CN204359512U - Wavefront and image surface position calibration device for large-diameter collimator - Google Patents
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Abstract
本实用新型属于光电测试领域,涉及一种大口径平行光管波前及像面位置标定装置。该装置包括光纤激光器,二维精密长导轨,CCD相机以及控制单元;CCD相机安装在二维精密长导轨上;二维精密长导轨包括水平导轨以及安装在水平导轨上的垂直导轨;CCD相机能够沿二维精密长导轨在水平方向和垂直方向移动;光纤激光器位于CCD相机的正前方;控制单元分别与二维精密长导轨和CCD相机连接本实用新型可实现大口径平行光管波前和焦面位置的准确测试。
The utility model belongs to the field of photoelectric testing and relates to a wave front and image plane position calibration device of a large-caliber parallel light tube. The device includes a fiber laser, a two-dimensional precision long guide rail, a CCD camera and a control unit; the CCD camera is installed on the two-dimensional precision long guide rail; the two-dimensional precision long guide rail includes a horizontal guide rail and a vertical guide rail installed on the horizontal guide rail; the CCD camera can Move along the two-dimensional precision long guide rail in the horizontal direction and vertical direction; the fiber laser is located directly in front of the CCD camera; the control unit is respectively connected with the two-dimensional precision long guide rail and the CCD camera. Accurate testing of face position.
Description
技术领域technical field
本实用新型属于光电测试领域,涉及一种大口径平行光管波前及像面位置标定装置。The utility model belongs to the field of photoelectric testing and relates to a wave front and image plane position calibration device of a large-caliber parallel light tube.
背景技术Background technique
平行光管是一种用于在实验室模拟无穷远目标,发射平行光束,测量光学系统或相机成像质量和性能参数的光学精密测量设备。The collimator is an optical precision measurement device used to simulate an infinite target in the laboratory, emit parallel light beams, and measure the imaging quality and performance parameters of an optical system or camera.
近些年来,由于我国航天、航空技术的快速发展,尤其是高分工程的实施对空间相机的成像质量和地面分辨率要求越来越高,相机的焦距和口径也随之越来越大,因此要求检测长焦距、大口径相机成像质量和性能参数的光学精密测量设备——平行光管的口径和焦距也随之变长变大,其成像质量要求也大幅提高,因此对于平行光管本身的成象质量,即出射波前和焦面位置准确性(即出射光束平行性)的检测提出了更高的要求。In recent years, due to the rapid development of my country's aerospace and aviation technology, especially the implementation of high-resolution projects, the imaging quality and ground resolution of space cameras have become higher and higher, and the focal length and aperture of cameras have also become larger and larger. Therefore, it is required to detect the optical precision measurement equipment of long focal length, large-aperture camera imaging quality and performance parameters-the aperture and focal length of the collimator will also become longer and larger, and its imaging quality requirements will also be greatly improved. Therefore, the collimator itself Higher requirements are placed on the detection of the image quality, that is, the accuracy of the exit wavefront and focal plane position (ie, the parallelism of the exit beam).
一般平行光管常用的方法是采用自准直测试法,利用大口径平面反射镜和干涉仪测量光管波前,利用五棱镜和经纬仪测量光束准直性。其存在问题是光管口径加大时反射镜的口径随之也要加大,反射镜本身的面型无法准确测量,另外反射镜材料和加工成本也成倍上升,测量方法受环境和人为主观性影响而导致较大的测量误差。The commonly used method for collimator is to use self-collimation test method, using large-diameter flat mirror and interferometer to measure the wavefront of the light tube, and using a pentaprism and theodolite to measure the beam collimation. The existing problem is that when the aperture of the light pipe increases, the aperture of the reflector also increases accordingly, and the surface shape of the reflector itself cannot be accurately measured. In addition, the material and processing costs of the reflector are also doubled, and the measurement method is affected by the environment and human subjectivity. Sexual influences lead to large measurement errors.
实用新型内容Utility model content
为了解决背景技术中所存在的问题,本实用新型提出了一种用于大口径平行光管波前及像面位置标定装置,可实现光管波前和焦面位置的准确测试。In order to solve the problems existing in the background technology, the utility model proposes a device for calibrating the wavefront and image plane position of a large-diameter collimated light tube, which can realize accurate testing of the wavefront and focal plane position of the light tube.
本实用新型的技术解决方案是:The technical solution of the utility model is:
一种大口径平行光管波前及像面位置标定装置,其特征在于:包括光纤激光器,二维精密长导轨,CCD相机以及控制单元;A large-aperture collimator wavefront and image plane position calibration device is characterized in that it includes a fiber laser, a two-dimensional precision long guide rail, a CCD camera and a control unit;
所述CCD相机安装在二维精密长导轨上;所述二维精密长导轨包括水平导轨以及安装在水平导轨上的垂直导轨;所述CCD相机能够沿二维精密长导轨在水平方向和垂直方向移动;所述光纤激光器位于CCD相机的正前方;所述控制单元分别与二维精密长导轨和CCD相机连接。The CCD camera is installed on the two-dimensional precision long guide rail; the two-dimensional precision long guide rail includes a horizontal guide rail and a vertical guide rail installed on the horizontal guide rail; moving; the fiber laser is located directly in front of the CCD camera; the control unit is connected to the two-dimensional precision long guide rail and the CCD camera respectively.
上述控制单元为计算机。The above-mentioned control unit is a computer.
上述CCD相机由光学镜头和CCD探测器连接组成。The above-mentioned CCD camera is composed of an optical lens connected with a CCD detector.
上述光学镜头包括两片透镜,一片为球面镜,一片为非球面镜。The above-mentioned optical lens includes two lenses, one is a spherical mirror and the other is an aspherical mirror.
上述光纤激光器的光纤头为单模光纤头。The fiber head of the above-mentioned fiber laser is a single-mode fiber head.
本实用新型优点如下:The utility model advantage is as follows:
1、本实用新型利用小口径CCD相机多点扫描技术,同时实现了大口径平行光管波前和焦面位置的测量;1. The utility model utilizes the multi-point scanning technology of a small-diameter CCD camera to simultaneously realize the measurement of the wavefront and focal plane positions of a large-diameter collimator;
2、本实用新型采用相对位置定位拼接技术,完成了在同一平面内不同位置上多幅图像目标坐标位置的高精度拼接,对此平面内的数据采用二维线性最小二乘法拟合计算线性项,去掉线性项,利用分区梯度积分算法或索斯维尔算法或波面多项式拟合算法复原出了平行光管波前;利用中心图像位置为基准,通过非线性多项式拟合算法,可实现光管不同口径光束平行性的测量。2. The utility model adopts the relative position positioning splicing technology, and completes the high-precision splicing of the target coordinate positions of multiple images at different positions in the same plane. The data in this plane adopts the two-dimensional linear least square method to fit and calculate the linear items , remove the linear term, and restore the wavefront of the collimated light pipe by using the partition gradient integration algorithm or the Southwell algorithm or the wavefront polynomial fitting algorithm; using the center image position as the reference, through the nonlinear polynomial fitting algorithm, different light pipes can be realized. Aperture beam parallelism measurement.
3、本实用新型中的光学镜头采用两片透镜,一片球面和一片非球面,大F数(口径5~110mm,焦距300~500mm)大焦深的形式,消除了色差,实现了目标的超衍射现象,解决了导轨在不同位置上相机离焦和像差对弥散斑的影响,提高了判读精度;3. The optical lens in the utility model adopts two lenses, one spherical surface and one aspherical surface, in the form of large F number (diameter 5-110mm, focal length 300-500mm) and large focal depth, which eliminates chromatic aberration and realizes the super Diffraction phenomenon, which solves the influence of camera defocus and aberration on the diffuse spots at different positions of the guide rail, and improves the accuracy of interpretation;
4、本实用新型利用单模光纤头做点光源,产生标准球面波,采用不同距离模拟可实现任意口径和焦距的平行光管波前和焦面位置的标定。4. The utility model uses the single-mode optical fiber head as a point light source to generate standard spherical waves. By using different distance simulations, the calibration of the wavefront and focal plane positions of collimator tubes with arbitrary apertures and focal lengths can be realized.
附图说明Description of drawings
图1本实用新型标定装置的结构示意图。Fig. 1 is a schematic structural diagram of the calibration device of the present invention.
1—光纤激光器、2—光学镜头、3—CCD探测器、4—二维精密长导轨、5—计算机。1—fiber laser, 2—optical lens, 3—CCD detector, 4—two-dimensional precision long guide rail, 5—computer.
图2本实用新型对待平行光管波前标定与焦面位置测量的结构示意图。Fig. 2 is a structural schematic diagram of wavefront calibration and focal plane position measurement of the collimated light tube to be treated by the utility model.
1—待标定平行光管、2—光学镜头、3—CCD探测器、4—二维精密长导轨、5—计算机、6-光纤激光器。1—collimator to be calibrated, 2—optical lens, 3—CCD detector, 4—two-dimensional precision long guide rail, 5—computer, 6—fiber laser.
具体实施方式Detailed ways
本文提出一种新型的检测装置和方法来解决大口径平行光管的波前和焦面位置准确性的检测。This paper proposes a new detection device and method to solve the detection of the accuracy of the wavefront and focal plane position of the large aperture collimator.
如图1所示:该装置包括光纤激光器1,二维精密长导轨4,光学镜头2、CCD探测器3以及计算机5;As shown in Figure 1: the device includes a fiber laser 1, a two-dimensional precision long guide rail 4, an optical lens 2, a CCD detector 3 and a computer 5;
光学镜头2、CCD探测器3精密连接组成CCD相机。The optical lens 2 and the CCD detector 3 are precisely connected to form a CCD camera.
CCD相机安装在二维精密长导轨4上;二维精密长导轨4包括水平导轨以及安装在水平导轨上的垂直导轨;CCD相机能够沿二维精密长导轨4在水平方向和垂直方向移动;光纤激光器1位于CCD相机的正前方;控制单元分别与二维精密长导轨4和CCD相机连接。The CCD camera is installed on the two-dimensional precision long guide rail 4; the two-dimensional precision long guide rail 4 includes a horizontal guide rail and a vertical guide rail installed on the horizontal guide rail; the CCD camera can move horizontally and vertically along the two-dimensional precision long guide rail 4; The laser 1 is located directly in front of the CCD camera; the control unit is respectively connected with the two-dimensional precision long guide rail 4 and the CCD camera.
本装置中采用的控制单元为计算机5;计算机5作用是控制二维精密长导轨4运动,存储CCD相机采集的图像并提取出图像点的中心位置作数据判读处理和计算。The control unit used in this device is the computer 5; the function of the computer 5 is to control the movement of the two-dimensional precision long guide rail 4, store the image collected by the CCD camera and extract the center position of the image point for data interpretation processing and calculation.
光学镜头2为大F数(口径5~110mm,焦距300~500mm)大焦深的形式,光学镜头2包括为超衍射光学镜头,包括两片透镜,一片为球面镜,一片为非球面镜,消除了色差,实现了目标的超衍射现象;解决了导轨在不同位置上相机离焦和像差对弥散斑的影响,提高了判读精度;The optical lens 2 is in the form of a large F number (diameter 5-110mm, focal length 300-500mm) and a large depth of focus. The optical lens 2 includes a superdiffraction optical lens, including two lenses, one is a spherical mirror and the other is an aspherical mirror, eliminating Chromatic aberration, which realizes the super-diffraction phenomenon of the target; solves the influence of camera defocus and aberration on the diffuse spots at different positions of the guide rail, and improves the accuracy of interpretation;
CCD探测器3用来采集通过光学镜头2的图像;CCD detector 3 is used for collecting the image by optical lens 2;
其中,光纤激光器1的用于在不同位置出射标准球面波,用于标定波前及焦面位置标定装置的基准;光纤激光器的光纤头选用单模光纤头做点光源,产生标准球面波,采用不同距离模拟可实现任意口径平行光管波前装置的标定。Among them, the fiber laser 1 is used to emit standard spherical waves at different positions, and is used to calibrate the reference of the wavefront and focal plane position calibration device; the fiber head of the fiber laser uses a single-mode fiber head as a point light source to generate standard spherical waves. The simulation of different distances can realize the calibration of collimator wavefront devices with arbitrary apertures.
根据上述装置结构的描述,现对大口径平行光管波前及像面位置标定装置的标定方法进行阐述,具体包括以下步骤:According to the description of the structure of the above-mentioned device, the calibration method of the wavefront and image plane position calibration device of the large-aperture collimator is now described, which specifically includes the following steps:
步骤1)将CCD相机固定在二维精密长导轨上,调节CCD相机光轴和水平导轨、垂直导轨运动轴线互相垂直;Step 1) Fix the CCD camera on the two-dimensional precision long guide rail, and adjust the optical axis of the CCD camera to be perpendicular to the movement axis of the horizontal guide rail and the vertical guide rail;
步骤2)在CCD相机前处放置光纤激光器,并使光纤激光器的光纤头对准CCD相机,光纤调整激光器功率,直到CCD相机能接收到光纤激光器光强为止;Step 2) Place the fiber laser in front of the CCD camera, and align the fiber head of the fiber laser with the CCD camera, and adjust the power of the laser until the CCD camera can receive the light intensity of the fiber laser;
步骤3)CCD相机在二维精密长导轨不同位置上获取光纤激光器发出图像点的质心坐标(xi,yj);Step 3) The CCD camera obtains the centroid coordinates (x i , y j ) of the image points emitted by the fiber laser at different positions on the two-dimensional precision long guide rail;
以二维精密长导轨中心(x0,y0)为基准,控制二维精密长导轨带动CCD相机在水平和垂直两个方向上移动;移动范围为待标定平行光管的口径,移动步距为移动范围除以要采样的点数,计算机记录二维导轨不同位置坐标(M,N);同时CCD相机采集每个位置上的图像并判读出每幅图像点的质心坐标位置(xi,yj);所述二维精密长导轨的中心为水平导轨中心和垂直导轨中心的交点;Taking the center of the two-dimensional precision long guide rail (x 0 , y 0 ) as the reference, control the two-dimensional precision long guide rail to drive the CCD camera to move in both horizontal and vertical directions; the moving range is the aperture of the collimator to be calibrated, and the moving step Divide the movement range by the number of points to be sampled, and the computer records the coordinates (M, N) of different positions of the two-dimensional guide rail; at the same time, the CCD camera collects images at each position and interprets the coordinates of the center of mass of each image point (x i , y j ); The center of the two-dimensional precision long guide rail is the intersection of the center of the horizontal guide rail and the center of the vertical guide rail;
步骤4)CCD相机在二维精密长导轨不同位置上获取待标定平行光管发出图像点的质心坐标(xi′,yj′);Step 4) The CCD camera obtains the centroid coordinates (x i ', y j ') of the image points emitted by the collimator to be calibrated at different positions on the two-dimensional precision long guide rail;
步骤4.1)在CCD相机前安装待标定平行光管,将光纤激光器进行位置调整,使得光纤激光器的光纤头位于平行光管焦面上;Step 4.1) Install the collimator to be calibrated in front of the CCD camera, and adjust the position of the fiber laser so that the fiber head of the fiber laser is located on the focal plane of the collimator;
步骤4.2)以二维精密长导轨中心为基准,控制控制二维精密长导轨带动CCD相机在水平和垂直两个方向上带动移动,按步骤3)导轨移动的相同位置对待标定平行光管全口径进行采样,同时CCD相机采集每个位置上的图像并判读出每幅图像点的质心坐标位置(xi′,yj′);Step 4.2) Based on the center of the two-dimensional precision long guide rail, control the two-dimensional precision long guide rail to drive the CCD camera to move in both horizontal and vertical directions. According to step 3) the same position as the guide rail moves is used to calibrate the full aperture of the collimator Sampling is carried out, while the CCD camera collects images at each position and interprets the centroid coordinate position (xi ' , y j ') of each image point;
步骤5)确定待标定平行光管波前位置;Step 5) Determine the wavefront position of the collimator to be calibrated;
步骤5.1)计算步骤3)和步骤4.2)两次判读的图像点质心坐标位置(xi,yj)和(xi′,yj′)的差值坐标(Δxi,Δyj);Step 5.1) Calculate the difference coordinates (Δx i , Δy j ) of the centroid coordinate positions (x i , y j ) and (x i ′ , y j ′ ) of the image points in the two interpretations of step 3) and step 4.2);
步骤5.2)在待标定平行光管全口径内将导轨每个位置按步骤5.1)求得的差值坐标(Δxi,Δyj);规划在一个平面内,采用二维线性最小二乘法拟合计算线性项,去掉线性项;Step 5.2) The difference coordinates (Δx i , Δy j ) of each position of the guide rail obtained in step 5.1) within the full aperture of the collimator to be calibrated; plan in a plane, and use the two-dimensional linear least squares method to fit Calculate the linear term and remove the linear term;
步骤5.3)再采用分区梯度积分法或索斯维尔算法或波面多项式拟合算法计算待标定平行光管波前位置;Step 5.3) Calculate the wavefront position of the collimator to be calibrated by using the partition gradient integration method or the Southwell algorithm or the wavefront polynomial fitting algorithm;
步骤6)确定待标定平行光管像面位置;Step 6) Determine the position of the image plane of the collimator to be calibrated;
步骤6.1)将步骤4.2)得到的图像质心坐标(xi′,yj′)和二维精密长导轨在中心时得到的图像质心坐标(x0,y0)做差值,得到差值坐标(Δxi′,Δyj′);Step 6.1) Make a difference between the image centroid coordinates (x i ′, y j ′) obtained in step 4.2) and the image centroid coordinates (x 0 , y 0 ) obtained when the two-dimensional precision long guide rail is at the center, and obtain the difference coordinates (Δx i ', Δy j ');
步骤6.2)将得到的差值坐标(Δxi′,Δyj′)用二维多项式进行拟合可得到待标定平行光管全口径内光束的平行性误差,利用高斯公式可计算出像面位置误差。Step 6.2) Fit the obtained difference coordinates (Δx i ′, Δy j ′) with a two-dimensional polynomial to obtain the parallelism error of the beam within the full aperture of the collimator to be calibrated, and use the Gaussian formula to calculate the image plane position error.
步骤6.3)利用步骤6.2)获取的像面位置误差,确定待标定平行光管像面位置。Step 6.3) Using the image plane position error obtained in step 6.2), determine the image plane position of the collimator to be calibrated.
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CN104535300A (en) * | 2014-12-20 | 2015-04-22 | 中国科学院西安光学精密机械研究所 | Large-diameter collimator wavefront and image surface position calibration device and method |
CN105043723A (en) * | 2015-07-30 | 2015-11-11 | 中国科学院长春光学精密机械与物理研究所 | Large-area expansion radiation calibration light source cosine characteristic test device and test method |
CN105043723B (en) * | 2015-07-30 | 2017-09-26 | 中国科学院长春光学精密机械与物理研究所 | Large area extends radiation calibration light source cosine characteristic test device and its method of testing |
CN106840024A (en) * | 2016-07-25 | 2017-06-13 | 中国科学院长春光学精密机械与物理研究所 | The online contour detecting device of aperture aspherical and its detection method |
CN113126312A (en) * | 2021-03-05 | 2021-07-16 | 中国科学院西安光学精密机械研究所 | Method for assembling and adjusting large-size collimator focal plane assembly |
CN113126312B (en) * | 2021-03-05 | 2022-02-11 | 中国科学院西安光学精密机械研究所 | Method for assembling and adjusting large-size collimator focal plane assembly |
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