CN102778748A - Aiming device for microscope for plasma diagnosis and use method thereof - Google Patents
Aiming device for microscope for plasma diagnosis and use method thereof Download PDFInfo
- Publication number
- CN102778748A CN102778748A CN2011101210770A CN201110121077A CN102778748A CN 102778748 A CN102778748 A CN 102778748A CN 2011101210770 A CN2011101210770 A CN 2011101210770A CN 201110121077 A CN201110121077 A CN 201110121077A CN 102778748 A CN102778748 A CN 102778748A
- Authority
- CN
- China
- Prior art keywords
- microscope
- mirror
- glass plate
- vacuum pipe
- mesh flake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
The invention relates to an aiming device for a microscope for plasma diagnosis and a use method thereof. The aiming device comprises a line gatherer, a plane mirror, a luminous source, a glass plate and a grid plate. The line gatherer is connected with a short connecting pipe arranged on a vacuum pipeline through a flange piece, the plane mirror is arranged in the vacuum pipeline and connected with the line gatherer capable of driving the plane mirror to lead in and lead out, the grid plate is adhered to the glass plate, and the glass plate with the grid plate is arranged at one end of a long connecting pipe communicated with the vacuum pipeline and fixed through a flange cover. According to the method, a reverse imaging method is adopted, an image distance of an image system is first determined, and an object point is located through the microscope with small depth of field. Compared with the prior art, the aiming device and the use method of the aiming device have the advantages that a device structure is simple, a use method is easy, aiming precision is high, normal work of other diagnosis devices in a strong-laser device target cavity can not be affected and the like.
Description
Technical field
The present invention relates to plasma diagnosis microscope field, especially relate to a kind of plasma diagnosis microscope sighting device and application process thereof.
Background technology
In plasma diagnostics experiment, the best object point of imaging system and overlapping of target are related to the success or failure of diagnostic test.Imaging system has two aspects to the aiming of target spot, and the first is positioned on the optical axis of system target spot, and it two is to guarantee that target spot is in the field depth that the system imaging spatial resolution allows.
Extreme ultraviolet Schwarzschild (Schwartz Anthony Heald) microscope of light laser plasma diagnostics experiment usefulness is the reflective imaging device of normal incidence; Its object lens are made up of two concentric spherical catoptrons; As shown in Figure 1, primary mirror 5 is a concave mirror, and secondary mirror 4 is a convex mirror; Can eliminate three grades of spherical aberrations, coma and astigmatisms, have advantages such as high resolving power, high collection efficiency and big visual field.Schwarzschild microscope operation wavelength described in the present invention is 18.2nm, and enlargement ratio is 10, and numerical aperture is 0.1.
Diagnostic test requires the microscopical imaging performance of Schwarzschild: the resolution that in the 2mm visual field, realizes 5 μ m.For realizing this resolution requirement, system will reach the pointing accuracy of target spot: axial (x direction) pointing accuracy 15 μ m, axle (perpendicular to x) laying for direction precision of hanging down is superior to 0.1mm, so this just needs imaging system to have accurate aiming localization method.
At present, at home on the strong laser device method of sight of used diagnostic system mainly comprise: auxiliary visual light imaging method of sight, two-way laser aiming method and place kick method of sight.
Auxiliary visual light imaging aiming
Auxiliary visual light imaging method of sight is a cover visual light imaging equipment that is independent of beyond the extreme ultraviolet Schwarzschild image-forming objective lens, and this equipment and Schwarzschild object lens are installed on the same regulating device.Through imaging experiment adjustment visual light imaging equipment, the object point of its object point and extreme ultraviolet Schwarzschild object lens is coincided.The object point of visual light imaging equipment is the object point of Schwarzschild object lens like this.In light laser plasma diagnostics experiment, only need the object point position that target is placed on visual light imaging equipment get final product, this Physical Target is positioned at the best object point position of extreme ultraviolet Schwarzschild imaging system at this moment.
This method of sight mainly contains following two shortcomings: 1. in order to realize that high-precision aiming need be by means of the camera lens of large-numerical aperture, complex structure; 2. the imaging device that is independent of extreme ultraviolet optics system can take the finite space in the strong laser device target chamber.
Two-way laser aiming
Two-way laser aiming method is that the space through two bundle laser crosses and realizes that the laser joint is definite target position to the diagnostic system aiming.The bearing accuracy of this method of sight optical axis direction is by the angle decision of two bundle laser, and angle more greatly then pointing accuracy is high more.But, receiving the target chamber space constraint, the subtended angle of two-way laser can not be too big, so the axial location error is big.In addition, pointing error is also judged relevant with laser focal spot size and degree of overlapping, and therefore, the whole system pointing error is bigger.
To above 1,2 two kind of method of sight, with it similarly Chinese invention patent application publication number is arranged is the apparatus and method of the diagnostic device aiming of micro target pellet of CN101793515A.This patent combines 1, the characteristics of 2 two kind of method, adopts the burnt optical imagery camera lens of two group leaders to substitute the two-way generating laser, and the introducing through CCD image-forming component and post-processed process obtains higher pointing accuracy.But; Aiming scheme in this patent of invention has following shortcoming: 1. the critical component of aiming is two long burnt optical imagery camera lenses; So axial pointing accuracy depends on the angle of the depth of field and two telephoto lenses of telephoto lens; Little and the angle of the depth of field greatly then axial location precision is high, and the depth of field is big and the little then axial location of angle precision is low, so the pointing accuracy of axial (the Z direction) of this method of sight described in the patent is ± 100 μ m.But, be 15 μ m in the needed axial pointing accuracy of the Schwarzschild imaging system described in this patent, obviously the described diagnostic device method of sight of patent of invention CN101793515A can't reach the requirement of Schwarzschild imaging system.2. if will improve the axial pointing accuracy of the described method of sight of patent of invention CN101793515A, the numerical aperture NA that needs to improve long burnt optical lens to be reducing its depth of field, and increases two angles between the long burnt optical lens.But this can increase its space in the strong laser device target chamber undoubtedly, in the comprehensive Physical Experiment of following strong laser device, places the diagnostic device that a few cover to tens covers adopt this pointing device with being difficult to enough Space Angle.
The place kick aiming
Location simulation ball method is based upon on the basis with the desirable object point of place kick Mk system, and by the target monitoring system, the adjustment diagnostic system makes place kick arrive assigned address, with the place kick withdrawal, through electric control gear pellet is placed same position afterwards.The advantage of this method is that bearing accuracy is high, good reliability, but need place kick be regained in the experiment, this need realize that in addition, place kick is very easy to damage, and again place kick is demarcated with regard to needs in case damage than complex mechanical construction.
Therefore,, needing to demand a kind of convenience, flexible urgently for the long-term diagnostic system that uses of a cover, and durable high precision sighting device.
Summary of the invention
The object of the invention is exactly plasma diagnosis microscope sighting device and the application process thereof that provides in order to overcome the defective that above-mentioned prior art exists that a kind of apparatus structure is simple, method of application is easy, pointing accuracy is high and can not influence the operate as normal of other diagnostic device in the strong laser device target chamber.
The object of the invention can be realized through following technical scheme: a kind of plasma diagnosis microscope sighting device, be arranged on the Schwarzschild micro objective, and described Schwarzschild micro objective comprises location microscope, secondary mirror, primary mirror, vacuum pipe, ccd detector; One end of described vacuum pipe is connected with ccd detector through flange part; Be arranged with the long connecting pipe and the nipple that communicate with vacuum pipe on the tube wall of described vacuum pipe, it is characterized in that, this sighting device comprises straight line inducting device, plane mirror, light emitting source, glass plate, mesh flake; Described straight line inducting device is connected with nipple on being arranged on vacuum pipe through flange part; Described plane mirror is arranged in the vacuum pipe, and can drive the straight line inducting device that plane mirror imports and exports and is connected, and described mesh flake sticks on the glass plate; The glass plate that is pasted with mesh flake is arranged on an end of the long connecting pipe that communicates with vacuum pipe; Fix through blind flange, described light emitting source is arranged on the outside of blind flange, and its light that sends passes glass sheet; After the plane reflection mirror reflection, through forming images behind secondary mirror and the primary mirror.
The junction of described straight line inducting device and nipple is provided with O-ring seal.
Described glass plate is equipped with O-ring seal with the junction of junction, glass plate and the blind flange of long connecting pipe.
Described O-ring seal is a viton seal ring.
Described light emitting source sends visible light.
The microscopical magnification in described location is that 50～100 times, the depth of field are 4.3～6.7 μ m.
A kind of application process of plasma diagnosis microscope sighting device as claimed in claim 1; It is characterized in that; This application process may further comprise the steps: 1) take off ccd detector; A mesh flake is placed at joint flange spare center at vacuum pipe and ccd detector, and radiation of visible light is to this mesh flake, and mesh flake is earlier after form images behind the secondary mirror, primary mirror; 2) through the location microscope imaging in the step 1) is positioned, and the lock in place microscope; 3) utilize the straight line inducting device that plane mirror is imported vacuum pipe, light emitting source sends the visible light transmissive glass plate and shines the mesh flake that is arranged on the glass plate, and mesh flake is successively through plane mirror, secondary mirror and primary mirror imaging; 4) position of the mesh flake of adjustment on the glass plate makes this mesh flake through plane mirror, secondary mirror and primary mirror imaging and step 2) in overlap by locating the imaging that microscope locatees, then ccd detector is connected with vacuum pipe; 5) position of adjustment target, make locate in target and the step 4) that microscope locatees the mesh flake imaging overlap; 6) Schwarzschild micro objective is vacuumized, repeating step 5 then), further adjust the position of target, utilize the straight line inducting device that plane mirror is derived vacuum pipe then, accomplish aiming location to target.
Compared with prior art, the present invention has the following advantages:
1, the critical component in the sight device is the Schwarzschild microscope, and (comprising primary mirror and secondary mirror), it is again simultaneously the equipment of extreme ultraviolet waveband imaging, so simplified system architecture, can not occupy the exceptional space in the light laser diagnostic device target chamber again.
2, the present invention adopts the method for sight of confirming image distance searching object point can pointing accuracy be improved 100 times.
3, this method of sight adopts the location microscope to position, and the axial location precision can reach 6.7 μ m, and vertical optical axis direction bearing accuracy is superior to 50 μ m.
4, method of sight of the present invention can not destroyed the needed vacuum environment of light laser plasma diagnostics, and has improved pointing accuracy (influence to imaging experiment of minor shifts that vacuum hits has been eliminated in aiming under the vacuum).
5, the aiming elements among the present invention is except primary mirror with the secondary mirror, and other parts relevant with aiming are all in the outside in strong laser device target chamber, so do not influence the operate as normal of other diagnostic device in the strong laser device target chamber.
Description of drawings
Fig. 1 is a user mode structural representation of the present invention;
Fig. 2 is the partial enlarged drawing of Fig. 1;
The image of Fig. 3 for gathering in the diagnostic test aiming process.
Among the figure 1 for location microscope, 2 be laser, 3 for target, 4 for secondary mirror, 5 for primary mirror, 6 for strong laser device target chamber, 7 for target chamber DN200 flange, 8 for the DN200 flange, 9 for plane mirror, 10 for viton seal ring, 16 for viton seal ring, 18 for viton seal ring, 11 for the straight line inducting device, 12 for the DN16 flange, 13 for vacuum pipe, 14 for the DN42 flange, 15 for ccd detector, 17 for auxiliary pointing device, 19 for the DN32 flange, 20 for DN32 blind flange, 21 for light emitting source, 22 is glass plate, 23 be that mesh flake, 24 is the target picture that becomes through plane mirror, secondary mirror, primary mirror and location microscope for grid of picture, 27 that microscope becomes through the location for viton seal ring, 26 for viton seal ring, 25.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment the present invention is elaborated.
Embodiment
The present invention adopts twice imaging mode of visible light, and the realization system is to the accurate aiming of vacuum chamber point of impact on target.
Among the present invention, crucial positioning equipment is a microscope 1, and its magnification can be chosen as 50～100 times; Numerical aperture is 0.2～0.25; Its depth of field has determined the axial x direction bearing accuracy of system, and magnification has determined the axial bearing accuracy of vertical light, and its depth of field satisfies:
λ is a visible wavelength, but value 540nm, and NA is the numerical aperture of the location microscope 1 of location usefulness.So should locate about 4.3～6.7 μ m of the microscopical depth of field, can reach of the requirement of Schwarzschild microscope to axial pointing accuracy.In addition, can observe 50 μ m even the axial variation of littler vertical light through 50～100 times microscopes, so, can satisfy the accuracy requirement of experiment equally.
The present invention can realize through following technical measures: adopt location microscope 1 as positioning equipment, the purpose of visual light imaging is to realize mesh flake 23 and ccd detector 15 image planes center conjugation for the first time; Visual light imaging is to utilize mesh flake 23 replaced C CD detectors 15 centers for the second time, once more through plane mirror 9, secondary mirror 4 and primary mirror 5 imagings, and adopts location microscope 1 location, and this position is the microscopical best object point of Schwarzschild position.
Among Fig. 1,1 is the location microscope, and its effect is that mesh flake 23 is positioned through plane mirror 9, secondary mirror 4 and primary mirror 5 imagings.2 is laser, and 3 is target, and the two does not belong to the parts in the sighting device, is for the ease of saying something with its purpose that marks among the figure.
Secondary mirror 4 and the primary mirror 5 common Schwarzschild microscopes of forming, it has two effects: the first is operated in visible light, and mesh flake 23 is carried out to picture, and use as aiming this moment; It two is to be operated in extreme ultraviolet waveband, and the extreme ultraviolet that laser 2 irradiation targets 3 are produced is carried out to picture, and use as image-forming diagnose this moment.
Strong laser device target chamber 6 is vacuum target chambeies with target chamber DN200 flange 7, only marks the part cavity among the figure, and target chamber DN200 flange 7 is to be used for the flange port of erecting equipment.13 is vacuum pipe; DN200 flange 8, DN16 flange 12 and DN32 flange 14 are the flange ports on the vacuum pipe 13; Its effect is to be connected with target chamber DN200 flange 7, straight line inducting device 11 and ccd detector 15 respectively; The effect of vacuum pipe 13 is to be used for keeping being in the pipeline vacuum state, and vacuum pipe 13 leans on viton seal ring 10,16,18 to keep vacuum seal.
The effect of plane mirror 9 is that the light that light emitting source 21 shines mesh flake 23 is carried out 45 ° of reflections.Straight line inducting device 11 can drive the rectilinear motion of ultrahigh vacuum midplane catoptron 9; And the accurate control position of ability; Its effect is to import and export plane mirror 9; When system is aimed at, plane mirror 9 is imported in the vacuum pipe 13, when carrying out the extreme ultraviolet waveband imaging experiment after aiming finishes plane mirror 9 is derived vacuum pipes 13, purpose be prevent plane mirror 9 block by target 3 send and elder generation after the extreme ultraviolet of primary mirror 5 and secondary mirror 4 reflections.
Schwarzschild microscope among the present invention is made up of primary mirror 5 and secondary mirror 4, and it has two effects: aiming and extreme ultraviolet.Introduce its flow process below respectively:
The aiming process: light emitting source 21 shines mesh flake 23; Light carries out 45 ° of reflections through plane mirror 9; After secondary mirror 4 and primary mirror 5 reflect, image in a bit then, this picture is positioned by location microscope 1, makes the picture that can clearly see mesh flake 23 through location microscope 1.Then target 3 is placed on the position of the grid image of being located by location microscope 1.Among Fig. 3 26,27 is the picture of observed target 3 and mesh flake 23 from the microscope 1 of location.
Extreme ultraviolet process: on accomplish on the basis of aiming process; Laser 2 irradiation targets 3 can produce extreme ultraviolet; Be imaged on the image planes center of ccd detector 15 after extreme ultraviolet successively reflects through microscopical primary mirror 5 of Schwarzschild and secondary mirror 4, imaging is by ccd detector 15 records.
Aiming elements primary mirror 5 among the present invention is in 6 inside, strong laser device target chamber with secondary mirror 4, and location microscope 1, plane mirror 9 and auxiliary pointing device 17 and other parts DN200 flange 8, vacuum pipe 13, straight line inducting device 11, DN16 flange 12, DN42 flange 14 and ccd detector 15 are all in the outside in strong laser device target chamber 6 in the aiming elements.And the primary mirror 5 of aiming usefulness is core components of plasma diagnostics (extreme ultraviolet) with secondary mirror 4, so this sight device can not occupy the exceptional space in the strong laser device target chamber 6.
In the light laser plasma diagnostics, specifically aim at step and be divided into two stages:
The process of debugging mesh flake 23 and ccd detector 15 image planes center conjugation:
1) places a grid (DN42 flange 14 centers and ccd detector 15 centers coincidence) identical at DN42 flange 14 centers with mesh flake 23; (this fashion is not installed ccd detector 15 to radiation of visible light to grid; Plane mirror 9 imports as yet), grid earlier after secondary mirror 4 image in a bit with primary mirror 5;
2) utilize the picture of 1 pair of step 1) of location microscope to position, locking microscope 1;
3) utilize straight line inducting device 11 that plane mirror 9 is imported vacuum pipe 13.
4) light emitting source 21 sees through glass plate 22 and shines mesh flake 23, successively images in a bit through plane mirror 9, secondary mirror 4 and primary mirror 5;
5) position of repeated moving mesh flake 23 (mesh flake 23 sticks on glass plate 22 surfaces, during mobile grid sheet 23 with DN32 blind flange 20, glass plate 22, viton seal ring 24 unloads, and installs behind the position of mobile grid sheet 23 again.), make mesh flake 23 through plane mirror 9, secondary mirror 4 and primary mirror 5 imagings and step 2) in by the location microscope 1 located the picture overlap.At this moment, mesh flake 23 is accomplished conjugation with ccd detector image planes center;
6) ccd detector is installed on the DN42 flange 14.
Application process (the Schwarzschild microscope is to the aiming process of target 3 in the plasma diagnostics) after debugging finishes:
7) light emitting source 21 sees through glass plate 22 and shines mesh flake 23, successively images in a bit through plane mirror 9, secondary mirror 4 and primary mirror 5;
8) utilize the picture of 1 pair of step 7) of location microscope to position;
9) position of adjustment target 3 makes it overlap with the picture of location microscope 1 location in the step 8);
10) strong laser device target chamber 6 is vacuumized;
11) repeating step 7)～9); 3 position can produce small skew, repeating step 7 because vacuum hits)～9) purpose be vacuumize finish after accurate aiming target 3 again;
12) utilize straight line inducting device 11 that plane mirror 9 is derived vacuum pipe 13.
6 steps through above debugging finishes in the application process have promptly been accomplished the accurate aiming of Schwarzschild microscope to target 3; More than 6 steps all can under vacuum environment, accomplish; That is to say that this method of sight can the required vacuum environment of breaking test; Hit 3 skew to the influence of experimental precision so eliminated vacuum, when guaranteeing precision, improved conventional efficient.
Claims (7)
1. a plasma diagnosis microscope sighting device is arranged on the Schwarzschild micro objective, and described Schwarzschild micro objective comprises location microscope, secondary mirror, primary mirror, vacuum pipe, ccd detector; One end of described vacuum pipe is connected with ccd detector through flange part; Be arranged with the long connecting pipe and the nipple that communicate with vacuum pipe on the tube wall of described vacuum pipe, it is characterized in that, this sighting device comprises straight line inducting device, plane mirror, light emitting source, glass plate, mesh flake; Described straight line inducting device is connected with nipple on being arranged on vacuum pipe through flange part; Described plane mirror is arranged in the vacuum pipe, and can drive the straight line inducting device that plane mirror imports and exports and is connected, and described mesh flake sticks on the glass plate; The glass plate that is pasted with mesh flake is arranged on an end of the long connecting pipe that communicates with vacuum pipe; Fix through blind flange, described light emitting source is arranged on the outside of blind flange, and its light that sends passes glass sheet; After the plane reflection mirror reflection, through forming images behind secondary mirror and the primary mirror.
2. a kind of plasma diagnosis microscope sighting device according to claim 1 is characterized in that the junction of described straight line inducting device and nipple is provided with O-ring seal.
3. a kind of plasma diagnosis microscope sighting device according to claim 1 is characterized in that, described glass plate is equipped with O-ring seal with the junction of junction, glass plate and the blind flange of long connecting pipe.
4. according to claim 2 or 3 described a kind of plasma diagnosis microscope sighting devices, it is characterized in that described O-ring seal is a viton seal ring.
5. a kind of plasma diagnosis microscope sighting device according to claim 1 is characterized in that described light emitting source sends visible light.
6. a kind of plasma diagnosis microscope sighting device according to claim 1 is characterized in that, the microscopical magnification in described location is that 50～100 times, the depth of field are 4.3～6.7 μ m.
7. the application process of a plasma diagnosis microscope sighting device as claimed in claim 1 is characterized in that, this application process may further comprise the steps:
1) take off ccd detector, place a mesh flake at the joint flange spare center of vacuum pipe and ccd detector, radiation of visible light is to this mesh flake, and mesh flake is earlier after form images behind the secondary mirror, primary mirror;
2) through the location microscope imaging in the step 1) is positioned, and the lock in place microscope;
3) utilize the straight line inducting device that plane mirror is imported vacuum pipe, light emitting source sends the visible light transmissive glass plate and shines the mesh flake that is arranged on the glass plate, and mesh flake is successively through plane mirror, secondary mirror and primary mirror imaging;
4) position of the mesh flake of adjustment on the glass plate makes this mesh flake through plane mirror, secondary mirror and primary mirror imaging and step 2) in overlap by locating the imaging that microscope locatees, then ccd detector is connected with vacuum pipe;
5) position of adjustment target, make locate in target and the step 4) that microscope locatees the mesh flake imaging overlap;
6) Schwarzschild micro objective is vacuumized, repeating step 5 then), further adjust the position of target, utilize the straight line inducting device that plane mirror is derived vacuum pipe then, accomplish aiming location to target.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110121077.0A CN102778748B (en) | 2011-05-11 | 2011-05-11 | Aiming device for microscope for plasma diagnosis and use method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110121077.0A CN102778748B (en) | 2011-05-11 | 2011-05-11 | Aiming device for microscope for plasma diagnosis and use method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102778748A true CN102778748A (en) | 2012-11-14 |
| CN102778748B CN102778748B (en) | 2014-08-13 |
Family
ID=47123699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110121077.0A Expired - Fee Related CN102778748B (en) | 2011-05-11 | 2011-05-11 | Aiming device for microscope for plasma diagnosis and use method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102778748B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106769883A (en) * | 2016-12-29 | 2017-05-31 | 同济大学 | A kind of Schwarzschild focal plane of lens positioner and localization method |
| CN108169790A (en) * | 2017-11-27 | 2018-06-15 | 同济大学 | A kind of microscopical intensity calibration method of Grazing Incidence X-Ray |
| CN110413009A (en) * | 2019-07-24 | 2019-11-05 | 中国工程物理研究院激光聚变研究中心 | A kind of sighting system |
| CN117352527A (en) * | 2023-10-08 | 2024-01-05 | 同济大学 | Six-channel array type Schwarzschild extreme ultraviolet imaging system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06331798A (en) * | 1993-05-27 | 1994-12-02 | Olympus Optical Co Ltd | Diffuser |
| US5432831A (en) * | 1992-09-10 | 1995-07-11 | Olympus Optical Co., Ltd. | Vacuum optical system |
| US5434901A (en) * | 1992-12-07 | 1995-07-18 | Olympus Optical Co., Ltd. | Soft X-ray microscope |
| CN1598503A (en) * | 2004-09-27 | 2005-03-23 | 重庆大学 | Co-target X-ray space-time resolution spectrographic method and its spectrograph |
| CN102038552A (en) * | 2011-01-14 | 2011-05-04 | 中国科学院西安光学精密机械研究所 | High-precision diagnostic equipment collimation method and device thereof |
-
2011
- 2011-05-11 CN CN201110121077.0A patent/CN102778748B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5432831A (en) * | 1992-09-10 | 1995-07-11 | Olympus Optical Co., Ltd. | Vacuum optical system |
| US5434901A (en) * | 1992-12-07 | 1995-07-18 | Olympus Optical Co., Ltd. | Soft X-ray microscope |
| JPH06331798A (en) * | 1993-05-27 | 1994-12-02 | Olympus Optical Co Ltd | Diffuser |
| CN1598503A (en) * | 2004-09-27 | 2005-03-23 | 重庆大学 | Co-target X-ray space-time resolution spectrographic method and its spectrograph |
| CN102038552A (en) * | 2011-01-14 | 2011-05-04 | 中国科学院西安光学精密机械研究所 | High-precision diagnostic equipment collimation method and device thereof |
Non-Patent Citations (1)
| Title |
|---|
| 王新等: "等离子体诊断用18.2nmSchwarzschild显微镜", 《强激光与粒子束》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106769883A (en) * | 2016-12-29 | 2017-05-31 | 同济大学 | A kind of Schwarzschild focal plane of lens positioner and localization method |
| CN106769883B (en) * | 2016-12-29 | 2019-06-11 | 同济大学 | A kind of Schwarzschild focal plane of lens positioning device and localization method |
| CN108169790A (en) * | 2017-11-27 | 2018-06-15 | 同济大学 | A kind of microscopical intensity calibration method of Grazing Incidence X-Ray |
| CN110413009A (en) * | 2019-07-24 | 2019-11-05 | 中国工程物理研究院激光聚变研究中心 | A kind of sighting system |
| CN117352527A (en) * | 2023-10-08 | 2024-01-05 | 同济大学 | Six-channel array type Schwarzschild extreme ultraviolet imaging system |
| CN117352527B (en) * | 2023-10-08 | 2024-04-26 | 同济大学 | Six-channel array type Schwarzschild extreme ultraviolet imaging system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102778748B (en) | 2014-08-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108072970B (en) | Optical tweezers light sheet microscopic imaging device and method | |
| CN102778748B (en) | Aiming device for microscope for plasma diagnosis and use method thereof | |
| CN103514966B (en) | The sighting device of plasma diagnosis X-ray optical system and method for sight | |
| CN107702644B (en) | Multi-degree-of-freedom measuring device based on double PSDs | |
| WO2020134503A1 (en) | Soft x-ray micro imaging device | |
| CN203688919U (en) | Infrared/visible dual-band photoelectric auto-collimation system | |
| CN103698900A (en) | Optical imaging method and system for large-scale high-resolution remote sensing camera | |
| CN111307419A (en) | Device and method for detecting consistency of optical axis | |
| CN107192536B (en) | It is a kind of without burnt conjugated optical channels MTF test device and test method | |
| CN108020505A (en) | The burnt optical tweezer microscopic imaging device of zoom copolymerization and method | |
| CN106569342A (en) | Internal focusing light pipe with autocollimation function and usage method thereof | |
| CN102679963B (en) | Method and device for presetting focal plane in vacuum for space camera | |
| CN202614226U (en) | Astronautic camera in-vacuum focal plane preset device | |
| CN101396765A (en) | Laser machining device | |
| CN106814369B (en) | Imaging and illumination light path structure of imaging type arbitrary reflecting surface velocity interferometer | |
| CN106597632A (en) | Ellipsoidal reflector perifocus high-precision positioning device and method | |
| CN112305739B (en) | Infrared dual-band imaging optical system combining common optical path wide and narrow fields of view | |
| CN103487929A (en) | Method for adjusting optical axis and focal plane of soft X-ray and extreme ultraviolet combined type telescope | |
| CN108732115B (en) | Schlieren system for observing flow field in circular pipeline | |
| CN112461260B (en) | Testing device and testing method for MSO optical system | |
| CN115931306A (en) | High-low temperature optical transfer function and transmittance testing system | |
| CN215812382U (en) | Amplitude-division simultaneous polarization imaging system | |
| CN101354308B (en) | Instrument and method for measuring digital parallax | |
| KR101111961B1 (en) | Lens system for CES plasma diagnosis | |
| CN103698897B (en) | A kind of infrared/visible two waveband photoelectric auto-collimation system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140813 Termination date: 20180511 |