WO2020134503A1 - Soft x-ray micro imaging device - Google Patents

Abstract

A soft X-ray micro imaging device, which comprises a soft X-ray light source (300), a three-dimensional displacement mechanism, a vacuum unit (400), a laser unit (500), a reflection unit (600), a sample chamber (700) and a detector (800), wherein the soft X-ray light source (300) comprises a vacuum target chamber, a refrigeration chamber (44) and a nozzle (36), wherein the refrigeration chamber (44) and the nozzle (36) are accommodated in the vacuum target chamber, the nozzle (36) is arranged on the refrigeration chamber (44), the three-dimensional displacement mechanism is respectively connected with the refrigeration chamber (44) and the vacuum target chamber, and the vacuum target chamber is provided with two opposite outlets; the vacuum unit (400) comprises a first vacuum pump (420) and a second vacuum pump (430), which are respectively connected with the two outlets of the vacuum target chamber; the pulse laser emitted by a pulse laser generator (501) is focused at the nozzle (36) after passing through a laser focusing mirror (520); the reflection unit (600) is provided with a second reflector (605); the sample chamber (700) communicates with the vacuum target chamber, a capillary glass tube (713) is accommodated in the sample chamber (700), and the position of the capillary glass tube (713) corresponds to the nozzle (36) and the focal point of the second reflector (605); and the detector (800) is connected with the sample chamber (700) and corresponds to the position of the capillary glass tube (713). Therefore, the soft X-ray micro imaging device has advantages of precise detection, high efficiency and economical cost.

Description

Soft X-ray micro imaging device Technical field

The present application relates to the field of soft X-rays, and more particularly to a soft X-ray micro imaging device.

Background technique

X-ray is a kind of electromagnetic radiation with a very short wavelength. Its wavelength is about 0.01-100 angstroms. It is between ultraviolet and gamma rays. It has a high penetrating power and can transmit many substances that are opaque to visible light. X-rays with shorter wavelengths have greater energy, also known as hard X-rays, and X-rays with longer wavelengths have lower energy, known as soft X-rays. Generally, those with a wavelength of less than 0.1 Angstroms are called super-hard X-rays, those with a wavelength of 0.1 to 10 Angstroms are called hard X-rays, and those with a wavelength of 10 to 100 Angstroms are called soft X-rays.

In recent years, soft X-rays have been widely used in many scientific fields, especially in the fields of soft X-ray micro imaging and soft X-ray projection lithography. In the field of soft X-ray micro-imaging, soft X-ray micro-imaging instruments use soft X-rays in the water window band (wavelength between 2.3nm-4.4nm) to directly image living organisms under natural water The three-dimensional imaging of samples at the nanometer scale is a key tool for observing the true three-dimensional ultrastructure in cells, and is of great significance for the study of cell structure and function.

The soft X-ray microscopic imaging instruments in the prior art include synchrotron radiation soft X-ray microscopy instruments and small soft X-ray microscopy instruments, where the synchrotron radiation light source in the synchrotron radiation soft X-ray microscopy instrument must be generated by a large accelerator It is greatly restricted in the availability of light sources, which greatly limits the application of the instrument; for small soft X-ray microscopy instruments that use liquid targets, soft X-ray cameras are used to detect soft X-rays. However, soft X The gain of the ray camera is relatively low. When the magnification is large, the number of photons per unit area is greatly reduced, resulting in poor detection results. In low-energy ray measurement, there are problems such as low energy resolution and long exposure time. These problems are extremely large. Has affected the performance and service life of the instrument. In addition, soft X-ray microscopy instruments have extremely high requirements on the accuracy of the optical path. The accuracy of the optical path directly affects the imaging quality. The instruments in the prior art are more complicated when adjusting the optical path, and the adjustment scheme and device cost used are higher , Resulting in the imaging speed can not meet the needs of rapid three-dimensional imaging of cell ultrastructure, which greatly limits the application of the instrument.

Summary of the invention

The purpose of the present application is to provide a soft X-ray micro imaging device, so as to solve the problems of low detection efficiency and high cost of the soft X-ray micro imaging instrument in the prior art.

In order to solve the above technical problems, the technical solution of the present application is to provide a soft X-ray micro imaging device, the soft X-ray micro imaging device includes a soft X-ray light source, the soft X-ray light source includes a vacuum target chamber, cooling A cooling chamber and a nozzle, the cooling chamber and the nozzle are accommodated in the vacuum target chamber, the nozzle is disposed on the cooling chamber, and the soft X-ray micro imaging device further includes: a three-dimensional displacement mechanism, the A three-dimensional displacement mechanism is respectively connected to the refrigeration chamber and the vacuum target chamber, the vacuum target chamber has two opposite outlets; a vacuum unit, the vacuum unit includes a first vacuum pump and a second vacuum pump, the first vacuum pump And the second vacuum pump are respectively connected to two outlets of the vacuum target chamber; a laser unit, the laser unit includes a pulse laser generator and a laser focusing mirror, and the laser light emitted by the pulse laser generator is focused by the laser Focusing on the nozzle behind the mirror; a reflecting unit, the reflecting unit has a second reflecting mirror, the reflecting unit communicates with the vacuum target chamber; a sample chamber, the sample chamber communicates with the vacuum target chamber, so A capillary glass tube is contained in the sample chamber, and the position of the capillary glass tube corresponds to the focal points of the nozzle and the reflector; and a detector connected to the sample chamber and connected to the capillary glass tube Corresponding to the location.

According to an embodiment of the present application, the vacuum target chamber includes: a three-way tube, the three-way tube has opposing first outlets and second outlets and between the first outlet and the second outlet A third outlet, the first outlet is connected to the support plate, a refrigerant inlet pipe, a refrigerant outlet pipe, and a working gas pipe respectively pass through the support plate and are connected to the refrigeration chamber, and the third outlet is connected to the The first vacuum pump is connected; and a multi-way tube, the multi-way tube includes opposite top openings and bottom openings and a plurality of side openings located in the top opening and the bottom opening house, the top opening and the first The two outlets are closely connected, a vacuum outlet connected to the second vacuum pump is provided at the bottom opening, the position of the nozzle corresponds to the side opening, a groove is provided below the nozzle, and the groove passes through The joint is fixed, the adapter is provided at the vacuum outlet, and the groove is in communication with the vacuum outlet.

According to an embodiment of the present application, a temperature sensor is provided at the nozzle.

According to an embodiment of the present application, a heat conducting rod is provided on the adapter, and the heat conducting rod is connected to the cooling cavity.

According to an embodiment of the present application, a heater is arranged around the nozzle.

According to an embodiment of the present application, the support plate is provided on the vacuum target chamber, and the support plate is provided with a refrigerant inlet pipe, a refrigerant outlet pipe and a working gas pipe passing through the support plate. The refrigerant inlet pipe and the refrigerant outlet pipe communicate with the refrigeration chamber, the working gas pipe passes through the refrigeration chamber and is connected with the nozzle; a first bellows is provided on the support plate and the Between the vacuum target chamber, the refrigerant inlet pipe, refrigerant outlet pipe and working gas pipe all pass through the inside of the first bellows.

According to an embodiment of the present application, the three-dimensional displacement mechanism includes a first displacement regulator, a second displacement regulator, and a third displacement regulator, the first displacement regulator, the second displacement regulator, and the third displacement regulator All the devices are arranged between the support plate and the vacuum target chamber and respectively control the support plate to move in three directions perpendicular to each other.

According to an embodiment of the present application, the soft X-ray light source further includes a first support plate, a second support plate, and a third support plate arranged parallel to each other and sleeved on the outside of the bellows, the first support plate The third displacement adjuster is movably fixed to the support plate, and the second support plate is movably fixed to the first support plate by the second displacement adjuster, and the second At the same time, the support plate is movably fixed to the third support plate by the first displacement adjuster, and the third support plate is fixed to the vacuum target chamber.

According to an embodiment of the present application, the first displacement adjuster includes a first support bracket, a first pusher, a first guide rail, and a first guide rail groove, and the first support bracket is fixed to the third support plate , The first pusher is fixed on the first support frame and corresponds to the second support plate, the first guide rail is fixed on the third support plate along the first direction, the first guide rail The groove is fixed below the second support plate and slidingly cooperates with the first guide rail.

According to an embodiment of the present application, the second displacement adjuster includes a second support bracket, a second pusher, a second guide rail, and a second guide rail groove, and the second support bracket is fixed to the second support plate , The second pusher is fixed to the second support frame and corresponds to the first support plate, the second guide rail is fixed to the second support plate along the second direction, and the second guide rail The groove is fixed below the first support plate and slidingly cooperates with the second guide rail, and the first direction and the second direction are perpendicular to each other.

According to an embodiment of the present application, the third displacement adjuster includes a screw and a nut, and the screw is uniformly fixed to the first support plate in the third direction, and the support plate passes through the nut and The cooperation of the bolt is fixed on the bolt, and the third direction is perpendicular to the first direction and the second direction.

According to an embodiment of the present application, the vacuum unit further includes a vacuum controller, which is connected to the first vacuum pump and the second vacuum pump, respectively.

According to an embodiment of the present application, the laser unit further includes a first mirror, and the first mirror is disposed between the pulse laser generator and the laser focusing mirror to conduct a laser light path.

According to an embodiment of the present application, a lifting table is provided under the pulse laser, a first adjuster is provided under the first reflecting mirror, and a second adjuster is provided under the laser focusing mirror.

According to an embodiment of the present application, the reflection unit includes a third bracket, a third threaded rod, and a blind plate, the third threaded rod is disposed on the third bracket, and the blind plate is disposed on the third On the threaded rod, the second reflector is mounted on the blind plate.

According to an embodiment of the present application, the reflection unit further includes a second bellows, and the second bellows are respectively connected to the blind plate and the vacuum target chamber.

According to an embodiment of the present application, the third threaded rod is provided with a plurality of third bolts that cooperate with the third threaded rod, and the third bolts are respectively located on both sides of the blind plate.

According to an embodiment of the present application, the sample chamber includes a sample chamber casing, and two opposite side walls of the sample chamber casing are respectively connected to the vacuum target chamber and the detector.

According to an embodiment of the present application, a capillary glass tube and an iris tube are provided in the sample chamber, and the iris tube has an iris hole extending along the axis direction, and one end of the iris hole corresponds to the capillary glass tube, The other end of the diaphragm aperture corresponds to the detector, and the nozzle, the focal point of the second mirror, the top end of the capillary glass tube, and the diaphragm aperture are located on the same horizontal line.

According to an embodiment of the present application, a prism is further provided between the diaphragm tube and the capillary glass tube, the prism has a prism hole therein, and the extending direction of the prism hole is the same as the diaphragm hole The direction of the extension is the same, and a band plate is provided at one end of the prism hole near the capillary glass tube.

According to an embodiment of the present application, the prism is arranged on a three-dimensional electric displacement stage, and the three-dimensional electric displacement stage is connected to an aviation plug arranged on the housing of the sample chamber.

According to an embodiment of the present application, the capillary glass tube is arranged on a sample rotating table, and the sample rotating table is arranged on a sample two-dimensional adjustment platform.

According to an embodiment of the present application, the detector includes a scintillation crystal and a silicon photomultiplier tube, the scintillation crystal corresponds to the sample chamber, and the silicon photomultiplier tube is coupled to the scintillation crystal.

According to an embodiment of the present application, a three-dimensional stage is provided below the detector.

The soft X-ray micro imaging device provided by the present application greatly improves the detection efficiency of the weak light signal, reduces the imaging exposure time, and can achieve higher magnification. The soft X-ray light source in this application adopts an adjustable three-dimensional displacement mechanism, which realizes the adjustment of the position and angle of the liquid microfluid in vacuum, improves the geometric accuracy of the soft X-ray optical path, and facilitates the adjustment of the optical path. In this application, a multi-axis adjusted reflecting unit can be used to adjust the geometric position and pitch angle of the second reflecting mirror in a vacuum, thereby optimizing the optical path. The vacuum system in the present application can realize the precise control of the normal pressure to vacuum in the vacuum chamber through the design of pre-pumping, full-pumping and metal cone. The soft X-ray light source used in this application has the advantages of low debris and high conversion rate, improves the intensity of the light source, reduces the damage to the optical elements in the optical path, and can increase the life of the instrument. In short, the soft X-ray microscopic imaging device provided in this application can achieve nano-level imaging resolution and second-level two-dimensional imaging time at low cost, and can be widely used in nano-scale rapid three-dimensional microscopy in the fields of life sciences and pharmaceutical research and development. In imaging, it has a demonstration role in research fields such as the structure and metabolism of functional cells and the pathogenic mechanism of microorganisms.

BRIEF DESCRIPTION

In order to more clearly explain the embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings used in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only These are some of the embodiments described in this application. For those of ordinary skill in the art, without paying any creative labor, other drawings can also be obtained based on these drawings.

1 is a schematic perspective view of a soft X-ray micro imaging device according to an embodiment of the present application;

2 is a schematic plan view of the back of the soft X-ray micro imaging device according to FIG. 1;

3 is a schematic top view of the soft X-ray micro imaging device according to FIG. 1;

4 is a schematic perspective view of a soft X-ray light source of the soft X-ray micro imaging device according to FIG. 1;

5 is a partially enlarged schematic perspective view of the soft X-ray light source according to FIG. 4, which shows a three-dimensional displacement mechanism;

6 is a partially cutaway schematic perspective view of the soft X-ray light source according to FIG. 4, which shows a refrigeration chamber and a vacuum target chamber;

7 is a schematic cross-sectional view of the soft X-ray light source according to FIG. 4, wherein only the upper half is shown;

8 is a schematic cross-sectional view of the soft X-ray light source according to FIG. 4, wherein only the lower half is shown;

9 is a partially enlarged schematic perspective view of the soft X-ray light source according to FIG. 8, which shows the nozzle and the heating mechanism;

10 is a schematic perspective view of the reflection unit of the soft X-ray micro imaging device according to FIG. 1;

11 is a cut-away perspective schematic view of the reflection unit of the soft X-ray micro imaging device of FIG. 10;

FIG. 12 is a schematic perspective view of the interior of the sample chamber of the soft X-ray micro imaging device according to FIG. 1.

detailed description

The following further describes the present application in conjunction with specific embodiments. It should be understood that the following embodiments are only used to illustrate the present application and not to limit the scope of the present application.

It should be noted that, when a component/part is said to be “set on” another component/part, it can be directly set on another component/part or there can also be a centered component/part. When a part/part is called "connected/coupled" to another part/part, it may be directly connected/coupled to another part/part or there may be a centered part/part at the same time. The term "connection/coupling" as used herein may include electrical and/or mechanical physical connections/couplings. The term "comprising" as used herein refers to the presence of features, steps or components/parts, but does not exclude the presence or addition of one or more other features, steps or components/parts. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.

Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field of the present application. The terminology used herein is for the purpose of describing specific embodiments only, and is not intended to limit the present application.

In addition, in the description of this application, the terms "first", "second", etc. are used only for the purpose of describing and distinguishing similar objects, there is no order between the two, nor can it be understood as indicating or implying that they are relatively important Sex. In addition, in the description of the present application, unless otherwise stated, the meaning of "plurality" is two or more.

1 is a schematic perspective view of a soft X-ray micro imaging apparatus according to an embodiment of the present application, FIG. 2 is a schematic plan view of the back of the soft X-ray micro imaging apparatus according to FIG. 1, and FIG. 3 is a soft view according to FIG. The top schematic view of the X-ray micro imaging device, as can be seen from FIG. 1 in conjunction with FIGS. 2 and 3, the soft X-ray micro imaging device provided in this application includes a soft X-ray light source 300, a vacuum unit 400, a laser unit 500, and a reflection unit 600 , The sample chamber 700 and the detector 800, wherein the X-ray light source 300, the laser unit 500, the reflection unit 600, the sample chamber 700 and the detector 800 are all disposed on the first operating platform 100, and the vacuum unit 400 is disposed on the second operating platform On 200, the soft X-ray light source 300 has a three-dimensional displacement adjustment mechanism, a three-way tube 40 and a multi-way tube 50. The three-dimensional displacement adjustment mechanism is provided on the three-way tube 40, the three-way tube 40 and the multi-way tube 50 are connected to each other; the vacuum unit 400 includes a vacuum controller 410, a first vacuum pump 420, and a second vacuum pump 430. The vacuum controller 410 is connected to and controls the operation of the first vacuum pump 420 and the second vacuum pump 430, respectively. One of the outlets of the three-way pipe 40 is connected, and the second vacuum pump 430 is connected to the vacuum exhaust port 432 provided under the multi-way pipe 50 through a vacuum pipe; the laser unit 500 includes a pulse laser generator 501, a first reflecting mirror 510 and laser focusing Mirror 520, the bottom of the pulse laser generator 501 is provided with an adjustable height and direction lifting table 502, the bottom of the first mirror 510 is provided with a first adjuster 511 with adjustable height and angle, the bottom of the laser focusing mirror 520 is provided with an adjustable The second adjuster 521 of height and angle is adjusted by the lifting table 502, the first adjuster 511 and the second adjuster 521, so that the laser light emitted by the pulse laser generator 501 is reflected by the first reflecting mirror 510 toward the laser light The focusing mirror 520 (as shown by the arrow in FIG. 3) is further focused on the liquid microfluid in the soft X-ray light source 300 by the laser focusing mirror 520, so that the liquid microfluid is plasmatized and generates soft X-rays; One of the outlets on the side of the multi-pass tube 50 is connected, and a second mirror 611 (FIG. 11) is provided in the reflecting unit 600 to focus the soft X-rays toward the sample chamber 700; the sample chamber 700 and the reflecting unit 600 are related to the multi-pass tube 50 Relatively arranged, the sample chamber 700 is connected to the corresponding outlet on the multi-way tube 50 through an outlet. The sample chamber is provided with a sample. The adjusted soft X-ray can directly hit the sample, and the X-ray passing through the sample continues forward It reaches detector 800 and is detected by detector 800; detector 800 is connected to the opening on the other side of sample chamber 700 through pipes 780 and 870, the optical path of detector 800 and the soft X-ray are on the same horizontal line, and the bottom of detector 800 A three-dimensional stage 810 is provided, and the detector 8 can be adjusted through the three-dimensional stage 810 The position of 00; the detector 800 includes a scintillation crystal and a SiPM (silicon photomultiplier tube) coupled to the scintillation crystal, wherein the scintillation crystal is used to convert the received soft X-rays into visible light, and the SiPM converts the visible light into electrical signals and outputs, The output electrical signal is further processed by data to form a corresponding image.

The various parts of the soft X-ray micro imaging device provided by the present application will be described in detail below with reference to FIGS. 4-12.

FIG. 4 is a schematic perspective view of a soft X-ray light source 300 according to an embodiment of the present application. As can be seen from FIG. 4, the soft X-ray light source 300 provided by the present application includes a three-dimensional displacement mechanism, a vacuum target chamber, a cooling mechanism, and a light source generating mechanism. The following is a detailed description of the components in conjunction with the drawings.

In FIG. 4, the three-dimensional displacement mechanism includes a support plate 10, a first bellows 60, a first flange 30, a first displacement regulator 70, a second displacement regulator 80, and a third displacement regulator 14, wherein The plate 10 is plate-shaped; the first bellows 60 is cylindrical and can be expanded and contracted along its axis. The top of the first bellows 60 is sealed on the lower plate surface of the support plate 10, and the bottom of the first bellows 60 is The first flange 30 is closely connected, and the support plate 10, the first bellows 60, and the first flange 30 form a closed substantially cylindrical space; the vertical centerline of the cylindrical space (that is, the paper surface in the figure) is defined Vertical direction) is the Z-axis direction, and the two directions perpendicular to each other in the plane perpendicular to the Z-axis direction are defined as the X-axis and Y-axis directions; the first flange 30 is provided with several extensions extending in the Z-axis direction The first screw 24, a ring-shaped third support plate 23 is fixed on the top of the first screw 24, and a first displacement adjuster 70 is provided on the third support plate 23; the second support plate 22 and the third support plate 23 have the same shape The second support plate 22 is located above the third support plate 23 and connected to the third support plate 23 through the first displacement adjuster 70. The second support plate 22 is provided with a second displacement adjuster 80; the first The support plate 21 and the second support plate 22 have the same shape and are arranged parallel to each other. The first support plate 21 is located above the second support plate 22 and connected to the second support plate 22 through the second displacement adjuster 80; the first support plate 21, The second support plate 22 and the third support plate 23 are generally stacked and have through holes of the same size. The first bellows 60 are accommodated in these through holes; the first support plate 21 is provided with several (usually three) The second screw 15 extending along the Z-axis direction, the support plate 10 is fixed to the second screw 15 by the adjusting nut 14, at this time the adjusting nut 14 is formed as a third displacement adjuster, the third displacement adjuster 14 can be along the Z axis Adjust the position of the support plate 10 in the direction; the support plate 10 is also provided with a working gas pipe 11, a refrigerant outlet pipe 12 and a refrigerant inlet pipe 13, the working gas pipe 11, the refrigerant outlet pipe 12 and the refrigerant inlet pipe 13 are from outside Pass through the support plate 10 and insert inside the first bellows 60.

Further, in FIG. 4, the vacuum target chamber includes a three-way tube 40 and a multi-way tube 50. The three-way tube 40 has three outlets: a top outlet, a bottom outlet, and a side outlet. A cylindrical space extending in the axial direction, the side outlet communicates with the cylindrical space; a second flange 41 is provided at the top outlet, a third flange 42 is provided at the side outlet, and a fourth flange is provided at the bottom outlet Disk 43; the first flange 30 and the second flange 41 are tightly connected by gaskets and bolts; the multi-way pipe 50 has an upper opening, a lower opening, and a number of side openings, along the Z between the upper opening and the lower opening A cylindrical space extending in the axial direction, the side opening communicates with the cylindrical space, and at the same time, a fifth flange 51 is formed at the upper opening, a sixth flange 53 is formed at the lower opening, and a correspondence can be provided at the side opening Flanges 52, 54 etc., the fifth flange 51 and the fourth flange 43 are tightly connected by gasket core bolts; the sixth flange 53 is provided with a vacuum exhaust port 511 in the middle. It should be noted by those skilled in the art that although the first flange 30 and the second flange 41 are closely connected, the cylindrical space in the first bellows 60 on the upper side of the first flange 30 and the second method The cylindrical space in the tee tube 40 on the lower side of the blue plate 41 is not connected; although the fourth flange 43 and the fifth flange 51 are closely connected, the upper side of the fourth flange 43 The cylindrical space in the tube 40 is in communication with the cylindrical space in the multi-way tube 50 on the lower side of the fifth flange 51. The multiple side openings on the side of the multi-pass tube 50 can be provided with CCD holder 55 and CCD adapter 56 as needed; laser protective cover 57, observation windows 58, 59, etc., which are commonly used by those skilled in the art The means will not be repeated here.

Further, FIG. 5 is a partially enlarged schematic perspective view of the soft X-ray light source according to FIG. 4, as can be seen from FIG. 5, the first flange 30 and the second flange 41 are provided with bolts evenly distributed near the circumference Holes, the first flange 30 and the second flange 41 are tightly connected by inserting fastening bolts in the bolt holes; the first flange 30 is fixedly connected to the third support plate 23 through a plurality of first screws 24 So that there is no relative movement between the two; the first displacement adjuster 70 includes a first bracket 71, a first pusher 72, a first rail 73 and a first rail groove 74 (FIG. 7), wherein the first bracket 71 is L-shaped, one end of the first bracket 71 is fixed to the third support plate 23, the other end of the first bracket 71 is convex upward and perpendicular to the plane where the third support plate 23 is located; the first thruster 72 is along the X-axis direction It is provided on the other end of the first bracket 71 and is aligned with the second support plate 22, so that the movement of the first pusher 72 can push the second support plate 22 to move; two first guide rails 73 are provided on the third support plate 23 The upper surface extends in the X-axis direction, the two first guide rails 73 are symmetrically arranged with respect to the bellows 60 and are parallel to each other, and the lower surface of the second support plate 22 is provided with a first guide rail groove 74 (Fig. 7), the first guide rail 73 is accommodated in the first guide rail groove 74 and can slide along the first guide rail groove 74, when the first propeller 72 moves, the second support plate 22 is along the first guide rail 73 in the X axis Sliding in the direction; the second displacement adjuster 80 includes a second bracket 81, a second pusher 82, a second guide rail 83, and a second guide groove, wherein the second bracket 81 is L-shaped, and one end of the second bracket 81 is fixed to the first On the second support plate 22, the other end of the second support 81 is convex upward and perpendicular to the plane where the first support plate 21 is located; the second pusher 82 is provided on the other end of the second support 81 along the Y-axis direction and is The first support plate 21 is aligned so that the movement of the second pusher 82 can push the first support plate 21 to move; two second guide rails 83 are provided on the upper surface of the second support plate 22 and extend along the Y axis, and the two The two guide rails 83 are symmetrically arranged with respect to the bellows 60 and are parallel to each other. The lower surface of the first support plate 21 is provided with a second guide rail groove that cooperates with the second guide rail 83. The second guide rail 83 is accommodated in the second guide rail groove and can Slide along the second guide groove, when the second pusher 82 moves, the first support plate 21 slides along the second guide 83 in the Y-axis direction; because the bellows 60 is cylindrical and can be expanded and contracted in the axial direction, the corrugated The top of the tube 60 is sealingly provided on the lower plate surface of the support plate 10, and the support plate 10 is fixed to the second screw 15 by the adjusting nut 14, so when adjusting the first thruster 71 and the second thruster 82, respectively, the support The plate 10 will also move in the X-axis direction and the Y-axis direction accordingly; when the third displacement adjuster 14 is adjusted, the support plate 10 will move in the Z-axis direction accordingly.

Further, FIG. 6 is a partially cutaway schematic perspective view of the soft X-ray light source according to FIG. 4, FIG. 7 is a cross-sectional schematic view of the soft X-ray light source according to FIG. 4, and FIG. 8 is a cross section of the soft X-ray light source according to FIG. Schematic diagram, as can be seen from FIGS. 7 and 8 in conjunction with FIG. 6, the supporting plate 10 is further provided with a working gas pipe 11, a refrigerant outlet pipe 12 and a refrigerant inlet pipe 13, a working gas pipe 11, a refrigerant outlet pipe 12 and a refrigerant The inlet duct 13 passes through the support plate 10 from the outside and is inserted inside the bellows 60. The refrigerating mechanism includes a refrigerating chamber 44, a refrigerant inlet pipe 13 and a refrigerant outlet pipe 12, wherein the refrigerating chamber 44 is formed into a cylindrical shape and is accommodated in a vacuum target chamber. Specifically, the refrigerating chamber 44 is formed from the inside of the three-way pipe 40 Extending into the inside of the multi-pass pipe 50, the refrigerant inlet pipe 13 and the refrigerant outlet pipe 12 respectively pass through the inside of the bellows 60, the first flange 30 and the second flange 41 from the top of the support plate 10 The top of the cavity 44 is connected and fixed so that the refrigerant can be transported from the refrigerant inlet pipe 13 into the refrigeration chamber 44 to reduce the temperature in the refrigeration chamber 44, and the gas generated in the refrigeration chamber 44 exits the refrigeration chamber 44 via the refrigerant outlet pipe 12; The working gas pipeline 11 passes through the inside of the bellows 60, the first flange 30, the second flange 41, and the refrigerating chamber 44 from the top of the supporting plate 10. The working gas pipeline 11 passes through the refrigerating chamber 44 and is connected to the nozzle to work A condensation chamber 111 with an increased cross-sectional area is formed in the middle of the gas pipe 11. At least a part of the condensation chamber 111 is located in the refrigeration chamber 44. It should be noted that the interior of the working gas pipe 11 is not in communication with the interior of the refrigeration chamber 44. The working gas (such as nitrogen) is transported to the nozzle through the working gas pipeline 11 and is liquefied in the process. The state of the working gas has changed to the liquefied state when flowing out through the nozzle. The moisture in the working gas is condensed when passing through the condensation chamber 11 , So that the working gas keeps its purity to prevent the nozzle from clogging.

FIG. 9 is a partially enlarged schematic perspective view of the soft X-ray light source according to FIG. 8. As can be seen from FIG. 9 in conjunction with FIG. 6, the light source generating mechanism includes a nozzle 36 that is disposed below the refrigeration cavity 44 and fixed to the refrigeration through the adapter 35 Below the cavity 44, the nozzle 36 communicates with the working gas pipeline 11 so that the working gas that has been condensed into liquid flows out of the nozzle 36; the adapter 35 usually uses a metal adapter to make the temperature transmission more rapid and accurate; the adapter 35 A temperature sensor 31 is provided on the periphery of the device to monitor the temperature change around the nozzle 36 in real time. The temperature sensor 31 is connected to an external device through one of the plugs 17 provided on the top of the support plate 10. A connecting piece 32 is also provided below the cooling cavity 44, a resistance wire holder 33 is provided on the connection piece 32, and a resistance wire 34 is provided on the resistance wire holder 33, part of the resistance wire is spirally wrapped around the side of the nozzle 36, and the resistance wire 34 is connected to another plug 17 provided on the top of the support plate 10 through a wire to facilitate power supply for the resistance wire. The heating of the resistance wire 34 can offset the temperature drop caused by the evaporation and condensation of the refrigerant liquid, while not destroying the high vacuum of the surrounding environment of the low-temperature liquid, so that the stability of the micro-liquid flow is further improved, and when the nozzle 36 is blocked by condensation At this time, the resistance wire 34 can be heated for dredging. A metal cone 37 is also provided below the nozzle 36, usually 15 mm below the nozzle 36, and the top of the metal cone 37 is provided with a groove hollowed into the metal cone 37, the groove is used to receive the slave nozzle 36 Residual liquid flowing out. The design of the metal cone 37 can better remove the residual liquid that has a greater influence on the vacuum degree due to evaporation in time, and reduce the consumption of soft X-rays. The lower part of the metal cone 37 is further connected to the vacuum exhaust port 511 through a metal adapter 513 and a metal joint 512, so that the residual liquid can be drawn out through the vacuum exhaust port 511. It should be noted that the metal adapter 513 is also provided with a heat conducting rod 38 extending in the Z-axis direction. The heat conducting rod 38 is connected to the cooling chamber 44 to make the temperature of the metal adapter 513 and the metal cone 37 and the nozzle 36 through heat transfer The temperature at the location is equivalent, so as to ensure that the residual liquid will not change state due to temperature changes, so that the vacuum in the vacuum target chamber is reduced, affecting the brightness of soft X-rays. Or the metal adapter 513 is further provided with a heat pipe 38 extending in the Z-axis direction, and the heat pipe 38 is connected to the refrigeration cavity 44 so that the refrigerant in the refrigeration cavity 44 can be delivered to the metal adapter 513 and the metal cone 37, The temperature is made to be the same as the temperature in the refrigeration chamber 44 so as to prevent the micro-flow of low-temperature liquid from being further vaporized during the flow process to reduce the vacuum degree, resulting in the consumption of soft X-rays.

Since the nozzle 36 is fixed to the refrigeration chamber 44, the refrigeration chamber 44 is fixed to the support plate 10 through the refrigerant inlet pipe 13, the refrigerant outlet pipe 12, and the working gas pipe 11, and therefore, the first displacement regulator 70 and the second displacement The adjuster 80 and the third displacement adjuster 14 can realize the multi-axis adjustment of the geometric position of the nozzle 36, and can adjust the nozzles in the X, Y, and Z directions in the vacuum target chamber when the light source is working, thereby controlling the liquid The position of the micro-fluid finally achieves the purpose of adjusting the position of the soft X-ray source.

FIG. 10 is a schematic perspective view of the reflection unit 600 of the soft X-ray micro imaging apparatus according to FIG. 1. As can be seen from FIG. 10, the reflection unit 600 includes two third brackets 601, three third threaded rods 603, a blind plate 604, and a third Two bellows 606, in which two third brackets 601 are arranged in parallel and fixed on the first operating platform 100 by L-shaped brackets 602 respectively, the third bracket 601 is provided with several bolt holes, and the third threaded rod 603 is along The substantially horizontal direction is fixed in the corresponding bolt holes on the third bracket 601, and the connection between the bolt holes on each third bracket 601 forms a triangle, so that the third threaded rod 603 and the third threaded rod 603 are installed The above components are relatively stable; the blind plate 604 is located between the two third brackets 601 and is sleeved on the third threaded rod 603. Fixed; the end of the third threaded rod 603 is also provided with a reflective flange 607, the reflective flange 607 and the blind plate 604 are connected by the enemy bellows 606, the blind plate 604, the reflective flange 607 and the blind plate 604 The axes are all on the same axis, which corresponds to the liquid microflow at the nozzle in the vacuum target chamber; the reflective flange 607 is connected to the flange 52 on the side of the tee pipe 50 through the fourth bolt 609, the reflection method The through hole 610 in the middle of the blue plate 607 allows the second bellows 606 to communicate with the inside of the vacuum target chamber.

FIG. 11 is a schematic perspective cutaway view of the reflecting unit of the soft X-ray micro imaging device of FIG. 10. As can be seen from FIG. 11, the blind plate 604 is also provided with a second reflecting mirror 605 facing the soft X-ray light source. The reflecting mirror 605 focuses and reflects the collected soft X-rays, and the focus falls on the sample in the sample chamber 700. Since the second mirror 605 is fixed on the blind plate 604, when the third bolt 608 is adjusted, the second mirror 605 will move along with the blind plate 604, and the two-dimensional movement of the second mirror 605 can be achieved through different third threads The position adjustment of the third bolt 608 on the rod 603 can determine the plane in which the second mirror 605 is located in the space, and then fine-tune the angle between the mirror 605 and each axis to achieve fine adjustment of the pitch angle of the second mirror 605 in vacuum. The third bolt 608 simultaneously bears the pressure outside the cavity.

FIG. 12 is a schematic perspective view of the interior of the sample chamber 700 of the soft X-ray micro imaging apparatus according to FIG. 1. As can be seen from FIG. 12, the sample chamber 700 includes a sample chamber housing 701, and two opposite side walls of the sample chamber housing 701 are respectively provided There are hollow flanges 702 and 750. The flange 702 is connected to a flange 54 on the side of the multi-pass tube 50 to allow the vacuum target chamber to communicate with the sample chamber. Further, the soft X-rays generated in the vacuum target chamber can pass through the The reflection of the two reflecting mirrors 605 is focused and enters into the sample chamber 700; the flange 750 is connected to the pipe 780; the sample chamber 700 is provided with a sample bottom plate 704, and a three-dimensional electric stage is provided on the sample bottom plate 704. The three-dimensional electric stage includes layers The first sliding plate 705, the second sliding plate 706, and the third sliding plate 707 are arranged, and each sliding plate is slidingly fitted; the third sliding plate 707 is provided with a first stage 708, and the side wall of the first stage 708 is provided with Hollow prism 709. The interior of the prism 709 is hollow and a hollow hole has been passed through the prism 709. The axis of the hollow hole is in the horizontal plane and is substantially the same as the axis of the second reflector 605. A wave plate is provided at the hollow hole; a sample two-dimensional adjustment platform 710 is also provided on the sample bottom plate 704, a sample rotating table 711 is provided on the sample two-dimensional adjustment platform 710, and a sample cone 712 is provided on the sample rotating table 711. A capillary glass tube 713 is placed on the 712, and the capillary glass tube 713 is loaded with the cell sample to be imaged. The sample two-dimensional adjustment platform 710 can cooperate with the sample rotating table 711 to adjust the position of the capillary glass tube 713, so that the upper part of the capillary glass tube 713 and the bevel The hollow hole of 709 corresponds to; the diaphragm 714 is provided in the pipe 780, and the diaphragm 714 passes through the flange 750 from the pipe 780 and penetrates into the sample chamber 700, and the diaphragm 714 is provided along the diaphragm 714 Aperture 715 extending in the axial direction, which corresponds to the hollow hole on the prism 709, so that the soft X-rays after entering the cell sample can continue to arrive along the hollow hole in the prism 709 and the aperture 715 Probe 800. In addition, a plurality of (for example, four) aviation plugs 770 are provided on the side wall of the sample chamber 700, and the aviation plugs are respectively connected to a three-dimensional electric translation stage, a sample two-dimensional condition platform 710, and a sample rotating stage 711 to control displacement. A nitrogen interface 771 (FIG. 3) is also provided on the side wall of the sample chamber 700 to facilitate the injection of nitrogen inside the device for protection after the end of the work.

It should be noted by those skilled in the art that the capillary glass tube 713 for loading the cell sample in the sample chamber 700, the hollow prism 709 equipped with a wave plate and the aperture 715 are the positions through which the optical path passes when the device is in operation, which is The axis of the mirror 605 remains substantially on the same horizontal line.

In addition, the soft X-ray micro-imaging device provided by the present application further includes a refrigerant storage, which is connected to the refrigerant inlet pipe 13 through a transmission tube. A low-temperature solenoid valve is provided on the transmission tube to automatically control the input amount of refrigerant and Maintain the pressure stability in the refrigeration chamber; the soft X-ray microscopic imaging device further includes a molecular vacuum pump, which is connected to the refrigerant outlet pipe 12 through a vacuum transmission tube, and the vacuum transmission tube is provided with a high-temperature buffer cavity at the high-temperature buffer cavity A heater is provided, and a vacuum solenoid valve is also provided between the high-temperature buffer cavity and the molecular vacuum pump. The high-temperature buffer cavity and the heater heat the pumped low-temperature refrigerant to prevent the low-temperature refrigerant from damaging the vacuum solenoid valve and the molecular vacuum pump. The solenoid valve can be set with a vacuum threshold, closed when the pressure in the refrigeration chamber is too low, and opened when the pressure in the refrigeration chamber is too high, thereby achieving temperature control in the refrigeration chamber. The refrigerant circulation inside the refrigeration chamber 44 is replaced by a molecular vacuum pump, which makes it possible to achieve a lower refrigeration temperature at the nozzle, which is precisely adjustable, and has a higher refrigeration efficiency, and can liquefy certain gases (such as nitrogen) with a very low liquefaction point. And obtain a more stable injection and a longer injection distance, making the soft X-ray light source more stable, and also suitable for more types of gas targets.

The side of the multi-pass pipe 50 is also provided with a vacuum gauge interface 510, and the vacuum gauge is connected to the multi-pass pipe 50 through the vacuum gauge interface 510 to measure the vacuum degree inside the multi-pass pipe 50. In order to maintain the vacuum in the multi-way pipe 50 and the three-way pipe 40, the third flange 42 on the three-way pipe 40 and the vacuum exhaust port 511 at the bottom of the multi-way pipe 50 are connected to the first vacuum pump 420 and the first vacuum pump The second vacuum pump 430, because the air outlets for vacuuming are located at the upper and lower ends of the vacuum target chamber, respectively, so that the vacuum degree in the vacuum target chamber can be maintained at a very high level.

When the soft X-ray micro imaging device provided by the present application is in operation, the high-energy laser pulser 501 generates laser light and reflects it through the first reflecting mirror 510 and the laser focusing lens 520 to focus on the liquid microflow at the nozzle 36. As a result, the liquid microfluid is plasmatized and soft X-rays are generated. The second mirror 605 mounted on the blind plate 24 focuses and reflects the collected soft X-rays. The focus falls on the tip of the capillary glass tube 713 in the sample chamber 700 At the cell sample, the soft X-rays passing through the cell sample continue to pass through the band plate and then pass through the aperture 715, pass through the pipes 780, 870 and finally illuminate the detector 800, and finally transfer the collected electrical signal to the computer Perform subsequent processing.

It should be noted by those skilled in the art that the first displacement regulator and the second displacement regulator mentioned in the technical solution of the present application may use a differential head, and the third displacement regulator may be replaced by other stepping devices, that is, any An adjustment mechanism capable of manually and automatically adjusting linear displacement with micrometer accuracy, such as an electric translation stage, falls within the protection scope of the present application. Those skilled in the art should also note that the three-dimensional displacement stage, three-dimensional displacement mechanism, first regulator 511, second regulator 521, three-dimensional electric displacement stage and other displacement devices used in this application can be When choosing in three-dimensional motion, the connection relationship and action mechanism between its internal components can also learn from each other, and will not be repeated here. It should also be noted by those skilled in the art that the nozzle can be a low-temperature-resistant glass nozzle, and the adapter, adapter, and metal cone can be made of low-temperature-resistant metal materials; the high-energy laser pulse can be passed through a high-energy nanosecond pulse laser It can also be generated by other short-pulse high-energy laser light sources, such as femtosecond pulsed lasers, which will not be repeated here. The vacuum pump in this application may use an ion pump, a roots pump, etc. to achieve high vacuum in the vacuum target chamber. Nitrogen is preferably used as the working gas. Nitrogen is only a target substance for generating laser plasma. Any substance (gas or liquid) that can generate a laser plasma and can radiate a certain intensity of soft X-rays, such as alcohol, xenon, etc., falls Into the protection scope of this application.

The detector in this application uses digital SiPM to read out every pixel (basic unit) in SiPM, so that position-sensitive photon counting measurement can be achieved. Since the basic unit size of SiPM is about 20 μm, it can reach the CCD Similar position resolution, compared with traditional CCD elements, the signal gain is increased by 1000 times, which greatly improves the detection efficiency of weak light signals, reduces the imaging exposure time, and can achieve higher magnification . The soft X-ray light source in this application adopts an adjustable three-dimensional displacement mechanism, which realizes the adjustment of the position and angle of the liquid microfluid in vacuum, improves the geometric accuracy of the soft X-ray optical path, and facilitates the adjustment of the optical path. In this application, a multi-axis adjusted reflecting unit can be used to adjust the geometric position and pitch angle of the second reflecting mirror in a vacuum, thereby optimizing the optical path. The vacuum system in the present application can realize the precise control of the normal pressure to vacuum in the vacuum chamber through the design of pre-pumping, full-pumping and metal cone 37. The soft X-ray light source used in this application has the advantages of low debris and high conversion rate, improves the intensity of the light source, reduces the damage to the optical elements in the optical path, and can increase the life of the instrument.

In short, the soft X-ray microscopic imaging device provided in this application can achieve nano-level imaging resolution and second-level two-dimensional imaging time at low cost, and can be widely used in nano-scale rapid three-dimensional microscopy in the fields of life sciences and pharmaceutical research and development. In imaging, it has a demonstration role in research fields such as the structure and metabolism of functional cells and the pathogenic mechanism of microorganisms.

The above are only preferred embodiments of the present application and are not intended to limit the scope of the present application. The above embodiments of the present application may also make various changes. That is, any simple, equivalent changes and modifications made according to the claims and the contents of the description of the application shall fall within the protection scope of the claims of the patent of the application. What is not described in detail in this application is conventional technical content.

Claims (24)

1. A soft X-ray micro imaging device includes a soft X-ray light source, the soft X-ray light source includes a vacuum target chamber, a cooling cavity and a nozzle, the cooling cavity and the nozzle volume Placed in the vacuum target chamber, the nozzle is disposed on the refrigeration chamber, characterized in that the soft X-ray micro imaging device further includes:

   A three-dimensional displacement mechanism, the three-dimensional displacement mechanism is respectively connected to the refrigeration chamber and the vacuum target chamber, and the vacuum target chamber has two opposite outlets;

   A vacuum unit, the vacuum unit includes a first vacuum pump and a second vacuum pump, and the first vacuum pump and the second vacuum pump are respectively connected to two outlets of the vacuum target chamber;

   A laser unit, the laser unit includes a pulsed laser generator and a laser focusing mirror, and the laser light emitted by the pulsed laser generator is focused on the nozzle after passing through the laser focusing mirror;

   A reflecting unit, the reflecting unit has a second reflecting mirror, and the reflecting unit communicates with the vacuum target chamber;

   A sample chamber, the sample chamber communicating with the vacuum target chamber, a capillary glass tube is contained in the sample chamber, the position of the capillary glass tube corresponds to the focal point of the nozzle and the reflector; and

   A detector, which is connected to the sample chamber and corresponds to the position of the capillary glass tube.
2. The soft X-ray micro imaging device according to claim 1, wherein the vacuum target chamber comprises:

   A three-way pipe, the three-way pipe has opposite first and second outlets and a third outlet located between the first outlet and the second outlet, the first outlet is connected to the support plate, cooling An agent inlet pipe, a refrigerant outlet pipe and a working gas pipe respectively pass through the support plate and are connected to the refrigeration chamber, and the third outlet is connected to the first vacuum pump; and

   A multi-way tube, the multi-way tube includes opposite top openings and bottom openings, and a plurality of side openings located at a house of the top openings and the bottom openings, the top openings are closely connected with the second outlets, so A vacuum outlet connected to the second vacuum pump is provided at the bottom opening, a position of the nozzle corresponds to the side opening, a groove is provided below the nozzle, the groove is fixed by an adapter, and the rotary The joint is provided at the vacuum outlet, and the groove is in communication with the vacuum outlet.
3. The soft X-ray micro imaging device according to claim 2, wherein a temperature sensor is provided at the nozzle.
4. The soft X-ray micro-imaging device according to claim 2, wherein a heat conduction rod is provided on the adapter, and the heat conduction rod is connected to the cooling cavity.
5. The soft X-ray micro imaging device according to claim 1, wherein a heater is provided on the periphery of the spray head.
6. The soft X-ray micro imaging device according to claim 2, wherein the support plate is provided on the vacuum target chamber, and the support plate is provided with a refrigerant inlet pipe passing through the support plate , A refrigerant outlet pipe and a working gas pipe, the refrigerant inlet pipe and the refrigerant outlet pipe communicate with the refrigeration chamber, the working gas pipe passes through the refrigeration chamber and is connected to the nozzle; first A bellows is provided between the support plate and the vacuum target chamber, and the refrigerant inlet pipe, refrigerant outlet pipe and working gas pipe all pass through the inside of the first bellows.
7. The soft X-ray micro imaging device according to claim 2, wherein the three-dimensional displacement mechanism includes a first displacement adjuster, a second displacement adjuster, and a third displacement adjuster, the first displacement adjuster , The second displacement regulator and the third displacement regulator are both provided between the support plate and the vacuum target chamber and respectively control the support plate to move in three directions perpendicular to each other.
8. The soft X-ray micro imaging device according to claim 7, characterized in that the soft X-ray light source further comprises a first support plate, a second support plate arranged parallel to each other and sleeved on the outside of the bellows A third support plate, the first support plate is movably fixed to the support plate by the third displacement adjuster, and the second support plate is movably fixed to the support plate by the second displacement adjuster On the first support plate, the second support plate is simultaneously movably fixed to the third support plate by the first displacement adjuster, and the third support plate is fixed to the vacuum target chamber.
9. The soft X-ray micro imaging device according to claim 8, wherein the first displacement adjuster includes a first support frame, a first pusher, a first guide rail, and a first guide rail groove, the first The support frame is fixed on the third support plate, the first pusher is fixed on the first support frame and corresponds to the second support plate, and the first guide rail is fixed on the first direction along the first direction On the third support plate, the first guide groove is fixed below the second support plate and slidingly cooperates with the first guide.
10. The soft X-ray micro imaging device according to claim 9, wherein the second displacement adjuster includes a second support frame, a second pusher, a second guide rail, and a second guide rail groove, the second The support frame is fixed to the second support plate, the second thruster is fixed to the second support frame and corresponds to the first support plate, and the second guide rail is fixed to the second guide along the second direction On the second support plate, the second guide groove is fixed below the first support plate and slidingly cooperates with the second guide, and the first direction and the second direction are perpendicular to each other.
11. The soft X-ray micro imaging device according to claim 11, wherein the third displacement adjuster comprises a screw and a nut, and the screw is uniformly fixed on the first support plate in a third direction The support plate is fixed on the bolt through the cooperation of the nut and the bolt, and the third direction is perpendicular to the first direction and the second direction.
12. The soft X-ray micro imaging apparatus according to claim 1, wherein the vacuum unit further includes a vacuum controller, and the vacuum controller is connected to the first vacuum pump and the second vacuum pump, respectively.
13. The soft X-ray micro-imaging device according to claim 1, wherein the laser unit further comprises a first mirror, the first mirror is provided at the pulse laser generator and the laser focusing mirror To conduct the laser light path.
14. The soft X-ray micro imaging device according to claim 1, characterized in that a lifting platform is provided below the pulse laser generator, a first adjuster is provided below the first reflecting mirror, and the laser focusing mirror The second regulator is provided below.
15. The soft X-ray micro imaging device according to claim 1, wherein the reflection unit includes a third bracket, a third threaded rod, and a blind plate, and the third threaded rod is disposed on the third bracket , The blind plate is provided on the third threaded rod, and the second reflector is mounted on the blind plate.
16. The soft X-ray micro imaging device according to claim 15, wherein the reflection unit further comprises a second bellows, and the second bellows are respectively connected to the blind plate and the vacuum target chamber.
17. The soft X-ray micro imaging device according to claim 15, wherein the third threaded rod is provided with a plurality of third bolts cooperating with the third threaded rod, the third bolts are located respectively Both sides of the blind plate.
18. The soft X-ray microscopic imaging device according to claim 1, wherein the sample chamber includes a sample chamber housing, and two opposite side walls of the sample chamber housing are respectively connected to the vacuum target chamber and the The detector is connected.
19. The soft X-ray micro imaging device according to claim 18, characterized in that a capillary glass tube and an iris tube are provided in the sample chamber, and the iris tube has an iris hole extending along the axis direction, the light One end of the aperture corresponds to the capillary glass tube, and the other end of the aperture corresponds to the detector, the nozzle, the focal point of the second mirror, the top end of the capillary glass tube, and the diaphragm The holes are on the same horizontal line.
20. The soft X-ray micro imaging device according to claim 19, wherein a prism is further provided between the diaphragm tube and the capillary glass tube, and the prism has a prism hole therein, and the prism The extending direction of the mesa hole is consistent with the extending direction of the diaphragm hole, and a wave plate is provided at one end of the prism mesa hole close to the capillary glass tube.
21. The soft X-ray micro imaging device according to claim 20, wherein the prism is provided on a three-dimensional electric displacement stage, and the three-dimensional electric displacement stage is connected to an aviation plug provided on the housing of the sample chamber .
22. The soft X-ray microscopic imaging device according to claim 19, wherein the capillary glass tube is provided on a sample rotating table, and the sample rotating table is provided on a two-dimensional adjustment platform of the sample.
23. The soft X-ray micro imaging device according to claim 1, wherein the detector includes a scintillation crystal and a silicon photomultiplier tube, the scintillation crystal corresponds to the sample chamber, and the silicon photomultiplier tube is The scintillation crystals are coupled.
24. The soft X-ray micro imaging device according to claim 23, characterized in that a three-dimensional displacement stage is provided below the detector.

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