CN113427325A - Electromagnetic current coupling optical curved surface precision polishing machining tool and machining method - Google Patents

Abstract

The invention discloses an electromagnetic flow coupling optical curved surface precision polishing processing machine tool and a processing method, which solve the problem that the processing quality and the processing efficiency of a complex curved surface optical element cannot be simultaneously ensured in the processing process, and comprise a machine tool body, a Y-direction precision turntable, a Y-direction guide rail assembly, a machine tool upright post, a tool head, an angle indexing mechanism, a liquid collecting tank, an XZ-direction precision turntable and an XZ-direction static pressure guide rail assembly; the machine tool upright post is fixed on a machine tool body, the Y-direction guide rail assembly is fixed on the machine tool upright post, and the Y-direction precision rotary table is fixed on the Y-direction guide rail assembly; the tool head is fixed on the angle indexing mechanism, and the angle indexing mechanism drives the tool head to perform pitching motion; the angle indexing mechanism is fixed on an XZ-direction precise rotary table which is fixed on an XZ-direction static pressure guide rail, and the XZ-direction guide rail assembly is fixed on a machine tool body; the liquid collecting tank is fixed on the machine tool body and is positioned below the tool head and the Y-direction precision rotary table.

Description

Electromagnetic current coupling optical curved surface precision polishing machining tool and machining method

Technical Field

The invention belongs to the technical field of mechanical manufacturing, and particularly relates to an electromagnetic flow coupling optical curved surface precision polishing processing machine tool and a processing method thereof.

Background

With the development and wide application of optical technology, the requirements for the precision of the machined surface shape and the surface quality of the surface of an optical element are higher and higher, and the material of the optical element is gradually developed towards the difficult-to-machine material with the characteristic of hardness and brittleness. The polishing efficiency is not high due to the limitation of self conditions in the processing of optical elements such as ultrasonic polishing, ion beam polishing, air bag polishing and the like, and meanwhile, the processing of a small-curvature optical surface cannot be realized. The electromagnetic rheological cooperative polishing technology based on the composite superposition of the electrorheological polishing effect and the magnetorheological polishing effect has the advantages of fast response, large yield stress and the like, can ensure the uniformity and stability of abrasive distribution, effectively reduce the surface roughness, obtain elements with good surface processing quality and small subsurface damage, and provides a new solution for the processing of complex free-form surface optical elements. Therefore, the invention provides a novel polishing machine tool design and processing method, which aims to solve the problem that the processing quality and the processing efficiency of the complex curved surface optical element cannot be simultaneously ensured in the processing process.

Disclosure of Invention

The invention provides an electromagnetic flow coupling optical curved surface precision polishing processing machine tool and a processing method thereof, aiming at solving the problems of processing complex optical curved surface elements by processing methods such as ultrasonic polishing, ion beam polishing, airbag polishing and the like and solving the problem that the processing quality and the processing efficiency of the complex curved surface optical elements cannot be simultaneously ensured in the processing process.

The technical scheme adopted by the invention is as follows, and the attached drawings are combined:

an electromagnetic flow coupling optical curved surface precision polishing processing machine tool comprises a machine tool body 1, a Y-direction precision rotary table 2, a Y-direction guide rail assembly 3, a machine tool upright post 4, a tool head 5, an angle indexing mechanism 6, a liquid collecting tank 7, an XZ-direction precision rotary table 8 and an XZ-direction static pressure guide rail assembly 9; the machine tool upright post 4 is fixed on the machine tool body 1, the Y-direction guide rail component 3 is fixed on the machine tool upright post 4, and the Y-direction precision turntable 2 is fixed on the Y-direction guide rail component 3; the tool head 5 is fixed on the angle indexing mechanism 6, and the tool head 5 is driven by the angle indexing mechanism 6 to perform pitching motion; the angle indexing mechanism 6 is fixed on an XZ-direction precision turntable 8, the XZ-direction precision turntable 8 is fixed on an XZ-direction static pressure guide rail 9, and the XZ-direction guide rail assembly 9 is fixed on the machine tool body 1; the liquid collecting tank 7 is fixed on the machine tool body 1 and is positioned below the tool head 5 and the Y-direction precision rotary table 2.

Furthermore, a center shaft of the angle indexing mechanism 6 is in interference fit with a mounting hole in the tool head 5, a gear transmission mechanism is arranged inside the angle indexing mechanism 6, and the gear transmission mechanism is fixed with the center shaft and drives the tool head 5 to perform pitching motion integrally.

Further, the tool head 5 includes an electromagnetic field generating device, a power input portion, and a braking portion; the power input section comprises a housing assembly, a servo motor 509, a driven member 503, an outer coupling 517, a cylindrical cam shaft 520 and a knob 527; the servo motor 509 is fixed above the housing assembly, and the outer coupling 517, the knob 527, the cylindrical cam shaft 520 and the driven member 503 are all arranged inside the housing assembly; the servo motor 509 is connected with an outer coupling 517 through a coupling 511, the outer coupling 517 is rotatably connected with the housing assembly through a bearing, the bottom of the outer coupling 517 is connected with a knob 527 through a long pin 519, the upper end of the cylindrical cam shaft 520 is connected with the inside of the knob 527 through a spline, and the driven part 503 is connected with the lower end of the cylindrical cam shaft 520 through a pin 504; the brake part comprises a brake pad 507 and a brake disc 518, wherein the brake pad 507 is sleeved at the lower end of the outer coupling 517 and is in pin connection with the outer coupling 517; the brake disc 518 is sleeved on the outer coupling 517 in an empty mode and located above the brake pad 507, and the brake disc 518 penetrates through a long groove in the outer coupling 517 through a connecting long pin and then is connected with the brake disc 518; the electromagnetic field generating device is arranged at the bottom of the power input part.

Preferably, the housing assembly comprises a lower end housing 505, a middle end housing 506, a first bearing end cover 508, a main shaft housing 512, a first sleeve 513 and a first round nut 514; the servo motor 509 is fixed above the spindle housing 512 through a fastening bolt; the outer ring of the first sleeve 513 is mounted on the inner wall of the small-bore end at the lower side of the main shaft shell 512 through a fastening bolt, and the inner ring is connected with an outer coupling 517 through a first bearing 515; the first round nut 514 is screwed on the second section small-diameter end above the cylindrical camshaft 520 and contacts with the first bearing 515 to axially position the first bearing 515; the inner side of the middle end shell 506 is connected with a cylindrical camshaft 520 through a bearing, and the lower end shell 505 is connected with the middle end shell 506 through a fastening bolt; bearing end cover 508 is fixedly mounted to the underside of spindle housing 512 by bolts for axial positioning of bearing 515.

Further, the electromagnetic field generating device comprises a hemispherical shell 521, an auxiliary electrode plate 524, a multi-layer cylindrical barrel 525, four annular electrode plates 526, four electromagnets 501, four auxiliary electrode supporting barrels 502, four supporting sleeves 522 and four supporting frames 523; the four electromagnets 501 are uniformly distributed at 90 degrees and are respectively arranged in the four supporting sleeves 522, the four supporting sleeves 522 are tightly attached to the multilayer cylindrical barrel 525 and are arranged on a supporting frame 523, and the supporting frame 523 is fixed at the lower end of the shell component; the multilayer cylindrical barrel 525 is fixed on the driven part 503; the annular electrode plate 526 is arranged in the multilayer cylindrical barrel 525; a hemispherical housing 521 is fixed to the housing assembly, an auxiliary electrode supporting cylinder 502 is tightly fitted to the outside of the hemispherical housing 521 and connected by a pin 504, and an auxiliary electrode plate 524 is fixed in the auxiliary electrode supporting cylinder 502.

Further, the Y-direction precision rotary table 3 and the XZ-direction precision rotary table 8 have the same structure; the XZ-direction precision turntable 8 comprises a base 801, a second bearing end cover 802, a stator winding 805, a shell 808, a connecting table 809, an end cover 811, a permanent magnet 815 and an output rotating shaft 816; a base 801 is fixed on the XZ-direction hydrostatic guideway assembly 9, a shell 808 is fixed on the base 801, a bearing end cover 811 is fixedly connected to the top of the shell 808, and a second bearing end cover 802 is fixedly connected with the bottom of the base 801; the output rotating shaft 816 is arranged in the middle of the inside of the shell, the upper shaft end of the output rotating shaft 816 is rotatably connected with the shell 808 through a bearing, and the lower shaft end of the output rotating shaft 816 is rotatably connected with the base 801 through a bearing; stator winding 805 is fixed inside casing 808 through stator support 806, and permanent magnet 815 is embedded on output rotating shaft 816 and its position corresponds to stator winding 805; the top end of the output rotating shaft 816 is fixedly connected with a connecting table 809, and the angle indexing mechanism 6 is arranged above the connecting table 809.

Further, the XZ-direction hydrostatic guideway assembly 9 comprises an X-axis hydrostatic guideway 901 and a Z-axis hydrostatic guideway 902, the X-axis hydrostatic guideway 901 is installed on the machine tool body 1, the Z-axis hydrostatic guideway 902 is connected to the X-axis hydrostatic guideway 901 in a sliding manner, and an XZ-direction precision turntable 8 is fixed on the Z-axis hydrostatic guideway 902; the X-axis static pressure guide rail 901 and the Z-axis static pressure guide rail 902 have the same structure, and the Z-direction static pressure guide rail comprises an I-shaped guide rail 90201, a linear motor primary 90202, a linear motor secondary 90203 and a split slide carriage 90204; the primary linear motor 90202 is arranged in a groove of the I-shaped guide rail 90201, the secondary linear motor 90203 is arranged on the lower surface of the inner side of the split slide carriage 90204 and is opposite to the primary linear motor 90202, and the split slide carriage 90204 is sleeved on the I-shaped guide rail 90201.

Further, the Y-guide rail assembly 3 includes a driving motor 301, an oldham coupling 302, a ball nut 304, a ball screw 306, a fixed rail 308, a connection plate 309 and a moving rail 310; the first bottom support base 303 is fixed above the ball screw 306, and the upper end and the lower end of the ball screw 306 are respectively connected to the machine tool upright post 4 through one ball; the driving motor 301 is connected with a ball screw 306 through an Oldham coupling 302, a ball nut 304 is rotationally connected with the ball screw 306, the ball nut 304 is fixed on a connecting flat plate 309 through a nut seat 305, and the Y-direction precision turntable 2 is arranged on the connecting flat plate 309; the fixed guide rail 308 is fixed on the machine tool column 4, and the movable guide rail 310 is slidably connected with the fixed guide rail 308.

The invention also provides a processing method of the electromagnetic current coupling optical curved surface precision polishing processing machine tool, and the processing process mainly comprises the following steps:

clamping a workpiece on a Y-direction precision rotary table by using a special fixture, starting a machine tool, resetting the machine tool, adjusting the angle of a tool head to a proper position according to the type of the workpiece, and setting initial parameter values and initial positions of other parts of the machine tool;

secondly, performing on-line measurement on the workpiece, collecting required data, performing curved surface reconstruction, and obtaining a workpiece measurement model;

inputting the workpiece design model into a machine tool numerical control system, performing model matching and comparison with the workpiece measurement model obtained in the previous step after feature recognition, calculating machining allowance, and selecting machining parameters according to the machining allowance;

step four, carrying out simulation machining according to the machining parameters obtained in the previous step, judging whether interference collision occurs or not, and returning to the previous step to reselect the machining parameters if interference exists;

step five, if interference collision does not exist, performing numerical control programming, determining the track of the tool head, and generating a corresponding numerical control code;

step six, carrying out numerical control machining, measuring the machined workpiece again after machining is finished, and obtaining a measurement model according to curved surface reconstruction;

and step six, judging whether the measurement model in the step six meets the processing requirement, if not, judging whether the measurement model can be repaired, and if so, returning to the step two for adding again.

The invention has the advantages that:

1. the machine tool can polish both free curved surfaces and large planes, and realizes the conversion between point polishing and large plane polishing modes by skillfully utilizing the cylindrical cam structure and the indexing angle device, thereby having better flexibility and more outstanding surface area processing capability.

2. According to the invention, electrorheological polishing and magnetorheological polishing are combined, and the distribution of power lines and magnetic lines is more compact by the arrangement mode of the positive pole and the negative pole and the arrangement mode of the NS pole, so that the stability and the rigidity of the flexible polishing tool head are ensured.

3. The design of the tool head of the machine tool and the design of other parts of the machine tool expand the application of the electrorheological and magnetorheological composite polishing technology, and provide a new method and thought for the combination of the electrorheological and magnetorheological composite polishing technology.

Drawings

FIG. 1 is a schematic view of the overall structure of a machine tool

FIG. 2 is an isometric view of a tool head

FIG. 3 is a schematic diagram of the internal structure of the tool system

FIG. 4 is a schematic view of a partial structure of the interior of the tool system

FIG. 5 is a schematic view of a part of the structure of the magnetic field generator and the electric field generator

FIG. 6 is a schematic view of a cylindrical camshaft in a tool head

FIG. 7 is a schematic view of a driven member of a tool head

FIG. 8 is a schematic view of the structure of the outer coupling in the tool head

FIG. 9 is a partial view of the power input portion of the tool bit

FIG. 10 is a schematic view of the internal structure of the XZ-direction precision turntable

FIG. 11 is a schematic view of the structure of an XZ-direction hydrostatic guideway

FIG. 12 is a schematic view of a Z-direction hydrostatic guideway

FIG. 13 is a schematic view of a split slide carriage in a Z-direction hydrostatic guideway

FIG. 14 is a schematic view of the structure of the Y-direction rail assembly

FIG. 15 is a schematic view showing the distribution of magnetic poles during polishing with the tool head tilted

FIG. 16 is a flow chart of the operation of the machine tool

In the figure:

1. a machine tool body; 2. a Y-direction precision turntable; 3. a Y-direction guide rail assembly; 4. a machine tool upright post; 5. a tool head; 6. an angle conversion device; 7. a liquid collecting tank; 8. an XZ-direction precision turntable; 9. an XZ-direction hydrostatic guideway assembly; 501. an electromagnet; 502. an auxiliary electrode support cylinder; 503. a driven member; 504. a pin; 505. a lower end housing; 506. a middle-end housing; 507. a brake pad; 508. a first bearing end cover; 509. a servo motor; 510. a first fastening bolt; 511. a coupling; 512. a spindle housing; 513. a first sleeve; 514. a round nut; 515. a first bearing; 516. a gasket; 517. an outer coupling; 518. a brake disc; 519. a long pin; 520. a cylindrical camshaft; 521. a hemispherical shell; 522. a support sleeve; 523. a support frame; 524. an auxiliary electrode plate; 525. a plurality of layers of cylindrical barrels; 526. an annular electrode plate; 801. a base; 802. a second bearing end cover; 803. a second round nut; 804. a lower end cover; 805. a stator winding; 806. a stator support; 807. a second fastening bolt; 808. a housing; 809. a connecting table; 810. a felt ring; 811. an end cap; 812. a second sleeve; 813. a second bearing; 814. an upper end cover; 815. a permanent magnet; 816. a shaft; 901. an X-axis hydrostatic guideway; 902. a Z-axis hydrostatic guideway; 90201. an I-shaped guide rail; 90202. a linear motor primary; 90203. a linear motor secondary; 90204. a split slide carriage; 902041, lower web; 902042, side panels; 902043, upper web; 902044, screws; 301. a drive motor; 302. an Oldham coupling; 303. a first bottom support seat; 304. a ball nut; 305. a nut seat; 306. a ball screw; 307. a second bottom support seat; 308. fixing the guide rail; 309. connecting the flat plates; 310. the guide rail is moved.

Detailed Description

The following further describes the embodiments of the present invention with reference to the drawings.

An electromagnetic flow coupling optical curved surface precision polishing processing machine tool comprises a machine tool body 1, a Y-direction precision rotary table 2, a Y-direction guide rail assembly 3, a machine tool upright post 4, a tool head 5, an angle indexing mechanism 6, a liquid collecting tank 7, an XZ-direction precision rotary table 8 and an XZ-direction static pressure guide rail assembly 9; the machine tool upright post 4 is fixed on the machine tool body 1, the Y-direction guide rail component 3 is fixed on the machine tool upright post 4, and the Y-direction precision turntable 2 is fixed on the Y-direction guide rail component 3; the tool head 5 is fixed on the angle indexing mechanism 6, and the tool head 5 is driven by the angle indexing mechanism 6 to perform pitching motion; the angle indexing mechanism 6 is fixed on an XZ-direction precision turntable 8, the XZ-direction precision turntable 8 is fixed on an XZ-direction static pressure guide rail 9, and the XZ-direction guide rail assembly 9 is fixed on the machine tool body 1; the liquid collecting tank 7 is fixed on the machine tool body 1 and is positioned below the tool head 5 and the Y-direction precision rotary table 2.

Furthermore, a center shaft of the angle indexing mechanism 6 is in interference fit with a mounting hole in the tool head 5, a gear transmission mechanism is arranged inside the angle indexing mechanism 6, and the gear transmission mechanism is fixed with the center shaft and drives the tool head 5 to perform pitching motion integrally.

Further, the tool head 5 includes an electromagnetic field generating device, a power input portion, and a braking portion; the power input section comprises a housing assembly, a servo motor 509, a driven member 503, an outer coupling 517, a cylindrical cam shaft 520 and a knob 527; the servo motor 509 is fixed above the housing assembly, and the outer coupling 517, the knob 527, the cylindrical cam shaft 520 and the driven member 503 are all arranged inside the housing assembly; the servo motor 509 is connected with an outer coupling 517 through a coupling 511, the outer coupling 517 is rotatably connected with the housing assembly through a bearing, the bottom of the outer coupling 517 is connected with a knob 527 through a long pin 519, the upper end of the cylindrical cam shaft 520 is connected with the inside of the knob 527 through a spline, and the driven part 503 is connected with the lower end of the cylindrical cam shaft 520 through a pin 504; the brake part comprises a brake pad 507 and a brake disc 518, wherein the brake pad 507 is sleeved at the lower end of the outer coupling 517 and is in pin connection with the outer coupling 517; the brake disc 518 is sleeved on the outer coupling 517 in an empty mode and located above the brake pad 507, and the brake disc 518 penetrates through a long groove in the outer coupling 517 through a connecting long pin and then is connected with the brake disc 518; the electromagnetic field generating device is arranged at the bottom of the power input part.

Preferably, the housing assembly comprises a lower end housing 505, a middle end housing 506, a first bearing end cover 508, a main shaft housing 512, a first sleeve 513 and a first round nut 514; the servo motor 509 is fixed above the spindle housing 512 through a fastening bolt; the outer ring of the first sleeve 513 is mounted on the inner wall of the small-bore end at the lower side of the main shaft shell 512 through a fastening bolt, and the inner ring is connected with an outer coupling 517 through a first bearing 515; the first round nut 514 is screwed on the second section small-diameter end above the cylindrical camshaft 520 and contacts with the first bearing 515 to axially position the first bearing 515; the inner side of the middle end shell 506 is connected with a cylindrical camshaft 520 through a bearing, and the lower end shell 505 is connected with the middle end shell 506 through a fastening bolt; bearing end cover 508 is fixedly mounted to the underside of spindle housing 512 by bolts for axial positioning of bearing 515.

Further, the electromagnetic field generating device comprises a hemispherical shell 521, an auxiliary electrode plate 524, a multi-layer cylindrical barrel 525, four annular electrode plates 526, four electromagnets 501, four auxiliary electrode supporting barrels 502, four supporting sleeves 522 and four supporting frames 523; the four electromagnets 501 are uniformly distributed at 90 degrees and are respectively arranged in the four supporting sleeves 522, the four supporting sleeves 522 are tightly attached to the multilayer cylindrical barrel 525 and are arranged on a supporting frame 523, and the supporting frame 523 is fixed at the lower end of the shell component; the multilayer cylindrical barrel 525 is fixed on the driven part 503; the annular electrode plate 526 is arranged in the multilayer cylindrical barrel 525; a hemispherical housing 521 is fixed to the housing assembly, an auxiliary electrode supporting cylinder 502 is tightly fitted to the outside of the hemispherical housing 521 and connected by a pin 504, and an auxiliary electrode plate 524 is fixed in the auxiliary electrode supporting cylinder 502.

Further, the Y-direction precision rotary table 3 and the XZ-direction precision rotary table 8 have the same structure; the XZ-direction precision turntable 8 comprises a base 801, a second bearing end cover 802, a stator winding 805, a shell 808, a connecting table 809, an end cover 811, a permanent magnet 815 and an output rotating shaft 816; a base 801 is fixed on the XZ-direction hydrostatic guideway assembly 9, a shell 808 is fixed on the base 801, a bearing end cover 811 is fixedly connected to the top of the shell 808, and a second bearing end cover 802 is fixedly connected with the bottom of the base 801; the output rotating shaft 816 is arranged in the middle of the inside of the shell, the upper shaft end of the output rotating shaft 816 is rotatably connected with the shell 808 through a bearing, and the lower shaft end of the output rotating shaft 816 is rotatably connected with the base 801 through a bearing; stator winding 805 is fixed inside casing 808 through stator support 806, and permanent magnet 815 is embedded on output rotating shaft 816 and its position corresponds to stator winding 805; the top end of the output rotating shaft 816 is fixedly connected with a connecting table 809, and the angle indexing mechanism 6 is arranged above the connecting table 809.

Further, the XZ-direction hydrostatic guideway assembly 9 comprises an X-axis hydrostatic guideway 901 and a Z-axis hydrostatic guideway 902, the X-axis hydrostatic guideway 901 is installed on the machine tool body 1, the Z-axis hydrostatic guideway 902 is connected to the X-axis hydrostatic guideway 901 in a sliding manner, and an XZ-direction precision turntable 8 is fixed on the Z-axis hydrostatic guideway 902; the X-axis static pressure guide rail 901 and the Z-axis static pressure guide rail 902 have the same structure, and the Z-direction static pressure guide rail comprises an I-shaped guide rail 90201, a linear motor primary 90202, a linear motor secondary 90203 and a split slide carriage 90204; the primary linear motor 90202 is arranged in a groove of the I-shaped guide rail 90201, the secondary linear motor 90203 is arranged on the lower surface of the inner side of the split slide carriage 90204 and is opposite to the primary linear motor 90202, and the split slide carriage 90204 is sleeved on the I-shaped guide rail 90201.

Further, the Y-guide rail assembly 3 includes a driving motor 301, an oldham coupling 302, a ball nut 304, a ball screw 306, a fixed rail 308, a connection plate 309 and a moving rail 310; the first bottom support base 303 is fixed above the ball screw 306, and the upper end and the lower end of the ball screw 306 are respectively connected to the machine tool upright post 4 through one ball; the driving motor 301 is connected with a ball screw 306 through an Oldham coupling 302, a ball nut 304 is rotationally connected with the ball screw 306, the ball nut 304 is fixed on a connecting flat plate 309 through a nut seat 305, and the Y-direction precision turntable 2 is arranged on the connecting flat plate 309; the fixed guide rail 308 is fixed on the machine tool column 4, and the movable guide rail 310 is slidably connected with the fixed guide rail 308.

The invention also provides a processing method of the electromagnetic current coupling optical curved surface precision polishing processing machine tool, and the processing process mainly comprises the following steps:

clamping a workpiece on a Y-direction precision rotary table by using a special fixture, starting a machine tool, resetting the machine tool, adjusting the angle of a tool head to a proper position according to the type of the workpiece, and setting initial parameter values and initial positions of other parts of the machine tool;

secondly, performing on-line measurement on the workpiece, collecting required data, performing curved surface reconstruction, and obtaining a workpiece measurement model;

inputting the workpiece design model into a machine tool numerical control system, performing model matching and comparison with the workpiece measurement model obtained in the previous step after feature recognition, calculating machining allowance, and selecting machining parameters according to the machining allowance;

step four, carrying out simulation machining according to the machining parameters obtained in the previous step, judging whether interference collision occurs or not, and returning to the previous step to reselect the machining parameters if interference exists;

step five, if interference collision does not exist, performing numerical control programming, determining the track of the tool head, and generating a corresponding numerical control code;

step six, carrying out numerical control machining, measuring the machined workpiece again after machining is finished, and obtaining a measurement model according to curved surface reconstruction;

and step six, judging whether the measurement model in the step six meets the processing requirement, if not, judging whether the measurement model can be repaired, and if so, returning to the step two for adding again.

Example 1

As shown in fig. 1, an electromagnetic flow coupling optical curved surface precision polishing machine tool mainly comprises a machine tool body 1, a Y-direction precision turntable 2, a Y-direction guide rail assembly 3, a machine tool upright column 4, a tool head 5, an angle indexing mechanism 6, a liquid collecting tank 7, an XZ-direction precision turntable 8 and an XZ-direction static pressure guide rail assembly 9; the Y-direction precision turntable 2 is fixedly connected to the middle position of a connecting flat plate 309 of the Y-direction guide rail assembly 3 through bolts; the middle shaft of the angle indexing mechanism 6 is in interference fit with two mounting holes on the main shaft shell 512 of the tool head 5, so that the tool head 5 and the angle indexing mechanism 6 are fixedly mounted, a gear transmission mechanism is arranged in the angle indexing mechanism 6 and is fixedly connected with the middle shaft, so that the angle indexing mechanism 6 can drive the tool head 5 to integrally perform pitching motion through the gear transmission mechanism, and the processing of the tool head 5 at different angles is realized; the angle indexing mechanism 6 is installed on the XZ-direction precision rotary table 8 through bolts, the XZ-direction precision rotary table 8 is fixed to the middle position of an upper web 902043 of the XZ-direction hydrostatic guide rail 9 through bolts, and the liquid collecting tank 7 is fixed to the middle position of the machine tool body 1 below the tool head 5 and the Y-direction precision rotary table 2 in a welding mode; the XZ-guide rail assembly 9 is fixedly connected to the right side of the machine bed 1 by bolts. Wherein, the XZ guide rail assembly 9 is externally provided with a dust cover, and the machine tool body 1 is provided with the dust cover which has a proper size and is matched with the machine tool body 1.

As shown in fig. 2 to 9, the tool head 5 specifically includes an electromagnetic field generating device, a power input portion, and a braking portion, and the tool head has a compact overall structure, and integrates the electromagnetic field generating device together, and the cooperation of the electrorheological effect and the magnetorheological effect ensures the processing efficiency and quality.

The power input part mainly comprises a driven part 503, a lower end shell 505, a middle end shell 506, a first bearing end cover 508, a servo motor 509, a coupler 511, a main shaft shell 512, a first sleeve 513, a first round nut 514, a first bearing 515, a gasket 516, an outer coupler 517, a long pin 519, a cylindrical cam shaft 520 and a knob 527. The servo motor 509 inputs torque, the coupling 511 drives the outer coupling 517 to rotate, the outer coupling 517 drives the cylindrical cam shaft 520 to rotate through the knob 527 and the long pin 519, and then the electromagnetic field generating device is driven to rotate together. Wherein, the servo motor 509 is fixed above the spindle housing 512 through a first fastening bolt 510; the servo motor 509 is connected with an outer coupling 517 through a coupling 511, the coupling 511 transmits the motion generated by the servo motor 509 to the outer coupling 517, and the coupling 511 is arranged inside the main shaft shell 512; the bottom of the outer coupling shaft 517 is provided with three grooves, and the outer coupling shaft 517 is connected with a knob 527 through a long pin 519, so that the knob 527 and the outer coupling shaft 517 rotate together; an internal spline is arranged inside the knob 527 and is matched and connected with an external spline part above the cylindrical cam shaft 520, so that the motion transmission is realized; an outer ring of the first sleeve 513 is fixedly mounted on the inner wall of the small-bore end at the lower side of the main shaft shell 512 through a fastening bolt, an inner ring of the first sleeve is in interference fit with an outer ring of the one-to-one bearing 515, and an inner ring of the one-to-one bearing 515 is in interference fit with the outer coupling 517, so that the main shaft shell 512 is kept in a static state when the electromagnetic field generating device rotates; the first round nut 514 is screwed on the second section small-diameter end above the cylindrical camshaft 520 through threads, and one side of the first round nut is in contact with the side surface of the first bearing 515 to ensure the axial positioning of the first bearing 515; the shim 516 is located in the middle of the two first bearings 515; the driven member 503 is a splined shaft and is connected to the cylindrical camshaft 520 by a pin 504, and when rotating, the driven member 503 rotates together with the cylindrical camshaft 520; the lower end shell 505 is connected with the middle end shell 506 through a first fastening bolt 510; the inner part of the middle-end shell 506 is matched with the cylindrical cam shaft 520 through a first bearing 515, so that the rotation precision of the cylindrical cam shaft 520 during processing is ensured; bearing end cover 508 is fixedly mounted to the underside of spindle housing 512 by bolts 510 for axial positioning of bearing 515.

The top end of the cylindrical cam shaft 520 is provided with a multi-section shaft, the top end of the shaft is provided with an external spline, an internal spline is arranged in a central hole of the knob 527, the cylindrical cam shaft 520 is connected with the knob 527 through the spline, and the knob 527 is provided with three slotted holes which are uniformly distributed at 120 degrees and used for installing and connecting the long pin 519; one end of the connecting long pin 519 is inserted into the hole of the knob 527, and the other end of the connecting long pin passes through the long groove on the outer coupling 517 and then is inserted into the mounting hole of the brake disc 518.

The braking part mainly comprises a brake pad 507 and a brake disc 518, and is mainly used for switching between different working states (inclined polishing and vertical polishing) of the tool head 5; the brake pad 507 is sleeved at the lower end of the outer coupling 517, three holes for installing long pins 519 are formed in the brake pad, and the brake pad is connected with the outer coupling 517 through the three long pins 519 which are uniformly distributed at 120 degrees; the brake disk 518 is hollow on the outer coupling 517, located above the brake pad 507, and is movable in the axial direction.

The electromagnetic field generating device mainly comprises a hemispherical shell 521, an auxiliary electrode plate 524, a multi-layer cylindrical barrel 525, four annular electrode plates 526, four electromagnets 501, four auxiliary electrode supporting barrels 502, four supporting sleeves 522 and four supporting frames 523. The four electromagnets 501 are uniformly distributed at 90 degrees and are respectively arranged in the four supporting sleeves 522, the four supporting sleeves 522 are tightly attached to the multi-layer cylindrical barrel 525 and are arranged on a supporting frame 523, and the supporting frame 523 is fixedly arranged at the small shaft end part of the lower end shell 505 through a first fastening bolt 510; a spline shaft is arranged above the multi-layer cylindrical barrel 525, is fixed on the driven part 503 in a screw connection mode and moves along with the driven part 503; the annular electrode plate 526 is arranged in the multilayer cylindrical barrel 525; the hemisphere case 521 is fixed at the bottom of the lower case 505, the auxiliary electrode supporting cylinder 502 is tightly fitted on the outside of the hemisphere case 521 and fixed by the pin 504, and the auxiliary electrode plate 524 is fixed in the auxiliary electrode supporting cylinder 502.

As shown in fig. 15, the tool head 5 may be inclined or vertical polished at 45 ° as required during machining. When the 45-degree inclined polishing is carried out, the angle indexing mechanism 6 enables the whole tool head to rotate 45 degrees in a pitching mode, a semi-spherical 45-degree spherical small circle at the end part of the polishing tool head is made to be in contact with the polishing surface of a workpiece, the multi-layer cylindrical barrel 525 is located at the lowest end, the supporting sleeve 522 is in a 45-degree inclined state, the electromagnet 501 in the supporting sleeve 522 adsorbs the spindle shell 512 to rotate, and the supporting sleeve 522 keeps in a 45-degree inclined state due to the limiting effect of the multi-layer cylindrical barrel 525. The adjacent electromagnets 501 have opposite polarities and are distributed towards the workpiece in an N-S-N-S mode, the N poles transmit magnetic induction lines to the two adjacent S poles, and the S poles receive the magnetic induction lines from the adjacent N poles, so that the magnetic induction lines are better concentrated around the polishing tool head in a magnetic pole distribution mode, and the flowability of the electromagnetic rheological fluid except for a polishing area is ensured. At this time, the multiple ring-shaped electrode plates 526 of the electromagnetic field generating device are electrified with the ring-shaped auxiliary electrode 524, the polarities of the adjacent electrode plates 526 are opposite, an arch bridge-shaped electric field is formed between the adjacent electrode plates 526, and an electric field is also formed between the outermost ring-shaped electrode plate 526 and the auxiliary electrode 524 in the multi-layer cylindrical tube 525. When the vertical polishing is converted, the tool is firstly withdrawn, the polishing tool head 5 is separated from a workpiece by a certain distance, and then the angle indexing device 6 drives the polishing tool head 5 to integrally rotate, so that the axis of the polishing tool head is vertical to a plane to be polished. At this time, the four electromagnets 501 are powered off, the electromagnetic force between the electromagnets 501 and the hemispherical shell 521 is small, the electromagnet support sleeve 522 can rotate freely, the multilayer cylindrical barrel 525 moves upwards to drive the electromagnets 501 to rotate, under the limiting and pressing actions of the multilayer cylindrical barrel 525 and the support frame 523, the electromagnets 501 are in a vertical state, and the axes of the electromagnets are parallel to the axis of the polishing tool head main body. After tool withdrawal is completed, the electromagnetic brake is powered on, the brake disc 518 is attracted with the brake pad 507, the inner spline knob moves upwards, the spindle motor 509 rotates at a low speed, the polishing tool head main body is driven to rotate through the outer coupling 517, the cam driven part 503 also rotates along with the tool head main body at the moment, the cylindrical cam shaft 520 is static, the driven part 503 rotates 90 degrees relatively, the cam in the cylindrical cam shaft 520 reaches far rest from near rest, then the electromagnetic brake is powered off, the brake disc is separated from the brake pad 518, the brake disc 518 slides downwards under the action of gravity, the cylindrical cam shaft 520 and the driven part 503 rotate together without relative movement. Finally, feeding along the Z-axis direction, and electrifying the electromagnet 501 and the annular electrode plate 526 to start polishing.

As shown in fig. 10, the internal structure of the Y-direction precision rotary table 3 is the same as that of the XZ-direction precision rotary table 8, where the XZ-direction precision rotary table 8 mainly includes a base 801, a second bearing end cover 802, a second round nut 803, a lower end cover 804, a stator winding 805, a stator support 806, a second fastening bolt 807, a housing 808, a connecting table 809, a felt 810, an end cover 811, a second sleeve 812, a second bearing 813, an upper end cover 814, a permanent magnet 815, and an output rotary shaft 816. Wherein the base 801 is threadably secured to the upper web 902043 of the XZ hydrostatic guideway assembly 9 at an intermediate location; the second bearing end cover 802 is used for axially positioning the outer ring of the second bearing 813 and is fixedly connected with the second sleeve 812 and the base 801 through a second fastening bolt 807; the second round nut 803 is used for axially positioning the inner ring of the second bearing 813 and is screwed on the small-end threaded part of the output rotating shaft 816 through threads; the lower end cover 804 is arranged above the base 801, is arranged in the shell 808, and is fixedly connected with the stator support 806 through a second fastening bolt 807 to ensure the axial position of the stator; the stator winding 805 is arranged inside the stator support 806, when the direct drive motor is powered on, the permanent magnet 815 is driven to rotate, the permanent magnet 815 is embedded on the output rotating shaft 816, and the output rotating shaft 816 further enables the connecting table 809 to rotate; the stator support 806 is arranged inside the shell 806, the upper part of the stator support is connected with the upper end cover 814 through a second fastening bolt 807, and the lower part of the stator support is connected with the lower end cover 804 through a second fastening bolt 807; the shell 808 is the shell of the whole turntable and is fixedly connected with the base 801 through a second fastening bolt 807; the connecting table 809 is connected with the tail end of the output rotating shaft 816 through a second fastening bolt 807, and an angle indexing mechanism 6 is arranged above the connecting table; the bearing end cover 811 is fixedly connected with the second sleeve 812 and the shell 808 through fastening bolts, so that the axial positioning of the outer ring of the second bearing 813 is ensured; the second bearings 813 are provided with a pair of bearings and are arranged at the shaft ends on the two sides of the output rotating shaft 816, the inner rings of the bearings rotate along with the output rotating shaft 816, the permanent magnets 815 and the like, and the outer rings of the bearings are fixed with the second sleeve 812, the shell 808 and the like; the felt 810 is arranged at the shaft neck of the minimum end of the output rotating shaft 816 and is arranged inside the end cover 811, so that the effects of sealing and dust prevention are achieved; the output rotating shaft 816 is arranged in the middle of the rotary table, the elements connected from top to bottom are a felt ring 810, a second round nut 803, a second bearing 813, a permanent magnet 815, a second bearing 813 and a second round nut 803 in sequence, and the output rotating shaft 816 rotates to drive the connecting table 809 to rotate together. The precise rotary table is directly driven by a direct drive motor, has small transmission error and can ensure the transmission precision.

As shown in fig. 11 to 13, the XZ-direction hydrostatic guideway assembly 9 is placed in a horizontal plane, is installed on the right side of the machine tool body 1, and mainly includes an X-axis hydrostatic guideway 901 and a Z-axis hydrostatic guideway 902, the X-axis hydrostatic guideway 901 and the Z-axis hydrostatic guideway 902 are stacked, the X-axis hydrostatic guideway 901 is divided into two left and right parts, and is installed on the machine tool body 1 by means of bolt connection, the Z-axis hydrostatic guideway 902 is placed above the X-axis hydrostatic guideway 901, and serves as a carriage for the X-axis hydrostatic guideway 901, and slides on the X-axis hydrostatic guideway 901, and the XZ-direction precision turntable 8 is fixed on the Z-axis hydrostatic guideway 902, and can move along with the Z-axis hydrostatic guideway 902. The X-axis static pressure guide rail 901 and the Z-axis static pressure guide rail 902 have the same structure, wherein the Z-direction static pressure guide rail comprises an I-shaped guide rail 90201, a linear motor primary 90202, a linear motor secondary 90203 and a split slide carriage 90204; the I-shaped guide rail 90201 is fixedly installed on a split slide carriage 90104 of the two X-direction static pressure guide rails in a threaded connection mode, a primary linear motor 90202 is installed in the middle of the inside of a groove of the I-shaped guide rail 90201 through a bolt, a secondary linear motor 90203 is installed in the middle of the lower surface of an upper amplitude plate 902043 of the split slide carriage 90204 in a threaded connection mode, the secondary linear motor 90203 is opposite to the primary linear motor 90202, but the length of the secondary linear motor 90203 is shorter than that of the primary linear motor 90202, and the split slide carriage 90204 is sleeved on the I-shaped guide rail 90201. When the machine tool works, oil is supplied to the static pressure guide rail 9 by the XZ through a hydraulic system, and the split slide carriage 90204 moves relative to the primary linear motor 90202 along with the secondary linear motor 90203 and further slides along the I-shaped guide rail 90201. The slide carriage in the XZ-direction hydrostatic guideway assembly 9 adopts a split structure, taking a slide carriage 90204 above the Z-direction hydrostatic guideway as an example, and mainly comprises a lower web 902041, a side web 902042, an upper web 902043 and a screw 902044. The lower web 902041 and the side web 902042, the side web 902042 and the upper web 902043 are connected through screws 902044, holes are formed in each web, the oil inlet holes are not communicated with the oil return holes, special holes are formed in adjacent webs for oil return, and a plurality of independent oil ways supply oil to each web.

As shown in fig. 14, the Y-guide rail assembly 3 adopts a sliding guide rail, and the feeding method adopts a screw-nut pair, and mainly includes a driving motor 301, an oldham coupling 302, a first bottom support base 303, a ball nut 304, a nut base 305, a ball screw 306, a second bottom support base 307, a fixed guide rail 308, a connecting plate 309, and a moving guide rail 310. Wherein, the first bottom support base 303 is fixed above the ball screw 306, the upper end of the ball screw 306 is rotatably connected with the first bottom support base 303, the top end of the first bottom support base 303 is provided with an Oldham coupling 302, the topmost end of the ball screw 306 is arranged in the Oldham coupling 302, circumferential fixation of the screw is realized through key connection, the input shaft of the driving motor 301 is arranged at the other section of the Oldham coupling 302 and is fixedly connected with the Oldham coupling 302, circumferential fixation is ensured through key connection, the input shaft of the driving motor 301 rotates, the Oldham coupling 302 drives the ball screw nut pair to accurately move, the ball nut 304 is rotatably connected with the ball screw 306, the nut seat 305 is fixed on the ball nut 304, the second bottom support base 307 is fixed below the ball screw 306 and is rotatably connected with the ball screw 306, and the fixed guide rail 308 and the movable guide rail 310 are both provided with two, the movable guide rail 310 is connected with the fixed guide rail 308 in a sliding manner, the fixed guide rail 308 is fixed to the left side and the right side of the machine tool upright 4 and is positioned on the left side and the right side of the ball screw 306 at a proper distance, and the connecting flat plate 309 is fixedly connected with the nut seat 305 and the two movable guide rails 310 through threaded connection respectively and is used for installing the Y-direction precision turntable 2; in the Y-guide rail assembly 3 fixed to the machine tool column 4, the first bottom support base 303 and the second bottom support base 307 are both fixed to the middle position of the machine tool column 4 through threaded connection, and the two fixed rails 308 are fixed to the left and right sides of the machine tool column 4 through threaded connection and are spaced from the ball screws 306 by a suitable distance.

Example 2

As shown in fig. 16, a method for processing an electromagnetic current coupling optical curved surface precision polishing machine tool mainly includes the following steps:

(1) clamping the blank or semi-finished product on a Y-direction precision rotary table by using a special fixture, starting a machine tool, resetting the machine tool, adjusting the angle of a tool head to be in place according to the type of the machined blank, checking each part of the machine tool, and setting initial parameter values and initial positions of other parts of the machine tool.

(2) And carrying out accurate online measurement on the processed blank, collecting required data, carrying out curved surface reconstruction, and obtaining a blank measurement model.

(3) Inputting the blank design model into a machine tool numerical control system, carrying out model matching and comparison with the measurement model of the blank obtained in the last step after carrying out feature recognition to obtain an out-of-tolerance value between the measurement model and the design model of the blank, namely machining allowance, and selecting proper machining parameters according to the machining allowance.

(4) And performing simulation processing according to the processing parameters obtained in the previous step, judging whether interference collision occurs or not, and returning to the previous step to reselect the processing parameters if the interference exists.

(5) And if interference collision does not exist, performing related numerical control programming, determining the track of the tool head, further generating a corresponding numerical control code, and waiting for processing.

(6) And after the machining is finished, performing precision measurement on the machined workpiece again, and reconstructing according to the curved surface to obtain a measurement model.

(7) And (3) judging whether the measurement model meets the processing requirement, if not, judging whether the measurement model can be repaired, and if so, returning to the step (2) to process again.

(8) And if the processed finished product meets the processing requirement or does not meet the processing requirement and cannot be repaired, finishing the processing.

Claims (9)

1. An electromagnetic flow coupling optical curved surface precision polishing processing machine tool is characterized by comprising a machine tool body (1), a Y-direction precision turntable (2), a Y-direction guide rail assembly (3), a machine tool upright post (4), a tool head (5), an angle indexing mechanism (6), a liquid collecting tank (7), an XZ-direction precision turntable (8) and an XZ-direction static pressure guide rail assembly (9); the machine tool upright post (4) is fixed on the machine tool body (1), the Y-direction guide rail component (3) is fixed on the machine tool upright post (4), and the Y-direction precision turntable (2) is fixed on the Y-direction guide rail component (3); the tool head (5) is fixed on the angle indexing mechanism (6), and the tool head (5) is driven by the angle indexing mechanism (6) to perform pitching motion; the angle indexing mechanism (6) is fixed on an XZ-direction precision turntable (8), the XZ-direction precision turntable (8) is fixed on an XZ-direction hydrostatic guide rail assembly (9), and the XZ-direction guide rail assembly (9) is fixed on the machine tool body (1); the liquid collecting pool (7) is fixed on the machine tool body (1) and is positioned below the tool head (5) and the Y-direction precision rotary table (2).

2. The electromagnetic flow coupling optical curved surface precision finishing machine tool according to claim 1, characterized in that the center shaft of the angle indexing mechanism (6) is in interference fit with the mounting hole on the tool head (5), and a gear transmission mechanism is arranged inside the angle indexing mechanism (6), and the gear transmission mechanism is fixed with the center shaft to drive the tool head (5) to perform pitching motion integrally.

3. An electromagnetic flow coupling optical curved surface finishing machine as claimed in claim 1, wherein said tool head (5) comprises an electromagnetic field generating device, a power input portion and a brake portion; the power input part comprises a shell component, a servo motor (509), a driven part (503), an outer coupling (517), a cylindrical cam shaft (520) and a knob (527); the servo motor (509) is fixed above the shell component, and the outer coupling (517), the knob (527), the cylindrical cam shaft (520) and the driven piece (503) are all arranged in the shell component; the servo motor (509) is connected with an outer coupling (517) through a coupling (511), the outer coupling (517) is rotatably connected with the shell assembly through a bearing, the bottom of the outer coupling (517) is connected with the knob (527) through a long pin (519), the upper end of the cylindrical cam shaft (520) is connected with the inside of the knob (527) through a spline, and the driven piece (503) is connected with the lower end of the cylindrical cam shaft (520) through a pin (504); the brake part comprises a brake pad (507) and a brake disc (518), the brake pad (507) is sleeved at the lower end of the outer coupling (517) and is in pin connection with the outer coupling (517); the brake disc (518) is sleeved on the outer coupling (517) in an empty mode and located above the brake pad (507), and the brake disc (518) penetrates through a long groove in the outer coupling (517) through a connecting long pin and then is connected with the brake disc (518); the electromagnetic field generating device is arranged at the bottom of the power input part.

4. An electromagnetic flow coupling optical curved surface precision finishing machine tool as claimed in claim 3, wherein said housing assembly comprises a lower end housing (505), a middle end housing (506), a first bearing end cap (508), a spindle housing (512), a first sleeve (513), a first round nut (514); the servo motor (509) is fixed above the spindle housing (512) through a fastening bolt; the outer ring of the first sleeve (513) is mounted on the inner wall of the small-aperture end of the lower side of the main shaft shell (512) through a fastening bolt, and the inner ring of the first sleeve is connected with the outer coupling (517) through a first bearing (515); the first round nut (514) is screwed at the second section small-diameter end above the cylindrical camshaft (520) and is in contact with the first bearing (515) to axially position the first bearing (515); the inner side of the middle end shell (506) is connected with a cylindrical camshaft (520) through a bearing, and the lower end shell (505) is connected with the middle end shell (506) through a fastening bolt; a first bearing end cover (508) is fixedly installed below the main shaft shell (512) through bolts and used for axially positioning a first bearing (515).

5. The electromagnetic flow coupling optical curved surface precision finishing machine tool according to claim 3, characterized in that the electromagnetic field generating device comprises a hemispherical shell (521), an auxiliary electrode plate (524), a multi-layer cylindrical barrel (525), four annular electrode plates (526), four electromagnets (501), four auxiliary electrode supporting barrels (502), four supporting sleeves (522) and four supporting frames (523); the four electromagnets (501) are uniformly distributed at 90 degrees and are respectively arranged in the four supporting sleeves (522), the four supporting sleeves (522) are tightly attached to the multilayer cylindrical barrel (525) and are arranged on a supporting frame (523), and the supporting frame (523) is fixed at the lower end of the shell component; the multilayer cylindrical barrel (525) is fixed on the driven part (503); the annular electrode plate (526) is arranged in the multilayer cylindrical barrel (525); a hemisphere outer shell (521) is fixed on the shell component, an auxiliary electrode supporting cylinder (502) is tightly sleeved on the outer side of the hemisphere outer shell (521) and connected through a pin (504), and an auxiliary electrode plate (524) is fixed in the auxiliary electrode supporting cylinder (502).

6. An electromagnetic flow coupling optical curved surface precision finishing machine tool as claimed in claim 1, characterized in that said Y-direction precision turret 3 is identical in structure to the XZ-direction precision turret (8); the XZ-direction precision turntable (8) comprises a base (801), a second bearing end cover (802), a stator winding (805), a shell (808), a connecting table (809), an end cover (811), a permanent magnet (815) and an output rotating shaft (816); the base (801) is fixed on the XZ-direction hydrostatic guideway assembly (9), the shell (808) is fixed on the base (801), the bearing end cover (811) is fixedly connected to the top of the shell (808), and the second bearing end cover (802) is fixedly connected with the bottom of the base (801); the output rotating shaft (816) is arranged in the middle of the inside of the shell, the upper shaft end of the output rotating shaft (816) is rotatably connected with the shell (808) through a bearing, and the lower shaft end of the output rotating shaft (816) is rotatably connected with the base (801) through a bearing; the stator winding (805) is fixed inside the shell (808) through a stator support 806, and the permanent magnet (815) is embedded on the output rotating shaft (816) and corresponds to the stator winding (805); the top end of the output rotating shaft (816) is fixedly connected with a connecting table (809), and the angle indexing mechanism (6) is arranged above the connecting table (809).

7. The electromagnetic flow coupling optical curved surface precision finishing machine tool as claimed in claim 1, characterized in that said XZ-direction hydrostatic guideway assembly (9) comprises an X-axis hydrostatic guideway (901) and a Z-axis hydrostatic guideway (902), the X-axis hydrostatic guideway (901) is installed on the machine bed (1), the Z-axis hydrostatic guideway (902) is slidably connected to the X-axis hydrostatic guideway (901), and the XZ-direction precision turntable (8) is fixed on the Z-axis hydrostatic guideway (902); the X-axis static pressure guide rail (901) and the Z-axis static pressure guide rail (902) have the same structure, and the Z-direction static pressure guide rail comprises an I-shaped guide rail (90201), a linear motor primary (90202), a linear motor secondary (90203) and a split slide carriage (90204); the linear motor primary (90202) is installed in a groove of the I-shaped guide rail (90201), the linear motor secondary (90203) is installed on the lower surface of the inner side of the split slide carriage (90204) and is opposite to the linear motor primary (90202), and the split slide carriage (90204) is sleeved on the I-shaped guide rail (90201).

8. An electromagnetic flow coupling optical curved surface precision finishing machine tool as claimed in claim 1, characterized in that said Y-guide rail assembly (3) comprises a driving motor (301), an oldham coupling (302), a ball nut (304), a ball screw (306), a fixed rail (308), a connecting plate (309) and a moving rail (310); the first bottom support seat 303 is fixed above a ball screw (306), and the upper end and the lower end of the ball screw (306) are respectively connected to a machine tool upright post (4) through one; the driving motor (301) is connected with a ball screw (306) through an Oldham coupling (302), a ball nut (304) is rotationally connected with the ball screw (306), the ball nut (304) is fixed on a connecting flat plate (309) through a nut seat (305), and a Y-direction precision turntable (2) is arranged on the connecting flat plate (309); the fixed guide rail (308) is fixed on the machine tool upright post (4), and the movable guide rail (310) is connected with the fixed guide rail (308) in a sliding way.

9. A method as claimed in claim 1, wherein the method comprises the steps of:

clamping a workpiece on a Y-direction precision rotary table by using a special fixture, starting a machine tool, resetting the machine tool, adjusting the angle of a tool head to a proper position according to the type of the workpiece, and setting initial parameter values and initial positions of other parts of the machine tool;

secondly, performing on-line measurement on the workpiece, collecting required data, performing curved surface reconstruction, and obtaining a workpiece measurement model;

inputting the workpiece design model into a machine tool numerical control system, performing model matching and comparison with the workpiece measurement model obtained in the previous step after feature recognition, calculating machining allowance, and selecting machining parameters according to the machining allowance;

step four, carrying out simulation machining according to the machining parameters obtained in the previous step, judging whether interference collision occurs or not, and returning to the previous step to reselect the machining parameters if interference exists;

step five, if interference collision does not exist, performing numerical control programming, determining the track of the tool head, and generating a corresponding numerical control code;

step six, carrying out numerical control machining, measuring the machined workpiece again after machining is finished, and obtaining a measurement model according to curved surface reconstruction;

and step six, judging whether the measurement model in the step six meets the processing requirement, if not, judging whether the measurement model can be repaired, and if so, returning to the step two for adding again.

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