CN108312043A - Roll shape vibrates auxiliary polishing device and method - Google Patents
Roll shape vibrates auxiliary polishing device and method Download PDFInfo
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- CN108312043A CN108312043A CN201810323490.7A CN201810323490A CN108312043A CN 108312043 A CN108312043 A CN 108312043A CN 201810323490 A CN201810323490 A CN 201810323490A CN 108312043 A CN108312043 A CN 108312043A
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- 238000005498 polishing Methods 0.000 title claims abstract description 104
- 238000000034 method Methods 0.000 title claims abstract description 9
- 150000001875 compounds Chemical class 0.000 claims abstract description 29
- 238000006073 displacement reaction Methods 0.000 claims description 88
- 230000008878 coupling Effects 0.000 claims description 46
- 238000010168 coupling process Methods 0.000 claims description 46
- 238000005859 coupling reaction Methods 0.000 claims description 46
- 239000000919 ceramic Substances 0.000 claims description 16
- 230000003321 amplification Effects 0.000 claims description 12
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 12
- 238000012546 transfer Methods 0.000 claims description 10
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 8
- 239000012188 paraffin wax Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 2
- 238000007514 turning Methods 0.000 abstract description 4
- 239000002421 finishing Substances 0.000 description 15
- 238000010586 diagram Methods 0.000 description 13
- 238000003754 machining Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- 241000237858 Gastropoda Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/04—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by mechanical gearing only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/04—Devices or means for dressing or conditioning abrasive surfaces of cylindrical or conical surfaces on abrasive tools or wheels
- B24B53/053—Devices or means for dressing or conditioning abrasive surfaces of cylindrical or conical surfaces on abrasive tools or wheels using a rotary dressing tool
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention relates to a kind of roll shape vibration auxiliary polishing device and methods, belong to Ultra-precision Turning field.Z-direction motion platform is connect by screw with the unification of Z axis kinetic system and Z axis kinematic system two, Z axis kinetic system is unified and Z axis kinematic system two is connect by screw with base platform, X is connect by screw with the unification of X-axis kinetic system and X-axis kinematic system two to motion platform one, X-axis kinetic system is unified and X-axis kinematic system two is connect by screw with base platform, X is connect by screw with X-axis kinematic system three to motion platform two, X-axis kinematic system three is connect by screw with base platform, and compound shaking platform is connect with X to motion platform two by screw.The present invention has many advantages, such as that polishing efficiency is high, polishing uniformity and consistency are good, can complete the polishing treatment to curved surface and real-time online finishing.
Description
Technical field
The present invention relates to Ultra-precision Turning field, espespecially roll shape vibration assists polishing method and device.
Background technology
With the fast development of science and technology, not only the quality of piece surface and integrality are carried in the every field of industry
Higher requirement is gone out, and part gradually tends to microminiaturization, this requires machining accuracies, and one is improved on conventional machining techniques
A precision, therefore Ultraprecision Machining is proposed, Ultraprecision Machining is mainly used in large scale integrated circuit, aviation boat
It, the fields such as semiconductor, the workpiece surface precision after processing is up to nanoscale or Subnano-class, in Ultra-precision Turning, polishing
It always is main manufacturing process, and the usually final step of Ultra-precision Turning, the purpose is to obtain smooth, smooth table
Face.
The pure youth in Japanese scholars river bend the 1960s portion by vibrational system be introduced into mechanical processing in, and be developing progressively for
Hot topic in mechanical processing industry, the purpose of vibration machining are that free abrasive is made more to be evenly distributed in workpieces processing surface,
To achieve the purpose that homogenization polishing, it is particularly suitable for the processing of the hard brittle materials such as glass, quartz, silicon carbide.
Mainly there are ion beam polishing, Jet Polishing for the processing method of hard brittle material at present, chemically-mechanicapolish polish and shake
Dynamic auxiliary polishing etc., ion beam polishing are mainly that the ion beam current of the accelerated formation of ion generated using ion gun is emitted to work
Part surface makes material deformation separation, but its polishing efficiency is relatively low；Jet Polishing is a kind of polishing polishing precision up to atom level
Means, but its factory interface is unstable also makes application range smaller；Conventional chemical-mechanical polishing process is mainly used for semiconductor system
It makes, flexible printed circuit board and manufacture electronic device etc., chemical-mechanical polishing system makes to be polished workpiece to be turned round on its axis
Square so that the problems such as processed ultra-thin matrix may show tearing or fold；Most of vibration auxiliary polishing device at present
It is the resonance-type that mechanical energy is converted electrical energy by piezoelectric transducer, most vibration auxiliary polishing device is resonance
Type, although the vibration frequency of the vibration auxiliary polishing device of resonance type is higher, vibration parameters can not adjust, and be not easy to be closed
Ring controls, in contrast, the vibration auxiliary polishing device of off-resonance type have working range is wide, kinematic parameter can reconcile be easy into
The advantages that row closed-loop control, so, the design that off-resonance type vibrates auxiliary polishing device is still a key task.
Invention content
The present invention provides a kind of roll shape vibration auxiliary polishing device and method, with solve presently, there are polishing efficiency it is low,
The small problem of application range.
The technical solution adopted by the present invention is that：Including the unification of Z axis kinetic system, Z axis kinematic system two, Z-direction motion platform, X
Axis motion system one, X-axis kinematic system two, X are to motion platform one, X-axis kinematic system three, X to motion platform two, compound vibration
Platform, base platform, wherein Z-direction motion platform are connect by screw with the unification of Z axis kinetic system and Z axis kinematic system two, Z axis fortune
Dynamic system one and Z axis kinematic system two are connect by screw with base platform, and X is moved to motion platform one by screw and X-axis
System one and X-axis kinematic system two connect, and X-axis kinetic system is unified and X-axis kinematic system two is connect by screw with base platform,
X is connect by screw with X-axis kinematic system three to motion platform two, and X-axis kinematic system three is connect by screw with base platform,
Compound shaking platform is connect with X to motion platform two by screw.
The Z axis kinetic system is unified identical with two structure of Z axis kinematic system, and wherein Z axis kinetic system includes uniformly：I-shaped
The ball-screw that shape guide rail one, engine base one, bearing block one, shaft coupling one, slide unit one, bottom plate one, motor one and motor one drive
One, the I-shaped guide rail one is connect by screw with bottom plate one, and motor one is connect by screw with engine base one, and engine base one passes through
Screw is connect with bottom plate one, and motor one is connect by shaft coupling one and bearing block one with ball-screw one, and ball-screw one is installed
Between I-shaped guide rail one, slide unit one is mounted on I-shaped guide rail one.
The Z-direction motion platform includes motor erecting bed one, motor two, bearing block two, shaft coupling two, motor supporting table
One, polishing roll, torque sensor and polishing roll shaft, wherein motor two are connect by screw with motor erecting bed one, motor two
Output shaft is connect by shaft coupling two with polishing roll, and the polishing roll other end is connected on bearing block two, and bearing block two passes through screw
It is connect with motor supporting table one, torque sensor is mounted on polishing roll shaft, and motor erecting bed one and motor supporting table one are logical
Screw is crossed to connect with slide unit.
The X-axis kinetic system is unified identical with two structure of X-axis kinematic system, and wherein X-axis kinetic system includes uniformly I-shaped
Shape guide rail two, engine base two, bearing block three, shaft coupling three, slide unit two, bottom plate two, motor three and ball-screw two, it is described I-shaped
Guide rail two is connect by screw with bottom plate two, and motor three is connect by screw with engine base two, and engine base two is flat by screw and pedestal
Platform connects, and motor three is connect by shaft coupling three and bearing block three with ball-screw two, and ball-screw two is mounted on I-shaped lead
Between rail two, slide unit two is mounted on I-shaped guide rail two.
The X includes motor four, motor erecting bed two, motor supporting table two, shaft coupling four, bearing to motion platform one
Seat four and finishing roller, wherein motor four are fixed on motor erecting bed two, and the output shaft of motor four passes through shaft coupling four and finishing
Roller connects, and the other end for modifying roller is mounted in the bearing block four of motor supporting table two, motor erecting bed two and motor supporting table
Two are connect by screw with slide unit.
The X-axis kinematic system three include I-shaped guide rail three, engine base three, bearing block five, shaft coupling five, slide unit three,
Bottom plate three, motor five and ball-screw three, wherein I-shaped guide rail three is connect by screw with bottom plate three, motor five passes through screw
It is connect with engine base three, engine base three is connect by screw with bottom plate three, and motor five passes through shaft coupling five and bearing block five and ball wire
Thick stick three connects, and ball-screw three is mounted between I-shaped guide rail three, and slide unit three is mounted on I-shaped guide rail three.
The X includes motor six, retarder, shaft coupling six, bearing block six, circular arc platform, sets a table, snail to motion platform two
Bar and worm gear, wherein circular arc platform are mounted on by screw on slide unit, and motor six is completed by retarder and shaft coupling connecting worm
The rotation of worm screw, worm screw drive worm gear to complete the rotation of worm gear, and worm gear in setting a table, set a table complete in circular arc platform by worm gear drive
At non-plane motion, set a table on be horizontally installed with compound shaking platform.
The compound shaking platform includes vibrating base, shaking platform generating means, antifriction wiping board, shaking table, position
Displacement sensor and displacement sensor fixture body, wherein shaking platform generating means are connect by screw with vibrating base, and work is vibrated
Make have an antifriction wiping board between platform and shaking platform generating means, for reduce shaking table and shaking platform generating means it
Between friction, shaking table and antifriction wiping board be fixed by screws on shaking platform generating means, displacement sensor installation
In displacement sensor clamp body, two displacement sensor fixture bodies are installed on shaking platform generating means, two displacements
The front end of sensor is contacted with shaking table, for measuring the X of shaking table to displacement and Y-direction displacement, vibrating base
Including flange, flange is used to fix the Y-direction displacement of shaking platform generating means；
The shaking platform generating means includes X to vibrating device, Y-direction vibrating device and connector, and X is logical to vibrating device
Connector is crossed to be rigidly attached on Y-direction vibrating device；
The X to vibrating device include bridge-type enlarger one, lever amplifying mechanism one, piezoelectric ceramics one, rigid arm one,
Displacement transfer device one and fixed block, fixed block and rigid arm one are screwed on vibrating base respectively, and piezoelectric ceramics one is logical
Screw is crossed in bridge-type enlarger one, the micro-displacement that bridge-type enlarger one generates is passed to by displacement transfer device one
Lever amplifying mechanism one, lever amplifying mechanism one are used to amplify the micro-displacement of the generation of bridge-type enlarger one；
The Y-direction vibrating device include bridge-type enlarger two, lever amplifying mechanism two, piezoelectric ceramics two, rigid arm two,
Displacement transfer device two, primary shaking platform and vibration outer wall, rigid arm two are fixed by screws on vibrating base, piezoelectric ceramics
Two are mounted on by screw in bridge-type enlarger two, and the micro-displacement that bridge-type enlarger two generates is passed by displacement transfer device two
Lever amplifying mechanism two is passed, lever amplifying mechanism two is used to amplify the micro-displacement of the generation of bridge-type enlarger two, and X is filled to vibration
Set it is mutual indepedent with Y-direction vibrating device, be not present coupling influence.
The base platform includes pedestal and portal frame, and portal frame is rigidly connected on pedestal.
The polishing method that auxiliary polishing device is vibrated using roll shape, is included the following steps：
(1), it is polished workpiece to be sticked on shaking table by paraffin, X is polished workpiece edge to the drive of motion platform two
X negative directions move to designated position, and Z-direction motion platform drives polishing roll to move to designated position along Z-direction；
(2), the X of workpiece is polished to displacement from bridge-type enlarger one, lever amplifying mechanism a pair of X to the two of displacement
Grade amplification realizes that Y-direction displacement is by bridge-type enlarger two, lever amplifying mechanism two to the two level amplification of Y-direction displacement
It realizes, X is a curve movement in primary shaking platform Vector modulation to displacement and Y-direction displacement, if polishing roll is clockwise around Y-axis
Rotation, then compound shaking platform is moved along X positive directions, i.e., opposite counter motion is connect polishing roll with line with the generation of compound shaking platform
Tactile form (roller is to plane) is polished to being polished workpiece, when needing to carry out curved surface polishing, by circular arc platform and is set a table
Cooperation, can make to be polished workpiece and generate swing, complete the polishing to curved surface；
(3), when polishing carries out to a certain extent, polishing roll is modified, at this time X to motion platform one and X to
Motion platform two moves in X direction simultaneously, and Z-direction motion platform is moved along Z-direction, moves to finishings of the X into motion platform one
Until roller reaches the polishing roller surface in Z-direction motion platform, online finishing in real time, the movement of polishing roll and finishing roller are proceeded by
For opposite counter motion；
(4), after the completion of online finishing in real time, adjustment X is to motion platform one, X to motion platform two and Z-direction motion platform
Position, make X into motion platform two be polished workpiece reach polishing roller surface, re-start polishing；
(5), step 2 and step 3 are constantly repeated, until completing polishing.
It is an advantage of the invention that：
(1) a kind of new-type roll shape polishing is proposed, polishing is assisted compared to traditional vibration, is polished workpiece and polishing
The way of contact of tool becomes line contact from conventional point, face contact, it is contemplated that the friction of linear contact material removal mechanism compared with
Small, it has the possibility of very little that ultra-thin matrix is caused to show flexural deformation, and big rectangular glass matrix is also less likely table
Reveal brittle fracture, in addition, roll shape polishing system can be applied to continuous automatic production process, ensures workpiece surface smoothness
With the consistency that ensure that polishing while integrality；
(2) polishing roll takes relatively reversed motion mode, polishing roll to generate the effect of two-way removal with compound shaking platform
Fruit greatly improves average removal rate；
(3) compound shaking platform amplifies mode using bridge-type enlarger and the matched two level of lever amplifying mechanism, greatly
The big displacement stroke for increasing device, X is mutual indepedent to vibrating device and Y-direction vibrating device, is independent of each other, and solves compound shake
The coupled problem of moving platform, and the horizontal positioned uniformity for also ensuring polishing of compound shaking platform；
(4) circular arc platform is added, so that device is completed the polishing to curved surface, greatly increases the usable range of device,
Real-time trimming device is added, polishing roll is allow to modify in real time online, effectively avoids the mistake that is loaded caused by being repeatedly loaded
Difference.
Description of the drawings
Fig. 1 is the structural schematic diagram of the present invention；
Fig. 2 is that the Z axis kinetic system of the present invention is unified, structural schematic diagram of Z axis kinematic system two and Z-direction motion platform；
Fig. 3 is the structural schematic diagram of the motor erecting bed one of the present invention；
Fig. 4 is the structural schematic diagram of the motor supporting table one of the present invention；
Fig. 5 is the structural schematic diagram of the unified X-axis kinetic system of the present invention, X-axis kinematic system two and X to motion platform one；
Fig. 6 is the structural schematic diagram of the motor supporting table two of the present invention；
Fig. 7 be the present invention X-axis kinematic system three and structural schematic diagram from X to motion platform two；
Fig. 8 be the present invention structural schematic diagram from X to two full section of motion platform；
Fig. 9 is the vibrating base of the present invention, vibrates the structural schematic diagram of source platform and antifriction wiping board；
Figure 10 is the structural schematic diagram of the shaking platform generating means of the present invention；
Figure 11 is the structural schematic diagram of the compound shaking platform of the present invention；
Figure 12 is the structural schematic diagram of the base platform of the present invention；
Figure 13 is the structural schematic diagram of the movement locus of the compound shaking platform of the present invention；
Reference sign：Z axis kinetic system unified 1, Z axis kinematic system 22, Z-direction motion platform 3, X-axis kinetic system are unified
4, X-axis kinematic system 25, X is to motion platform 1, X-axis kinematic system 37, and X is to motion platform 28, compound shaking platform 9,
Base platform 10 is polished workpiece 11, I-shaped guide rail 1, engine base 1, bearing block 1, shaft coupling 104, slide unit
105, bottom plate 106, motor 1, ball-screw 1, motor erecting bed 1, motor 2 302, bearing block 2 303, connection
Axis device 2 304, motor supporting table 1, polishing roll 306, torque sensor 307 polish roll shaft 308, I-shaped guide rail two
401, engine base 2 402, bearing block 3 403, shaft coupling 404, slide unit 405, bottom plate 2 406, motor 3 407, ball-screw two
408, motor 4 601, motor erecting bed 2 602, motor supporting table 2 603, shaft coupling 4 604, bearing block 4 605, finishing roller
606, I-shaped guide rail 3 701, engine base 702, bearing block 5 703, shaft coupling 5 704, slide unit 3 705, bottom plate 3 706, motor
5 707, ball-screw 3 708, motor 6 801, retarder 802, shaft coupling 6 803, bearing block 6 804, circular arc platform 805, pendulum
Platform 806, worm screw 807, worm gear 808, vibrating base 901, shaking platform generating means 902, antifriction wiping board 903, shaking table
904, displacement sensor 905, displacement sensor fixture body 906, flange 90101, X is to vibrating device 90201, Y-direction vibrating device
90202, connector 90203, bridge-type enlarger 1, lever amplifying mechanism 1, piezoelectric ceramics one
9020103, rigid arm 1, displacement transfer device 1, fixed block 9020106, bridge-type enlarger two
9020201, lever amplifying mechanism 2 9020202, piezoelectric ceramics 2 9020203, rigid arm 2 9020204, displacement transfer device two
9020205, primary shaking platform 9020206 vibrates outer wall 9020207, pedestal 1001, portal frame 1002.
Specific implementation mode
As shown in Figure 1, including Z axis kinetic system unification 1, Z axis kinematic system 22, Z-direction motion platform 3, X-axis kinematic system
One 4, X-axis kinematic system 25, X are to motion platform 1, X-axis kinematic system 37, X to motion platform 28, compound shaking platform
9, base platform 10, wherein Z-direction motion platform 3 are connect by screw with Z axis kinetic system unified 1 and Z axis kinematic system 22, Z axis
Kinetic system unified 1 and Z axis kinematic system 22 are connect by screw with base platform 10, and X passes through screw and X to motion platform 1
Axis motion system 1 and X-axis kinematic system 25 connect, and X-axis kinetic system unified 4 and X-axis kinematic system 25 pass through screw and bottom
Seat platform 10 connects, and X is connect by screw with X-axis kinematic system 37 to motion platform 28, and X-axis kinematic system 37 passes through spiral shell
Nail is connect with base platform 10, is polished workpiece 11 and is sticked on compound shaking platform 9 by paraffin, compound shaking platform 9 passes through
Screw is connect with X to motion platform 28.
Z axis kinetic system unification 1, Z axis kinematic system 22 and Z-direction motion platform 3 coordinate together completes Z-direction motion platform 1
Straight reciprocating motion, 25 X-axis kinetic system unification 4, X-axis kinematic system X coordinate together to motion platform 1 completes X to movement
The straight reciprocating motion of platform 1, X-axis kinematic system 37 and X coordinate together to motion platform 28 completes X to motion platform two
8 straight reciprocating motion, in order to ensure polishing stability, uniformity and consistency, device using compound shaking platform 8 X,
Y-direction translation, Z-direction motion platform 3 Z-direction translation and polishing roll 306 around Y-axis rotate four degree of freedom.
Z axis kinetic system as shown in Figure 2, Figure 3 and Figure 4 unified 1 is identical with 22 structure of Z axis kinematic system, is moved with Z axis
For system 1, Z axis kinetic system unified 1 includes I-shaped guide rail 1, engine base 1, bearing block 1, shaft coupling
One 104, the ball-screw 1 that slide unit 1, bottom plate 1, motor 1 and motor 1 drive, I-shaped guide rail
One 101 are connect by screw with bottom plate 1, and motor 1 is connect by screw with engine base 1, and engine base 1 passes through spiral shell
Nail is connect with bottom plate 1, and motor 1 is connect by shaft coupling 1 and bearing block 1 with ball-screw 1, rolling
Ballscrew 1 is mounted between I-shaped guide rail 1, and slide unit 1 is mounted on I-shaped guide rail 1.
Z-direction motion platform 3 includes motor erecting bed 1, motor 2 302, bearing block 2 303, shaft coupling 2 304, electricity
Machine supporting table 1, polishing roll 306, torque sensor 307 and polishing roll shaft 308, motor 2 302 are pacified by screw and motor
It fills platform 1 to connect, the output shaft of motor 2 302 is connect by shaft coupling 2 304 with polishing roll 306,306 other end of polishing roll
It is connected on bearing block 2 303, bearing block 2 303 is connect by screw with motor supporting table 1, and torque sensor 307 is pacified
On polishing roll shaft 308, motor erecting bed 1 and motor supporting table 1 are connect by screw with slide unit 105.
Oneself of polishing roll 306 is completed in motor 2 302, bearing block 2 303 and the cooperation of shaft coupling 2 304 of Z-direction motion platform 3
Transhipment is dynamic, the torque that torque sensor 307 is generated for measuring polishing roll 306 in real time.
X-axis kinetic system as shown in Figure 5 and Figure 6 unified 4 is identical with 25 structure of X-axis kinematic system, with X-axis kinematic system
For one 4, X-axis kinetic system unified 4 include I-shaped guide rail 2 401, engine base 2 402, bearing block 3 403, shaft coupling 3 404,
The ball-screw 2 408 that slide unit 2 405, bottom plate 2 406, motor 3 407 and motor 3 407 drive, I-shaped guide rail 2 401 are logical
It crosses screw to connect with bottom plate 2 406, motor 3 407 is connect by screw with engine base 2 402, and engine base 2 402 passes through screw and bottom
Seat platform 10 connects, and motor 3 407 is connect by shaft coupling 3 404 and bearing block 3 403 with ball-screw 2 408, ball wire
Thick stick 2 408 is mounted between I-shaped guide rail 2 401, and slide unit 2 405 is mounted on I-shaped guide rail 2 401.
X includes motor 4 601, motor erecting bed 2 602, motor supporting table 2 603, shaft coupling four to motion platform 1
604, bearing block 4 605 and finishing roller 606, motor 4 601 are fixed on motor erecting bed 2 602, the output shaft of motor 4 601
It is connect with finishing roller 606 by shaft coupling 4 604, the other end of finishing roller 606 is mounted on the bearing block of motor supporting table 2 603
In 4 605, motor erecting bed 2 602 and motor supporting table 2 603 are connect by screw with slide unit 105.
X coordinates to the motor 4 601, shaft coupling 4 604 and bearing block 4 605 of motion platform 1 completes finishing roller 606
Spinning motion, in order to complete to modify in real time.
X-axis kinematic system 37 as shown in Figure 7 and Figure 8 includes I-shaped guide rail 3 701, engine base 3 702, bearing block five
703, the ball-screw 3 708 that shaft coupling 5 704, slide unit 3 705, bottom plate 3 706, motor 5 707 and motor 5 707 drive,
I-shaped guide rail 3 701 is connect by screw with bottom plate 3 706, and motor 5 707 is connect by screw with engine base 3 702, engine base
3 702 are connect by screw with bottom plate 3 706, and motor 5 707 passes through shaft coupling 5 704 and bearing block 5 703 and ball-screw
3 708 connections, ball-screw 3 708 are mounted between I-shaped guide rail 3 701, and slide unit 3 705 is mounted on I-shaped guide rail three
On 701.
X includes motor 6 801, retarder 802, shaft coupling 6 803, bearing block 6 804, circular arc platform to motion platform 28
805, it sets a table 806, worm screw 807 and worm gear 808, circular arc platform 805 is mounted on by screw on slide unit 105, and motor 6 801 is by subtracting
803 connecting worm 807 of fast device 802 and shaft coupling, completes the rotation of worm screw 807, and worm screw 807 drives worm gear 808 to complete worm gear 808
Rotation, worm gear 808, which is mounted on, sets a table in 806, and the drive of worm gear 808 is set a table 806 completes non-plane motion in circular arc platform 805, sets a table
Compound shaking platform 9 is horizontally installed on 806.
The compound shaking platform 9 as shown in Fig. 9, Figure 10 and Figure 11 includes vibrating base 901, shaking platform generating means
902, antifriction wiping board 903, shaking table 904, displacement sensor 905 and displacement sensor fixture body 906, shaking platform occur
Device 902 is connect by screw with vibrating base 901, has one to prevent between shaking table 904 and shaking platform generating means 902
Friction plate 903, for reducing the friction between shaking table 904 and shaking platform generating means 902, shaking table 904
It is fixed by screws on shaking platform generating means 902 with antifriction wiping board 903, displacement sensor 905 is mounted on displacement sensing
In device clamp body 906, two displacement sensor fixture bodies 906 are installed on shaking platform generating means 902, and two displacements pass
The front end of sensor 905 is contacted with shaking table 904, and the X for measuring shaking table 904 shakes to displacement and Y-direction displacement
Dynamic pedestal 901 includes flange 90101, and flange 90101 is used to fix the Y-direction displacement of shaking platform generating means 902.
Shaking platform generating means 902 includes X to vibrating device 90201, Y-direction vibrating device 90202 and connector
90203, X are rigidly attached to by connector 90203 on Y-direction vibrating device 90202 to vibrating device 90201.
X includes bridge-type enlarger 1, lever amplifying mechanism 1, piezoelectricity to vibrating device 90201
Ceramics 1, rigid arm 1, displacement transfer device 1 and fixed block 9020106, fixed block
9020106 and rigid arm 1 be screwed respectively on vibrating base 901, piezoelectric ceramics 1 passes through spiral shell
Nail is mounted in bridge-type enlarger 1, and the micro-displacement that bridge-type enlarger 1 generates is transmitted by displacement
Device 1 passes to lever amplifying mechanism 1, and lever amplifying mechanism 1 is for amplifying bridge-type amplification
The micro-displacement that mechanism 1 generates.
Y-direction vibrating device 90202 includes bridge-type enlarger 2 9020201, lever amplifying mechanism 2 9020202, piezoelectricity
Ceramics 2 9020203, rigid arm 2 9020204, displacement transfer device 2 9020205, primary shaking platform 9020206 and vibration are outer
Wall 9020207, rigid arm 2 9020204 are fixed by screws on vibrating base 901, and piezoelectric ceramics 2 9020203 passes through spiral shell
Nail is mounted in bridge-type enlarger 2 9020201, and the micro-displacement that bridge-type enlarger 2 9020201 generates is transmitted by displacement
Device 2 9020205 passes to lever amplifying mechanism 2 9020202, and lever amplifying mechanism 2 9020202 is for amplifying bridge-type amplification
The micro-displacement that mechanism 2 9020201 generates, X is mutual indepedent to vibrating device 90201 and Y-direction vibrating device 90202, and coupling is not present
Group photo is rung.
Base platform 10 as shown in figure 12 includes pedestal 1001 and portal frame 1002, and portal frame 1002 is rigidly connected in bottom
On seat 1001, base platform 10 is used to provide the installation and fixation of whole device.
It is the movement locus figure of compound shaking platform 9 shown in Figure 13, F1 is input power in figure, and L1 is X to displacement, X X
To output displacement, L2 is Y-direction displacement, and Y is the output displacement of Y-direction, and fixed blocks 9020106 of the X into vibrating device 90201 is logical
It crosses screw to be fixed on vibrating base 901, the amplification for determining bridge-type enlarger 1, rigid arm one
9020104 used screws are fixed on vibrating base 901, for limiting the X of rigid arm 1 to displacement, Y-direction vibration dress
The connection vibration outer wall 9020207 of rigid arm 2 9020204 in 90202 is set, the Y-direction displacement of rigid arm 2 9020204 is by shaking
Dynamic outer wall 9020207 is fixed, and the amplification of bridge-type enlarger 2 9020201 is determined by vibrating outer wall 9020207, works as work
When part needs to be polished, respectively to 2 9020203 applied force F1 of piezoelectric ceramics 1 and piezoelectric ceramics, i.e., to bridge-type
2 9020201 applied force F1 of enlarger 1 and bridge-type enlarger, power F1 is through bridge-type enlarger 1
Be converted into L1 and L2 after the amplification of bridge-type enlarger 2 9020201, L1 and L2 pass through lever amplifying mechanism one
9020101 and lever amplifying mechanism 2 9020201 carry out displacement equations, amplified displacement is respectively X and Y, such as schemes X1 and X2
Respectively X-direction first time and secondary output displacement, and so on, Y1 and Y2 are respectively Y-direction first time and second
Output displacement, and so on, displacement X and displacement Y are T in the Vector modulation displacement of primary shaking platform 9020206, i.e. T1,
T2, T3, T4 and T5 be respectively for the first time, second, third time, the 4th time and the 5th time Vector modulation displacement, and so on,
Example：The magnifying power of bridge-type enlarger 1 and bridge-type enlarger 2 9020201 is A times, lever amplifying mechanism one
9020102 and lever amplifying mechanism 2 9020202 magnifying power be B times, so comprehensive magnification rate is about A X B times, thus may be used
See that this platform has good amplification.
Using a kind of polishing method of roll shape vibration auxiliary polishing device, include the following steps：
(1), it is polished workpiece 11 to be sticked on shaking table 904 by paraffin, X is polished to the drive of motion platform 28
Workpiece 11 moves to designated position along X negative directions, and Z-direction motion platform 3 drives polishing roll 306 to move to designated position along Z-direction；
(2), the X of workpiece 11 is polished to displacement by bridge-type enlarger 1, lever amplifying mechanism one
9020102 couples of X realize that Y-direction displacement is by bridge-type enlarger 2 9020201, lever amplification machine to the two level amplification of displacement
The two level amplification of 2 9020202 pairs of Y-direction displacements of structure realizes that X is to displacement and Y-direction displacement in primary shaking platform 9020206
Vector modulation is a curve movement, if polishing roll 306 is rotated clockwise around Y-axis, compound shaking platform 9 is transported along X positive directions
Dynamic, i.e., (roller is to plane) occurs with respect to counter motion in the form of line contacts for polishing roll 306 and compound shaking platform 9 to being polished
Workpiece 11 is polished, when need carry out curved surface polishing when, by circular arc platform 803 and set a table 804 cooperation, can make to be polished
Workpiece 11 generates swing, completes the polishing to curved surface；
(3), when polishing carries out to a certain extent, polishing roll 306 is modified, and X is to motion platform 1 at this time
It is moved in X direction simultaneously to motion platform 28 with X, Z-direction motion platform 3 is moved along Z-direction, moves to X to motion platform 1
In finishing roller 606 reach 306 surface of polishing roll in Z-direction motion platform 3 until, proceed by online finishing in real time, polishing
The movement of roller 306 and finishing roller 606 is opposite counter motion；
(4), after the completion of online finishing in real time, adjustment X moves flat to motion platform 1, X to motion platform 28 and Z-direction
The position of platform 3 makes be polished workpiece of the X into motion platform 28 reach 306 surface of polishing roll, re-starts polishing；
(5), step 2 and step 3 are constantly repeated, until completing polishing.
Claims (10)
1. a kind of roll shape vibrates auxiliary polishing device, it is characterised in that：Including the unification of Z axis kinetic system, Z axis kinematic system two, Z-direction
Motion platform, the unification of X-axis kinetic system, X-axis kinematic system two, X are to motion platform one, X-axis kinematic system three, X to motion platform
Two, compound shaking platform, base platform, wherein Z-direction motion platform pass through screw and the unification of Z axis kinetic system and Z axis kinematic system
Two connections, Z axis kinetic system is unified and Z axis kinematic system two is connect by screw with base platform, and X passes through spiral shell to motion platform one
Nail is connect with the unification of X-axis kinetic system and X-axis kinematic system two, and X-axis kinetic system is unified and X-axis kinematic system two passes through screw and bottom
Seat platform connection, X are connect by screw with X-axis kinematic system three to motion platform two, and X-axis kinematic system three passes through screw and bottom
Seat platform connection, compound shaking platform are connect with X to motion platform two by screw.
2. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the Z axis kinetic system
Unified identical with two structure of Z axis kinematic system, wherein Z axis kinetic system includes uniformly：I-shaped guide rail one, engine base one, bearing block
One, the ball-screw one that shaft coupling one, slide unit one, bottom plate one, motor one and motor one drive, the I-shaped guide rail one pass through
Screw is connect with bottom plate one, and motor one is connect by screw with engine base one, and engine base one is connect by screw with bottom plate one, motor one
It is connect with ball-screw one by shaft coupling one and bearing block one, ball-screw one is mounted between I-shaped guide rail one, slide unit
One is mounted on I-shaped guide rail one.
3. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the Z-direction movement is flat
Platform include motor erecting bed one, motor two, bearing block two, shaft coupling two, motor supporting table one, polishing roll, torque sensor and
Roll shaft is polished, wherein motor two is connect by screw with motor erecting bed one, and the output shaft of motor two passes through shaft coupling two and throwing
Smooth roll connects, and the polishing roll other end is connected on bearing block two, and bearing block two is connect by screw with motor supporting table one, torque
Sensor is mounted on polishing roll shaft, and motor erecting bed one and motor supporting table one are connect by screw with slide unit.
4. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the X-axis kinetic system
Unified identical with two structure of X-axis kinematic system, wherein X-axis kinetic system includes uniformly I-shaped guide rail two, engine base two, bearing block
Three, shaft coupling three, slide unit two, bottom plate two, motor three and ball-screw two, the I-shaped guide rail two pass through screw and bottom plate two
Connection, motor three are connect by screw with engine base two, and engine base two is connect by screw with base platform, and motor three passes through shaft coupling
Three and bearing block three connect with ball-screw two, ball-screw two be mounted on I-shaped guide rail two between, slide unit two be mounted on work
On font guide rail two.
5. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the X is flat to movement
Platform one includes motor four, motor erecting bed two, motor supporting table two, shaft coupling four, bearing block four and finishing roller, wherein motor four
It is fixed on motor erecting bed two, the output shaft of motor four is connect by shaft coupling four with finishing roller, and the other end peace of roller is modified
In the bearing block four of motor supporting table two, motor erecting bed two and motor supporting table two are connect by screw with slide unit.
6. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the X-axis kinetic system
System three includes I-shaped guide rail three, engine base three, bearing block five, shaft coupling five, slide unit three, bottom plate three, motor five and ball-screw
Three, wherein I-shaped guide rail three is connect by screw with bottom plate three, motor five is connect by screw with engine base three, and engine base three passes through
Screw is connect with bottom plate three, and motor five is connect by shaft coupling five and bearing block five with ball-screw three, and ball-screw three is installed
Between I-shaped guide rail three, slide unit three is mounted on I-shaped guide rail three.
7. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the X is flat to movement
Platform two includes motor six, retarder, shaft coupling six, bearing block six, circular arc platform, sets a table, worm and worm wheel, and wherein circular arc platform passes through
Screw is mounted on slide unit, and motor six completes the rotation of worm screw by retarder and shaft coupling connecting worm, and worm screw drives worm gear
The rotation of worm gear is completed, for worm gear in setting a table, worm gear drive is set a table completes non-plane motion in circular arc platform, upper horizontal peace of setting a table
Equipped with compound shaking platform.
8. roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the compound shaking platform includes
Vibrating base, shaking platform generating means, antifriction wiping board, shaking table, displacement sensor and displacement sensor fixture body,
Middle shaking platform generating means is connect by screw with vibrating base, has one between shaking table and shaking platform generating means
Antifriction wiping board, for reducing the friction between shaking table and shaking platform generating means, shaking table and antifriction wiping board
It is fixed by screws on shaking platform generating means, displacement sensor is mounted in displacement sensor fixture body, two displacements
Clamp of sensor body is installed on shaking platform generating means, and the front end of two displacement sensors connects with shaking table
It touches, for measuring the X of shaking table to displacement and Y-direction displacement, vibrating base includes flange, and flange is for fixing shaking platform
The Y-direction displacement of generating means；
The shaking platform generating means includes X to vibrating device, Y-direction vibrating device and connector, and X passes through company to vibrating device
Device is connect to be rigidly attached on Y-direction vibrating device；
The X to vibrating device include bridge-type enlarger one, lever amplifying mechanism one, piezoelectric ceramics one, rigid arm one, displacement
Converyer one and fixed block, fixed block and rigid arm one are screwed on vibrating base respectively, and piezoelectric ceramics one passes through spiral shell
Nail is mounted in bridge-type enlarger one, and the micro-displacement that bridge-type enlarger one generates passes to lever by displacement transfer device one
Enlarger one, lever amplifying mechanism one are used to amplify the micro-displacement of the generation of bridge-type enlarger one；
The Y-direction vibrating device includes bridge-type enlarger two, lever amplifying mechanism two, piezoelectric ceramics two, rigid arm two, displacement
Converyer two, primary shaking platform and vibration outer wall, rigid arm two are fixed by screws on vibrating base, piezoelectric ceramics two-way
Screw is crossed in bridge-type enlarger two, the micro-displacement that bridge-type enlarger two generates is passed to by displacement transfer device two
Lever amplifying mechanism two, lever amplifying mechanism two are used to amplify the micro-displacement of the generation of bridge-type enlarger two, X to vibrating device and
Y-direction vibrating device is mutual indepedent, and coupling influence is not present.
9. a kind of roll shape according to claim 1 vibrates auxiliary polishing device, which is characterized in that the base platform packet
Pedestal and portal frame are included, portal frame is rigidly connected on pedestal.
10. using a kind of polishing method of roll shape vibration auxiliary polishing device as described in claim 1, which is characterized in that packet
Include the following steps：
(1), it is polished workpiece to be sticked on shaking table by paraffin, X is polished workpiece to the drive of motion platform two and bears along X
Direction moves to designated position, and Z-direction motion platform drives polishing roll to move to designated position along Z-direction；
(2), the X for being polished workpiece is put to displacement from bridge-type enlarger one, lever amplifying mechanism a pair of X to the two level of displacement
Big effect realizes that Y-direction displacement realizes the two level amplification of Y-direction displacement by bridge-type enlarger two, lever amplifying mechanism two,
X is a curve movement in primary shaking platform Vector modulation to displacement and Y-direction displacement, if polishing roll is rotated clockwise around Y-axis,
Then compound shaking platform is moved along X positive directions, i.e., polishing roll occurs what opposite counter motion was contacted with line with compound shaking platform
Form is polished to being polished workpiece, when needing to carry out curved surface polishing, by circular arc platform and the cooperation set a table, can make by
It polishes workpiece and generates swing, complete the polishing to curved surface；
(3), when polishing carries out to a certain extent, polishing roll is modified, and X is to motion platform one and X to movement at this time
Platform two moves in X direction simultaneously, and Z-direction motion platform is moved along Z-direction, moves to finishing rollers of the X into motion platform one and arrives
Until the polishing roller surface in Z-direction motion platform, online finishing in real time is proceeded by, the movement of polishing roll and finishing roller is phase
To counter motion；
(4), after the completion of online finishing in real time, adjustment X is to motion platform one, X to the position of motion platform two and Z-direction motion platform
It sets, so that be polished workpiece of the X into motion platform two is reached polishing roller surface, re-start polishing；
(5), step 2 and step 3 are constantly repeated, until completing polishing.
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| CN108972302A (en) * | 2018-10-01 | 2018-12-11 | 长春工业大学 | A kind of disresonance type vibration auxiliary polishing device and method |
| CN110238712A (en) * | 2019-07-18 | 2019-09-17 | 长春工业大学 | A kind of vibration auxiliary roll-type magnetorheological finishing device and method |
| CN110695838A (en) * | 2019-11-09 | 2020-01-17 | 绍兴文理学院 | Centerless super-precision grinding and polishing processing device for precision shaft parts |
| CN111300164A (en) * | 2020-03-02 | 2020-06-19 | 九江学院 | Building decorative panel equipment of roughening |
| CN114454095A (en) * | 2022-01-18 | 2022-05-10 | 北京烁科精微电子装备有限公司 | Dressing device for polishing pad |
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