CN103234481B - High-efficiency and high-precision detection device for circular arc roundness of cutter point of diamond cutter - Google Patents

High-efficiency and high-precision detection device for circular arc roundness of cutter point of diamond cutter Download PDF

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Publication number
CN103234481B
CN103234481B CN201310152484.7A CN201310152484A CN103234481B CN 103234481 B CN103234481 B CN 103234481B CN 201310152484 A CN201310152484 A CN 201310152484A CN 103234481 B CN103234481 B CN 103234481B
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China
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stereomicroscope
cutter
afm
measurement
mobile platform
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CN201310152484.7A
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Chinese (zh)
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CN103234481A (en
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李增强
王亚奇
宗文俊
赵学森
孙涛
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哈尔滨工业大学
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Abstract

The invention provides a high-efficiency and high-precision detection device for circular arc roundness of a cutter point of a diamond cutter and belongs to the technical field of cutter detection devices. A precision air flotation shafting is vertically arranged at the center of a vibration isolation platform; a fine-aligning device is fixedly arranged at the upper end part of the precision air flotation shafting; a cutter fixture is fixedly arranged at the upper part of the fine-aligning device; a stereoscopic microscope system is arranged above the cutter fixture; and an atomic force microscope (AFM) system is arranged above one side of the cutter fixture. According to the high-efficiency and high-precision detection device disclosed by the invention, the stereoscopic microscope system assists the fine-aligning device in aligning, so that the aligning precision is increased, the defect that the measurement range of the AFM is narrow is overcome, and three-dimensional measurement with high measurement precision is realized; the problem of precision measurement of the circular arc roundness of the cutter point of the diamond cutter with a circular arc edge can be solved; and measurement data of the circular arc roundness can be used for reflecting dynamic characteristic of a cutter grinding machine, evaluating the cutter grinding quality of the cutter and providing data support for cutter compensation in the numeric control single-point diamond turning.

Description

A kind of high-efficiency high-accuracy pick-up unit of diamond cutter tool arc circularity
Technical field
The present invention relates to a kind of high-efficiency high-accuracy pick-up unit of diamond cutter tool arc circularity, belong to tool detection devices technical field.
Background technology
Ultraprecision Machining has become obtained successful gordian technique in international competition.Development sophisticated technology, Developing Defence Industry, development microelectronics industry etc. all need the produced instrument and equipment of Ultra-precision Turning.Present ultra precision cutting uses accurate monocrystalline Natural Diamond Tools to be processed with non-ferrous metal and nonmetal, directly can cut out the finished surface of ultra-smooth.Ultraprecision Machining occupies very important status in the manufacture of highly sophisticated products and sophisticated weapon.
The high precision of Ultra-precision machining is not only embodied in the requirement of effects on surface roughness, is also embodied in the requirement to surface figure accuracy.For Ultra-precision machining, obtain the high precision of part shape size and the smooth of finished surface, except must having ultraprecise lathe, high precision and the condition such as high-resolution detecting instrument and overstable processing environment, also must possess the high-precision diamond cutter carrying out cut, especially high-precision arc-blade diamond cutter.High-quality diamond cutter carries out Diamond Cutting processing and carries out the important base of relevant Ultra-precision Turning research work.Arc-blade diamond cutter has three major parameters, cutting edge blunt round radius (also referred to as sharpness), corner radius changing value (also referred to as tool arc circularity) and front and rear knife face roughness value.Cutting edge blunt round radius value determines the minimum thickness of cut in turning process, reflects the cutting power of cutter, and it constrains the roughness value of surface to be machined to a great extent.And the surface figure accuracy of the change major effect workpiece of corner radius value, impact greatly can be produced on the ripple angle value of surface to be machined.Particularly when the two main spindle numerical control super precision lathe of employing carries out adding man-hour, participation is all cut by each point on arc-blade diamond tool nose circular arc, and when with constant speed feeding, tool arc circularity will affect the surface configuration precision of workpiece to be machined.
From the above, rationally measure the point of a knife parameters such as cutting edge blunt round radius, tool arc circularity and front and rear knife face surfaceness accurately and not only can instruct tool sharpening technology, detect the grinding situation of diamond cutter, measure the dynamic perfromance that the data obtained more can reflect lapping machine, equally also can provide Data support for the cutter compensation in numerical control turning.In the middle of these parameters, important parameter is cutting edge sharpness and tool arc circularity, and they are the important indicators ensureing surface to be machined quality and surface figure accuracy.At present, large quantifier elimination has been carried out in the detection both at home and abroad for cutting edge sharpness, and measuring method has had multiple, comprises scanning electron microscope method (SEM), atomic force microscope (AFM) method etc.With cutting edge sharpness unlike the also ununified method of the measurement of tool arc circularity, also seldom there is the bibliographical information of related fields both at home and abroad.Arc-blade diamond tool nose arc radius very little (general about 1 ~ 5mm), angular range very narrow (generally all within 120 ° of scopes), and deviation from circular from very little (the good arc-blade diamond cutter of Grinding Quality generally can ensure that deviation from circular from is less than 0.1 μm within the scope of 120 °, and within the scope of 60 ° of circular arcs, deviation from circular from is less than 0.05 μm).More common method has ocular estimate, stereoscopic micrometering method, SEM mensuration and roundness measuring equipment mensuration etc. at present.
Ocular estimate is by observing the reflective situation of rear knife face measure, and completely with personal experience, be non-contact measurement, its measuring accuracy is low, and without standard; Stereoscopic micrometering method adopts stereomicroscope to carry out Optical imaging measurement, and its resolution can reach tens μm, be non-contact measurement, but its precision is lower; SEM and scanning electron microscope, SEM method adopts SEM to measure point of a knife image exactly and makes a decision, resolution can reach hundreds of nm, for non-contact measurement, its shortcoming measures the just image obtained, there is no the coordinate figure of given measurement point, Calculation of Roundness Error also to need to do feature extraction to point circumferentially, be difficult to accurate Calculation; Roundness measuring equipment method is contact type measurement, and measured by knife face after the contact of roundness measuring equipment gauge head, resolution is several μm, and in measuring process, after the ruby of roundness measuring equipment or sapphire gauge head and cutter, knife face contacts, and can produce certain damage to knife face after cutter.This slight damage is very fatal concerning Ultra-precision Turning, and the surface integrity after using it to carry out turnery processing can significantly reduce.And existing roundness measuring equipment is not very high to the measuring accuracy of small arc-shaped, be difficult to meet the requirements of nanometer measurement precision.
Along with the progress of diamond cutter grinding technology, the detection technique of diamond cutter cutting edge contour parameter also enters into the scope of Nanometer Metering, and will combine with the actual shape characteristic of cutter.Fig. 7 is the measurement range of part measuring method and the schematic diagram of resolution.
Measuring method can realize the nano-precision resolution of vertical direction mostly as shown in Figure 7, but horizontal resolution is all lower except SPM and SEM, and namely they can only realize the measurement of 1-dimention nano yardstick and cannot realize three-dimensional space measurement.Therefore, the research emphasis of current cutting edge contour parameter measurement mainly concentrates on and how effectively uses SPM and SEM to detect.
The appearance of scanning probe microscopy (SPM), to observe on micro-nano-scale for the mankind and reforming world provides the strongest instrument, atomic force microscope (AFM) in its family especially high with accuracy of detection, distinguishable comprise the various materials of insulator surface topography, work time the feature such as contact accurate with material surface, be widely used.But due to AFM self sweep limit very little, can not directly to the rear knife face pattern of cutter carry out entirety measure, therefore directly cannot obtain the circularity of tool nose circular arc.
Summary of the invention
The object of the invention is to solve above-mentioned prior art Problems existing, namely because AFM self sweep limit is very little, directly can not carry out entirety to the rear knife face pattern of cutter to measure, therefore directly cannot obtain the circularity of tool nose circular arc, and then a kind of high-efficiency high-accuracy pick-up unit of diamond cutter tool arc circularity is provided.
The object of the invention is to be achieved through the following technical solutions:
A kind of high-efficiency high-accuracy pick-up unit of diamond cutter tool arc circularity, comprise vibration-isolating platform, accurate air floating shaft system, fine setting center device, tool mounting, diamond cutter, 1394 interface units, stereomicroscope system, atomic force microscopy system, motor driver, AFM controller, signal interface unit and Measurement &control computer, described accurate air floating shaft system is vertically placed on the central authorities of vibration-isolating platform, fine setting center device is fixed on the upper end of air floating shaft system, tool mounting is fixed on the top of fine setting center device, diamond cutter is arranged on tool mounting, stereomicroscope Operation system setting is above tool mounting, the image signal output end of stereomicroscope system is connected with the picture signal input end of Measurement &control computer by 1394 interface units, atomic force microscopy system is arranged on the top of tool mounting side, the position signalling I/O of atomic force microscopy system is connected with the position signalling I/O of AFM controller, the signals collecting input end of the detection signal output terminal connection signal interface unit of AFM controller, the output terminal of signal interface unit connects the signal input part of Measurement &control computer, the output terminal of Measurement &control computer connects the input end of AFM controller, the input/output terminal of motor driver is connected with the signal I/O of accurate air floating shaft system, the signal I/O of motor driver is connected with the motor signal I/O of Measurement &control computer, described high power stereomicroscope system comprises stereomicroscope system support seat, three-D displacement worktable, ccd image sensor, high power stereomicroscope and stereomicroscope clamping part, the lower end of described stereomicroscope system support seat is fixed on vibration-isolating platform, the upper end of stereomicroscope system support seat is fixed with three-D displacement worktable, stereomicroscope clamping part is fixedly connected with three-D displacement worktable, high power stereomicroscope is fixed in stereomicroscope clamping part, and the top of high power stereomicroscope is fixed with ccd image sensor.
Beneficial effect of the present invention: 1, integral layout is reasonable, facilitates aligning and measurement; 2, stereomicroscope system supplymentary fine setting center device carries out aligning, and improve aligning precision, overcome the defect that AFM measurement range is little, can carry out three-dimensional measurement, measuring accuracy is high; 3, the workload of aligning process and tool setting process is greatly reduced, simple to operate; 4, the precision measurement problem of roundness of arc of tool tip of diamond tool with arc edge can not only be solved, its measurement data can also reflect the dynamic perfromance of cutter grinding machine, can be used to the grinding quality evaluating cutter, and Data support can be provided for the cutter compensation in numerical control Single point diamond turning o.
Accompanying drawing explanation
Fig. 1 is the structural representation of the high-efficiency high-accuracy pick-up unit of diamond cutter tool arc circularity of the present invention;
Fig. 2 is the partial enlarged drawing of Fig. 1;
Fig. 3 is the external structure schematic diagram of fine setting center device 3;
Fig. 4 is the external structure schematic diagram of stereomicroscope system 7;
Fig. 5 is the external structure schematic diagram of atomic force microscopy system 8;
Fig. 6 is the external structure schematic diagram of precision three-dimensional displacement work table 8-2;
Fig. 7 is measurement range and the resolution schematic diagram of each quasi-instrument.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail: the present embodiment is implemented under premised on technical solution of the present invention, gives detailed embodiment, but protection scope of the present invention is not limited to following embodiment.
As shown in Fig. 1 ~ Fig. 6, the high-efficiency high-accuracy pick-up unit of a kind of diamond cutter tool arc circularity involved by this example, comprise vibration-isolating platform 1, accurate air floating shaft system 2, fine setting center device 3, tool mounting 4, diamond cutter 5, 1394 interface units 6, stereomicroscope system 7, atomic force microscope (AFM) system 8, motor driver 9, AFM controller 10, signal interface unit 11 and Measurement &control computer 12, described accurate air floating shaft system 2 is vertically placed on the central authorities of vibration-isolating platform 1, fine setting center device 3 is fixed on the upper end of air floating shaft system 2, tool mounting 4 is fixed on the top of fine setting center device 3, diamond cutter is arranged on tool mounting 4, stereomicroscope system 7 is arranged on the top of tool mounting 4, the image signal output end of stereomicroscope system 7 is connected with the picture signal input end of Measurement &control computer 12 by 1394 interface units 6, atomic force microscopy system 8 is arranged on the top of tool mounting 4 side, the position signalling I/O of atomic force microscopy system 8 is connected with the position signalling I/O of AFM controller 10, the signals collecting input end of the detection signal output terminal connection signal interface unit 11 of AFM controller 10, the output terminal of signal interface unit 11 connects the signal input part of Measurement &control computer 12, the output terminal of Measurement &control computer 12 connects the input end of AFM controller 10, the input/output terminal of motor driver 9 is connected with the signal I/O of accurate air floating shaft system 2, the signal I/O of motor driver 9 is connected with the motor signal I/O of Measurement &control computer 12.
Described fine setting center device 3 comprises two groups of accurate micrometer head 3-1, upper end cover 3-2 and bottom end cover 3-3, and described upper end cover 3-2 is fixed on bottom end cover 3-3, and two groups of accurate micrometer head 3-1 are 90 degree and are arranged on upper end cover 3-2 and bottom end cover 3-3.The height of whole fine setting center device is very little, adopts accurate micrometer head to carry out aligning, arranges two groups of orthogonal micrometer heads of axis in the horizontal direction.By adjusting these two micrometer heads thus realizing the aligning work of tool mounting 4 in two independent, direction.Guarantee to regulate tool position to make the tool arc center of cutter and axle system centre of gyration deviation be less than 1 μm under the monitoring of stereomicroscope system.
Described high power stereomicroscope system 7 comprises stereomicroscope system support seat 7-1, three-D displacement worktable 7-2, ccd image sensor 7-3, high power stereomicroscope 7-4 and stereomicroscope clamping part 7-5, the lower end of described stereomicroscope system support seat 7-1 is fixed on vibration-isolating platform 1, the upper end of stereomicroscope system support seat 7-1 is fixed with three-D displacement worktable 7-2, stereomicroscope clamping part 7-5 is fixedly connected with three-D displacement worktable 7-2, high power stereomicroscope 7-4 is fixed on stereomicroscope clamping part 7-5, the top of high power stereomicroscope 7-4 is fixed with ccd image sensor 7-3.During work, three-D displacement worktable 7-2 can the position of control agent stereomicroscope, and ccd image sensor 7-3 is arranged on high power stereomicroscope 7-4 and observes end, the optical imagery that stereomicroscope obtains can be converted to digital signal.Stereomicroscope system 7 adopts vertical installation, can observe the position of point of a knife and axle system on the one hand easily, can also observe the position of point of a knife and probe on the other hand, gauger's standing operation, easy to operate, is convenient to regulate.First coarse adjustment three-D displacement worktable, makes tool arc be positioned within the field range of high power stereomicroscope 7-4.During aligning, first measure a point of a knife surface image with high power stereomicroscope 7-4 and ccd image sensor 7-3, then cutter is with the accurate air floating shaft system 2 of revolution to the less angle of anticlockwise one, measures point of a knife surface image.Cutter again to the angle that right rotation is identical, measures its point of a knife surface image with axle system.Then respectively tool arc contours extract, contour curve matching are carried out to obtained image, obtain the home position of tool arc during diverse location, if measure the home position difference that matching obtains for twice, then prove to there is bias, then according to the location point coordinate averaged that twice fitting obtains, obtain X (Y) to heart-distance regulating from, carry out the fine setting heart by fine setting center device 3 pairs of points of a knife.An X (Y) is screwed in the small distance of (back-out) to micrometer head.The CCD repeated again afterwards just now obtains image, contours extract, contour fitting, data processing, fine setting heart process, repeats this process until the home position that matching obtains is positioned within required error range.
Described atomic force microscopy system 8 comprises AFM system support seat 8-1, three-dimensional precise displacement work table 8-2, AFM scanner head erecting frame 8-3 and AFM scanning head (containing probe) 8-4, described three-dimensional precise displacement work table 8-2 is arranged on AFM system support seat 8-1, AFM scanner head erecting frame 8-3 is connected with three-dimensional precise displacement work table 8-2, and AFM scanning head 8-4 is arranged on the lower end of AFM scanner head erecting frame 8-3.
AFM system support seat 8-1 is vertical to be fixed on vibration-isolating platform 1, three-dimensional precise displacement work table 8-2 is arranged on AFM system support seat 8-1, the relative position of AFM scanning head 8-4 can be regulated, tool arc is adjusted in AFM measurement range, and AFM probe tip and the tool arc center of circle are aligned in error range.
Described three-dimensional precise displacement work table 8-2 comprises three spiral micrometer head 8-2-1, X to mobile platform (containing spherical guide) 8-2-2, bearing 8-2-3, the mobile platform 8-2-4 of Z-direction and the mobile platform 8-2-5 of Y-direction, described X to mobile platform 8-2-2 be arranged on the top of the mobile platform 8-2-5 of Y-direction, the side at bearing 8-2-3 right angle and X to the upper end of mobile platform 8-2-2 be fixedly connected with, the opposite side at bearing 8-2-3 right angle is fixedly connected with the mobile platform 8-2-4 of Z-direction, three spiral micrometer head 8-2-1 press X, Z, Y-direction be arranged on respectively X to mobile platform 8-2-2, on the mobile platform 8-2-4 of Z-direction and the mobile platform 8-2-5 of Y-direction.
Principle of work: be first arranged on by diamond cutter 5 to be detected on the tool mounting 4 of accurate air floating shaft system 2 end, is overlapped with reference to making the tool arc center of circle and the rotary axis system centre of gyration after ccd image result aligning by fine setting center device 3.Three-dimensional precise displacement work table 8-2 in following adjustment AFM system, the center of circle of probe tip and tool arc is longitudinally aimed at, and when cutter is turned round with axle system, surface elevation change in tool arc face is in the range ability of AFM.Start accurate air floating shaft system 2 low speed steadily to rotate, diamond cutter 5 rotates with it, and AFM scanning head 8-4 contacts tool arc surface, thus obtains the undulating state of tool arc profile.The signal collected outputs in Measurement &control computer 12 by signal interface unit 11 by AFM controller 10, carry out the analysis of measurement data and the evaluation of circularity there, in aligning and tool setting process, the image of acquisition is passed to Measurement &control computer 11 by 1394 interface units 6 by the ccd image sensor 7-3 in stereomicroscope system 7, carry out image procossing and data analysis there, operator carries out aligning and tool setting respectively according to result.
The above; be only the present invention's preferably embodiment; these embodiments are all based on the different implementations under general idea of the present invention; and protection scope of the present invention is not limited thereto; anyly be familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.

Claims (4)

1. the high-efficiency high-accuracy pick-up unit of a diamond cutter tool arc circularity, comprise vibration-isolating platform (1), accurate air floating shaft system (2), fine setting center device (3), tool mounting (4), diamond cutter (5), 1394 interface units (6), stereomicroscope system (7), atomic force microscopy system (8), motor driver (9), AFM controller (10), signal interface unit (11) and Measurement &control computer (12), described accurate air floating shaft system (2) is vertically placed on the central authorities of vibration-isolating platform (1), fine setting center device (3) is fixed on the upper end of air floating shaft system (2), tool mounting (4) is fixed on the top of fine setting center device (3), diamond cutter (5) is arranged on tool mounting (4), stereomicroscope system (7) is arranged on the top of tool mounting (4), the image signal output end of stereomicroscope system (7) is connected by the picture signal input end of 1394 interface units (6) with Measurement &control computer (12), atomic force microscopy system (8) is arranged on the top of tool mounting (4) side, the position signalling I/O of atomic force microscopy system (8) is connected with the position signalling I/O of AFM controller (10), the signals collecting input end of detection signal output terminal connection signal interface unit (11) of AFM controller (10), the output terminal of signal interface unit (11) connects the signal input part of Measurement &control computer (12), the output terminal of Measurement &control computer (12) connects the input end of AFM controller (10), the input/output terminal of motor driver (9) is connected with the signal I/O of accurate air floating shaft system (2), the signal I/O of motor driver (9) is connected with the motor signal I/O of Measurement &control computer (12), it is characterized in that, described stereomicroscope system (7) comprises stereomicroscope system support seat (7-1), three-D displacement worktable (7-2), ccd image sensor (7-3), high power stereomicroscope (7-4) and stereomicroscope clamping part (7-5), the lower end of described stereomicroscope system support seat (7-1) is fixed on vibration-isolating platform (1), the upper end of stereomicroscope system support seat (7-1) is fixed with three-D displacement worktable (7-2), stereomicroscope clamping part (7-5) is fixedly connected with three-D displacement worktable (7-2), high power stereomicroscope (7-4) is fixed in stereomicroscope clamping part (7-5), the top of high power stereomicroscope (7-4) is fixed with ccd image sensor (7-3).
2. the high-efficiency high-accuracy pick-up unit of diamond cutter tool arc circularity according to claim 1, it is characterized in that, described fine setting center device (3) comprises two groups of accurate micrometer heads (3-1), upper end cover (3-2) and bottom end covers (3-3), described upper end cover (3-2) is fixed on bottom end cover (3-3), and two groups of accurate micrometer heads (3-1) are arranged on upper end cover (3-2) and bottom end cover (3-3) in 90 degree.
3. the high-efficiency high-accuracy pick-up unit of diamond cutter tool arc circularity according to claim 1, it is characterized in that, described atomic force microscopy system (8) comprises AFM system support seat (8-1), three-dimensional precise displacement work table (8-2), AFM scanner head erecting frame (8-3) and AFM scanning head (8-4), described three-dimensional precise displacement work table (8-2) is arranged on AFM system support seat (8-1), AFM scanner head erecting frame (8-3) is connected with three-dimensional precise displacement work table (8-2), AFM scanning head (8-4) is arranged on the lower end of AFM scanner head erecting frame (8-3).
4. the high-efficiency high-accuracy pick-up unit of diamond cutter tool arc circularity according to claim 3, it is characterized in that, described three-dimensional precise displacement work table (8-2) comprises three spiral micrometer heads (8-2-1), X to mobile platform (8-2-2), bearing (8-2-3), the mobile platform (8-2-4) of Z-direction and the mobile platform (8-2-5) of Y-direction, described X to mobile platform (8-2-2) be arranged on the top of the mobile platform (8-2-5) of Y-direction, the side at bearing (8-2-3) right angle and X to the upper end of mobile platform (8-2-2) be fixedly connected with, the opposite side at bearing (8-2-3) right angle is fixedly connected with the mobile platform (8-2-4) of Z-direction, three spiral micrometer heads (8-2-1) are by X, Y, Z-direction be arranged on respectively X to mobile platform (8-2-2), on the mobile platform (8-2-4) of Z-direction and the mobile platform (8-2-5) of Y-direction.
CN201310152484.7A 2013-04-28 2013-04-28 High-efficiency and high-precision detection device for circular arc roundness of cutter point of diamond cutter CN103234481B (en)

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