CN102038552A - Method and device for aiming high-precision diagnostic equipment - Google Patents

Method and device for aiming high-precision diagnostic equipment Download PDF

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Publication number
CN102038552A
CN102038552A CN2011100083212A CN201110008321A CN102038552A CN 102038552 A CN102038552 A CN 102038552A CN 2011100083212 A CN2011100083212 A CN 2011100083212A CN 201110008321 A CN201110008321 A CN 201110008321A CN 102038552 A CN102038552 A CN 102038552A
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ccd
aiming
groups
diagnostic device
precision
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CN2011100083212A
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何俊华
张敏
闫亚东
王维
韦明智
谢正茂
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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Abstract

The invention provides a method and a device for aiming high-precision diagnostic equipment, which aim at solving the problems of low aiming precision, complex aiming device and limited space of the traditional aiming method. The invention adopts an optical imaging intersection measurement mode to image a target point on two groups of CCDs; judging and reading the two groups of obtained CCD images to obtain CCD intersection measuring point coordinates; when the CCD convergence measuring point coordinate is coincident with the initialized given target point coordinate, the diagnosis equipment is indicated to point to the target point strictly, namely the target point is aimed; and when the CCD convergence measuring point coordinates do not accord with the initialized given target point coordinates, adjusting the degrees of freedom of the diagnosis equipment aiming structure in three directions according to the initialized and established CCD convergence measuring model until the CCD convergence measuring point coincides with the target point. The invention has high precision aiming, which can reach the aiming precision of 5-10 μm; the system can judge whether to aim or not without observing the aiming condition of aiming targets by a target range monitoring system, and is convenient to apply.

Description

The method and the device thereof of the aiming of high-precision diagnosis equipment
Technical field
The present invention relates to a kind of method and device thereof of high-precision diagnosis equipment aiming.
Background technology
For guaranteeing diagnostic device aiming target spot, diagnostic device all has sighting device.The precision and the aiming performance of different method of sight decision aimings.General method of sight mainly contains: single laser beam aims at, two laser beam crosses aiming.
Single laser beam method of sight is with the light shaft coaxle of laser beam with the optics system as shown in Figure 1, and when laser beam pointed to target spot, expression measuring system optical axis pointed to target center.The method does not account for space outerpace, but will take light hole, and is limited in the application.
Two laser beams aiming that crosses: finish aiming by crossing by two laser focusing beam emitters.The laser focusing beam emitter by fiber coupler with laser coupled to the optical focus mirror system, the angle of optical focus mirror system scalable outgoing beam, and with two the bundle laser intersect on target spot.But the pointing accuracy of this aiming mode is excited the restriction of beam sizes, and pointing accuracy is not high, and maximum pointing accuracy is about 100um.
Above single laser beam aiming crosses with two laser beams and aims at the situation that all needs third-party range surveillance systematic observation aiming target spot when operating each time, and is very restricted on using.And the target spot slight change needs to adjust installation site, angle of laser focusing beam emitter etc. especially.
Summary of the invention
The present invention aims to provide a kind of method of high-precision diagnosis equipment aiming, and traditional method of sight pointing accuracy is not high, sighting device is complicated to solve, the problem of limited space.
Technical scheme of the present invention is as follows:
A kind of method of high-precision diagnosis equipment aiming may further comprise the steps:
(1) two groups of CCD camera heads are fixedly installed in the diagnostic device front end face through the aiming joint, these two groups of CCD camera heads are symmetrical arranged with the central shaft of diagnostic device front end face; Set up the CCD Intersection Measuring Model, the given target coordinate of initialization;
(2) adopt the optical imagery CCD metering system that crosses, target spot is imaged on two groups of CCD;
(3) two groups of ccd images that step (2) is obtained carry out interpretation, draw the CCD measurement point coordinate that crosses;
(4) cross the given target coordinate of measurement point coordinate and initialization when overlapping as CCD, the strict target spot that points to of expression diagnostic device promptly aims at;
When CCD crosses the given target coordinate of measurement point coordinate and initialization when not being inconsistent, the CCD Intersection Measuring Model of setting up according to initialization is adjusted the degree of freedom of three directions of diagnostic device aiming structure; Carry out step (5);
(5) repeated execution of steps (2), (3), (4) overlap until the CCD given target coordinate of measurement point coordinate and initialization that crosses, and promptly aim at.
The optical system of above-mentioned CCD camera head is for taking the photograph system far away, and amplification is 1: 1.
Above-mentioned steps (4) is by feedback control, adopts servo dragging system to adjust the degree of freedom of three directions of diagnostic device aiming structure.
The present invention also provides a kind of high-precision diagnosis equipment sighting device of using this method.
This high-precision diagnosis equipment sighting device comprises the servo dragging system that is fixedly installed in two groups of CCD camera heads of diagnostic device front end face, the computer processing module that is electrically connected with the CCD camera head and is pointed in order to the adjustment diagnostic device by computer processing module control through the aiming joint; Described two groups of CCD camera heads are symmetrical arranged with the central shaft of diagnostic device front end face, and distance light is learned camera lens to the CCD camera head and ccd video camera is formed by taking the photograph, and take the photograph distance light for two groups and learn camera lens with the metering system sensing target spot that crosses.
Above-mentionedly take the photograph that distance light is learned camera lens and the ccd video camera vacuum seal is fixing as a whole.
Above-mentionedly take the photograph distance light to learn the camera lens amplification be 1: 1, object image distance is 250mm, and object plane is learned camera lens foremost apart from 190mm from taking the photograph distance light.
The present invention has the following advantages:
1, the precision aiming is high, can reach the pointing accuracy of 5um~10um.
2, system itself just can judge whether aiming, does not need the aiming situation of range surveillance systematic observation aiming target spot, uses very convenient.
Description of drawings
Fig. 1 is single laser beam aiming principle in the prior art;
Fig. 2 is the aiming principle that crosses of two laser beams in the prior art;
Fig. 3 is the structural representation of application apparatus of the present invention;
Fig. 4 is embodiment of the invention CCD intersection measuring principle figure;
Fig. 5 is an embodiment of the invention optical system structure sketch map.
The drawing reference numeral explanation:
The 1-target spot, 2-optical lens, 3-CCD video camera, 4-terminal pad (aiming joint), 5-diagnostic device, 6-diagnostic device light path; The 7-laser instrument, the 8-dolly.
The specific embodiment
The present invention adopts optical imagery CCD intersection measuring principle, and target spot is imaged on the CCD, by two ccd image interpretations, draws off-centered position by crossing.Structure is seen shown in Figure 3, is made up of camera lens, CCD, aiming joint.The effect of aiming joint is that it is connected with diagnostic device.When CCD crosses measurement point when overlapping with target spot, the strict target spot that points to of expression diagnostic device.
1) CCD Intersection Measuring Model
Show that as Fig. 4 two CCD cameras are installed in 2 points of aiming joint respectively, 2 lines are baseline S.Wherein to be zero O, baseline S is an X-axis, and pitching is a Y-axis, and the orientation is the Z axle.
In field range, when diagnostic device did not aim at, the target center position coordinates (derivation of equation is omitted) that two CCD record was:
x = s × tg A 2 tgA 1 + tg A 2
y = 1 2 [ s × tg A 2 tg A 1 + tg A 2 ( 1 + tg 2 A 1 ) 1 2 × tgE 1 + s × tg A 1 tg A 1 + tg A 2 ( 1 + tg 2 A 1 ) × tg E 2 ]
z = s × tg A 1 × tg A 2 tg A 1 + tg A 2
In the following formula: A 1=A 10+ Δ A 1, A 2=A 20+ Δ A 2E 1=Δ E 1, E 2=Δ E 2
Wherein:
A 10When having aimed at, the orientation angle of first CCD optical axis and target center;
A 20When having aimed at, the orientation angle of second CCD optical axis and target center.
A 10, A 20Two-value can be by designing, process and debug assurance;
Δ A 1, Δ E 1Be respectively that first CCD records the azimuth and the angle of site that target center departs from when not aiming at;
Δ A 2, Δ E 2Be respectively that second CCD records the azimuth and the angle of site that target center departs from when not aiming at.
Δ A 1, Δ E 1, Δ A 2, Δ E 2These angles can be tried to achieve through the conversion of second of arc space half-convergency by the number of scanning lines (Z value) on the pairing CCD target surface of image and scanning columns (X value), and its approximate formula is:
ΔA 1 = X 1 f , ΔE 1 = Z 1 f ; ΔA 2 = X 2 f , ΔE 1 = Z 2 f ;
X wherein 1, Z 1, X 2, Z 2Be respectively the two-dimensional data that the target chamber target center that records on first, second ccd video camera imaging surface when not aiming at departs from.F is the focal length of two ccd video camera camera lenses.
Adopting servo dragging system to adjust diagnostic device and point to, specifically is the degree of freedom of adjusting three directions of diagnostic device aiming structure according to above data, makes it reach the given target center position coordinates of initial designs.This moment, the bulls-eye chart picture just in time was positioned at the center of two CCD target surfaces.
If need target spot other positions on vertical plane of aiming, diagnostic device aims at and needn't change the position and the angle of camera lens again to target, only need to select the given target coordinate of corresponding initialization (as the high-precision diagnosis equipment sighting device of the present invention of product, in the memorizer of CCD, record the given target coordinate of a plurality of initialization), can set up new CCD Intersection Measuring Model.
2) CCD design of Optical System
Optical system is for taking the photograph system far away, adopts to take the photograph distance light and learn system the distance between camera lens and the target spot is increased, and helps reducing the angle between two CCD and the target spot, avoids blocking the light path of other diagnostic device of installing on target chamber.Take the photograph distance light system simultaneously the distance between CCD and the camera lens is shortened, be convenient to CCD and camera lens fixedly becomes one.
Optical system is made up of five eyeglasses, sees shown in Figure 5ly, and its amplification is 1: 1.Object image distance is 250mm, object plane from optical glass foremost the distance about 190mm.By concrete designing and calculating, the disc of confusion maximum that draws optical system is no more than diffraction limit 8um, 50 lines to the time MTF reach 0.40.
This CCD design of Optical System has realized the high accuracy aiming, and solved camera lens from target spot the far away and high contradiction of enlargement ratio.

Claims (6)

1. the method for high-precision diagnosis equipment aiming may further comprise the steps:
(1) two groups of CCD camera heads are fixedly installed in the diagnostic device front end face through the aiming joint, these two groups of CCD camera heads are symmetrical arranged with the central shaft of diagnostic device front end face; Set up the CCD Intersection Measuring Model, the given target coordinate of initialization;
(2) adopt the optical imagery CCD metering system that crosses, target spot is imaged on two groups of CCD;
(3) two groups of ccd images that step (2) is obtained carry out interpretation, draw the CCD measurement point coordinate that crosses;
(4) cross the given target coordinate of measurement point coordinate and initialization when overlapping as CCD, the strict target spot that points to of expression diagnostic device promptly aims at;
When CCD crosses the given target coordinate of measurement point coordinate and initialization when not being inconsistent, the CCD Intersection Measuring Model of setting up according to initialization is adjusted the degree of freedom of three directions of diagnostic device aiming structure; Carry out step (5);
(5) repeated execution of steps (2), (3), (4) overlap until the CCD given target coordinate of measurement point coordinate and initialization that crosses, and promptly aim at.
2. the method for high-precision diagnosis equipment aiming according to claim 1, it is characterized in that: the optical system of described CCD camera head is for taking the photograph system far away, and amplification is 1: 1.
3. the method for high-precision diagnosis equipment aiming according to claim 2, it is characterized in that: step (4) is by feedback control, adopts servo dragging system to adjust the degree of freedom of three directions of diagnostic device aiming structure.
4. application rights requires the high-precision diagnosis equipment sighting device of 1 described method, it is characterized in that: comprise the servo dragging system that is fixedly installed in two groups of CCD camera heads of diagnostic device front end face, the computer processing module that is electrically connected with the CCD camera head and is pointed in order to the adjustment diagnostic device by computer processing module control through the aiming joint; Described two groups of CCD camera heads are symmetrical arranged with the central shaft of diagnostic device front end face, and distance light is learned camera lens to the CCD camera head and ccd video camera is formed by taking the photograph, and take the photograph distance light for two groups and learn camera lens with the metering system sensing target spot that crosses.
5. high-precision diagnosis equipment sighting device according to claim 4 is characterized in that: describedly take the photograph that distance light is learned camera lens and the ccd video camera vacuum seal is fixing as a whole.
6. high-precision diagnosis equipment sighting device according to claim 5 is characterized in that: describedly take the photograph distance light to learn the camera lens amplification be 1: 1, object image distance is 250mm, and object plane is learned camera lens foremost apart from 190mm from taking the photograph distance light.
CN2011100083212A 2011-01-14 2011-01-14 Method and device for aiming high-precision diagnostic equipment Pending CN102038552A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102778748A (en) * 2011-05-11 2012-11-14 同济大学 Aiming device for microscope for plasma diagnosis and use method thereof
CN109959647A (en) * 2019-04-17 2019-07-02 广东省新材料研究所 A kind of spectroscopic diagnostics auxiliary device
CN110248069A (en) * 2019-06-27 2019-09-17 中国科学院西安光学精密机械研究所 A kind of miniaturization sighting device for diagnostic device
CN110413009A (en) * 2019-07-24 2019-11-05 中国工程物理研究院激光聚变研究中心 A kind of sighting system

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004020473A (en) * 2002-06-19 2004-01-22 Toa Harbor Works Co Ltd 3-dimensional surveying method using image sensor
CN101793515A (en) * 2009-06-26 2010-08-04 范勇 Device and method for aiming of micro target pellet with diagnostic device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004020473A (en) * 2002-06-19 2004-01-22 Toa Harbor Works Co Ltd 3-dimensional surveying method using image sensor
CN101793515A (en) * 2009-06-26 2010-08-04 范勇 Device and method for aiming of micro target pellet with diagnostic device

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
《应用光学》 20091130 齐文博等 激光核聚变诊断设备双光束交汇瞄准技术研究 第1032-1035页 1-6 第30卷, 第6期 2 *
《科技情报开发与经济》 20051231 韩丙辰等 线阵CCD交汇测量模型研究与应用 第188-190页 1-6 第15卷, 第5期 2 *

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102778748A (en) * 2011-05-11 2012-11-14 同济大学 Aiming device for microscope for plasma diagnosis and use method thereof
CN102778748B (en) * 2011-05-11 2014-08-13 同济大学 Aiming device for microscope for plasma diagnosis and use method thereof
CN109959647A (en) * 2019-04-17 2019-07-02 广东省新材料研究所 A kind of spectroscopic diagnostics auxiliary device
CN109959647B (en) * 2019-04-17 2021-08-31 广东省新材料研究所 Spectrum diagnosis auxiliary device
CN110248069A (en) * 2019-06-27 2019-09-17 中国科学院西安光学精密机械研究所 A kind of miniaturization sighting device for diagnostic device
CN110248069B (en) * 2019-06-27 2020-06-16 中国科学院西安光学精密机械研究所 A miniaturized sighting device for diagnostic equipment
CN110413009A (en) * 2019-07-24 2019-11-05 中国工程物理研究院激光聚变研究中心 A kind of sighting system

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Application publication date: 20110504