CN108312043A - Roll shape vibrates auxiliary polishing device and method - Google Patents

Abstract

The invention relates to a roller-shaped vibration-assisted polishing device and method, belonging to the field of ultra-precision processing. The Z-direction motion platform is connected to the Z-axis motion system 1 and the Z-axis motion system 2 through screws, the Z-axis motion system 1 and the Z-axis motion system 2 are connected to the base platform through screws, and the X-direction motion platform 1 is connected to the X-axis motion system through screws. One is connected with X-axis motion system two, X-axis motion system one and X-axis motion system two are connected with the base platform through screws, X-axis motion platform two is connected with X-axis motion system three through screws, and X-axis motion system three is connected with the base platform through screws The base platform is connected, and the compound vibration platform is connected with the X-direction motion platform two through screws. The invention has the advantages of high polishing efficiency, good polishing uniformity and consistency, can complete the polishing treatment and real-time on-line trimming of curved surfaces, and the like.

Description

Roller type vibration assisted polishing device and method

technical field

The invention relates to the field of ultra-precision machining, in particular to a roller-type vibration-assisted polishing method and device.

Background technique

With the rapid development of science and technology, not only higher requirements are put forward for the quality and integrity of the surface of parts in various fields of industry, but also the parts tend to be miniaturized gradually, which requires that the processing accuracy should be improved by one level in the traditional processing technology Therefore, ultra-precision machining technology is proposed. Ultra-precision machining technology is mainly used in large-scale integrated circuits, aerospace, semiconductors and other fields. The surface precision of the processed workpiece can reach nanometer or sub-nanometer level. In ultra-precision machining, polishing It has always been the main processing method and is usually the final step of ultra-precision machining, the purpose of which is to obtain a smooth and flat surface.

In the 1960s, Japanese scholar Junichiro Kumabe introduced the vibration system into mechanical processing, and gradually developed into a hot spot in the mechanical processing industry. The purpose of vibration processing is to make the free abrasives more evenly distributed on the surface of the workpiece to achieve uniform polishing. Purpose, especially suitable for processing hard and brittle materials such as glass, quartz and silicon carbide.

At present, the processing methods for hard and brittle materials mainly include ion beam polishing, jet polishing, chemical mechanical polishing and vibration-assisted polishing. The material is deformed and separated, but its polishing efficiency is low; jet polishing is a polishing method with polishing accuracy up to the atomic level, but its unstable processing interface also makes the application range small; traditional chemical mechanical polishing technology is mainly used in semiconductor manufacturing, Flexible printed circuit boards and manufacturing electronic devices, etc., the chemical mechanical polishing system makes the polished workpiece subject to torque on its axis, so that the processed ultra-thin substrate may show problems such as tearing or folding; most of the current vibration-assisted polishing devices are The resonance type that converts electrical energy into mechanical energy through a piezoelectric sensor. Most of the vibration-assisted polishing devices are of the resonance type. Although the vibration frequency of the resonance-type vibration-assisted polishing device is relatively high, the vibration parameters cannot be adjusted, and it is not easy to perform closed-loop control. Relatively speaking, the non-resonant vibration-assisted polishing device has the advantages of wide working range, adjustable motion parameters and easy closed-loop control. Therefore, the design of the non-resonant vibration-assisted polishing device is still a key task.

Contents of the invention

The invention provides a roller-type vibration-assisted polishing device and method to solve the existing problems of low polishing efficiency and small application range.

The technical solution adopted by the present invention is: including Z-axis motion system 1, Z-axis motion system 2, Z-axis motion platform, X-axis motion system 1, X-axis motion system 2, X-axis motion platform 1, X-axis motion system 3, X-axis motion platform 2, compound vibration platform, and base platform, among which the Z-axis motion platform is connected to Z-axis motion system 1 and Z-axis motion system 2 through screws, and Z-axis motion system 1 and Z-axis motion system 2 are connected to the base platform through screws Connection, X-axis motion platform 1 is connected to X-axis motion system 1 and X-axis motion system 2 through screws, X-axis motion system 1 and X-axis motion system 2 are connected to the base platform through screws, and X-axis motion platform 2 is connected to X-axis motion system 2 through screws. The three-axis motion system is connected, the X-axis motion system three is connected to the base platform through screws, and the compound vibration platform is connected to the X-direction motion platform two through screws.

The Z-axis motion system 1 and the Z-axis motion system 2 have the same structure, wherein the Z-axis motion system 1 includes: I-shaped guide rail 1, machine base 1, bearing housing 1, shaft coupling 1, slide table 1, base plate 1, Motor 1 and ball screw 1 driven by motor 1, the I-shaped guide rail 1 is connected to base plate 1 through screws, motor 1 is connected to base plate 1 through screws, base 1 is connected to base plate 1 through screws, and motor 1 is connected to base plate 1 through shaft coupling Device one and bearing seat one are connected with ball screw one, ball screw one is installed between I-shaped guide rail one, and slide table one is installed on I-shaped guide rail one.

The Z-direction motion platform includes motor mounting platform 1, motor 2, bearing seat 2, shaft coupling 2, motor support table 1, polishing roller, torque sensor and polishing roller shaft, wherein motor 2 is connected to motor mounting platform 1 through screws Connection, the output shaft of the motor 2 is connected with the polishing roller through the coupling 2, the other end of the polishing roller is connected to the bearing seat 2, the bearing seat 2 is connected to the motor support table 1 through screws, the torque sensor is installed on the polishing roller shaft, and the motor Both the mounting platform one and the motor support platform one are connected with the sliding platform by screws.

The X-axis motion system 1 and the X-axis motion system 2 have the same structure, wherein the X-axis motion system 1 includes the I-shaped guide rail 2, the machine base 2, the bearing housing 3, the coupling 3, the slide table 2, the base plate 2, the motor Sanhe ball screw 2, the I-shaped guide rail 2 is connected to the base plate 2 through screws, the motor 3 is connected to the frame 2 through screws, the frame 2 is connected to the base platform through screws, and the motor 3 is connected to the bearing seat through the coupling 3 The third is connected with the second ball screw, the second ball screw is installed between the two I-shaped guide rails, and the second slide table is installed on the second I-shaped guide rail.

The X-direction motion platform 1 includes motor 4, motor mounting platform 2, motor supporting platform 2, shaft coupling 4, bearing seat 4 and trimming roller, wherein motor 4 is fixed on motor mounting platform 2, and the output shaft of motor 4 Connect with the dressing roller through coupling four, and the other end of the dressing roller is installed in the bearing seat four of the motor support table two, and the motor installation table two and the motor support table two are connected with the slide table by screws.

The X-axis motion system three includes an I-shaped guide rail three, a machine base three, a bearing seat five, a shaft coupling five, a slide table three, a base plate three, a motor five and a ball screw three, wherein the I-shaped guide rail three passes screws and Bottom plate 3 is connected, motor 5 is connected to frame 3 through screws, frame 3 is connected to base plate 3 through screws, motor 5 is connected to ball screw 3 through coupling 5 and bearing seat 5, and ball screw 3 is installed on the I-shaped Between the guide rails three, the slide table three is installed on the I-shaped guide rail three.

The X-direction motion platform 2 includes motor 6, reducer, coupling 6, bearing seat 6, arc table, swing table, worm and worm gear, wherein the arc table is installed on the sliding table by screws, and the motor 6 passes through The reducer and coupling are connected to the worm to complete the rotation of the worm. The worm drives the worm wheel to complete the rotation of the worm wheel. The worm wheel is installed in the swing table, and the worm wheel drives the swing table to complete the curved surface movement on the arc table. A compound vibration platform is installed horizontally on the swing table.

The compound vibration platform includes a vibration base, a vibration platform generating device, an anti-friction plate, a vibration table, a displacement sensor and a displacement sensor clamp body, wherein the vibration platform generating device is connected with the vibration base through screws, and the vibration table and the vibration platform generating device There is an anti-friction plate in between to reduce the friction between the vibration table and the vibration platform generator. The vibration table and the anti-friction plate are fixed on the vibration platform generator by screws, and the displacement sensor is installed in the displacement sensor clamp. , the two displacement sensor clamps are installed on the vibration platform generating device, the front ends of the two displacement sensors are in contact with the vibration table, used to measure the X-direction displacement and Y-direction displacement of the vibration table, the vibration base includes flanges, The flange is used to fix the Y-direction displacement of the vibration platform generating device;

The vibration platform generating device includes an X-direction vibration device, a Y-direction vibration device and a connector, and the X-direction vibration device is rigidly connected to the Y-direction vibration device through the connector;

The X-direction vibrating device comprises a bridge type amplifying mechanism one, a lever amplifying mechanism one, piezoelectric ceramics one, a rigid arm one, a displacement transmitter one and a fixed block, and the fixed block and the rigid arm one are fixed on the vibrating base with screws respectively, Piezoelectric ceramics are installed in the bridge-type amplifying mechanism-one through screws, and the micro-displacement generated by the bridge-type amplifying mechanism-one is transmitted to the lever amplifying mechanism-one through the displacement transmitter-one, and the lever amplifying mechanism-one is used to amplify the displacement produced by the bridge-type amplifying mechanism-one Micro displacement;

The Y-direction vibration device includes a bridge type amplification mechanism 2, a lever amplification mechanism 2, piezoelectric ceramics 2, a rigid arm 2, a displacement transmitter 2, a primary vibration platform and a vibration outer wall, and the rigid arm 2 is fixed on the vibration base by screws. The piezoelectric ceramic 2 is installed in the bridge-type amplifying mechanism 2 through screws, and the micro-displacement generated by the bridge-type amplifying mechanism 2 is transmitted to the lever amplifying mechanism 2 through the displacement transmitter 2, and the lever amplifying mechanism 2 is used to amplify the bridge-type amplifying mechanism 2. For micro-displacement, the X-direction vibration device and the Y-direction vibration device are independent of each other, and there is no coupling effect.

The base platform includes a base and a portal frame, and the portal frame is rigidly connected to the base.

The polishing method using a roller-type vibration-assisted polishing device comprises the following steps:

(1) The workpiece to be polished is stuck on the vibrating table through paraffin, the X-direction movement platform drives the polished workpiece to move to the designated position along the negative X direction, and the Z-direction movement platform drives the polishing roller to move to the designated position along the Z direction;

(2) The X-direction displacement of the polished workpiece is realized by the two-stage amplification effect of the bridge-type amplifying mechanism 1 and the lever amplifying mechanism on the X-direction displacement, and the Y-direction displacement is realized by the bridge-type amplifying mechanism 2 and the lever amplifying mechanism 2 on the Y-direction The secondary amplification of the displacement is realized. The X-direction displacement and the Y-direction displacement are synthesized into a motion curve on the primary vibration platform. If the polishing roller rotates clockwise around the Y-axis, the compound vibration platform moves along the positive X direction, that is, the polishing roller and the Y-axis move clockwise. The compound vibrating platform moves in the opposite direction and polishes the polished workpiece in the form of line contact (roller to plane). When it is necessary to polish the curved surface, the polished workpiece can be oscillated through the cooperation of the arc table and the swing table. Complete the polishing of the surface;

(3) When the polishing is carried out to a certain extent, the polishing roller needs to be trimmed. At this time, the X-direction moving platform 1 and the X-direction moving platform 2 move along the X direction at the same time, and the Z-direction moving platform moves along the Z direction and moves to the X direction. On-line real-time dressing starts until the dressing roller on the moving platform 1 reaches the surface of the polishing roller on the Z-direction moving platform, and the movement of the polishing roller and the dressing roller is a relative reverse motion;

(4), after the online real-time trimming is completed, adjust the positions of the X-direction motion platform 1, the X-direction motion platform 2 and the Z-direction motion platform, so that the polished workpiece in the X-direction motion platform 2 reaches the surface of the polishing roller, and re-polishes;

(5) Steps 2 and 3 are repeated continuously until the polishing is completed.

The advantages of the present invention are:

(1) A new type of roller polishing is proposed. Compared with the traditional vibration-assisted polishing, the contact mode between the polished workpiece and the polishing tool is changed from conventional point and surface contact to line contact. Considering the linear contact material removal mechanism The friction is small, it has little possibility to cause the ultra-thin substrate to show bending deformation, and the large rectangular glass substrate is also less likely to show brittle fracture, in addition, the roller polishing system can be applied to the continuous automatic production process, in Ensure the smoothness and integrity of the surface of the workpiece while ensuring the consistency of polishing;

(2) The polishing roller and the compound vibration platform adopt a relatively reverse movement mode, and the polishing roller produces a two-way removal effect, which greatly improves the average removal rate;

(3) The compound vibration platform adopts a two-stage amplification method in which the bridge-type amplification mechanism and the lever amplification mechanism cooperate, which greatly increases the displacement stroke of the device. The X-direction vibration device and the Y-direction vibration device are independent of each other and do not affect each other. The coupling problem of the vibration platform, and the horizontal placement of the multiple vibration platform also ensures the uniformity of polishing;

(4) The arc table is added so that the device can complete the polishing of the curved surface, which greatly increases the usable range of the device. The real-time trimming device is added to enable the polishing roller to be trimmed online in real time, effectively avoiding the damage caused by multiple clamping Card loading error.

Description of drawings

Fig. 1 is a structural representation of the present invention;

Fig. 2 is a schematic structural view of the Z-axis motion system one, the Z-axis motion system two and the Z-direction motion platform of the present invention;

Fig. 3 is a schematic structural view of a motor mounting platform 1 of the present invention;

Fig. 4 is a schematic structural view of a motor support platform 1 of the present invention;

Fig. 5 is a structural schematic diagram of the first X-axis motion system, the second X-axis motion system and the first X-axis motion platform of the present invention;

Fig. 6 is a schematic structural view of the second motor support platform of the present invention;

Fig. 7 is a structural schematic diagram of the X-axis motion system 3 and the X-direction motion platform 2 of the present invention;

Fig. 8 is a structural schematic diagram of a full cross-section of the X-direction motion platform of the present invention;

Fig. 9 is a schematic structural view of the vibrating base, the vibrating source platform and the anti-friction plate of the present invention;

Fig. 10 is a schematic structural view of the vibration platform generating device of the present invention;

Fig. 11 is a schematic structural view of the compound vibration platform of the present invention;

Fig. 12 is a schematic structural view of the base platform of the present invention;

Fig. 13 is a structural schematic diagram of the motion trajectory of the compound vibration platform of the present invention;

Description of reference signs: Z-axis motion system one 1, Z-axis motion system two 2, Z-axis motion platform 3, X-axis motion system one 4, X-axis motion system two 5, X-axis motion platform one 6, X-axis motion system Three 7, X-direction motion platform two 8, compound vibration platform 9, base platform 10, polished workpiece 11, I-shaped guide rail 1 101, machine base 1 102, bearing housing 1 103, coupling 104, slide table 105, bottom plate 106, motor one 107, ball screw one 108, motor mounting table one 301, motor two 302, bearing seat two 303, coupling two 304, motor support table one 305, polishing roller 306, torque sensor 307, polishing roller shaft 308, I-shaped guide rail 2 401, machine base 2 402, bearing housing 3 403, coupling 404, slide table 405, bottom plate 2 406, motor 3 407, ball screw 2 408, motor 4 601, motor installation table 2 602 , Motor support platform 2 603, coupling 4 604, bearing seat 4 605, trimming roller 606, I-shaped guide rail 3 701, machine base 702, bearing seat 5 703, coupling 5 704, slide table 3 705, bottom plate 3 706, motor five 707, ball screw three 708, motor six 801, reducer 802, coupling six 803, bearing seat six 804, arc table 805, swing table 806, worm 807, worm wheel 808, vibration base 901, Vibration platform generating device 902, anti-friction plate 903, vibration table 904, displacement sensor 905, displacement sensor clamp body 906, flange 90101, X-direction vibration device 90201, Y-direction vibration device 90202, connector 90203, bridge amplification mechanism One 9020101, lever amplifying mechanism one 9020102, piezoelectric ceramic one 9020103, rigid arm one 9020104, displacement transmitter one 9020105, fixed block 9020106, bridge type amplifying mechanism two 9020201, lever amplifying mechanism two 9020202, piezoelectric ceramic two 9020203, rigid Arm two 9020204, displacement transmitter two 9020205, primary vibration platform 9020206, vibration outer wall 9020207, base 1001, gantry 1002.

Detailed ways

As shown in Figure 1, it includes Z-axis motion system 1, Z-axis motion system 2, Z-axis motion platform 3, X-axis motion system 1 4, X-axis motion system 2 5, X-axis motion platform 1 6, and X-axis Motion system 3 7, X-axis motion platform 2 8, compound vibration platform 9, and base platform 10, wherein Z-axis motion platform 3 is connected with Z-axis motion system 1 and Z-axis motion system 2 through screws, Z-axis motion system 1 1 and Z-axis motion system 2 2 are connected to the base platform 10 through screws, X-axis motion platform 1 6 is connected to X-axis motion system 1 4 and X-axis motion system 2 5 through screws, and X-axis motion system 1 4 and X-axis motion System 2 5 is connected to the base platform 10 by screws, X-direction motion platform 2 8 is connected to X-axis motion system 3 7 by screws, X-axis motion system 3 7 is connected to the base platform 10 by screws, and the polished workpiece 11 is glued on by paraffin On the compound vibration platform 9, the compound vibration platform 9 is connected with the X-direction motion platform 2 8 through screws.

Z-axis motion system one 1, Z-axis motion system two 2 and Z-direction motion platform 3 cooperate to complete the linear reciprocating motion of Z-direction motion platform 1, X-axis motion system one 4, X-axis motion system two 5 X-direction motion platforms 1 and 6 work together to complete the linear reciprocating motion of the X-direction motion platform 1 6, and the X-axis motion system 3 7 and X-direction motion platform 2 8 cooperate together to complete the linear reciprocating motion of the X-direction motion platform 2 8. In order to ensure the stability of polishing, Uniformity and consistency, the device adopts the four degrees of freedom of the X and Y direction translation of the compound vibration platform 8, the Z direction translation of the Z movement platform 3, and the rotation of the polishing roller 306 around the Y axis.

As shown in Figure 2, Figure 3 and Figure 4, the Z-axis motion system 1 and the Z-axis motion system 2 have the same structure. Taking the Z-axis motion system 1 as an example, the Z-axis motion system 1 includes an I-shaped guide rail 1 101, support one 102, bearing housing one 103, shaft coupling one 104, slide table one 105, base plate one 106, motor one 107 and ball screw one 108 driven by motor one 107, I-shaped guide rail one 101 by screw and Bottom plate one 106 is connected, motor one 107 is connected with machine base one 102 through screws, machine base one 102 is connected with bottom plate one 106 through screws, motor one 107 is connected with ball screw one 108 through coupling one 104 and bearing seat one 103 , The ball screw one 108 is installed between the I-shaped guide rails one 101, and the slide table one 105 is installed on the I-shaped guide rail one 101.

The Z-direction motion platform 3 includes a motor mounting platform 1 301, a motor 2 302, a bearing seat 2 303, a coupling 2 304, a motor support table 1 305, a polishing roller 306, a torque sensor 307 and a polishing roller shaft 308, and the motor 2 302 passes The screw is connected with the motor installation platform 1 301, the output shaft of the motor 2 302 is connected with the polishing roller 306 through the coupling 2 304, the other end of the polishing roller 306 is connected with the bearing seat 2 303, and the bearing seat 2 303 is connected with the motor support platform through screws One 305 is connected, the torque sensor 307 is installed on the polishing roller shaft 308, and the motor mounting table one 301 and the motor supporting table one 305 are connected with the slide table 105 by screws.

The second motor 302 of the Z-direction motion platform 3 , the second bearing seat 303 and the second coupling 304 cooperate to complete the autorotation of the polishing roller 306 , and the torque sensor 307 is used to measure the torque generated by the polishing roller 306 in real time.

As shown in Figure 5 and Figure 6, the X-axis motion system one 4 and the X-axis motion system two 5 have the same structure. Taking the X-axis motion system one 4 as an example, the X-axis motion system one 4 includes an I-shaped guide rail 2 401, a machine base Two 402, bearing seat three 403, coupling three 404, sliding table two 405, bottom plate two 406, motor three 407 and ball screw two 408 driven by motor three 407, I-shaped guide rail two 401 are connected to bottom plate two 406 by screws , motor three 407 is connected with machine base two 402 through screws, machine base two 402 is connected with base platform 10 through screws, motor three 407 is connected with ball screw two 408 through coupling three 404 and bearing housing three 403, ball screw The second 408 is installed between the two I-shaped guide rails 401, and the second slide table 405 is installed on the second I-shaped guide rail 401.

The X-direction motion platform 16 includes motor 4 601, motor mounting table 2 602, motor support table 2 603, shaft coupling 4 604, bearing housing 4 605 and trimming roller 606, motor 4 601 is fixed on the motor mounting table 2 602, The output shaft of the motor four 601 is connected with the dressing roller 606 through the shaft coupling four 604, and the other end of the dressing roller 606 is installed in the bearing seat four 605 of the motor support table two 603, and the motor installation table two 602 and the motor support table two 603 pass through Screws are connected with slide table 105.

The motor four 601 of the X-direction motion platform one 6, the coupling four 604 and the bearing seat four 605 cooperate to complete the autorotation of the dressing roller 606, so as to complete real-time dressing.

The X-axis motion system 37 shown in Figure 7 and Figure 8 includes I-shaped guide rail 3 701, machine base 3 702, bearing housing 5 703, coupling 5 704, slide table 3 705, bottom plate 3 706, motor 5 707 The ball screw three 708 driven by motor five 707, the I-shaped guide rail three 701 are connected to the bottom plate three 706 through screws, the five motors 707 are connected to the frame three 702 through screws, the frame three 702 are connected to the bottom plate three 706 through screws, and the motor Five 707 is connected with ball screw three 708 by coupling five 704 and bearing seat five 703, ball screw three 708 is installed between I-shaped guide rail three 701, slide table three 705 is installed on I-shaped guide rail three 701.

X direction motion platform two 8 comprises motor six 801, speed reducer 802, shaft coupling six 803, bearing seat six 804, arc table 805, pendulum table 806, worm screw 807 and worm wheel 808, and arc table 805 is installed on the slide by screw On stage 105, motor six 801 is connected to worm 807 through reducer 802 and coupling 803 to complete the rotation of worm 807. Worm 807 drives worm wheel 808 to complete the rotation of worm wheel 808. Worm wheel 808 is installed in swing table 806, and worm wheel 808 drives the swing The platform 806 completes the curved surface movement on the arc platform 805, and the compound vibration platform 9 is horizontally installed on the swing platform 806.

The compound vibration platform 9 shown in Figure 9, Figure 10 and Figure 11 comprises a vibration base 901, a vibration platform generating device 902, an anti-friction plate 903, a vibration table 904, a displacement sensor 905 and a displacement sensor clamp body 906, and the vibration platform generates The device 902 is connected to the vibrating base 901 by screws, and there is an anti-friction plate 903 between the vibrating table 904 and the vibrating platform generating device 902, which is used to reduce the friction between the vibrating table 904 and the vibrating platform generating device 902, and the vibrating table 904 and anti-friction plate 903 are fixed on the vibration platform generating device 902 by screws, the displacement sensor 905 is installed in the displacement sensor clamp body 906, and the two displacement sensor clamp bodies 906 are all installed on the vibration platform generating device 902, and the two displacement sensor The front ends of 905 are all in contact with the vibration table 904 for measuring the X-direction displacement and Y-direction displacement of the vibration table 904, the vibration base 901 includes a flange 90101, and the flange 90101 is used to fix the Y-direction displacement of the vibration platform generator 902 .

The vibration platform generating device 902 includes an X-direction vibration device 90201 , a Y-direction vibration device 90202 and a connector 90203 , and the X-direction vibration device 90201 is rigidly connected to the Y-direction vibration device 90202 through the connector 90203 .

The X-direction vibrating device 90201 includes a bridge type amplifying mechanism-9020101, a lever amplifying mechanism-9020102, a piezoelectric ceramic-9020103, a rigid arm-9020104, a displacement transmitter-9020105 and a fixed block 9020106, and the fixed block 9020106 and the rigid arm-9020104 are respectively used The screws are fixed on the vibrating base 901, and the piezoelectric ceramics-9020103 is installed in the bridge-type amplifying mechanism-9020101 through screws. Amplifying mechanism one 9010102 is used for amplifying the micro-displacement produced by bridge type amplifying mechanism one 9020101.

The Y-direction vibration device 90202 includes a bridge-type amplification mechanism 2 9020201, a lever amplification mechanism 9020202, a piezoelectric ceramic 9020203, a rigid arm 9020204, a displacement transmitter 9020205, a primary vibration platform 9020206 and a vibration outer wall 9020207, and the rigid arm 9020204 passes through The screws are fixed on the vibrating base 901, and the piezoelectric ceramic 2 9020203 is installed in the bridge-type amplifying mechanism 2 9020201 through screws. The second amplification mechanism 9020202 is used to amplify the micro-displacement generated by the second bridge-type amplification mechanism 9020201. The X-direction vibration device 90201 and the Y-direction vibration device 90202 are independent of each other, and there is no coupling effect.

The base platform 10 shown in FIG. 12 includes a base 1001 and a gantry 1002. The gantry 1002 is rigidly connected to the base 1001. The base platform 10 is used to provide installation and fixation of the entire device.

Figure 13 shows the motion trajectory diagram of the compound vibration platform 9, in which F1 is the input force, L1 is the displacement in the X direction, X is the output displacement in the X direction, L2 is the displacement in the Y direction, and Y is the output displacement in the Y direction. The fixed block 9020106 in the X-direction vibration device 90201 is fixed on the vibration base 901 by screws, and is used to determine the amplification effect of the bridge type amplification mechanism-9020101, and the rigid arm-9020104 is fixed on the vibration base 901 by screws to limit the rigidity. The X-direction displacement of arm one 9020104, the rigid arm two 9020204 in the Y-direction vibrating device 90202 is connected to the vibrating outer wall 9020207, the Y-direction displacement of the rigid arm two 9020204 is fixed by vibrating the outer wall 9020207, and the amplification effect of the bridge type amplification mechanism two 9020201 is through the vibrating outer wall 9020207 determines that when the workpiece needs to be polished, force F1 is applied to piezoelectric ceramic 1 9020103 and piezoelectric ceramic 2 9020203 respectively, that is, force F1 is applied to bridge-type amplification mechanism 1 9020101 and bridge-type amplification mechanism 2 9020201, and force F1 passes through the bridge L1 and L2 are converted into L1 and L2 after the amplification effect of the first 9020101 and the second 9020201 of the bridge-type amplifying mechanism, and the displacement of L1 and L2 is amplified through the first 9020101 of the lever amplifying mechanism and the second 9020201 of the lever amplifying mechanism, and the amplified displacements are respectively X and Y , as shown in the figure, X1 and X2 are the first and second output displacements in the X direction, and so on, Y1 and Y2 are the first and second output displacements in the Y direction, and so on, the displacements X and The vector composite displacement of the displacement Y on the primary vibration platform 9020206 is T, that is, T1, T2, T3, T4 and T5 are the vector composite displacements of the first, second, third, fourth and fifth times respectively, By analogy, for example: the magnification ratio of bridge type amplifying mechanism one 9020101 and bridge type amplifying mechanism two 9020201 is A times, the magnification ratio of lever amplifying mechanism one 9020102 and lever amplifying mechanism two 9020202 is B times, so the comprehensive magnification ratio is about A X B times, it can be seen that this platform has a good magnification effect.

The polishing method adopting the described a kind of roller-type vibration-assisted polishing device comprises the following steps:

(1), the workpiece 11 to be polished is stuck on the vibrating table 904 through paraffin, the X-direction movement platform 2 8 drives the polished workpiece 11 to move to the designated position along the negative X direction, and the Z-direction movement platform 3 drives the polishing roller 306 along the Z direction Move to the specified position;

(2), the X-direction displacement of the polished workpiece 11 is realized by the secondary amplification of the X-direction displacement by the bridge-type amplifying mechanism one 9020101 and the lever amplifying mechanism one 9020102, and the Y-direction displacement is realized by the bridge-type amplifying mechanism two 9020201 and the lever amplifying mechanism Two, 9020202 realizes the secondary amplification effect on the Y-direction displacement. The X-direction displacement and the Y-direction displacement are synthesized into a motion curve on the primary vibration platform 9020206. If the polishing roller 306 rotates clockwise around the Y axis, the compound vibration platform 9 will Movement in the positive direction, that is, the polishing roller 306 and the compound vibrating platform 9 undergo relative reverse movement to polish the workpiece 11 to be polished in the form of line contact (roller to plane). The cooperation of the table 804 can make the workpiece 11 to be polished swing to complete the polishing of the curved surface;

(3), when the polishing is carried out to a certain extent, the polishing roller 306 needs to be trimmed. At this time, the X-direction moving platform one 6 and the X-direction moving platform two 8 move along the X direction at the same time, and the Z-direction moving platform 3 moves along the Z direction. Move until the trimming roller 606 in the X-direction motion platform 1 reaches the surface of the polishing roller 306 in the Z-direction motion platform 3, start to carry out online real-time trimming, and the motion of the polishing roller 306 and the trimming roller 606 is a relative reverse motion;

(4), after the online real-time trimming is completed, adjust the positions of the X-direction motion platform 1 6, the X-direction motion platform 2 8 and the Z-direction motion platform 3, so that the polished workpiece in the X-direction motion platform 2 8 reaches the surface of the polishing roller 306 , re-polished;

(5) Steps 2 and 3 are repeated continuously until the polishing is completed.

Claims (10)

1. a kind of roll shape vibrates auxiliary polishing device, it is characterised in that：Including the unification of Z axis kinetic system, Z axis kinematic system two, Z-direction Motion platform, the unification of X-axis kinetic system, X-axis kinematic system two, X are to motion platform one, X-axis kinematic system three, X to motion platform Two, compound shaking platform, base platform, wherein Z-direction motion platform pass through screw and the unification of Z axis kinetic system and Z axis kinematic system Two connections, Z axis kinetic system is unified and Z axis kinematic system two is connect by screw with base platform, and X passes through spiral shell to motion platform one Nail is connect with the unification of X-axis kinetic system and X-axis kinematic system two, and X-axis kinetic system is unified and X-axis kinematic system two passes through screw and bottom Seat platform connection, X are connect by screw with X-axis kinematic system three to motion platform two, and X-axis kinematic system three passes through screw and bottom Seat platform connection, compound shaking platform are connect with X to motion platform two by screw.

2. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the Z axis kinetic system Unified identical with two structure of Z axis kinematic system, wherein Z axis kinetic system includes uniformly：I-shaped guide rail one, engine base one, bearing block One, the ball-screw one that shaft coupling one, slide unit one, bottom plate one, motor one and motor one drive, the I-shaped guide rail one pass through Screw is connect with bottom plate one, and motor one is connect by screw with engine base one, and engine base one is connect by screw with bottom plate one, motor one It is connect with ball-screw one by shaft coupling one and bearing block one, ball-screw one is mounted between I-shaped guide rail one, slide unit One is mounted on I-shaped guide rail one.

3. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the Z-direction movement is flat Platform include motor erecting bed one, motor two, bearing block two, shaft coupling two, motor supporting table one, polishing roll, torque sensor and Roll shaft is polished, wherein motor two is connect by screw with motor erecting bed one, and the output shaft of motor two passes through shaft coupling two and throwing Smooth roll connects, and the polishing roll other end is connected on bearing block two, and bearing block two is connect by screw with motor supporting table one, torque Sensor is mounted on polishing roll shaft, and motor erecting bed one and motor supporting table one are connect by screw with slide unit.

4. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the X-axis kinetic system Unified identical with two structure of X-axis kinematic system, wherein X-axis kinetic system includes uniformly I-shaped guide rail two, engine base two, bearing block Three, shaft coupling three, slide unit two, bottom plate two, motor three and ball-screw two, the I-shaped guide rail two pass through screw and bottom plate two Connection, motor three are connect by screw with engine base two, and engine base two is connect by screw with base platform, and motor three passes through shaft coupling Three and bearing block three connect with ball-screw two, ball-screw two be mounted on I-shaped guide rail two between, slide unit two be mounted on work On font guide rail two.

5. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the X is flat to movement Platform one includes motor four, motor erecting bed two, motor supporting table two, shaft coupling four, bearing block four and finishing roller, wherein motor four It is fixed on motor erecting bed two, the output shaft of motor four is connect by shaft coupling four with finishing roller, and the other end peace of roller is modified In the bearing block four of motor supporting table two, motor erecting bed two and motor supporting table two are connect by screw with slide unit.

6. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the X-axis kinetic system System three includes I-shaped guide rail three, engine base three, bearing block five, shaft coupling five, slide unit three, bottom plate three, motor five and ball-screw Three, wherein I-shaped guide rail three is connect by screw with bottom plate three, motor five is connect by screw with engine base three, and engine base three passes through Screw is connect with bottom plate three, and motor five is connect by shaft coupling five and bearing block five with ball-screw three, and ball-screw three is installed Between I-shaped guide rail three, slide unit three is mounted on I-shaped guide rail three.

7. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the X is flat to movement Platform two includes motor six, retarder, shaft coupling six, bearing block six, circular arc platform, sets a table, worm and worm wheel, and wherein circular arc platform passes through Screw is mounted on slide unit, and motor six completes the rotation of worm screw by retarder and shaft coupling connecting worm, and worm screw drives worm gear The rotation of worm gear is completed, for worm gear in setting a table, worm gear drive is set a table completes non-plane motion in circular arc platform, upper horizontal peace of setting a table Equipped with compound shaking platform.

8. roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the compound shaking platform includes Vibrating base, shaking platform generating means, antifriction wiping board, shaking table, displacement sensor and displacement sensor fixture body, Middle shaking platform generating means is connect by screw with vibrating base, has one between shaking table and shaking platform generating means Antifriction wiping board, for reducing the friction between shaking table and shaking platform generating means, shaking table and antifriction wiping board It is fixed by screws on shaking platform generating means, displacement sensor is mounted in displacement sensor fixture body, two displacements Clamp of sensor body is installed on shaking platform generating means, and the front end of two displacement sensors connects with shaking table It touches, for measuring the X of shaking table to displacement and Y-direction displacement, vibrating base includes flange, and flange is for fixing shaking platform The Y-direction displacement of generating means；

The shaking platform generating means includes X to vibrating device, Y-direction vibrating device and connector, and X passes through company to vibrating device Device is connect to be rigidly attached on Y-direction vibrating device；

The X to vibrating device include bridge-type enlarger one, lever amplifying mechanism one, piezoelectric ceramics one, rigid arm one, displacement Converyer one and fixed block, fixed block and rigid arm one are screwed on vibrating base respectively, and piezoelectric ceramics one passes through spiral shell Nail is mounted in bridge-type enlarger one, and the micro-displacement that bridge-type enlarger one generates passes to lever by displacement transfer device one Enlarger one, lever amplifying mechanism one are used to amplify the micro-displacement of the generation of bridge-type enlarger one；

The Y-direction vibrating device includes bridge-type enlarger two, lever amplifying mechanism two, piezoelectric ceramics two, rigid arm two, displacement Converyer two, primary shaking platform and vibration outer wall, rigid arm two are fixed by screws on vibrating base, piezoelectric ceramics two-way Screw is crossed in bridge-type enlarger two, the micro-displacement that bridge-type enlarger two generates is passed to by displacement transfer device two Lever amplifying mechanism two, lever amplifying mechanism two are used to amplify the micro-displacement of the generation of bridge-type enlarger two, X to vibrating device and Y-direction vibrating device is mutual indepedent, and coupling influence is not present.

9. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the base platform packet Pedestal and portal frame are included, portal frame is rigidly connected on pedestal.

10. using a kind of polishing method of roll shape vibration auxiliary polishing device as described in claim 1, which is characterized in that packet Include the following steps：

(1), it is polished workpiece to be sticked on shaking table by paraffin, X is polished workpiece to the drive of motion platform two and bears along X Direction moves to designated position, and Z-direction motion platform drives polishing roll to move to designated position along Z-direction；

(2), the X for being polished workpiece is put to displacement from bridge-type enlarger one, lever amplifying mechanism a pair of X to the two level of displacement Big effect realizes that Y-direction displacement realizes the two level amplification of Y-direction displacement by bridge-type enlarger two, lever amplifying mechanism two, X is a curve movement in primary shaking platform Vector modulation to displacement and Y-direction displacement, if polishing roll is rotated clockwise around Y-axis, Then compound shaking platform is moved along X positive directions, i.e., polishing roll occurs what opposite counter motion was contacted with line with compound shaking platform Form is polished to being polished workpiece, when needing to carry out curved surface polishing, by circular arc platform and the cooperation set a table, can make by It polishes workpiece and generates swing, complete the polishing to curved surface；

(3), when polishing carries out to a certain extent, polishing roll is modified, and X is to motion platform one and X to movement at this time Platform two moves in X direction simultaneously, and Z-direction motion platform is moved along Z-direction, moves to finishing rollers of the X into motion platform one and arrives Until the polishing roller surface in Z-direction motion platform, online finishing in real time is proceeded by, the movement of polishing roll and finishing roller is phase To counter motion；

(4), after the completion of online finishing in real time, adjustment X is to motion platform one, X to the position of motion platform two and Z-direction motion platform It sets, so that be polished workpiece of the X into motion platform two is reached polishing roller surface, re-start polishing；

(5), step 2 and step 3 are constantly repeated, until completing polishing.