CN113427325B - A kind of electromagnetic flow coupling optical surface precision polishing machine tool and processing method - Google Patents

A kind of electromagnetic flow coupling optical surface precision polishing machine tool and processing method Download PDF

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CN113427325B
CN113427325B CN202110804107.1A CN202110804107A CN113427325B CN 113427325 B CN113427325 B CN 113427325B CN 202110804107 A CN202110804107 A CN 202110804107A CN 113427325 B CN113427325 B CN 113427325B
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fixed
guide rail
machine tool
shell
bearing
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CN113427325A (en
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冀世军
田豪霞
赵继
王铭
胡志清
代汉达
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Jilin University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/02Frames; Beds; Carriages
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/22Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B51/00Arrangements for automatic control of a series of individual steps in grinding a workpiece

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  • Mechanical Engineering (AREA)
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Abstract

本发明公开了一种电磁流耦合光学曲面精密抛光加工机床及加工方法,解决复杂曲面光学元件在加工过程中加工质量和加工效率无法同时保证的问题包括机床床身、Y向精密转台、Y向导轨组件、机床立柱、工具头、角度分度机构、集液池、XZ向精密转台、XZ向静压导轨组件;所述机床立柱固定在机床床身上,Y向导轨组件固定在机床立柱上,Y向精密转台固定在Y向导轨组件上;工具头固定在角度分度机构上,由角度分度机构驱动工具头进行俯仰运动;角度分度机构固定在XZ向精密转台上,XZ向精密转台固定在XZ向静压导轨上,XZ向导轨组件固定在机床床身上;集液池固定在机床床身上且位于工具头和Y向精密转台的下方。

Figure 202110804107

The invention discloses an electromagnetic flow coupled optical curved surface precision polishing processing machine tool and a processing method, which solve the problem that the processing quality and processing efficiency of complex curved optical components cannot be guaranteed at the same time during the processing process. Guide rail assembly, machine tool column, tool head, angle indexing mechanism, liquid collecting tank, XZ direction precision turntable, XZ direction static pressure guide rail assembly; the machine tool column is fixed on the machine bed, and the Y direction guide rail assembly is fixed on the machine tool column, The Y-direction precision turntable is fixed on the Y-direction guide rail assembly; the tool head is fixed on the angle indexing mechanism, and the angle indexing mechanism drives the tool head to perform pitching motion; the angle indexing mechanism is fixed on the XZ-direction precision turntable, and the XZ-direction precision turntable It is fixed on the XZ-direction static pressure guide rail, and the XZ-direction guide rail assembly is fixed on the machine bed; the liquid collecting tank is fixed on the machine bed and is located under the tool head and the Y-direction precision turntable.

Figure 202110804107

Description

一种电磁流耦合光学曲面精密抛光加工机床及加工方法A kind of electromagnetic flow coupling optical surface precision polishing machine tool and processing method

技术领域technical field

本发明设计属于机械制造技术领域,具体涉及一种电磁流耦合光学曲面精密抛光加工机床及其加工方法。The design of the invention belongs to the technical field of mechanical manufacturing, and in particular relates to an electromagnetic flow coupled optical curved surface precision polishing processing machine tool and a processing method thereof.

背景技术Background technique

随着光学技术的发展与应用的日益广泛,对光学元件表面的加工面形精度及表面质量的要求越来越高,光学元件的材料也逐渐向着具有硬脆特性的难加工材料方向发展。针对光学元件的加工如超声波抛光、离子束抛光、气囊抛光等由于自身条件的限制,抛光效率不高,同时无法实现小曲率光学表面的加工。而近些年新兴起的电磁流变协同抛光技术,基于电流变抛光和磁流变抛光效应复合叠加的电磁流变协同抛光技术,具有响应快、屈服应力大等优势,能够保证磨料分布的均匀性和稳定性,有效降低表面粗糙度,获得表面加工质量良好、亚表面损伤小的元件,为复杂自由曲面光学元件的加工提供了新的解决途径。因此,本发明提出了一种新型抛光机床设计及加工方法,以解决复杂曲面光学元件在加工过程中加工质量和加工效率无法同时保证的问题。With the development and application of optical technology, the requirements for the surface shape accuracy and surface quality of optical components are getting higher and higher, and the materials of optical components are gradually developing towards the direction of hard-to-machine materials with hard and brittle properties. For the processing of optical components, such as ultrasonic polishing, ion beam polishing, airbag polishing, etc., due to the limitation of their own conditions, the polishing efficiency is not high, and the processing of optical surfaces with small curvature cannot be realized. In recent years, the emerging electromagnetic rheological synergistic polishing technology, which is based on the composite superposition of electrorheological polishing and magnetorheological polishing effects, has the advantages of fast response and large yield stress, which can ensure the uniform distribution of abrasives. It can effectively reduce the surface roughness and obtain components with good surface processing quality and less sub-surface damage, which provides a new solution for the processing of complex free-form optical components. Therefore, the present invention proposes a novel polishing machine tool design and processing method to solve the problem that the processing quality and processing efficiency of complex curved optical elements cannot be guaranteed at the same time during processing.

发明内容SUMMARY OF THE INVENTION

本发明为解决超声波抛光、离子束抛光、气囊抛光等加工方法对复杂光学曲面元件加工时的问题以及解决复杂曲面光学元件在加工过程中加工质量和加工效率无法同时保证的问题,提出了一种电磁流耦合光学曲面精密抛光加工机床及其加工方法。In order to solve the problems in the processing of complex optical curved components by ultrasonic polishing, ion beam polishing, airbag polishing and other processing methods, and to solve the problem that the processing quality and processing efficiency of the complex curved optical components cannot be guaranteed at the same time in the processing process, a method is proposed. Electromagnetic flow coupling optical surface precision polishing machine tool and its processing method.

本发明采用的技术方案如下,结合附图:The technical scheme adopted in the present invention is as follows, in conjunction with the accompanying drawings:

一种电磁流耦合光学曲面精密抛光加工机床,包括机床床身1、Y向精密转台2、Y向导轨组件3、机床立柱4、工具头5、角度分度机构6、集液池7、XZ 向精密转台8、XZ向静压导轨组件9;所述机床立柱4固定在机床床身1上,Y 向导轨组件3固定在机床立柱4上,Y向精密转台2固定在Y向导轨组件3上;工具头5固定在角度分度机构6上,由角度分度机构6驱动工具头5进行俯仰运动;角度分度机构6固定在XZ向精密转台8上,XZ向精密转台8固定在XZ 向静压导轨9上,XZ向导轨组件9固定在机床床身1上;集液池7固定在机床床身1上且位于工具头5和Y向精密转台2的下方。An electromagnetic flow coupled optical surface precision polishing machine tool, comprising a machine bed 1, a Y-direction precision turntable 2, a Y-direction guide rail assembly 3, a machine tool column 4, a tool head 5, an angle indexing mechanism 6, a liquid collection tank 7, XZ To the precision turntable 8, the XZ direction static pressure guide rail assembly 9; the machine tool column 4 is fixed on the machine bed 1, the Y direction guide rail assembly 3 is fixed on the machine tool column 4, the Y direction precision turntable 2 is fixed on the Y direction guide rail assembly 3 The tool head 5 is fixed on the angle indexing mechanism 6, and the tool head 5 is driven by the angle indexing mechanism 6 to perform pitching motion; the angle indexing mechanism 6 is fixed on the XZ-direction precision turntable 8, and the XZ-direction precision turntable 8 is fixed on the XZ On the static pressure guide rail 9, the XZ direction guide rail assembly 9 is fixed on the machine bed 1;

进一步地,所述角度分度机构6中轴与工具头5上的安装孔过盈配合,角度分度机构6内部设有齿轮传动机构,齿轮传动机构与中轴固定,带动工具头5 整体进行俯仰运动。Further, the center axis of the angle indexing mechanism 6 is in interference fit with the mounting holes on the tool head 5, and a gear transmission mechanism is provided inside the angle indexing mechanism 6. Tilt movement.

进一步地,所述工具头5包括电磁场发生装置、动力输入部分以及制动部分;所述动力输入部分包括外壳组件、伺服电机509、从动件503、外联轴517、圆柱凸轮轴520以及旋钮527;伺服电机509固定于外壳组件的上方,外联轴 517、旋钮527、圆柱凸轮轴520以及从动件503均置于外壳组件内部;伺服电机509通过联轴器511与外联轴517连接,外联轴517通过轴承与外壳组件转动连接,外联轴517底部通过长销519与旋钮527连接,圆柱凸轮轴520上端通过花键与旋钮527内部连接,从动件503通过销504与圆柱凸轮轴520下端连接;所述制动部分包括刹车片507以及制动盘518,刹车片507套接在外联轴 517的下端并与外联轴517销连接;制动盘518空套在外联轴517上且位于刹车片507的上方,制动盘518通过连接长销穿过外联轴517上的长槽后与制动盘 518连接;所述电磁场发生装置安装在所述动力输入部分的底部。Further, the tool head 5 includes an electromagnetic field generating device, a power input part and a braking part; the power input part includes a housing assembly, a servo motor 509, a follower 503, an outer coupling shaft 517, a cylindrical camshaft 520 and a knob 527; the servo motor 509 is fixed above the casing assembly, and the outer coupling shaft 517, the knob 527, the cylindrical camshaft 520 and the follower 503 are all placed inside the casing assembly; the servo motor 509 is connected to the outer coupling shaft 517 through the coupling 511 , the outer coupling shaft 517 is rotatably connected with the housing assembly through the bearing, the bottom of the outer coupling shaft 517 is connected with the knob 527 through the long pin 519, the upper end of the cylindrical camshaft 520 is internally connected with the knob 527 through the spline, and the follower 503 is connected with the cylinder through the pin 504. The lower end of the camshaft 520 is connected; the braking part includes a brake pad 507 and a brake disc 518, the brake pad 507 is sleeved on the lower end of the outer coupling shaft 517 and is pin-connected with the outer coupling shaft 517; the brake disc 518 is empty sleeved on the outer coupling shaft 517 and above the brake pad 507, the brake disc 518 is connected to the brake disc 518 through the connecting long pin passing through the long groove on the outer coupling shaft 517; the electromagnetic field generating device is installed at the bottom of the power input part .

优选地,所述外壳组件包括下端外壳505、中端外壳506、一号轴承端盖508、主轴外壳512、一号套筒513、一号圆螺母514;所述伺服电机509通过紧固螺栓固定于主轴外壳512的上方;所述一号套筒513外圈通过紧固螺栓安装在主轴外壳512的下侧小孔径端内壁,内圈通过一号轴承515与外联轴517连接;所述一号圆螺母514拧紧在圆柱凸轮轴520上方的第二段小径端,且与一号轴承515接触对一号轴承515轴向定位;中端外壳506内侧通过轴承与圆柱凸轮轴520连接,下端外壳505通过紧固螺栓与中端外壳506连接;一号轴承端盖 508通过螺栓固定安装到主轴外壳512的下方,用于一号轴承515的轴向定位。Preferably, the housing assembly includes a lower housing 505, a middle housing 506, a No. 1 bearing end cover 508, a main shaft housing 512, a No. 1 sleeve 513, and a No. 1 round nut 514; the servo motor 509 is fixed by tightening bolts above the main shaft casing 512; the outer ring of the No. 1 sleeve 513 is installed on the inner wall of the lower side small aperture end of the main shaft casing 512 through fastening bolts, and the inner ring is connected to the outer coupling shaft 517 through the No. 1 bearing 515; the No. 1 bearing 515; The round nut 514 is tightened on the small diameter end of the second section above the cylindrical camshaft 520, and is in contact with the No. 1 bearing 515 to axially locate the No. 1 bearing 515; the inner side of the middle end housing 506 is connected with the cylindrical camshaft 520 through the bearing, and the lower end housing 505 is connected with the middle end housing 506 by fastening bolts; the No. 1 bearing end cover 508 is fixedly installed under the main shaft housing 512 by means of bolts for the axial positioning of the No. 1 bearing 515 .

进一步地,所述电磁场发生装置包括半球外壳521、辅助电极板524、多层圆柱筒525、四个环形电极板526、四个电磁铁501、四个辅助电极支撑筒502、四个支撑套筒522以及四个支撑架523;四个电磁铁501呈90°均匀分布,分别置于四个支撑套筒522内部,四个支撑套筒522紧贴多层圆柱筒525并安装在支撑架523上,支撑架523固定在所述外壳组件下端;多层圆柱筒525固定在所述从动件503上;环形电极板526置于多层圆柱筒525内;半球外壳521 固定在所述外壳组件,辅助电极支撑筒502紧套在半球外壳521的外侧并通过销连接,辅助电极板524固定在辅助电极支撑筒502内。Further, the electromagnetic field generating device includes a hemispherical casing 521, an auxiliary electrode plate 524, a multi-layer cylindrical cylinder 525, four annular electrode plates 526, four electromagnets 501, four auxiliary electrode support cylinders 502, and four support sleeves. 522 and four support frames 523; the four electromagnets 501 are evenly distributed at 90° and are respectively placed inside the four support sleeves 522, and the four support sleeves 522 are close to the multi-layer cylindrical cylinder 525 and are installed on the support frame 523 , the support frame 523 is fixed on the lower end of the shell assembly; the multi-layer cylinder 525 is fixed on the follower 503; the annular electrode plate 526 is placed in the multi-layer cylinder 525; the hemispherical shell 521 is fixed on the shell assembly, The auxiliary electrode support cylinder 502 is tightly sleeved on the outer side of the hemispherical housing 521 and connected by pins, and the auxiliary electrode plate 524 is fixed in the auxiliary electrode support cylinder 502 .

进一步地,所述Y向精密转台3与XZ向精密转台8结构相同;所述XZ向精密转台8包括底座801、二号轴承端盖802、定子绕组805、外壳808、连接台809、端盖811、永磁体815、输出转轴816;底座801固定在所述XZ向静压导轨组件9上,外壳808固定在底座801上,轴承端盖811固定连接在外壳808 顶部,二号轴承端盖802与底座801底部固定连接;输出转轴816置于外壳内部中间位置,输出转轴816上部轴端通过轴承与外壳808转动连接,输出转轴816下部轴端通过轴承与底座801转动连接;定子绕组805通过定子支撑806固定在外壳808内部,永磁体815嵌在输出转轴816上且其位置与定子绕组805 对应;输出转轴816顶端与连接台809固定连接,连接台809上方安装所述角度分度机构6。Further, the Y-direction precision turntable 3 has the same structure as the XZ-direction precision turntable 8; the XZ-direction precision turntable 8 includes a base 801, a No. 2 bearing end cover 802, a stator winding 805, a housing 808, a connection table 809, and an end cover. 811, permanent magnet 815, output shaft 816; the base 801 is fixed on the XZ direction static pressure guide rail assembly 9, the casing 808 is fixed on the base 801, the bearing end cover 811 is fixedly connected to the top of the casing 808, the No. 2 bearing end cover 802 It is fixedly connected to the bottom of the base 801; the output shaft 816 is placed in the middle of the casing, the upper shaft end of the output shaft 816 is rotatably connected to the casing 808 through a bearing, and the lower shaft end of the output shaft 816 is rotatably connected to the base 801 through a bearing; the stator winding 805 passes through the stator The support 806 is fixed inside the casing 808, the permanent magnet 815 is embedded on the output shaft 816 and its position corresponds to the stator winding 805;

进一步地,所述XZ向静压导轨组件9包括X轴静压导轨901及Z轴静压导轨902,X轴静压导轨901安装在机床床身1上,Z轴静压导轨902滑动连接在 X轴静压导轨901上,Z轴静压导轨902上固定XZ向精密转台8;X轴静压导轨 901与Z轴静压导轨902结构相同,Z向静压导轨包括工字形导轨90201、直线电机初级90202、直线电机次级90203及分体式溜板90204;直线电机初级90202 安装在工字形导轨90201的凹槽内,直线电机次级90203安装在分体式溜板 90204内侧下表面且其位置与直线电机初级90202相对,分体式溜板90204套在工字形导轨90201上。Further, the XZ-direction static pressure guide rail assembly 9 includes an X-axis static pressure guide rail 901 and a Z-axis static pressure guide rail 902. The X-axis static pressure guide rail 901 is installed on the machine bed 1, and the Z-axis static pressure guide rail 902 is slidably connected to the machine bed 1. On the X-axis static pressure guide rail 901, the Z-axis static pressure guide rail 902 is fixed on the XZ-direction precision turntable 8; the X-axis static pressure guide rail 901 has the same structure as the Z-axis static pressure guide rail 902, and the Z-axis static pressure guide rail includes an I-shaped guide rail 90201, a straight line The motor primary 90202, the linear motor secondary 90203 and the split slide 90204; the linear motor primary 90202 is installed in the groove of the I-shaped guide rail 90201, and the linear motor secondary 90203 is installed on the inner lower surface of the split slide 90204 and its position is the same as the The linear motor primary 90202 is opposite, and the split slide 90204 is set on the I-shaped guide rail 90201.

进一步地,所述Y向导轨组件3包括驱动电机301、十字滑块联轴器302、滚珠螺母304、滚珠丝杠306、固定导轨308、连接平板309及移动导轨310;一号底部支撑座303固定于滚珠丝杠306的上方,滚珠丝杠306上、下端分别通过一个连接到机床立柱4上;驱动电机301通过十字滑块联轴器302与滚珠丝杠306连接,滚珠螺母304与滚珠丝杠306转动连接,滚珠螺母304通过螺母座305固定在连接平板309上,连接平板309上安装Y向精密转台2;固定导轨308固定在机床立柱4上,移动导轨310与固定导轨308滑动连接。Further, the Y-direction guide rail assembly 3 includes a drive motor 301, an Oldham coupling 302, a ball nut 304, a ball screw 306, a fixed guide rail 308, a connecting plate 309 and a moving guide rail 310; the No. 1 bottom support seat 303 It is fixed above the ball screw 306. The upper and lower ends of the ball screw 306 are respectively connected to the machine tool column 4 through one; The rod 306 is connected in rotation, the ball nut 304 is fixed on the connecting plate 309 through the nut seat 305, and the Y-direction precision turntable 2 is installed on the connecting plate 309;

本发明同时提供一种电磁流耦合光学曲面精密抛光加工机床的加工方法,加工过程主要包括以下几个步骤:The invention also provides a processing method for an electromagnetic flow coupled optical curved surface precision polishing machine tool, and the processing process mainly includes the following steps:

步骤一、利用专用夹具将工件装夹至Y向精密转台上,开启机床,对机床复位,根据工件类型,将工具头角度调整到位,设置机床其他各部分初始参数值及初始位置;Step 1. Use a special fixture to clamp the workpiece to the Y-direction precision turntable, turn on the machine tool, reset the machine tool, adjust the angle of the tool head in place according to the workpiece type, and set the initial parameter values and initial positions of other parts of the machine tool;

步骤二、对工件进行在线测量,采集所需数据,进行曲面重构,获取工件测量模型;Step 2: Measure the workpiece online, collect the required data, reconstruct the surface, and obtain the workpiece measurement model;

步骤三、将工件设计模型输入机床数控系统,进行特征识别后与上一步得到的工件测量模型进行模型匹配、比较,计算出加工余量,根据其加工余量选择加工参数;Step 3: Input the workpiece design model into the machine tool numerical control system, carry out model matching and comparison with the workpiece measurement model obtained in the previous step after feature identification, calculate the machining allowance, and select the machining parameters according to the machining allowance;

步骤四、根据上一步所得加工参数进行仿真加工,判断是否会发生干涉碰撞,若存在干涉,则返回上一步重新选择加工参数;Step 4: Carry out simulation processing according to the processing parameters obtained in the previous step, and judge whether there will be interference and collision. If there is interference, return to the previous step and select the processing parameters again;

步骤五、若不存在干涉碰撞,进行数控编程,确定工具头轨迹,生成相应的数控代码;Step 5. If there is no interference collision, carry out NC programming, determine the tool head trajectory, and generate the corresponding NC code;

步骤六、进行数控加工,加工结束后,对加工后工件再次进行测量,并根据曲面重构获取测量模型;Step 6, carry out numerical control machining, after the machining is finished, measure the workpiece after machining again, and obtain the measurement model according to the surface reconstruction;

步骤六、判断步骤六的测量模型是否满足加工需求,若不满足加工要求,判断其是否可修复,若可修复,返回步骤二重新进行加。Step 6: Determine whether the measurement model in Step 6 meets the processing requirements. If it does not meet the processing requirements, determine whether it can be repaired. If it can be repaired, return to Step 2 and add it again.

本发明的优点在于:The advantages of the present invention are:

1、本发明机床既能抛光自由曲面,又可以抛光大平面,并巧妙利用圆柱凸轮结构和分度角度装置实现点抛光和大平面抛光模式的转换,具有较好的灵活性与较为突出的面域加工能力。1. The machine tool of the present invention can polish both free-form surfaces and large planes, and cleverly uses the cylindrical cam structure and the indexing angle device to realize the conversion of point polishing and large plane polishing modes, and has better flexibility and more prominent surface. domain processing capability.

2、本发明中将电流变抛光与磁流变抛光结合,通过正负极的布置方式以及NS极的布置方式,使电力线和磁力线的分布更加紧凑,保证了柔性抛光工具头的稳定性与刚度。2. In the present invention, electrorheological polishing and magnetorheological polishing are combined, and the distribution of electric and magnetic lines of force is more compact through the arrangement of positive and negative electrodes and the arrangement of NS poles, which ensures the stability and rigidity of the flexible polishing tool head. .

3、本发明中机床工具头的设计以及机床其他部分的设计,扩展了电流变与磁流变复合抛光技术的应用,为二者的结合提供了新的方法和思路。3. The design of the tool head of the machine tool and the design of other parts of the machine tool in the present invention expand the application of electrorheological and magnetorheological composite polishing technology, and provide new methods and ideas for the combination of the two.

附图说明Description of drawings

图1为机床的总体结构示意图Figure 1 is a schematic diagram of the overall structure of the machine tool

图2为工具头轴测图Figure 2 is an axonometric view of the tool head

图3为工具系统内部结构示意图Figure 3 is a schematic diagram of the internal structure of the tool system

图4为工具系统内部局部结构示意图Figure 4 is a schematic diagram of the internal partial structure of the tool system

图5为磁场发生装置与电场发生装置部分结构示意图Figure 5 is a schematic diagram of the partial structure of the magnetic field generating device and the electric field generating device

图6为工具头中圆柱凸轮轴结构示意图Figure 6 is a schematic diagram of the structure of the cylindrical camshaft in the tool head

图7为工具头中从动件结构示意图Figure 7 is a schematic diagram of the structure of the follower in the tool head

图8为工具头中外联轴结构示意图Figure 8 is a schematic diagram of the structure of the middle and outer couplings of the tool head

图9为工具头中动力输入部分局部结构示意图Figure 9 is a schematic diagram of the partial structure of the power input part in the tool head

图10为XZ向精密转台内部结构示意图Figure 10 is a schematic diagram of the internal structure of the XZ-direction precision turntable

图11为XZ向静压导轨结构示意图Figure 11 is a schematic diagram of the structure of the XZ direction static pressure guide rail

图12为Z向静压导轨结构示意图Figure 12 is a schematic diagram of the structure of the Z-direction static pressure guide rail

图13为Z向静压导轨中分体式溜板结构示意图Figure 13 is a schematic diagram of the structure of the split slide in the Z-direction static pressure guide rail

图14为Y向导轨组件结构示意图Figure 14 is a schematic diagram of the structure of the Y-direction guide rail assembly

图15为工具头斜置抛光时磁极分布示意图Figure 15 is a schematic diagram of the magnetic pole distribution when the tool head is tilted for polishing

图16为机床的工作流程图Figure 16 is the working flow chart of the machine tool

图中:In the picture:

1、机床床身;2、Y向精密转台;3、Y向导轨组件;4、机床立柱;5、工具头;6、角度转换装置;7、集液池;8、XZ向精密转台;9、XZ向静压导轨组件;501、电磁铁;502、辅助电极支撑筒;503、从动件;504、销;505、下端外壳;506、中端外壳;507、刹车片;508、一号轴承端盖;509、伺服电机; 510、一号紧固螺栓;511、联轴器;512、主轴外壳;513、一号套筒;514、圆螺母;515、一号轴承;516、垫片;517、外联轴;518、制动盘;519、长销; 520、圆柱凸轮轴;521、半球外壳;522、支撑套筒;523、支撑架;524、辅助电极板;525、多层圆柱筒;526、环形电极板;801、底座;802、二号轴承端盖;803、二号圆螺母;804、下端盖;805、定子绕组;806、定子支撑;807、二号紧固螺栓;808、外壳;809、连接台;810、毡圈;811、端盖;812、二号套筒;813、二号轴承;814、上端盖;815、永磁体;816、轴;901、X轴静压导轨;902、Z轴静压导轨;90201、工字形导轨;90202、直线电机初级;90203、直线电机次级;90204、分体式溜板;902041、下幅板;902042、侧幅板;902043、上幅板;902044、螺钉;301、驱动电机;302、十字滑块联轴器;303、一号底部支撑座;304、滚珠螺母;305、螺母座;306、滚珠丝杠;307、二号底部支撑座;308、固定导轨;309、连接平板;310、移动导轨。1. Machine bed; 2. Y-direction precision turntable; 3. Y-direction guide rail assembly; 4. Machine tool column; 5. Tool head; 6. Angle conversion device; 7. Liquid collection tank; 8. XZ-direction precision turntable; 9 , XZ direction static pressure guide rail assembly; 501, electromagnet; 502, auxiliary electrode support cylinder; 503, follower; 504, pin; 505, lower shell; 506, middle shell; 507, brake pad; 508, No. 1 Bearing end cover; 509, servo motor; 510, No. 1 fastening bolt; 511, coupling; 512, main shaft housing; 513, No. 1 sleeve; 514, round nut; 515, No. 1 bearing; 516, gasket 517, outer coupling; 518, brake disc; 519, long pin; 520, cylindrical camshaft; 521, hemispherical housing; 522, support sleeve; 523, support frame; 524, auxiliary electrode plate; 525, multi-layer Cylindrical cylinder; 526, annular electrode plate; 801, base; 802, No. 2 bearing end cover; 803, No. 2 round nut; 804, lower end cover; 805, stator winding; 806, stator support; 807, No. 2 fastening bolt ;808, shell; 809, connection table; 810, felt ring; 811, end cover; 812, No. 2 sleeve; 813, No. 2 bearing; 814, upper end cover; 815, permanent magnet; 816, shaft; 901, X Axial static pressure guide rail; 902, Z-axis static pressure guide rail; 90201, I-shaped guide rail; 90202, linear motor primary; 90203, linear motor secondary; 90204, split slide plate; 902041, lower plate; 902042, side plate ;902043, upper plate; 902044, screw; 301, drive motor; 302, cross slide coupling; 303, No. 1 bottom support seat; 304, ball nut; 305, nut seat; 306, ball screw; 307 , No. 2 bottom support seat; 308, fixed guide rail; 309, connecting plate; 310, moving guide rail.

具体实施方式Detailed ways

下面结合附图进一步说明本发明的具体实施方式。The specific embodiments of the present invention are further described below with reference to the accompanying drawings.

一种电磁流耦合光学曲面精密抛光加工机床,包括机床床身1、Y向精密转台2、Y向导轨组件3、机床立柱4、工具头5、角度分度机构6、集液池7、XZ 向精密转台8、XZ向静压导轨组件9;所述机床立柱4固定在机床床身1上,Y 向导轨组件3固定在机床立柱4上,Y向精密转台2固定在Y向导轨组件3上;工具头5固定在角度分度机构6上,由角度分度机构6驱动工具头5进行俯仰运动;角度分度机构6固定在XZ向精密转台8上,XZ向精密转台8固定在XZ 向静压导轨9上,XZ向导轨组件9固定在机床床身1上;集液池7固定在机床床身1上且位于工具头5和Y向精密转台2的下方。An electromagnetic flow coupled optical surface precision polishing machine tool, comprising a machine bed 1, a Y-direction precision turntable 2, a Y-direction guide rail assembly 3, a machine tool column 4, a tool head 5, an angle indexing mechanism 6, a liquid collection tank 7, XZ To the precision turntable 8, the XZ direction static pressure guide rail assembly 9; the machine tool column 4 is fixed on the machine bed 1, the Y direction guide rail assembly 3 is fixed on the machine tool column 4, the Y direction precision turntable 2 is fixed on the Y direction guide rail assembly 3 The tool head 5 is fixed on the angle indexing mechanism 6, and the tool head 5 is driven by the angle indexing mechanism 6 to perform pitching motion; the angle indexing mechanism 6 is fixed on the XZ-direction precision turntable 8, and the XZ-direction precision turntable 8 is fixed on the XZ On the static pressure guide rail 9, the XZ direction guide rail assembly 9 is fixed on the machine bed 1;

进一步地,所述角度分度机构6中轴与工具头5上的安装孔过盈配合,角度分度机构6内部设有齿轮传动机构,齿轮传动机构与中轴固定,带动工具头5 整体进行俯仰运动。Further, the center axis of the angle indexing mechanism 6 is in interference fit with the mounting holes on the tool head 5, and a gear transmission mechanism is provided inside the angle indexing mechanism 6. Tilt movement.

进一步地,所述工具头5包括电磁场发生装置、动力输入部分以及制动部分;所述动力输入部分包括外壳组件、伺服电机509、从动件503、外联轴517、圆柱凸轮轴520以及旋钮527;伺服电机509固定于外壳组件的上方,外联轴517、旋钮527、圆柱凸轮轴520以及从动件503均置于外壳组件内部;伺服电机509通过联轴器511与外联轴517连接,外联轴517通过轴承与外壳组件转动连接,外联轴517底部通过长销519与旋钮527连接,圆柱凸轮轴520上端通过花键与旋钮527内部连接,从动件503通过销504与圆柱凸轮轴520下端连接;所述制动部分包括刹车片507以及制动盘518,刹车片507套接在外联轴 517的下端并与外联轴517销连接;制动盘518空套在外联轴517上且位于刹车片507的上方,制动盘518通过连接长销穿过外联轴517上的长槽后与制动盘 518连接;所述电磁场发生装置安装在所述动力输入部分的底部。Further, the tool head 5 includes an electromagnetic field generating device, a power input part and a braking part; the power input part includes a housing assembly, a servo motor 509, a follower 503, an outer coupling shaft 517, a cylindrical camshaft 520 and a knob 527; the servo motor 509 is fixed above the casing assembly, and the outer coupling shaft 517, the knob 527, the cylindrical camshaft 520 and the follower 503 are all placed inside the casing assembly; the servo motor 509 is connected to the outer coupling shaft 517 through the coupling 511 , the outer coupling shaft 517 is rotatably connected with the housing assembly through the bearing, the bottom of the outer coupling shaft 517 is connected with the knob 527 through the long pin 519, the upper end of the cylindrical camshaft 520 is internally connected with the knob 527 through the spline, and the follower 503 is connected with the cylinder through the pin 504. The lower end of the camshaft 520 is connected; the braking part includes a brake pad 507 and a brake disc 518, the brake pad 507 is sleeved on the lower end of the outer coupling shaft 517 and is pin-connected with the outer coupling shaft 517; the brake disc 518 is empty sleeved on the outer coupling shaft 517 and above the brake pad 507, the brake disc 518 is connected to the brake disc 518 through the connecting long pin passing through the long groove on the outer coupling shaft 517; the electromagnetic field generating device is installed at the bottom of the power input part .

优选地,所述外壳组件包括下端外壳505、中端外壳506、一号轴承端盖508、主轴外壳512、一号套筒513、一号圆螺母514;所述伺服电机509通过紧固螺栓固定于主轴外壳512的上方;所述一号套筒513外圈通过紧固螺栓安装在主轴外壳512的下侧小孔径端内壁,内圈通过一号轴承515与外联轴517连接;所述一号圆螺母514拧紧在圆柱凸轮轴520上方的第二段小径端,且与一号轴承515接触对一号轴承515轴向定位;中端外壳506内侧通过轴承与圆柱凸轮轴520连接,下端外壳505通过紧固螺栓与中端外壳506连接;一号轴承端盖 508通过螺栓固定安装到主轴外壳512的下方,用于一号轴承515的轴向定位。Preferably, the housing assembly includes a lower housing 505, a middle housing 506, a No. 1 bearing end cover 508, a main shaft housing 512, a No. 1 sleeve 513, and a No. 1 round nut 514; the servo motor 509 is fixed by tightening bolts above the main shaft casing 512; the outer ring of the No. 1 sleeve 513 is installed on the inner wall of the lower side small aperture end of the main shaft casing 512 through fastening bolts, and the inner ring is connected to the outer coupling shaft 517 through the No. 1 bearing 515; the No. 1 bearing 515; The round nut 514 is tightened on the small diameter end of the second section above the cylindrical camshaft 520, and is in contact with the No. 1 bearing 515 to axially locate the No. 1 bearing 515; the inner side of the middle end housing 506 is connected with the cylindrical camshaft 520 through the bearing, and the lower end housing 505 is connected with the middle end housing 506 by fastening bolts; the No. 1 bearing end cover 508 is fixedly installed under the main shaft housing 512 by means of bolts for the axial positioning of the No. 1 bearing 515 .

进一步地,所述电磁场发生装置包括半球外壳521、辅助电极板524、多层圆柱筒525、四个环形电极板526、四个电磁铁501、四个辅助电极支撑筒502、四个支撑套筒522以及四个支撑架523;四个电磁铁501呈90°均匀分布,分别置于四个支撑套筒522内部,四个支撑套筒522紧贴多层圆柱筒525并安装在支撑架523上,支撑架523固定在所述外壳组件下端;多层圆柱筒525固定在所述从动件503上;环形电极板526置于多层圆柱筒525内;半球外壳521 固定在所述外壳组件,辅助电极支撑筒502紧套在半球外壳521的外侧并通过销连接,辅助电极板524固定在辅助电极支撑筒502内。Further, the electromagnetic field generating device includes a hemispherical casing 521, an auxiliary electrode plate 524, a multi-layer cylindrical cylinder 525, four annular electrode plates 526, four electromagnets 501, four auxiliary electrode support cylinders 502, and four support sleeves. 522 and four support frames 523; the four electromagnets 501 are evenly distributed at 90° and are respectively placed inside the four support sleeves 522, and the four support sleeves 522 are close to the multi-layer cylindrical cylinder 525 and are installed on the support frame 523 , the support frame 523 is fixed on the lower end of the shell assembly; the multi-layer cylinder 525 is fixed on the follower 503; the annular electrode plate 526 is placed in the multi-layer cylinder 525; the hemispherical shell 521 is fixed on the shell assembly, The auxiliary electrode support cylinder 502 is tightly sleeved on the outer side of the hemispherical housing 521 and connected by pins, and the auxiliary electrode plate 524 is fixed in the auxiliary electrode support cylinder 502 .

进一步地,所述Y向精密转台3与XZ向精密转台8结构相同;所述XZ向精密转台8包括底座801、二号轴承端盖802、定子绕组805、外壳808、连接台809、端盖811、永磁体815、输出转轴816;底座801固定在所述XZ向静压导轨组件9上,外壳808固定在底座801上,轴承端盖811固定连接在外壳808 顶部,二号轴承端盖802与底座801底部固定连接;输出转轴816置于外壳内部中间位置,输出转轴816上部轴端通过轴承与外壳808转动连接,输出转轴816下部轴端通过轴承与底座801转动连接;定子绕组805通过定子支撑806固定在外壳808内部,永磁体815嵌在输出转轴816上且其位置与定子绕组805 对应;输出转轴816顶端与连接台809固定连接,连接台809上方安装所述角度分度机构6。Further, the Y-direction precision turntable 3 has the same structure as the XZ-direction precision turntable 8; the XZ-direction precision turntable 8 includes a base 801, a No. 2 bearing end cover 802, a stator winding 805, a housing 808, a connection table 809, and an end cover. 811, permanent magnet 815, output shaft 816; the base 801 is fixed on the XZ direction static pressure guide rail assembly 9, the casing 808 is fixed on the base 801, the bearing end cover 811 is fixedly connected to the top of the casing 808, the No. 2 bearing end cover 802 It is fixedly connected to the bottom of the base 801; the output shaft 816 is placed in the middle of the casing, the upper shaft end of the output shaft 816 is rotatably connected to the casing 808 through a bearing, and the lower shaft end of the output shaft 816 is rotatably connected to the base 801 through a bearing; the stator winding 805 passes through the stator The support 806 is fixed inside the casing 808, the permanent magnet 815 is embedded on the output shaft 816 and its position corresponds to the stator winding 805;

进一步地,所述XZ向静压导轨组件9包括X轴静压导轨901及Z轴静压导轨902,X轴静压导轨901安装在机床床身1上,Z轴静压导轨902滑动连接在 X轴静压导轨901上,Z轴静压导轨902上固定XZ向精密转台8;X轴静压导轨 901与Z轴静压导轨902结构相同,Z向静压导轨包括工字形导轨90201、直线电机初级90202、直线电机次级90203及分体式溜板90204;直线电机初级90202 安装在工字形导轨90201的凹槽内,直线电机次级90203安装在分体式溜板 90204内侧下表面且其位置与直线电机初级90202相对,分体式溜板90204套在工字形导轨90201上。Further, the XZ-direction static pressure guide rail assembly 9 includes an X-axis static pressure guide rail 901 and a Z-axis static pressure guide rail 902. The X-axis static pressure guide rail 901 is installed on the machine bed 1, and the Z-axis static pressure guide rail 902 is slidably connected to the machine bed 1. On the X-axis static pressure guide rail 901, the Z-axis static pressure guide rail 902 is fixed on the XZ-direction precision turntable 8; the X-axis static pressure guide rail 901 has the same structure as the Z-axis static pressure guide rail 902, and the Z-axis static pressure guide rail includes an I-shaped guide rail 90201, a straight line The motor primary 90202, the linear motor secondary 90203 and the split slide 90204; the linear motor primary 90202 is installed in the groove of the I-shaped guide rail 90201, and the linear motor secondary 90203 is installed on the inner lower surface of the split slide 90204 and its position is the same as the The linear motor primary 90202 is opposite, and the split slide 90204 is set on the I-shaped guide rail 90201.

进一步地,所述Y向导轨组件3包括驱动电机301、十字滑块联轴器302、滚珠螺母304、滚珠丝杠306、固定导轨308、连接平板309及移动导轨310;一号底部支撑座303固定于滚珠丝杠306的上方,滚珠丝杠306上、下端分别通过一个连接到机床立柱4上;驱动电机301通过十字滑块联轴器302与滚珠丝杠306连接,滚珠螺母304与滚珠丝杠306转动连接,滚珠螺母304通过螺母座305固定在连接平板309上,连接平板309上安装Y向精密转台2;固定导轨308固定在机床立柱4上,移动导轨310与固定导轨308滑动连接。Further, the Y-direction guide rail assembly 3 includes a drive motor 301, an Oldham coupling 302, a ball nut 304, a ball screw 306, a fixed guide rail 308, a connecting plate 309 and a moving guide rail 310; the No. 1 bottom support seat 303 It is fixed above the ball screw 306. The upper and lower ends of the ball screw 306 are respectively connected to the machine tool column 4 through one; The rod 306 is connected in rotation, the ball nut 304 is fixed on the connecting plate 309 through the nut seat 305, and the Y-direction precision turntable 2 is installed on the connecting plate 309;

本发明同时提供一种电磁流耦合光学曲面精密抛光加工机床的加工方法,加工过程主要包括以下几个步骤:The invention also provides a processing method for an electromagnetic flow coupled optical curved surface precision polishing machine tool, and the processing process mainly includes the following steps:

步骤一、利用专用夹具将工件装夹至Y向精密转台上,开启机床,对机床复位,根据工件类型,将工具头角度调整到位,设置机床其他各部分初始参数值及初始位置;Step 1. Use a special fixture to clamp the workpiece to the Y-direction precision turntable, turn on the machine tool, reset the machine tool, adjust the angle of the tool head in place according to the workpiece type, and set the initial parameter values and initial positions of other parts of the machine tool;

步骤二、对工件进行在线测量,采集所需数据,进行曲面重构,获取工件测量模型;Step 2: Measure the workpiece online, collect the required data, reconstruct the surface, and obtain the workpiece measurement model;

步骤三、将工件设计模型输入机床数控系统,进行特征识别后与上一步得到的工件测量模型进行模型匹配、比较,计算出加工余量,根据其加工余量选择加工参数;Step 3: Input the workpiece design model into the machine tool numerical control system, carry out model matching and comparison with the workpiece measurement model obtained in the previous step after feature identification, calculate the machining allowance, and select the machining parameters according to the machining allowance;

步骤四、根据上一步所得加工参数进行仿真加工,判断是否会发生干涉碰撞,若存在干涉,则返回上一步重新选择加工参数;Step 4: Carry out simulation processing according to the processing parameters obtained in the previous step, and judge whether there will be interference and collision. If there is interference, return to the previous step and select the processing parameters again;

步骤五、若不存在干涉碰撞,进行数控编程,确定工具头轨迹,生成相应的数控代码;Step 5. If there is no interference collision, carry out NC programming, determine the tool head trajectory, and generate the corresponding NC code;

步骤六、进行数控加工,加工结束后,对加工后工件再次进行测量,并根据曲面重构获取测量模型;Step 6, carry out numerical control machining, after the machining is finished, measure the workpiece after machining again, and obtain the measurement model according to the surface reconstruction;

步骤六、判断步骤六的测量模型是否满足加工需求,若不满足加工要求,判断其是否可修复,若可修复,返回步骤二重新进行加。Step 6: Determine whether the measurement model in Step 6 meets the processing requirements. If it does not meet the processing requirements, determine whether it can be repaired. If it can be repaired, return to Step 2 and add it again.

实施例1Example 1

如图1所示,一种电磁流耦合光学曲面精密抛光加工机床,主要包括机床床身1、Y向精密转台2、Y向导轨组件3、机床立柱4、工具头5、角度分度机构6、集液池7、XZ向精密转台8、XZ向静压导轨组件9;其中,机床立柱4通过螺栓固定安装在机床床身1的左侧,Y向导轨组件3通过螺栓固定安装在机床立柱4的中间位置,Y向精密转台2通过螺栓固定到Y向导轨组件3的连接平板 309中间位置处;角度分度机构6中轴与工具头5的主轴外壳512上的两个安装孔过盈配合,实现工具头5与角度分度机构6的固定安装,角度分度机构6内部设有齿轮传动机构,齿轮传动机构与中轴固定链接,使角度分度机构6可通过齿轮传动机构带动工具头5整体进行俯仰运动,实现工具头5不同角度的加工;角度分度机构6通过螺栓安装在XZ向精密转台8上,XZ向精密转台8通过螺栓固定到XZ向静压导轨9的上幅板902043的中间位置处,集液池7通过焊接方式固定到机床床身1的中间位置处,位于工具头5和Y向精密转台2的下方;XZ向导轨组件9通过螺栓固定连接至机床床身1的右侧。其中,XZ向导轨组件9外加防尘罩,机床床身1上安装防尘罩,大小适中,与机床床身1相配。As shown in Figure 1, an electromagnetic flow coupled optical surface precision polishing machine tool mainly includes a machine bed 1, a Y-direction precision turntable 2, a Y-direction guide rail assembly 3, a machine tool column 4, a tool head 5, and an angle indexing mechanism 6 , liquid collecting tank 7, XZ direction precision turntable 8, XZ direction static pressure guide rail assembly 9; wherein, the machine tool column 4 is fixed and installed on the left side of the machine bed 1 by bolts, and the Y direction guide rail assembly 3 is fixed by bolts. Installed on the machine tool column In the middle position of 4, the Y-direction precision turntable 2 is fixed to the middle position of the connecting plate 309 of the Y-direction guide rail assembly 3 by bolts; the center axis of the angle indexing mechanism 6 and the two mounting holes on the main shaft shell 512 of the tool head 5 are interfering Cooperate to realize the fixed installation of the tool head 5 and the angle indexing mechanism 6. The angle indexing mechanism 6 is provided with a gear transmission mechanism, and the gear transmission mechanism is fixedly linked with the central axis, so that the angle indexing mechanism 6 can drive the tool through the gear transmission mechanism. The head 5 performs a pitching motion as a whole to realize the machining of the tool head 5 at different angles; the angle indexing mechanism 6 is installed on the XZ-direction precision turntable 8 through bolts, and the XZ-direction precision turntable 8 is fixed to the upper width of the XZ-direction static pressure guide 9 through bolts At the middle position of the plate 902043, the sump 7 is fixed to the middle position of the machine tool bed 1 by welding, and is located below the tool head 5 and the Y-direction precision turntable 2; the XZ-direction guide rail assembly 9 is fixed to the machine tool by bolts. Right side of body 1. Among them, a dust cover is added to the guide rail assembly 9 in the XZ direction, and a dust cover is installed on the machine bed 1 of a moderate size, which is matched with the machine bed 1 .

如图2至图9所示,所述工具头5具体包括电磁场发生装置、动力输入部分以及制动部分,该工具头整体结构紧凑,将电磁场发生装置全部集成到一起,电流变效应与磁流变效应的协同作用保证了加工效率与质量。As shown in FIG. 2 to FIG. 9 , the tool head 5 specifically includes an electromagnetic field generating device, a power input part and a braking part. The tool head has a compact overall structure, and integrates all the electromagnetic field generating devices. Electrorheological effect and magnetic current The synergistic effect of the variable effect ensures the processing efficiency and quality.

其中,所述动力输入部分主要包括从动件503、下端外壳505、中端外壳506、一号轴承端盖508、伺服电机509、联轴器511、主轴外壳512、一号套筒513、一号圆螺母514、一号轴承515、垫片516、外联轴517、长销519、圆柱凸轮轴 520以及旋钮527。伺服电机509输入转矩,通过联轴器511带动外联轴517旋转,外联轴517通过旋钮527及长销519带动圆柱凸轮轴520旋转,进而带动电磁场发生装置一起旋转。其中,伺服电机509通过一号紧固螺栓510固定于主轴外壳512的上方;伺服电机509通过联轴器511与外联轴517连接,联轴器511将伺服电机509产生的运动传至外联轴517上,联轴器511置于主轴外壳512内部;外联轴517底部开有三个槽,通过长销519将外联轴517与旋钮 527连接,实现旋钮527与外联轴517的共同转动;旋钮527内部有内花键,与圆柱凸轮轴520上方外花键部分配合连接,实现运动的传递;一号套筒513外圈通过紧固螺栓固定安装在主轴外壳512的下侧小孔径端内壁,内圈与一对一号轴承515的外圈过盈配合,一对一号轴承515的内圈与外联轴517过盈配合,使电磁场发生装置旋转时保持主轴外壳512静止状态;一号圆螺母514通过螺纹拧紧在圆柱凸轮轴520上方的第二段小径端,且一侧与一号轴承515侧面接触,保证一号轴承515的轴向定位;垫片516位于两个一号轴承515的中间;从动件503为一带花键的轴,并通过销504与圆柱凸轮轴520相连,当做旋转运动时,从动件503会随圆柱凸轮轴520一起旋转;下端外壳505通过一号紧固螺栓510与中端外壳506相连;中端外壳506内部通过一号轴承515与圆柱凸轮轴520配合,保证圆柱凸轮轴520加工时回转精度;一号轴承端盖508通过螺栓510固定安装到主轴外壳512的下方,用于一号轴承515的轴向定位。The power input part mainly includes a follower 503, a lower end casing 505, a middle end casing 506, a No. 1 bearing end cover 508, a servo motor 509, a coupling 511, a main shaft casing 512, a No. 1 sleeve 513, a No. Numbered round nut 514 , number one bearing 515 , washer 516 , outer coupling shaft 517 , long pin 519 , cylindrical camshaft 520 and knob 527 . The servo motor 509 inputs torque, and drives the outer coupling shaft 517 to rotate through the coupling 511. The outer coupling shaft 517 drives the cylindrical camshaft 520 to rotate through the knob 527 and the long pin 519, thereby driving the electromagnetic field generating device to rotate together. The servo motor 509 is fixed above the main shaft housing 512 by the No. 1 fastening bolt 510; the servo motor 509 is connected to the external coupling shaft 517 through the coupling 511, and the coupling 511 transmits the motion generated by the servo motor 509 to the external coupling On the shaft 517, the coupling 511 is placed inside the main shaft housing 512; the bottom of the outer coupling shaft 517 has three grooves, and the outer coupling shaft 517 is connected with the knob 527 through the long pin 519, so as to realize the joint rotation of the knob 527 and the outer coupling shaft 517 There are internal splines inside the knob 527, which is matched and connected with the external spline part above the cylindrical camshaft 520 to realize the transmission of motion; the outer ring of the No. 1 sleeve 513 is fixedly installed on the lower side of the main shaft housing 512 by tightening bolts. Small aperture end The inner wall, the inner ring and the outer ring of the pair of No. 1 bearings 515 have an interference fit, and the inner ring of the pair of No. 1 bearings 515 has an interference fit with the outer coupling shaft 517, so that when the electromagnetic field generating device rotates, the main shaft shell 512 is kept in a static state; one The round nut 514 is screwed on the small diameter end of the second section above the cylindrical camshaft 520, and one side is in contact with the side of the No. 1 bearing 515 to ensure the axial positioning of the No. 1 bearing 515; the gasket 516 is located on the two No. 1 bearings The middle of 515; the follower 503 is a shaft with a spline, and is connected to the cylindrical camshaft 520 through a pin 504. When performing a rotary motion, the follower 503 will rotate with the cylindrical camshaft 520; The fastening bolts 510 are connected with the middle end casing 506; the middle end casing 506 cooperates with the cylindrical camshaft 520 through the No. 1 bearing 515 to ensure the rotation accuracy of the cylindrical camshaft 520 during processing; the No. 1 bearing end cover 508 is fixedly installed on the The lower part of the main shaft housing 512 is used for the axial positioning of the No. 1 bearing 515 .

所述圆柱凸轮轴520顶端为多段轴,轴的顶端为外花键,旋钮527中心孔内设有内花键,圆柱凸轮轴520与旋钮527通过花键连接,旋钮527上设有三个呈120°均匀分布的槽孔,用于安装连接长销519;连接长销519一端插入旋钮527的孔内,另一端穿过外联轴517上的长槽后插入制动盘518的安装孔内。The top of the cylindrical camshaft 520 is a multi-segment shaft, the top of the shaft is an external spline, the center hole of the knob 527 is provided with an internal spline, the cylindrical camshaft 520 and the knob 527 are connected by splines, and the knob 527 is provided with three °Evenly distributed slot holes are used to install the connecting long pins 519;

所述制动部分主要包括刹车片507以及制动盘518,主要用于工具头5不同工作状态(斜置抛光与垂直抛光)之间的切换;刹车片507套接在外联轴517 的下端,上面有开有三个孔用于安装长销519,通过三个呈120°均匀分布的长销519与外联轴517连接;制动盘518空套在外联轴517上,位于刹车片507 的上方,可沿轴向移动。The braking part mainly includes a brake pad 507 and a brake disc 518, which are mainly used for switching between different working states (oblique polishing and vertical polishing) of the tool head 5; the brake pad 507 is sleeved on the lower end of the outer coupling shaft 517, There are three holes on the top for installing the long pins 519, which are connected to the outer coupling shaft 517 through three long pins 519 evenly distributed at 120°; the brake disc 518 is empty on the outer coupling shaft 517, located above the brake pads 507 , can move in the axial direction.

所述电磁场发生装置主要包括半球外壳521、辅助电极板524、多层圆柱筒 525、四个环形电极板526、四个电磁铁501、四个辅助电极支撑筒502、四个支撑套筒522以及四个支撑架523。四个电磁铁501呈90°均匀分布,分别置于四个支撑套筒522内部,四个支撑套筒522紧贴多层圆柱筒525并安装在支撑架523上,支撑架523通过一号紧固螺栓510固定安装到下端外壳505的小轴端部分;多层圆柱筒525上方为花键轴,通过螺钉连接方式固定在从动件503 上,随从动件503一起运动;环形电极板526置于多层圆柱筒525内;半球外壳521固定在下端外壳505底部,辅助电极支撑筒502紧套在半球外壳521的外侧并通过销固定,辅助电极板524固定在辅助电极支撑筒502内。The electromagnetic field generating device mainly includes a hemispherical shell 521, an auxiliary electrode plate 524, a multi-layer cylindrical cylinder 525, four annular electrode plates 526, four electromagnets 501, four auxiliary electrode support cylinders 502, four support sleeves 522 and Four support brackets 523 . The four electromagnets 501 are evenly distributed at 90°, and are respectively placed inside the four support sleeves 522. The four support sleeves 522 are close to the multi-layer cylindrical cylinder 525 and are installed on the support frame 523. The support frame 523 passes through the No. The fixing bolt 510 is fixedly installed on the small shaft end portion of the lower housing 505; the upper part of the multi-layer cylindrical cylinder 525 is a spline shaft, which is fixed on the follower 503 by means of screw connection, and moves together with the follower 503; the annular electrode plate 526 is placed Inside the multi-layer cylinder 525; the hemispherical shell 521 is fixed on the bottom of the lower shell 505, the auxiliary electrode support cylinder 502 is tightly sleeved on the outside of the hemispherical shell 521 and fixed by pins, and the auxiliary electrode plate 524 is fixed in the auxiliary electrode support cylinder 502.

如图15所示,所述工具头5在加工时可根据需要进行45°斜置抛光或者垂直抛光。在进行45°斜置抛光时,角度分度机构6将工具头整体俯仰转动45°,使抛光工具头端部半圆球45°球小圆与工件抛光表面接触,此时多层圆柱筒525 位于最下端,支撑套筒522处于45°斜置状态,支撑套筒522内电磁铁501吸附主轴外壳512发生转动,不过由于多层圆柱筒525的限位作用,支撑套筒522 保持45°斜置状态。相邻电磁铁501极性相反,朝向工件呈“N-S-N-S”分布, N极向相邻的两个S极发射磁感线,S极接收来自相邻N极的磁感线,这样的磁极分布方式使磁感线更好的集中在抛光工具头周围,保证了除抛光区域外电磁流变液的流动性。此时电磁场发生装置的多重环形电极板526与环形辅助电极 524通电,相邻极板526极性相反,相邻极板526之间形成拱桥状电场,多层圆柱筒525中最外侧环形电极板526与辅助电极524之间也形成电场。当转换为垂直抛光时首先退刀,将抛光工具头5与工件分开一定距离后,角度分度装置6 带动抛光工具头5整体旋转,使其轴线与需要抛光的平面垂直。此时,四个电磁铁501断电,电磁铁501与半球外壳521之间的电磁力小时,电磁铁支撑套筒522可自由转动,多层圆柱筒525向上运动带动电磁铁501旋转,在多层圆柱筒525与支撑架523的限位与压紧作用下,电磁铁501处于竖直状态,电磁铁轴线与抛光工具头主体轴线平行。退刀完成后,电磁制动器通电,制动盘518 与刹车片507吸合,内花键旋钮向上运动,主轴电机509低速旋转,通过外联轴517带动抛光工具头主体旋转,此时凸轮从动件503也随工具头主体旋转,圆柱凸轮轴520静止,从动件503相对旋转90°,圆柱凸轮轴520中凸轮由近休止达到远休止,随后电磁制动器断电,制动盘与518刹车片507脱离,在重力作用下制动盘518向下滑动,圆柱凸轮轴520与从动件503一起旋转,无相对运动。最后,沿Z轴方向进刀,电磁铁501与环形电极板526通电开始抛光。As shown in FIG. 15 , the tool head 5 can perform 45° oblique polishing or vertical polishing as required during processing. When 45° inclined polishing is performed, the angle indexing mechanism 6 rotates the overall pitch of the tool head by 45°, so that the hemispherical 45° spherical small circle at the end of the polishing tool head is in contact with the polishing surface of the workpiece. At this time, the multi-layer cylinder 525 is located at At the bottom end, the support sleeve 522 is inclined at 45°, the electromagnet 501 in the support sleeve 522 attracts the spindle housing 512 and rotates, but due to the limiting effect of the multi-layer cylinder 525, the support sleeve 522 is kept inclined at 45° state. Adjacent electromagnets 501 have opposite polarities, and are distributed toward the workpiece in a "N-S-N-S" distribution. The N pole emits magnetic field lines to the two adjacent S poles, and the S pole receives the magnetic field lines from the adjacent N poles. This magnetic pole distribution method The magnetic field lines are better concentrated around the polishing tool head, which ensures the fluidity of the electromagnetic rheological fluid outside the polishing area. At this time, the multiple annular electrode plates 526 of the electromagnetic field generating device are energized with the annular auxiliary electrode 524, the adjacent electrode plates 526 have opposite polarities, and an arch bridge-shaped electric field is formed between the adjacent electrode plates 526. An electric field is also formed between 526 and auxiliary electrode 524 . When converting to vertical polishing, the tool is retracted first, and the polishing tool head 5 is separated from the workpiece by a certain distance, and the angle indexing device 6 drives the polishing tool head 5 to rotate as a whole so that its axis is perpendicular to the plane to be polished. At this time, the four electromagnets 501 are powered off, the electromagnetic force between the electromagnets 501 and the hemispherical shell 521 is small, the electromagnet support sleeve 522 can rotate freely, and the upward movement of the multi-layer cylinder 525 drives the electromagnet 501 to rotate. Under the limiting and pressing action of the layer cylinder 525 and the support frame 523, the electromagnet 501 is in a vertical state, and the axis of the electromagnet is parallel to the axis of the main body of the polishing tool head. After the tool is retracted, the electromagnetic brake is energized, the brake disc 518 and the brake pad 507 are attracted, the inner spline knob moves upward, the spindle motor 509 rotates at a low speed, and the main body of the polishing tool head is driven to rotate through the outer coupling shaft 517, and the cam is driven at this time. The part 503 also rotates with the tool head body, the cylindrical camshaft 520 is stationary, the driven part 503 rotates 90° relatively, the cam in the cylindrical camshaft 520 is from near rest to far rest, then the electromagnetic brake is powered off, the brake disc and 518 brake pads 507 is disengaged, the brake disc 518 slides downward under the action of gravity, and the cylindrical camshaft 520 rotates together with the follower 503 without relative movement. Finally, the knife is fed along the Z-axis direction, and the electromagnet 501 and the ring electrode plate 526 are energized to start polishing.

如附图10所示,所述Y向精密转台3与XZ向精密转台8内部结构相同,其中,XZ向精密转台8主要包括底座801、二号轴承端盖802、二号圆螺母803、下端盖804、定子绕组805、定子支撑806、二号紧固螺栓807、外壳808、连接台809、毡圈810、端盖811、二号套筒812、二号轴承813、上端盖814、永磁体815、输出转轴816。其中,底座801通过螺纹连接的方式固定到XZ向静压导轨组件9的上幅板902043的中间位置;二号轴承端盖802用于二号轴承813 外圈的轴向定位,它通过二号紧固螺栓807与二号套筒812及底座801固定连接;二号圆螺母803用于二号轴承813内圈的轴向定位,通过螺纹拧紧在输出转轴816小端螺纹部分;下端盖804安装在底座801的上方,置于外壳808内部,通过二号紧固螺栓807与定子支撑806固定连接,保证定子的轴向位置;定子绕组805置于定子支撑806的内部,当直驱电机通电时,驱动永磁体815 旋转,永磁体815嵌在输出转轴816上,输出转轴816进而使连接台809旋转;定子支撑806置于外壳806内部,上方通过二号紧固螺栓807与上端盖814相连,下方通过二号紧固螺栓807与下端盖804相连;外壳808为整个转台的外壳,与底座801通过二号紧固螺栓807固定连接;连接台809通过二号紧固螺栓807与输出转轴816末端相连,其上方安装角度分度机构6;轴承端盖811通过紧固螺栓与二号套筒812及外壳808固定连接,保证二号轴承813外圈的轴向定位;二号轴承813有一对,安装在输出转轴816两侧的轴端,其内圈随输出转轴816、永磁体815等一起转动,外圈同二号套筒812、外壳808等保持固定;毡圈810安装在输出转轴816最小端的轴颈处,置于端盖811内部,起到密封、防尘的作用;输出转轴816置于转台中间位置,由上至下连接元件依次为毡圈810、二号圆螺母803、二号轴承813、永磁体815、二号轴承813和二号圆螺母803,输出转轴816转动,带动连接台809一起转动。该精密转台采用直驱电机直接驱动,传动误差小,能够保证传动精度。As shown in FIG. 10, the Y-direction precision turntable 3 has the same internal structure as the XZ-direction precision turntable 8, wherein the XZ-direction precision turntable 8 mainly includes a base 801, a No. 2 bearing end cover 802, a No. 2 round nut 803, a lower end Cover 804, stator winding 805, stator support 806, No. 2 fastening bolts 807, casing 808, connecting table 809, felt ring 810, end cover 811, No. 2 sleeve 812, No. 2 bearing 813, upper end cover 814, permanent magnet 815 . The output shaft 816 . Among them, the base 801 is fixed to the middle position of the upper plate 902043 of the XZ-direction static pressure guide rail assembly 9 by means of screw connection; the second bearing end cover 802 is used for the axial positioning of the outer ring of the second bearing 813, which passes through the second The fastening bolt 807 is fixedly connected with the No. 2 sleeve 812 and the base 801; the No. 2 round nut 803 is used for the axial positioning of the inner ring of the No. 2 bearing 813, and is screwed to the small end threaded part of the output shaft 816; the lower end cover 804 is installed Above the base 801, it is placed inside the casing 808, and is fixedly connected to the stator support 806 through the No. 2 fastening bolt 807 to ensure the axial position of the stator; the stator winding 805 is placed inside the stator support 806, when the direct drive motor is energized, The permanent magnet 815 is driven to rotate, the permanent magnet 815 is embedded on the output shaft 816, and the output shaft 816 further rotates the connecting table 809; the stator support 806 is placed inside the casing 806, and the upper part is connected to the upper end cover 814 through the second fastening bolt 807, and the lower part is connected to the upper end cover 814. It is connected with the lower end cover 804 through the No. 2 fastening bolt 807; the casing 808 is the casing of the entire turntable, and is fixedly connected with the base 801 through the No. 2 fastening bolt 807; the connecting table 809 is connected with the end of the output shaft 816 through the No. 2 fastening bolt 807 , the angle indexing mechanism 6 is installed above it; the bearing end cover 811 is fixedly connected with the No. 2 sleeve 812 and the outer casing 808 by fastening bolts to ensure the axial positioning of the outer ring of the No. 2 bearing 813; the No. 2 bearing 813 has a pair, which is installed On the shaft ends on both sides of the output shaft 816, the inner ring rotates with the output shaft 816, the permanent magnet 815, etc., and the outer ring is kept fixed with the No. 2 sleeve 812, the outer casing 808, etc.; the felt ring 810 is installed on the smallest end of the output shaft 816. The shaft journal is placed inside the end cover 811, which plays a role of sealing and dustproof; the output shaft 816 is placed in the middle of the turntable, and the connecting elements from top to bottom are the felt ring 810, the second round nut 803, and the second bearing. 813, the permanent magnet 815, the No. 2 bearing 813 and the No. 2 round nut 803, the output shaft 816 rotates, and drives the connecting table 809 to rotate together. The precision turntable is directly driven by a direct-drive motor, and the transmission error is small, which can ensure the transmission accuracy.

如附图11至图13所示,所述XZ向静压导轨组件9置于水平面内,安装在机床床身1右侧,主要包括X轴静压导轨901与Z轴静压导轨902,X轴静压导轨901与Z轴静压导轨902叠放,X轴静压导轨901分左右两条,通过螺栓连接方式安装在机床床身1上,Z轴静压导轨902置于X轴静压导轨901的上方,充当X轴静压导轨901的溜板,在X轴静压导轨901上滑动,Z轴静压导轨902上固定XZ向精密转台8,可随Z轴静压导轨902一起移动。X轴静压导轨901与Z轴静压导轨902结构相同,其中,Z向静压导轨包括工字形导轨90201、直线电机初级90202、直线电机次级90203及分体式溜板90204;工字形导轨90201通过螺纹连接固定安装在两个X向静压导轨的分体式溜板90104上,直线电机初级90202通过螺栓安装在工字形导轨90201的凹槽内部中间位置,直线电机次级90203通过螺纹连接方式安装在分体式溜板90204中上幅板902043的下表面中间位置处,与直线电机初级90202相对,但长度要短于直线电机初级90202,分体式溜板90204套在工字形导轨90201上。当机床工作时,借助液压系统对 XZ向静压导轨9供油,分体式溜板90204随直线电机次级90203一起相对于直线电机初级90202移动,进而沿工字形导轨90201滑动。XZ向静压导轨组件9 中溜板采用分体式结构,以Z向静压导轨上方溜板90204为例,其主要结构包括下幅板902041、侧幅板902042、上幅板902043及螺钉902044。其中下幅板 902041与侧幅板902042、侧幅板902042与上幅板902043之间均通过螺钉902044 相连,且各幅板内部开有孔路,进油孔路与回油孔路不连通,相邻幅板有专门孔路用于回油,多个单独油路为各幅板供油。As shown in FIGS. 11 to 13 , the XZ-direction static pressure guide rail assembly 9 is placed in a horizontal plane and installed on the right side of the machine bed 1 , and mainly includes an X-axis static pressure guide rail 901 and a Z-axis static pressure guide rail 902 . The axis static pressure guide rail 901 and the Z axis static pressure guide rail 902 are stacked, the X axis static pressure guide rail 901 is divided into two left and right, and is installed on the machine bed 1 by bolting, and the Z axis static pressure guide rail 902 is placed on the X axis static pressure. Above the guide rail 901, it acts as a slide for the X-axis static pressure guide rail 901, sliding on the X-axis static pressure guide rail 901, and the X-Z axis precision turntable 8 is fixed on the Z-axis static pressure guide rail 902, which can move together with the Z-axis static pressure guide rail 902 . The X-axis static pressure guide rail 901 has the same structure as the Z-axis static pressure guide rail 902, wherein the Z-axis static pressure guide rail includes an I-shaped guide rail 90201, a linear motor primary 90202, a linear motor secondary 90203 and a split slide 90204; I-shaped guide rail 90201 It is fixedly installed on the split slide 90104 of the two X-direction static pressure guide rails by screw connection, the linear motor primary 90202 is installed in the middle of the groove of the I-shaped guide rail 90201 by bolts, and the linear motor secondary 90203 is installed by screw connection. The middle position of the lower surface of the upper web 902043 in the split slide 90204 is opposite to the linear motor primary 90202, but the length is shorter than the linear motor primary 90202, and the split slide 90204 is sleeved on the I-shaped guide rail 90201. When the machine tool is working, the hydraulic system supplies oil to the XZ to the static pressure guide rail 9, the split slide 90204 moves relative to the linear motor primary 90202 together with the linear motor secondary 90203, and then slides along the I-shaped guide rail 90201. The sliding plate in the XZ-direction static pressure guide rail assembly 9 adopts a split structure. Taking the upper sliding plate 90204 of the Z-direction static pressure guide rail as an example, its main structure includes a lower plate 902041, a side plate 902042, an upper plate 902043 and screws 902044. Among them, the lower plate 902041 and the side plate 902042, the side plate 902042 and the upper plate 902043 are connected by screws 902044, and each plate has holes inside, and the oil inlet hole is not connected with the oil return hole. Adjacent webs have special holes for oil return, and multiple separate oil circuits supply oil for each web.

如附图14所示,所述Y向导轨组件3采用滑动导轨,进给方式采用丝杠螺母副,主要包括驱动电机301、十字滑块联轴器302、一号底部支撑座303、滚珠螺母304、螺母座305、滚珠丝杠306、二号底部支撑座307、固定导轨308、连接平板309及移动导轨310。其中,一号底部支撑座303固定于滚珠丝杠306 的上方,滚珠丝杠306上端与一号底部支撑座303转动连接,一号底部支撑座 303顶端为十字滑块联轴器302,滚珠丝杠306最顶端置于十字滑块联轴器302 内部,通过键连接实现丝杠的周向固定,驱动电机301输入轴置于十字滑块联轴器302的另一段,与十字滑块联轴器302固定连接,周向固定通过键连接保证,驱动电机301输入轴转动,通过十字滑块联轴器302带动滚珠丝杠螺母副进行精确移动,滚珠螺母304与滚珠丝杠306转动连接,螺母座305固定于滚珠螺母304上,二号底部支撑座307固定于滚珠丝杠306的下方,与滚珠丝杠 306转动连接,固定导轨308和移动导轨310均有两条,移动导轨310与固定导轨308滑动连接,固定导轨308固定到机床立柱4左右两侧位置,位于滚珠丝杠306的左右两边,距离合适,连接平板309通过螺纹连接分别同螺母座305、两个移动导轨310固定连接,用于安装Y向精密转台2;在固定于机床立柱4的 Y向导轨组件3中,一号底部支撑座303与二号底部支撑座307均通过螺纹连接固定于机床立柱4中间位置上,两条固定导轨308通过螺纹连接固定于机床立柱4左右两侧位置处,同滚珠丝杠306相隔合适距离。As shown in FIG. 14 , the Y-direction guide rail assembly 3 adopts a sliding guide rail, and the feeding method adopts a screw nut pair, which mainly includes a driving motor 301, an Oldham coupling 302, a No. 1 bottom support seat 303, and a ball nut 304 , nut seat 305 , ball screw 306 , No. 2 bottom support seat 307 , fixed guide rail 308 , connecting plate 309 and moving guide rail 310 . The No. 1 bottom support seat 303 is fixed above the ball screw 306, the upper end of the ball screw 306 is rotatably connected with the No. 1 bottom support seat 303, and the top of the No. 1 bottom support seat 303 is the Oldham coupling 302. The top end of the rod 306 is placed inside the Oldham coupling 302, and the circumferential fixing of the lead screw is realized through key connection. The device 302 is fixedly connected, and the circumferential fixation is ensured by the key connection. The input shaft of the driving motor 301 rotates, and the ball screw nut pair is driven to move accurately through the Oldham coupling 302. The ball nut 304 is connected with the ball screw 306 in rotation. The seat 305 is fixed on the ball nut 304, the No. 2 bottom support seat 307 is fixed under the ball screw 306, and is rotatably connected with the ball screw 306, there are two fixed guide rails 308 and two moving guide rails 310, and the moving guide rail 310 is connected with the fixed guide rail. 308 is slidably connected, and the fixed guide rails 308 are fixed to the left and right sides of the machine tool column 4, located on the left and right sides of the ball screw 306, and the distance is appropriate. When installing the Y-direction precision turntable 2; in the Y-direction guide rail assembly 3 fixed on the machine tool column 4, the No. 1 bottom support seat 303 and the No. 2 bottom support seat 307 are both fixed on the middle position of the machine tool column 4 through screw connection, and the two The fixed guide rails 308 are fixed on the left and right sides of the machine tool column 4 through screw connections, and are spaced apart from the ball screws 306 by a suitable distance.

实施例2Example 2

如图16所示,一种电磁流耦合光学曲面精密抛光加工机床的加工方法,加工过程主要包括以下几个步骤:As shown in Figure 16, a processing method for an electromagnetic flow coupled optical surface precision polishing machine tool, the processing process mainly includes the following steps:

(1)利用专用夹具将毛坯或半成品装夹至Y向精密转台上,开启机床,对机床复位,根据加工毛坯类型,将工具头角度调整到位,对机床各部分进行校对检查,设置机床其他各部分初始参数值及初始位置。(1) Use a special fixture to clamp the blank or semi-finished product on the Y-direction precision turntable, turn on the machine tool, reset the machine tool, adjust the angle of the tool head in place according to the type of machining blank, check all parts of the machine tool, and set other machine tools. Some initial parameter values and initial positions.

(2)对所加工毛坯进行精确的在线测量,采集所需数据,进行曲面重构,获取毛坯测量模型。(2) Perform accurate online measurement of the processed blank, collect the required data, reconstruct the surface, and obtain the blank measurement model.

(3)将毛坯设计模型输入机床数控系统,进行特征识别后与上一步得到的毛坯的测量模型进行模型匹配、比较,得出毛坯的测量模型与设计模型之间的超差值,即加工余量,根据其加工余量选择合适的加工参数。(3) Input the blank design model into the CNC system of the machine tool, carry out model matching and comparison with the measurement model of the blank obtained in the previous step after feature recognition, and obtain the excess difference between the measurement model of the blank and the design model, that is, the machining surplus select the appropriate machining parameters according to its machining allowance.

(4)根据上一步所得加工参数进行仿真加工,判断是否会发生干涉碰撞,若存在干涉,则返回上一步重新选择加工参数。(4) Carry out simulation processing according to the processing parameters obtained in the previous step, and judge whether there will be interference and collision. If there is interference, return to the previous step and select the processing parameters again.

(5)若不存在干涉碰撞,进行相关数控编程,确定工具头轨迹,进而生成相应的数控代码,等待加工。(5) If there is no interference collision, carry out relevant numerical control programming, determine the tool head trajectory, and then generate the corresponding numerical control code, waiting for processing.

(6)将上一步所获得的加工程序运行,开始实际加工.加工结束后,对加工后工件再次进行精密测量,并根据曲面重构获取测量模型。(6) Run the machining program obtained in the previous step, and start the actual machining. After the machining, the workpiece after machining is precisely measured again, and the measurement model is obtained according to the surface reconstruction.

(7)判断该测量模型是否满足加工需求,若不满足加工要求,判断其是否可修复,若可修复,返回步骤(2)重新进行加工。(7) Determine whether the measurement model meets the processing requirements, and if it does not meet the processing requirements, determine whether it can be repaired, and if it can be repaired, return to step (2) to re-process.

(8)若加工后成品满足加工需求或者不满足加工需求且不可修复,则结束加工。(8) If the finished product after processing meets the processing requirements or fails to meet the processing requirements and cannot be repaired, the processing is terminated.

Claims (8)

1. An electromagnetic flow coupling optical curved surface precision polishing processing machine tool is characterized by comprising a machine tool body (1), a Y-direction precision turntable (2), a Y-direction guide rail assembly (3), a machine tool upright post (4), a tool head (5), an angle indexing mechanism (6), a liquid collecting tank (7), an XZ-direction precision turntable (8) and an XZ-direction static pressure guide rail assembly (9); the machine tool upright post (4) is fixed on the machine tool body (1), the Y-direction guide rail assembly (3) is fixed on the machine tool upright post (4), and the Y-direction precision rotary table (2) is fixed on the Y-direction guide rail assembly (3); the tool head (5) is fixed on the angle indexing mechanism (6), and the tool head (5) is driven by the angle indexing mechanism (6) to perform pitching motion; the angle indexing mechanism (6) is fixed on an XZ-direction precision turntable (8), the XZ-direction precision turntable (8) is fixed on an XZ-direction hydrostatic guide rail assembly (9), and the XZ-direction guide rail assembly (9) is fixed on the machine tool body (1); the liquid collecting pool (7) is fixed on the machine tool body (1) and is positioned below the tool head (5) and the Y-direction precision rotary table (2);
the tool head (5) comprises an electromagnetic field generating device, a power input part and a braking part; the power input part comprises a shell component, a servo motor (509), a driven part (503), an outer coupling (517), a cylindrical cam shaft (520) and a knob (527); the servo motor (509) is fixed above the shell component, and the outer coupling (517), the knob (527), the cylindrical cam shaft (520) and the driven piece (503) are all arranged in the shell component; the servo motor (509) is connected with an outer coupling (517) through a coupling (511), the outer coupling (517) is rotatably connected with the shell assembly through a bearing, the bottom of the outer coupling (517) is connected with the knob (527) through a long pin (519), the upper end of the cylindrical cam shaft (520) is connected with the inside of the knob (527) through a spline, and the driven piece (503) is connected with the lower end of the cylindrical cam shaft (520) through a pin (504); the brake part comprises a brake pad (507) and a brake disc (518), wherein the brake pad (507) is sleeved at the lower end of the outer coupling (517) and is in pin connection with the outer coupling (517); the brake disc (518) is sleeved on the outer coupling (517) in an empty mode and located above the brake pad (507), and the brake disc (518) penetrates through a long groove in the outer coupling (517) through a connecting long pin and then is connected with the brake disc (518); the electromagnetic field generating device is arranged at the bottom of the power input part.
2. The electromagnetic flow coupling optical curved surface precision finishing machine tool according to claim 1, characterized in that the center shaft of the angle indexing mechanism (6) is in interference fit with the mounting hole on the tool head (5), and a gear transmission mechanism is arranged inside the angle indexing mechanism (6), and the gear transmission mechanism is fixed with the center shaft to drive the tool head (5) to perform pitching motion integrally.
3. The electromagnetic flow coupling optical curved surface precision finishing machine tool as claimed in claim 1, wherein said housing assembly comprises a lower end housing (505), a middle end housing (506), a first bearing end cap (508), a spindle housing (512), a first sleeve (513), a first round nut (514); the servo motor (509) is fixed above the spindle housing (512) through a fastening bolt; the outer ring of the first sleeve (513) is mounted on the inner wall of the small-aperture end of the lower side of the main shaft shell (512) through a fastening bolt, and the inner ring of the first sleeve is connected with the outer coupling (517) through a first bearing (515); the first round nut (514) is screwed at the second section small-diameter end above the cylindrical camshaft (520) and is in contact with the first bearing (515) to axially position the first bearing (515); the inner side of the middle end shell (506) is connected with a cylindrical camshaft (520) through a bearing, and the lower end shell (505) is connected with the middle end shell (506) through a fastening bolt; a first bearing end cover (508) is fixedly installed below the main shaft shell (512) through bolts and used for axially positioning a first bearing (515).
4. The electromagnetic flow coupling optical curved surface precision finishing machine tool according to claim 1, characterized in that the electromagnetic field generating device comprises a hemispherical shell (521), an auxiliary electrode plate (524), a multi-layer cylindrical barrel (525), four annular electrode plates (526), four electromagnets (501), four auxiliary electrode supporting barrels (502), four supporting sleeves (522) and four supporting frames (523); the four electromagnets (501) are uniformly distributed at 90 degrees and are respectively arranged in the four supporting sleeves (522), the four supporting sleeves (522) are tightly attached to the multilayer cylindrical barrel (525) and are arranged on a supporting frame (523), and the supporting frame (523) is fixed at the lower end of the shell component; the multilayer cylindrical barrel (525) is fixed on the driven part (503); the annular electrode plate (526) is arranged in the multilayer cylindrical barrel (525); the hemispherical shell (521) is fixed on the shell component, the auxiliary electrode supporting cylinder (502) is tightly sleeved on the outer side of the hemispherical shell (521) and connected through a pin, and the auxiliary electrode plate (524) is fixed in the auxiliary electrode supporting cylinder (502).
5. An electromagnetic flow coupling optical curved surface precision finishing machine tool as claimed in claim 1, characterized in that said Y-direction precision turret 3 is identical in structure to the XZ-direction precision turret (8); the XZ-direction precision turntable (8) comprises a base (801), a second bearing end cover (802), a stator winding (805), a shell (808), a connecting table (809), an end cover (811), a permanent magnet (815) and an output rotating shaft (816); the base (801) is fixed on the XZ-direction hydrostatic guideway assembly (9), the shell (808) is fixed on the base (801), the bearing end cover (811) is fixedly connected to the top of the shell (808), and the second bearing end cover (802) is fixedly connected with the bottom of the base (801); the output rotating shaft (816) is arranged in the middle of the inside of the shell, the upper shaft end of the output rotating shaft (816) is rotatably connected with the shell (808) through a bearing, and the lower shaft end of the output rotating shaft (816) is rotatably connected with the base (801) through a bearing; the stator winding (805) is fixed inside the shell (808) through a stator support 806, and the permanent magnet (815) is embedded on the output rotating shaft (816) and corresponds to the stator winding (805); the top end of the output rotating shaft (816) is fixedly connected with a connecting table (809), and the angle indexing mechanism (6) is arranged above the connecting table (809).
6. The electromagnetic flow coupling optical curved surface precision finishing machine tool as claimed in claim 1, characterized in that said XZ-direction hydrostatic guideway assembly (9) comprises an X-axis hydrostatic guideway (901) and a Z-axis hydrostatic guideway (902), the X-axis hydrostatic guideway (901) is installed on the machine bed (1), the Z-axis hydrostatic guideway (902) is slidably connected to the X-axis hydrostatic guideway (901), and the XZ-direction precision turntable (8) is fixed on the Z-axis hydrostatic guideway (902); the X-axis static pressure guide rail (901) and the Z-axis static pressure guide rail (902) have the same structure, and the Z-direction static pressure guide rail comprises an I-shaped guide rail (90201), a linear motor primary (90202), a linear motor secondary (90203) and a split slide carriage (90204); the linear motor primary (90202) is installed in a groove of the I-shaped guide rail (90201), the linear motor secondary (90203) is installed on the lower surface of the inner side of the split slide carriage (90204) and is opposite to the linear motor primary (90202), and the split slide carriage (90204) is sleeved on the I-shaped guide rail (90201).
7. An electromagnetic flow coupling optical curved surface precision finishing machine tool as claimed in claim 1, characterized in that said Y-guide rail assembly (3) comprises a driving motor (301), an oldham coupling (302), a ball nut (304), a ball screw (306), a fixed rail (308), a connecting plate (309) and a moving rail (310); the first bottom support seat 303 is fixed above a ball screw (306), and the upper end and the lower end of the ball screw (306) are respectively connected to a machine tool upright post (4) through one; the driving motor (301) is connected with a ball screw (306) through an Oldham coupling (302), a ball nut (304) is rotationally connected with the ball screw (306), the ball nut (304) is fixed on a connecting flat plate (309) through a nut seat (305), and a Y-direction precision turntable (2) is arranged on the connecting flat plate (309); the fixed guide rail (308) is fixed on the machine tool upright post (4), and the movable guide rail (310) is connected with the fixed guide rail (308) in a sliding way.
8. A method as claimed in claim 1, wherein the method comprises the steps of:
clamping a workpiece on a Y-direction precision rotary table by using a special fixture, starting a machine tool, resetting the machine tool, adjusting the angle of a tool head to a proper position according to the type of the workpiece, and setting initial parameter values and initial positions of other parts of the machine tool;
secondly, performing on-line measurement on the workpiece, collecting required data, performing curved surface reconstruction, and obtaining a workpiece measurement model;
inputting the workpiece design model into a machine tool numerical control system, performing model matching and comparison with the workpiece measurement model obtained in the previous step after feature recognition, calculating machining allowance, and selecting machining parameters according to the machining allowance;
step four, carrying out simulation machining according to the machining parameters obtained in the previous step, judging whether interference collision occurs or not, and returning to the previous step to reselect the machining parameters if interference exists;
step five, if interference collision does not exist, performing numerical control programming, determining the track of the tool head, and generating a corresponding numerical control code;
step six, carrying out numerical control machining, measuring the machined workpiece again after machining is finished, and obtaining a measurement model according to curved surface reconstruction;
and step six, judging whether the measurement model in the step six meets the processing requirement, if not, judging whether the measurement model can be repaired, and if so, returning to the step two for adding again.
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