CN207528173U - A kind of diamond cutter cutting edge contour quality ultra precise measurement device - Google Patents
A kind of diamond cutter cutting edge contour quality ultra precise measurement device Download PDFInfo
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- CN207528173U CN207528173U CN201721688479.8U CN201721688479U CN207528173U CN 207528173 U CN207528173 U CN 207528173U CN 201721688479 U CN201721688479 U CN 201721688479U CN 207528173 U CN207528173 U CN 207528173U
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- guide rail
- cutting edge
- diamond cutter
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Abstract
The utility model discloses a kind of diamond cutter cutting edge contour quality ultra precise measurement device, which moves left and right guide rail A, moves up and down guide rail A, is moved forward and backward the eccentric adjustment that guide rail is used to implement atomic force probe and ten micron dimension of diamond cutter；It moves left and right guide rail B, be moved forward and backward the eccentric adjustment that guide rail B is used to implement light microscope and ten micron dimension of diamond cutter；Three-dimensional precise pose adjustment mechanism is used to implement diamond cutter and eccentric the adjusting of atomic force scanning probe sub-micrometer scale；Ultraprecise static air pressure rotary axis system is used to implement the measurement of the full cutting edge sharpness of diamond cutter and circular arc percent ripple.The diamond cutter cutting edge contour quality ultra precise measurement device of the utility model can effectively control the influence of the vibration and turn error of ultraprecise shafting to measurement result, while be obviously improved the micro- measurement efficiency open-minded, edge surface is coarse of diamond cutter cutting edge sharpness, circular arc percent ripple, cutting edge.
Description
Technical field
The utility model belongs to ultra precise measurement technical field, and in particular to a kind of diamond cutter cutting edge contour quality surpasses
Precision measurement apparatus.
Background technology
As Ultra-precision Turning is the key technology of tech war, high-tech industry and frontier science and technology development.It is right
For Ultra-precision machining, the cutter for meeting certain mass requirement is most important.Superfinishing is disclosure satisfy that as currently the only
The cutter of processing request is cut closely, and the evaluation of high-precision diamond cutter and measuring technique are the important support skills of ultra precision cutting
Art, evaluation and the development measured can not only be carried for overall merit, judgement and the monitoring of cutter quality during ultra precision cutting
For technical support, while also guidance is provided for the manufacturing technology of cutter.Ultra precision cutting experimental study shows：Diamond cutter sword
Mouthful profile quality all has workpiece quality including micro- slit etc. of cutting edge sharpness, tool arc percent ripple, surface roughness, cutting edge
It has a major impact.Since diamond cutter cutting edge contour technical indicator contains size, profile and surface quality element, index body
System is complicated and required precision is high（It all refers to target precision and enters nanometer scale）, therefore, diamond cutter cutting edge contour
It accurately measures and evaluates and is extremely difficult.And a set of relatively uniform, perfect diamond cutter cutting edge wheel is not established in the world
Wide apparatus for measuring quality is still unable to system, comprehensively diamond cutter cutting edge contour quality is unfolded to measure.
Diamond cutter cutting edge contour mass measurement at present is mainly by following several method：Optical microphotograph measuring method is swept
Retouch electron microscopy（SEM）, atomic force microscope side（AFM）Method.Wherein optical microphotograph measuring method is due to by optical diffraction
The influence of effect, and it is unsatisfactory for the measurement request of nano-precision；When measuring diamond cutter cutting edge contour quality by SEM methods,
It needs to plate one layer of conductive golden film in tool surface.Since tool surface is coated with conductive film, so practical measurement result is not
True point of a knife pattern.Meanwhile by carefully grinding the cutting edge sharpness of diamond cutter even lower, the SEM that can reach 20 nm
Method can not fully meet the measurement of diamond cutter cutting edge sharpness.Due to atomic force microscope（AFM）With high point
It distinguishes and measurement accuracy, is widely used in the measurement of diamond cutter in recent years.
Application No. is a kind of 200910072876.6 patent disclosure roundness of arc of tool tip of diamond tool with arc edge
Detection device disclosure satisfy that the measurement request of high-precision tool arc circularity.Yue Xiao is refined et al. to propose a kind of diamond tool
Have nm grades of surface profile quality multi-parameter integral measuring methods, can realize that cutting edge sharpness, tool arc percent ripple, surface are thick
Rugosity, cutting edge it is micro- slit etc. parameters measurement.But above-mentioned announcement or to deliver measuring method shown in existing commercial atomic force
Micro mirror（AFM）Measuring table, which is realized, to be measured, and is had the following disadvantages：Commercial atomic force microscope measuring table operating space is small, surveys
Difficulty is adjusted during amount, causes measurement efficiency low；Ultra-precise revolving shafting is placed horizontally on atomic force platform, shafting
Vibration and turn error will significantly affect measurement result.
Invention content
The technical problem to be solved by the utility model is to provide a kind of surveys of diamond cutter cutting edge contour quality ultraprecise
Measure device.
The diamond cutter cutting edge contour quality ultra precise measurement device of the utility model, its main feature is that, the measurement
Device includes pedestal, stent, crossbeam, atomic force probe, atomic force scanning measurement system, moves left and right guide rail A, moves up and down
Guide rail A, it light microscope, microscope mounting base, moves up and down guide rail B, move left and right guide rail B, three-dimensional precise pose adjustment machine
Structure, is moved forward and backward guide rail at ultraprecise static air pressure rotary axis system；
Its connection relation is：Pedestal is placed on vibrating isolation foundation；Stent is fixedly connected on pedestal；Crossbeam is fixedly connected on
On stent；Guide rail A is moved left and right to be fixedly connected on crossbeam；It moves up and down guide rail A and is fixedly connected on and move left and right on guide rail A；
Atomic force probe, which is fixedly connected on, to be moved up and down on guide rail A；Guide rail B is moved left and right to be fixedly connected on stent；It moves up and down
Guide rail B, which is fixedly connected on, to be moved left and right on guide rail B；Microscope mounting base, which is fixedly connected on, to be moved up and down on guide rail B；Optical microphotograph
Mirror is fixedly connected in microscope mounting base；Guide rail is moved forward and backward to be fixedly connected on pedestal；Ultraprecise static air pressure rotating shaft
System is fixedly connected on vertically to be moved forward and backward on guide rail；Three-dimensional precise pose adjustment mechanism is fixedly connected on ultraprecise static air pressure and returns
Shaft is fastened.
The atomic force scanning measurement system includes scanning probe mounting base, atomic force scanning probe, cutter positioning branch
Frame, cutter holding seat, handle of a knife, diamond cutter；
Its connection relation is：Scanning probe mounting base is fixedly connected on atomic force probe；Atomic force scanning probe peace
In scanning probe mounting base；Cutter positioning stent is mounted on three-dimensional precise pose adjustment mechanism；Cutter holding seat is installed
On the stent of cutter positioning；Handle of a knife is mounted on cutter holding seat；Diamond cutter is mounted on handle of a knife.
Described moves left and right guide rail A, moves up and down guide rail A, move up and down guide rail B, move left and right guide rail B, front and rear shifting
The Adjustment precision of dynamic guide rail is 0.01mm.
The Adjustment precision of the three-dimensional precise pose adjustment mechanism is sub-micron.
The kinematic accuracy of the ultraprecise static air pressure rotary axis system is 30nm.
The resolving accuracy of the light microscope is 5 μm.
Atomic force scanning survey system in the diamond cutter cutting edge contour quality ultra precise measurement device of the utility model
System is used to implement the micro- measurement open-minded, edge surface is coarse of diamond cutter cutting edge sharpness, circular arc percent ripple, cutting edge；Left and right is moved
Dynamic guide rail A, guide rail A is moved up and down, guide rail is moved forward and backward and is used to implement ten micron dimension of atomic force probe and diamond cutter
Eccentric adjustment；Move left and right guide rail B, back-and-forth motion guide rail B is used to implement light microscope and ten microns of amounts of diamond cutter
The eccentric adjustment of grade；Three-dimensional precise pose adjustment mechanism is used to implement diamond cutter and scans probe sub-micrometer scale with atomic force
Eccentric adjustment；Ultraprecise static air pressure rotary axis system is used to implement the full cutting edge sharpness of diamond cutter and circular arc percent ripple
It measures.
The utility model constructs diamond cutter cutting edge contour quality ultra precise measurement device based on atomic force probe,
Ultra-precise revolving shafting is placed vertically, effectively controls the influence of ultraprecise shafting vibration and turn error to measurement result；Together
When due to the improvement of operating space, diamond cutter cutting edge sharpness, tool arc percent ripple, rough surface can be obviously improved
Degree, cutting edge it is micro- slit etc. parameters measurement efficiency.
Description of the drawings
Fig. 1 is the structure diagram of the diamond cutter cutting edge contour quality ultra precise measurement device of the utility model；
Fig. 2 is the atomic force scanning survey of the diamond cutter cutting edge contour quality ultra precise measurement device of the utility model
System structure diagram；
In figure, 1. pedestal, 2. stent, 3. crossbeam, 4. atomic force probe, 5. atomic force scanning measurement system 6. or so
Moving guide rail A 7. moves up and down 8. light microscopes of guide rail A, 9. microscope mounting base 10. and moves up and down 11. left sides of guide rail B
It moves right 12. three-dimensional precise pose adjustment mechanisms of guide rail B, 13. ultraprecise static air pressure rotary axis system 14. and is moved forward and backward guide rail
51. scan 52. 54. cutter holding seat of atomic force scanning 53. cutter positioning stent of probe of probe mounting base, 55. handle of a knife 56.
Diamond cutter.
Specific embodiment
The utility model is described in more detail in the following with reference to the drawings and specific embodiments.
As shown in Figure 1, the diamond cutter cutting edge contour quality ultra precise measurement device of the utility model include pedestal 1,
Stent 2, crossbeam 3, atomic force probe 4, atomic force scanning measurement system 5, move left and right guide rail A6, move up and down guide rail A7,
Light microscope 8, microscope mounting base 9 move up and down guide rail B10, move left and right guide rail B11, three-dimensional precise pose adjustment machine
Structure 12, is moved forward and backward guide rail 14 at ultraprecise static air pressure rotary axis system 13；
Its connection relation is：Pedestal 1 is placed on vibrating isolation foundation；Stent 2 is fixedly connected on pedestal 1；Crossbeam 3, which is fixed, to be connected
It is connected on stent 2；Guide rail A6 is moved left and right to be fixedly connected on crossbeam 3；It moves up and down guide rail A7 and is fixedly connected on and move left and right
On guide rail A6；Atomic force probe 4, which is fixedly connected on, to be moved up and down on guide rail A7；It moves left and right guide rail B11 and is fixedly connected on branch
On frame 2；It moves up and down guide rail B10 and is fixedly connected on and move left and right on guide rail B11；Microscope mounting base 9 is fixedly connected on up and down
On moving guide rail B10；Light microscope 8 is fixedly connected in microscope mounting base 9；It is moved forward and backward guide rail 14 and is fixedly connected on base
On seat 1；Ultraprecise static air pressure rotary axis system 13 is fixedly connected on vertically to be moved forward and backward on guide rail 14；Three-dimensional precise pose adjusts
Mechanism 12 is fixedly connected on ultraprecise static air pressure rotary axis system 13.
As shown in Fig. 2, the atomic force scanning measurement system 5 includes scanning probe mounting base 51, atomic force scanning is visited
Needle 52, cutter positioning stent 53, cutter holding seat 54, handle of a knife 55, diamond cutter 56；
Its connection relation is：Scanning probe mounting base 51 is fixedly connected on atomic force probe 4；Atomic force scans probe
52 are mounted in scanning probe mounting base 51；Cutter positioning stent 53 is mounted on three-dimensional precise pose adjustment mechanism 12；Cutter
Grip slipper 54 is mounted on cutter positioning stent 53；Handle of a knife 55 is mounted on cutter holding seat 54；Diamond cutter 56 is mounted on
On handle of a knife 55.
It is described move left and right guide rail A6, move up and down guide rail A7, move up and down guide rail B10, move left and right guide rail B11,
The Adjustment precision for being moved forward and backward guide rail 14 is 0.01mm.
The Adjustment precision of the three-dimensional precise pose adjustment mechanism 12 is sub-micron.
The kinematic accuracy of the ultraprecise static air pressure rotary axis system 13 is 30nm.
The resolving accuracy of the light microscope 8 is 5 μm.
The diamond cutter cutting edge contour quality ultra precise measurement device specific workflow of the utility model is as follows：It will treat
Diamond cutter 56 is surveyed to be mounted on cutter holding seat 54 by handle of a knife 55；Light microscope 8 is opened, and adjusts to move left and right and lead
Rail B11, it moves up and down guide rail B10, be moved forward and backward guide rail 14 so that the cutting edge contour of diamond cutter 56 enters light microscope
In 8 field range；Adjustment moves left and right guide rail A6, moves up and down guide rail A7 so that atomic force probe 4 and diamond cutter
Distance is less than 10 μm；Under 8 visual field of light microscope, three-dimensional precise pose adjustment mechanism 12 is used so that atomic force scans
First 4 are less than 0.2 μm with diamond cutter distance；Open atomic force probe 4 so that atomic force scans probe 52 and diamond
56 cutting edge contour region of cutter contacts；13 remains stationary of ultraprecise static air pressure rotary axis system, atomic force probe 4 control atom
Power scanning probe 52 realizes micro- open-minded, surface roughness the measurement of the local cutting edge sharpness of diamond cutter 56, cutting edge；Drive superfinishing
Close 13 rotary motion of static air pressure rotary axis system realizes the measurement of diamond cutter 56 full cutting edge sharpness, circular arc percent ripple.
The utility model is not limited to above-mentioned specific embodiment, and person of ordinary skill in the field visualizes from above-mentioned
Hair, without performing creative labour, made various transformation are all fallen within the scope of protection of the utility model.
Claims (6)
1. a kind of diamond cutter cutting edge contour quality ultra precise measurement device, it is characterised in that：The measuring device includes
Pedestal (1), crossbeam (3), atomic force probe (4), atomic force scanning measurement system (5), moves left and right guide rail A at stent (2)
(6), guide rail A (7) is moved up and down, light microscope (8), microscope mounting base (9), guide rail B (10) is moved up and down, moves left and right
Guide rail B (11), three-dimensional precise pose adjustment mechanism (12), ultraprecise static air pressure rotary axis system (13), it is moved forward and backward guide rail
(14)；
Its connection relation is：Pedestal (1) is placed on vibrating isolation foundation；Stent (2) is fixedly connected on pedestal 1；Crossbeam (3) is fixed
It is connected on stent (2)；Guide rail A (6) is moved left and right to be fixedly connected on crossbeam (3)；Guide rail A (7) is moved up and down to be fixedly connected
In moving left and right on guide rail A (6)；Atomic force probe (4), which is fixedly connected on, to be moved up and down on guide rail A (7)；Move left and right guide rail
B11 is fixedly connected on stent (2)；It moves up and down guide rail B (10) and is fixedly connected on and move left and right on guide rail B (11)；Microscope
Mounting base (9), which is fixedly connected on, to be moved up and down on guide rail B (10)；Light microscope (8) is fixedly connected on microscope mounting base (9)
On；Guide rail (14) is moved forward and backward to be fixedly connected on pedestal (1)；Ultraprecise static air pressure rotary axis system (13) is fixedly connected vertically
In on back-and-forth motion guide rail (14)；Three-dimensional precise pose adjustment mechanism (12) is fixedly connected on ultraprecise static air pressure rotary axis system
(13) on.
2. a kind of diamond cutter cutting edge contour quality ultra precise measurement device according to claim 1, it is characterised in that：
The atomic force scanning measurement system (5) includes scanning probe mounting base (51), atomic force scanning probe (52), cutter positioning
Stent (53), cutter holding seat (54), handle of a knife (55), diamond cutter (56)；
Its connection relation is：Scanning probe mounting base (51) is fixedly connected on atomic force probe (4)；Atomic force scans probe
(52) in scanning probe mounting base (51)；Cutter positioning stent (53) is mounted on three-dimensional precise pose adjustment mechanism (12)
On；Cutter holding seat (54) is on cutter positioning stent (53)；Handle of a knife (55) is on cutter holding seat (54)；Buddha's warrior attendant
Stone cutter (56) is on handle of a knife (55).
3. a kind of diamond cutter cutting edge contour quality ultra precise measurement device according to claim 1, it is characterised in that：
It is described move left and right guide rail A (6), move up and down guide rail A (7), move up and down guide rail B (10), move left and right guide rail B (11),
The Adjustment precision for being moved forward and backward guide rail (14) is 0.01mm.
4. a kind of diamond cutter cutting edge contour quality ultra precise measurement device according to claim 1, it is characterised in that：
The Adjustment precision of the three-dimensional precise pose adjustment mechanism (12) is sub-micron.
5. a kind of diamond cutter cutting edge contour quality ultra precise measurement device according to claim 1, it is characterised in that：
The kinematic accuracy of the ultraprecise static air pressure rotary axis system (13) is 30nm.
6. a kind of diamond cutter cutting edge contour quality ultra precise measurement device according to claim 1, it is characterised in that：
The resolving accuracy of the light microscope (8) is 5 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721688479.8U CN207528173U (en) | 2017-12-07 | 2017-12-07 | A kind of diamond cutter cutting edge contour quality ultra precise measurement device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721688479.8U CN207528173U (en) | 2017-12-07 | 2017-12-07 | A kind of diamond cutter cutting edge contour quality ultra precise measurement device |
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|---|---|
| CN207528173U true CN207528173U (en) | 2018-06-22 |
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| CN201721688479.8U Active CN207528173U (en) | 2017-12-07 | 2017-12-07 | A kind of diamond cutter cutting edge contour quality ultra precise measurement device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107806818A (en) * | 2017-12-07 | 2018-03-16 | 中国工程物理研究院机械制造工艺研究所 | A kind of diamond cutter cutting edge contour quality ultra precise measurement device |
| CN111673540A (en) * | 2020-06-19 | 2020-09-18 | 中国工程物理研究院机械制造工艺研究所 | Actual cutting-oriented diamond cutter cutting edge profile calculation method |
-
2017
- 2017-12-07 CN CN201721688479.8U patent/CN207528173U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107806818A (en) * | 2017-12-07 | 2018-03-16 | 中国工程物理研究院机械制造工艺研究所 | A kind of diamond cutter cutting edge contour quality ultra precise measurement device |
| CN111673540A (en) * | 2020-06-19 | 2020-09-18 | 中国工程物理研究院机械制造工艺研究所 | Actual cutting-oriented diamond cutter cutting edge profile calculation method |
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