CN109696447B

CN109696447B - Soft X-ray microscopic imaging device

Info

Publication number: CN109696447B
Application number: CN201811645352.7A
Authority: CN
Inventors: 郑睿; 刘炜; 谢庆国; 肖鹏
Original assignee: Raycan Technology Co Ltd
Current assignee: Raycan Technology Co Ltd
Priority date: 2018-12-29
Filing date: 2018-12-29
Publication date: 2020-10-16
Anticipated expiration: 2038-12-29
Also published as: WO2020134503A1; CN109696447A

Abstract

The application provides a soft X-ray microscopic imaging device, which comprises a soft X-ray light source, a three-dimensional displacement mechanism, a vacuum unit, a laser unit, a reflection unit, a sample chamber and a detector, wherein the soft X-ray light source comprises a vacuum target chamber, a refrigeration chamber and a nozzle, the refrigeration chamber and the nozzle are accommodated in the vacuum target chamber, the nozzle is arranged on the refrigeration chamber, the three-dimensional displacement mechanism is respectively connected with the refrigeration chamber and the vacuum target chamber, and the vacuum target chamber is provided with two opposite outlets; the vacuum unit comprises a first vacuum pump and a second vacuum pump which are respectively connected with two outlets of the vacuum target chamber; the pulse laser generator emits light which passes through a laser focusing lens and then is focused at a nozzle; the reflection unit has a second mirror; the sample chamber is communicated with the vacuum target chamber, a capillary glass tube is accommodated in the sample chamber, and the position of the capillary glass tube corresponds to the focus of the nozzle and the focus of the reflector; the detector is connected with the sample chamber and corresponds to the position of the capillary glass tube. The method and the device have the advantages of accurate detection, high efficiency and cost saving.

Description

Soft X-ray microscopic imaging device

Technical Field

The present application relates to the field of soft X-rays, and more particularly to a soft X-ray microscopic imaging apparatus.

Background

The X-ray is electromagnetic radiation with a very short wavelength, the wavelength of the electromagnetic radiation is about 0.01-100 angstrom meters, the X-ray is between ultraviolet rays and gamma rays, the X-ray has very high penetrating power, and a plurality of substances which are opaque to visible light can be penetrated. Shorter wavelength X-rays have greater energy, also referred to as hard X-rays, and lower energy wavelengths, referred to as soft X-rays. Generally, the X-rays with the wavelength less than 0.1 angstrom are called super-hard X-rays, the X-rays with the wavelength within the range of 0.1 to 10 angstrom are called hard X-rays, and the X-rays with the wavelength within the range of 10 to 100 angstrom are called soft X-rays.

In recent years, soft X-rays have been widely used in many scientific fields, particularly in the fields of soft X-ray microscopy and soft X-ray projection lithography. In the field of soft X-ray microscopic imaging, a soft X-ray microscopic imaging instrument adopts soft X-rays with a water window waveband (the wavelength is between 2.3nm and 4.4 nm) for imaging, can directly carry out nanoscale three-dimensional imaging on an active biological sample in a natural water-containing state, is a key tool for observing a real three-dimensional ultrastructure in a cell, and has extremely important significance on cell structure science and functional study.

The soft X-ray microscopic imaging instrument in the prior art comprises a synchrotron radiation soft X-ray microscopic instrument and a small-sized soft X-ray microscopic instrument, wherein a synchrotron radiation light source in the synchrotron radiation soft X-ray microscopic instrument is generated by a large accelerator, and is greatly restricted in light source availability, so that the application and popularization of the instrument are greatly limited; in a small-sized soft X-ray microscopic instrument adopting a liquid target, a soft X-ray camera is adopted to detect soft X-rays, however, the gain of the soft X-ray camera is relatively low, when the amplification factor is large, the detection effect is poor due to the fact that the number of photons per unit area is greatly reduced, the problems of low energy resolution, long exposure time and the like exist in low-energy ray measurement, and the performance and the service life of the instrument are greatly influenced by the problems. In addition, the soft X-ray microscopy instrument has extremely high requirement on the accuracy of a light path, the accuracy of the light path can directly influence the imaging quality, the instrument in the prior art is complicated in adjusting the light path, and the used adjusting scheme and device have high cost, so that the imaging speed cannot meet the requirement of rapid three-dimensional imaging of the cell ultrastructure at all, and the application and popularization of the instrument are greatly limited.

Disclosure of Invention

The purpose of this application is to provide a soft X-ray micro-imaging device to solve the problem that soft X-ray micro-imaging instrument's detection efficiency is low and with high costs among the prior art.

In order to solve the above technical problem, the technical scheme of this application provides a soft X-ray microscopic imaging device, soft X-ray microscopic imaging device includes soft X-ray light source, soft X-ray light source includes vacuum target chamber, refrigeration chamber and nozzle, the refrigeration chamber with the nozzle holding is in the vacuum target chamber, the nozzle set up in on the refrigeration chamber, soft X-ray microscopic imaging device still includes: the three-dimensional displacement mechanism is respectively connected with the refrigeration cavity and the vacuum target chamber, and the vacuum target chamber is provided with two opposite outlets; the vacuum unit comprises a first vacuum pump and a second vacuum pump, and the first vacuum pump and the second vacuum pump are respectively connected with two outlets of the vacuum target chamber; the laser unit comprises a pulse laser generator and a laser focusing mirror, and laser emitted by the pulse laser generator is focused at the nozzle after passing through the laser focusing mirror; a reflecting unit having a second mirror, the reflecting unit being in communication with the vacuum target chamber; the sample chamber is communicated with the vacuum target chamber, a capillary glass tube is accommodated in the sample chamber, and the position of the capillary glass tube corresponds to the focus of the nozzle and the focus of the reflector; and the detector is connected with the sample chamber and corresponds to the position of the capillary glass tube.

According to one embodiment of the application, the vacuum target chamber comprises: the three-way pipe is provided with a first outlet, a second outlet and a third outlet, the first outlet and the second outlet are opposite, the third outlet is located between the first outlet and the second outlet, the first outlet is connected with a supporting plate, a refrigerant inlet pipeline, a refrigerant outlet pipeline and a working gas pipeline respectively penetrate through the supporting plate and are connected with the refrigeration cavity, and the third outlet is connected with the first vacuum pump; the multi-way pipe comprises a top opening, a bottom opening and a plurality of side openings, the top opening and the bottom opening are opposite, the side openings are located at the top opening and the bottom opening, the top opening is tightly connected with the second outlet, a vacuum outlet connected with the second vacuum pump is arranged at the bottom opening, the position of the nozzle corresponds to the side openings, a groove is arranged below the nozzle and is fixed through an adapter, the adapter is arranged at the vacuum outlet, and the groove is communicated with the vacuum outlet.

According to one embodiment of the application, a temperature sensor is provided at the nozzle.

According to an embodiment of the application, be provided with the heat conduction pole on the adapter, the heat conduction pole with the refrigeration chamber is connected.

According to one embodiment of the present application, the shower head is provided with a heater at the periphery thereof.

According to one embodiment of the application, the support plate is arranged on the vacuum target chamber, a refrigerant inlet pipeline, a refrigerant outlet pipeline and a working gas pipeline are arranged on the support plate and penetrate through the support plate, the refrigerant inlet pipeline and the refrigerant outlet pipeline are communicated with the refrigeration cavity, and the working gas pipeline penetrates through the refrigeration cavity and is connected with the nozzle; the first corrugated pipe is arranged between the support plate and the vacuum target chamber, and the refrigerant inlet pipeline, the refrigerant outlet pipeline and the working gas pipeline all penetrate through the first corrugated pipe.

According to an embodiment of the present application, the three-dimensional displacement mechanism includes a first displacement adjuster, a second displacement adjuster, and a third displacement adjuster, and the first displacement adjuster, the second displacement adjuster, and the third displacement adjuster are all disposed between the support plate and the vacuum target chamber and respectively control the support plate to move along three directions perpendicular to each other.

According to an embodiment of the application, soft X ray light source is still located including mutual parallel arrangement and cover first backup pad, second backup pad and the third backup pad in the bellows outside, first backup pad passes through third displacement regulator movably is fixed in the backup pad, the second backup pad passes through second displacement regulator movably is fixed in on the first backup pad, the second backup pad passes through simultaneously first displacement regulator movably is fixed in the third backup pad, the third backup pad is fixed in on the vacuum target chamber.

According to an embodiment of the application, first displacement regulator includes first support frame, first propeller, first guide rail and first guide rail groove, first support frame is fixed in the third backup pad, first propeller is fixed in on the first support frame and with the second backup pad corresponds, first guide rail is fixed in along first direction in the third backup pad, first guide rail groove is fixed in second backup pad below and with first guide rail sliding fit.

According to an embodiment of the application, the second displacement regulator includes second support frame, second propeller, second guide rail and second guide rail groove, the second support frame is fixed in the second backup pad, the second propeller is fixed in on the second support frame and with first backup pad corresponds, the second guide rail is fixed in along the second direction in the second backup pad, the second guide rail groove is fixed in first backup pad below and with second guide rail sliding fit, first direction with second direction mutually perpendicular.

According to an embodiment of the application, the third displacement regulator includes screw rod and nut, the screw rod is followed the even being fixed in of third direction on the first backup pad, the backup pad passes through the nut with the cooperation of bolt is fixed in on the bolt, the third direction with first direction the second direction mutually perpendicular.

According to an embodiment of the application, the vacuum unit further comprises a vacuum controller connected with the first vacuum pump and the second vacuum pump, respectively.

According to an embodiment of the present application, the laser unit further includes a first reflecting mirror disposed between the pulse laser generator and the laser focusing mirror to conduct a laser light path.

According to one embodiment of the application, a lifting platform is arranged below the pulse laser, a first regulator is arranged below the first reflecting mirror, and a second regulator is arranged below the laser focusing mirror.

According to an embodiment of the present application, the reflection unit includes a third support, a third threaded rod, and a blind plate, the third threaded rod is disposed on the third support, the blind plate is disposed on the third threaded rod, and the second mirror is installed on the blind plate.

According to an embodiment of the present application, the reflection unit further includes a second bellows connected to the blind plate and the vacuum target chamber, respectively.

According to an embodiment of the application, be provided with on the third threaded rod with a plurality of third bolts of third threaded rod complex, the third bolt is located the both sides of blind plate respectively.

According to one embodiment of the application, the sample chamber comprises a sample chamber housing, two opposite side walls of which are connected with the vacuum target chamber and the detector, respectively.

According to an embodiment of the application, the indoor capillary glass pipe and the diaphragm pipe of being provided with of sample, the diaphragm hole that has along the axis direction extension in the diaphragm pipe, the one end in diaphragm hole corresponds capillary glass pipe, the other end in diaphragm hole corresponds the detector, the nozzle the focus of second mirror the top of capillary glass pipe and the diaphragm hole is located same water flat line.

According to an embodiment of the application, the diaphragm pipe with still be provided with the terrace with edge between the capillary glass pipe, have the terrace with edge hole in the terrace with edge hole, the extending direction in terrace with the extending direction in diaphragm hole is unanimous, the terrace with edge hole is close to one end department of capillary glass pipe is provided with the zone plate.

According to an embodiment of the application, the prism table is arranged on a three-dimensional electric displacement table, and the three-dimensional electric displacement table is connected with an aviation plug arranged on the sample chamber shell.

According to one embodiment of the application, the capillary glass tube is arranged on a sample rotating platform, and the sample rotating platform is arranged on a sample two-dimensional adjusting platform.

According to one embodiment of the application, the detector includes a scintillation crystal corresponding to the sample chamber and a silicon photomultiplier coupled to the scintillation crystal.

According to one embodiment of the application, a three-dimensional displacement table is arranged below the detector.

The application provides a soft X-ray microscopic imaging device, very big improvement its detection efficiency to the weak light signal, reduced formation of image exposure time, can realize higher magnification. The three-dimensional displacement mechanism with adjustable soft X ray light source in this application adopts, has realized in the vacuum to the regulation of liquid miniflow position and angle, has improved the geometric accuracy of soft X ray light path, has made things convenient for the light path to adjust. The reflecting unit that adopts the multiaxis to adjust in this application can adjust the geometric position and the angle of pitch of second mirror in the vacuum, has realized the optimization of light path. The vacuum system in the application can realize the accurate control from normal pressure to vacuum in the vacuum cavity through the design of pre-pumping, full pumping, a metal frustum and the like. The soft X-ray light source used in the application has the advantages of low debris and high conversion rate, the intensity of the light source is improved, the damage to the optical element in the light path is reduced, and the service life of the instrument can be prolonged. In a word, the soft X-ray microscopic imaging device provided by the application can reach the nanoscale imaging resolution and the second-level two-dimensional imaging time with lower cost, can be widely applied to nanoscale rapid three-dimensional microscopic imaging in the fields of life science and medicine research and development, and has demonstration effect on the research fields of structures and metabolism of functional cells, pathogenic mechanisms of microorganisms and the like.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, it is obvious that the drawings in the following description are only some embodiments described in the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without any creative effort.

FIG. 1 is a perspective schematic view of a soft X-ray microscopy imaging apparatus according to one embodiment of the present application;

FIG. 2 is a schematic plan view of the back side of the soft X-ray micro-imaging device according to FIG. 1;

FIG. 3 is a schematic top view of the soft X-ray microscopy imaging apparatus according to FIG. 1;

FIG. 4 is a schematic perspective view of a soft X-ray source of the soft X-ray micro-imaging apparatus according to FIG. 1;

FIG. 5 is a partially enlarged schematic perspective view of the soft X-ray source according to FIG. 4 showing a three-dimensional displacement mechanism;

FIG. 6 is a schematic perspective view, partly in section, of the soft X-ray light source according to FIG. 4, showing the refrigeration cavity and the vacuum target;

FIG. 7 is a schematic cross-sectional view of the soft X-ray source according to FIG. 4, wherein only the upper half is shown;

FIG. 8 is a schematic cross-sectional view of the soft X-ray source according to FIG. 4, wherein only the lower half is shown;

FIG. 9 is a partially enlarged schematic perspective view of the soft X-ray light source according to FIG. 8 showing the nozzle and heating mechanism;

FIG. 10 is a schematic perspective view of a reflection unit of the soft X-ray microscopy imaging apparatus according to FIG. 1;

fig. 11 is a schematic perspective view in section of a reflection unit of the soft X-ray micro-imaging device according to fig. 10;

fig. 12 is a schematic perspective view of the interior of a sample chamber of the soft X-ray micro-imaging apparatus according to fig. 1.

Detailed Description

The present application is further described below with reference to specific examples. It should be understood that the following examples are illustrative only and are not intended to limit the scope of the present application.

It will be understood that when an element/feature is referred to as being "disposed on" another element/feature, it can be directly on the other element/feature or intervening elements/features may also be present. When a component/part is referred to as being "connected/coupled" to another component/part, it can be directly connected/coupled to the other component/part or intervening components/parts may also be present. The term "connected/coupled" as used herein may include electrical and/or mechanical physical connections/couplings. The term "comprises/comprising" as used herein refers to the presence of features, steps or components/features, but does not preclude the presence or addition of one or more other features, steps or components/features. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

In addition, in the description of the present application, the terms "first", "second", and the like are used for descriptive purposes only and to distinguish similar objects, and there is no order of precedence between the two, and no indication or implication of relative importance is to be inferred. In addition, in the description of the present application, "a plurality" means two or more unless otherwise specified.

Fig. 1 is a perspective view of a soft X-ray micro-imaging device according to an embodiment of the present application, fig. 2 is a schematic plan view of a back surface of the soft X-ray micro-imaging device according to fig. 1, fig. 3 is a schematic plan view of the soft X-ray micro-imaging device according to fig. 1, as can be seen from fig. 1 in combination with fig. 2 and 3, the soft X-ray micro-imaging device provided by the present application includes a soft X-ray light source 300, a vacuum unit 400, a laser unit 500, a reflection unit 600, a sample chamber 700, and a detector 800, wherein the X-ray light source 300, the laser unit 500, the reflection unit 600, the sample chamber 700, and the detector 800 are all disposed on a first operation platform 100, the vacuum unit 400 is disposed on a second operation platform 200, the soft X-ray light source 300 has a three-dimensional displacement adjusting mechanism, a three-way pipe 40, and a multi-way pipe 50, the three-way pipe 40 and the multi-way pipe 50 are connected with each other; the vacuum unit 400 comprises a vacuum controller 410, a first vacuum pump 420 and a second vacuum pump 430, wherein the vacuum controller 410 is respectively connected with the first vacuum pump 420 and the second vacuum pump 430 and controls the operation of the first vacuum pump 420 and the second vacuum pump 430, the first vacuum pump 420 is connected with one outlet of the tee pipe 40 through a right-angle elbow 431, and the second vacuum pump 430 is connected with a vacuum exhaust port 432 arranged below the multi-way pipe 50 through a vacuum pipeline; the laser unit 500 comprises a pulse laser generator 501, a first reflector 510 and a laser focusing mirror 520, wherein a lifting table 502 capable of adjusting the height and the direction is arranged at the bottom of the pulse laser generator 501, a first adjuster 511 capable of adjusting the height and the angle is arranged at the bottom of the first reflector 510, a second adjuster 521 capable of adjusting the height and the angle is arranged at the bottom of the laser focusing mirror 520, and laser emitted by the pulse laser generator 501 can be reflected to the laser focusing mirror 520 (as shown by arrows in fig. 3) through the first reflector 510 and then focused on a liquid microflow in the soft X-ray light source 300 through the laser focusing mirror 520 by adjusting the lifting table 502, the first adjuster 511 and the second adjuster 521, so that the liquid microfluid is converted into plasma and generates soft X-rays; the reflecting unit 600 is connected to one of the outlets of the side of the multi-port tube 50, and a second reflecting mirror 611 (fig. 11) is provided in the reflecting unit 600 to focus and reflect the soft X-rays toward the sample chamber 700; the sample chamber 700 and the reflection unit 600 are oppositely arranged relative to the multi-way tube 50, the sample chamber 700 is connected with a corresponding outlet on the multi-way tube 50 through one outlet, a sample is arranged in the sample chamber, the adjusted soft X-ray can directly irradiate on the sample, and the X-ray passing through the sample continuously forwards reaches the detector 800 and is detected by the detector 800; the detector 800 is connected with the opening at the other side of the sample chamber 700 through pipelines 780 and 870, the detector 800 and the light path of the soft X-ray are positioned on the same horizontal line, the bottom of the detector 800 is provided with a three-dimensional displacement table 810, and the position of the detector 800 can be adjusted through the three-dimensional displacement table 810; the detector 800 includes a scintillation crystal for converting received soft X-rays into visible light, and an SiPM (silicon photomultiplier) coupled to the scintillation crystal, where the SiPM converts the visible light into an electrical signal and outputs the electrical signal, and the output electrical signal is further processed by data to form a corresponding image.

The parts of the soft X-ray micro-imaging device provided by the present application will be described in detail below with reference to fig. 4-12.

Fig. 4 is a schematic perspective view of a soft X-ray light source 300 according to an embodiment of the present application, and as can be seen from fig. 4, the present application provides a soft X-ray light source 300 including a three-dimensional displacement mechanism, a vacuum target chamber, a refrigeration mechanism and a light source generation mechanism, and the following detailed description of the components is made with reference to the accompanying drawings.

In fig. 4, the three-dimensional displacement mechanism includes a support plate 10, a first bellows 60, a first flange 30, a first displacement adjuster 70, a second displacement adjuster 80, and a third displacement adjuster 14, wherein the support plate 10 has a plate shape; the first bellows 60 is cylindrical and can realize expansion and contraction along the axial direction thereof, the top of the first bellows 60 is hermetically arranged on the lower plate surface of the support plate 10, the bottom of the first bellows 60 is tightly connected with the first flange 30, and the support plate 10, the first bellows 60 and the first flange 30 form a closed approximately cylindrical space; defining the vertical central line (namely the vertical direction of the paper surface in the figure) of the cylindrical space as the Z-axis direction, and defining two mutually vertical directions in a plane vertical to the Z-axis direction as the X-axis direction and the Y-axis direction; a plurality of first screw rods 24 extending along the Z-axis direction are arranged on the first flange plate 30, an annular third support plate 23 is fixedly arranged at the top of each first screw rod 24, and a first displacement regulator 70 is arranged on each third support plate 23; the second support plate 22 and the third support plate 23 have the same shape and are arranged in parallel, the second support plate 22 is positioned above the third support plate 23 and is connected with the third support plate 23 through a first displacement regulator 70, and a second displacement regulator 80 is arranged on the second support plate 22; the first support plate 21 and the second support plate 22 have the same shape and are arranged in parallel, the first support plate 21 is positioned above the second support plate 22 and is connected with the second support plate 22 through a second displacement regulator 80; the first support plate 21, the second support plate 22, and the third support plate 23 are arranged substantially in a stack and have through holes of the same size, in which the first bellows 60 is accommodated; a plurality of (usually three) second screw rods 15 extending along the Z-axis direction are arranged on the first support plate 21, the support plate 10 is fixed on the second screw rods 15 through adjusting nuts 14, at this time, the adjusting nuts 14 form third displacement adjusters, and the third displacement adjusters 14 can adjust the position of the support plate 10 along the Z-axis direction; the support plate 10 is further provided with a working gas pipe 11, a refrigerant outlet pipe 12 and a refrigerant inlet pipe 13, and the working gas pipe 11, the refrigerant outlet pipe 12 and the refrigerant inlet pipe 13 pass through the support plate 10 from the outside and are inserted into the first bellows 60.

Further, in fig. 4, the vacuum target chamber includes a tee 40 and a multi-way tube 50, the tee 40 having three outlets: the top outlet and the bottom outlet form a cylindrical space extending along the Z-axis direction, and the side outlet is communicated with the cylindrical space; a second flange plate 41 is arranged at the outlet at the top, a third flange plate 42 is arranged at the outlet at the side surface, and a fourth flange plate 43 is arranged at the outlet at the bottom; the first flange 30 and the second flange 41 are tightly connected through a gasket and a bolt; the multi-way pipe 50 is provided with an upper opening, a lower opening and a plurality of side openings, a cylindrical space extending along the Z-axis direction is formed between the upper opening and the lower opening, the side openings are communicated with the cylindrical space, meanwhile, a fifth flange 51 is formed at the upper opening, a sixth flange 53 is formed at the lower opening, corresponding

flanges

52 and 54 and the like can be arranged at the side openings, and the fifth flange 51 and the fourth flange 43 are tightly connected through gasket core bolts; the sixth flange 53 is provided at its middle portion with a vacuum exhaust port 511. It should be noted by those skilled in the art that although the first flange 30 is tightly connected to the second flange 41, the cylindrical space in the first bellows 60 on the upper side of the first flange 30 is not communicated with the cylindrical space in the tee 40 on the lower side of the second flange 41; although the fourth flange 43 and the fifth flange 51 are tightly connected, the cylindrical space in the tee pipe 40 above the fourth flange 43 communicates with the cylindrical space in the multi-way pipe 50 below the fifth flange 51. A plurality of side openings on the side of the multi-way pipe 50 can be correspondingly provided with a CCD fixer 55 and a CCD adapter 56 according to requirements; laser protection cover 57,

observation windows

58, 59, etc., which are commonly used as setting means by those skilled in the art, and will not be described herein.

Further, fig. 5 is a partially enlarged perspective view of the soft X-ray light source according to fig. 4, and it can be seen from fig. 5 that bolt holes are uniformly distributed on the first flange 30 and the second flange 41 near the circumference, and fastening bolts are inserted into the bolt holes to tightly connect the first flange 30 and the second flange 41; the first flange 30 is fixedly connected with the third support plate 23 through a plurality of first screws 24, so that the first flange and the third support plate cannot move relatively; the first displacement adjuster 70 includes a first bracket 71, a first pusher 72, a first guide rail 73, and a first guide rail groove 74 (fig. 7), wherein the first bracket 71 is L-shaped, one end of the first bracket 71 is fixed to the third support plate 23, and the other end of the first bracket 71 protrudes upward and is perpendicular to the plane of the third support plate 23; the first pusher 72 is disposed on the other end of the first bracket 71 in the X-axis direction and aligned with the second support plate 22 such that movement of the first pusher 72 can push the second support plate 22 to move; two first guide rails 73 are disposed on the upper surface of the third support plate 23 and extend along the X-axis direction, the two first guide rails 73 are symmetrically disposed about the bellows 60 and are parallel to each other, a first guide rail groove 74 (fig. 7) matched with the first guide rail 73 is disposed on the lower surface of the second support plate 22, the first guide rail 73 is received in the first guide rail groove 74 and can slide along the first guide rail groove 74, and when the first pusher 72 moves, the second support plate 22 slides along the first guide rail 73 in the X-axis direction; the second displacement adjuster 80 comprises a second bracket 81, a second pusher 82, a second guide rail 83 and a second guide rail groove, wherein the second bracket 81 is L-shaped, one end of the second bracket 81 is fixed on the second support plate 22, and the other end of the second bracket 81 protrudes upward and is perpendicular to the plane of the first support plate 21; the second pusher 82 is disposed on the other end of the second bracket 81 in the Y-axis direction and aligned with the first support plate 21 so that the movement of the second pusher 82 can push the first support plate 21 to move; the two second guide rails 83 are disposed on the upper surface of the second support plate 22 and extend along the Y-axis direction, the two second guide rails 83 are symmetrically disposed about the bellows 60 and are parallel to each other, a second guide groove matched with the second guide rail 83 is disposed on the lower surface of the first support plate 21, the second guide rail 83 is received in the second guide groove and can slide along the second guide groove, and when the second pusher 82 moves, the first support plate 21 slides along the second guide rail 83 in the Y-axis direction; because the corrugated pipe 60 is cylindrical and can realize axial expansion, the top of the corrugated pipe 60 is hermetically arranged on the lower plate surface of the support plate 10, and the support plate 10 is fixed on the second screw rod 15 through the adjusting nut 14, when the first propeller 71 and the second propeller 82 are respectively adjusted, the support plate 10 can correspondingly move along the X-axis direction and the Y-axis direction; when the third displacement adjuster 14 is adjusted, the support plate 10 is correspondingly moved in the Z-axis direction.

Further, fig. 6 is a partially cut-away perspective view of the soft X-ray light source according to fig. 4, fig. 7 is a cross-sectional view of the soft X-ray light source according to fig. 4, fig. 8 is a cross-sectional view of the soft X-ray light source according to fig. 4, and as can be seen from fig. 7 and 8 in conjunction with fig. 6, the support plate 10 is further provided with a working gas duct 11, a refrigerant outlet duct 12 and a refrigerant inlet duct 13, and the working gas duct 11, the refrigerant outlet duct 12 and the refrigerant inlet duct 13 pass through the support plate 10 from the outside and are inserted into the bellows 60. The refrigeration mechanism comprises a refrigeration cavity 44, a refrigerant inlet pipeline 13 and a refrigerant outlet pipeline 12, wherein the refrigeration cavity 44 is formed into a cylindrical shape and is accommodated in the vacuum target chamber, specifically, the refrigeration cavity 44 extends into the multi-way pipe 50 from the inside of the three-way pipe 40, the refrigerant inlet pipeline 13 and the refrigerant outlet pipeline 12 respectively penetrate through the inside of the corrugated pipe 60, the first flange 30 and the second flange 41 from the top end of the support plate 10 and are fixedly communicated with the top of the refrigeration cavity 44, so that a refrigerant can be conveyed into the refrigeration cavity 44 from the refrigerant inlet pipeline 13 to reduce the temperature in the refrigeration cavity 44, and gas generated in the refrigeration cavity 44 is discharged out of the refrigeration cavity 44 through the refrigerant outlet pipeline 12; the working gas pipeline 11 passes through the interior of the corrugated pipe 60, the first flange 30, the second flange 41 and the refrigeration cavity 44 from the top end of the support plate 10, the working gas pipeline 11 penetrates out of the refrigeration cavity 44 and is connected with the nozzle, a condensation cavity 111 with an enlarged cross section area is formed in the middle of the working gas pipeline 11, at least one part of the condensation cavity 111 is located in the refrigeration cavity 44, it needs to be noted that the interior of the working gas pipeline 11 is not communicated with the interior of the refrigeration cavity 44, working gas (such as nitrogen) is conveyed to the nozzle through the working gas pipeline 11 and is liquefied in the process, the state of the working gas is already changed into a liquefied state when flowing out through the nozzle, moisture in the working gas is condensed when passing through the condensation cavity 11, and the working gas which continuously moves forward keeps the purity thereof so as to prevent the nozzle from being blocked.

Fig. 9 is a partially enlarged perspective view of the soft X-ray light source according to fig. 8, as can be seen from fig. 9 in conjunction with fig. 6, the light source generating mechanism comprises a nozzle 36, the nozzle 36 is disposed below the refrigeration cavity 44 and is fixed below the refrigeration cavity 44 by an adapter 35, the nozzle 36 is communicated with the working gas duct 11 so that the working gas which is changed into liquid by condensation flows out from the nozzle 36; the adaptor 35 is usually a metal adaptor to make the temperature transfer more rapid and accurate; the periphery of the adaptor 35 is provided with a temperature sensor 31 to monitor the temperature change around the nozzle 36 in real time, and the temperature sensor 31 is connected to an external device through one of the plugs 17 provided on the top of the support plate 10. The connecting sheet 32 is further arranged below the refrigerating chamber 44, the resistance wire support 33 is arranged on the connecting sheet 32, the resistance wire 34 is arranged on the resistance wire support 33, a part of the resistance wire is spirally wrapped on the side surface of the nozzle 36, and the resistance wire 34 is connected with the other plug 17 arranged at the top of the supporting plate 10 through a conducting wire so as to conveniently supply power to the resistance wire. The heating of resistance wire 34 can offset the temperature reduction that leads to because refrigerant liquid evaporation, condensation, can not destroy the high vacuum of cryogenic liquids surrounding environment simultaneously for the stability of trickle flow further promotes, and accessible resistance wire 34 heats when nozzle 36 is blocked by the condensation simultaneously and dredges. A metal cone 37 is also provided below the nozzle 36, typically 15mm below the nozzle 36, the top of the metal cone 37 being provided with a recess hollowed into the interior of the metal cone 37 for receiving residual liquid issuing from the nozzle 36. The design of the metal cone 37 can better pump away the residual liquid which has a large influence on the vacuum degree due to evaporation in time, and reduce the consumption of soft X-rays. The lower portion of the metal frustum 37 is further connected to a vacuum exhaust port 511 through a metal joint 513 and a metal joint 512, so that the residual liquid can be pumped out through the vacuum exhaust port 511. It should be noted that a heat conducting rod 38 extending along the Z-axis direction is further disposed on the metal adapter 513, and the heat conducting rod 38 is connected to the cooling cavity 44 to enable the temperature of the metal adapter 513 and the metal frustum 37 to be equal to the temperature of the nozzle 36 through heat transfer, so as to ensure that the residual liquid does not change state due to temperature change, so that the vacuum degree in the vacuum target chamber is reduced, and the brightness of soft X-rays is affected. Or the metal adapter 513 is further provided with a heat conduction pipe 38 extending along the Z-axis direction, and the heat conduction pipe 38 is connected with the refrigeration cavity 44, so that the refrigerant in the refrigeration cavity 44 can be conveyed to the metal adapter 513 and the metal frustum 37, and the temperature of the refrigerant is equivalent to the temperature in the refrigeration cavity 44, thereby preventing the low-temperature liquid micro-flow from further gasifying in the flowing process to reduce the vacuum degree and cause the consumption of soft X-rays.

Because the nozzle 36 is fixed on the refrigeration cavity 44, and the refrigeration cavity 44 is fixed on the support plate 10 through the refrigerant inlet pipeline 13, the refrigerant outlet pipeline 12 and the working gas pipeline 11, the multi-axis adjustment of the geometric position of the nozzle 36 can be realized through the first displacement regulator 70, the second displacement regulator 80 and the third displacement regulator 14, and the adjustment of the nozzle in the three directions of the X, Y, Z axis in the vacuum target chamber can be realized when the light source works, so that the position of liquid microflow is controlled, and the purpose of adjusting the position of the soft X-ray light source is finally achieved.

Fig. 10 is a perspective view of a reflection unit 600 of the soft X-ray micro-imaging device of fig. 1, as can be seen from fig. 10, the reflection unit 600 includes two third brackets 601, three third threaded rods 603, a blind plate 604 and a second corrugated pipe 606, wherein the two third brackets 601 are arranged in parallel and are respectively fixed on the first operation platform 100 through L-shaped brackets 602, the third brackets 601 are provided with a plurality of bolt holes, the third threaded rods 603 are fixed in corresponding bolt holes on the third brackets 601 along a substantially horizontal direction, and a connecting line between the bolt holes on each third bracket 601 forms a triangle, so that the third threaded rods 603 and components mounted on the third threaded rods 603 are relatively stable; the blind plate 604 is located between the two third brackets 601 and sleeved on the third threaded rod 603, and two sides of the blind plate 604 are fixed by third bolts 608 matched with the third threaded rod 603; the tail end of the third threaded rod 603 is also provided with a reflecting flange 607, the reflecting flange 607 is connected with the blind plate 604 through an enemy corrugated pipe 606, the axes of the blind plate 604, the reflecting flange 607 and the blind plate 604 are all positioned on the same axis, and the axis corresponds to the liquid microflow at the nozzle in the vacuum target chamber; the reflecting flange 607 is correspondingly connected with the flange 52 on the side surface of the tee pipe 50 through a fourth bolt 609, and a through hole 610 in the middle of the reflecting flange 607 enables the second corrugated pipe 606 to be communicated with the inside of the vacuum target chamber.

Fig. 11 is a schematic perspective view of a cut-away of the reflection unit of the soft X-ray micro-imaging device according to fig. 10, and as can be seen from fig. 11, a second mirror 605 facing the soft X-ray light source is further disposed in the blind plate 604, and the second mirror 605 focuses and reflects the collected soft X-rays, and the focus point falls on the sample in the sample chamber 700. Because the second reflector 605 is fixed on the blind plate 604, when the third bolt 608 is adjusted, the second reflector 605 moves together with the blind plate 604, so that the two-dimensional movement of the second reflector 605 can be realized, the plane where the second reflector 605 is located in the space can be determined by adjusting the positions of the third bolts 608 on different third threaded rods 603, and further, the included angle between the reflector 605 and each shaft is finely adjusted, so that the fine adjustment of the pitch angle of the second reflector 605 in vacuum is realized. The third bolt 608 simultaneously bears the outside chamber pressure.

Fig. 12 is a schematic perspective view of the interior of the sample chamber 700 of the soft X-ray micro-imaging device of fig. 1, and as can be seen from fig. 12, the sample chamber 700 includes a sample chamber housing 701, two opposite side walls of the sample chamber housing 701 are respectively provided with hollow flanges 702 and 750, the flange 702 is connected with one flange 54 on the side surface of the multi-way tube 50 to communicate the vacuum target chamber with the sample chamber, so that the soft X-rays generated in the vacuum target chamber can enter the sample chamber 700 through the reflective focusing of the second reflecting mirror 605; the flange 750 is connected with the pipeline 780; a sample bottom plate 704 is arranged in the sample chamber 700, a three-dimensional electric displacement table is arranged on the sample bottom plate 704, and the three-dimensional electric displacement table comprises a first sliding plate 705, a second sliding plate 706 and a third sliding plate 707 which are arranged in a layered mode, and the sliding plates are in sliding fit; the third sliding plate 707 is provided with a first object stage 708, a hollow frustum 709 is arranged on the side wall of the first object stage 708, the interior of the frustum 709 is hollow, a hollow hole penetrates through the frustum 709, the axis of the hollow hole is positioned in the horizontal plane and is basically the same as the axis of the second reflecting mirror 605, and a zone plate is arranged at the hollow hole close to one side of the sample; the sample bottom plate 704 is also provided with a sample two-dimensional adjusting platform 710, the sample two-dimensional adjusting platform 710 is provided with a sample rotating platform 711, the sample rotating platform 711 is provided with a sample cone 712, the sample cone 712 is provided with a capillary glass tube 713, a cell sample to be imaged is loaded in the capillary glass tube 713, and the sample two-dimensional adjusting platform 710 can be matched with the sample rotating platform 711 to adjust the position of the capillary glass tube 713, so that the upper part of the capillary glass tube 713 corresponds to a hollow hole of the prism table 709; the pipeline 780 is internally provided with a diaphragm tube 714, the diaphragm tube 714 penetrates through the flange 750 from the inside of the pipeline 780 to be deeply inserted into the sample chamber 700, a diaphragm hole 715 extending along the axial direction of the diaphragm tube 714 is arranged in the diaphragm tube 714, and the diaphragm hole 715 corresponds to the hollow hole on the prismoid 709, so that the soft X-ray injected into the cell sample can continuously reach the detector 800 along the hollow hole in the prismoid 709 and the diaphragm hole 715. In addition, a plurality of (for example, four) aviation plugs 770 are disposed on the sidewall of the sample chamber 700, and are respectively connected to the three-dimensional electric displacement stage, the sample two-dimensional condition stage 710, and the sample rotation stage 711 to control the displacement. The side wall of the sample chamber 700 is also provided with a nitrogen interface 771 (fig. 3) to facilitate the injection of nitrogen gas into the apparatus for protection after the operation is finished.

It should be noted by those skilled in the art that the capillary glass tube 713 carrying the cell sample and the hollow prism 709 carrying the zone plate and the diaphragm aperture 715 in the sample chamber 700 are locations through which the optical path passes during operation of the device, and are maintained substantially on the same horizontal line as the axis of the second mirror 605.

In addition, the soft X-ray microscopic imaging device provided by the application further comprises a refrigerant storage, the refrigerant storage is connected with a refrigerant inlet pipeline 13 through a transmission pipe, and a low-temperature electromagnetic valve is arranged on the transmission pipe to automatically control the input quantity of the refrigerant and maintain the pressure in the refrigerating cavity to be stable; the soft X-ray microscopic imaging device further comprises a molecular vacuum pump, the molecular vacuum pump is connected with a refrigerant outlet pipeline 12 through a vacuum transmission pipe, a high-temperature buffer cavity is arranged on the vacuum transmission pipe, a heater is arranged at the position of the high-temperature buffer cavity, a vacuum solenoid valve is further arranged between the high-temperature buffer cavity and the molecular vacuum pump, low-temperature refrigerants which are pumped out are heated through the high-temperature buffer cavity and the heater, the vacuum solenoid valve and the molecular vacuum pump are prevented from being damaged by the refrigerants with low temperature, a vacuum degree threshold value can be set by the vacuum solenoid valve, the pressure in the refrigeration cavity is closed when the pressure is low, the refrigeration cavity is opened when the pressure is high. The refrigerant in the refrigeration cavity 44 is circularly replaced through the molecular vacuum pump, so that the nozzle can realize lower refrigeration temperature, is accurate and adjustable, has higher refrigeration efficiency, can liquefy gases (such as nitrogen) with certain liquefying points, and obtains more stable spraying and longer spraying distance, so that the stability of the soft X-ray light source is stronger, and the soft X-ray light source is also suitable for more types of gas targets.

The multi-port tube 50 is also provided with a vacuum gauge port 510 on the side thereof, and the vacuum gauge is connected to the multi-port tube 50 through the vacuum gauge port 510 to measure the vacuum degree inside the multi-port tube 50. In order to maintain the vacuum degree in the multi-way pipe 50 and the three-way pipe 40, the third flange 42 on the three-way pipe 40 and the vacuum exhaust port 511 at the bottom of the multi-way pipe 50 are respectively connected with the first vacuum pump 420 and the second vacuum pump 430, and the vacuum degree in the vacuum target chamber can be maintained at a high level because the vacuumized air outlets are respectively positioned at the upper end and the lower end of the vacuum target chamber.

When the soft X-ray microscopic imaging device provided by the application works, the high-energy laser pulser 501 generates laser, the laser is reflected by the first reflecting mirror 510 and focused by the laser focusing lens 520 and then acts on the liquid microflow at the nozzle 36, so that the liquid microflow is plasmatized and generates soft X-rays, the second reflecting mirror 605 loaded on the blind plate 24 focuses and reflects the collected soft X-rays, the focal point is located at the cell sample at the tip of the capillary glass tube 713 in the sample chamber 700, the soft X-rays passing through the cell sample are continuously transmitted through the zone plate and then transmitted through the diaphragm hole 715, the soft X-rays finally pass through the

pipelines

780 and 870 and then irradiate on the detector 800, and finally the collected electric signals are transmitted to a computer for subsequent processing.

The technical solution of the present application is that the first displacement adjuster and the second displacement adjuster may be differential heads, and the third displacement adjuster may be replaced by other stepping devices, that is, all adjusting mechanisms, such as an electric displacement table, capable of manually and automatically adjusting linear displacement with micron precision fall within the protection scope of the present application. It should be noted by those skilled in the art that the displacement devices such as the three-dimensional displacement table, the three-dimensional displacement mechanism, the first adjuster 511, the second adjuster 521, and the three-dimensional displacement table, which are used in the present application, can be selected in two-dimensional and three-dimensional motions as required, and the connection relationships and the action mechanisms between the internal components thereof can be referred to as reference, and are not described herein again. The technical personnel in the field also need to pay attention to that the nozzle can adopt a low-temperature resistant glass nozzle, and the adaptor, the adapter, the metal frustum and the like can be made of low-temperature resistant metal materials; the high-energy laser pulse can be generated by a high-energy nanosecond pulse laser, and can also be generated by other short-pulse high-energy laser light sources, such as a femtosecond pulse laser, and the like, which are not described herein again. The vacuum pump in this application can adopt ion pump, roots pump etc. in order to realize the high vacuum in the vacuum target chamber. The working gas is preferably nitrogen, which is only a target substance for generating the laser plasma, and any substance (gas or liquid) capable of generating the laser plasma and radiating soft X-rays with a certain intensity, such as alcohol, xenon, etc., falls within the scope of the present application.

The detector in the application adopts digital SiPM, reads out each pixel (basic unit) in the SiPM, thereby can realize position-sensitive photon counting measurement, because the basic unit size of SiPM is about 20 μm, so can reach the position resolution ratio similar to CCD, compare in traditional CCD component, its signal gain has improved 1000 times, thereby very big improvement its detection efficiency to the weak light signal, reduced the imaging exposure time, can realize higher magnification times. The three-dimensional displacement mechanism with adjustable soft X ray light source in this application adopts, has realized in the vacuum to the regulation of liquid miniflow position and angle, has improved the geometric accuracy of soft X ray light path, has made things convenient for the light path to adjust. The reflecting unit that adopts the multiaxis to adjust in this application can adjust the geometric position and the angle of pitch of second mirror in the vacuum, has realized the optimization of light path. The vacuum system in the application can realize the accurate control from normal pressure to vacuum in the vacuum cavity through the design of pre-pumping, full pumping, the metal frustum 37 and the like. The soft X-ray light source used in the application has the advantages of low debris and high conversion rate, the intensity of the light source is improved, the damage to the optical element in the light path is reduced, and the service life of the instrument can be prolonged.

In a word, the soft X-ray microscopic imaging device provided by the application can reach the nanoscale imaging resolution and the second-level two-dimensional imaging time with lower cost, can be widely applied to nanoscale rapid three-dimensional microscopic imaging in the fields of life science and medicine research and development, and has demonstration effect on the research fields of structures and metabolism of functional cells, pathogenic mechanisms of microorganisms and the like.

The above embodiments are merely preferred embodiments of the present application, and are not intended to limit the scope of the present application. All such changes and modifications as fall within the scope of the claims and the specification of the present application are intended to be embraced therein. The content of the conventional technology is not described in detail in the application.

Claims

1. The utility model provides a micro-imaging device of soft X ray, the micro-imaging device of soft X ray includes soft X ray source, soft X ray source includes vacuum target chamber, refrigeration chamber and nozzle, the refrigeration chamber with the nozzle holding is in the vacuum target chamber, nozzle fixed connection in the below in refrigeration chamber, its characterized in that, the micro-imaging device of soft X ray still includes:

the three-dimensional displacement mechanism is respectively connected with the refrigeration cavity and the vacuum target chamber, two opposite outlets are arranged at two ends of the vacuum target chamber, and the nozzle is positioned between the two outlets;

the vacuum unit comprises a first vacuum pump and a second vacuum pump, and the first vacuum pump and the second vacuum pump are respectively connected with two outlets of the vacuum target chamber;

the laser unit comprises a pulse laser generator and a laser focusing mirror, and laser emitted by the pulse laser generator is focused at the nozzle after passing through the laser focusing mirror;

a reflecting unit having a second mirror, the reflecting unit being in communication with the vacuum target chamber;

a sample chamber, wherein the sample chamber is communicated with the vacuum target chamber, a capillary glass tube is contained in the sample chamber, the nozzle is positioned between the capillary glass tube and the second reflecting mirror, and the position of the capillary glass tube corresponds to the focus of the nozzle and the second reflecting mirror; and

and the detector is connected with the sample chamber and corresponds to the position of the capillary glass tube.

2. The soft X-ray microscopy imaging device according to claim 1, wherein the vacuum target chamber comprises:

the three-way pipe is provided with a first outlet, a second outlet and a third outlet, the first outlet and the second outlet are opposite, the third outlet is located between the first outlet and the second outlet, the first outlet is connected with a supporting plate, a refrigerant inlet pipeline, a refrigerant outlet pipeline and a working gas pipeline respectively penetrate through the supporting plate and are connected with the refrigeration cavity, and the third outlet is connected with the first vacuum pump; and

the multi-way pipe comprises a top opening, a bottom opening and a plurality of side openings, the top opening and the bottom opening are opposite, the side openings are located between the top opening and the bottom opening, the top opening is tightly connected with the second outlet, a vacuum outlet connected with the second vacuum pump is arranged at the bottom opening, the position of the nozzle corresponds to the side openings, a groove is arranged below the nozzle and is fixed through an adapter, the adapter is arranged at the vacuum outlet, and the groove is communicated with the vacuum outlet.

3. The soft X-ray microscopy imaging device according to claim 2, wherein a temperature sensor is provided at the nozzle.

4. The soft X-ray microscopic imaging apparatus according to claim 2, wherein the adapter is provided with a heat conducting rod, and the heat conducting rod is connected with the refrigeration cavity.

5. The soft X-ray microscopy imaging device according to claim 1, wherein a heater is disposed around the nozzle.

6. The soft X-ray microscopic imaging device according to claim 2, wherein the support plate is disposed on the vacuum target chamber, a refrigerant inlet pipe, a refrigerant outlet pipe and a working gas pipe are disposed on the support plate, the refrigerant inlet pipe, the refrigerant outlet pipe and the working gas pipe penetrate through the support plate, the refrigerant inlet pipe and the refrigerant outlet pipe are communicated with the refrigeration cavity, and the working gas pipe penetrates through the refrigeration cavity and is connected with the nozzle; the first corrugated pipe is arranged between the support plate and the vacuum target chamber, and the refrigerant inlet pipeline, the refrigerant outlet pipeline and the working gas pipeline all penetrate through the first corrugated pipe.

7. The soft X-ray microscopic imaging apparatus according to claim 6, wherein the three-dimensional displacement mechanism comprises a first displacement adjuster, a second displacement adjuster, and a third displacement adjuster, each of the first displacement adjuster, the second displacement adjuster, and the third displacement adjuster is disposed between the support plate and the vacuum target chamber and controls the support plate to move in three directions perpendicular to each other, respectively.

8. The soft X-ray microscopic imaging device according to claim 7, wherein the soft X-ray light source further comprises a first supporting plate, a second supporting plate and a third supporting plate which are arranged in parallel and sleeved outside the first bellows, the first supporting plate is movably fixed on the supporting plate through the third displacement adjuster, the second supporting plate is movably fixed on the first supporting plate through the second displacement adjuster, the second supporting plate is simultaneously movably fixed on the third supporting plate through the first displacement adjuster, and the third supporting plate is fixed on the vacuum target chamber.

9. The soft X-ray microscopic imaging apparatus according to claim 8, wherein the first displacement adjuster comprises a first support frame fixed to the third support plate, a first pusher fixed to the first support frame and corresponding to the second support plate, a first guide rail fixed to the third support plate in a first direction, and a first guide rail groove fixed below the second support plate and slidably engaged with the first guide rail.

10. The soft X-ray microscopic imaging device according to claim 9, wherein the second displacement adjuster comprises a second support frame, a second pusher, a second guide rail and a second guide rail groove, the second support frame is fixed on the second support plate, the second pusher is fixed on the second support frame and corresponds to the first support plate, the second guide rail is fixed on the second support plate along a second direction, the second guide rail groove is fixed under the first support plate and is in sliding fit with the second guide rail, and the first direction is perpendicular to the second direction.

11. The soft X-ray microscopic imaging apparatus according to claim 10, wherein the third displacement adjuster comprises an adjusting nut, a plurality of screws extending along a third direction are uniformly disposed on the first supporting plate, the supporting plate is fixed on the screws by the adjusting nut and the screws, and the third direction is perpendicular to the first direction and the second direction.

12. The soft X-ray microscopy imaging device according to claim 1, wherein the vacuum unit further comprises a vacuum controller connected to the first vacuum pump and the second vacuum pump, respectively.

13. The soft X-ray microscopy imaging device according to claim 1, wherein the laser unit further comprises a first mirror disposed between the pulse laser generator and the laser focusing mirror to conduct a laser light path.

14. The soft X-ray microscopic imaging apparatus according to claim 13, wherein a lifting stage is disposed below the pulse laser, a first adjuster is disposed below the first reflecting mirror, and a second adjuster is disposed below the laser focusing mirror.

15. The soft X-ray microscopic imaging apparatus according to claim 1, wherein the reflecting unit comprises a third bracket, a third threaded rod disposed on the third bracket, and a blind plate disposed on the third threaded rod, the second reflecting mirror being mounted on the blind plate.

16. The soft X-ray microscopy imaging device according to claim 15, wherein the reflection unit further comprises a second bellows connected to the blind plate and the vacuum target chamber, respectively.

17. The soft X-ray microscopic imaging device according to claim 15, wherein a plurality of third bolts are disposed on the third threaded rod and engaged with the third threaded rod, and the third bolts are respectively disposed on two sides of the blind plate.

18. The soft X-ray microscopy imaging device according to claim 1, wherein the sample chamber comprises a sample chamber housing, opposing sidewalls of the sample chamber housing being connected to the vacuum target chamber and the detector, respectively.

19. The soft X-ray microscopic imaging apparatus according to claim 18, wherein a capillary glass tube and a diaphragm tube are provided in the sample chamber, the diaphragm tube has a diaphragm hole extending in an axial direction therein, one end of the diaphragm hole corresponds to the capillary glass tube, the other end of the diaphragm hole corresponds to the detector, and the nozzle, the focal point of the second reflecting mirror, the tip of the capillary glass tube, and the diaphragm hole are located on the same horizontal line.

20. The soft X-ray microscopic imaging device according to claim 19, wherein a prism table is further disposed between the diaphragm tube and the capillary glass tube, the prism table has a prism table hole therein, the extending direction of the prism table hole is the same as the extending direction of the diaphragm hole, and a zone plate is disposed at one end of the prism table hole close to the capillary glass tube.

21. The soft X-ray microscopy imaging device according to claim 20, wherein the prism stage is disposed on a three-dimensional electric displacement stage, the three-dimensional electric displacement stage being connected to an aviation plug disposed on the sample chamber housing.

22. The soft X-ray microscopic imaging apparatus according to claim 19, wherein the capillary glass tube is disposed on a sample rotating stage disposed on a sample two-dimensional conditioning stage.

23. The soft X-ray microscopy imaging device according to claim 1, wherein the detector comprises a scintillation crystal corresponding to the sample chamber and a silicon photomultiplier coupled to the scintillation crystal.

24. The soft X-ray microscopy imaging device according to claim 23, wherein a three-dimensional displacement stage is disposed below the detector.