CN102909610A - Five-axis linkage ultra-precise machine tool - Google Patents

Abstract

A five-axis linkage ultra-precision machine tool relates to a five-axis linkage machine tool. The invention aims to solve the problems of the traditional ultra-precision machine tools such as single function, simple shape of the processing object, and difficulty in meeting the requirements of complex micro-structured surfaces and micro-element processing. The bed of the machine tool is equipped with X-axis guide rail and Z-axis guide rail. The X-axis guide rail is slidably connected to the X-axis slide plate, and the Z-axis slide plate is connected to the Z-axis slide plate; The vertical direction of the Y-axis is slidingly connected with the Y-axis middle slide plate, and the front of the Y-axis middle slide plate is fixedly connected with the Y-axis front slide plate; the C-axis is fixedly installed on the Y-axis front slide plate along the horizontal direction, and a vacuum suction cup is installed on the C-axis. B axis is installed vertically on Z axis; X axis, Y axis and Z axis are supported by hydrostatic guide rails; B axis and C axis are supported by gas static pressure; fixture device and tool are installed on B axis; C axis The first grating and the second grating are used to realize double feedback control. The invention is used for processing microstructured surfaces and tiny elements.

Description

Five-axis linkage ultra-precision machine tool

technical field

The invention relates to a five-axis linkage ultra-precision machine tool, in particular to a five-axis linkage ultra-precision machine tool, which can realize various processing functions, and is a five-axis linkage ultra-precision machine tool for processing microstructured surfaces and tiny components, belonging to the technical field of mechanical processing equipment .

Background technique

Micro-structured surface refers to the micro-surface topological shape with surface shape accuracy up to sub-micron level, surface roughness up to nano-level, and specific functions. Microstructures are widely used in optoelectronic products, communication products, micro-electromechanical products and high-tech industries such as military, astronomy and medical treatment. With the development of these high-tech and the trend of system miniaturization, micro-structured surfaces and micro-components have shown more and more important application value and broad application prospects in both civil and national defense fields.

At home and abroad, extensive and in-depth research has been carried out on the microstructure surface and micro component manufacturing technology, and a variety of processing technologies have emerged, such as photolithography technology, etching technology, deposition and image etching technology, LIGA technology, electron beam writing technology, laser beam Write technology, copy technology and coating technology, etc. However, with the continuous improvement of the precision and complexity of microstructured surfaces and micro components, the application of these technical methods is limited to varying degrees. For example, it is difficult to process a true 3D structure, or process a 3D structure on a curved substrate; it is difficult to obtain a smooth mirror microstructure; the materials that can be processed are limited; the equipment is expensive and costly; the efficiency is low, and it is difficult to mass produce; and durability of the mold and so on. The use of ultra-precision machine tools can not only process true 3D structures with high aspect ratios, but also the forming accuracy of processed parts can reach sub-micron level, and it is suitable for the processing of various materials, with high efficiency and low cost.

Traditional ultra-precision machine tools have the following shortcomings: 1. The processing function is single, and its processing efficiency is relatively low; 2. The shape of the processing object is simple, and the scope of application is narrow, which is difficult to meet the requirements of complex micro-structured surfaces and micro-component processing. 3. The movement flexibility of the machine tool is relatively low.

Contents of the invention

The purpose of the present invention is to solve the problem of single processing function and low processing efficiency in traditional ultra-precision machine tools; the shape of the processing object is simple, the scope of application is narrow, and it is difficult to meet the requirements of complex microstructure surface and micro component processing; the problem of low machine tool movement flexibility , and further provide a five-axis linkage ultra-precision machine tool.

The technical solution of the present invention is: the five-axis linkage ultra-precision machine tool includes a machine bed, an X-axis, a Y-axis, a Z-axis, a B-axis and a C-axis, and the X-axis, Y-axis and Z-axis are linear motion axes, so The B-axis and the C-axis are rotary motion axes, the X-axis and Z-axis are the horizontal axis system, the Y-axis is the vertical axis system, and the X-axis guide rail and the Z-axis guide rail are fixedly installed on the machine bed. A guide rail, the X-axis guide rail is slidably connected with an X-axis slide plate, and the Z-axis guide rail is slidably connected with a Z-axis slide plate;

Further, a vertical column is installed on the X-axis slide plate along the vertical direction, and the Y-axis middle slide plate is slidably connected to the vertical direction of the column, and the Y-axis front slide plate is fixedly connected to the front of the Y-axis middle slide plate; A C-axis is fixedly installed horizontally on the Y-axis front slide plate, a vacuum suction cup is installed on the C-axis, and a B-axis is installed vertically on the Z-axis slide;

Further, the X-axis, Y-axis, and Z-axis are supported by hydrostatic guide rails, driven by linear motors, and position feedback is realized by linear gratings with nanoscale resolution;

Further, the B-axis and the C-axis are supported by gas static pressure, driven by frameless torque motors, and circular gratings are used as angular displacement feedback;

Further, a fixture device and a tool are installed on the B-axis;

Further, the C-axis adopts the first grating and the second grating to realize double feedback control, and the resolution of the first grating is lower than that of the second grating.

Further, the Y-axis includes an aerostatic spindle, a Y-axis slide plate, a screw nut seat, a torque motor, a ball screw, a screw bearing seat, a beam, a spindle motor seat, an unloading cylinder, a spindle motor and two columns, Y The longitudinal height of the axis slide is smaller than the longitudinal height of the column. The Y-axis slide includes the Y-axis front slide, the Y-axis middle slide and the Y-axis rear slide. The two columns are arranged side by side on the X-axis slide. The Y-axis The middle slide is slidingly connected between two columns, and the upright provides the guide rail function for the Y-axis middle slide. The Y-axis front slide is installed on the front side of the Y-axis middle slide, and the Y-axis front slide is installed on the rear side of the Y-axis middle slide. The center of the Y-axis rear slide, the Y-axis front slide, the Y-axis middle slide and the Y-axis rear slide are all provided with a through hole, and the gas static pressure spindle is installed in the penetration of the Y-axis front slide and the Y-axis middle slide. In the round hole, the spindle motor seat is installed in the through hole of the Y-axis middle slide plate and the Y-axis rear slide plate, the spindle motor is installed in the spindle motor seat, the rear end of the gas static pressure spindle and the spindle motor in the spindle motor seat Connection, the beam is installed on the upper end faces of the two columns, the center of the beam has a center hole, the screw bearing seat is installed on the center hole, the screw bearing seat is equipped with a torque motor, and the lower end of the ball screw passes through the screw The bearing seat and the center hole of the beam are connected with the screw nut seat placed under the beam, the screw nut seat is installed on the Y-axis slide plate, the upper end of the ball screw is connected with the torque motor, and the ball screw is driven by the torque motor , an unloading cylinder is connected between the Y-axis middle slide plate and the X-axis slide plate.

Further, the Y-axis also includes a counterweight, and the counterweight is installed on the rear slide plate of the Y-axis.

Compared with the prior art, the present invention has the following effects: the X-axis, Y-axis and Z-axis of the five-axis linkage ultra-precision machine tool of the present invention are linear motion axes, supported by hydrostatic guide rails, driven by linear motors, and nano Linear encoders with high resolution for position feedback. B-axis and C-axis are rotary motion axes, supported by gas static pressure, driven by frameless torque motor, and circular grating is used as angular displacement feedback. The invention can realize ultra-precision processing of non-ferrous metal, glass and ferrous metal materials. By adjusting the tool type and installation position, various processing functions such as turning, flying tool cutting, milling, and fast tool processing can be realized; in addition, the C-axis has dual working modes, which can be used as a high-speed workpiece spindle or a position servo axis according to needs. The working mode of the C-axis is selected through the control panel of the numerical control system. When the C-axis is used as a high-speed workpiece spindle, the motor driver receives feedback from the first grating, and the feedback signal is used as the angular displacement feedback of the shaft system. When the C-axis is used as a position servo axis, the motor driver receives feedback from the second grating, and the feedback signal is used as angular displacement feedback of the shaft system.

In summary, the advantages of the present invention are: (1) wide application range, high processing efficiency, can realize ultra-precision processing of complex micro-structured surfaces and micro components, and can process non-ferrous metals, glass and ferrous metal materials; (2) integrated It has many functions, and can realize various processing functions such as turning, flying cutting, milling, and fast cutting; (3) High movement flexibility, high precision, and strong process adaptability.

Description of drawings

Fig. 1 is the perspective view of the overall structure of the five-axis linkage ultra-precision machine tool of the present invention;

Fig. 2 is a lens array element diagram;

Fig. 3 is a micro-pyramid array structure diagram with a size of 50 μm;

Fig. 4 is a micro-pyramid array structure with a size of 150 μm;

Fig. 5 is a three-dimensional exploded view of the overall structure of the Y axis;

Fig. 6 is a schematic diagram of the connection relationship between the main shaft motor seat, the middle slide plate of the vertical motion axis, the rear slide plate of the vertical motion axis, the main shaft motor, and the gas static pressure main shaft.

Detailed ways

Specific embodiment 1: This embodiment is described in conjunction with Fig. 1, Fig. 5 and Fig. 6. The five-axis linkage ultra-precision machine tool of this embodiment includes a machine bed 1, an X-axis 2, a Y-axis 3, a Z-axis 4, and a B-axis 5 and C-axis 6, the X-axis 2, Y-axis 3 and Z-axis 4 are linear motion axes, the B-axis 5 and C-axis 6 are rotary motion axes, and the X-axis 2 and Z-axis 4 are The horizontal axis system, the Y-axis 3 is a vertical axis system, the X-axis guide rail 21 and the Z-axis guide rail 41 are fixedly installed on the machine bed 1, and the X-axis slide is slidably connected to the X-axis guide rail 21 plate 22, the Z-axis slide plate 42 is slidably connected to the Z-axis guide rail 41;

Further, a column 10 is installed vertically on the X-axis slide plate 22, the column 10 provides the guide rail function of the Y-axis 3, and the vertical direction of the column 10 is slidably connected with a Y-axis middle slide plate 31, so The Y-axis middle slide 31 is fixedly connected with the Y-axis front slide 32; the Y-axis front slide 32 is fixedly mounted with a C-axis 6 along the horizontal direction, and a vacuum suction cup is installed on the C-axis 6 7. It can be used to fix the workpiece, and the Z-axis slide 42 is equipped with a B-axis 5 along the vertical direction;

Further, the X-axis 2, Y-axis 3, and Z-axis 4 are supported by hydrostatic guide rails, driven by linear motors, and position feedback is realized by linear gratings with nanoscale resolution;

Further, the B-axis and the C-axis are supported by gas static pressure, driven by frameless torque motors, and circular gratings are used as angular displacement feedback;

Further, a fixture device 8 and a tool 9 are installed on the B-axis;

Further, the C-axis adopts the first grating and the second grating to realize double feedback control, and the resolution of the first grating is lower than that of the second grating.

Y-axis 3 is the vertical motion axis system of the ultra-precision machine tool.

Further, the Y-axis includes an aerostatic spindle y1, a Y-axis slide plate, a screw nut seat y4, a torque motor y5, a ball screw y6, a screw bearing seat y7, a beam y8, a spindle motor seat y11, an unloading cylinder y12, The main shaft motor y15 and two columns 10, the vertical height of the Y-axis slide plate is smaller than the vertical height of the column 10, the Y-axis slide plate includes the Y-axis front slide plate 32, the Y-axis middle slide plate 31 and the Y-axis rear slide plate y13, two Two columns 10 are arranged side by side on the X-axis slide plate 22, and the Y-axis slide plate 31 is slidably connected between the two columns 10. The column 10 provides the guide rail function for the Y-axis slide plate 31, and the Y-axis slide plate 31 Y-axis front slide 32 is installed on the front side, Y-axis rear slide y13 is installed on the rear side of Y-axis middle slide 31, Y-axis front slide 32, Y-axis middle slide 31 and Y-axis rear slide y13 There is a through hole y14 in the center, the gas static pressure spindle y1 is installed in the through hole y14 of the Y-axis front slide 32 and the Y-axis middle slide 31, and the spindle motor seat y11 is installed on the Y-axis middle slide 31 and Y In the through hole 14 of the shaft rear slide plate y13, the main shaft motor y15 is installed in the main shaft motor seat y11, the rear end of the gas static pressure main shaft y1 is connected with the main shaft motor y15 in the main shaft motor seat y11, and the beam y8 is installed on two columns On the upper end surface of 10, the center of the beam y8 has a center hole y16, the screw bearing seat y7 is installed on the center hole y16, the screw bearing seat y7 is installed with a torque motor y5, and the lower end of the ball screw y6 passes through the screw The bearing seat y7 and the central hole y16 of the beam y8 are connected with the screw nut seat y4 placed under the beam y8, the screw nut seat y4 is installed on the Y-axis middle slide plate 31, the upper end of the ball screw y6 is connected with the torque motor y5 The ball screw y6 is driven by the torque motor y5, and the unloading cylinder y12 is connected between the Y-axis middle slide 31 and the X-axis slide 22.

Further, the Y-axis 3 also includes a counterweight y9, and the counterweight is installed on the rear slide y13 of the Y-axis.

The movement of the Y-axis is supported by hydrostatic pressure, and the column provides the guide rail function for the Y-axis slide. The gravity balance of the Y axis is achieved by unloading cylinders. The driving of the Y axis is realized by using a motor and a ball screw. (1) The column in the Y-axis acts as the guide rail of the Y-axis, and the rotating shaft parts are placed in the hollow area of the slide plate, with a compact structure; (2) High static and dynamic rigidity; (3) It can meet the needs of complex microstructure processing machine tools ; (4) High precision, strong anti-interference ability, and good dynamic motion performance.

The technical indicators of the five-axis linkage ultra-precision machine tool in this embodiment are shown in Table 1:

Table 1

1. Using five-axis linkage ultra-precision machine tools for micro-turning

Example: non-rotational symmetric microstructured surface: array of convex lenses

The shape parameters of the convex lens array: the height of the microlens is 12 μm, the radius of the opening at the bottom of the lens is 300 μm, the radius of the ball where the lens is located is 3.756 mm, the distance between the center of the lens is 800 μm, and the radius of the processing area is 10 mm. In the experiment, a diamond tool with a tip arc radius of 637 μm was used, and the workpiece material was duralumin. See Figure 2 for the microlens array element.

2. Using five-axis linkage ultra-precision machine tools for micro-milling

Example: Micro-Pyramid Array

Using an ultra-fine-grained carbide V-shaped end mill with a diameter of 0.5 mm, the milling experiment of a micro-pyramid array structure was carried out with the technological parameters of a spindle speed of 60,000 rpm, a feed rate of 10 mm/s, and a cutting depth of 10 μm. , obtained micro-pyramid array structures with sizes of 50 μm and 150 μm, respectively, as shown in Figure 3 and Figure 4.

The content described in the embodiments of this specification is only a partial enumeration of the realized forms of the inventive concept, and the protection scope of the present invention should not be limited to the specific forms stated in the embodiments. The equivalent technical means conceivable by the technical concept of the invention.

Claims (7)

1. five-axle linkage ultra-precision machine tool, it is characterized in that: the five-axle linkage ultra-precision machine tool comprises bed piece (1), X-axis (2), Y-axis (3), Z axis (4), B axle (5) and C axle (6), described X-axis (2), Y-axis (3) and Z axis (4) are linear motion axis, described B axle (5) and C axle (6) are the gyration axle, described X-axis (2) and Z axis (4) are horizontal shafting, described Y-axis (3) is vertical shaft series, be installed with X-axis guide rail (21) and Z axis guide rail (41) on the described bed piece (1), slidely connect X-axis slide carriage (22) on the described X-axis guide rail (21), slidely connect Z axis slide carriage (42) on the described Z axis guide rail (41); Column (10) vertically is installed on the described X-axis slide carriage (22), described column (10) is as the guide rail of Y-axis (3), the vertical direction of column (10) slidely connects Y-axis middle slide carriage (31), the front front slide carriage (32) of Y-axis that is fixedly connected with of described Y-axis middle slide carriage (31); The upper along continuous straight runs of slide carriage (32) is installed with C axle (6) before the described Y-axis, and vacuum cup (7) is installed on the described C axle (6), in the described Z axis slide (42) B axle (5) is installed vertically; Described X-axis (2), Y-axis (3), Z axis (4) are the hydrostatic slideway supporting way, drive with linear electric motors, and adopt the striated pattern of nanometer resolution to realize position feedback; Described B axle and C axle adopt gas-static to support, and by driving without the frame torque motor, adopt the circle grating to feed back as angular displacement; Sectional fixture device (8) and cutter (9) on the described B axle; Described C axle adopts the first grating and the second grating to realize two FEEDBACK CONTROL, and the resolution ratio of the first grating is lower than the resolution ratio of the second grating.

2. five-axle linkage ultra-precision machine tool according to claim 1, it is characterized in that: the X-axis range of movement is 75mm, and the Y-axis range of movement is 35mm, and the Z axis range of movement is 75mm, and B axle range of movement is ± 90 °, C axle range of movement is 360 °.

3. five-axle linkage ultra-precision machine tool according to claim 2, it is characterized in that: the positioning accuracy of X-axis, Y-axis and Z axis is 0.2 μ m50mm, repetitive positioning accuracy is 0.1 μ m.

4. five-axle linkage ultra-precision machine tool according to claim 1 and 2 is characterized in that: X-axis guide rail (21), column (10) is inboard and linearity Z axis guide rail (41) is 0.1 μ m/50mm.

5. five-axle linkage ultra-precision machine tool according to claim 4, it is characterized in that: the rigidity of X-axis guide rail (21), column (10) and Z axis guide rail (41) is 500N/ μ m.

6. five-axle linkage ultra-precision machine tool according to claim 5, it is characterized in that: the rigidity of X-axis guide rail (21), column (10) and Z axis guide rail (41) is 500N/ μ m.

7. five-axle linkage ultra-precision machine tool according to claim 6, it is characterized in that: the positioning accuracy of B axle and C axle is 3 rads.

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