CN106736991B - Five axis three-D ultrasonic burnishing machines of one kind and its application method - Google Patents
Five axis three-D ultrasonic burnishing machines of one kind and its application method Download PDFInfo
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- CN106736991B CN106736991B CN201611226439.1A CN201611226439A CN106736991B CN 106736991 B CN106736991 B CN 106736991B CN 201611226439 A CN201611226439 A CN 201611226439A CN 106736991 B CN106736991 B CN 106736991B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/04—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by mechanical gearing only
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Abstract
A kind of five axis three-D ultrasonic burnishing machine, existing by rack, X is to mobile mechanism, Y-direction mobile mechanism, Z-direction mobile mechanism, ultrasonic vibration burnishing device, rotary table, polishing fluid ultrasonic atomizatio is improved on the basis of applying the five axis two-dimensional ultrasound burnishing machines that liquid device and workpiece on-line measuring device form, by its ultrasonic vibration burnishing device from using One-Dimensional Ultrasonic vibration to become using two dimensional ultrasonic vibration originally, two dimensional ultrasonic vibration is by being mounted on vertical rotating platform, it is completed by the rubbing head pedestal that two Vltrasonic devices of its angle are adjusted in station adjustment hole and connect with the amplitude transformer of Vltrasonic device, rubbing head is fixed on the base.The ultrasonic polishing lathe applies two dimensional ultrasonic vibration on rubbing head, polishing power not only can be improved by two-dimensional ultrasound coupling, but also make the motion profile of rubbing head uniform fold machining area in the form of curved reciprocating detour, significantly improves polishing efficiency.
Description
Technical field
The present invention relates to polishing mechanical, especially a kind of five axis three-D ultrasonic polishing machines for complex-curved polishing
Bed and its application method.
Background technique
With the development of industrial technology, hard brittle material is in fields such as aerospace, automobile, mold, optics and semiconductors
Show wide application prospect.Optical glass is often used to production investigation satellite camera camera lens, stealthy radar searchlighting mirror, height
Fast aircraft window, the large-scale reflecting mirror of astronomical telescope and optical lens, prism in laser beam emitting device etc..Hard crisp material
Expect that optical element routine machining is extremely difficult, is usually obtained by ultraprecision grinding, polishing and precision grinding machining, but
Which long processing time, processing cost are higher.To solve this processing problem, early 20th century a kind of ultrasonic polishing processing method
Start to be applied to industrial circle.Ultrasonic polishing can reduce cutting force and cutting temperature, reduce tool wear, improve processing quality,
Machinable material range is expanded, the various hard brittle materials such as processing glass, ceramics, quartz, diamond and silicon are particularly suitable for.
To solve to include that rubbing head axis direction and complex-curved element polish existing for various ultrasonic polishing lathes at present
The normal direction of point is not overlapped caused because rubbing head and workpiece surface contact stress unevenly influence workpiece surface polishing precision；
Rubbing head is also easy to produce damage to workpiece surface in maximum flexibility compression depth in polishing process；Workpiece, which is immersed in polishing fluid, to be made
The energy of ultrasonic transmission is dispersed, and the energy for passing to abrasive grain in polishing fluid is less, and processing efficiency is lower；Workpiece in polishing process
Offline inspection installs the position error of generation to many technical problems such as the adverse effect of processing quality and efficiency, the application repeatedly
People once disclosed a kind of five axis two of Machining of Curved Surface in the Chinese patent application specification application No. is 201611119653.7
Tie up ultrasonic polishing lathe.The lathe is by rack, XYZ three-dimensional moving mechanism, rotary type ultraphonic vibropolish device, rotary work
Platform, polishing fluid ultrasonic atomizatio apply liquid device and workpiece on-line measuring device composition.It, will when element complex-curved with its polishing optics
The surface shape parameter of element is converted into the feed file of rubbing head, and the numerical control program of lathe is obtained by inverse kinematic, leads to
Crossing program control system makes lathe five-axle linkage (three-dimensional movement and two-dimensional rotary), and rubbing head axis direction and workpiece is made to polish point
Normal remain coincidence；Determine that polishing fluid ultrasonic atomizatio applies the ultrasound that liquid device uses according to the fogging degree that polishing needs
Wave frequency rate；The amplitude of rotary type ultraphonic vibropolish device is joined according to the technology that liquid device and workpiece to be machined are applied in polishing fluid atomization
Critical impact velocity and critical singularities when several and workpiece maximum flexibility compression depth are acquired by calculation formula；By workpiece
On-line measuring device carries out on-line checking to curve surface of workpiece.Although the ultrasonic polishing lathe solves existing ultrasonic polishing lathe and deposits
Above-mentioned technical problem, but that rubbing head can only be made to do along major axes orientation is reciprocal straight for the vibration of the One-Dimensional Ultrasonic because being applied on main shaft
Line movement, polishing power is lower, at the same when because of polishing rubbing head motion profile it is complex-curved it is upper be only single point,
Processing efficiency is not high enough.
Summary of the invention
The object of the present invention is to provide a kind of polishing power and polishing efficiency than above-mentioned five axis two-dimensional ultrasound polishing machine
The application method of the higher five axis three-D ultrasonic burnishing machine of bed and the lathe.
Five axis three-D ultrasonic burnishing machines of the invention, ultrasonic vibration burnishing device are changed to by original One-Dimensional Ultrasonic vibration
Two dimensional ultrasonic vibration, rest part, including rack, X are to mobile mechanism, Y-direction mobile mechanism, Z-direction mobile mechanism, rotary work
It is identical with five axis two-dimensional ultrasound burnishing machines that platform, polishing fluid ultrasonic atomizatio apply liquid device and workpiece on-line measuring device.
Five axis three-D ultrasonic burnishing machines of the invention, including rack, X are to mobile mechanism, Y-direction mobile mechanism, Z-direction moving machine
Structure, ultrasonic vibration burnishing device, rotary table, polishing fluid ultrasonic atomizatio apply liquid device and workpiece on-line measuring device；Wherein Z
It is located on the lathe bed of rack to mobile mechanism, X is located on the base of rack to mobile mechanism and Y-direction mobile mechanism；
The rack includes base and the lathe bed that is vertically fixed on base；
The Z-direction mobile mechanism is located on the lathe bed of rack, and X is located at the machine of rack to mobile mechanism and Y-direction mobile mechanism
On seat；
The Z-direction mobile mechanism include be fixedly mounted on the antetheca of the lathe bed, front is led with the Z-direction of Z-direction guide rail
Rail chair, can do the Z-direction mobile station that Z-direction moves along Z-direction guide rail, and driving Z-direction mobile station does the mobile lead screw of the mobile Z-direction of Z-direction and drive
The Z-direction servo motor of the dynamic mobile lead screw rotation of Z-direction；The Y-direction mobile mechanism include be fixedly mounted on the base, top band
There is the Y-direction guide rail seat of Y-direction guide rail, the Y-direction mobile station that Y-direction moves can be done along Y-direction guide rail, driving Y-direction mobile station does Y-direction movement
The mobile lead screw of Y-direction and the Y-direction servo motor for driving the mobile lead screw rotation of Y-direction have X direction guiding rail in Y-direction mobile station；The X is to shifting
Motivation structure includes that the X direction guiding rail that can be moved along the Y-direction on table top is X to the X moved to mobile station, and X is driven to be X to mobile station
To mobile lead screw and drive X to the X that mobile lead screw rotates to servo motor to mobile X；
The rotary table includes the casing for being fixedly mounted on the X in mobile station, has placement on the top of casing
The horizontal rotary platform of workpiece to be machined is equipped with the horizontal rotary snail that driving horizontal rotary platform does horizontal rotary in the inside of casing
Worm and gear transmission mechanism has the servo motor I of driving horizontal rotary Worm and worm-wheel gearing in the side of casing；
It includes five axis robots I for being fixedly mounted on the base side that the polishing fluid ultrasonic atomizatio, which applies liquid device, should
The front end of five axis robots I is installed by the ultrasonic nozzle of oriented workpiece polishing position sprinkling polishing fluid；
The workpiece on-line measuring device includes five axis robots II for being fixedly mounted on the base other side, five axis
The front end of manipulator II is equipped with the laser interference gauge head of detection workpiece polishing surface figure accuracy；
The ultrasonic vibration burnishing device includes vertical rotating mechanism and two-dimensional ultrasound polishing mechanism；
The vertical rotating mechanism includes the box-type shell being fixedly mounted in the Z-direction mobile station, in box-type shell
There is vertical rotating platform in front, is equipped with driving vertical rotating platform in the inside of box-type shell and does vertical rotating (rotating around Y-direction)
Vertical rotating Worm and worm-wheel gearing has the servo of driving vertical rotating Worm and worm-wheel gearing on the top of box-type shell
Motor II；The two-dimensional ultrasound polishing mechanism includes the square fixed plate being fixedly mounted on the vertical rotating platform, solid
There is symmetrical station adjustment hole below the level board of fixed board, two bilateral symmetries are installed, for adjusting by station adjustment hole
The Vltrasonic device fixed plate of two ultrasonic vibration installation axial angles is saved, is installed respectively in two ultrasonic vibration installation fixed plates super
Acoustic vibration device I and ultrasonic vibration installation II, ultrasonic vibration installation I and ultrasonic vibration installation II are respectively by energy converter and amplitude transformer
Composition, the front end of the amplitude transformer of ultrasonic vibration installation I and ultrasonic vibration installation II respectively be equipped with and the station adjustment hole phase
The arced polishing head pedestal of the luffing lever attachment hole of cooperation connects, and rubbing head is mounted on rubbing head pedestal.
The application method of five axis three-D ultrasonic burnishing machines of the invention, includes the following steps：
1) the feed file of rubbing head is converted by the form parameter on workpiece to be machined (the complex-curved element of optics) surface,
The numerical control program that lathe is obtained by inverse kinematic makes lathe five-axle linkage (three-dimensional movement and two by program control system
Dimension rotation), the normal direction for making rubbing head axis direction polish point with workpiece, which remains, to be overlapped；
2) numerical control that polishing fluid ultrasonic atomizatio applies five axis robot of liquid device is obtained by the anti-solution of main shaft pose of rubbing head
Program realizes it with rubbing head servo-actuated, and the angle for making polishing fluid injection direction and workpiece polish point normal direction keeps 45
± 5 degree；
3) determine that polishing fluid ultrasonic atomizatio applies what liquid device used according to the fogging degree (diameter of drop) that polishing needs
Ultrasonic frequency f3 (is provided) by the calibration function of spray head product；
4) according to workpiece polishing need to select the ultrasonic vibration frequency f1 of ultrasonic vibration installation I and ultrasonic vibration installation II and
F2, amplitude of ultrasonic vibration A1And A2, ultrasonic vibration initial phase θ1And θ2With the axis of ultrasonic vibration installation I and ultrasonic vibration installation II
To angle α, angle α passes through the luffing lever attachment hole on the station adjustment hole and corresponding rubbing head pedestal below fixed plate
It is adjusted,
The value of α is：One of 30 °, 45 °, 60 °, 90 °
30°、45°、60°、90°
Amplitude A1、A2Value range be：10μm≤A1≤ 30 μm,
The value range of frequency f1, f2 is：20kHZ≤f1≤55kHZ, and make
θ1And θ2The phase difference θ of two phase place=| θ1-θ2| value range be：[0 °, 20 °] ∪ [70 °, 90 °]；
5) in polishing process, when curve surface of workpiece machining accuracy need to detect, workpiece is exited by processing by Y-direction mobile mechanism
Curve surface of workpiece detects by workpiece on-line measuring device in area, according to testing result, polishes if you need to continue, passes through Y-direction
Workpiece is retracted processing district by mobile mechanism, continues polishing.
Compared with five axis two-dimensional ultrasound burnishing machines described in background technique, the beneficial effects of the invention are as follows：
1, the present invention applies two dimensional ultrasonic vibration on rubbing head, polishing power not only can be improved, but also super by two dimension
The adjusting of acoustic vibration direction of vibration, amplitude, frequency and phase difference can make the motion profile of rubbing head with curved reciprocating after coupled
Detour form uniform fold machining area, polishing area increase, and polishing efficiency significantly improves.
2, same, the present invention drives ultrasonic nozzle and polishing by five axis robots that polishing fluid ultrasonic atomizatio applies liquid device
Head is servo-actuated, and to keep 45 degree of angle direction jet polishing liquid with polishing point normal, the polishing fluid of steam fog state is made to be directed at polishing
Point sprays between rubbing head and workpiece, can avoid workpiece surface damage caused by rubbing head is dry grinded, and is conducive to save polishing fluid；
Polishing process on-line measurement is realized by workpiece on-line measurement device, can avoid workpiece offline inspection because installing determining for generation repeatedly
Adverse effect of the position error to processing quality and polishing efficiency；The large scale optics that diameter is 300~350mm can also be processed with it
Complex-curved element.
Detailed description of the invention
Fig. 1 is the overall structure diagram of ultrasonic polishing device of the present invention,
Fig. 2 is the rotating mechanism schematic diagram of ultrasonic vibration burnishing device in Fig. 1,
Fig. 3 is the front view of the ultrasonic vibration polishing mechanism of ultrasonic vibration burnishing device in Fig. 1,
Fig. 4 is the oblique bottom view (for showing station adjustment hole) of Fig. 3,
Fig. 5 is the schematic diagram of station adjustment hole in Fig. 3,
Fig. 6 is the schematic diagram of rubbing head pedestal in Fig. 3,
Fig. 7 is rotary table structural schematic diagram in Fig. 1,
Fig. 8 is that polishing fluid ultrasonic atomizatio applies liquid device structural schematic diagram in Fig. 1,
Fig. 9 is the direction schematic diagram of ultrasonic nozzle sprinkling polishing fluid in Fig. 8,
Figure 10 is the movement locus schematic diagram of ultrasonic polishing device rubbing head,
Figure 11 is the structural schematic diagram of workpiece on-line measuring device in Fig. 1.
Specific embodiment
Below in conjunction with drawings and examples, the present invention will be further described.
As shown in Figure 1, five axis three-D ultrasonic burnishing machines of the invention, including rack；Rack-mounted X is to moving machine
Structure, Y-direction mobile mechanism and Z-direction mobile mechanism；Ultrasonic vibration burnishing device 5；Rotary table；Polishing fluid ultrasonic atomizatio applies liquid dress
It sets and workpiece on-line measuring device.
The rack includes base 17 and the lathe bed 1 that is vertically fixed on base；The Z-direction mobile mechanism is located at lathe bed
On, the Z-direction mobile mechanism is located on lathe bed, and X is located on base to mobile mechanism and Y-direction mobile mechanism.
The Z-direction mobile mechanism includes the Z-direction track base 3 being fixedly mounted on the lathe bed antetheca, Z-direction track base front
There are Z-direction guide rail 26 in two sides, there is Z-direction mobile station 25 on Z-direction guide rail, and Z-direction mobile station is watched by the Z-direction for being mounted on Z-direction track base rear portion
It takes motor 2 Z-direction can be done along Z-direction guide rail by the mobile driving of lead screw 4 of Z-direction connected to it and move.
The Y-direction mobile mechanism include be fixedly mounted on the base, top have Y-direction guide rail 16 Y-direction guide rail seat
15, the Y-direction mobile station 12 that Y-direction moves can be done along Y-direction guide rail, driving Y-direction mobile station does mobile 14 He of lead screw of the mobile Y-direction of Y-direction
The Y-direction servo motor 13 of the mobile lead screw rotation of Y-direction is driven, has X direction guiding rail 21 in Y-direction mobile station.
The X includes that the X direction guiding rail 21 that can move along the Y-direction on table top is X to the X moved to moving to mobile mechanism
Platform 22, driving X are X to mobile X to mobile lead screw 20 and driving X to the X that mobile lead screw rotates to servo motor to mobile station
19。
In conjunction with Fig. 1 to Fig. 6, the ultrasonic vibration burnishing device 5, including vertical rotating mechanism and two-dimensional ultrasound polishing machine
Structure.
The vertical rotating mechanism is as shown in Fig. 2, include the box-type shell being fixedly mounted in the Z-direction mobile station 22
501, have vertical rotating platform 502 in the front of box-type shell, the inside of box-type shell be equipped with driving vertical rotating platform do it is vertical
The vertical rotating Worm and worm-wheel gearing 503 of formula rotation (rotating around Y-direction), has driving vertical rotating on the top of box-type shell
The servo motor II 504 of Worm and worm-wheel gearing.
The two-dimensional ultrasound polishing mechanism is as shown in Figure 3 and Figure 4, straight on the vertical rotating platform including being fixedly mounted on
Angular fixed plate 505 has symmetrical station adjustment hole 506 below the level board of fixed plate, is pacified by station adjustment hole
Two bilateral symmetries, the ultrasonic vibration installation fixed plate 507 and 508 for adjusting two ultrasonic vibration installation axial angles are filled,
Ultrasonic vibration installation I 509 and ultrasonic vibration installation II 510, ultrasonic vibration are installed respectively in two ultrasonic vibration installation fixed plates
Device I is made of energy converter 5091 and amplitude transformer 5092, and ultrasonic vibration installation II is made of energy converter 5101 and amplitude transformer 5102,
The front end of the amplitude transformer of ultrasonic vibration installation I and ultrasonic vibration installation II is respectively and on 512 upper surface of arced polishing head pedestal
Luffing lever attachment hole 511 connects, and luffing lever attachment hole is corresponded to each other with the station adjustment hole, and rubbing head (513) passes through bolt
(rubbing head does not rotate when working) is fastened in the clamping opening at rubbing head pedestal central upper portion.
As shown in Figure 5 and Figure 6, the station adjustment hole 506 and luffing lever attachment hole 511 corresponding with station adjustment hole
It is divided into four groups, wherein the ˊ of station 1 and 1 corresponds to 90 ° of ultrasonic vibration installation axial angle, and the ˊ of station 2 and 2 corresponds to ultrasonic vibration installation axis
To 60 ° of angle, the ˊ of station 3 and 3 corresponds to 45 ° of ultrasonic vibration installation axial angle, and the ˊ of station 4 and 4 corresponds to ultrasonic vibration installation axial direction
30 ° of angle.
As shown in fig. 7, the rotary table includes the casing 11 for being fixedly mounted on the X in mobile station 22, in machine
The top of shell have place workpiece to be machined 8 horizontal rotary platform 9, the inside of casing be equipped with driving horizontal rotary platform do it is horizontal
The horizontal rotary Worm and worm-wheel gearing 10 of rotation has driving horizontal rotary Worm and worm-wheel gearing in the side of casing
Servo motor I 23；
As illustrated in figures 1 and 8, it includes being fixedly mounted on the base side that the polishing fluid ultrasonic atomizatio, which applies liquid device,
The ultrasonic nozzle 6 of oriented workpiece polishing position sprinkling polishing fluid is installed in five axis robots I 7, the front end of five axis robot I；
As shown in Fig. 1 and Figure 11, the workpiece on-line measuring device includes be fixedly mounted on the base other side five
Axis robot II 18, the front end of five axis robot II are equipped with the laser interference gauge head 24 of detection workpiece burnishing surface precision.
The following are the one embodiment for using above-mentioned five axis three-D ultrasonic burnishing machine processing optical curved surface elements.
The optical surface element is quartz glass, and having a size of 300mm × 300mm × 200mm, polishing curved surface is concave curved surface,
It is silicon carbide abrasive particles suspension, the ultrasonic frequency that ultrasonic atomizatio uses that polishing fluid ultrasonic atomizatio, which applies the polishing fluid that liquid device uses,
F3 is 100KHZ.
In order to improve polishing power and polishing efficiency, using above-mentioned five axis three-D ultrasonic burnishing machine to the workpiece into
Row polishing.
It converts the form parameter of the workpiece surface to the feed file of rubbing head, lathe is obtained by inverse kinematic
Numerical control program；The numerical control journey that polishing fluid ultrasonic atomizatio applies five axis robots of liquid device is obtained by the anti-solution of rubbing head main shaft pose
Sequence.
The amplitude A of ultrasonic vibration installation I1It is 20 μm, the amplitude A of ultrasonic vibration installation II2It is 30 μm, ultrasonic vibration installation I
Frequency f1 be 20KHZ, the frequency f2 of ultrasonic vibration installation II is 35KHZ, the initial phase θ of ultrasonic vibration installation I1It is 0 °, surpasses
The initial phase θ of acoustic vibration device II2It is 90 °, by station adjustment hole and luffing lever attachment hole by ultrasonic vibration installation I and ultrasound
The axial angle α of vibration device II is 60 °.
When polishing, lathe five-axle linkage is made by program control system, rubbing head axis direction and workpiece is made to polish point
Normal direction remains coincidence；Five axis robots make polishing fluid injection direction and workpiece polish point by the control of its numerical control program
Normal keeps 45 degree of angles (as shown in Figure 9), and ultrasonic nozzle and rubbing head are servo-actuated.
The motion profile of the present embodiment rubbing head is in curved reciprocating detour form uniform fold machining area shown in Figure 10,
It polishes polishing efficiency ratio and improves five times or more with five axis two-dimensional ultrasound burnishing machines.
In polishing process 5 on-line checkings were successively carried out to workpiece by workpiece on-line measuring device altogether, finally obtained
The smooth no scar in workpieces processing surface.
Claims (3)
1. a kind of five axis three-D ultrasonic burnishing machines, including rack, X to mobile mechanism, Y-direction mobile mechanism, Z-direction mobile mechanism,
Ultrasonic vibration burnishing device, rotary table, polishing fluid ultrasonic atomizatio apply liquid device and workpiece on-line measuring device；Wherein Z-direction
Mobile mechanism is located on the lathe bed (1) of rack, on the base (17) that X is located at rack to mobile mechanism and Y-direction mobile mechanism；
The rack includes base (17) and the lathe bed (1) being vertically fixed on base；
The Z-direction mobile mechanism include be fixedly mounted on the antetheca of the lathe bed, front is led with the Z-direction of Z-direction guide rail (26)
Rail chair (3), can do the Z-direction mobile station (25) that Z-direction moves along Z-direction guide rail, and driving Z-direction mobile station does the mobile Z-direction movable wire of Z-direction
The Z-direction servo motor (2) of thick stick (4) and the mobile lead screw rotation of driving Z-direction；The Y-direction mobile mechanism is described including being fixedly mounted on
On base, top have Y-direction guide rail (16) Y-direction guide rail seat (15), the Y-direction mobile station that Y-direction moves can be done along Y-direction guide rail
(12), driving Y-direction mobile station does the mobile Y-direction of Y-direction mobile lead screw (14) and drives the Y-direction servo electricity of the mobile lead screw rotation of Y-direction
Machine (13) has X direction guiding rail (21) in Y-direction mobile station；The X to mobile mechanism include can be moved along the Y-direction X on table top to
Guide rail (21) is X to mobile X to mobile station (22), and X is driven to be X to mobile X to mobile lead screw (20) to mobile station and drive
Dynamic X is to the X that mobile lead screw rotates to servo motor (19)；
The rotary table includes being fixedly mounted on casing (11) of the X on mobile station (22), is had on the top of casing
The horizontal rotary platform (9) for placing workpiece to be machined (8) is equipped with driving horizontal rotary platform in the inside of casing and does horizontal rotary
Horizontal rotary Worm and worm-wheel gearing (10) has the servo of driving horizontal rotary Worm and worm-wheel gearing in the side of casing
Motor I (23)；
It includes five axis robots I (7) for being fixedly mounted on the base side that the polishing fluid ultrasonic atomizatio, which applies liquid device, this five
The front end of axis robot I is installed by the ultrasonic nozzle (6) of oriented workpiece polishing position sprinkling polishing fluid；
The workpiece on-line measuring device includes five axis robots II (18) for being fixedly mounted on the base other side, five axis
The front end of manipulator II is equipped with the laser interference gauge head (24) of detection workpiece polishing surface figure accuracy；
It is characterized in that：
The ultrasonic vibration burnishing device (5) includes vertical rotating mechanism and two-dimensional ultrasound polishing mechanism；
The vertical rotating mechanism includes the box-type shell (501) being fixedly mounted on the Z-direction mobile station (22), in box shell
The front of body has vertical rotating platform (502), is equipped with driving vertical rotating platform in the inside of box-type shell and does the vertical of vertical rotating
Formula rotation of worm gear worm gearing (503) has driving vertical rotating Worm and worm-wheel gearing on the top of box-type shell
Servo motor II (504)；The two-dimensional ultrasound polishing mechanism includes that the square being fixedly mounted on the vertical rotating platform is consolidated
Fixed board (505) has symmetrical station adjustment hole (506) below the level board of fixed plate, is installed by station adjustment hole
Two bilateral symmetries, the ultrasonic vibration installation fixed plate (507,508) for adjusting two ultrasonic vibration installation axial angles, two
Ultrasonic vibration installation I (509) and ultrasonic vibration installation II (510), ultrasound vibration are installed respectively in a ultrasonic vibration installation fixed plate
Dynamic device I and ultrasonic vibration installation II are made of energy converter (5091,5101) and amplitude transformer (5092,5102) respectively, ultrasound vibration
The front end of the amplitude transformer (5092,5102) of dynamic device I and ultrasonic vibration installation II respectively be equipped with and the station adjustment hole phase
The arced polishing head pedestal (512) of the luffing lever attachment hole (511) of cooperation connects, and rubbing head (513) is mounted on rubbing head pedestal
On.
2. five axis three-D ultrasonic burnishing machine according to claim 1, it is characterised in that：The station adjustment hole (506)
It is divided into four groups with luffing lever attachment hole (511), respectively corresponds 30 °, 45 °, 60 °, 90 ° of ultrasonic vibration installation axial angle.
3. the application method of five axis three-D ultrasonic burnishing machines, includes the following steps described in claim 1：
1) form parameter on workpiece to be machined surface is converted to the feed file of rubbing head, lathe is obtained by inverse kinematic
Numerical control program, lathe five-axle linkage is made by program control system, rubbing head axis direction and workpiece is made to polish the normal of point
Direction remains coincidence；
2) numerical control program that polishing fluid ultrasonic atomizatio applies five axis robot of liquid device is obtained by the anti-solution of main shaft pose of rubbing head,
Realize it with rubbing head servo-actuated, and the angle for making polishing fluid injection direction and workpiece polish point normal direction is kept for 45 ± 5 degree；
3) determine that polishing fluid ultrasonic atomizatio applies the ultrasonic frequency f3 that liquid device uses according to the fogging degree that polishing needs；
4) according to workpiece polishing need to select ultrasonic vibration installation I and ultrasonic vibration installation II ultrasonic vibration frequency f1 and f2,
Amplitude of ultrasonic vibration A1And A2, ultrasonic vibration initial phase θ1And θ2With the axial folder of ultrasonic vibration installation I and ultrasonic vibration installation II
Angle α, angle α are carried out by the luffing lever attachment hole on the station adjustment hole and corresponding rubbing head pedestal below fixed plate
It adjusts,
The value of α is：One of 30 °, 45 °, 60 °, 90 °
Amplitude A1、A2Value range be:10μm≤A1≤ 30 μm,
The value range of frequency f1, f2 is：20kHZ≤f1≤55kHZ, and make
θ1And θ2The phase difference θ of two phase place=| θ1-θ2| value range be：[0 °, 20 °] ∪ [70 °, 90 °]；
5) in polishing process, when curve surface of workpiece machining accuracy need to detect, workpiece is exited by processing district by Y-direction mobile mechanism,
Curve surface of workpiece is detected by workpiece on-line measuring device, according to testing result, polishes if you need to continue, is moved by Y-direction
Workpiece is retracted processing district by motivation structure, continues polishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611226439.1A CN106736991B (en) | 2016-12-27 | 2016-12-27 | Five axis three-D ultrasonic burnishing machines of one kind and its application method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611226439.1A CN106736991B (en) | 2016-12-27 | 2016-12-27 | Five axis three-D ultrasonic burnishing machines of one kind and its application method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106736991A CN106736991A (en) | 2017-05-31 |
| CN106736991B true CN106736991B (en) | 2018-11-27 |
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| CN110977622A (en) * | 2019-12-13 | 2020-04-10 | 大连理工大学 | Control method for multipoint variable-position automatic dropping of polishing solution |
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