CN107398783B - A kind of Nano surface of metal material grade pattern processing method and device - Google Patents
A kind of Nano surface of metal material grade pattern processing method and device Download PDFInfo
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- CN107398783B CN107398783B CN201710722593.6A CN201710722593A CN107398783B CN 107398783 B CN107398783 B CN 107398783B CN 201710722593 A CN201710722593 A CN 201710722593A CN 107398783 B CN107398783 B CN 107398783B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/14—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by liquid or gas pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Milling Processes (AREA)
Abstract
The invention discloses a kind of Nano surface of metal material grade pattern processing method and devices.The method and apparatus of urn Topography is processed to hard workpiece surface currently without soft cutter.The present invention is directed to metal work piece materials to be processed, selects the cutter of different materials；According to the molecule or atomic quantity preset range of cutter in the default urn Topography obtained on metal works, the vibration frequency and amplitude of ultrasonic vibration installation are adjusted；Clamping cylinder drives clamp metal works to be processed；XY drives platform to navigate to the initial manufacture position of metal works immediately below cutter；Start ultrasonic vibration installation, makes cutter micro-vibration before processing；The cooperative movement of workpiece mobile platform and fine feed apparatus, and fine feed apparatus presses default amount of feeding feeding, processes the default urn Topography of metal works.The present invention diffuses into mass transfer film to surface of workpiece mass transfer using soft cutter, to change workpiece surface energy gradient, will not damage to workpiece.
Description
Technical field
The invention belongs to the machining of material surface pattern and manufacturing technology field, in particular to a kind of metal material table
Face urn Topography processing method and device.
Background technique
The pattern of surface micro-nano structure has important application in machining.Micro-nano pattern has excellent antifriction quality
Can, micropore (slot) structure of such as some surface textures facilitates the formation of hydrodynamic lubrication oil film, so that increasing lubrication reduces friction.
Meanwhile micro-nano pattern has some super-hydrophobic or super hydrophilic performance, in metal automatically cleaning, anticorrosion and it is wear-resistant in have emphatically
The application wanted.The surface topography manufacture of current micro-nano structure substantially has physics and chemical method.Wherein physical method includes simple
Machining, Laser lithography, shot blasting on surface, method of electrostatic spinning etc..Chemical method includes electrochemical deposition method, hydro-thermal conjunction
Cheng Fa, vapor deposition, soda acid etching etc..In these methods, the machining accuracy of simple and mechanical processing is not very high, and laser light
Lithography, shot blasting on surface, method of electrostatic spinning equipment cost are higher, and can change to a certain extent the surface chemistry of workpiece at
Point；And chemical method is mostly to be corroded using corresponding chemical reagent, and although process and raw material are all relatively simple, chemical reagent
The metallographic structure of workpiece can be destroyed, and its etching process is not easy to control.
Currently, related fields there is no soft cutter to hard workpiece surface processing urn Topography method and apparatus, such as
The number of applying for a patent is 201410075821.1 (Authorization Notice No. 103817355A, authorized announcement date are on May 28th, 2014)
Patent disclose a kind of accurate or ultra-precise cutting processing beam mode ultrasonic vibration auxiliary cutting device.The device is main
It is made of ultrasonic vibration installation, shell and cutter.Its shell is to tighten ring structure, to node position at the two of ultrasonic vibration installation
It is fastened, realizes that outer cover length is adjustable, it is made to be fastened on the node position of ultrasonic vibration installation always.The device processing efficiency
Height, assembling link are few, blade installs and uninstalls conveniently；The device is preferably subtracted using the ultrasonic vibration assisted machining of beam mode
Small cutting force, cutting temperature, tool wear etc. improve processing efficiency, can form more accurate surface, but the device
The axial workpiece for applying in general to cylinder class is difficult to some common rectangular pieces, and use scope is limited.While its
Vibration uses beam mode, and cutter can influence workpiece surface precision using inserted tools such as diamonds to a certain extent；Application
The patent of Patent No. 201210366271.X (Authorization Notice No. 102873594A, authorized announcement date are 16 days 2013) is public
A kind of height-adjustable inclination angle type ultrasonic vibrating machining device is opened.The patent is a kind of angle of fixed abrasive grain ultrasonic elliptical vibratory
Degree is adjustable with height, and a kind of height-adjustable inclination angle type ultrasonic vibrating machining device of processing efficiency can be improved.The device uses
Abrasive grinding wheel workpieces processing, ultrasonic vibrator are fixed with spring base, and there are two spring, spring base and micromotion platforms for dress on spring base
Fixed, micromotion platform is fixed on the groove of shaft.The apparatus structure is simple, easy to adjust, passes through sensor and micromotion platform
The height for adjusting abrasive grinding wheel generates inclined elliptical vibration, reduces work by the angle of inclination angle rotating electric machine regulating device
Part surface damage, ensure that machining accuracy, improve processing effect.But the abrasive grinding wheel that the device uses is smaller, machining area
It is limited, and workpiece is fixed below device, limits the range of work of cutter, is only applicable to some smaller parts, simultaneously
The mechanism is adjustable inclination angle type device, is processed not stable enough.
Summary of the invention
The present invention problem more difficult for various metal material surface micro/nano level pattern processing and manufacturings at present, provides
A kind of processing method and device of the more accurate material surface urn Topography that can protect workpiece surface.Soft tool sharpening is
A kind of novel processing method seldom uses the processing method in current manufacture field, and the cutter hardness used is less than work
Part hardness, therefore workpiece will not be damaged, and continuous cutting is converted to the interrupted of frequency low-amplitude by ultrasonic vibration assisted machining
Cutting is, it can be achieved that Precision Machining.Therefore, ultrasonic vibration and soft cutter are conjointly employed in the formation of material surface micromorphology for
The processing important in inhibiting of some difficult-to-machine materials and weak separation material.
A kind of Nano surface of metal material grade pattern processing method of the present invention, specific as follows:
Step 1: being directed to the material of metal works to be processed, the cutter of different materials is selected.If metal works to be processed are
Titanium alloy then selects the cutter of hardwood material；If metal works to be processed are steel, hardwood, aluminium alloy or copper product are selected
Cutter.
Step 2: metal works to be processed are placed in work piece platform, clamping cylinder drives clamp gold to be processed
Metal work-pieces.
Step 3: adjusting the vibration frequency and amplitude of ultrasonic vibration installation.
Step 4: XY drives platform to navigate to the initial manufacture position of metal works immediately below cutter；Start ultrasonic vibration
Device vibrates cutter before processing.
Step 5: starting fine feed apparatus, whens tool contact metal works, stop fine feed apparatus.XY drives platform root
It drives metal works to feed in the x, y direction according to the default urn Topography of metal works, while being again started up microfeed dress
It sets and is fed by the default amount of feeding, start to process.Process next discontinuous position in the default urn Topography of metal works
When, fine feed apparatus resets and stops.
Step 6: step 5 is repeated, the entire default urn Topography until processing metal works.
Further, if the material of metal works is titanium alloy, presetting the amount of feeding is 100nm~500nm；If metal works
Material be steel, then preset the amount of feeding be 500nm~1.0 μm.
A kind of Nano surface of metal material grade pattern processing unit (plant) of the present invention, the workpiece mainly moved by horizontal direction are mobile
The mobile fine feed apparatus of platform, vertical direction, ultrasonic vibration installation and cutter composition.The workpiece mobile platform includes
XY drives platform, work piece platform, work piece holder and clamping cylinder.The described XY driving platform includes X to ball screw driving device and Y
To ball screw driving device；Work piece holder is driven by clamping cylinder；Work piece platform is driven with clamping cylinder by XY driving platform is synchronous
It is dynamic；The ultrasonic vibration installation is realized that the microfeed of vertical direction, ultrasonic vibration installation generate vibration by fine feed apparatus
It is dynamic to be applied on cutter.The cutter is hardwood, copper or aluminium alloy.
The work piece platform two sides respectively set a work piece holder and a clamping cylinder, two clamping cylinder synchronous averagings
Or stop.
The X to the stroke of ball screw driving device and Y-direction ball screw driving device be 200mm, positioning accuracy
It is 0.02mm, repetitive positioning accuracy 0.01mm；The cylinder diameter of clamping cylinder is 12mm, stroke 10mm.
The fine feed apparatus uses Z-direction ball screw driving device, and Z-direction ball screw driving device often rotates into
To amount be 100nm~1.0 μm, X to the feed of every rotation of ball screw driving device and Y-direction ball-screw be 0.01mm~
0.1mm。
The ultrasonic vibration installation is mainly made of supersonic generator, energy converter and amplitude transformer；Supersonic generator
The vibration signal for being greater than or equal to 1MHz is generated, is converted to mechanical oscillation through energy converter, then amplitude is converted to 1 by amplitude transformer~
100nm grades of amplitudes, and pass to cutter.
Beneficial effects of the present invention:
1, the present invention is a kind of with soft cutter (such as hardwood (i.e. such as sandalwood, the higher timber of olive ebony hardness), copper
(Brinell hardness is 110~130HB), aluminium alloy (Brinell hardness is 120~150HB)) the hard workpiece of ultrasonic vibration ultramicron processing
Surface (such as No. 45 steel (Brinell hardness is 190~250HB), the various steel of bearing steel (170~207HB of Brinell hardness) and titanium
(Brinell hardness is up to 298~349HB)) after annealing, to change the method for workpiece surface energy gradient for alloy；It is a kind of using soft
Cutter diffuses into mass transfer film to surface of workpiece mass transfer, to change the method for workpiece surface energy gradient；It is that one kind is based on
Soft cutter carries out atom in surface of workpiece and molecular level is processed, and changes the method for surface of workpiece urn Topography；It is
A kind of three-shaft linkage type surface topography processing and manufacturing device with soft tool sharpening metal works；It is a kind of controllable material surface
The urn Topography of energy gradient fabricates device；It is that a kind of workpieces processing can be accurate mobile in the horizontal plane, ultrasonic vibration (be received
Meter level amplitude, 1MHz frequencies above) soft cutter can be mobile in vertical direction precision three axis machining device.
2, vibration frequency of the invention is far longer than the audio range that human ear can be heard, does not have noise pollution.Lead to simultaneously
Ultramicron molecule, atom level processing mass transfer are crossed at mass transfer film, controlled material surface topography, to reach what regulation surface can be distributed
Purpose；It primarily can be used for the fields such as precision machinery, information storage and the manufacture of safe, hydrophobic and water-wetted surface.
Detailed description of the invention
Fig. 1 is overall structure stereogram of the invention.
Fig. 2 is the schematic diagram that cutter is processed in workpiece surface in the present invention.
Fig. 3 is the urn Topography schematic diagram formed after metal works processing on surface in the present invention.
Fig. 4 is the assembling schematic diagram of ultrasonic vibration installation and fine feed apparatus in the present invention.
Specific embodiment
With reference to the accompanying drawing, the invention will be further described.
As illustrated in fig. 1 and 2, a kind of Nano surface of metal material grade pattern processing unit (plant), is mainly moved by horizontal direction
The mobile fine feed apparatus 6 of workpiece mobile platform 1, vertical direction, ultrasonic vibration installation 5 and cutter 4 form.Workpiece is mobile flat
Platform 1 includes XY driving platform, work piece platform 2, work piece holder 3 and clamping cylinder 7.XY driving platform includes that X is filled to ball-screw driving
It sets and Y-direction ball screw driving device；Work piece holder 3 is driven by clamping cylinder 7, thus clamp or release metal works 8；This reality
It applies in example, 2 two sides of work piece platform respectively set a work piece holder 3 and a clamping cylinder 7, and the synchronous driving of two clamping cylinders 7 makes
It obtains two work piece holder centerings and clamps metal works 8.Work piece platform 2, work piece holder 3 and clamping cylinder 7 are synchronous by XY driving platform
Driving；Metal works 8 are realized the movement in horizontal plane by workpiece mobile platform 1.Ultrasonic vibration installation 5 is by fine feed apparatus 6
Realize the microfeed of vertical direction, ultrasonic vibration installation 5, which generates to vibrate to be applied on cutter 4, realizes vibrocutting.Workpiece moves
The cooperative movement of moving platform 1 and fine feed apparatus 6, the processing of Lai Shixian three-shaft linkage and tool sharpening change metal works table
Face energy gradient forms the urn Topography of controllable material surface energy gradient in surface of workpiece.
X is 200mm to the stroke of ball screw driving device and Y-direction ball screw driving device, and positioning accuracy is
0.02mm, repetitive positioning accuracy are ± 0.01mm；The cylinder diameter of clamping cylinder is 12mm, stroke 10mm.
As shown in figure 3, fine feed apparatus 6 uses Z-direction ball screw driving device, Z-direction ball screw driving device ratio
XY drives the X of platform accurate to ball screw driving device and Y-direction ball screw driving device, Z-direction ball screw driving device
Feed of every rotation be submicron order (100nm~1.0 μm), X is to ball screw driving device and Y-direction ball screw driving device
Feed of every rotation be 0.01mm~0.1mm realize slow microfeed when processing metal works 8, thus right in cutter 4
When metal works 8 are squeezed and rubbed, continuous processing for a long time is realized on 8 surface of metal works, being formed has surface can ladder
The urn Topography of degree.Ultrasonic vibration installation 5 is mainly made of supersonic generator 12, energy converter 13 and amplitude transformer 14, is being added
In working hour, supersonic generator 12 generates the high-frequency vibration signal (amplitude is nanoscale) for being greater than or equal to 1MHz, through energy converter 13
Mechanical oscillation are converted to, then amplitude are converted into 1~100nm grades of amplitudes by amplitude transformer 14, and pass to cutter 4, produce cutter 4
The vertical direction vibration of raw frequency low-amplitude realizes cutter 4 to the ultrasonic vibrating machining of metal works 8, in surface of workpiece shape
At the urn Topography with controlled surface energy gradient.
Cutter is hardwood, copper or aluminium alloy, and cutter 4 changes the energy on 8 surface of metal works when 8 surface of workpiece processes
Gradient is measured, is the processing method of a kind of atom level and molecular level, cutter 4 is processed on 8 surface of metal works, while ultramicron is to gold
When metal work-pieces 8 are fed, erases to a certain extent and taken away molecule or atom on metal works 8, and cutter 4 is also certain
The molecule or atom for smearing and leaving cutter 4 in degree on metal works 8 diffuse into biography to 8 surface mass transfer of metal works
Plasma membrane forms a kind of urn Topography of surface of workpiece.Surface of workpiece schematic diagram after processing is as shown in figure 4, figure
In 9 be green surface；10 is few for processing times, metal works and the cutter machined surface less with respect to mass transfer；11 are
After repeatedly processing, surface of workpiece forms the machined surface of mass transfer film.
In aforementioned, cutter 48 surface of metal works process, while ultramicron to metal works 8 feed when, in certain journey
It erases on degree and has taken away molecule or atom on metal works 8, and cutter 4 also applies on metal works 8 to a certain extent
The molecule or atom of cutter 4 are smeared and leave, this process is mass transport process；And finally on 8 surface of metal works after mass transfer
The urn Topography of formation is mass transfer film.
Nano surface of metal material grade pattern processing method, specific procedure of processing are as follows:
Step 1: being directed to the material of metal works 8 to be processed, the cutter 4 of different materials is selected.If metal works to be processed
For titanium alloy, then the cutter of hardwood material is selected；If metal works to be processed are steel, hardwood, aluminium alloy or copper product are selected
Cutter.
Step 2: metal works to be processed are placed in work piece platform 2, it is to be processed that clamping cylinder 7 drives fixture 3 to clamp
Metal works, the schematic diagram after clamping are as shown in Figure 2.
Step 3: pre- according to the molecule of cutter 4 or atomic quantity in the default urn Topography obtained on metal works 8
If range, (molecule or the minimum of atomic quantity preset range are got over for the vibration frequency and amplitude that adjust ultrasonic vibration installation 5
Greatly, vibration frequency and amplitude are also bigger).Wherein, urn Topography is preset depending on Surface Energy Gradients design requirement.
Step 4: XY drives platform to navigate to the initial manufacture position of metal works immediately below cutter；Start ultrasonic vibration
Device 5 vibrates cutter 4 before processing.
Step 5: starting fine feed apparatus 6, cutter 4 stops fine feed apparatus 6 when contacting metal works 8；Then XY
Driving platform drives metal works to feed in the x, y direction according to the default urn Topography of metal works 8, while being again started up micro-
It measures feed arrangement 6 and presses default amount of feeding feeding, start to process.Wherein, depending on presetting the amount of feeding according to the material of metal works 8
If (material of metal works is titanium alloy, and presetting the amount of feeding is 100nm~500nm；If the material of metal works is steel,
The default amount of feeding is 500nm~1.0 μm).When processing next discontinuous position in the default urn Topography of metal works,
Fine feed apparatus resets and stops.
Step 6: step 5 is repeated, the entire default urn Topography until processing metal works.As shown in figure 4, being
A kind of schematic diagram that adjacent area nano surface grade pattern is different.
Claims (7)
1. a kind of Nano surface of metal material grade pattern processing method, it is characterised in that: this method is specific as follows:
Step 1: being directed to the material of metal works to be processed, the cutter of different materials is selected；If metal works to be processed are titanium conjunction
Gold then selects the cutter of hardwood material；If metal works to be processed are steel, the cutter of hardwood, aluminium alloy or copper product is selected；
Step 2: metal works to be processed are placed in work piece platform, clamping cylinder drives clamp metal work to be processed
Part；
Step 3: adjusting the vibration frequency and amplitude of ultrasonic vibration installation；
Step 4: XY drives platform to navigate to the initial manufacture position of metal works immediately below cutter；Start ultrasonic vibration installation,
Vibrate cutter before processing；
Step 5: starting fine feed apparatus, whens tool contact metal works, stop fine feed apparatus；XY drives platform according to gold
The default urn Topographies of metal work-pieces drives metal works to feed in the x, y direction, at the same be again started up fine feed apparatus by
Default amount of feeding feeding, starts to process；Cutter when being fed to metal works, erase and taken away the molecule on metal works or
Atom, and cutter is also smeared on metal works and leaves the molecule or atom of cutter, is spread to surface of workpiece mass transfer
At mass transfer film, the urn Topography of surface of workpiece is formed；It processes next in the default urn Topography of metal works
When discontinuous position, fine feed apparatus resets and stops；
Step 6: step 5 is repeated, the entire default urn Topography until processing metal works.
2. a kind of Nano surface of metal material grade pattern processing method according to claim 1, it is characterised in that: if metal
The material of workpiece is titanium alloy, then presetting the amount of feeding is 100nm~500nm；If the material of metal works is steel, feeding is preset
Amount is 500nm~1.0 μm.
3. a kind of Nano surface of metal material grade pattern processing unit (plant), it is characterised in that: the workpiece mainly moved by horizontal direction
The mobile fine feed apparatus of mobile platform, vertical direction, ultrasonic vibration installation and cutter composition；The workpiece mobile platform
Including XY driving platform, work piece platform, work piece holder and clamping cylinder；The XY driving platform includes that X is filled to ball-screw driving
It sets and Y-direction ball screw driving device；Work piece holder is driven by clamping cylinder；Work piece platform and clamping cylinder are same by XY driving platform
Step driving；The ultrasonic vibration installation is realized that the microfeed of vertical direction, ultrasonic vibration installation are produced by fine feed apparatus
Raw vibration is applied on cutter；The cutter is hardwood, copper or aluminium alloy.
4. a kind of Nano surface of metal material grade pattern processing unit (plant) according to claim 3, it is characterised in that: described
Work piece platform two sides respectively set a work piece holder and a clamping cylinder, two clamping cylinder synchronous averagings or stopping.
5. a kind of Nano surface of metal material grade pattern processing unit (plant) according to claim 3, it is characterised in that: the X
Stroke to ball screw driving device and Y-direction ball screw driving device is 200mm, and positioning accuracy is 0.02mm, weight
Multiple positioning accuracy is 0.01mm；The cylinder diameter of clamping cylinder is 12mm, stroke 10mm.
6. a kind of Nano surface of metal material grade pattern processing unit (plant) according to claim 3, it is characterised in that: described
Fine feed apparatus uses Z-direction ball screw driving device, the feed of every rotation of Z-direction ball screw driving device be 100nm~
1.0 μm, X to the feed of every rotation of ball screw driving device and Y-direction ball-screw be 0.01mm~0.1mm.
7. a kind of Nano surface of metal material grade pattern processing unit (plant) according to claim 3, it is characterised in that: described
Ultrasonic vibration installation is mainly made of supersonic generator, energy converter and amplitude transformer；Supersonic generator generation is greater than or equal to
The vibration signal of 1MHz is converted to mechanical oscillation through energy converter, then amplitude is converted to 1~100nm grades of amplitudes by amplitude transformer, and
Pass to cutter.
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