CN109738167A - A kind of the two-dimensional line density measuring method and system of grating - Google Patents
A kind of the two-dimensional line density measuring method and system of grating Download PDFInfo
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Abstract
The invention discloses the two-dimensional line density measuring methods and system of a kind of grating, in the system, in the optical path for the laser that shrink beam collimator, one-dimensional π position photo, polarizing beam splitter mirror, quarter wave plate, two pieces of plane mirrors and electronic two-dimension translational platform are successively set on laser transmitter projects；Biplane reflecting mirror is arranged on electric rotary table；Grating to be measured is placed on electronic two-dimension translational platform, and laser is irradiated to grating surface to be measured after shrink beam collimator, one-dimensional π position photo, polarizing beam splitter mirror, quarter wave plate and two pieces of plane mirrors；Electric rotary table drives biplane reflecting mirror to return to light along original optical path for rotating, and two pieces of plane mirrors, quarter wave plate, polarizing beam splitter mirror, focus lamp and ccd detector are set gradually in the optical path of return.The present invention can be realized different sides type, different line density grating two-dimentional line density high-acruracy survey.
Description
Technical field
The present invention relates to spectral technique field, the two-dimensional line density measuring method and system of especially a kind of grating.
Background technique
Grating is a kind of important beam splitter, in miniature spectrometer, synchrotron radiation and free-electron laser monochromator
It has a wide range of applications.Especially varied line-space grating is widely used the application range for further having expanded grating.Line density ginseng
Number is an important parameter index of grating, and the spectroscopic imaging of grating is directly affected for Line Density of Varied-Line-Space Gratings parameter
Energy.
Common grid stroke density measuring method mainly have interferometry, Moire fringe technique, long-range face type instrument mensuration and
Diffraction approach.Wherein interferometry and Moire fringe technique measurement accuracy are low, and long-range face type instrument mensuration is needed using long-range face type instrument,
It involves great expense, is not suitable for being widely used.It is measured using grating diffration principle, higher measurement accuracy can be obtained, together
When the scope of application also greatly increase.Its measuring principle of traditional diffraction approach is that diffraction light is generated on grating using laser irradiation,
A kind of method is to make zero order light and first-order diffraction light backtracking by electric rotary table rotating shutter, records electric rotary table
Angle position substitutes into grating equation sin (α)+sin (β)=mn λ, and wherein α is incidence angle, and β is the angle of diffraction, and α=β, m=1 are to spread out
Level is penetrated, λ is optical maser wavelength, and the line density that the grating point can be calculated is n=2sin (α)/λ, and this method is inherently present
Measurement point deviates the error of turntable center when grating rotates, and the precision of test macro is influenced, especially to the survey of varied line-space grating
Accuracy of measurement influence is bigger, while this method is unable to measure the grating of high linear density, limits use scope.Another method is to adopt
With the laser of two different wave lengths, rotate one piece of plane mirror by electric rotary table makes the level-one of zero order light and two wavelength respectively
Diffraction light backtracking measures the level-one light of two wavelength and the angle δ of zero order light respectively1And δ2, by equation group sin (α)+
sin(-α-δ1)=mn λ1, sin (α)+sin (- α-δ2)=mn λ2The line density of grating is solved, wherein λ1And λ2Respectively laser wave
Long, there are collimating errors for two lasers, influence the precision of test macro.
Summary of the invention
The technical problems to be solved by the present invention are: in view of the above problems, the two-dimensional line for providing a kind of grating is close
Measurement method and system are spent, is in the collimated light of dark fringe at center by modulation of source by shrink beam collimating mirror and one-dimensional π position photo
Source, and on the basis of dark fringe center, to inhibit the shake bring measurement error of light source.Rotation biplane reflecting mirror makes respectively
It obtains incident light, 0 grade of diffraction light and 1 grade of diffraction light to return along incident direction, the line for going out grating according to the differential seat angle inverse measured is close
Degree, while off-axis error is eliminated, improve measurement accuracy.
The technical solution adopted by the invention is as follows:
A kind of two-dimentional line density measurement system of grating, including laser emitter, shrink beam collimator, one-dimensional π position photo, partially
Shake beam splitter, quarter wave plate, two pieces of plane mirrors, biplane reflecting mirror, electric rotary table, electronic two-dimension translational platform, focus lamp
And ccd detector；Shrink beam collimator, one-dimensional π position photo, polarizing beam splitter mirror, quarter wave plate, two pieces of plane mirrors, biplanes are anti-
It penetrates in the optical path for the laser that mirror and electronic two-dimension translational platform are successively set on laser transmitter projects；Biplane reflecting mirror and electronic
Two-dimension translational platform is arranged on electric rotary table；Grating to be measured is placed on electronic two-dimension translational platform, laser transmitter projects
Laser is modulated after shrink beam collimator shrink beam collimation by one-dimensional π position photo, is irradiated to using two pieces of plane mirrors
Grating surface to be measured generates the diffraction light of different secondary；Electric rotary table drives biplane reflecting mirror for rotating, and makes light to be measured
The incident lights of grid or different secondary diffraction lights are returned along original optical path, and successively after two pieces of plane mirrors using
Quarter wave plate becomes S polarized light, and polarizing beam splitter mirror, focus lamp and ccd detector are set gradually in the optical path of S polarized light.
Further, the laser center of the one-dimensional π position photo, polarizing beam splitter mirror and quarter wave plate and laser transmitter projects
Wavelength is corresponding.
Further, the position of two pieces of plane mirrors and angle are adjustable.
Further, the depth of parallelism of two planes of reflection of the biplane reflecting mirror is better than 2 ".
Further, the electric rotary table being capable of 360 ° of continuous rotations.
Further, the electric rotary table is provided with angle feed-back device.
Further, the horizontal direction of the electronic two-dimension translational platform continuously moves within the scope of 0~200mm, vertical direction 0
It is continuously moved within the scope of~50mm.
Further, the electronic two-dimension translational platform is horizontally and vertically provided with position feedback device.
A kind of two-dimensional line density measuring method of grating, is surveyed using the two-dimentional line density measurement system of above-mentioned grating
Amount, specifically comprises the following steps:
Step 1, the laser of laser transmitter projects passes through one-dimensional π position photo, polarization after shrink beam collimator shrink beam collimation
After beam splitter, quarter wave plate and two pieces of plane mirrors, it is irradiated to grating surface to be measured, and generate the diffraction light of different levels；
Step 2, electric rotary table is rotated, biplane reflecting mirror is gone to the position perpendicular to grating incidence light to be measured, is made
Incident light is returned along original optical path, and successively after two pieces of plane mirrors, quarter wave plate, polarizing beam splitter mirrors, line focus mirror is poly-
Coke arrives ccd detector, the center of hot spot dark fringe on ccd detector is recorded, as base position；
Step 3, electric rotary table is rotated, biplane reflecting mirror is gone to the position of 1 grade of diffraction light of grating to be measured, makes 1 grade
Diffraction light is returned along original optical path, and successively after two pieces of plane mirrors, quarter wave plate, polarizing beam splitter mirrors, line focus mirror is poly-
Coke arrives ccd detector, observes the center of hot spot dark fringe on ccd detector, when the center of hot spot dark fringe is mobile
When to base position in step 2, the angle, θ of record electric rotary table rotation at this time1；
Step 4, electric rotary table is rotated, biplane reflecting mirror is gone to the position of 0 grade of diffraction light of grating to be measured, makes 0 grade
Diffraction light is returned along original optical path, and successively after two pieces of plane mirrors, quarter wave plate, polarizing beam splitter mirrors, line focus mirror is poly-
Coke arrives ccd detector, observes the center of hot spot dark fringe on ccd detector, when the center of hot spot dark fringe is mobile
When to base position in step 2, the angle, θ of record electric rotary table rotation at this time2；
Step 5, the line density of the tested point on grating to be measured is calculated:
(1) incident angle α=θ of the tested point of grating to be measured is calculated2/ 2, angle of diffraction β=θ2/2-θ1；
(2) incident angle α and angle of diffraction β are substituted into grating equation sin (α)+sin (β)=mn λ, obtains being somebody's turn to do for grating to be measured
The line density size of tested point are as follows:
1/λ×[sin(θ2/2)+sin(θ2/2-θ1)], wherein λ is the central wavelength of the laser of laser transmitter projects；
Step 6, the mobile grating to be measured of electronic two-dimension translational platform is controlled, and repeats step 2-5, is completed on grating to be measured
The line density of different tested points measures.
Further, in step 1, two pieces of plane mirrors is adjusted, are made in the incident light beam strikes of grating to be measured to its meridian plane,
Make 40 °~60 ° of incidence angle simultaneously.
In conclusion by adopting the above-described technical solution, the beneficial effects of the present invention are:
Grating two-dimensional line density measurement method and system proposed by the present invention are applied widely, and measurement accuracy is high, stability
It is good, can be realized different sides type, different line densities grating two-dimentional line density high-acruracy survey.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the structural schematic diagram of the two-dimentional line density measurement system of grating of the invention.
Detailed description of the invention: 1- laser emitter, 2- shrink beam collimator, the one-dimensional π position photo of 3-, 4- polarizing beam splitter mirror, 5-1/4 wave
Piece, two pieces of plane mirrors of 6-, 7- biplane reflecting mirror, 8- electric rotary table, the electronic two-dimension translational platform of 9-, 10- grating to be measured,
11- focus lamp, 12-CCD detector.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention, i.e., described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is logical
The component for the embodiment of the present invention being often described and illustrated herein in the accompanying drawings can be arranged and be designed with a variety of different configurations.
Therefore, claimed invention is not intended to limit to the detailed description of the embodiment of the present invention provided in the accompanying drawings below
Range, but be merely representative of selected embodiment of the invention.Based on the embodiment of the present invention, those skilled in the art are not having
Every other embodiment obtained under the premise of creative work is made, shall fall within the protection scope of the present invention.
Feature and performance of the invention are described in further detail with reference to embodiments.
Embodiment 1
The two-dimentional line density measurement system for a kind of grating that present pre-ferred embodiments provide, as shown in Figure 1, including laser
Transmitter 1, shrink beam collimator 2, one-dimensional π position photo 3, polarizing beam splitter mirror 4, quarter wave plate 5, two pieces of plane mirrors 6, biplane
Reflecting mirror 7, electric rotary table 8, electronic two-dimension translational platform 9, focus lamp 11 and ccd detector 12 (laser beam analyzer)；Shrink beam is quasi-
Straight device 2, one-dimensional π position photo 3, polarizing beam splitter mirror 4,5, two pieces of plane mirrors 6 of quarter wave plate and electronic two-dimension translational platform 9 are successively
It is arranged in the optical path of the laser of the transmitting of laser emitter 1；Biplane reflecting mirror 7 is arranged on electric rotary table 8；Grating to be measured
10 are placed on electronic two-dimension translational platform 9, laser emitter 1 emit laser through shrink beam collimator 2, one-dimensional π position photo 3, partially
It shakes after beam splitter 4, quarter wave plate 5 and two pieces of plane mirrors 6, is irradiated to 10 surface of grating to be measured, generate the diffraction of different secondary
Light；Electric rotary table 8 drives biplane reflecting mirror 7 for rotating, and makes the incident light or different secondary diffraction of grating 10 to be measured
Light is returned along original optical path, and two pieces of plane mirrors 6, quarter wave plate 5, polarization point are set gradually in the optical path of return
Beam mirror 4, focus lamp 11 and ccd detector 12.
Wherein, the laser that the one-dimensional π position photo 3, polarizing beam splitter mirror 4 and quarter wave plate 5 and laser emitter 1 emit
Central wavelength is corresponding.
Wherein, the position of two pieces of plane mirrors 6 and angle are adjustable, for changing the incident light of grating 10 to be measured
Angle obtain optimal measurement accuracy to adapt to the grating of different line densities.
Wherein, the depth of parallelism of two planes of reflection of the biplane reflecting mirror 7 is better than 2 ", to guarantee measurement accuracy.
Wherein, the electric rotary table 8 can 360 ° of continuous rotations, and angle feed-back device is provided with, convenient for directly obtaining
Rotational angle data are taken, without manual measurement, angle feed-back device can be using usual means such as angular transducers.
Wherein, the horizontal direction of the electronic two-dimension translational platform 9 continuously moves within the scope of 0~200mm, vertical direction 0
It is continuously moved within the scope of~50mm.Also, the electronic two-dimension translational platform 9 to be horizontally and vertically provided with position anti-
Device is presented, convenient for directly acquiring the displacement data for rotating grating 10 to be measured, without manual measurement, position feedback device can be adopted
With usual means such as displacement sensors.
It is illustrated below by way of the measurement method to the two-dimentional line density measurement system based on above-mentioned grating:
The central wavelength that the laser of the transmitting of laser emitter 1 is arranged is 532nm, and diameter is about 1.5mm；Shrink beam collimator 2
Pantograph ratio be 5；The resolution ratio of electric rotary table 8 is 0.174 μ rad；The resolution ratio of electronic two-dimension translational platform 9 is 0.0025mm；
The focal length of focus lamp 11 is 50mm；Ccd detector 12 is face battle array, resolution ratio 1392 × 1040,4.65 μ m of Pixel Dimensions, 4.65 μ
M, response range 350-1310nm.
The measurement method specifically comprises the following steps:
Step 1, the laser diameter that laser emitter 1 emits is about 1.5mm, straight after 5 times of 2 shrink beams of shrink beam collimator collimate
Diameter is about 0.3mm, and the one-dimensional π position photo 3 through 532nm is modulated to form the intermediate light beam for dark fringe, then passes through 532nm
Polarizing beam splitter mirror 4 after only P-polarized light pass through, P-polarized light becomes circularly polarized light using the quarter wave plate 5 of 532nm, adjustment
Two pieces of plane mirrors 6 make in incident light beam strikes to its meridian plane of the circularly polarized light as grating 10 to be measured, while making incidence angle
It is 40 °~60 °, the diffraction light of different levels is generated through grating 10 to be measured；
Step 2, electric rotary table 8 is rotated, biplane reflecting mirror 7 is gone to the position perpendicular to 10 incident light of grating to be measured
It sets, the incident light of grating 10 to be measured is made substantially to beat the center in biplane reflecting mirror 7, so that incident light be made to return along original optical path
It returns, the light of return successively becomes S polarized light, S polarized light using the quarter wave plate of 532nm 5 after two pieces of plane mirrors 6
It is all-trans by polarizing beam splitter mirror 4 and is incident upon focus lamp 11 and focuses on ccd detector 12, record hot spot dark fringe on ccd detector 12
Center, as base position；The angle position of electric rotary table 86 is set as zero at this time.
Step 3, electric rotary table 8 is rotated, biplane reflecting mirror 7 is gone to the position of 101 grades of diffraction lights of grating to be measured, made
1 grade of diffraction light is returned along original optical path, successively becomes S polarized light using quarter wave plate 5 after two pieces of plane mirrors 6,
S polarized light focuses on ccd detector 12 through reflexing to focus lamp 11 by polarizing beam splitter mirror 4, and it is dark to observe hot spot on ccd detector 12
The center of striped records electronic rotation at this time when the center of hot spot dark fringe is moved to the base position in step 2
The angle, θ that turntable 8 rotates1；
Step 4, electric rotary table 8 is rotated, biplane reflecting mirror 7 is gone to the position of 100 grades of diffraction lights of grating to be measured, made
0 grade of diffraction light is returned along original optical path, successively becomes S polarized light using quarter wave plate 5 after two pieces of plane mirrors 6,
S polarized light focuses on ccd detector 12 through reflexing to focus lamp 11 by polarizing beam splitter mirror 4, and it is dark to observe hot spot on ccd detector 12
The center of striped records electronic rotation at this time when the center of hot spot dark fringe is moved to the base position in step 2
The angle, θ that turntable 8 rotates2；
Step 5, the line density size of the tested point on grating 10 to be measured is calculated:
(1) incident angle α=θ of the tested point of grating 10 to be measured is calculated2/ 2, angle of diffraction β=θ2/2-θ1；
(2) incident angle α and angle of diffraction β are substituted into grating equation sin (α)+sin (β)=mn λ, obtains grating 10 to be measured
The line density size of the tested point are as follows:
1/λ×[sin(θ2/2)+sin(θ2/2-θ1)], wherein the laser of λ=532nm, i.e. laser emitter 1 transmitting
Central wavelength；
Step 6, the mobile grating 10 to be measured of electronic two-dimension translational platform 9 is controlled, and repeats step 2-5, completes light to be measured
The line density measurement of different tested points is on grid 10 to get the two-dimentional linear-density distribution for arriving grating 10 to be measured.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of two-dimentional line density measurement system of grating, which is characterized in that including laser emitter, shrink beam collimator, one-dimensional π
Position photo, polarizing beam splitter mirror, quarter wave plate, two pieces of plane mirrors, biplane reflecting mirror, electric rotary table, electronic two-dimension translational
Platform, focus lamp and ccd detector；Shrink beam collimator, one-dimensional π position photo, polarizing beam splitter mirror, quarter wave plate, two pieces of plane mirrors
In the optical path for the laser for being successively set on laser transmitter projects with electronic two-dimension translational platform；Biplane reflecting mirror is arranged electronic
On turntable；Grating to be measured is placed on electronic two-dimension translational platform, and the laser of laser transmitter projects is through shrink beam collimator, one-dimensional
After π position photo, polarizing beam splitter mirror, quarter wave plate and two pieces of plane mirrors, it is irradiated to grating surface to be measured, generates different secondary
Diffraction light；Electric rotary table drives biplane reflecting mirror for rotating, and makes the incident light of grating to be measured or spreading out for different secondary
It penetrates light to return along original optical path, two pieces of plane mirrors, quarter wave plate, polarization point is set gradually in the optical path of return
Shu Jing, focus lamp and ccd detector.
2. the two-dimentional line density measurement system of grating as described in claim 1, which is characterized in that the one-dimensional π position photo, partially
Vibration beam splitter and quarter wave plate are corresponding with the laser center wavelength of laser transmitter projects.
3. the two-dimentional line density measurement system of grating as described in claim 1, which is characterized in that two pieces of plane mirrors
Position and angle it is adjustable.
4. the two-dimentional line density measurement system of grating as described in claim 1, which is characterized in that the biplane reflecting mirror
The depth of parallelism of two planes of reflection is better than 2 ".
5. the two-dimentional line density measurement system of grating as described in claim 1, which is characterized in that the electric rotary table can
360 ° of continuous rotations.
6. the two-dimentional line density measurement system of grating as described in claim 1, which is characterized in that the electric rotary table setting
Angled feedback device.
7. the two-dimentional line density measurement system of grating as described in claim 1, which is characterized in that the electronic two-dimension translational platform
Horizontal direction continuously moved within the scope of 0~200mm, continuously moved within the scope of 0~50mm of vertical direction.
8. the two-dimentional line density measurement system of grating as claimed in claim 7, which is characterized in that the electronic two-dimension translational platform
Be horizontally and vertically provided with position feedback device.
9. a kind of two-dimensional line density measuring method of grating, which is characterized in that using such as the described in any item light of claim 1-8
The two-dimentional line density measurement system of grid measures, and specifically comprises the following steps:
Step 1, the laser of laser transmitter projects passes through one-dimensional π position photo, polarization beam splitting after shrink beam collimator shrink beam collimation
After mirror, quarter wave plate and two pieces of plane mirrors, it is irradiated to grating surface to be measured, and generate the diffraction light of different levels；
Step 2, electric rotary table is rotated, biplane reflecting mirror is gone to the position perpendicular to grating incidence light to be measured, makes incidence
Light is returned along original optical path, and successively after two pieces of plane mirrors, quarter wave plate, polarizing beam splitter mirrors, line focus mirror is focused on
Ccd detector records the center of hot spot dark fringe on ccd detector, as base position；
Step 3, electric rotary table is rotated, biplane reflecting mirror is gone to the position of 1 grade of diffraction light of grating to be measured, makes 1 grade of diffraction
Light is returned along original optical path, and successively after two pieces of plane mirrors, quarter wave plate, polarizing beam splitter mirrors, line focus mirror is focused on
Ccd detector observes the center of hot spot dark fringe on ccd detector, when the center of hot spot dark fringe is moved to step
When base position in rapid 2, the angle, θ of record electric rotary table rotation at this time1；
Step 4, electric rotary table is rotated, biplane reflecting mirror is gone to the position of 0 grade of diffraction light of grating to be measured, makes 0 grade of diffraction
Light is returned along original optical path, and successively after two pieces of plane mirrors, quarter wave plate, polarizing beam splitter mirrors, line focus mirror is focused on
Ccd detector observes the center of hot spot dark fringe on ccd detector, when the center of hot spot dark fringe is moved to step
When base position in rapid 2, the angle, θ of record electric rotary table rotation at this time2；
Step 5, the line density of the tested point on grating to be measured is calculated:
(1) incident angle α=θ of the tested point of grating to be measured is calculated2/ 2, angle of diffraction β=θ2/2-θ1；
(2) incident angle α and angle of diffraction β are substituted into grating equation sin (α)+sin (β)=mn λ, this for obtaining grating to be measured is to be measured
The line density size of point are as follows:
1/λ×[sin(θ2/2)+sin(θ2/2-θ1)], wherein λ is the central wavelength of the laser of laser transmitter projects；
Step 6, the mobile grating to be measured of electronic two-dimension translational platform is controlled, and repeats step 2-5, is completed different on grating to be measured
Tested point line density measurement.
10. the two-dimensional line density measuring method of grating as claimed in claim 9, which is characterized in that in step 1, adjust two pieces
Plane mirror makes in the incident light beam strikes of grating to be measured to its meridian plane, while making 40 °~60 ° of incidence angle.
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| CN112880973A (en) * | 2021-01-13 | 2021-06-01 | 清华大学 | Device and method for improving grating period measurement precision |
| CN112880973B (en) * | 2021-01-13 | 2022-08-12 | 清华大学 | Device and method for improving grating period measurement precision |
| CN112880590A (en) * | 2021-01-20 | 2021-06-01 | 四川大学 | Modulation profile measuring system and method based on inclined focusing and rotary scanning |
| CN112880590B (en) * | 2021-01-20 | 2021-12-07 | 四川大学 | Modulation profile measuring system and method based on inclined focusing and rotary scanning |
| CN113588217A (en) * | 2021-08-03 | 2021-11-02 | 苏州康启环境科技有限公司 | Device and method for measuring density of diffraction grating |
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