CN109387161A - A kind of auto-collimation system - Google Patents
A kind of auto-collimation system Download PDFInfo
- Publication number
- CN109387161A CN109387161A CN201811036660.XA CN201811036660A CN109387161A CN 109387161 A CN109387161 A CN 109387161A CN 201811036660 A CN201811036660 A CN 201811036660A CN 109387161 A CN109387161 A CN 109387161A
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- China
- Prior art keywords
- auto
- array ccd
- area array
- reflecting mirror
- ccd detector
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The present invention relates to technical field of optical precision measurement to provide a kind of auto-collimation system for the existing autocollimator resolution ratio deficiency low with measurement accuracy.Auto-collimation system includes area array CCD detector, and the laser light source, two-dimentional indication grating, beam splitter, object lens and the reflecting mirror that set gradually from left to right along horizontal optical axis；The light beam of laser light source transmitting illuminates indication grating, and light beam is irradiated on reflecting mirror through beam splitter beam splitting, then after object lens collimate；It turns back back through reflecting mirror and reflexes to area array CCD detector through beam splitter again through the light beam of object lens, longitudinal Moire fringe is generated on area array CCD detector and be imaged.
Description
Technical field
The present invention relates to technical field of optical precision measurement, and in particular to a kind of auto-collimation system.
Background technique
Angle measurement is the important component of measuring science, and the measurement of minute angle is in Precision Machining, aerospace, logical
Many fields such as news and scientific research are all extremely important and act on.Autocollimator be in small angle measurement very
Important measuring instrument since it has many advantages, such as that non-contact, precision is high, measurement range is wide and easy to use, thus obtains
It is widely applied.
The resolution ratio of auto-collimation system depends on the resolution ratio of imaging detector and the resolution ratio of optical system.Imaging detection
The resolution ratio of device is determined by detector itself Pixel size and pixel quantity；The resolution ratio of optical system is (main by optical element
Various relationship eyeglasses) the factors such as design, surface quality determine.
Traditional autocollimator uses direct Detection Method, by that will be located at illuminated target on the focal plane of collimation lens rear portion
Infinity is projected, and is reflected by reflecting mirror, reflected light wave is finally received by light sensation receiver.Due to traditional autocollimatic
Minor change between the optical axis and mirror angle of straight instrument can cause a deviation, this deviation can be final logical by Instrument measuring
The low-angle that reflecting mirror turns over can be acquired by crossing calculation formula conversion.
But the light sensation receiver and optical system of traditional autocollimator largely limit its resolution ratio and measurement essence
Degree is unable to satisfy space flight, the accurate industrial measurement demand to minute angle.
Summary of the invention
The purpose of the present invention is overcoming the shortcomings of that existing autocollimator resolution ratio is low with measurement accuracy, and provide a kind of autocollimatic
Direct line system, the amplification principle for generating longitudinal Moire fringe is superimposed using two-dimensional grating, can effectively improve autocollimator optical system
Resolution ratio, improving measurement accuracy.
To achieve the above object, present invention provide the technical scheme that a kind of auto-collimation system, is characterized in that,
Including area array CCD detector, and set gradually along horizontal optical axis laser light source, two-dimentional indication grating, beam splitter, object lens and
Reflecting mirror；The surface of determinand is arranged in reflecting mirror, rotates together that angle change occurs with determinand；Laser light source transmitting
Light beam illuminate two-dimentional indication grating, light beam is irradiated on reflecting mirror through beam splitter beam splitting, then after object lens collimate；Through reflecting mirror
It turns back back and reflexes to area array CCD detector through beam splitter again through the light beam of object lens, generated on area array CCD detector longitudinal
Moire fringe is simultaneously imaged.When reflecting mirror rotates an angle, the longitudinal direction that area array CCD detector and two-dimentional indication grating generate is not
That move of stripe；The mobile message of longitudinal Moire fringe and the variable quantity of mirror angle are corresponding, realize minute angle based on this
Measurement.
Further, above-mentioned laser light source is semiconductor laser.
Further, above-mentioned beam splitter and horizontal optical axis angle at 45 °.
Further, above-mentioned object lens are long-focus lens, and long-focus refers to that focal length is greater than 85mm.
The working principle of the invention:
Present invention introduces longitudinal Moire fringe, the moving direction of indication grating, entire Moire fringe region moving direction,
And the moving direction of Moire fringe is consistent.
Traditional single slit is replaced with two-dimentional indication grating, two-dimentional indication grating is imaged on area array CCD detector, face battle array
Ccd detector is used as two-dimensional scale grating simultaneously, can be incited somebody to action by the variation that two two-dimensional gratings are superimposed the Moire fringe to be formed
Imaging displacement resolution ratio is increased to sub-pixed mapping, and then angular resolution is increased to Millisecond.
Compared with prior art, the invention has the advantages that
1, auto-collimation system provided by the invention, longitudinal Moire fringe is introduced into optical path, with two-dimentional indication grating generation
For traditional single slit, it is imaged on area array CCD detector.Area array CCD detector is used as two-dimensional scale grating simultaneously, by with two
Dimension indication grating is superimposed to form two-dimentional Moire fringe, and Moire fringe amplifies amount of movement in optical path, the mobile quantitative change of amplification
Imaging displacement resolution ratio can be increased to sub-pixed mapping by change, and then angular resolution is increased to Millisecond, effectively increase optics
The resolution ratio and measurement accuracy of system.
2, the present invention is using two-dimentional indication grating and two-dimensional scale grating (area array CCD detector), in second dimension
Each column pixel can read one group of valid data, and the characteristics of due to two-dimentional Moire fringe, between data there are it is small,
Regular phase difference.Data geometric multiple increase, and by the calculation process to mass data, can find accurately in Moire fringe
The heart.Since valid data are equal to the scribing line quantity of grating, the scale of construction of data is sufficiently large, still can be with when external interference is more violent
Moire fringe center is calibrated, signal-to-noise ratio is substantially reduced, improves measurement accuracy.
3, the present invention does not improve the precision of angle measurement merely with Moire fringe amplification principle, and due to using face battle array
Ccd detector equivalent two-dimensional scale grating, simplifies system structure to greatest extent, so that system structure is succinct, compact, adjustment side
Just；Meanwhile (the smaller price of pixel effective area is got over because area array CCD detector unit pixel effective area can further decrease
It is low), substantially reduce manufacturing cost.
Detailed description of the invention
Fig. 1 is light path schematic diagram of the auto-collimation system of the present invention in initial position α=0；
Fig. 2 is light path schematic diagram of the auto-collimation system of the present invention in α > 0.
Each label is described as follows in figure:
1-laser light source, 2-two-dimentional indication gratings, 3-beam splitters, 4-object lens, 5-reflecting mirrors, 6-area array CCDs are visited
Survey device.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.
A kind of auto-collimation system as shown in Figure 1 and Figure 2, including area array CCD detector 6, and successively set along horizontal optical axis
Laser light source 1, two-dimentional indication grating 2, beam splitter 3, object lens 4 and the reflecting mirror 5 set；Wherein, laser light source 1 is semiconductor laser
Device.Beam splitter 3 and horizontal optical axis angle at 45 °.Object lens 4 are long-focus lens.
The surface of determinand is arranged in reflecting mirror 5, rotates together that angle change occurs with determinand；Laser light source 1
The light beam of transmitting illuminates two-dimentional indication grating 2, and light beam is irradiated on reflecting mirror 5 through 3 beam splitting of beam splitter, then after the collimation of object lens 4；
It turns back back through reflecting mirror 5 and reflexes to area array CCD detector 6 through beam splitter 3 again through the light beam of object lens 4, detected in area array CCD
Longitudinal Moire fringe is generated on device 6 and is imaged.
Fig. 1 is light path schematic diagram of the present embodiment auto-collimation system in initial position α=0.
As shown in Fig. 2, when reflecting mirror 5 rotates an angle [alpha], the longitudinal direction of area array CCD detector 6 and indication grating generation
Moire fringe is mobile；The mobile message of longitudinal Moire fringe is corresponding with the variable quantity of 5 angle of reflecting mirror, realizes small angle based on this
The measurement of degree.
The pixel of area array CCD detector is divided equally, and each pixel spacing, Pixel size is all equal, respectively in two sides in length and breadth
It is uniformly arranged n pixel imaging upwards.When n pixel imaging, as imaging detector；When not being imaged, it is equivalent to two-dimensional transmission
Grating.
It is zero degree that two-dimentional indication grating and area array CCD detector (two-dimensional scale grating), which are stacked angle, in both direction in length and breadth
Upper indication grating number and detector picture dot number all lack one, pitch and the area array CCD detector pixel of two-dimentional indication grating
Size numerically has fine difference.
Two-dimentional indication grating and area array CCD detector (two-dimensional scale grating) effect generate longitudinal Moire fringe, More's item
The moving direction in line region is consistent with grating line direction.When indication grating on two-dimensional scale grating one two dimension of transverse shifting
When the pitch of scale grating, one width of Moire fringe transverse shifting；When indication grating on two-dimensional scale grating transverse shifting
Distance when being less than the pitch of two-dimensional scale grating, less than one width of Moire fringe transverse shifting, but mobile distance and refer to
Show that the mobile distance of grating is directly proportional.
The pitch of two-dimentional indication grating is denoted as d1；The size of area array CCD detector pixel (pitch of two-dimensional scale grating)
Be denoted as d2, numerically d1 and d2 very close to.
The period of longitudinal Moire fringe is D,M is the difference of two pieces of grating line numbers within the scope of Moire fringe
Value.
Moire fringe width D is d2Times, i.e. the enlargement ratio of Moire fringe is
As can be seen from the above equation, when d1 and d2 difference very little, enlargement ratio can be very big.Therefore, in imaging detector
In the case that resolution ratio is certain, compared to the direct Detection Method of traditional autocollimator, the moving distance for detecting Moire fringe will be big
It is big to improve systemic resolution.
When autocollimator zero angle, the location of indication grating left margin is b1 pixel, and Moire fringe dark fringe is not away from
The distance of your striped left margin is a1 pixel.After reflecting mirror turns over an angle [alpha], indication grating is as locating for left margin
Position is b2 pixel, and distance of the dark fringe away from left margin is a2 pixel.
Then corner α can be calculated as follows:
In formula, a is Pixel size, and f is objective focal length.
The measurement range of corner α depend on indication grating and two-dimensional scale grating width is poor and the focal length of lens, vacation
If the length of indication grating is D1, the length of two-dimensional scale grating is D2, then measurable angular range is
Claims (4)
1. a kind of auto-collimation system, it is characterised in that: including area array CCD detector (6), and along horizontal optical axis from left to right according to
The laser light source (1) of secondary setting, two-dimentional indication grating (2), beam splitter (3), object lens (4) and reflecting mirror (5)；
The light beam of laser light source (1) transmitting illuminates two-dimentional indication grating (2), and light beam is through beam splitter (3) beam splitting, then through object lens (4)
It is irradiated to after collimation on reflecting mirror (5)；It turns back back through reflecting mirror (5) and is reflected again through beam splitter (3) through the light beam of object lens (4)
To area array CCD detector (6), longitudinal Moire fringe is generated on area array CCD detector (6) and is imaged.
2. a kind of auto-collimation system according to claim 1, it is characterised in that: the laser light source (1) is swashed for semiconductor
Light device.
3. a kind of auto-collimation system according to claim 1 or 2, it is characterised in that: the beam splitter (3) and horizontal optical axis
Angle at 45 °.
4. a kind of auto-collimation system according to claim 3, it is characterised in that: the object lens (4) are long-focus lens.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811036660.XA CN109387161A (en) | 2018-09-06 | 2018-09-06 | A kind of auto-collimation system |
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| CN201811036660.XA CN109387161A (en) | 2018-09-06 | 2018-09-06 | A kind of auto-collimation system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738167A (en) * | 2019-03-05 | 2019-05-10 | 中国工程物理研究院流体物理研究所 | A kind of the two-dimensional line density measuring method and system of grating |
| CN111174733A (en) * | 2020-01-16 | 2020-05-19 | 西安中科微星光电科技有限公司 | Micro-angle detection device and method based on autocollimator |
| CN113029008A (en) * | 2021-04-27 | 2021-06-25 | 重庆理工大学 | Detection method based on moire fringes and application of detection method to autocollimator |
| CN113029006A (en) * | 2021-04-27 | 2021-06-25 | 重庆理工大学 | Detection device and detection method based on moire fringes |
| CN114111570A (en) * | 2021-11-01 | 2022-03-01 | 广东亚微伽科技有限公司 | Two-dimensional autocollimator and image positioning calculation method and device based on same |
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| CN1740742A (en) * | 2005-09-13 | 2006-03-01 | 中国科学院光电技术研究所 | Optical grating photoelectric self-collimator |
| US7173715B2 (en) * | 1999-06-18 | 2007-02-06 | Kla-Tencor Corporation | Reduced coherence symmetric grazing incidence differential interferometer |
| CN101126630A (en) * | 2007-09-25 | 2008-02-20 | 北京交通大学 | Step height on-line measuring system using optical fiber grating and wavelength-division multiplex technology |
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| US6472658B2 (en) * | 1997-12-10 | 2002-10-29 | Dr. Johannes Heidenhain Gmbh | Photoelectric position measuring system that optimizes modulation of a scanning device and the intensity of a reference mark signal |
| US7173715B2 (en) * | 1999-06-18 | 2007-02-06 | Kla-Tencor Corporation | Reduced coherence symmetric grazing incidence differential interferometer |
| CN1740742A (en) * | 2005-09-13 | 2006-03-01 | 中国科学院光电技术研究所 | Optical grating photoelectric self-collimator |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109738167A (en) * | 2019-03-05 | 2019-05-10 | 中国工程物理研究院流体物理研究所 | A kind of the two-dimensional line density measuring method and system of grating |
| CN111174733A (en) * | 2020-01-16 | 2020-05-19 | 西安中科微星光电科技有限公司 | Micro-angle detection device and method based on autocollimator |
| CN111174733B (en) * | 2020-01-16 | 2022-07-19 | 西安中科微星光电科技有限公司 | Micro-angle detection device and method based on autocollimator |
| CN113029008A (en) * | 2021-04-27 | 2021-06-25 | 重庆理工大学 | Detection method based on moire fringes and application of detection method to autocollimator |
| CN113029006A (en) * | 2021-04-27 | 2021-06-25 | 重庆理工大学 | Detection device and detection method based on moire fringes |
| CN113029006B (en) * | 2021-04-27 | 2022-09-30 | 重庆理工大学 | Detection device and detection method based on moire fringes |
| CN114111570A (en) * | 2021-11-01 | 2022-03-01 | 广东亚微伽科技有限公司 | Two-dimensional autocollimator and image positioning calculation method and device based on same |
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Application publication date: 20190226 |