CN102721476A - Large-caliber high-speed infrared laser measurement device based on PSD (phase-sensitive detector) array - Google Patents
Large-caliber high-speed infrared laser measurement device based on PSD (phase-sensitive detector) array Download PDFInfo
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Abstract
The invention discloses a large-caliber high-speed infrared laser measurement device based on a PSD (phase-sensitive detector) array. The large-caliber high-speed infrared laser measurement device comprises a focusing lens array, an infrared PSD array, a multi-channel preamplifier, a data collection memory and a data processing computer, wherein the focusing lens array directly cuts and focuses a large-caliber infrared laser beam and omits a huge beam concentrating system; focused spots are directly imaged on the infrared DSP array, stored by the data collection memory at a high speed after passing through the multi-channel preamplifier, and then analyzed and calculated by a wave-front processing computer, so as to rapidly and accurately obtain wave-front distribution information, strength distribution information and the like. The large-caliber high-speed infrared laser measurement device based on the PSD array is simple in structure and compact in assembly, not only can be applied to infrared laser beam diagnosis, but also can be applied to a self-adapting optical system, and has wide application prospect.
Description
Technical field
The present invention relates to a kind of high speed infrared laser measuring device for measuring based on PSD (Position and Sensing Devices) array.The wavefront distributed intelligence of the infrared laser light beam that can realize heavy caliber is changed at a high speed, the high-speed multifunctional of strength distributing information detect.Can overcome the problem of the infrared laser beam detection scarce capacity that the conventional sense method changes at a high speed heavy caliber.Can be used for the multi-functional detection of infrared laser light beam and the fields such as high speed wavefront measurement of adaptive optics.
Background technology
Because the restriction of the structural design defective of infrared laser or technology, physical problem descends the infrared laser beam quality of generation.Infrared laser beam quality checkout equipment is a lot, mainly contains far-field spot measuring instrument, Hartmann wave front sensor and near field intensity distribution detection instrument etc., can compare accurate measurement to far-field spot, Wave-front phase, the light distribution of laser light.
With existing Hartmann wave front sensor is example; Its structural representation is as shown in Figure 2; The one-level that mainly comprises Hartmann wave front sensor contract beam system 6, microlens array 7, secondary contract beam system 8, ccd detector 9, data storage 10 and data handling machine 11 etc.Its working method is earlier the heavy caliber light beam to be contracted behind the bundle through the one-level beam system 6 that contracts; Tested light beam after adopting lenticule 7 or other cutting elements to the bundle that contracts disperses and cuts apart sampling; Then the sub-hot spot in the far field in each sub-aperture is imaged onto on the target surface of ccd detector 9 through the secondary beam system 8 that contracts; Acquisition data storage is in data storage device 10; Data handling machine 11 restores Beam Wave-Front aberration to be measured through data in the reading of data apparatus for acquiring and storing 10 through calculating each sub-facula mass center position.Along with the development of infrared laser technology, increasing to the demand of high speed measuring of heavy caliber infrared laser beam quality, Hartmann wave front sensor can't finely satisfy this measurement requirement in actual measurement; Mainly show following several respects: (1) is when carrying out the measurement of heavy caliber infrared laser beam quality; For mating, need the complicated and huge multipole beam system that contracts of a cover, the system debug difficulty with infrared CCD detector target surface; Processing cost is high, and the lead time is long.Because equipment is huge heavy, can't be in the on-the-spot flexible Application of the experiment of the finite space.(2) big target surface high speed infrared CCD camera costs an arm and a leg, and product type seldom, is difficult to find desirable infrared CCD camera.The infrared CCD target surface is generally smaller, and it is also just lower to cut apart sampling back resolution, and measuring accuracy and measurement range all are very limited, and can't carry out high-acruracy survey to big aberration infrared laser light beam.(3) heavy caliber infrared CCD frame frequency is closely-related with the detection target surface, and big target surface high speed infrared camera is difficult to obtain.Available infrared CCD camera SF generally is up to several kHz now, and the infrared laser beam quality that can't carry out in the high time frequency domain is measured.
Therefore traditional Hartmann sensor generally is used for measuring with the less wave aberration of variation less than the infrared laser light beam of 0.3m bore.Can't satisfy high speed measurement requirement, press for measuring accuracy and measuring rate that new technology improves measuring system greater than the heavy caliber infrared laser light beam more than the 0.3m bore.
Summary of the invention
The technical matters that the present invention solves is: overcome the deficiency of prior art, a kind of heavy caliber high speed infrared laser measuring device for measuring based on the PSD array is provided, realize the light intensity to heavy caliber infrared laser light beam, the high speed measurement of phase place.
The present invention solves the solution that its technical matters adopts: as shown in Figure 1; Heavy caliber high speed infrared laser measuring device for measuring based on the PSD array comprises: focusing lens array 1, infrared PSD array 2, hyperchannel pre-amplifier 3, data acquisition storer 4 and data handling machine 5; It is that the square condenser lens splicing of 0.01m-0.02m is formed that said focusing lens array 1 adopts by a series of bores; Can directly cut apart focusing to the infrared laser light beam between the 0.3m-1m; The focal beam spot direct imaging is to infrared PSD array 2, and infrared PSD array 2 is exported spot array location coordinate information and the strength information after the focusing; By data acquisition storer 4 high speed storing, handle via data handling machine 5 and calculate by the data of storage after hyperchannel pre-amplifier 3 signals amplify for said information, and four current signals of each infrared PSD detector output are made as I respectively
A, I
B, I
C, I
D, the facula mass center coordinate and the spot intensity I that then detect are:
Calibrate the center-of-mass coordinate x of infrared each sub-hot spot of PSD array with the standard directional light
I0, y
I0As measuring basis, each sub-facula mass center of infrared laser light beam of actual measurement zonal aberration is x
i, y
iThen each facula mass center side-play amount of causing of wave front aberration is:
dx＝x
i-x
i0，dy＝y
i-y
i0
Go up hot spot centroid motion x through each infrared PSD
i, y
i, can restore algorithm or Zernike pattern with the zone and restore algorithm computation and go out the wave front aberration size of incident laser beam and the wavefront variation information in the time frequency domain.The spot array strength information splices the intensity high speed change information of infrared laser light beam on unified, remedies the less difficult problem of high speed infrared camera target surface, and the beam quality that is used for the high temporal frequency of infrared laser detects and the real-time Wavefront detecting of ADAPTIVE OPTICS SYSTEMS.
It is that the square condenser lens of 0.01m-0.02m is spliced into two-dimensional array according to necessarily putting in order and forms that said focusing lens array 1 adopts by a series of bores, directly the infrared laser light beam between the 0.3m-1m is carried out focusing on formation focal beam spot array respectively by single square condenser lens.
The quantity of said focusing lens array 1 and infrared PSD array 2 is unrestricted in theory, can measure any bigbore laser beam and can not influence the measuring accuracy and the field range of equipment.
The present invention's advantage compared with prior art is:
(1) the heavy caliber high speed infrared laser measuring device for measuring that the present invention is based on the PSD array adopts the infrared PSD detector of big target surface, is guaranteeing that under the measuring accuracy condition, effectively the measured angular visual field is much larger than traditional Hartmann wave front sensor search angle visual field.Therefore can carry out high speed, high-precision wavefront measurement to bigger wave front aberration.
(2) the infrared PSD detector that target surface separates with preamplifying circuit is surveyed in the heavy caliber high speed infrared laser measuring device for measuring employing that the present invention is based on the PSD array; External diameter is less than 0.01m; Can be implemented under the constant situation of measurement space resolution any heavy caliber infrared laser light beam is measured, and can not influence the measuring accuracy and the field range of equipment.
(3) it is similar with traditional Hartmann wave front sensor wave front restoration principle that the wavefront that the present invention is based on the heavy caliber high speed infrared laser measuring device for measuring of PSD array detects principle, but it directly carries out lens arra and cuts apart sampling, the infrared PSD array of on the lens arra focal plane, arranging on heavy caliber; Save complex structure; The multistage beam system that contracts that system is huge, so its is simple in structure, assembling is compact; Advantages of small volume; Can be applied to test on-the-spot infrared laser picture element flexibly and detect, fields such as system debug and the detection of adaptive optics wavefront, control are with a wide range of applications.
(4) the heavy caliber high speed infrared laser measuring device for measuring that the present invention is based on the PSD array adopts the hyperchannel pre-amplifier to adopt analog electrical signal output; Can realize HSDA storage through the data acquisition storer, remedy the lower deficiency of traditional Hartmann wave front sensor measuring rate greater than 100kHz.
(5) the heavy caliber high speed infrared laser measuring device for measuring that the present invention is based on the PSD array adopt the infrared PSD array of high precision to the infrared light spot barycenter displacement carry out high-acruracy survey; Under coupling suitable optical system condition, the facula mass center positional accuracy measurement can reach or be superior to traditional Hartmann's Wavefront detecting sensor measurement precision.
Description of drawings
Fig. 1 is a testing apparatus principle schematic of the present invention;
Fig. 2 is traditional Hartmann wave front sensor principle schematic;
The infrared PSD sensor synoptic diagram of Fig. 3 for using among the present invention;
Fig. 4 is the synoptic diagram of arranging of focusing lens array among the present invention;
Fig. 5 is infrared PSD array arrangement synoptic diagram among the present invention.
Embodiment
Further introduce the present invention in detail below in conjunction with accompanying drawing and embodiment.
Fig. 1 is the principle schematic of the embodiment of the invention, comprises focusing lens array 1, infrared PSD array 2, hyperchannel pre-amplifier 3, data acquisition storer 4 and data handling machine 5 based on the heavy caliber high speed infrared laser measuring device for measuring of PSD array.Workflow is: focusing lens array 1 is directly cut apart focusing to bigbore infrared laser light beam; The focuson spot array is imaged onto respectively on the infrared PSD array 2 of corresponding unit; After hyperchannel pre-amplifier 3 signals amplify by data acquisition storer 4 high speed storing; Handle by data handling machine 5 then and calculate, can obtain wavefront distributed intelligence, strength distributing information and laser beam Strength Changes information etc. at a high speed synchronously.
In practical implementation, the infrared PSD model of selecting for use is IGA-030-PSD, is produced by U.S. EOS company; Structure is as shown in Figure 3, and effectively target surface is 3 * 3mm, and its response wave length scope is 1.0～1.7um; This infrared PSD displacement measurement precision dx＜0.5um; The mode that this infrared PSD adopts the detector target surface to separate with preamplifying circuit, the device external diameter is 8.7mm, conveniently is arranged into two-dimensional array closely by the 10mm spacing.It is as shown in Figure 4 that the focusing lens array that adopts is formed structure, two-dimensional lens array size Unit 30 * 30, and totally 708 condenser lenses, every lens size is 10 * 10mm, focal distance f=500mm.Scalability port directly is the infrared laser light beam of 300mm, and such lens are easy to process with existing process equipment, and cost is also lower.
Following surface analysis is under above-mentioned design parameter, and the measured angular range Theta of present device and measured angular precision d θ carry out detailed comparison with the measurement range and the measuring accuracy of existing Hartmann wave front sensor simultaneously.
The computing formula of measured angular range Theta is:
The computing formula of measured angular precision d θ is:
It is as shown in the table to draw measured angular range Theta and the measured angular precision d θ of present device under the different designs scheme by the following formula computing formula:
In specific embodiments, employing be the systematic parameter of scheme one, if change the focal length of lens into 600mm, then can realize more high-precision measurement.
In existing infrared Hartmann wave front sensor, the CCD camera highest resolution that can access be 512 * 512 pixels, pixel size is 20um.As be divided into 30 * 30 sub-aperture arrays; Account for 16 * 16 pixels in each sub-aperture; The linear measurement precision is 1/10pix; It is 1m that the microlens array focal length amplifies the back combined focal length through beam-expanding system, so is 0.32mrad through the measured angular scope that above-mentioned formula can calculate infrared Hartmann wave front sensor, and the measured angular precision is 2urad.As be divided into 60 * 60 sub-aperture arrays, and accounting for 8 * 8 pixels in each sub-aperture, the measured angular scope that calculates infrared Hartmann wave front sensor is 0.16mrad, the measured angular precision is 2urad.Through last table analysis, contrast present device and existing infrared Hartmann wave front sensor measuring accuracy and measured angular scope can find out obviously that apparatus of the present invention are bigger than general infrared Hartmann wave front sensor field range, and measuring accuracy is high.And the infrared Hartmann wave front sensor under identical measurement bore is owing to need the complicated beam system that contracts, and wave front detector is longer than the present invention system, and is heavier.The present device volume is smaller and more exquisite, uses more flexibly, so apparatus of the present invention have more application prospects.
As shown in Figure 5 by the spliced array of infrared PSD device, the PSD array is corresponding one by one with focusing lens array.Four current signals of each infrared PSD detector output are made as I respectively
A, I
B, I
C, I
D, the facula mass center coordinate and the spot intensity I that then detect are:
Calibrate the center-of-mass coordinate x of infrared each sub-hot spot of PSD array with the standard directional light
I0, y
I0As measuring basis, each sub-facula mass center of infrared laser light beam of actual measurement zonal aberration is x
i, y
iThen each facula mass center side-play amount of causing of wave front aberration is:
dx＝x
i-x
i0，dy＝y
i-y
i0
Go up hot spot centroid motion x through each infrared PSD
i, y
i, can restore algorithm or Zernike pattern with the zone and restore algorithm computation and go out the wave front aberration size of incident laser beam and the wavefront variation information in the time frequency domain.If restore wavefront error with field method; Can set up in this sub-aperture of expression the relation equation between the Wave-front phase on centroid motion and the adjacent measurement points for each sub-aperture; Can set up 2m centroid offset equation for the m sub-aperture; Obtain the wavefront error of n tested point through solving an equation, general n constitutes a Simultaneous Equations less than 2m so these equations, and this system of equations can be expressed as the form of matrix:
S＝AW
Wherein S is the facula mass center side-play amount of 2m unit, and W is the Wave-front phase vector of n unit, and A is the matrix of coefficients of 2m * n, the wavefront slope in its each corresponding sub-aperture of element representation and the relation between the drive point Wave-front phase.Therefore the value of many elements of A matrix is zero, and promptly the A matrix is a sparse matrix, has set up after the matrix A, just can obtain its inverse matrix A+ with various linear algebra methods, thereby obtain restoring wavefront:
W＝A+S
According to each sub-aperture spot centroid offset S that device measuring obtains, just can calculate the wavefront error vector W on each sub-aperture location, Here it is restores the ultimate principle of wavefront error with field method.Since consistent with traditional Hartmann wave front sensor wave front restoration method, be not described in detail in this.
Because infrared PSD array can bring translation error and coordinate axis rotation error between each infrared SPD in manufacturing process.In data processing, to demarcate and revise.
Through the variation of energy in time domain that each PSD goes up hot spot, overall intensity distribution that calculates the incident laser light beam that can be rough and the information such as Strength Changes in the time frequency domain.
In sum; No matter slave unit volume, weight still are measuring accuracy, measurement range; The present invention has remarkable advantages than existing Hartmann wave front sensor, and the Beam Wave-Front that not only can be applied to various outfield experiments and infrared laser light beam is flexibly measured, and also can be used for the optical field that atmospheric turbulence correction etc. is had relatively high expectations to the ADAPTIVE OPTICS SYSTEMS calibration capability; If use other sensor devices instead; And cooperate to change the material and the coating process of lens, present device can be extended to visible light wave range, in infrared or high IR wave band, therefore have very application prospects.
Claims (3)
1. based on the heavy caliber high speed infrared laser measuring device for measuring of PSD array, it is characterized in that comprising: focusing lens array (1), infrared PSD array (2), hyperchannel pre-amplifier (3), data acquisition storer (4) and data handling machine (5); It is that the square condenser lens splicing of 0.01m-0.02m is formed that said focusing lens array (1) adopts by a series of bores; Can directly cut apart focusing to the infrared laser light beam between the 0.3m-1m; The focal beam spot direct imaging is to infrared PSD array (2), and infrared PSD array (2) is exported spot array location coordinate information and the strength information after focusing on; By data acquisition storer (4) high speed storing, handle via data handling machine (5) and calculate by the data of storage after hyperchannel pre-amplifier (3) signal amplifies for said information, and four current signals of each infrared PSD detector output are made as I respectively
A, I
B, I
C, I
D, the facula mass center coordinate and the spot intensity I that then detect are:
Calibrate the center-of-mass coordinate x of infrared each sub-hot spot of PSD array with the standard directional light
I0, y
I0As measuring basis, each sub-facula mass center of infrared laser light beam of actual measurement zonal aberration is x
i, y
i, then each facula mass center side-play amount of causing of wave front aberration is:
dx＝x
i-x
i0，dy＝y
i-y
i0
Go up hot spot centroid motion x through each infrared PSD
i, y
i, can restore algorithm or Zernike pattern with the zone and restore algorithm computation and go out the wave front aberration size of incident laser beam and the wavefront variation information in the time frequency domain.
2. the heavy caliber high speed infrared laser measuring device for measuring based on the PSD array according to claim 1; It is characterized in that: it is that the square condenser lens of 0.01m-0.02m is spliced into two-dimensional array according to necessarily putting in order and forms that said focusing lens array (1) adopts by a series of bores, directly the infrared laser light beam between the 0.3m-1m is carried out focusing on formation focal beam spot array respectively by single square condenser lens.
3. the heavy caliber high speed infrared laser measuring device for measuring based on the PSD array according to claim 1; It is characterized in that: the quantity of said focusing lens array (1) and infrared PSD array (2) is unrestricted in theory, can measure any bigbore laser beam and can not influence the measuring accuracy and the field range of equipment.
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| CN105372624A (en) * | 2014-08-15 | 2016-03-02 | 波音公司 | System and method for array lateral effect position sensing detector |
| CN109029719A (en) * | 2018-06-25 | 2018-12-18 | 南京理工大学 | Ultraviolet photic-energy transfer detection system and its detection method based on Shack Hartmann method |
| TWI645169B (en) * | 2018-02-09 | 2018-12-21 | 國立中央大學 | Wavefront detection system and method |
| CN110487425A (en) * | 2019-08-26 | 2019-11-22 | 中国人民解放军国防科技大学 | A kind of wavefront sensing methods and its device based on defocus type light-field camera |
| CN117232785A (en) * | 2023-08-18 | 2023-12-15 | 青岛芯微半导体科技有限公司 | Device for improving optical wavefront error detection precision with controllable sub-optical path channel switch |
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Cited By (9)
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| CN105372624A (en) * | 2014-08-15 | 2016-03-02 | 波音公司 | System and method for array lateral effect position sensing detector |
| CN105372624B (en) * | 2014-08-15 | 2019-08-27 | 波音公司 | System and method for array transversal effect position sensing detector |
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| TWI645169B (en) * | 2018-02-09 | 2018-12-21 | 國立中央大學 | Wavefront detection system and method |
| CN109029719A (en) * | 2018-06-25 | 2018-12-18 | 南京理工大学 | Ultraviolet photic-energy transfer detection system and its detection method based on Shack Hartmann method |
| CN109029719B (en) * | 2018-06-25 | 2020-12-25 | 南京理工大学 | Ultraviolet light energy distribution detection system based on shack Hartmann method and detection method thereof |
| CN110487425A (en) * | 2019-08-26 | 2019-11-22 | 中国人民解放军国防科技大学 | A kind of wavefront sensing methods and its device based on defocus type light-field camera |
| CN117232785A (en) * | 2023-08-18 | 2023-12-15 | 青岛芯微半导体科技有限公司 | Device for improving optical wavefront error detection precision with controllable sub-optical path channel switch |
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