly improved.The implementation of Fine Feed has a lot, but be most widely used this year recently is electromechanical
Formula, wherein again based on piezoelectric formula.So-called piezoelectric formula, is exactly to be imitated using the inverse piezoelectricity of piezoelectric ceramics
Answer (or electrostriction effect), with electric field controls piezoelectric ceramics produce micro-displacement, this mode simple structure, it is easy to control, take
With electric current it is small, without running part, have the advantages that rigidity is high, frequency response character is good, so as to be widely used.In addition, flexible
Hinge has turned into raising precision, Ultra-precision Turning feeding due to the motion of its small volume, sensitivity high, mechanical friction and gapless
One importance of precision, has started Fine Feed system into nano level New Times.
For the lathe Fine Feed system of driving type piezoelectric actuator, domestic and foreign scholars have carried out substantial amounts of research.U.S. 3L is tested
(Laurence Livermore Nation Laboratory) was just successfully applied in superfinishing the technology early in 1975 for room
In close diamond lathe transverse feed mechanism；To improve the feeding resolution ratio and precision of super precision lathe, U.S. 3L examinations in 1985
Room S.R.Patterson and other people cooperation research and developments is tested to have succeeded fast servo tool；Nineteen ninety, Japanese Y.Okazaki have studied
A kind of new micro-feeding tool holder, the micro-feeding tool holder structure that he studies is novel, functional；Thomas A.Dowrj in 1991
A kind of quick knife rest is proposed, for processing symmetrical centre surface without spin, there is the knife rest higher-frequency to ring speed, knife rest motion
The quality and knife rest rigidity of part are the principal elements for influenceing frequency response speed.China has also begun to be driven using piezoelectric ceramics the eighties
The research of dynamic Fine Feed technology, Nanjing Polytechnical College succeeds in developing a kind of micro-feeding tool holder used in turning machining within 1987, make use of mechanical knot
Structure amplifies the elongation of piezoelectric ceramic actuator, has the disadvantage that while amplifying elongation knife rest rigidity and stabilization can be reduced
Property；1988, Dalian University of Technology succeeded in developing the micro-feeding tool holder dynamically compensated for fine turning lathe axle turn error；Separately
External patent aspect, patent CN102078967A proposes a kind of mixing three-dimensional elliptical vibrocutting method, is driven using piezoelectric stack
Dynamic diamond point of a knife produces elliptical trajectory in three dimensions, so as to cut workpiece；Patent CN102059575A is carried
The three-dimensional elliptical topping machanism for going out, its three-dimensional elliptical trajectory can only be limited in scope in the side of cutter, parameter adjustment, for
The lathe requirement that processing can be matched is higher, and this device does not have generality.
It is therefore seen that, driven using piezoelectric stack in accurate ultra lathe research and the utility model of micro-feeding tool holder compared with
For universal, corresponding micro-feeding device and motion control are also more ripe.But it is micro- for accurate ultra Machinetool workpiece enter
Research to motion platform is less, in the Machinetool workpiece Fine Feed motion platform that can be looked at present, patent ZL201520919504.3
A kind of Piezoelectric Driving three-dimensional elliptical Fine Feed motion platform is proposed, makes workpiece produce three-dimensional elliptical to transport under the driving of piezoelectric stack
Dynamic rail mark.Analyzed based on more than, study and propose a kind of three-dimensional elliptical micro-displacement motion platform of three new piezoelectricity vertical drive,
It is met structure more compact, under conditions of hinge quantity is less, the precision of micro-displacement motion platform can be significantly improved, this
It is significant with super hot investment casting and the accurate control of multiaxial motion platform for realizing micro-nano.
The content of the invention
The utility model provides a kind of three-dimensional elliptical micro-displacement motion platform of three piezoelectricity vertical drive, in Ultra-precision Turning
On the basis of lathe, given workpiece to be processed three-dimensional elliptical track is cut, and realizes high accuracy and high-resolution ultraprecise
Machining.
The utility model is adopted the technical scheme that：Right plate, left plate is fixedly connected with base respectively, and upper plate passes through side
Plate connection holes and right plate, left plate top are fixedly connected, and have four flexible hinges of Central Symmetry distribution, work on the upper plate
Part pedestal surrounding is connected with four flexible hinges, and X-axis piezoelectric stack rear end is connected with upper plate X-axis piezoelectric stack fixing hole, front end
It is in contact with flexible hinge, X-axis micro-displacement sensor is connected and positioned at X-axis piezoelectricity with upper plate X-axis micro-displacement sensor fixing hole
Offside is stacked, orifice plate is connected, front end is in contact with flexible hinge, Y-axis with the fixation of upper Y-axis piezoelectric stack for Y-axis piezoelectric stack rear end
Micro-displacement sensor is connected and positioned at Y-axis piezoelectric stack offside, Z axis piezoelectric stack with upper plate Y-axis micro-displacement sensor fixing hole
Top is contacted with workpiece base bottom, bottom is connected by micromatic setting with base.
Micromatic setting described in the utility model is made up of four symmetrical L-type blocks, wedge type block and fine-tuning nuts, wedge
Block is connected with Z axis piezoelectric stack bottom bevel, and fine-tuning nut is threadedly coupled and front end and wedge type block apical grafting with L-type block.
The utility model is driven from X, Y and Z-direction respectively using three orthogonal piezoelectric stacks, drives process
Separate, displacement transfer mode is driven for flexible hinge, four flexible hinge Central Symmetry distributions, it is easy to control microbit movement
Moving platform elliptical orbit in three dimensions.
The utility model has the advantages that：
(1) structure is novel, rigidity is high, stationarity is good, is coupled by trip bolt between each part, device integrally have compared with
Good rigidity is so as to ensure the stability in process；
(2) flexible hinge sections use wire cutting and Milling Process in micro-displacement motion platform, using flexible hinge integrally
Formula is designed, it is possible to reduce rigging error, overall structure is simply easily fabricated, hence it is evident that reduce the crosstalk phenomenon between flexible hinge,
The accuracy of workpiece motion s in process can be improved, while four flexible hinge Central Symmetry distributions, it is easy to control microbit
The kinematic accuracy of movement moving platform；
(3) the utility model increased the micromatic setting of regulation Z axis height, and the apparatus structure is compact, trim process letter
Single, adjustable extent is small, but degree of regulation is high, can realize accurate fine setting of the piezoelectric stack in the Z-axis direction in the range of 0-1cm；
(4) three piezoelectric stacks of the utility model are orthogonal, respectively in three directionally independent drivings, three-dimensional elliptical track
Adjusted by the parameter of piezoelectric stack drive signal, each other in the absence of coupling, the oval position of space three-dimensional is not also pressurized
The limitation of electric configuration mode, can arbitrarily adjust；
(5) the utility model increases the displacement transducer of X-axis and Y direction, for transient Displacements to be fed back into controller,
Closed-loop control is constituted together with the utility model device, the tracing control of three-dimensional elliptical micro-displacement motion platform can be realized.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the axonometric drawing of the utility model base；
Fig. 3 is the axonometric drawing of the utility model upper plate；
Fig. 4 is the structural representation of the utility model micromatic setting；
Fig. 5 is the utility model workpiece base position simplification figure；
Fig. 6 is the different three-dimensional elliptical movement locus that the utility model Parameters variation is formed；
In figure：
Base 1, L-type block connection holes 101, base connection holes 102, right plate 2, left plate 3, upper plate 4, workpiece pedestal 401,
Flexible hinge 402, X-axis piezoelectric stack fixing hole 403a, Y-axis piezoelectric stack fixing hole 403b, side plate connection holes 404, X-axis microbit
Displacement sensor fixing hole 405a, Y-axis micro-displacement sensor fixing hole 405b, workpiece fixing hole 406, X-axis piezoelectric stack 501, Y-axis
Piezoelectric stack 502, Z axis piezoelectric stack 503, X-axis micro-displacement sensor 601, Y-axis micro-displacement sensor 602, micromatic setting 7, L
Type block 701, wedge type block 702, fine-tuning nut 703.
Specific embodiment
Right plate 2, left plate 3 is fixedly connected with base 1 respectively, and upper plate 4 is left by side plate connection holes 404 and right plate 2
The top of side plate 3 is fixedly connected, and has four flexible hinges 402 of Central Symmetry distribution, the surrounding of workpiece pedestal 401 on the upper plate 4
Be connected with four flexible hinges, the rear end of X-axis piezoelectric stack 501 is connected with upper plate X-axis piezoelectric stack fixing hole 403a, front end with it is soft
Property hinge is in contact, and X-axis micro-displacement sensor 601 is connected and positioned at X-axis with upper plate X-axis micro-displacement sensor fixing hole 405a
Piezoelectric stack offside, the rear end of Y-axis piezoelectric stack 502 is connected with upper Y-axis piezoelectric stack fixing hole 403b plates, front end and flexible hinge
It is in contact, Y-axis micro-displacement sensor 602 is connected and positioned at Y-axis piezo stack with upper plate Y-axis micro-displacement sensor fixing hole 405b
Heap offside, the top of Z axis piezoelectric stack 503 is contacted with the bottom of workpiece pedestal 401, bottom is connected by micromatic setting 7 with base 1；
The micromatic setting 7 is made up of four symmetrical L-type blocks 701, wedge type block 702 and fine-tuning nuts 703, wedge
Block 702 is connected with the bottom bevel of Z axis piezoelectric stack 503, and fine-tuning nut 703 is threadedly coupled and front end and wedge with L-type block 701
The apical grafting of block 702.
The utility model is arranged on lathe by base 1, and workpiece is fixed on by workpiece fixing hole 406 with trip bolt
On workpiece pedestal, while adjusting the position between machine tool and workpiece, adjust to be added by the fine-tuning nut 703 on base plate 1
Work workpiece Z-axis position, makes Z axis piezoelectric stack be in contact with workpiece pedestal, gives three mutually perpendicular piezoelectric stacks and drives letter
Number, drive workpiece to produce high frequency three dimensional elliptical trajectory, the drive signal of three piezoelectric stacks is as follows：
By motion and the space coordinate conversion of workpiece pedestal parameter, as shown in figure 5, the coordinates of motion generation formula of workpiece
It is as follows：
Wherein, xct,yct,zctIt is the cartesian coordinate of workpiece pedestal；A1,A2,A3It is respectively three vibrations of piezoelectric stack
Amplitude；It is respectively three phases of piezoelectric stack；ω is vibration frequency；T is time variable；H is workpiece centre away from XY
The vertical range of axle piezoelectric stack plane；l1,l2It is respectively two catercorner lengths of workpiece pedestal.
According to (1) (2) two formula, three initial phases of piezoelectric stack drive signal of active accommodationSo that each
Phase difference between initial phase is not 0, then three-dimensional Fine Feed motion platform will drive workpiece disposed thereon to produce difference
Three-dimensional elliptical movement locus, such as Fig. 6.
Claims (2)
1. the three-dimensional elliptical micro-displacement motion platform of a kind of three piezoelectricity vertical drive, it is characterised in that：Right plate, left plate difference
It is fixedly connected with base, upper plate is fixedly connected by side plate connection holes and right plate, left plate top, there are four on the upper plate
The flexible hinge of Central Symmetry distribution, workpiece pedestal surrounding is connected with four flexible hinges, X-axis piezoelectric stack rear end and upper plate X
The connection of axle piezoelectric stack fixing hole, front end are in contact with flexible hinge, X-axis micro-displacement sensor and upper plate X-axis micro-displacement sensing
Device fixing hole is connected and positioned at X-axis piezoelectric stack offside, and Y-axis piezoelectric stack rear end is fixed orifice plate and connected with upper Y-axis piezoelectric stack
Connect, front end is in contact with flexible hinge, Y-axis micro-displacement sensor is connected and is located at upper plate Y-axis micro-displacement sensor fixing hole
Y-axis piezoelectric stack offside, Z axis piezoelectric stack top is contacted with workpiece base bottom, bottom is connected by micromatic setting with base.
2. a kind of three-dimensional elliptical micro-displacement motion platform of three piezoelectricity vertical drive according to claim 1, its feature exists
In：The micromatic setting is made up of four symmetrical L-type blocks, wedge type block and fine-tuning nuts, wedge type block and Z axis piezoelectric stack
Bottom bevel is connected, and fine-tuning nut is threadedly coupled and front end and wedge type block apical grafting with L-type block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621210357.3U CN206200568U (en) | 2016-11-09 | 2016-11-09 | A kind of three-dimensional elliptical micro-displacement motion platform of three piezoelectricity vertical drive |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621210357.3U CN206200568U (en) | 2016-11-09 | 2016-11-09 | A kind of three-dimensional elliptical micro-displacement motion platform of three piezoelectricity vertical drive |
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| CN206200568U true CN206200568U (en) | 2017-05-31 |
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| CN201621210357.3U Expired - Fee Related CN206200568U (en) | 2016-11-09 | 2016-11-09 | A kind of three-dimensional elliptical micro-displacement motion platform of three piezoelectricity vertical drive |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106312591A (en) * | 2016-11-09 | 2017-01-11 | 长春工业大学 | Three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive |
| CN108173452A (en) * | 2018-01-12 | 2018-06-15 | 长春工业大学 | Three-dimensional piezoelectric micro-nano drives platform and its driving method |
| CN109253687A (en) * | 2018-10-09 | 2019-01-22 | 三英精控（天津）仪器设备有限公司 | A kind of nanoscale capacitance displacement sensor measuring device based on flexure hinge mechanism |
| WO2024032053A1 (en) * | 2022-08-08 | 2024-02-15 | 深圳信息职业技术学院 | Nano micro-displacement workbench for laser ultra-precision polishing for highly hard and brittle material |
-
2016
- 2016-11-09 CN CN201621210357.3U patent/CN206200568U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106312591A (en) * | 2016-11-09 | 2017-01-11 | 长春工业大学 | Three-dimensional oval micro displacement motion platform under three-piezoelectric perpendicular drive |
| CN108173452A (en) * | 2018-01-12 | 2018-06-15 | 长春工业大学 | Three-dimensional piezoelectric micro-nano drives platform and its driving method |
| CN109253687A (en) * | 2018-10-09 | 2019-01-22 | 三英精控（天津）仪器设备有限公司 | A kind of nanoscale capacitance displacement sensor measuring device based on flexure hinge mechanism |
| CN109253687B (en) * | 2018-10-09 | 2020-12-01 | 三英精控（天津）仪器设备有限公司 | Nanoscale capacitance displacement sensor measuring device based on flexible hinge mechanism |
| WO2024032053A1 (en) * | 2022-08-08 | 2024-02-15 | 深圳信息职业技术学院 | Nano micro-displacement workbench for laser ultra-precision polishing for highly hard and brittle material |
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| GR01 | Patent grant | ||
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170531 Termination date: 20191109 |