CN103514966A - Aiming device and aiming method of X-ray optical system for plasma diagnosis - Google Patents
Aiming device and aiming method of X-ray optical system for plasma diagnosis Download PDFInfo
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- CN103514966A CN103514966A CN201210206350.4A CN201210206350A CN103514966A CN 103514966 A CN103514966 A CN 103514966A CN 201210206350 A CN201210206350 A CN 201210206350A CN 103514966 A CN103514966 A CN 103514966A
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Abstract
The invention relates to an aiming device and an aiming method of an X-ray optical system for plasma diagnosis. The device comprises an analog positioning assembly and an adjustment mechanism thereof. The analog positioning assembly comprises a positioning rod, an analog positioning member, a slider, a bracket, a linear guide rail and an objective lens group, wherein one end of the positioning rod is connected with the analog positioning member and the other end of the positioning rod is connected with the slider, the lower side of the bracket is provided with the linear guide rail and the upper side of the bracket is provided with the objective lens group, the slider is slidingly connected with the linear guide rail, and the bracket is connected with the adjustment mechanism. The method comprises the following steps: first, coincidence of the analog positioning member and a marking hole of a square-hole mesh is finished under surveillance of a tool microscope; then, an optimal object point of the system and an optimal field of view of the square-hole mesh are enabled to coincide with each other through an X-ray grid imaging experiment; and finally, the objective lens group and the bracket are solidified together by epoxy resin. Compared with the prior art, the collimation device and the collimation method have the advantages of high system reliability, high theoretical and practical aiming accuracy, simple structure, low cost and the like.
Description
Technical field
The present invention relates to the field of debuging of plasma diagnosis X ray optical system, especially relate to a kind of sighting device and method of sight of plasma diagnosis X ray optical system.
Background technology
X ray optical system is in inertial confinement fusion (ICF) research, to carry out the key equipment of precise treatment plasma diagnostics, mainly refer to KB/KBA and Wolter micro imaging system based on the reflective image-forming principle of X ray glancing incidence, in addition also can be in power spectrum diagnosis as collective optics to improve the collection efficiency of X ray.The picture element of this class optical system is very obvious with the variation of grazing angle, and effectively true field only has hundreds of micron, therefore the aiming positioning accuracy request of object point is reached to tens microns, could realize the imaging index of high-space resolution.
At present, the aiming locator meams of plasma diagnostics field X ray optical system has:
(1) hyperchannel centralized positioning
There is central symmetry axis in hyperchannel x-ray system, object point is positioned at this axis of symmetry center.Therefore in Ba Kou position, system opposite, observe and can substantially determine central shaft, the position of object distance direction can be demarcated by meeting the support of object distance length.The method is mainly used at present on the strong laser devices such as U.S. NOVA and OMEGA.
The method can complete the microscopical coarse adjustment of hyperchannel KB in laboratory, but accurate adjustment needs to carry out on strong laser device the on-line debugging experiment of several times, in addition, coordinating the single channel X ray optical system of streak camera is asymmetric glancing incidence structure, cannot adopt this method of sight.
(2) visible ray is auxiliary aims at
The auxiliary method of sight of visible ray is debug mode according to traditional visible ray X ray optical system lens element and image point is positioned, or the direct imaging of carrying out visible light wave range is to determine the position relationship of object lens element and image point.This method of sight mainly contains following three shortcomings: 1, the numerical aperture of X ray optical system is 10
-3-10
-4magnitude, now the limiting resolution of visible ray diffraction effect reaches hundreds of micron, thereby has limited pointing accuracy; 2, the image point definite according to the nominal value of object lens element parameter, there is deviation with actual best image point, and itself is just difficult to Accurate Calibration the position relationship between non co axial optical system lens element and image point, 3, need a set of visual light imaging equipment that is independent of X ray optical system, complex structure, introduced extra error simultaneously, thus pointing accuracy and reliability poor.
(3) Double passage laser aims at
Double passage laser method of sight first by experiment indoor x-ray imaging experiment searches out the object point of system, then utilizes the space of two bundle laser to cross this object point is demarcated.Be subject to target chamber space constraint, the angle of two bundle laser can not be too large, so axial location error is large, and pointing error is relevant with degree of overlapping judgement with laser focal spot size, and whole system pointing error is larger.
Application publication number is that the Chinese invention patent application of CN101793515A and CN102038552A is on the basis of Double passage laser aiming mode, with the burnt optical lens of a group leader, substituting Double passage laser aims at, by CCD image-forming component and after later image is processed, pellet is carried out to Accurate Calibration.Being introduced in theory of telephoto lens, CCD image-forming component and later image processing procedure can obtain very high pointing accuracy, but system architecture is complicated, and long-term reliability is poor, and manufacturing cost is high, is not suitable for the extensive use in strong laser device.In the comprehensive physical experiment of following strong laser device, by being difficult to enough Space Angle, place the diagnostic device that a few cover to tens covers adopt this pointing device.In addition, the method must directly observe diagnosis thing, is not therefore suitable for the aiming of some black chamber target physics experiment.
Above-mentioned aiming mode can not meet the demand for development of accurate plasma diagnostics research gradually, therefore in the urgent need to a kind of convenience, flexible and reliable high precision sighting device and corresponding method of sight for x-ray diagnostic equipment.
Summary of the invention
Object of the present invention is exactly that a kind of sighting device and method of sight of plasma diagnosis X ray optical system are provided in order to overcome the defect of above-mentioned prior art existence.The present invention is convenient, flexible and reliable, by light laser target locating device simulation keeper used itself and commercially available line slideway, gets final product the Accurate Calibration that off-line completes the best object point of X ray optical system.
Object of the present invention can be achieved through the following technical solutions:
A kind of sighting device of plasma diagnosis X ray optical system, this device comprises simulation positioning component and adjusting mechanism thereof, described simulation positioning component comprises backstay, simulation keeper, slide block, support, line slideway and objective lens, one end connecting analog keeper of described backstay, other end connection sliding block, described support downside is provided with line slideway, and upside is provided with objective lens, described slide block and line slideway are slidably connected, and described support connects adjusting mechanism.
Described adjusting mechanism, by adjusting self attitude of x-ray imaging system, completes aiming and the point operation of x-ray imaging system.In addition, according to concrete Physical Experiment requirement, adjusting mechanism also can directly adopt strong laser device diagnostic device insert (DIM of similar American National portfire).
Described simulation keeper is the mechanical organ close with target size to be diagnosed.
Described slide block and line slideway are slidably connected by manual or electronic mode.And can pull down or regain, thereby avoid the damage of Physical Experiment process to simulation keeper.
One end of described line slideway is provided with locating part.The position of locating part for limiting slide block, it is that representative simulation keeper reaches normal place that slide block withstands locating part, its repetitive positioning accuracy is guaranteed by line slideway and locating part, adopt the commercially available line slideway of regular grade and slide block can reach the precision of 10-20 micron, and use micron order line slideway and slide block more can reach the precision of 5-10 micron.
Described X ray optical system is KB microscopic system, KBA microscopic system or the Wolter microscopic system to the Bragg diffraction of glancing incidence X ray or the work of total external reflection principle based on multilayer film.
A kind of method of sight of sighting device of plasma diagnosis X ray optical system, utilize the supervision of tool microscope to regulate simulation keeper to overlap with the index aperture of square hole grid, by X ray grid imaging experiment, the best object point of regulating system overlaps with the best visual field of square hole grid, and objective lens is fixed on support.The method comprises the following steps:
(1) the microscopical graduation cross hair of adjustment means, calibration mold is intended the normal place of keeper;
(2) slide block is taken out from line slideway, regulate the index aperture of square hole grid to overlap with the normal place of simulation keeper;
(3) removing tool microscope, connects objective lens to be assembled with three-dimensional optical regulating platform, and with optical fiber lamp, system light path is carried out to coarse adjustment, and the light that optical fiber lamp sends, through square hole grid, images on image planes detector through objective lens;
(4) remove optical fiber lamp, open X ray light source and image planes detector, carry out x-ray imaging experiment, the best object point position of regulating system overlaps with the best visual field of square hole grid, and the index aperture of square hole grid is positioned to this position;
(5) remove square hole grid, slide block is put back to line slideway, simulation keeper is carried out to x-ray imaging, whether the image of the simulation keeper that detection image planes detector is recorded overlaps with index aperture picture position, if do not overlap, repeating step (1), to step (4), does not carry out step (6) if overlap;
(6) objective lens is fixed on support, removes three-dimensional optical regulating platform.
Compared with prior art, the present invention has the following advantages:
(1) system reliability is high: analog positioner of the present invention movably parts only between line slideway and slide block, line slideway and slide block are to realize high-precision reciprocating motion, and can bear the guiding movement assembly of certain orientation moment of torsion, it is a kind of standard component slide block (as HIWIN or THK etc.) of modular automatic field, its industrial processes level is enough to guarantee the repetitive positioning accuracy of 10-20 micron, other parts are all that direct mechanical connects or resin solidification, and therefore system reliability of the present invention is high;
(2) the theoretical pointing accuracy with actual is all higher: the present invention aims at best object point by direct x-ray imaging experiment, pointing accuracy only depends on the observational error of tool microscope to simulation keeper, can avoid other non-direct imaging to debug the extra error that mode is brought, therefore theory of the present invention all higher with actual pointing accuracy;
(3) simple in structure: after having adjusted in strong laser device target chamber, sighting device only leaves a line slideway, substantially the Space Angle outside can occupying volume, is therefore particularly suitable for a few cover to tens covers in the experiment of strong laser device comprehensive physical and adopts the system of this sighting device to use simultaneously;
(4) cost is low: commercially available line slideway of the present invention and slide block are a large amount of standard components that use of industrial automation, and purchase cost is low.
Accompanying drawing explanation
Fig. 1 is structure and the assembling schematic diagram installing in the present invention;
Fig. 2 is 600 order square hole grids of employing and the x-ray imaging figure of best object point index aperture;
Fig. 3 is for having assembled the scheme of installation of rear the present invention on strong laser device.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in detail.
Embodiment 1
The 8keV of usining can put the system assembling of KB type x-ray imaging system and aim at and be further described content of the present invention as embodiment.
In the present embodiment, the method for sight of KB type x-ray imaging system is carried out as follows, and as shown in Figure 1, institute all completes in steps on optical table 12.Flange 13 is fixed on optical table 12, and for simulating the real work target mouth of KB microscope on strong laser device, size is identical.The three-dimensional manual translation platform that adjusting mechanism 1 adopts Beijing Optical Instrument Factory to produce, and be fixed on flange 13.Objective lens 2 adopts and works in the W/B that 8keV can put
4c multilayer film KB objective lens.MGN15C type line slideway and slide block that line slideway 4 and slide block 5 are produced for HIWIN company.Simulation keeper 8 is the 200 micron diameter simulation place kick that God Light II laser aid adopts.Rigid connection between support 3, line slideway 4, locating part 6 and flange 13, slide block 5, backstay 7 and simulation keeper 8 rigid connections, slide block 5 is inserted line slideway 4 ,Qi positions and is determined by locating part 6.X ray light source 9, tool microscope 10-1 and 10-2, image planes detector 11 and the square hole grid 14 of demarcating x-ray imaging system image quality are all connected with three-dimensional optical regulating platform and are fixed on optical table 12, and X ray light source 9 is Cu target X-ray tube (8keV); Tool microscope 10-1 and 10-2 are the JC4-10 microscope that optical instrument factory, Shanghai produces; Image planes detector 11 is the XDI-50 type hard X ray scintillator CCD that Photonic Science company produces; The 600 order gold grids that square hole grid 14Wei Gilder company produces.
The assembly method of the sighting device of plasma diagnosis X ray optical system comprises the following steps:
A) the graduation cross hair of adjustment means microscope 10-1 and 10-2, calibration mold is intended the normal place of keeper 8.
B) slide block 5 is taken out from line slideway 4, and fine adjustment placement square hole grid 14, the index aperture of square hole grid 14 is overlapped with normal place.
C) removing tool microscope 10-1 and 10-2, with three-dimensional optical regulating platform, connect objective lens to be assembled 2, put into optical fiber lamp and utilize the coarse adjustment of optical fiber lamp completion system light path, make light that optical fiber lamp sends through square hole grid 14, through objective lens 2, image on image planes detector 11.
D) remove optical fiber lamp, open X ray light source 9 and image planes detector 11, carry out x-ray imaging experiment, by measuring the readability (as spatial resolution or MTF etc.) of mesh lines imaging, determine best object point position, and the index aperture that finally makes square hole grid 14 is positioned at this position, as shown in Figure 2.
E) remove square hole grid 14, again put back to slide block 5, by simulation keeper 8 direct x-ray imaging, whether the image of the simulation keeper 8 that detection image planes detector 11 is recorded overlaps with index aperture picture position.Situation about not overlapping if having occurs, repeating step a-d.
F) with epoxy resin bonding objective lens 2 and support 3, treat that resin solidification recession is except three-dimensional optical regulating platform, complete the system assembling of KB type x-ray imaging system.
Whole system is partly comprised of 1-8, and x-ray imaging system sighting device of the present invention is 1 and 3-8 part, and the objective lens 2 of KB type x-ray imaging system is connected with its resin solidification.After having assembled, the installation method of the sighting device of this cover KB type x-ray imaging system on strong laser device carries out as follows, and as shown in Figure 3, a whole set of KB system is fixed on 15Ba Kou position, strong laser device target chamber.
1) according to target range, see the indication take aim at equipment 16-1,16-2 and 16-3, calibrate the experiment position for the treatment of diagnosis target 17, after will treat that diagnosis target 17 regains.
2) handling adjusting mechanism 1, make to simulate keeper 8 and step 1) equipment 16-1,16-2 are taken aim in the sight of middle target range and the indicated experiment position of 16-3 overlaps.
3) slide block 5 is taken out from line slideway 4, thereby simulation place kick 8 is removed.
4) will treat that diagnosis target 17 is put back into experiment position, complete the system aiming that objective lens 2 is treated diagnosis target 17.
Embodiment 2
A kind of sighting device of plasma diagnosis X ray optical system, structure as shown in Figure 1, this device comprises simulation positioning component and adjusting mechanism 1 thereof, simulation positioning component comprises backstay 7, simulation keeper 8, slide block 5, support 3, line slideway 4 and objective lens 2, one end connecting analog keeper 8 of backstay 7, other end connection sliding block 5, support 3 downsides are provided with line slideway 4, upside is provided with objective lens 2, and slide block 5 is slidably connected with line slideway 4, and support 3 connects adjusting mechanism 1.Adjusting mechanism 1, by adjusting self attitude of x-ray imaging system, completes aiming and the point operation of x-ray imaging system.In addition, according to concrete Physical Experiment requirement, adjusting mechanism 1 also can directly adopt strong laser device diagnostic device insert (DIM of similar American National portfire).Simulation keeper 8 is the mechanical organ close with target size to be diagnosed.Slide block 5 is slidably connected by manual or electronic mode with line slideway 4.And can pull down or regain, thereby avoid the damage of Physical Experiment process to simulation keeper 8.One end of line slideway 4 is provided with locating part 6.Locating part 6 is for limiting the position of slide block 5, it is that representative simulation keeper 8 reaches normal place that slide block 5 withstands locating part 6, its repetitive positioning accuracy is guaranteed by line slideway 4 and locating part 6, adopt the commercially available line slideway of regular grade and slide block can reach the precision of 10-20 micron, and use micron order line slideway and slide block more can reach the precision of 5-10 micron.X ray optical system is KB microscopic system, KBA microscopic system or the Wolter microscopic system to the Bragg diffraction of glancing incidence X ray or the work of total external reflection principle based on multilayer film.
A kind of method of sight of sighting device of plasma diagnosis X ray optical system, utilize the supervision of tool microscope 10-1 and 10-2 to regulate simulation keeper 8 to overlap with the index aperture of square hole grid 14, by X ray grid imaging experiment, the best object point of regulating system overlaps with the best visual field of square hole grid 14, and objective lens 2 is fixed on support 3.
The method comprises the following steps:
(1) the graduation cross hair of adjustment means microscope 10-1 and 10-2, calibration mold is intended the normal place of keeper 8;
(2) slide block 5 is taken out from line slideway 4, regulate the index aperture of square hole grid 14 to overlap with the normal place of simulation keeper 8;
(3) removing tool microscope 10-1 and 10-2, connect objective lens to be assembled 2 with three-dimensional optical regulating platform, and with optical fiber lamp, system light path is carried out to coarse adjustment, and the light that optical fiber lamp sends, through square hole grid 14, images on image planes detector 11 through objective lens 2;
(4) remove optical fiber lamp, open X ray light source 9 and image planes detector 11, carry out x-ray imaging experiment, the best object point position of regulating system overlaps with the best visual field of square hole grid 14, makes the index aperture of square hole grid 14 be positioned at this position;
(5) remove square hole grid 14, slide block 5 is put back to line slideway 4, simulation keeper 8 is carried out to x-ray imaging, whether the image of the simulation keeper 8 that detection image planes detector 11 is recorded overlaps with index aperture picture position, if do not overlap, repeating step (1), to step (4), does not carry out step (6) if overlap;
(6) objective lens 2 is fixed on support 3, removes three-dimensional optical regulating platform.
Claims (8)
1. the sighting device of a plasma diagnosis X ray optical system, it is characterized in that, this device comprises simulation positioning component and adjusting mechanism thereof, described simulation positioning component comprises backstay, simulation keeper, slide block, support, line slideway and objective lens, one end connecting analog keeper of described backstay, other end connection sliding block, described support downside is provided with line slideway, upside is provided with objective lens, described slide block and line slideway are slidably connected, and described support connects adjusting mechanism.
2. the sighting device of a kind of plasma diagnosis X ray optical system according to claim 1, is characterized in that, described adjusting mechanism, by adjusting self attitude of x-ray imaging system, completes aiming and the point operation of x-ray imaging system.
3. the sighting device of a kind of plasma diagnosis X ray optical system according to claim 1, is characterized in that, described simulation keeper is the mechanical organ close with target size to be diagnosed.
4. the sighting device of a kind of plasma diagnosis X ray optical system according to claim 1, is characterized in that, described slide block and line slideway are slidably connected by manual or electronic mode.
5. the sighting device of a kind of plasma diagnosis X ray optical system according to claim 1, is characterized in that, one end of described line slideway is provided with locating part.
6. the sighting device of a kind of plasma diagnosis X ray optical system according to claim 1, it is characterized in that, described X ray optical system is KB microscopic system, KBA microscopic system or the Wolter microscopic system to the Bragg diffraction of glancing incidence X ray or the work of total external reflection principle based on multilayer film.
7. the method for sight of the sighting device of a plasma diagnosis X ray optical system as claimed in claim 1, it is characterized in that, utilize the supervision of tool microscope to regulate simulation keeper to overlap with the index aperture of square hole grid, by X ray grid imaging experiment, the best object point of regulating system overlaps with the best visual field of square hole grid, and objective lens is fixed on support.
8. the method for sight of the sighting device of a kind of plasma diagnosis X ray optical system according to claim 7, is characterized in that, the method comprises the following steps:
(1) the microscopical graduation cross hair of adjustment means, calibration mold is intended the normal place of keeper;
(2) slide block is taken out from line slideway, regulates the index aperture of square hole grid to overlap with the normal place of simulation keeper:
(3) removing tool microscope, connects objective lens to be assembled with three-dimensional optical regulating platform, and with optical fiber lamp, system light path is carried out to coarse adjustment, and the light that optical fiber lamp sends, through square hole grid, images on image planes detector through objective lens;
(4) remove optical fiber lamp, open X ray light source and image planes detector, carry out x-ray imaging experiment, the best object point position of regulating system overlaps with the best visual field of square hole grid, and the index aperture of square hole grid is positioned to this position;
(5) remove square hole grid, slide block is put back to line slideway, simulation keeper is carried out to x-ray imaging, whether the image of the simulation keeper that detection image planes detector is recorded overlaps with index aperture picture position, if do not overlap, repeating step (1), to step (4), does not carry out step (6) if overlap;
(6) objective lens is fixed on support, removes three-dimensional optical regulating platform.
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CN107192729A (en) * | 2017-05-18 | 2017-09-22 | 吉林大学 | The online fast analyser of polyacrylonitrile fibre structure X-ray diffraction and method |
CN108169790A (en) * | 2017-11-27 | 2018-06-15 | 同济大学 | A kind of microscopical intensity calibration method of Grazing Incidence X-Ray |
CN110413009A (en) * | 2019-07-24 | 2019-11-05 | 中国工程物理研究院激光聚变研究中心 | A kind of sighting system |
CN110544826A (en) * | 2019-07-22 | 2019-12-06 | 西安电子科技大学 | High-temperature-resistant focusing lens antenna for high-temperature plasma diagnosis technology |
CN111562716A (en) * | 2020-04-15 | 2020-08-21 | 同济大学 | Multichannel KB microscope structure with quasi-coaxial observation function |
CN111986822A (en) * | 2020-07-27 | 2020-11-24 | 哈尔滨工业大学 | X-ray characterization detector precision adjustment carrying mechanism |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS637618A (en) * | 1986-06-27 | 1988-01-13 | Nippon Tairan Kk | Laser-beam positioning apparatus in semiconductor manufacturing apparatus |
US5677525A (en) * | 1995-02-23 | 1997-10-14 | Carl-Zeiss-Stiftung | Ancillary module for making a spatially-resolved measurement of a focus volume |
CN1400464A (en) * | 2001-08-07 | 2003-03-05 | 中国科学院大连化学物理研究所 | Laser induced fluorescence detector |
-
2012
- 2012-06-20 CN CN201210206350.4A patent/CN103514966B/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS637618A (en) * | 1986-06-27 | 1988-01-13 | Nippon Tairan Kk | Laser-beam positioning apparatus in semiconductor manufacturing apparatus |
US5677525A (en) * | 1995-02-23 | 1997-10-14 | Carl-Zeiss-Stiftung | Ancillary module for making a spatially-resolved measurement of a focus volume |
CN1400464A (en) * | 2001-08-07 | 2003-03-05 | 中国科学院大连化学物理研究所 | Laser induced fluorescence detector |
Non-Patent Citations (2)
Title |
---|
赵玲玲等: "KBA X射线显微镜装调方法研究", 《强激光与粒子束》 * |
黄圣铃等: "基于辅助光学系统的KB显微镜瞄准方法", 《强激光与粒子束》 * |
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CN107192729A (en) * | 2017-05-18 | 2017-09-22 | 吉林大学 | The online fast analyser of polyacrylonitrile fibre structure X-ray diffraction and method |
CN108169790A (en) * | 2017-11-27 | 2018-06-15 | 同济大学 | A kind of microscopical intensity calibration method of Grazing Incidence X-Ray |
CN110544826A (en) * | 2019-07-22 | 2019-12-06 | 西安电子科技大学 | High-temperature-resistant focusing lens antenna for high-temperature plasma diagnosis technology |
CN110413009A (en) * | 2019-07-24 | 2019-11-05 | 中国工程物理研究院激光聚变研究中心 | A kind of sighting system |
CN111562716A (en) * | 2020-04-15 | 2020-08-21 | 同济大学 | Multichannel KB microscope structure with quasi-coaxial observation function |
CN111562716B (en) * | 2020-04-15 | 2022-06-28 | 同济大学 | Multichannel KB microscope structure with accurate coaxial observation function |
CN111986822A (en) * | 2020-07-27 | 2020-11-24 | 哈尔滨工业大学 | X-ray characterization detector precision adjustment carrying mechanism |
CN111986822B (en) * | 2020-07-27 | 2022-11-29 | 哈尔滨工业大学 | X-ray characterization detector precision adjustment carrying mechanism |
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