CN113618090B - Micro-nano structure roller mold machining and impression forming machine tool and control method thereof - Google Patents

Micro-nano structure roller mold machining and impression forming machine tool and control method thereof Download PDF

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Publication number
CN113618090B
CN113618090B CN202110916070.1A CN202110916070A CN113618090B CN 113618090 B CN113618090 B CN 113618090B CN 202110916070 A CN202110916070 A CN 202110916070A CN 113618090 B CN113618090 B CN 113618090B
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shaft
imprinting
gear shaft
equipment
machine tool
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CN113618090A (en
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冀世军
田豪霞
赵继
杨俊�
胡志清
代汉达
刘振泽
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Jilin University
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Jilin University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B5/00—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor
    • B23B5/08—Turning-machines or devices specially adapted for particular work; Accessories specially adapted therefor for turning axles, bars, rods, tubes, rolls, i.e. shaft-turning lathes, roll lathes; Centreless turning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/013—Control or regulation of feed movement
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B23Q17/2233—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work for adjusting the tool relative to the workpiece
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/401—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for measuring, e.g. calibration and initialisation, measuring workpiece for machining purposes
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/402—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for positioning, e.g. centring a tool relative to a hole in the workpiece, additional detection means to correct position

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Shaping Metal By Deep-Drawing, Or The Like (AREA)

Abstract

The invention discloses a micro-nano structure roller mold machining and impression forming machine tool and a control method thereof. The invention combines the ultra-precision processing technology and the nano-imprinting technology, realizes simultaneous processing and use of the cylindrical surface mold after one-time clamping, avoids secondary clamping errors, can simultaneously imprint in four directions after the mold is processed, and ensures that a machine tool carries out diversified processing according to the actual requirements of a processor.

Description

Micro-nano structure roller mold machining and impression forming machine tool and control method thereof
Technical Field
The invention belongs to the technical field of mechanical manufacturing, and particularly relates to a micro-nano structure roller mold machining and impression forming machine tool and a control method.
Background
The ultra-precision processing technology and the nanoimprint technology are two key technologies for micro-nano structure processing. The ultra-precision machining plays a crucial role in the national leading edge science and technology field, intersects with the electronic field, the sensor, the optics, the computer and other fields, and becomes one of the indispensable key technologies in the processing of many advanced technical products.
The nano-imprinting technology re-engraves the micro-nano structure on the template on the substrate by pure mechanical re-engraving to realize the transfer of the required micro-nano structure, and the technology draws wide attention of the scientific field by virtue of the advantages of high resolution, high efficiency and low cost, and is widely applied to the fields of high-precision storage, optics, electronics, solar cells, sensors and the like at present.
At present, a machining method of turning and milling is used for machining a micro-nano groove structure mold, which is an effective method for manufacturing a micro-nano surface structure part, but the machined mold has a secondary clamping error when being used, and certain influence is generated on the stamping precision.
Disclosure of Invention
The invention provides a micro-nano structure roller mold processing and impression forming machine tool and a control method thereof, aiming at solving the problem that the processing quality is not ideal due to the influence of environment change and secondary clamping error after an ultra-precision processing machine tool finishes mold processing and then takes down and transfers the mold to a nano impression device, and the micro-nano structure roller mold processing and impression forming machine tool can finish micro-nano structure processing and impression by using the mold under one-time clamping and the same environment, can output completely symmetrical rotation drive in four directions simultaneously, can carry out nano impression in four directions simultaneously, meets the diversified processing requirements of various materials, and has important significance for the processing production of products.
The purpose of the invention is realized by the following technical scheme, which is combined with the attached drawings:
a micro-nano structure roller mold machining and impression forming machine tool comprises a machine tool base 1, a rotating base 2, soft material nano impression equipment 3, a spindle box 4, hard material nano impression equipment 5, a double tool rest 6, an X-direction hydrostatic pressure guide rail 7, an X-axis torsion wheel friction transmission system 8, a Z-direction torsion wheel friction transmission system 9 and a Z-direction hydrostatic pressure guide rail 10;
the rotary base 2 comprises a rotary table 212 and a driving mechanism, the rotary table 212 is rotatably connected to the upper surface of the machine tool base 1, and the rotary table 212 is driven to rotate by the driving mechanism;
the spindle box 4, the two soft material nano-imprinting devices 3 and the two hard material nano-imprinting devices 5 are all fixed on the rotating table 212, the spindle box 4 is fixed in the middle of the rotating table 212, the two soft material nano-imprinting devices 3 are symmetrically arranged on two sides of the spindle box 4, and the two hard material nano-imprinting devices 5 are symmetrically arranged on the other two sides of the spindle box 4; each of the four side surfaces of the spindle box 4 extends out of two output shafts which are respectively in driving connection with the two soft material nano-imprinting devices 3 and the two hard material nano-imprinting devices 5;
the Z-direction hydrostatic pressure guide rail 10 is arranged on one side of the machine tool base 1, and the Z-direction torsion wheel friction transmission system 9 is arranged on the Z-direction hydrostatic pressure guide rail 10 and is used for driving a Z-direction sliding table 1003 of the Z-direction hydrostatic pressure guide rail 10 to perform linear motion along the Z direction;
the X-direction hydrostatic pressure guide rail 7 is arranged on a Z-direction sliding table 1003 of the Z-direction hydrostatic pressure guide rail 10, and the X-axis torsion wheel friction transmission system 8 is arranged on the X-direction hydrostatic pressure guide rail 7 and is used for driving two X-direction sliding tables 702 of the X-direction hydrostatic pressure guide rail 7 to linearly move along the X direction;
the double tool rests 6 comprise two tool systems with the same structure, the two tool systems are respectively fixed on two X-direction sliding tables 702 of the X-direction hydrostatic guide rail 7, and the height of the double tool rests 6 is matched with the soft material nano-imprinting equipment 3 or the hard material nano-imprinting equipment 5, so that the matching operation can be carried out;
laser interferometers are respectively mounted on the Z-direction sliding table 1003 and the X-direction sliding table 702 of the Z-direction hydrostatic guideway 10 and used for detecting the position accuracy of the machine tool.
Further, the driving mechanism of the rotating base 2 comprises a worm wheel shaft 201, a grooved wheel disc 202, a worm 204, a worm wheel 205, a ratchet wheel shaft 206, a ratchet wheel 208 and a motor 209; the worm wheel shaft 201 is arranged in a mounting hole of the machine tool base 1 through a bearing and a rotary sleeve cup; the grooved wheel disc 202 and the worm wheel 205 are respectively installed on the turbine shaft 201 through keys; the worm 204 and the worm wheel 205 form a worm-gear worm pair, one end of the worm 204 is connected with an output shaft of the motor 209, and the other end of the worm is arranged in a mounting hole of the machine tool base 1 through a bearing; the ratchet 208 and the sheave disc 202 form an intermittent motion mechanism, the ratchet 208 is mounted on a ratchet shaft 206 through a key, and the ratchet shaft 206 is mounted in corresponding mounting holes in the machine tool base 1 and the rotating table 212 through a bearing and a rotating sleeve cup.
Further, the soft material nano-imprinting equipment 3 comprises a soft imprinting equipment lower box body 301, a middle gear shaft 303, an auxiliary roller 304, a mold roller 305, a soft imprinting equipment upper box body 306, two long gear shafts 307 and a first pinion shaft 312; the soft imprinting equipment lower box body 301 is fixed on the rotating table 212 of the rotating base 2, and the soft imprinting equipment upper box body 306 is fixedly connected with the soft imprinting equipment lower box body 301; a plurality of auxiliary rollers 304 are rotatably connected to the lower box body 301 of the soft imprinting equipment; the middle gear shaft 303 is arranged on the lower box body 301 of the soft imprinting equipment, and a roller 309 is sleeved above the extending end of the middle gear shaft; the middle gear shaft 303, the first pinion shaft 312 and the two long gear shafts 307 are respectively provided with a spur gear 310 on the shaft sections positioned in the lower box body 301 of the soft imprinting device, and the middle gear shaft 303, the first pinion shaft 312 and one long gear shaft 307 are sequentially meshed and driven through the spur gears 310; two long gear shafts 307 are positioned at the interface of the lower box body 301 of the soft imprinting equipment and the upper box body 306 of the soft imprinting equipment, the extending end of one side of the long gear shaft 307 is connected with the power output end of the spindle box 4, and the output end of the other side of the long gear shaft 307 is sleeved with a mold roller 305.
Further, the hard material nano-imprinting equipment 5 comprises a hard imprinting equipment lower box 501, two middle gear shafts 502, a second pinion shaft 503, a gluing roller 504, a hard imprinting equipment upper box 505, a mold roller 506, a large gear shaft 507, three large spur gears 508 and a small spur gear 509; the lower hard imprinting equipment box 501 is fixed on the rotating table 212 of the rotating base 2, and the upper hard imprinting equipment box 505 is fixed on the lower hard imprinting equipment box 501; two middle gear shafts 502 are rotatably connected to a joint part of a lower box body 501 of the hard imprinting equipment and an upper box body 505 of the hard imprinting equipment, a mold roller 506 is sleeved on the extending end on one side of the middle gear shaft 502, and the extending end on the other side of the middle gear shaft 502 is connected with the power output end of the spindle box 4; the extending end of the second pinion shaft 503 is sleeved with a gluing roller 504; the large gear shaft 507 is positioned below one middle gear shaft 502, and the extending end of the large gear shaft 507 is sleeved with a mould roller 506; inside the lower box 501 of the hard imprinting equipment, a second pinion shaft 503 is provided with a small spur gear 509, a large spur gear 508 is arranged on a large gear shaft 507, two middle gear shafts 502 are provided with large spur gears 508, the small spur gear 509 on the second pinion shaft 503 is in meshing transmission with the large spur gear 508 on the middle gear shaft 502 adjacent to the small spur gear 509, and the large spur gear 508 on the other middle gear shaft 502 is in meshing transmission with the large spur gear 508 on the large gear shaft 507 below the small spur gear 508.
Further, the spindle box 4 comprises a spindle box spur gear 405, a drive bevel gear 406, a spur gear shaft 407 and a driven bevel gear 408; the driving bevel gear 406 is matched with four driven bevel gears 408 which are uniformly distributed at 90 degrees to form four bevel gear pairs which are uniformly distributed on a horizontal plane; each bevel gear pair is respectively connected with a spur gear shaft 407 through a pair of mutually meshed spur gears 405 of a main shaft box, and the spur gear shaft 407 is connected with a power input end of the soft material nano-imprinting device 3 or the hard material nano-imprinting device 5 through an elastic cancellation coupler; the power is transmitted to the driven bevel gear 408 from the driving bevel gear 406, the driven bevel gear 408 rotates to drive the straight gear 405 of the spindle box to rotate, the motion is further transmitted to the straight gear shaft 407, and the motion is transmitted to the power input end of the soft material nano-imprinting equipment 3 or the hard material nano-imprinting equipment 5 through the elastic cancellation coupler.
Furthermore, the main spindle box 4 further comprises a main spindle box upper box body 412 and a main spindle box lower box body 401, the driving bevel gear 406 is installed on the driving bevel gear shaft 402, and the driving bevel gear shaft 402 is installed in the main spindle box lower box body 401; the driving bevel gear 406 is meshed with the driven bevel gear 408, and the driven bevel gear 408 is fixed at the tail end of the driven bevel gear shaft 403; the rear end of the driven bevel gear 408 is connected with a synchronizer spline hub 416, a synchronizer coupling sleeve 418 is sleeved outside the synchronizer spline hub 416, and three armatures 417 which are uniformly distributed along the circumferential direction at 120 degrees are installed outside the synchronizer coupling sleeve 418; the solenoid housing 414 is fitted over the shaft of the synchronizer spline hub 416, with the coil 415 mounted between the synchronizer spline hub 416 and the solenoid housing 414; the left side of the electromagnetic valve shell 414 is provided with a spring frame 413, and the spring frame 413 is sleeved above the driven bevel gear shaft 403 in an empty way; a main spindle box straight gear 405 is arranged on a driven bevel gear shaft 403, and the driven bevel gear shaft 403 is arranged in an installation groove of a main spindle box lower box body 401; the straight gear shaft 407 is provided with a main shaft box straight gear 405 meshed with the straight gear shaft 405 on the driven bevel gear shaft 403, and the extending ends of the straight gear shaft 407 and the driven bevel gear shaft 403 are respectively provided with an elastic cancellation coupling which is respectively connected with corresponding shafts in the soft material nano-imprinting equipment 3 and the hard material nano-imprinting equipment 5.
Further, the double tool rest 6 comprises two tool systems with the same structure, and each tool comprises a turning tool 601, a tool rest 602, a laser micrometer 604 and a mounting plate 605; the turning tool 601 is fixed on the tool rest 602; the tool rest 602 is fixed on an X-direction sliding plate of the X-direction hydrostatic guideway 7, and the laser micrometer 604 is vertically installed on the installation plate 605, so that the measurement position of the laser micrometer 604 and the feed point of the turning tool 601 are located at the same height.
Further, the Z-direction torsion wheel friction transmission system 9 includes a left support 901, a polish rod 902, a torsion wheel friction mechanism 903, a right support 904, a coupler 905 and a stepping motor 906; the step motor 906 outputs power, the power is transmitted to the polished rod 902 through the coupler 905, the polished rod 902 rotates to drive the torsion wheel friction mechanism 903 to move, a fixing plate is installed on the torsion wheel friction mechanism 903, and the fixing plate is connected with the Z-direction sliding table 1003 of the Z-direction hydrostatic guideway 10; the Z-axis torsion wheel friction transmission system 9 is installed in a groove of a Z-direction guide rail 1002 of the Z-direction hydrostatic guide rail 10 through a left support seat 901 and a right support seat 904.
Furthermore, the torsion wheel friction mechanism 903 comprises three torsion wheels 90301, a torsion wheel shaft 90302, a support frame 90303, a torsion wheel bearing end cover 90304, a support frame end cover 90305, an angular contact ball bearing 90306, an inner ring shaft sleeve 90308 and an outer ring shaft sleeve 90309; the three torsion wheels 90301 are uniformly distributed at 120 degrees, and each torsion wheel 90301 is provided with a corresponding hole for mounting a torsion wheel shaft 90302; four angular contact ball bearings 90306 are arranged inside each torsion wheel 90301, an outer ring shaft sleeve 90309 is arranged between the two angular contact ball bearings 90306 in the middle, and an inner ring shaft sleeve 90308 is arranged between every two angular contact ball bearings 90306 from left to right; the torsion wheel bearing end cover 90304 is mounted on the torsion wheel 90301 through a screw; the support frame 90303, the torsion bar shaft 90302 and the support frame end cover 90305 are sequentially installed, and the support frame 90303, the torsion bar shaft 90302, and the support frame end cover 90305 are fixed at two ends through screws.
The invention also provides a control method of the micro-nano structure roller mold machining and impression forming machine tool, and the mold machining and impression forming process comprises the following steps:
starting a machine tool, setting relevant machine tool parameters according to processing requirements, and adjusting the positions of two soft material nano-imprinting devices, two hard material nano-imprinting devices, a double tool rest and a laser interferometer;
secondly, online measurement is carried out on the surfaces of the mold rollers of the two soft material nano-imprinting devices and the two hard material nano-imprinting devices by using a measuring device, relevant data are collected, curved surface reconstruction is carried out, a measurement model of the roller mold is obtained, and a design model of the roller mold is obtained according to a required specific micro-nano structure;
inputting the design model into a machine tool numerical control system, performing model matching and comparison on the design model and the measurement model obtained in the last step after feature recognition, and calculating the machining allowance delta1Acquiring corresponding processing parameters;
step four, carrying out simulation machining according to the machining parameters obtained in the previous step, judging whether interference collision occurs or not, and returning to the step of reselecting the machining parameters if interference exists; if interference collision does not exist, performing numerical control programming, determining path tracks of the double tool rests, and generating corresponding numerical control codes;
fifthly, carrying out numerical control machining; after the processing is finished, measuring the processed roller die again and measuring according to the curveSurface reconstruction to obtain a measurement model; calculating the machining allowance delta at this time2Judging whether the machining requirements are met;
step six, carrying out stamping forming after the processing requirements are met: firstly, retracting the double tool rests to a proper position to avoid interference, then selecting stamping equipment and stamping types according to the types of stamping materials, and stamping in at most four directions according to requirements;
and step seven, stopping the machine tool after the imprinting is finished, and finishing the machining.
The invention has the advantages that:
1. the machine tool disclosed by the invention is an integrated machine tool for machining and nanoimprint forming of the micro-nano structure cylindrical surface mold, so that the cylindrical surface mold can be simultaneously machined and used after being clamped for one time, and secondary clamping errors caused by separate clamping for machining and using are avoided.
2. According to the four-side symmetrical output type spindle box, the spindle box is designed to be in a four-side symmetrical output mode, four identical rotary drives are output to the same plane in four vertical directions simultaneously by matching with the rotating chassis which rotates stably, the direction needing to be machined can be rotated to the plane of the tool rest as required, and the four-direction machining as required is achieved.
3. According to the invention, the nano-imprinting device is modularized, and in consideration of diversification of processing materials and processing conditions, the nano-imprinting device which can realize nano-imprinting of hard materials and soft materials, even can be matched with a double-cutter frame system to realize double-sided nano-imprinting of soft materials, is basically consistent in installation size among different nano-imprinting modules, and is convenient to select according to the processing requirement.
4. The invention adopts a torsion wheel friction transmission system, and is matched with a stepping motor and a driver thereof, thereby realizing the nano-scale positioning precision. A torsion wheel friction transmission system with adjustable pretightening force is designed, and is matched with a hydraulic cylinder to realize independent control of a tool rest and reset of an X-axis slide carriage. The double-cutter frame system based on the method can realize simultaneous processing of the same micro-nano structure on two roller molds so as to realize double-sided nano imprinting forming of materials with special requirements.
Drawings
FIG. 1 is a schematic diagram of the general structure of a micro-nano structure roller mold processing and impression forming machine tool according to an embodiment of the invention
FIG. 2 is a perspective view of the assembly of the worm gear and worm pair and the simple harmonic motion mechanism in the rotating base according to the embodiment of the present invention
FIG. 3 is a schematic view of a partial structure of a rotary base according to an embodiment of the present invention
FIG. 4 is a schematic diagram of an external structure of a soft nanoimprint lithography apparatus according to an embodiment of the present invention
FIG. 5 is a sectional view of a partial structure of a soft nanoimprint lithography apparatus according to an embodiment of the present invention
FIG. 6 is a schematic view of the spindle box according to the embodiment of the present invention
FIG. 7 is a partial cross-sectional view of the spindle head according to the embodiment of the present invention
FIG. 8 is a schematic diagram of a hard material nanoimprinting apparatus according to an embodiment of the invention
FIG. 9 is a partial structural cross-sectional view of a hard material nanoimprinting apparatus according to an embodiment of the invention
FIG. 10 is a schematic structural diagram of a Z-direction torsion wheel friction transmission system according to an embodiment of the invention
FIG. 11 is a schematic structural diagram of an X-axis torsion wheel friction transmission system according to an embodiment of the present invention
FIG. 12 is a schematic view of a dual tool holder structure according to an embodiment of the invention
FIG. 13 is a schematic view of an X-direction hydrostatic guideway according to an embodiment of the present invention
FIG. 14 is a schematic view of a torsion wheel structure according to an embodiment of the present invention
FIG. 15 is a schematic view of a Z-direction hydrostatic guideway according to an embodiment of the present invention
FIG. 16 is a ratchet isometric view of an embodiment of the present invention
FIG. 17 is a perspective view of a worm shaft according to an embodiment of the present invention
FIG. 18 is a perspective view of a straight gear shaft according to an embodiment of the present invention
FIG. 19 is a perspective view of a worm wheel shaft according to an embodiment of the present invention
FIG. 20 is a flowchart illustrating the control of the machine tool according to the embodiment of the present invention
In the figure:
1-a machine tool base; 2-rotating the base; 3-soft material nano-imprinting equipment; 4-a main spindle box; 5-hard material nanoimprint equipment; 6-double tool rests; a 7-X directional hydrostatic guideway; 8-X shaft torsion wheel friction transmission system; a 9-Z shaft torsion wheel friction transmission system; a 10-Z direction hydrostatic guideway; 201-worm gear shaft; 202-a sheave disc; 203-first deep groove ball bearing; 204-a worm; 205-a worm gear; 206-a ratchet shaft; 207-a first sleeve; 208-ratchet wheel; 209-motor; 211-rotating the retainer cup; 212-rotating table; 213-a coupling; 301-soft embossing equipment lower box; 302-a small pad; 303-middle gear shaft; 304-an auxiliary roller; 305-a mold roll; 306-soft impression equipment is arranged on the box body; 307-long gear shaft; 308-a resilient gasket; 309-roller; 310-spur gear; 311-a first bearing; 312-a first pinion shaft; 401-main spindle box lower box body; 402-driving bevel gear shaft; 403-driven bevel gear shaft; 404-a second deep groove ball bearing; 405-a main spindle box spur gear; 406-drive bevel gear; 407-straight gear shaft; 408-driven bevel gear; 409-tapered roller bearings; 410-big bearing end cap; 411-lip seal ring; 412-upper box body of main spindle box; 413-a spring holder; 414-solenoid valve housing; 415-a coil; 416-synchronizer spline hub; 417-armature; 418-synchronizer coupling sleeve; 419-synchronizer ring; 420-a vent plug; 421-small bearing end cap; 422-hexagonal screw; 423-large sleeve; 424-resilient blow-out coupling; 501-lower box body of hard imprinting equipment; 502-middle gear shaft; 503-a second pinion shaft; 504-a glue roller; 505-hard imprinting equipment is arranged on a box body; 506-a mold drum; 507-a large gear shaft; 508-large spur gear; 509-small spur gear; 601-turning tool; 602-a tool holder; 603-hexagonal head screws; 604-laser micrometer; 605-a mounting plate; 606-small screws; 701-X direction guide rail base; a 702-X directional sliding table; 703-X direction guide rail; 704-X direction slide carriage; 806-a fixed plate; 901-left support seat; 902-a polish rod; 903-torsion wheel friction mechanism; 904-right support seat; 905-a shaft coupling; 906-stepper motor; a 1001-Z base; 1002-Z direction guide rail; 1003-Z direction sliding table; 90301-a torsion wheel; 90302-torsion bar; 90303-supporting frame; 90304-torsion bearing end cap; 90305-support end cap; 90306-angular contact ball bearing; 90308-inner ring shaft sleeve; 90309-outer race sleeve.
Detailed Description
The following further describes the embodiments of the present invention with reference to the drawings.
A micro-nano structure roller mold machining and impression forming machine tool comprises a machine tool base 1, a rotating base 2, soft material nano impression equipment 3, a spindle box 4, hard material nano impression equipment 5, a double tool rest 6, an X-direction hydrostatic pressure guide rail 7, an X-axis torsion wheel friction transmission system 8, a Z-direction torsion wheel friction transmission system 9 and a Z-direction hydrostatic pressure guide rail 10. The rotary base 2 comprises a rotary table 212 and a driving mechanism, the rotary table 212 is rotatably connected to the upper surface of the machine tool base 1, and the rotary table 212 is driven to rotate by the driving mechanism; the spindle box 4, the two soft material nano-imprinting devices 3 and the two hard material nano-imprinting devices 5 are all fixed on the rotating table 212, the spindle box 4 is fixed in the middle of the rotating table 212, the two soft material nano-imprinting devices 3 are symmetrically arranged on two sides of the spindle box 4, and the two hard material nano-imprinting devices 5 are symmetrically arranged on the other two sides of the spindle box 4; each of four side surfaces of the spindle box 4 extends out of two output shafts and is respectively in driving connection with the two soft material nano-imprinting devices 3 and the two hard material nano-imprinting devices 5; the Z-direction hydrostatic pressure guide rail 10 is arranged on one side of the machine tool base 1, and the Z-direction torsion wheel friction transmission system 9 is arranged on the Z-direction hydrostatic pressure guide rail 10 and is used for driving a Z-direction sliding table 1003 of the Z-direction hydrostatic pressure guide rail 10 to perform linear motion along the Z direction; the X-direction hydrostatic pressure guide rail 7 is arranged on a Z-direction sliding table 1003 of the Z-direction hydrostatic pressure guide rail 10, and the X-axis torsion wheel friction transmission system 8 is arranged on the X-direction hydrostatic pressure guide rail 7 and is used for driving two X-direction sliding tables 702 of the X-direction hydrostatic pressure guide rail 7 to linearly move along the X direction; the double tool rests 6 comprise two tool systems with the same structure, the two tool systems are respectively fixed on two X-direction sliding tables 702 of the X-direction hydrostatic guide rail 7, and the height of the double tool rests 6 is matched with the soft material nano-imprinting equipment 3 or the hard material nano-imprinting equipment 5, so that the matching operation can be carried out; laser interferometers are respectively mounted on the Z-direction sliding table 1003 and the X-direction sliding table 702 of the Z-direction hydrostatic guideway 10 and used for detecting the position accuracy of the machine tool.
Further, the driving mechanism of the rotating base 2 comprises a worm wheel shaft 201, a grooved wheel disc 202, a worm 204, a worm wheel 205, a ratchet wheel shaft 206, a ratchet wheel 208 and a motor 209; the worm wheel shaft 201 is arranged in a mounting hole of the machine tool base 1 through a bearing and a rotary sleeve cup; the grooved wheel disc 202 and the worm wheel 205 are respectively installed on the turbine shaft 201 through keys; the worm 204 and the worm wheel 205 form a worm-gear worm pair, one end of the worm 204 is connected with an output shaft of the motor 209, and the other end of the worm is arranged in a mounting hole of the machine tool base 1 through a bearing; the ratchet 208 and the sheave disc 202 form an intermittent motion mechanism, the ratchet 208 is mounted on a ratchet shaft 206 through a key, and the ratchet shaft 206 is mounted in corresponding mounting holes in the machine tool base 1 and the rotating table 212 through a bearing and a rotating sleeve cup.
Further, the soft material nano-imprinting equipment 3 comprises a soft imprinting equipment lower box body 301, a middle gear shaft 303, an auxiliary roller 304, a mold roller 305, a soft imprinting equipment upper box body 306, two long gear shafts 307 and a first pinion shaft 312; the soft imprinting equipment lower box body 301 is fixed on the rotating table 212 of the rotating base 2, and the soft imprinting equipment upper box body 306 is fixedly connected with the soft imprinting equipment lower box body 301; a plurality of auxiliary rollers 304 are rotatably connected to the lower box body 301 of the soft imprinting equipment; the middle gear shaft 303 is arranged on the lower box body 301 of the soft imprinting equipment, and a roller 309 is sleeved above the extending end of the middle gear shaft; the middle gear shaft 303, the first pinion shaft 312 and the two long gear shafts 307 are respectively provided with a spur gear 310 on the shaft sections positioned in the lower box body 301 of the soft imprinting device, and the middle gear shaft 303, the first pinion shaft 312 and one long gear shaft 307 are sequentially meshed and driven through the spur gears 310; two long gear shafts 307 are positioned at the interface of the lower box body 301 of the soft imprinting equipment and the upper box body 306 of the soft imprinting equipment, the extending end of one side of the long gear shaft 307 is connected with the power output end of the spindle box 4, and the output end of the other side of the long gear shaft 307 is sleeved with a mold roller 305.
Further, the hard material nano-imprinting equipment 5 comprises a hard imprinting equipment lower box 501, two middle gear shafts 502, a second pinion shaft 503, a gluing roller 504, a hard imprinting equipment upper box 505, a mold roller 506, a large gear shaft 507, three large spur gears 508 and a small spur gear 509; the lower hard imprinting equipment box 501 is fixed on the rotating table 212 of the rotating base 2, and the upper hard imprinting equipment box 505 is fixed on the lower hard imprinting equipment box 501; two middle gear shafts 502 are rotatably connected to a joint part of a lower box body 501 of the hard imprinting equipment and an upper box body 505 of the hard imprinting equipment, a mold roller 506 is sleeved on the extending end on one side of the middle gear shaft 502, and the extending end on the other side of the middle gear shaft 502 is connected with the power output end of the spindle box 4; the extending end of the second pinion shaft 503 is sleeved with a gluing roller 504; the large gear shaft 507 is positioned below one middle gear shaft 502, and the extending end of the large gear shaft 507 is sleeved with a mould roller 506; inside the lower box 501 of the hard imprinting equipment, a second pinion shaft 503 is provided with a small spur gear 509, a large spur gear 508 is arranged on a large gear shaft 507, two middle gear shafts 502 are provided with large spur gears 508, the small spur gear 509 on the second pinion shaft 503 is in meshing transmission with the large spur gear 508 on the middle gear shaft 502 adjacent to the small spur gear 509, and the large spur gear 508 on the other middle gear shaft 502 is in meshing transmission with the large spur gear 508 on the large gear shaft 507 below the small spur gear 508.
Further, the spindle box 4 comprises a spindle box spur gear 405, a drive bevel gear 406, a spur gear shaft 407 and a driven bevel gear 408; the driving bevel gear 406 is matched with four driven bevel gears 408 which are uniformly distributed at 90 degrees to form four bevel gear pairs which are uniformly distributed on a horizontal plane; each bevel gear pair is respectively connected with a spur gear shaft 407 through a pair of mutually meshed spur gears 405 of a main shaft box, and the spur gear shaft 407 is connected with a power input end of the soft material nano-imprinting device 3 or the hard material nano-imprinting device 5 through an elastic cancellation coupler; the power is transmitted to the driven bevel gear 408 from the driving bevel gear 406, the driven bevel gear 408 rotates to drive the straight gear 405 of the spindle box to rotate, the motion is further transmitted to the straight gear shaft 407, and the motion is transmitted to the power input end of the soft material nano-imprinting equipment 3 or the hard material nano-imprinting equipment 5 through the elastic cancellation coupler.
Furthermore, the main spindle box 4 further comprises a main spindle box upper box body 412 and a main spindle box lower box body 401, the driving bevel gear 406 is installed on the driving bevel gear shaft 402, and the driving bevel gear shaft 402 is installed in the main spindle box lower box body 401; the driving bevel gear 406 is meshed with the driven bevel gear 408, and the driven bevel gear 408 is fixed at the tail end of the driven bevel gear shaft 403; the rear end of the driven bevel gear 408 is connected with a synchronizer spline hub 416, a synchronizer coupling sleeve 418 is sleeved outside the synchronizer spline hub 416, and three armatures 417 which are uniformly distributed along the circumferential direction at 120 degrees are installed outside the synchronizer coupling sleeve 418; the solenoid housing 414 is fitted over the shaft of the synchronizer spline hub 416, with the coil 415 mounted between the synchronizer spline hub 416 and the solenoid housing 414; the left side of the electromagnetic valve shell 414 is provided with a spring frame 413, and the spring frame 413 is sleeved above the driven bevel gear shaft 403 in an empty way; a main spindle box straight gear 405 is arranged on a driven bevel gear shaft 403, and the driven bevel gear shaft 403 is arranged in an installation groove of a main spindle box lower box body 401; the straight gear shaft 407 is provided with a main shaft box straight gear 405 meshed with the straight gear shaft 405 on the driven bevel gear shaft 403, and the extending ends of the straight gear shaft 407 and the driven bevel gear shaft 403 are respectively provided with an elastic cancellation coupling which is respectively connected with corresponding shafts in the soft material nano-imprinting equipment 3 and the hard material nano-imprinting equipment 5.
Further, the double tool post 6 comprises two tool systems with the same structure, and each tool comprises a turning tool 601, a tool post 602, a laser micrometer 604 and a mounting plate 605; the turning tool 601 is fixed on the tool rest 602; the tool rest 602 is fixed on an X-direction sliding plate of the X-direction hydrostatic guideway 7, and the laser micrometer 604 is vertically installed on the installation plate 605, so that the measurement position of the laser micrometer 604 and the feed point of the turning tool 601 are located at the same height.
Further, the Z-direction torsion wheel friction transmission system 9 includes a left support 901, a polish rod 902, a torsion wheel friction mechanism 903, a right support 904, a coupler 905 and a stepping motor 906; the step motor 906 outputs power, the power is transmitted to the polished rod 902 through the coupler 905, the polished rod 902 rotates to drive the torsion wheel friction mechanism 903 to move, a fixing plate is installed on the torsion wheel friction mechanism 903, and the fixing plate is connected with the Z-direction sliding table 1003 of the Z-direction hydrostatic guideway 10; the Z-axis torsion wheel friction transmission system 9 is installed in a groove of a Z-direction guide rail 1002 of the Z-direction hydrostatic guide rail 10 through a left support seat 901 and a right support seat 904.
Furthermore, the torsion wheel friction mechanism 903 comprises three torsion wheels 90301, a torsion wheel shaft 90302, a support frame 90303, a torsion wheel bearing end cover 90304, a support frame end cover 90305, an angular contact ball bearing 90306, an inner ring shaft sleeve 90308 and an outer ring shaft sleeve 90309; the three torsion wheels 90301 are uniformly distributed at 120 degrees, and each torsion wheel 90301 is provided with a corresponding hole for mounting a torsion wheel shaft 90302; four angular contact ball bearings 90306 are arranged inside each torsion wheel 90301, an outer ring shaft sleeve 90309 is arranged between the two angular contact ball bearings 90306 in the middle, and an inner ring shaft sleeve 90308 is arranged between every two angular contact ball bearings 90306 from left to right; the torsion wheel bearing end cover 90304 is mounted on the torsion wheel 90301 through a screw; the support frame 90303, the torsion bar shaft 90302 and the support frame end cover 90305 are sequentially installed, and the support frame 90303, the torsion bar shaft 90302, and the support frame end cover 90305 are fixed at two ends through screws.
A control method of a micro-nano structure roller mold machining and impression forming machine tool comprises the following steps:
starting a machine tool, setting relevant machine tool parameters according to processing requirements, and adjusting the positions of two soft material nano-imprinting devices, two hard material nano-imprinting devices, a double tool rest and a laser interferometer;
secondly, online measurement is carried out on the surfaces of the mold rollers of the two soft material nano-imprinting devices and the two hard material nano-imprinting devices by using a measuring device, relevant data are collected, curved surface reconstruction is carried out, a measurement model of the roller mold is obtained, and a design model of the roller mold is obtained according to a required specific micro-nano structure;
inputting the design model into a machine tool numerical control system, performing model matching and comparison on the design model and the measurement model obtained in the last step after feature recognition, and calculating the machining allowance delta1Acquiring corresponding processing parameters;
step four, carrying out simulation machining according to the machining parameters obtained in the previous step, judging whether interference collision occurs or not, and returning to the step of reselecting the machining parameters if interference exists; if interference collision does not exist, performing numerical control programming, determining path tracks of the double tool rests, and generating corresponding numerical control codes;
fifthly, carrying out numerical control machining; after the processing is finished, the roller die after the processing is carried outMeasuring, and obtaining a measurement model according to the curved surface reconstruction; calculating the machining allowance delta at this time2Judging whether the machining requirements are met;
step six, carrying out stamping forming after the processing requirements are met: firstly, retracting the double tool rests to a proper position to avoid interference, and then selecting embossing equipment and embossing types according to the types of embossing materials, so that embossing can be carried out in at most four directions as required;
and step seven, stopping the machine tool after the imprinting is finished, and finishing the machining.
Examples
As shown in the attached drawing 1, the micro-nano structure roller mold machining and impression forming machine tool is shown in the general structure of fig. 1 and mainly comprises a machine tool base 1, a rotating base 2, soft material nano impression equipment 3, a spindle box 4, hard material nano impression equipment 5, a double tool rest 6, an X-direction hydrostatic pressure guide rail 7, an X-axis torsion wheel friction transmission system 8, a Z-direction torsion wheel friction transmission system 9 and a Z-direction hydrostatic pressure guide rail 10. The rotary table 212 in the rotary base 2 is rotatably connected to the middle position of the upper surface of the machine tool base 1 through a bolt, the machine tool base 1 is hollow, and a driving mechanism of the rotary base 2 is installed and used for driving the rotary table 212 to rotate; the soft material nano-imprinting equipment 3 is provided with two soft material nano-imprinting equipment which are fixedly connected to the edge positions of two opposite sides of the rotating platform 212 through bolts; the spindle box 4 is fixedly connected to the middle position of the upper surface of the rotating table 212 through bolts, two output shafts extend out of each of the four side surfaces, and the two output shafts are respectively connected with the extending shaft ends of the two soft material nano-imprinting devices 3 and the two hard material nano-imprinting devices 5 through the elastic cancellation coupling 424; the number of the hard material nano-imprinting devices 5 is two, and the hard material nano-imprinting devices are fixedly connected to the rotating table 212 through bolts; the spindle box 4, the two soft material nano imprinting devices 3 and the two hard material nano imprinting devices 5 are arranged on a rotating platform 212 of the rotating base 2 and rotate along with the rotating platform 212; the Z-direction hydrostatic guide rail 10 is arranged on one side of the machine tool base 1, and the Z-direction torsion wheel friction transmission system 9 is arranged in the middle of a Z-direction guide rail 1002 of the Z-direction hydrostatic guide rail 10, is fixed through a screw, is connected with a Z-direction sliding table 1003 of the Z-direction hydrostatic guide rail through a fixing plate, and drives the Z-direction sliding table 1003 to move linearly along the Z direction; the X-direction hydrostatic pressure guide rail 7 is arranged on a Z-direction sliding table 1003 of the Z-direction hydrostatic pressure guide rail 10 through bolts; two cutter systems are arranged in the double tool rest 6 and are respectively fixed on two slide carriages 704 of the X-direction hydrostatic guide rail 7 through screws, and the height of the double tool rest 6 is matched with the soft material nano-imprinting equipment 3 or the hard material nano-imprinting equipment 5, so that the matching operation can be carried out; the X-axis torsion wheel friction transmission system 8 is arranged in a groove of an X-direction guide rail 703 of the X-direction hydrostatic guide rail 7, is fixed at the middle position of the X-direction guide rail 703 through a left support seat and a right support seat, is respectively connected with two X-direction sliding tables 702 on the X-direction hydrostatic guide rail 7 through two torsion wheel friction mechanisms, drives the two X-direction sliding tables 702 to perform X-direction linear motion along the X-direction guide rail 703, and further drives the double tool rests 6 to perform X-direction linear motion; laser interferometers are respectively mounted at appropriate positions of the Z-direction sliding table 1003 of the Z-direction hydrostatic guideway 10 and the X-direction sliding table 702 of the X-direction hydrostatic guideway 7, and are used for detecting the position accuracy of the machine tool.
As shown in fig. 2, 3, 16, 17, and 19, the rotating base 2 includes a rotating table 212 and a driving mechanism, and the driving mechanism mainly includes a worm wheel shaft 201, a grooved wheel disc 202, a first deep groove ball bearing 203, a worm 204, a worm wheel 205, a ratchet wheel shaft 206, a first sleeve 207, a ratchet wheel 208, a motor 209, a rotating sleeve cup 211, and a coupling 213. Wherein, a pair of first deep groove ball bearings 203 are arranged at two axial ends of the worm wheel shaft 201, the deep groove ball bearings are placed in the rotating sleeve cup 211, and the rotating sleeve cup 211 is placed in a corresponding mounting hole in the machine tool base 1; a first sleeve 207 is arranged between the first deep groove ball bearing 203 and the worm gear 205 and between the first deep groove ball bearing and the sheave disc 202, so that the axial positioning of the sheave disc and the worm gear 205 is ensured; the grooved wheel disc 202 and the worm wheel 205 are both mounted on the turbine shaft 201 through keys to realize circumferential positioning. The worm wheel 205 and the worm 204 form a worm-wheel-worm pair to realize the transmission of spatial motion; a pair of first deep groove ball bearings 203 are also arranged at the two ends of the worm 204 in an interference fit manner, one end of the worm 204 is connected with the output shaft of the motor 209 through a coupler 213, and the other end of the worm 204 is arranged in a corresponding mounting hole of the machine tool base 1 through the first deep groove ball bearings 203. The ratchet 208 and the grooved wheel disc 202 form an intermittent motion mechanism, the ratchet 208 realizes circumferential positioning on the ratchet shaft 206 through keys, and the upper side and the lower side of the ratchet 208 are provided with first sleeves 207 to ensure the axial positioning of the ratchet 208 and first deep groove ball bearings 203 at two ends of the ratchet shaft 206; the first deep groove ball bearings 203 at two ends of the ratchet shaft 206 are installed in the rotating sleeve cups 211 with proper sizes like the bearings at two ends of the worm wheel shaft 201, and the two rotating sleeve cups 211 are respectively installed in the corresponding installation holes in the machine tool base 1 and the rotating platform 212.
As shown in fig. 4, 5 and 18, the soft nanoimprinting equipment 3 mainly comprises a soft nanoimprinting equipment lower box 301, a small gasket 302, a middle gear shaft 303, an auxiliary roller 304, a mold roller 305, a soft nanoimprinting equipment upper box 306, two long gear shafts 307, an elastic washer 308, a roller 309, four spur gears 310, a first bearing 311 and a first small gear shaft 312. Wherein, the lower box 301 of the soft imprinting equipment is fixedly arranged on the rotating table 212 of the rotating base 2 through bolts; the number of the auxiliary rollers 304 is 8, the auxiliary rollers are arranged on the lower box body 301 of the soft imprinting equipment according to a certain sequence, are sleeved on a small shaft extending out of the lower box body 301 of the soft imprinting equipment in an empty mode, and are fixed through nuts and small gaskets 302. The middle gear shaft 303 is installed on the lower box 301 of the soft imprinting device, a roller 309 is sleeved on the extending part of the shaft, an external thread is arranged at the tail end of the middle gear shaft 303, and the axial position of the roller 309 is ensured through a nut and a small gasket 302. The internal structure of the middle gear shaft 303, the first pinion shaft 312 and the two long gear shafts 307 is the same in the lower box 301 of the soft imprinting equipment, the cylindrical spur gears 310 are installed at the middle positions on the shafts, the cylindrical spur gears 310 are axially positioned on the shafts and are realized by sleeves, and the middle gear shaft 303, the first pinion shaft 312 and one of the long gear shafts 307 are sequentially in meshing transmission through the cylindrical spur gears 310. The first bearing 311 is mounted on the part of each shaft contacting the box body, the fixing of the outer ring of the first bearing 311 is ensured by the bearing end cover 311, and the bearing end cover 311 is mounted in the corresponding mounting hole of the lower box body 301 of the soft imprinting equipment through bolts. Two long gear shafts 307 are positioned at the interface of the lower box body 301 of the soft imprinting equipment and the upper box body 306 of the soft imprinting equipment, the extending ends of the two long gear shafts 307 facing the spindle box 4 are respectively connected with a straight gear shaft 407 and a driven bevel gear shaft 403 of the spindle box 4 through an elastic cancellation coupler, and the extending end on the other side of the long gear shaft 307 is sleeved with a mold roller 305, is similar to the axial fixation of the auxiliary roller 304 and the roller 309, and is realized through a nut and a small gasket 302. The upper box 306 of the soft imprinting equipment is fixedly connected with the lower box 301 of the soft imprinting equipment through two bolts and nuts on the left side and the right side.
As shown in fig. 8, 9 and 18, the hard material nanoimprinting equipment 5 mainly comprises a hard nanoimprinting equipment lower box 501, two middle gear shafts 502, a second pinion shaft 503, a glue coating roller 504, a hard nanoimprinting equipment upper box 505, a mold roller 506, a large gear shaft 507, three large spur gears 508 and a small spur gear 509. Wherein, the lower box 501 of the hard imprinting equipment is fixed on the rotating platform 212 of the rotating base 2 through bolts; the two middle gear shafts 502 are respectively provided with a large straight gear 508, and both sides of the large straight gear 508 extend to two sides; the joint part of the middle gear shaft 502 and the lower box 501 of the hard imprinting equipment and the joint part of the upper box 505 of the hard imprinting equipment realize the separation of a rotating part and a static part through a pair of bearings, the axial positioning of the large spur gear 508 is ensured by sleeves at the left side and the right side of the gear, bearing end covers are arranged at the joint parts of the bearings and the outer wall of the box, and the bearing end covers are fixed on the outer wall of the lower box 501 of the hard imprinting equipment or the outer wall of the upper box 505 of the hard imprinting equipment through bolts; one second pinion shaft 503 is provided, one side of which close to the spindle box 4 does not extend, and the other side is an extending end on which a small straight gear 509 is arranged; the large gear shaft 507 is provided with a large straight gear 508, and the structures of the gear shafts in the cavity of the lower box body 501 of the hard imprinting equipment are similar. The extending end of the second pinion shaft 503 is sleeved with a gluing roller 504 and fixed by a nut; the extension end of the middle gear shaft 502 close to one side of the X-axis torsion wheel friction transmission system 8 is sleeved with a mold roller 506 and is also fixed through a nut. The extending ends of the two middle gear shafts 502 close to one side of the main spindle box 4 are respectively connected with the driven bevel gear shaft 403 and the straight gear shaft 407 in the main spindle box 4 through an elastic cancellation coupler, so that power transmission is realized. A rotating shaft is arranged right below the middle gear shaft 502 close to the second pinion shaft 503, and the extending end of the rotating shaft is sleeved with a mold roller 506 and is also axially fixed through a nut; the large gear shaft 507 is installed below the other middle gear shaft 502, and the middle gear shaft 502 is sleeved with a mold roller 506 and fixed through a nut. The hard imprinting equipment upper case 505 is mounted on the hard imprinting equipment lower case 501 by bolts and nuts. In the cavity of the lower box body 501 of the hard embossing equipment, a small spur gear 509 on a second pinion shaft 503 is in meshing transmission with a large spur gear 508 on a middle pinion shaft 502 adjacent to the small spur gear 509, and a large spur gear 508 on the other middle pinion shaft 502 is in meshing transmission with a large spur gear 508 on a large pinion shaft 507 below the large spur gear.
As shown in fig. 6 and 7, the headstock 4 mainly includes a headstock lower housing 401, a drive bevel gear shaft 402, a driven bevel gear shaft 403, a second deep groove ball bearing 404, eight headstock spur gears 405, a drive bevel gear 406, four spur gear shafts 407, four driven bevel gears 408, tapered roller bearings 409, a large bearing end cap 410, a lip seal 411, a headstock upper housing 412, a spring holder 413, a solenoid valve housing 414, a coil 415, a synchronizer spline hub 416, an armature 417, a synchronizer coupling sleeve 418, a synchronizer ring 419, a breather plug 420, a small bearing end cap 421, a hexagon screw 422, and a large sleeve 423. The main shaft box 4 mainly provides rotary drive for the two soft material nano-imprinting devices 3 and the two hard material nano-imprinting devices 5, and mainly adopts a bevel gear and four small bevel gears to form four identical bevel gear pairs in a matching mode, so that the rotary motion on the vertical surface is converted into four rotary motions on the horizontal surface vertical to the vertical surface, and the four rotary motions are uniformly distributed on the horizontal surface to meet the functional requirements. The driving bevel gear 406 is matched with four driven bevel gears 408 which are uniformly distributed at 90 degrees to form a bevel gear pair, a spindle box straight gear 405 is installed on the shaft of each driven bevel gear 408 and is matched with the spindle box straight gear 405 on a straight gear shaft 407, after power is transmitted to the driving bevel gear 406, the driving bevel gear 406 transmits motion to the driven bevel gear 408, the driven bevel gear 408 rotates to drive the spindle box straight gear 405 installed on the driving bevel gear to rotate, the motion is transmitted to the straight gear shaft 407, and the motion is transmitted to the soft material nano-imprinting equipment 3 or the hard material nano-imprinting equipment 5 through the elastic cancellation coupler.
As shown in fig. 7, taking one of the bevel gear pair and the spur gear transmission pair as an example, wherein the driving bevel gear shaft 402 is installed in a mounting hole at the middle position of the lower box 401 of the main spindle box, the contact position of the driving bevel gear shaft 402 with the lower box 401 of the main spindle box and the upper box 412 of the main spindle box is connected through a pair of tapered roller bearings 409, the axial positioning of the tapered roller bearings 409 at the upper end part of the shaft is realized by a small bearing end cover 421, the small bearing end cover is fixed on the upper box 412 of the main spindle box through a screw, a vent plug 420 is installed beside the small bearing end cover 421, and is screwed into the mounting hole of the upper box 412 of the main spindle box through a threaded connection manner; the driving bevel gear 406 is arranged at the thickest shaft diameter position of the driving bevel gear shaft 402, the axial positioning is ensured by a large sleeve 423, the large sleeve 423 is sleeved on the driving bevel gear shaft 402 in an empty way, and two ends of the large sleeve 423 are contacted with the tapered roller bearing 409; the drive bevel gear 406 is engaged with the driven bevel gear 408 to form a bevel gear pair. The driven bevel gear 408 is fixed to the end of the driven bevel gear shaft 403 by a hexagon screw 422 and a gasket; the driven bevel gear 408 is connected with a synchronizer spline hub 416 at the rear and fixed on the driven bevel gear shaft 403 through spline connection; a synchronizer coupling sleeve 418 is sleeved outside the synchronizer spline hub 416, and three armatures 417 which are uniformly distributed along the circumferential direction at 120 degrees are fixedly installed outside the synchronizer coupling sleeve 418 through screws; the solenoid valve housing 414 fits over the shaft of the synchronizer spline hub 416, with the coil 415 mounted between the synchronizer spline hub 416 and the solenoid valve housing 414; the left side of the electromagnetic valve shell 414 is provided with a spring frame 413, and the spring frame 413 is sleeved above the driven bevel gear shaft 403 in an empty way; a main spindle box straight gear 405 is arranged at the thickest shaft diameter of the driven bevel gear shaft 403, the right side of the main spindle box straight gear is positioned through a shaft shoulder, and the left side of the main spindle box straight gear is positioned through a sleeve; a driven bevel gear shaft 403 is arranged in an installation groove of a main spindle box lower box body 401, and separation between shaft rotation and box body static is realized through a tapered roller bearing 409; a large bearing end cover 410 is arranged outside a bearing arranged on the outer wall of the box body, is fixed at a proper position of the lower box body by screws and is mainly used for axial positioning of a bearing outer ring, and a lip-shaped sealing ring 411 is arranged inside the large bearing end cover 410 and is used for sealing, dust prevention and the like. The gear meshed with the main shaft box straight gear 405 on the driven bevel gear shaft 403 is the main shaft box straight gear 405 on the straight gear shaft 407, the straight gear shaft 407 and the driven bevel gear shaft 403 are similar in structure, the straight gear shaft is in contact with a main shaft box lower box body 401 and a main shaft box upper box body 412 through a pair of tapered roller bearings 409, the main shaft box straight gear 405 is installed at the position of the thickest shaft diameter in the middle, elastic cancellation couplers are installed at the extending ends of the straight gear shaft 407 and the driven bevel gear shaft 403, and the elastic cancellation couplers are respectively connected with corresponding shafts in the soft material nano-imprinting equipment 3 and the hard material nano-imprinting equipment 5. The headstock upper housing 412 is fixedly mounted above the headstock lower housing 401 by bolts.
As shown in fig. 12, the double tool holder 6 comprises two tool systems with the same structure, and each tool mainly comprises a turning tool 601, a tool holder 602, a hexagon head screw 603, a laser micrometer 604, a mounting plate 605 and a small screw 606. The turning tool 601 is mounted on the tool holder 602 through a hexagonal head screw 603; the tool rest 602 is fixed on a slide carriage 704 of the X-direction hydrostatic guide rail 7 through a hexagon head screw 603, and the laser micrometer 604 is vertically arranged on a mounting plate 605 through the hexagon head screw 603, so that the measuring position of the laser micrometer 604 and the feed point of the turning tool 601 are positioned at the same height.
As shown in fig. 13, the X-directional hydrostatic guideway 7 mainly includes an X-directional guideway base 701, an X-directional slide table 702, an X-directional guideway 703, and an X-directional slide carriage 704. Wherein; the X-direction guide rail base 701 is installed at the left position on the Z-direction sliding table 1003 of the Z-direction hydrostatic guide rail 10 through a screw; two X-direction sliding tables 702 and two X-direction sliding plates 704 are arranged, the two X-direction sliding tables 702 are arranged on two sides of the X-direction guide rail 703, and the X-direction sliding plates 704 are fixed on the X-direction sliding tables 702 through screws. The two tool systems of the double carriage 6 are mounted on two X-slides 704, respectively. The X-axis torsion wheel friction transmission system 8 is installed in a groove of the X-direction guide rail 703 and fixed at the middle position of the X-direction guide rail 703 through a left support seat and a right support seat, and two torsion wheel friction mechanisms of the X-axis torsion wheel friction transmission system 8 are respectively connected with the two X-direction sliding tables 702 through a fixing plate 806 to drive the two X-direction sliding tables 702 to perform X-direction linear motion along the X-direction guide rail 703.
As shown in fig. 15, the Z-directional hydrostatic guideway 10 mainly includes a Z-directional base 1001, a Z-directional guideway 1002, and a Z-directional sliding table 1003, the Z-directional guideway 1002 is fixed on the Z-directional base 1001, the Z-directional sliding table 1003 is slidably connected to the Z-directional guideway 1002, and the bottom of the Z-directional sliding table 1003 is connected to a torsion wheel friction mechanism 903 of a Z-axis torsion wheel friction transmission system 9 through a fixing plate, and is driven by the Z-axis torsion wheel friction transmission system 9 to perform Z-directional linear motion along the Z-directional guideway 1002.
As shown in fig. 10 and 14, the Z-direction torsion wheel friction transmission system 9 mainly includes a left support 901, a polish rod 902, a torsion wheel friction mechanism 903, a right support 904, a coupler 905, and a stepping motor 906. The stepping motor 906 outputs power, the power is transmitted to the polished rod 902 through the coupler 905, the polished rod 902 rotates to drive the torsion wheel friction mechanism 903 to move, a fixing plate is installed on the torsion wheel friction mechanism 903, the fixing plate is connected with the Z-direction sliding table 1003 of the Z-direction hydrostatic guide rail 10, and then the Z-direction sliding table 1003 is driven to move in the Z direction along the Z-direction guide rail 1002. The whole Z-axis torsion wheel friction transmission system 9 is mounted in a groove of a Z-direction rail 1002 of the Z-direction hydrostatic guide 10 through a left support base 901 and a right support base 904, and the left support base 901 and the right support base 904 are fixed to the middle position of the Z-direction rail 1002 through bolts.
As shown in fig. 14, the torsion wheel friction mechanism 903 mainly includes a torsion wheel 90301, a torsion wheel shaft 90302, a support frame 90303, a torsion wheel bearing end cover 90304, a support frame end cover 90305, an angular contact ball bearing 90306, an inner ring shaft sleeve 90308, and an outer ring shaft sleeve 90309. One of the torsion wheel friction mechanisms 903 comprises three torsion wheels 90301 which are uniformly distributed at 120 degrees, each torsion wheel 90301 is provided with a corresponding hole for mounting a torsion wheel shaft 90302, and the holes and the shafts are in interference fit; each torsion wheel internally comprises four angular contact ball bearings 90306, an outer ring shaft sleeve 90309 is arranged between the two angular contact ball bearings 90306 in the middle, and an inner ring shaft sleeve 90308 is arranged between each two angular contact ball bearings 90306 from left to right, so that the axial positioning of each bearing is ensured; finally, the axial fixation of the bearing is realized through a torsion wheel bearing end cover 90304, and the torsion wheel bearing end cover 90304 is installed on the torsion wheel 90301 through screws; the support frame 90303, the torsion bar shaft 90302 and the support frame end cover 90305 are sequentially installed, and the support frame 90303, the torsion bar shaft 90302, and the support frame end cover 90305 are fixed at two ends through screws.
As shown in fig. 11, the X-direction torsion wheel friction transmission system 8 is similar to the Z-axis torsion wheel friction transmission system 9 in structure, and mainly includes a left support base, a polish rod, two torsion wheel friction mechanisms, a right support base, a coupler, and a stepping motor. The whole X-direction torsion wheel friction transmission system 8 is installed in a groove of an X-direction guide rail 703 of the X-direction hydrostatic guide rail 7 through a left support seat and a right support seat, and the left support seat and the right support seat are fixed to the middle position of the X-direction guide rail 703 through bolts. Step motor output power is transmitted to the polished rod through the coupler, the polished rod rotates to drive the two torsion wheel friction mechanisms to move in opposite directions or in opposite directions, the two torsion wheel friction mechanisms are provided with fixing plates, each torsion wheel friction mechanism is connected with an X-direction sliding table 702 of the X-direction hydrostatic guide rail 7 through the fixing plates, and then the two X-direction sliding tables 702 are driven to move in the X-direction along the X-direction guide rail 703.
As shown in the attached drawing 20, the invention simultaneously provides a control method of a micro-nano structure roller mold machining and impression forming machine tool, and the mold machining and impression forming process mainly comprises the following steps:
firstly, completing a series of checks on a machine tool before starting the machine tool, starting the machine tool after ensuring no fault, setting relevant machine tool parameters according to processing requirements, installing a die roller at a corresponding position, and adjusting the positions of a double tool rest and a detection device;
secondly, carrying out online measurement on the surface of the roller of the mold by using a measuring device, collecting related data, carrying out curved surface reconstruction, obtaining a measurement model of the roller mold, and obtaining a design model of the roller mold according to a required specific micro-nano structure;
inputting the workpiece design model into a machine tool numerical control system, performing model matching and comparison with the workpiece measurement model obtained in the previous step after feature recognition, and calculating the machining allowance delta1Acquiring corresponding processing parameters;
step four, carrying out simulation machining according to the machining parameters obtained in the previous step, judging whether interference collision occurs or not, and returning to the step of reselecting the machining parameters if interference exists; if interference collision does not exist, performing numerical control programming, determining path tracks of the double tool rests, and generating corresponding numerical control codes;
and fifthly, carrying out numerical control machining. After the processing is finished, measuring the processed roller mold again, and obtaining a measurement model according to the curved surface reconstruction; calculating the machining allowance delta at this time2And judging whether the machining requirements are met. And if the machining requirements are not met, returning to the first step for machining again.
And step six, performing impression forming after the processing requirements are met. Firstly, the double tool rests are retreated to proper positions to avoid interference, and then stamping equipment and stamping types are selected according to the types of stamping materials. The hard material adopts a nano-imprinting mode; the soft material can adopt a thermal nano-imprinting mode, an ultraviolet nano-imprinting mode and double-sided imprinting according to requirements when the thermal nano-imprinting mode is adopted. Embossing may also be performed in up to four directions as desired.
And step seven, stopping the machine tool after the imprinting is finished, and finishing the machining.

Claims (10)

1. A micro-nano structure roller mold machining and impression forming machine tool is characterized by comprising a machine tool base (1), a rotating base (2), soft material nano impression equipment (3), a spindle box (4), hard material nano impression equipment (5), a double tool rest (6), an X-direction hydrostatic pressure guide rail (7), an X-axis torsion wheel friction transmission system (8), a Z-direction torsion wheel friction transmission system (9) and a Z-direction hydrostatic pressure guide rail (10);
the rotary base (2) comprises a rotary table (212) and a driving mechanism, the rotary table (212) is rotatably connected to the upper surface of the machine tool base (1) and drives the rotary table (212) to rotate through the driving mechanism;
the spindle box (4), the two soft material nano-imprinting devices (3) and the two hard material nano-imprinting devices (5) are fixed on the rotating table (212), the spindle box (4) is fixed in the middle of the rotating table (212), the two soft material nano-imprinting devices (3) are symmetrically arranged on two sides of the spindle box (4), and the two hard material nano-imprinting devices (5) are symmetrically arranged on the other two sides of the spindle box (4); each of the four side surfaces of the spindle box (4) extends out of two output shafts which are respectively in driving connection with the two soft material nano-imprinting devices (3) and the two hard material nano-imprinting devices (5);
the Z-direction hydrostatic pressure guide rail (10) is arranged on one side of the machine tool base (1), and the Z-direction torsion wheel friction transmission system (9) is arranged on the Z-direction hydrostatic pressure guide rail (10) and is used for driving a Z-direction sliding table (1003) of the Z-direction hydrostatic pressure guide rail (10) to perform linear motion along the Z direction;
the X-direction hydrostatic pressure guide rail (7) is arranged on a Z-direction sliding table (1003) of the Z-direction hydrostatic pressure guide rail (10), and the X-axis torsion wheel friction transmission system (8) is arranged on the X-direction hydrostatic pressure guide rail (7) and is used for driving two X-direction sliding tables (702) of the X-direction hydrostatic pressure guide rail (7) to linearly move along the X direction;
the double tool rests (6) comprise two tool systems with the same structure, the two tool systems are respectively fixed on two X-direction sliding tables (702) of an X-direction hydrostatic guide rail (7), and the height of the double tool rests (6) is matched with the soft material nano-imprinting equipment (3) or the hard material nano-imprinting equipment (5) and can be matched with the soft material nano-imprinting equipment or the hard material nano-imprinting equipment;
laser interferometers are respectively mounted on a Z-direction sliding table (1003) of the Z-direction hydrostatic guideway (10) and an X-direction sliding table (702) of the X-direction hydrostatic guideway (7) and are used for detecting the position accuracy of the machine tool.
2. The micro-nano structure roller mold machining and embossing machine tool according to claim 1, characterized in that the driving mechanism of the rotating base (2) comprises a worm wheel shaft (201), a sheave disc (202), a worm (204), a worm wheel (205), a ratchet shaft (206), a ratchet (208) and a motor (209); the worm wheel shaft (201) is arranged in a mounting hole of the machine tool base (1) through a bearing and a rotary sleeve cup; the grooved wheel disc (202) and the worm wheel (205) are respectively arranged on the worm wheel shaft (201) through keys; the worm (204) and the worm wheel (205) form a worm-gear pair, one end of the worm (204) is connected with an output shaft of the motor (209), and the other end of the worm is arranged in an installation hole of the machine tool base (1) through a bearing; the ratchet wheel (208) and the grooved wheel disc (202) form an intermittent motion mechanism, the ratchet wheel (208) is installed on a ratchet wheel shaft (206) through a key, and the ratchet wheel shaft (206) is installed in corresponding installation holes in the machine tool base (1) and the rotating table (212) through a bearing and a rotating sleeve cup.
3. The micro-nano structure roller mold processing and stamping forming machine tool according to claim 1, wherein the soft material nano stamping equipment (3) comprises a soft stamping equipment lower box body (301), a middle gear shaft (303), an auxiliary roller (304), a mold roller (305), a soft stamping equipment upper box body (306), two long gear shafts (307) and a first pinion shaft (312); the soft imprinting equipment lower box body (301) is fixed on a rotating table (212) of the rotating base (2), and the soft imprinting equipment upper box body (306) is fixedly connected with the soft imprinting equipment lower box body (301); a plurality of auxiliary rollers (304) are rotatably connected to the lower box body (301) of the soft imprinting equipment; the middle gear shaft (303) is arranged on the lower box body (301) of the soft imprinting equipment, and a roller 309 is sleeved on the extending end of the middle gear shaft; the middle gear shaft (303), the first pinion shaft (312) and the two long gear shafts (307) are respectively provided with a cylindrical spur gear 310 on the shaft sections positioned in the lower box body (301) of the soft imprinting equipment, and the middle gear shaft (303), the first pinion shaft (312) and one long gear shaft (307) are sequentially meshed with and driven by the cylindrical spur gear 310; two long gear shafts (307) are positioned at the interface of the lower box body (301) of the soft stamping device and the upper box body (306) of the soft stamping device, the extending end of one side of each long gear shaft (307) is connected with the power output end of the spindle box (4), and the output end of the other side of each long gear shaft (307) is sleeved with a mold roller (305).
4. The micro-nano structure roller mold machining and embossing forming machine tool according to claim 1, characterized in that the hard material nano-embossing equipment (5) comprises a hard embossing equipment lower box body (501), two middle gear shafts (502), a second pinion shaft (503), a glue coating roller (504), a hard embossing equipment upper box body (505), a mold roller (506), a big gear shaft (507), a big spur gear (508) and a small spur gear (509); the lower box body (501) of the hard imprinting equipment is fixed on a rotating table (212) of the rotating base (2), and the upper box body (505) of the hard imprinting equipment is fixed on the lower box body (501) of the hard imprinting equipment; two middle gear shafts (502) are rotatably connected to a joint part of a lower box body (501) of the hard stamping equipment and an upper box body (505) of the hard stamping equipment, a mold roller (506) is sleeved on the extending end of one side of each middle gear shaft (502), and the extending end of the other side of each middle gear shaft (502) is connected with the power output end of the spindle box (4); the extending end of the second pinion shaft (503) is sleeved with a gluing roller (504); the large gear shaft (507) is positioned below one middle gear shaft (502), and the extending end of the large gear shaft (507) is sleeved with a mould roller (506); inside the lower box body (501) of the hard imprinting equipment, a small straight gear (509) is installed on a second small gear shaft (503), a large straight gear (508) is installed on a large gear shaft (507), large straight gears (508) are installed on two middle gear shafts (502), the small straight gear (509) on the second small gear shaft (503) is in meshing transmission with the large straight gear (508) on the middle gear shaft (502) adjacent to the small straight gear shaft, and the large straight gear (508) on the other middle gear shaft (502) is in meshing transmission with the large straight gear (508) on the large gear shaft (507) below the small straight gear shaft.
5. The micro-nano structure roller mold machining and embossing machine tool according to claim 1, characterized in that the spindle box (4) comprises a spindle box straight gear (405), a driving bevel gear (406), a straight gear shaft (407) and a driven bevel gear (408); the driving bevel gear (406) is matched with four driven bevel gears (408) which are uniformly distributed at 90 degrees to form four bevel gear pairs which are uniformly distributed on the horizontal plane; each bevel gear pair is respectively connected with a straight gear shaft (407) through a pair of mutually meshed main shaft box straight gears (405), and the straight gear shaft (407) is connected with the power input end of the soft material nano-imprinting equipment (3) or the hard material nano-imprinting equipment (5) through an elastic cancellation coupler; power is transmitted to a driven bevel gear (408) from a driving bevel gear (406), the driven bevel gear (408) rotates to drive a straight gear (405) of a spindle box to rotate, then the motion is transmitted to a straight gear shaft (407), and the motion is transmitted to a power input end of soft material nano-imprinting equipment (3) or hard material nano-imprinting equipment (5) through an elastic cancellation coupler.
6. A micro-nano structure roller mold machining and impression forming machine tool according to claim 5, characterized in that the main spindle box (4) further comprises a main spindle box upper box body (412) and a main spindle box lower box body (401), the driving bevel gear (406) is installed on a driving bevel gear shaft (402), and the driving bevel gear shaft (402) is installed in the main spindle box lower box body (401); the driving bevel gear (406) is meshed with the driven bevel gear (408), and the driven bevel gear (408) is fixed at the tail end of the driven bevel gear shaft (403); the rear end of the driven bevel gear (408) is connected with a synchronizer spline hub (416), a synchronizer coupling sleeve (418) is sleeved outside the synchronizer spline hub (416), and three armatures (417) which are uniformly distributed along the circumferential direction at 120 degrees are installed outside the synchronizer coupling sleeve (418); the electromagnetic valve shell (414) is sleeved on the shaft of the synchronizer spline hub (416), and a coil (415) is arranged between the synchronizer spline hub (416) and the electromagnetic valve shell (414); the left side of the electromagnetic valve shell (414) is provided with a spring frame (413), and the spring frame (413) is sleeved above the driven bevel gear shaft (403) in an empty way; a straight gear (405) of the main shaft box is arranged on a driven bevel gear shaft (403), and the driven bevel gear shaft (403) is arranged in an installation groove of a lower box body (401) of the main shaft box; the straight gear shaft (405) on the straight gear shaft (407) is meshed with the straight gear shaft (405) on the main shaft box on the driven bevel gear shaft (403), and elastic cancellation couplers are arranged at the extending ends of the straight gear shaft (407) and the driven bevel gear shaft (403) and are respectively connected with corresponding shafts in the soft material nano-imprinting equipment (3) and the hard material nano-imprinting equipment (5).
7. The micro-nano structure roller mold machining and embossing forming machine tool according to claim 1, characterized in that the double tool rest (6) comprises two tool systems with the same structure, each tool comprises a turning tool (601), a tool rest (602), a laser micrometer (604) and a mounting plate (605); the turning tool (601) is fixed on the tool rest (602); the tool rest (602) is fixed on an X-direction sliding plate of the X-direction hydrostatic guide rail (7), and the laser micrometer (604) is vertically arranged on the mounting plate (605), so that the measuring position of the laser micrometer (604) and the feed point of the turning tool (601) are positioned at the same height.
8. The micro-nano structure roller mold machining and impression forming machine tool according to claim 1, wherein the Z-direction torsion wheel friction transmission system (9) comprises a left support base (901), a polished rod (902), a torsion wheel friction mechanism (903), a right support base (904), a coupler (905) and a stepping motor (906); the step motor (906) outputs power, the power is transmitted to the polished rod (902) through the coupler (905), the polished rod (902) rotates to drive the torsion wheel friction mechanism (903) to move, a fixed plate is installed on the torsion wheel friction mechanism (903), and the fixed plate is connected with a Z-direction sliding table (1003) of the Z-direction hydrostatic guide rail (10); the Z-direction torsion wheel friction transmission system (9) is arranged in a groove of a Z-direction guide rail (1002) of the Z-direction hydrostatic guide rail (10) through a left support seat (901) and a right support seat (904).
9. The micro-nano structure roller die machining and stamping forming machine tool is characterized in that the torsion wheel friction mechanism (903) comprises three torsion wheels (90301), a torsion wheel shaft (90302), a support frame (90303), a torsion wheel bearing end cover (90304), a support frame end cover (90305), an angular contact ball bearing (90306), an inner ring shaft sleeve (90308) and an outer ring shaft sleeve (90309); the three torsion wheels (90301) are uniformly distributed at 120 degrees, and a corresponding hole is formed in each torsion wheel (90301) and used for mounting a torsion wheel shaft (90302); four angular contact ball bearings (90306) are arranged inside each torsion wheel (90301), an outer ring shaft sleeve (90309) is arranged between the two angular contact ball bearings (90306) in the middle, and an inner ring shaft sleeve (90308) is arranged between every two angular contact ball bearings (90306) from left to right; the torsion wheel bearing end cover (90304) is mounted on the torsion wheel (90301) through a screw; the support frame (90303), the torsion bar shaft (90302) and the support frame end cover (90305) are sequentially installed, and the support frame (90303) and the torsion bar shaft (90302) are fixed to the support frame end cover (90305) through screws at two ends of the support frame (90303) and the torsion bar shaft (90302).
10. A control method for a micro-nano structure roller mold machining and impression forming machine tool is characterized in that the mold machining and impression forming process comprises the following steps:
starting a machine tool, setting relevant machine tool parameters according to processing requirements, and adjusting the positions of two soft material nano-imprinting devices, two hard material nano-imprinting devices, a double tool rest and a laser interferometer;
secondly, online measurement is carried out on the surfaces of the mold rollers of the two soft material nano-imprinting devices and the two hard material nano-imprinting devices by using a measuring device, relevant data are collected, curved surface reconstruction is carried out, a measurement model of the roller mold is obtained, and a design model of the roller mold is obtained according to a required specific micro-nano structure;
inputting the design model into a machine tool numerical control system, performing model matching and comparison on the design model and the measurement model obtained in the last step after feature recognition, and calculating the machining allowance delta1ObtainingCorresponding processing parameters;
step four, carrying out simulation machining according to the machining parameters obtained in the previous step, judging whether interference collision occurs or not, and returning to the step of reselecting the machining parameters if interference exists; if interference collision does not exist, performing numerical control programming, determining path tracks of the double tool rests, and generating corresponding numerical control codes;
fifthly, carrying out numerical control machining; after the processing is finished, measuring the processed roller mold again, and obtaining a measurement model according to the curved surface reconstruction; calculating the machining allowance delta at this time2Judging whether the machining requirements are met;
step six, carrying out stamping forming after the processing requirements are met: firstly, retracting the double tool rests to a proper position to avoid interference, then selecting stamping equipment and stamping types according to the types of stamping materials, and stamping in at most four directions according to requirements;
and step seven, stopping the machine tool after the imprinting is finished, and finishing the machining.
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