CN106841236B - Transmission optical element defect testing device and method - Google Patents
Transmission optical element defect testing device and method Download PDFInfo
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- CN106841236B CN106841236B CN201611147850.XA CN201611147850A CN106841236B CN 106841236 B CN106841236 B CN 106841236B CN 201611147850 A CN201611147850 A CN 201611147850A CN 106841236 B CN106841236 B CN 106841236B
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- 238000000034 method Methods 0.000 title claims description 21
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- 238000012544 monitoring process Methods 0.000 claims abstract description 9
- 230000001678 irradiating effect Effects 0.000 claims description 3
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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Abstract
In order to solve the defects that the traditional testing method is time-consuming and labor-consuming and the defect measurement in the optical element is limited, the invention provides a testing device and a testing method for defects of a transmission optical element, wherein the device comprises a laser, a collimating lens, a fixed-focus lens, a CCD (charge coupled device), a moving mechanism and an acquisition control computer; the collimating lens is arranged on an output light path of the laser; the fixed-focus lens and the CCD are rigidly connected to form an imaging system, and a monitoring surface of the imaging system is in conjugate relation with a CCD photosensitive surface through the fixed-focus lens; the imaging system is fixed on the moving mechanism; the moving mechanism is connected with the acquisition control computer.
Description
Technical Field
The invention belongs to the field of optics, relates to a method and a device for testing optical element defects, and particularly relates to a method and a device for testing the positions of defects on the surfaces, sub-surfaces and inner parts of transmission type large-caliber flat plates and wedge plates in a laser light path.
Background
A large number of flat plate and wedge plate optical elements are used in the Shenguang III host machine device, defects of the flat plate and the wedge plate can cause the elements to be damaged under lower flux, laser-induced damage can accelerate damage of the elements, light beam quality of the device is deteriorated, output energy and focusing characteristics of the device are affected, thermal images are generated in a subsequent light path, new damage is caused, target hitting energy is reduced, and damage is great. Therefore, control of defects in the flat and wedge plates of the apparatus is important.
The traditional test method comprises the following steps:
the method 1 is a visual method, defects on the surfaces, the sub-surfaces and the inner parts of a flat plate and a wedge plate are observed by a low power magnifier, when the method is used for testing large-caliber elements, the visual fatigue is easily caused by long-time observation of human eyes, the measurement confidence coefficient is low, and the method is time-consuming, labor-consuming and low in efficiency.
The method 2 is a microscopic imaging method, wherein a movable scanning mechanism is adopted to bear a large-caliber optical element, an LED is adopted for illumination, a dark field is adopted for imaging, a CCD microscopic system is used for testing the defects of the optical element, the method is limited by the field of view and the working distance of the microscopic system, only the defects on the surface or the sub-surface of the optical element can be tested, the defect measurement in the optical element is limited, meanwhile, the microscopic system is adopted, the field of view is small, and the scanning mode is long in time consumption during measurement.
Disclosure of Invention
In order to overcome the defects that the traditional testing method is time-consuming and labor-consuming and the defect measurement on the inside of the optical element is limited, the invention provides a method and a device for testing defects of a transmission optical element, which can be used for quickly detecting the defects on the surface and the inside of a large-caliber transmission type optical element.
The technical solution of the invention is as follows:
the defect testing device for the transmission optical element is characterized in that: comprises a laser, a collimating lens, a fixed-focus lens, a CCD, a moving mechanism and an acquisition control computer; the collimating lens is arranged on an output light path of the laser; the fixed-focus lens and the CCD are rigidly connected to form an imaging system, and a monitoring surface of the imaging system is in conjugate relation with a CCD photosurface through the fixed-focus lens; the imaging system is fixed on the moving mechanism; the moving mechanism is connected with the acquisition control computer.
In order to improve the detection efficiency and realize automatic test, the test device also comprises an objective table and a scanning mechanism; the objective table is used for placing and fixing an optical element to be measured; the scanning mechanism is used for integrally moving the objective table and the optical element to be detected; the scanning mechanism is connected with the acquisition control computer.
The method for detecting the defects of the transmission optical element by adopting the testing device is characterized in that: the method comprises the following steps:
1) Starting the laser 1, and injecting laser into a collimating mirror for collimation;
2) Irradiating a certain area to be tested of the optical element to be tested by the collimated laser beam;
3) Observing an image of the imaging system, if a diffraction pattern appears, indicating that a defect exists in the currently irradiated area of the optical element to be detected, and entering the step 4);
4) Adjusting the position of the moving mechanism along the axial direction to enable the diffraction ring to be changed from big to small until the diffraction ring disappears, wherein the monitoring surface of the imaging system is superposed with the defect position of the measured optical element;
5) Moving the optical element to be tested, enabling the laser beam to pass through the next test area of the caliber of the optical element to be tested, and testing the area by adopting the same method of the steps 3) -4);
6) Repeating the steps 3) to 5) until the test of all the areas of the whole optical element is completed;
7) And splicing the position data with the defects in all the test areas to obtain the spatial defect information of the whole optical element.
In the step 5), the optical element to be measured is placed on the object stage, and the object stage and the optical element to be measured are moved integrally by the scanning mechanism.
The invention has the advantages that:
1. the invention combines a laser, a collimating mirror, an objective table, a scanning mechanism, a fixed-focus lens, a CCD, a moving mechanism and an acquisition control computer, utilizes the conjugate imaging relation of the diffraction characteristic of the laser and an object image, realizes defect detection of a large-caliber optical element through scanning, can detect surface, sub-surface and internal defect information of the whole optical element, is not limited to defect measurement in the optical element, has high detection efficiency, and can generate clear diffraction stripes even if the dimension is in a submicron order when the defects are irradiated by the laser, thereby having high system measurement precision.
2. The invention has high automation degree and is suitable for nondestructive non-contact precise measurement of optical element defects.
Drawings
FIG. 1 is a schematic diagram of the mechanism of the present invention;
in the figure, 1-laser, 2-collimating mirror, 3-objective table, 4-scanning mechanism, 5-fixed focus lens, 6-CCD, 7-moving mechanism, 8-acquisition control computer and 9-optical element to be measured.
Detailed Description
The device for testing the defects of the transmission optical element comprises a laser 1, a collimating mirror 2, an object stage 3, a scanning mechanism 4, a fixed-focus lens 5, a CCD 6, a moving mechanism 7 and an acquisition control computer 8.
The collimating lens 2 is arranged on an output light path of the laser 1, and collimates the output laser of the laser and outputs a parallel light beam.
The objective table 3 is used for placing an optical element to be tested and ensuring that the optical element to be tested is positioned on the output light path of the collimating mirror 2, so that the parallel light beams pass through a certain testing area of the optical element to be tested.
The scanning mechanism 4 is installed at the lower end of the object stage 3 and is used for moving the object stage 3 and the optical element to be tested placed on the object stage 3 integrally so that the laser beam passes through the next test area of the caliber of the optical element to be tested.
The fixed focus lens 5 is rigidly connected with the CCD 6 to form an imaging system. The whole imaging system is fixed on the moving mechanism 7, and the monitoring surface of the imaging system is in conjugate relation with the photosensitive surface of the CCD 6 through the fixed-focus lens 5. The imaging system is used for testing whether defects exist in the current testing area of the optical element to be tested.
The scanning mechanism 4, the imaging system and the moving mechanism 7 are all connected with an acquisition control computer 8;
the acquisition control computer 8 has three functions:
1. controlling the moving step length of the scanning mechanism and the moving mechanism;
2. collecting data: the position information of the monitoring surface of the imaging system and the information of the irradiated area of the optical element to be detected are included;
3. processing data: and splicing the positions of the areas with the defects of the detected optical element to obtain the spatial defect information of the whole optical element.
Based on the testing device, the invention also provides a testing method of the defect of the transmission optical element, which comprises the following steps:
1) Starting a laser 1, injecting laser into a collimating mirror 2, collimating into parallel beams, fixing the optical element to be detected on an objective table 3, and irradiating a certain area to be detected of the optical element to be detected by the parallel beams; the collimated parallel light is transmitted by the optical element to be detected, and then enters an imaging system consisting of a fixed-focus lens 5 and a CCD 6.
2) If diffraction patterns appear on the imaging system, the defect exists in the irradiated area of the tested optical element, and the step 3) is carried out.
3) The position of the moving mechanism 7 is adjusted along the axial direction (parallel to the axial direction of the collimating mirror), when the diffraction pattern on the imaging system is gradually reduced, the monitoring surface of the imaging system is gradually close to the defect position of the optical element to be detected; the position of the moving mechanism 7 is continuously adjusted, and when the diffraction ring disappears, the image transmission principle is satisfied, and the monitoring surface of the imaging system and the defect position of the optical element to be measured coincide at this time will be described.
4) And moving the object stage 3 and the optical element to be tested integrally, enabling the laser beam to pass through the next testing area of the caliber of the optical element to be tested, and testing the area by adopting the same method of the steps 2) to 3).
5) And repeating the steps 2) to 4) until the test of the whole optical element is completed.
6) And splicing the position data of the defects in all the test areas to obtain the spatial defect information of the whole optical element.
The specific splicing method in step 6) is a common technical means for data processing by those skilled in the art, and the present invention is not described herein again.
Claims (2)
1. A method of detecting a transmission optical element defect, comprising:
the adopted testing device for the defects of the transmission optical element comprises a laser, a collimating mirror, a fixed-focus lens, a CCD (charge coupled device), a moving mechanism and an acquisition control computer; the collimating lens is arranged on an output light path of the laser; the fixed-focus lens and the CCD are rigidly connected to form an imaging system, and a monitoring surface of the imaging system is in conjugate relation with a CCD photosurface through the fixed-focus lens; the imaging system is fixed on the moving mechanism; the moving mechanism is connected with an acquisition control computer;
the method comprises the following steps:
1) Starting a laser, and injecting laser into a collimating mirror for collimation;
2) Irradiating a certain to-be-tested area of the tested optical element by the collimated laser beam;
3) Observing an image of the imaging system, if a diffraction pattern appears, indicating that a defect exists in the currently irradiated area of the optical element to be detected, and entering the step 4);
4) Adjusting the position of the moving mechanism along the axial direction to make the diffraction ring gradually smaller until the diffraction ring disappears, wherein the monitoring surface of the imaging system is superposed with the defect position of the measured optical element;
5) Moving the optical element to be tested, enabling the laser beam to pass through the next test area of the caliber of the optical element to be tested, and testing the area by adopting the same method of the steps 3) -4);
6) Repeating the steps 3) to 5) until the test of all the areas of the whole optical element is finished;
7) And splicing the position data with the defects in all the test areas to obtain the spatial defect information of the whole optical element.
2. A method of detecting transmission optical element defects according to claim 1, characterized in that: the method comprises the following steps: and 5) placing the optical element to be measured on the objective table, and integrally moving the objective table and the optical element to be measured by adopting a scanning mechanism.
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| CN107800026B (en) * | 2017-10-27 | 2019-07-09 | 大族激光科技产业集团股份有限公司 | A kind of adjustment method of the outer beam path alignment of laser |
| CN109142391A (en) * | 2018-09-13 | 2019-01-04 | 深圳阜时科技有限公司 | A kind of sensing device and equipment |
| CN109297989A (en) * | 2018-10-11 | 2019-02-01 | 广州博冠光电科技股份有限公司 | A kind of spherical optics element surface flaw inspection device and method |
| CN111735613A (en) * | 2020-08-11 | 2020-10-02 | 吉林省春曦光电科技有限公司 | Optical quality detection system of four-quadrant detector lens |
| CN112903236A (en) * | 2021-01-29 | 2021-06-04 | 上海交通大学 | Focal plane scanning-based aerodynamic thermal parameter optical test device and method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101135653A (en) * | 2007-09-11 | 2008-03-05 | 中国科学院上海光学精密机械研究所 | Laser scattering detection system for optical plane surface defects |
| CN105158269A (en) * | 2015-09-29 | 2015-12-16 | 中国科学院上海光学精密机械研究所 | Three-dimensional rapid dark field detection device and method for defects of large-caliber planar optical element |
| WO2016004550A1 (en) * | 2014-07-04 | 2016-01-14 | 中国科学院长春光学精密机械与物理研究所 | Large-numerical-aperture phase-shifting double-pinhole diffraction interferometer and testing method thereof |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101135653A (en) * | 2007-09-11 | 2008-03-05 | 中国科学院上海光学精密机械研究所 | Laser scattering detection system for optical plane surface defects |
| WO2016004550A1 (en) * | 2014-07-04 | 2016-01-14 | 中国科学院长春光学精密机械与物理研究所 | Large-numerical-aperture phase-shifting double-pinhole diffraction interferometer and testing method thereof |
| CN105158269A (en) * | 2015-09-29 | 2015-12-16 | 中国科学院上海光学精密机械研究所 | Three-dimensional rapid dark field detection device and method for defects of large-caliber planar optical element |
Non-Patent Citations (2)
| Title |
|---|
| 徐军生 ; 章慧贤 ; 冯琼辉 ; .光学及光学仪器光学零件表面疵病试验方法.光学仪器.2007,(02),全文. * |
| 沈卫星.相干滤波成像系统测量光学元件表面疵病.光学技术.2000,(04),全文. * |
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