CN103514966B - The sighting device of plasma diagnosis X-ray optical system and method for sight - Google Patents

The sighting device of plasma diagnosis X-ray optical system and method for sight Download PDF

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Publication number
CN103514966B
CN103514966B CN201210206350.4A CN201210206350A CN103514966B CN 103514966 B CN103514966 B CN 103514966B CN 201210206350 A CN201210206350 A CN 201210206350A CN 103514966 B CN103514966 B CN 103514966B
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ray
line slideway
locating part
sight
objective lens
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CN103514966A (en
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穆宝忠
伊圣振
王占山
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Tongji University
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Tongji University
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors

Abstract

The present invention relates to a kind of sighting device and method of sight of plasma diagnosis X-ray optical system, this device comprises simulator locating assembly and adjusting mechanism thereof, simulator locating assembly comprises backstay, simulator locating part, slide block, support, line slideway and objective lens, one end connecting analog keeper of backstay, other end connection sliding block, is provided with line slideway on the downside of support, and upside is provided with objective lens, slide block and line slideway are slidably connected, and support connects adjusting mechanism; First under the supervision of tool microscope, complete the coincidence of the index aperture of simulator locating part and square hole grid, then by X ray grid imaging experiment, the best object point of system is overlapped with the best visual field of square hole grid, finally with epoxy resin, objective lens and support is solidified togather.Compared with prior art, the present invention has that high, theoretical, the structure high with the pointing accuracy of reality of system reliability is simple, low cost and other advantages.

Description

The sighting device of plasma diagnosis X-ray optical system and method for sight
Technical field
What the present invention relates to plasma diagnosis X-ray optical system debugs field, especially relates to a kind of sighting device and method of sight of plasma diagnosis X-ray optical system.
Background technology
X-ray optical system is the key equipment carrying out precise treatment plasma diagnostics in inertial confinement fusion (ICF) research, mainly refer to KB/KBA and the Wolter micro imaging system based on the reflective image-forming principle of X ray glancing incidence, in addition also can power spectrum diagnosis in as collective optics to improve the collection efficiency of X ray.The picture element of this kind of optical system with grazing angle change clearly, effective true field only has hundreds of micron, therefore reaches tens microns to the aiming positioning accuracy request of object point, could realize the imaging indicators of high-space resolution.
At present, the aiming locator meams of plasma diagnostics field X-ray optical system has:
(1) hyperchannel centralized positioning
There is central symmetry axis in hyperchannel x-ray system, object point is positioned at this axis of symmetry center.Therefore carry out observation in Ba Kou position, system opposite and substantially can determine central shaft, the position in object distance direction then can be demarcated by the support meeting object distance length.The method is main at present to be used on the strong laser devices such as the U.S. NOVA and OMEGA.
The method can complete the microscopical coarse adjustment of hyperchannel KB in laboratory, but accurate adjustment needs on-line debugging experiment strong laser device carrying out several times, in addition, the single channel X-ray optical system coordinating streak camera is asymmetric glancing incidence structure, cannot adopt this method of sight.
(2) visible ray is auxiliary aims at
Visible ray assist method of sight traditionally visible ray debug mode X-ray optical system object lens element and image point positioned, or the direct imaging carrying out visible light wave range is to determine the position relationship of object lens element and image point.This method of sight mainly contains following three shortcomings: 1, the numerical aperture of X-ray optical system is 10 -3-10 -4magnitude, now the limiting resolution of visible ray diffraction effect reaches hundreds of micron, thus limits pointing accuracy; 2, according to the image point that the nominal value of object lens element parameter is determined, deviation is there is with the best image point of reality, and the position relationship between Off-axial optical system object lens element and image point is inherently difficult to Accurate Calibration, 3, a set of visual light imaging equipment independent of X-ray optical system is needed, complex structure, introduce extra error simultaneously, therefore pointing accuracy and reliability poor.
(3) Double passage laser aims at
Double passage laser method of sight first by experiment indoor x-ray imaging experiment searches out the object point of system, then utilizes the space of two bundle laser to cross and to be demarcated this object point.By target chamber space constraint, the angle of two bundle laser can not be too large, and therefore axial location error is large, and pointing error judges relevant with laser focal spot size with degree of overlapping, and whole system pointing error is larger.
Application publication number is that the Chinese invention patent application of CN101793515A and CN102038552A is on the basis of Double passage laser aiming mode, substitute Double passage laser with the burnt optical lens of a group leader to aim at, after later image process, pellet is carried out Accurate Calibration by CCD image-forming component.Being introduced in of telephoto lens, CCD image-forming component and later image processing procedure can obtain very high pointing accuracy in theory, but system architecture is complicated, and long-term reliability is poor, and manufacturing cost is high, is not suitable for the extensive use in strong laser device.In the comprehensive physical experiment of following strong laser device, place being difficult to enough Space Angle the diagnostic device that a few cover to tens cover adopts this pointing device.In addition, the method must directly observe diagnosis thing, is not therefore suitable for the aiming of some cavity targets Physical Experiment.
Above-mentioned aiming mode can not meet the demand for development of accurate plasma diagnostics research gradually, therefore in the urgent need to a kind of convenience, flexibly and reliably for high precision sighting device and the corresponding method of sight of x-ray diagnostic equipment.
Summary of the invention
Object of the present invention is exactly provide a kind of sighting device and method of sight of plasma diagnosis X-ray optical system to overcome defect that above-mentioned prior art exists.The present invention is convenient, flexible and reliable, and the simulator locating part used by light laser target locating device itself and commercially available line slideway get final product the Accurate Calibration that off-line completes the best object point of X-ray optical system.
Object of the present invention can be achieved through the following technical solutions:
A kind of sighting device of plasma diagnosis X-ray optical system, this device comprises simulator locating assembly and adjusting mechanism thereof, described simulator locating assembly comprises backstay, simulator locating part, slide block, support, line slideway and objective lens, one end connecting analog keeper of described backstay, other end connection sliding block, be provided with line slideway on the downside of described support, upside is provided with objective lens, described slide block and line slideway are slidably connected, and described support connects adjusting mechanism.
Described adjusting mechanism, by self attitude of adjustment x-ray imaging system, completes aiming and the point operation of x-ray imaging system.In addition, according to concrete Physical Experiment requirement, adjusting mechanism also directly can adopt strong laser device diagnostic device insert (DIM of similar American National portfire).
Described simulator locating part is and the mechanical organ waiting to diagnose target size close.
Described slide block and line slideway manually or electronic mode be slidably connected.And can pull down or regain, thus avoid Physical Experiment process to the damage of simulator locating part.
One end of described line slideway is provided with locating part.Locating part is for limiting the position of slide block, slide block withstands locating part and representative simulation keeper reaches normal place, its repetitive positioning accuracy is ensured by line slideway and locating part, adopt the commercially available line slideway of regular grade and slide block can reach the precision of 10-20 micron, and use micron order line slideway and slide block more can reach the precision of 5-10 micron.
Described X-ray optical system is to the KB microscopic system of the Bragg diffraction of Grazing Incidence X-Ray or the work of total external reflection principle, KBA microscopic system or Wolter microscopic system based on multilayer film.
A kind of method of sight of sighting device of plasma diagnosis X-ray optical system, the supervision of tool microscope is utilized to regulate simulator locating part to overlap with the index aperture of square hole grid, by X ray grid imaging experiment, the best object point of regulating system overlaps with the best visual field of square hole grid, objective lens is fixed on support.The method comprises the following steps:
(1) the microscopical graduation cross hair of adjustment means, demarcates the normal place of simulator locating part;
(2) slide block is taken out from line slideway, regulate the index aperture of square hole grid to overlap with the normal place of simulator locating part;
(3) removing tool microscope, connects objective lens to be assembled with three-dimensional optical regulating platform, and carries out coarse adjustment with optical fiber lamp to system light path, and the light that optical fiber lamp sends, through square hole grid, images on image planes detector through objective lens;
(4) remove optical fiber lamp, open X-ray source and image planes detector, carry out x-ray imaging experiment, the best object point position of regulating system overlaps with the best visual field of square hole grid, and the index aperture of square hole grid is positioned at this position;
(5) square hole grid is removed, slide block is put back to line slideway, x-ray imaging is carried out to simulator locating part, whether the image detecting the simulator locating part that image planes detector is recorded overlaps with index aperture picture position, if do not overlap, repeat step (1) to step (4), if overlap, carry out step (6);
(6) objective lens is fixed on support, removes three-dimensional optical regulating platform.
Compared with prior art, the present invention has the following advantages:
(1) system reliability is high: the moveable parts of analog positioner of the present invention are only between line slideway and slide block, line slideway and slide block to realize high-precision reciprocating motion, and the guiding movement assembly of certain orientation moment of torsion can be born, it is a kind of standard component slide block (as HIWIN or THK etc.) of modular automatic field, its industrial processes level is enough to the repetitive positioning accuracy ensureing 10-20 micron, other parts are all that direct mechanical connects or resin solidification, and therefore system reliability of the present invention is high;
(2) theory is all higher with the pointing accuracy of reality: the present invention is aimed at best object point by direct x-ray imaging experiment, pointing accuracy only depends on the observational error of tool microscope to simulator locating part, the extra error other non-immediate imaging can being avoided to debug mode bring, therefore theory of the present invention is all higher with the pointing accuracy of reality;
(3) structure is simple: after having adjusted in strong laser device target chamber, sighting device only leaves a line slideway, substantially can not Space Angle outside occupying volume, be therefore particularly suitable for a few cover to tens in the experiment of strong laser device comprehensive physical and overlap and adopt the system of this sighting device to use simultaneously;
(4) cost is low: commercially available line slideway of the present invention and slide block, be the standard component that industrial automation uses in a large number, purchase cost is low.
Accompanying drawing explanation
Fig. 1 is structure and the assembling schematic diagram of device in the present invention;
Fig. 2 is the x-ray imaging figure of 600 order square hole grids and the best object point index aperture adopted;
Fig. 3 has assembled the scheme of installation of rear the present invention on strong laser device.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
Embodiment 1
Using 8keV can put KB type x-ray imaging system system assembling and aim at be further described content of the present invention as embodiment.
In the present embodiment, the method for sight of KB type x-ray imaging system is carried out as follows, and as shown in Figure 1, institute all completes in steps on optical table 12.Flange 13 is fixed on optical table 12, and for simulating the real work target mouth of KB microscope on strong laser device, size is identical.The three-dimensional manual translation platform that adjusting mechanism 1 adopts Beijing Optical Instrument Factory to produce, and be fixed on flange 13.Objective lens 2 adopts the W/B working in 8keV and can put 4c multilayer film KB objective lens.The MGN15C type line slideway that line slideway 4 and slide block 5 are produced for HIWIN company and slide block.Simulator locating part 8 is the 200 micron diameter simulator locating balls that God Light II laser aid adopts.Support 3, line slideway 4, rigid connection between locating part 6 and flange 13, slide block 5, backstay 7 and simulator locating part 8 rigid connection, slide block 5 inserts line slideway 4, and its position is determined by locating part 6.X-ray source 9, tool microscope 10-1 with 10-2, image planes detector 11 are all connected with three-dimensional optical regulating platform with the square hole grid 14 demarcating x-ray imaging system image quality and are fixed on optical table 12, and X-ray source 9 is Cu target X-ray tube (8keV); Tool microscope 10-1 and 10-2 is the JC4-10 microscope that Shanghai optical instrument factory produces; The XDI-50 type hard X ray scintillator CCD that image planes detector 11 is produced for PhotonicScience company; The 600 order gold grids that square hole grid 14 is produced for Gilder company.
The assembly method of the sighting device of plasma diagnosis X-ray optical system comprises the following steps:
A) the graduation cross hair of adjustment means microscope 10-1 and 10-2, demarcates the normal place of simulator locating part 8.
B) slide block 5 is taken out from line slideway 4, and fine adjustment places square hole grid 14, and the index aperture of square hole grid 14 is overlapped with normal place.
C) removing tool microscope 10-1 and 10-2, objective lens 2 to be assembled is connected with three-dimensional optical regulating platform, put into optical fiber lamp and utilize the coarse adjustment of optical fiber lamp completion system light path, the light that optical fiber lamp is sent, through square hole grid 14, images on image planes detector 11 through objective lens 2.
D) optical fiber lamp is removed, open X-ray source 9 and image planes detector 11, carry out x-ray imaging experiment, by the readability (as spatial resolution or MTF etc.) of examination network line imaging, determine best object point position, and finally make the index aperture of square hole grid 14 be positioned at this position, as shown in Figure 2.
E) remove square hole grid 14, place back in slide block 5, by simulator locating part 8 directly x-ray imaging, whether the image detecting the simulator locating part 8 that image planes detector 11 is recorded overlaps with index aperture picture position.Situation about not overlapping if having occurs, then repeat step a-d.
F) with epoxy resin bonding objective lens 2 and support 3, treat that resin solidification recession is except three-dimensional optical regulating platform, namely complete the system assembling of KB type x-ray imaging system.
Whole system is made up of 1-8 part, and x-ray imaging system sighting device of the present invention is 1 and 3-8 part, and the objective lens 2 of KB type x-ray imaging system is connected with its resin solidification.After having assembled, the installation method of sighting device on strong laser device of this cover KB type x-ray imaging system carries out as follows, and as shown in Figure 3, a whole set of KB system is fixed on the target mouth position in strong laser device target chamber 15.
1) see according to target range and take aim at the instruction of equipment 16-1,16-2 and 16-3, calibrate the experimental site treating diagnosis target 17, after will treat that diagnosis target 17 is regained.
2) handle adjusting mechanism 1, make simulator locating part 8 and step 1) middle target range sees the experimental site taken aim at indicated by equipment 16-1,16-2 and 16-3 and overlaps.
3) slide block 5 is taken out from line slideway 4, thus simulator locating ball 8 is removed.
4) will treat that diagnosis target 17 is put back into experimental site, namely complete the system aiming that objective lens 2 treats diagnosis target 17.
Embodiment 2
A kind of sighting device of plasma diagnosis X-ray optical system, structure as shown in Figure 1, this device comprises simulator locating assembly and adjusting mechanism 1 thereof, simulator locating assembly comprises backstay 7, simulator locating part 8, slide block 5, support 3, line slideway 4 and objective lens 2, one end connecting analog keeper 8 of backstay 7, other end connection sliding block 5, line slideway 4 is provided with on the downside of support 3, upside is provided with objective lens 2, and slide block 5 and line slideway 4 are slidably connected, and support 3 connects adjusting mechanism 1.Adjusting mechanism 1, by self attitude of adjustment x-ray imaging system, completes aiming and the point operation of x-ray imaging system.In addition, according to concrete Physical Experiment requirement, adjusting mechanism 1 also directly can adopt strong laser device diagnostic device insert (DIM of similar American National portfire).Simulator locating part 8 is and the mechanical organ waiting to diagnose target size close.Slide block 5 and line slideway 4 manually or electronic mode be slidably connected.And can pull down or regain, thus avoid Physical Experiment process to the damage of simulator locating part 8.One end of line slideway 4 is provided with locating part 6.Locating part 6 is for limiting the position of slide block 5, slide block 5 withstands locating part 6 i.e. representative simulation keeper 8 and reaches normal place, its repetitive positioning accuracy is ensured by line slideway 4 and locating part 6, adopt the commercially available line slideway of regular grade and slide block can reach the precision of 10-20 micron, and use micron order line slideway and slide block more can reach the precision of 5-10 micron.X-ray optical system is to the KB microscopic system of the Bragg diffraction of Grazing Incidence X-Ray or the work of total external reflection principle, KBA microscopic system or Wolter microscopic system based on multilayer film.
A kind of method of sight of sighting device of plasma diagnosis X-ray optical system, the supervision of tool microscope 10-1 and 10-2 is utilized to regulate simulator locating part 8 to overlap with the index aperture of square hole grid 14, by X ray grid imaging experiment, the best object point of regulating system overlaps with the best visual field of square hole grid 14, objective lens 2 is fixed on support 3.
The method comprises the following steps:
(1) the graduation cross hair of adjustment means microscope 10-1 and 10-2, demarcates the normal place of simulator locating part 8;
(2) slide block 5 is taken out from line slideway 4, regulate the index aperture of square hole grid 14 to overlap with the normal place of simulator locating part 8;
(3) removing tool microscope 10-1 and 10-2, objective lens 2 to be assembled is connected with three-dimensional optical regulating platform, and with optical fiber lamp, coarse adjustment being carried out to system light path, the light that optical fiber lamp sends, through square hole grid 14, images on image planes detector 11 through objective lens 2;
(4) remove optical fiber lamp, open X-ray source 9 and image planes detector 11, carry out x-ray imaging experiment, the best object point position of regulating system overlaps with the best visual field of square hole grid 14, makes the index aperture of square hole grid 14 be positioned at this position;
(5) square hole grid 14 is removed, slide block 5 is put back to line slideway 4, x-ray imaging is carried out to simulator locating part 8, whether the image detecting the simulator locating part 8 that image planes detector 11 is recorded overlaps with index aperture picture position, if do not overlap, repeat step (1) to step (4), if overlap, carry out step (6);
(6) objective lens 2 is fixed on support 3, removes three-dimensional optical regulating platform.

Claims (7)

1. the method for sight of the sighting device of a plasma diagnosis X-ray optical system, it is characterized in that, this device comprises simulator locating assembly and adjusting mechanism thereof, described simulator locating assembly comprises backstay, simulator locating part, slide block, support, line slideway and objective lens, one end connecting analog keeper of described backstay, other end connection sliding block, line slideway is provided with on the downside of described support, upside is provided with objective lens, described slide block and line slideway are slidably connected, and described support connects adjusting mechanism;
Method of sight is: utilize the supervision of tool microscope to regulate simulator locating part to overlap with the index aperture of square hole grid, by X ray grid imaging experiment, the best object point of regulating system overlaps with the best visual field of square hole grid, objective lens is fixed on support.
2. the method for sight of the sighting device of a kind of plasma diagnosis X-ray optical system according to claim 1, it is characterized in that, the method comprises the following steps:
(1) the microscopical graduation cross hair of adjustment means, demarcates the normal place of simulator locating part;
(2) slide block is taken out from line slideway, regulate the index aperture of square hole grid to overlap with the normal place of simulator locating part;
(3) removing tool microscope, connects objective lens to be assembled with three-dimensional optical regulating platform, and carries out coarse adjustment with optical fiber lamp to system light path, and the light that optical fiber lamp sends, through square hole grid, images on image planes detector through objective lens;
(4) remove optical fiber lamp, open X-ray source and image planes detector, carry out x-ray imaging experiment, the best object point position of regulating system overlaps with the best visual field of square hole grid, and the index aperture of square hole grid is positioned at this position;
(5) square hole grid is removed, slide block is put back to line slideway, x-ray imaging is carried out to simulator locating part, whether the image detecting the simulator locating part that image planes detector is recorded overlaps with index aperture picture position, if do not overlap, repeat step (1) to step (4), if overlap, carry out step (6);
(6) objective lens is fixed on support, removes three-dimensional optical regulating platform.
3. the method for sight of the sighting device of a kind of plasma diagnosis X-ray optical system according to claim 1, it is characterized in that, described adjusting mechanism, by self attitude of adjustment x-ray imaging system, completes aiming and the point operation of x-ray imaging system.
4. the method for sight of the sighting device of a kind of plasma diagnosis X-ray optical system according to claim 1, is characterized in that, described simulator locating part is and the mechanical organ waiting to diagnose target size close.
5. the method for sight of the sighting device of a kind of plasma diagnosis X-ray optical system according to claim 1, is characterized in that, described slide block and line slideway manually or electronic mode be slidably connected.
6. the method for sight of the sighting device of a kind of plasma diagnosis X-ray optical system according to claim 1, it is characterized in that, one end of described line slideway is provided with locating part.
7. the method for sight of the sighting device of a kind of plasma diagnosis X-ray optical system according to claim 1, it is characterized in that, described X-ray optical system is to the KB microscopic system of the Bragg diffraction of Grazing Incidence X-Ray or the work of total external reflection principle, KBA microscopic system or Wolter microscopic system based on multilayer film.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2633517C1 (en) * 2016-07-25 2017-10-13 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Appliance for performances measurement of plasma spectral lines in reactor-tokamak

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107192729A (en) * 2017-05-18 2017-09-22 吉林大学 The online fast analyser of polyacrylonitrile fibre structure X-ray diffraction and method
CN108169790B (en) * 2017-11-27 2020-08-18 同济大学 Intensity calibration method of grazing incidence X-ray microscope
CN110544826B (en) * 2019-07-22 2021-03-23 西安电子科技大学 High-temperature-resistant focusing lens antenna for high-temperature plasma diagnosis technology
CN110413009A (en) * 2019-07-24 2019-11-05 中国工程物理研究院激光聚变研究中心 A kind of sighting system
CN111562716B (en) * 2020-04-15 2022-06-28 同济大学 Multichannel KB microscope structure with accurate coaxial observation function
CN111986822B (en) * 2020-07-27 2022-11-29 哈尔滨工业大学 X-ray characterization detector precision adjustment carrying mechanism

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5677525A (en) * 1995-02-23 1997-10-14 Carl-Zeiss-Stiftung Ancillary module for making a spatially-resolved measurement of a focus volume
CN1400464A (en) * 2001-08-07 2003-03-05 中国科学院大连化学物理研究所 Laser induced fluorescence detector

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS637618A (en) * 1986-06-27 1988-01-13 Nippon Tairan Kk Laser-beam positioning apparatus in semiconductor manufacturing apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5677525A (en) * 1995-02-23 1997-10-14 Carl-Zeiss-Stiftung Ancillary module for making a spatially-resolved measurement of a focus volume
CN1400464A (en) * 2001-08-07 2003-03-05 中国科学院大连化学物理研究所 Laser induced fluorescence detector

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
KBA X射线显微镜装调方法研究;赵玲玲等;《强激光与粒子束》;20090331;第21卷(第3期);第369-374页 *
基于辅助光学系统的KB显微镜瞄准方法;黄圣铃等;《强激光与粒子束》;20090630;第21卷(第6期);第841页标题及正文第1段,第842页图4,第843页第1段 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2633517C1 (en) * 2016-07-25 2017-10-13 Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" Appliance for performances measurement of plasma spectral lines in reactor-tokamak

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