CN107398783A - A kind of Nano surface of metal material level pattern processing method and device - Google Patents
A kind of Nano surface of metal material level pattern processing method and device Download PDFInfo
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- CN107398783A CN107398783A CN201710722593.6A CN201710722593A CN107398783A CN 107398783 A CN107398783 A CN 107398783A CN 201710722593 A CN201710722593 A CN 201710722593A CN 107398783 A CN107398783 A CN 107398783A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/14—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by liquid or gas pressure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Milling Processes (AREA)
Abstract
The invention discloses a kind of Nano surface of metal material level pattern processing method and device.The method and apparatus of urn Topography is processed to hard workpiece surface currently without soft cutter.The present invention is directed to metal work piece materials to be processed, selects the cutter of different materials；According to the molecule or atomic quantity preset range of cutter in the default urn Topography obtained on metal works, the vibration frequency and amplitude of ultrasonic vibration installation are adjusted；Clamping cylinder drives clamp metal works to be processed；XY drives platform to navigate to the initial manufacture position of metal works immediately below cutter；Start ultrasonic vibration installation, make cutter micro-vibration before processing；The routing motion of workpiece mobile platform and fine feed apparatus, and fine feed apparatus is pressed the default amount of feeding and fed, and processes the default urn Topography of metal works.The present invention diffuses into mass transfer film using soft cutter to surface of workpiece mass transfer, and so as to change workpiece surface energy gradient, workpiece will not be caused damage.
Description
Technical field
The invention belongs to the machining of material surface pattern and manufacturing technology field, more particularly to a kind of metal material table
Face urn Topography processing method and device.
Background technology
The pattern of surface micro-nano structure has important application in machining.Micro-nano pattern has excellent antifriction quality
Can, as micropore (groove) structure of some surface textures contributes to the formation of hydrodynamic lubrication oil film, reduce friction so as to increase lubrication.
Meanwhile micro-nano pattern has some super-hydrophobic or super hydrophilic performances, in metal automatically cleaning, anticorrosion and it is wear-resistant in have emphatically
The application wanted.The surface topography manufacture of current micro-nano structure substantially has physics and chemical method.Wherein physical method includes simple
Machining, Laser lithography, shot blasting on surface, method of electrostatic spinning etc..Chemical method includes electrochemical deposition method, hydro-thermal is closed
Cheng Fa, vapour deposition, soda acid etching etc..In these methods, the machining accuracy of simple and mechanical processing is not very high, and laser light
Lithography, shot blasting on surface, method of electrostatic spinning equipment cost are higher, and can change to a certain extent the surface chemistry of workpiece into
Point；And chemical method is mostly to be corroded using corresponding chemical reagent, although process and raw material are all relatively simple, chemical reagent
The metallographic structure of workpiece can be destroyed, and its etching process is difficult to control.
At present, do not have method and apparatus of the soft cutter to hard workpiece surface processing urn Topography in association area, such as
The number of applying for a patent is 201410075821.1 (Authorization Notice No. 103817355A, authorized announcement date are on May 28th, 2014)
Patent disclose a kind of accurate or ultra-precise cutting processing beam mode ultrasonic vibration auxiliary cutting device.The device is main
It is made up of ultrasonic vibration installation, shell and cutter.Its shell is tightens ring structure, to node position at the two of ultrasonic vibration installation
Fastened, realize that outer cover length is adjustable, it is fastened on the node position of ultrasonic vibration installation all the time.The device processing efficiency
Height, assembling link are few, blade installs and uninstalls conveniently；The device is preferably subtracted using the ultrasonic vibration assisted machining of beam mode
Small cutting force, cutting temperature, tool wear etc., improve processing efficiency, can form more accurate surface, but the device
The axial workpiece of cylinder class is applied in general to, is difficult to for some common rectangular pieces, use range is limited.While its
Vibration uses beam mode, and cutter can influence workpiece surface precision to a certain extent using inserted tools such as diamonds；Application
Patent No. 201210366271.X (Authorization Notice No. 102873594A, authorized announcement date are 16 days 2013) patent is public
A kind of adjustable for height inclination angle type ultrasonic vibrating machining device is opened.The patent is a kind of angle of bonded-abrasive ultrasonic elliptical vibratory
Degree and height adjustable, a kind of adjustable for height inclination angle type ultrasonic vibrating machining device of processing efficiency can be improved.The device uses
Abrasive grinding wheel workpieces processing, its ultrasonic vibrator are fixed with spring base, and two springs, spring base and micromotion platform are housed on spring base
Fixed, micromotion platform is fixed on the groove of rotating shaft.The apparatus structure is simple, easy to adjust, passes through sensor and micromotion platform
The height of abrasive grinding wheel is adjusted, by the angle of inclination angle electric rotating machine adjusting means, inclined elliptical vibration is produced, reduces work
Part surface damage, ensure that machining accuracy, improve processing effect.But the abrasive grinding wheel that the device uses is smaller, machining area
It is limited, and workpiece is integrally fixed at below device, limits the range of work of cutter, is only applicable to some smaller parts, simultaneously
The mechanism is adjustable inclination angle type device, and processing is not steady enough.
The content of the invention
The present invention is for the problem of various metal material surface micro/nano level pattern processing and manufacturings are more difficult at present, there is provided
A kind of processing method and device of the more accurate material surface urn Topography that can protect workpiece surface.Soft tool sharpening is
A kind of novel processing mode, the processing mode is seldom used in current manufacture field, its cutter hardness used is less than work
Part hardness, therefore workpiece will not be caused damage, and continuous cutting is converted to the interrupted of frequency low-amplitude by ultrasonic vibration assisted machining
Cutting, Precision Machining can be achieved.Therefore, ultrasonic vibration and soft cutter are conjointly employed in the formation of material surface micromorphology for
The processing important in inhibiting of some difficult-to-machine materials and weak separation material.
A kind of Nano surface of metal material level pattern processing method of the present invention, it is specific as follows：
Step 1: for the material of metal works to be processed, the cutter of different materials is selected.If metal works to be processed are
Titanium alloy, then select the cutter of hardwood material；If metal works to be processed are steel, hardwood, aluminium alloy or copper product are selected
Cutter.
Step 2: metal works to be processed are positioned in work piece platform, clamping cylinder drives clamp gold to be processed
Metal work-pieces.
Step 3: the vibration frequency and amplitude of regulation ultrasonic vibration installation.
Step 4: XY drives platform to navigate to the initial manufacture position of metal works immediately below cutter；Start ultrasonic vibration
Device, cutter is set to vibrate before processing.
Step 5: starting fine feed apparatus, stop fine feed apparatus during tool contact metal works.XY drives platform root
Drive metal works to feed in the x, y direction according to the default urn Topography of metal works, while be again started up microfeed dress
Put and fed by the default amount of feeding, start to process.Process next discontinuous position in the default urn Topography of metal works
When, fine feed apparatus resets and stopped.
Step 6: repeat step five, the entirely default urn Topography until processing metal works.
Further, if the material of metal works is titanium alloy, it is 100nm~500nm to preset the amount of feeding；If metal works
Material be steel, then preset the amount of feeding be 500nm~1.0 μm.
A kind of Nano surface of metal material level pattern processing unit (plant) of the present invention, the workpiece mainly moved by horizontal direction move
Platform, the fine feed apparatus of vertical direction movement, ultrasonic vibration installation and cutter composition.Described workpiece mobile platform includes
XY drivings platform, work piece platform, work piece holder and clamping cylinder.Described XY driving platforms include X to ball screw driving device and Y
To ball screw driving device；Work piece holder is driven by clamping cylinder；Work piece platform and clamping cylinder drive platform synchronously to drive by XY
It is dynamic；Described ultrasonic vibration installation is realized the microfeed of vertical direction by fine feed apparatus, and ultrasonic vibration installation, which produces, to shake
It is dynamic to be applied on cutter.Described cutter is hardwood, copper or aluminium alloy.
Described work piece platform both sides respectively set a work piece holder and a clamping cylinder, two clamping cylinder synchronous averagings
Or stop.
The stroke of the X to ball screw driving device and Y-direction ball screw driving device is 200mm, positioning precision
It is 0.02mm, repetitive positioning accuracy 0.01mm；The cylinder diameter of clamping cylinder is 12mm, stroke 10mm.
Described fine feed apparatus uses Z-direction ball screw driving device, and Z-direction ball screw driving device often rotates into
Be 100nm~1.0 μm to amount, the feed of every rotation of X to ball screw driving device and Y-direction ball-screw be 0.01mm~
0.1mm。
Described ultrasonic vibration installation is mainly made up of supersonic generator, transducer and ultrasonic transformer；Supersonic generator
The vibration signal more than or equal to 1MHz is produced, mechanical oscillation are converted to through transducer, then amplitude is converted to 1 by ultrasonic transformer~
100nm level amplitudes, and pass to cutter.
Beneficial effects of the present invention：
1st, the present invention is a kind of with soft cutter (such as hardwood (i.e. timber as higher such as sandalwood, olive ebony hardness), copper
(Brinell hardness is 110~130HB), aluminium alloy (Brinell hardness is 120~150HB)) the hard workpiece of ultrasonic vibration ultramicron processing
Surface (such as No. 45 steel (Brinell hardness is 190~250HB), bearing steel (170~207HB of Brinell hardness) various steel, and titanium
Alloy (after annealing Brinell hardness up to 298~349HB)), so as to change the method for workpiece surface energy gradient；It is that a kind of utilization is soft
Cutter diffuses into mass transfer film to surface of workpiece mass transfer, so as to change the method for workpiece surface energy gradient；It is that one kind is based on
Soft cutter carries out atom in surface of workpiece and processed with molecular level, changes the method for surface of workpiece urn Topography；It is
A kind of three-shaft linkage type surface topography with soft tool sharpening metal works fabricates device；It is a kind of controllable material surface
The urn Topography processing and manufacturing device of energy gradient；It is that a kind of workpieces processing can be accurate mobile in the horizontal plane, ultrasonic vibration (is received
Meter level amplitude, 1MHz frequencies above) soft cutter can be in the accurate mobile three axis machining device of vertical direction.
2nd, vibration frequency of the invention is far longer than the audio range that human ear can be heard, does not have noise pollution.Lead to simultaneously
Cross ultramicron molecule, atom level processes mass transfer into mass transfer film, controlled material surface topography, so as to reach regulation and control surface energy distribution
Purpose；It primarily can be used for the fields such as precision optical machinery, information storage and the manufacture of safe, hydrophobic and water-wetted surface.
Brief description of the drawings
Fig. 1 is the overall structure stereogram of the present invention.
Fig. 2 is the schematic diagram that cutter is processed in workpiece surface in the present invention.
Fig. 3 is the urn Topography schematic diagram formed in the present invention after metal works processing on surface.
Fig. 4 is the assembling schematic diagram of ultrasonic vibration installation and fine feed apparatus in the present invention.
Embodiment
Below in conjunction with the accompanying drawings, the invention will be further described.
As illustrated in fig. 1 and 2, a kind of Nano surface of metal material level pattern processing unit (plant), is mainly moved by horizontal direction
Workpiece mobile platform 1, fine feed apparatus 6, ultrasonic vibration installation 5 and the cutter 4 of vertical direction movement form.Workpiece movement is flat
Platform 1 includes XY drivings platform, work piece platform 2, work piece holder 3 and clamping cylinder 7.XY driving platforms include X and drive dress to ball-screw
Put and Y-direction ball screw driving device；Work piece holder 3 is driven by clamping cylinder 7, so as to clamp or unclamp metal works 8；This reality
Apply in example, the both sides of work piece platform 2 respectively set a work piece holder 3 and a clamping cylinder 7, and the synchronous driving of two clamping cylinders 7 makes
Obtain two work piece holder centerings and clamp metal works 8.Work piece platform 2, work piece holder 3 and clamping cylinder 7 drive platform synchronous by XY
Driving；Metal works 8 are realized the movement in horizontal plane by workpiece mobile platform 1.Ultrasonic vibration installation 5 is by fine feed apparatus 6
The microfeed of vertical direction is realized, the generation vibration of ultrasonic vibration installation 5, which is applied on cutter 4, realizes vibrocutting.Workpiece moves
The routing motion of moving platform 1 and fine feed apparatus 6, to realize that three-shaft linkage processing and tool sharpening change metal works table
Face energy gradient, the urn Topography of controllable material surface energy gradient is formed in surface of workpiece.
The stroke of X to ball screw driving device and Y-direction ball screw driving device is 200mm, and positioning precision is
0.02mm, repetitive positioning accuracy are ± 0.01mm；The cylinder diameter of clamping cylinder is 12mm, stroke 10mm.
As shown in figure 3, fine feed apparatus 6 uses Z-direction ball screw driving device, Z-direction ball screw driving device ratio
The X of XY driving platforms is accurate to ball screw driving device and Y-direction ball screw driving device, Z-direction ball screw driving device
Feed of every rotation be submicron order (100nm~1.0 μm), X is to ball screw driving device and Y-direction ball screw driving device
Feed of every rotation be 0.01mm~0.1mm, when processing metal works 8, realize slow microfeed, so as in cutter 4 it is right
When metal works 8 are extruded and rubbed, continuous processing for a long time is realized on the surface of metal works 8, being formed has surface energy ladder
The urn Topography of degree.Ultrasonic vibration installation 5 is mainly made up of supersonic generator 12, transducer 13 and ultrasonic transformer 14, is being added
In man-hour, supersonic generator 12 produces the high-frequency vibration signal (amplitude is nanoscale) more than or equal to 1MHz, through transducer 13
Mechanical oscillation are converted to, then amplitude is converted into 1~100nm level amplitudes by ultrasonic transformer 14, and pass to cutter 4, produce cutter 4
The vertical direction vibration of raw frequency low-amplitude, realizes ultrasonic vibrating machining of the cutter 4 to metal works 8, in surface of workpiece shape
Into the urn Topography with controlled surface energy gradient.
Cutter is hardwood, copper or aluminium alloy, and cutter 4 changes the energy on the surface of metal works 8 in 8 Surface Machining of workpiece
Gradient is measured, is a kind of atom level and the processing method of molecular level, cutter 4 is in the Surface Machining of metal works 8, while ultramicron is to gold
When metal work-pieces 8 are fed, erase to a certain extent and taken away molecule or atom on metal works 8, and cutter 4 is also certain
Smeared in degree on metal works 8 and leave the molecule or atom of cutter 4, biography is diffused into the surface mass transfer of metal works 8
Plasma membrane, form a kind of urn Topography of surface of workpiece.Surface of workpiece schematic diagram after processing is as shown in figure 4, figure
In 9 be green surface；10 be that processing times are few, metal works and the cutter machined surface less with respect to mass transfer；11 are
After repeatedly processing, surface of workpiece forms the machined surface of mass transfer film.
In foregoing, cutter 4 in the Surface Machining of metal works 8, while ultramicron to metal works 8 feed when, in certain journey
Erased on degree and taken away molecule or atom on metal works 8, and cutter 4 also applies on metal works 8 to a certain extent
Smear and leave the molecule or atom of cutter 4, this process is mass transport process；And finally on the surface of metal works 8 after mass transfer
The urn Topography of formation is mass transfer film.
Nano surface of metal material level pattern processing method, its specific procedure of processing are as follows：
Step 1: for the material of metal works 8 to be processed, the cutter 4 of different materials is selected.If metal works to be processed
For the cutter of titanium alloy, then selection hardwood material；If metal works to be processed are steel, hardwood, aluminium alloy or copper product are selected
Cutter.
Step 2: metal works to be processed are positioned in work piece platform 2, it is to be processed that clamping cylinder 7 drives fixture 3 to clamp
Metal works, the schematic diagram after clamping are as shown in Figure 2.
It is Step 3: pre- according to the molecule of cutter 4 or atomic quantity in the default urn Topography obtained on metal works 8
If scope, (molecule or the minimum of atomic quantity preset range are got over for the vibration frequency and amplitude of regulation ultrasonic vibration installation 5
Greatly, vibration frequency and amplitude are also bigger).Wherein, urn Topography is preset depending on Surface Energy Gradients design requirement.
Step 4: XY drives platform to navigate to the initial manufacture position of metal works immediately below cutter；Start ultrasonic vibration
Device 5, cutter 4 is set to vibrate before processing.
Step 5: starting fine feed apparatus 6, stop fine feed apparatus 6 during 4 contacting metal workpiece 8 of cutter；Then XY
Driving platform drives metal works to feed in the x, y direction according to the default urn Topography of metal works 8, while is again started up micro-
Measure feed arrangement 6 and press default amount of feeding feeding, start to process.Wherein, depending on presetting the amount of feeding according to the material of metal works 8
(if the material of metal works is titanium alloy, and it is 100nm~500nm to preset the amount of feeding；If the material of metal works is steel,
The default amount of feeding is 500nm~1.0 μm).When processing next discontinuous position in the default urn Topography of metal works,
Fine feed apparatus resets and stopped.
Step 6: repeat step five, the entirely default urn Topography until processing metal works.As shown in figure 4, it is
A kind of different schematic diagram of adjacent area nano surface level pattern.
Claims (7)
- A kind of 1. Nano surface of metal material level pattern processing method, it is characterised in that：This method is specific as follows：Step 1: for the material of metal works to be processed, the cutter of different materials is selected；If metal works to be processed close for titanium Gold, then select the cutter of hardwood material；If metal works to be processed are steel, the cutter of hardwood, aluminium alloy or copper product is selected；Step 2: metal works to be processed are positioned in work piece platform, clamping cylinder drives clamp metal work to be processed Part；Step 3: the vibration frequency and amplitude of regulation ultrasonic vibration installation；Step 4: XY drives platform to navigate to the initial manufacture position of metal works immediately below cutter；Start ultrasonic vibration installation, Cutter is set to vibrate before processing；Step 5: starting fine feed apparatus, stop fine feed apparatus during tool contact metal works；XY drives platform according to gold The default urn Topographies of metal work-pieces drives metal works to feed in the x, y direction, at the same be again started up fine feed apparatus by Default amount of feeding feeding, starts to process；It is micro- when processing next discontinuous position in the default urn Topography of metal works Amount feed arrangement resets and stopped；Step 6: repeat step five, the entirely default urn Topography until processing metal works.
- A kind of 2. Nano surface of metal material level pattern processing method according to claim 1, it is characterised in that：If metal The material of workpiece is titanium alloy, then it is 100nm~500nm to preset the amount of feeding；If the material of metal works is steel, feeding is preset Measure as 500nm~1.0 μm.
- A kind of 3. Nano surface of metal material level pattern processing unit (plant), it is characterised in that：The workpiece mainly moved by horizontal direction Mobile platform, the fine feed apparatus of vertical direction movement, ultrasonic vibration installation and cutter composition；Described workpiece mobile platform Including XY drivings platform, work piece platform, work piece holder and clamping cylinder；Described XY driving platforms include X and drive dress to ball-screw Put and Y-direction ball screw driving device；Work piece holder is driven by clamping cylinder；Work piece platform and clamping cylinder drive platform same by XY Step driving；Described ultrasonic vibration installation is realized the microfeed of vertical direction, ultrasonic vibration installation production by fine feed apparatus Raw vibration is applied on cutter；Described cutter is hardwood, copper or aluminium alloy.
- A kind of 4. Nano surface of metal material level pattern processing unit (plant) according to claim 3, it is characterised in that：Described Work piece platform both sides respectively set a work piece holder and a clamping cylinder, two clamping cylinder synchronous averagings or stopping.
- A kind of 5. Nano surface of metal material level pattern processing unit (plant) according to claim 3, it is characterised in that：The X Stroke to ball screw driving device and Y-direction ball screw driving device is 200mm, and positioning precision is 0.02mm, weight Multiple positioning precision is 0.01mm；The cylinder diameter of clamping cylinder is 12mm, stroke 10mm.
- A kind of 6. Nano surface of metal material level pattern processing unit (plant) according to claim 3, it is characterised in that：Described Fine feed apparatus uses Z-direction ball screw driving device, the feed of every rotation of Z-direction ball screw driving device for 100nm~ 1.0 μm, the feed of every rotation of X to ball screw driving device and Y-direction ball-screw is 0.01mm~0.1mm.
- A kind of 7. Nano surface of metal material level pattern processing unit (plant) according to claim 3, it is characterised in that：Described Ultrasonic vibration installation is mainly made up of supersonic generator, transducer and ultrasonic transformer；Supersonic generator, which produces, to be more than or equal to 1MHz vibration signal, mechanical oscillation are converted to through transducer, then amplitude is converted into 1~100nm level amplitudes by ultrasonic transformer, and Pass to cutter.
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Cited By (14)
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| CN108500744A (en) * | 2018-04-26 | 2018-09-07 | 上海工程技术大学 | A kind of ultrasonic vibration grinding machine |
| CN108857606A (en) * | 2018-05-07 | 2018-11-23 | 杭州电子科技大学 | The ultrasonic machining device and its calibration method of broaching tool inner concave shape surface micro-structure |
| CN109093746A (en) * | 2018-07-25 | 2018-12-28 | 广东大上科电子科技有限公司 | A kind of self-positioning flexible drilling equipment of circuit board |
| CN109108403A (en) * | 2018-07-24 | 2019-01-01 | 杭州电子科技大学 | Metal surface dimple-structures manufacturing method and device based on contact adherency removing |
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| CN108500744A (en) * | 2018-04-26 | 2018-09-07 | 上海工程技术大学 | A kind of ultrasonic vibration grinding machine |
| CN108500744B (en) * | 2018-04-26 | 2019-06-18 | 上海工程技术大学 | A kind of ultrasonic vibration grinding machine |
| CN108857606A (en) * | 2018-05-07 | 2018-11-23 | 杭州电子科技大学 | The ultrasonic machining device and its calibration method of broaching tool inner concave shape surface micro-structure |
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