CN111044260B - Microscope objective distortion testing device and testing method - Google Patents
Microscope objective distortion testing device and testing method Download PDFInfo
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- CN111044260B CN111044260B CN201911381240.XA CN201911381240A CN111044260B CN 111044260 B CN111044260 B CN 111044260B CN 201911381240 A CN201911381240 A CN 201911381240A CN 111044260 B CN111044260 B CN 111044260B
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The invention discloses a device and a method for testing the distortion of a microscope objective, wherein the device comprises: the laser confocal system comprises a light source, a collimating mirror, a spectroscope, a focusing mirror, a pinhole imaging plate, an imaging microscope objective and a CCD detector; the light beam emitted by the light source is collimated by the collimating mirror and then irradiates the spectroscope, the light beam is focused on the spherical reflector after passing through the microscope objective to be detected through refraction of the spectroscope, the light beam is reflected back to the spectroscope through the original path of the spherical reflector and then reflected to the focusing mirror through the spectroscope, the light beam is focused on the pinhole imaging plate through the focusing mirror to be subjected to pinhole imaging, and an image formed by the pinhole imaging plate is amplified by the imaging microscope objective and then received by the CCD detector. According to the invention, by introducing the laser confocal system, the measurement precision depends on the precision of the CCD detector, and compared with the traditional distortion test method, the measurement precision can be improved.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to a device and a method for testing the distortion of a microscope objective.
Background
The large-field-of-view optical system can provide efficient utilization rate, but the requirement on the distortion of the optical system is small enough due to the increase of the field of view, and especially for a high-precision system such as a microscope objective, the requirement on the distortion size is more strict, so that the requirement on a test method of the distortion of the microscope objective is more strict. At present, the distortion testing method is mainly divided into two methods, namely a precision length measuring method and a precision angle measuring method. The precise length measurement method is that a calibrated grid plate is used for imaging through a measured optical system, and the distances from target images to the center on different view field positions are measured by a precise measuring instrument. The precise angle measurement method is to make relative rotation around the optical axis by using a collimator or a measured optical system to make a star point image on an image surface be located at a specified position, and to calculate the distortion by calculating the height of the image point position and measuring the rotation angle. However, the measurement accuracy of these two test methods is low.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and solve the problem of low measurement precision of the existing microobjective distortion test method, and provides a microobjective distortion test device and a test method.
The invention provides a distortion testing device for a microscope objective, which comprises: the laser confocal system comprises a light source, a collimating mirror, a spectroscope, a focusing mirror, a pinhole imaging plate, an imaging microscope objective and a CCD detector; the light beam emitted by the light source is collimated by the collimating mirror and then irradiates the spectroscope, the light beam is focused on the spherical reflector after passing through the microscope objective to be detected through refraction of the spectroscope, the light beam is reflected back to the spectroscope through the original path of the spherical reflector and then reflected to the focusing mirror through the spectroscope, the light beam is focused on the pinhole imaging plate through the focusing mirror to be subjected to pinhole imaging, and an image formed by the pinhole imaging plate is amplified by the imaging microscope objective and then received by the CCD detector.
Preferably, the microscope further comprises a moving device for driving the spherical mirror to move, so that the light beam transmitted through the microscope objective to be measured is focused at the spherical center position of the spherical mirror.
Preferably, the device further comprises a precise turntable for driving the laser confocal system to rotate.
Preferably, the precision turret is a multi-tooth indexing table.
Preferably, the beam splitter is a polarization beam splitter prism, and the laser confocal system further comprises a quarter wave plate arranged between the microscope objective to be measured and the polarization beam splitter prism.
Preferably, the displacement measuring system is further included, and the plane mirror is used for reflecting the light beam reflected by the spherical mirror, and the displacement measuring system is used for receiving the light beam reflected by the plane mirror.
Preferably, the displacement measuring system is a laser ranging system or a DMI dual-frequency laser interferometry system.
Preferably, the laser ranging system is a single-frequency laser ranging system or a dual-frequency laser ranging system.
The invention provides a method for testing the distortion of a microscope objective, which comprises the following steps:
s1, making the collimated light beam emitted by the laser confocal system enter the micro objective to be measured;
s2, adjusting the position of the spherical reflector to make the image point formed by the micro objective to be measured coincide with the spherical center of the spherical reflector, and recording the position of the image point as y0；
S3, rotating the laser confocal system to enable the collimated light beam emitted by the laser confocal system to be incident to the microscopic objective to be measured at an angle of view omega;
s4, adjusting the position of the spherical reflector to make the image point formed by the micro objective to be measured coincide with the spherical center of the spherical reflector again, and recording the position of the image point as yω；
S5, calculating the distortion delta of the microscope objective to be measured under the field angle omega, wherein the calculation formula is as follows:
δ＝(yω-y0)-f0tanω；
wherein f is0Is the focal length of the microscope objective to be measured.
Preferably, before step S1, the method further includes the following steps:
and S0, adjusting the positions of the microobjective to be measured and the light source in the laser confocal system through the standard plane mirror, and ensuring that collimated light emitted by the laser confocal system is parallel to the optical axis of the microobjective to be measured, so that the field angle is 0.
The invention can obtain the following technical effects:
1. the invention introduces a laser confocal system, the measurement precision depends on the precision of a CCD detector, and compared with the traditional distortion test method, the invention can improve the measurement precision.
2. The measurement accuracy can be further improved by introducing a displacement measurement system.
3. The replaceable light source is used for testing the distortion of the microscope objective lens under different spectral bands.
Drawings
FIG. 1 is a schematic structural diagram of a distortion testing device for a microscope objective according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a laser confocal system according to one embodiment of the present invention;
FIG. 3 is a schematic flow chart of a method for distortion testing of a microscope objective according to one embodiment of the present invention;
fig. 4 is a response graph of a laser confocal system according to one embodiment of the invention.
Wherein the reference numerals include: the device comprises a laser confocal system 1, a light source 101, a collimating mirror 102, a spectroscope 103, a focusing mirror 104, a pinhole imaging plate 105, an imaging microscope objective 106, a CCD detector 107, a quarter-wave plate 108, a spherical reflector 2, a microscope objective 3 to be measured, a moving device 4, a precision turntable 5, a displacement measurement system 6 and a plane reflector 7.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
Referring to fig. 1 and 2, an embodiment of the present invention provides a distortion testing apparatus for a microscope objective, including: the device comprises a laser confocal system 1 and a spherical reflector 2, wherein the laser confocal system 1 is arranged in the incidence direction of a microscope objective 3 to be detected, the spherical reflector 2 is arranged on the image surface of the microscope objective 3 to be detected, and a light beam emitted by the laser confocal system 1 penetrates through the microscope objective 3 to be detected and then enters the spherical reflector 2 to be converged and then is reflected back to the laser confocal system 1 through the spherical reflector 2.
The laser confocal system 1 comprises a light source 101, a collimating mirror 102, a beam splitter 103, a focusing mirror 104, a pinhole imaging plate 105, an imaging microscope objective 106 and a CCD detector 107, wherein the light source 101, the collimating mirror 102 and the beam splitter 103 are sequentially arranged in the incident direction of the microscope objective 3 to be detected, and the focusing mirror 104, the pinhole imaging plate 105, the imaging microscope objective 106 and the CCD detector 107 are sequentially arranged on a reflected light path of the beam splitter 103.
The light source 101 is preferably a point light source, located at the focus of the collimating mirror 102, for generating a light beam.
The collimator lens 102 is used to collimate the divergent light beam emitted from the light source 10 into a parallel light beam.
The beam splitter 103 is used for emitting parallel light beams to the microscope objective 3 to be measured and reflecting the light beams reflected by the spherical reflecting mirror 2 to the focusing mirror 104.
In order to prevent interference, the spectroscope 103 is a polarization beam splitter prism, and since the polarization beam splitter prism needs to be used in cooperation with a quarter-wave plate, a quarter-wave plate 108 is disposed between the spectroscope 103 and the microscope objective 3 to be measured.
The focusing mirror 104 focuses the light beam to the pinhole imaging plate 105.
The pinhole imaging plate 105 is located on the focal plane of the focusing mirror 104, and a pinhole for pinhole imaging is opened on the pinhole imaging plate 105.
The imaging microscope objective 106 may be a low power microscope objective 106 or a high power microscope objective 106 for magnifying the image formed by the pinhole imaging plate 105.
The CCD detector 107 is located on the focal plane of the imaging microscope objective 106 and is used for receiving the image amplified by the imaging microscope objective 106 and imaging the optical signal into Airy spots.
The test light path of the microscope objective distortion test device is as follows: light emitted by a light source 101 is collimated into parallel light through a collimating mirror 102 and then irradiates onto a spectroscope 103, the parallel light irradiates onto a microscope objective 3 to be detected through the spectroscope 103 and a quarter-wave plate 108, the parallel light forms converged light after penetrating through the microscope objective 3 to be detected and focuses on a spherical reflector 2, the parallel light is recovered into the parallel light after being reflected by the spherical reflector 2, the parallel light reversely penetrates through the microscope objective 3 to be detected and the quarter-wave plate 108 and returns to the spectroscope 103, then enters a focusing mirror 104 for focusing through reflection of the spectroscope 103, is focused on a pinhole imaging plate 105 for pinhole imaging through focusing of the focusing mirror 104, and the formed image is amplified through an imaging microscope objective 106 and then received by a CCD detector 107.
In order to focus the light beam passing through the micro objective lens 3 to be measured on the spherical center of the spherical reflector 2, even if the image point of the micro objective lens 3 to be measured coincides with the spherical center of the spherical reflector 2, the micro objective lens distortion testing device provided by the embodiment of the invention further comprises a motion device 4, wherein the motion device 4 is preferably a six-axis motion device (in the prior art) and is used for driving the spherical reflector 2 to move so as to scan the image plane of the micro objective lens 3 to be measured, find the confocal position, record the position of the image point through the motion device 4, measure the displacement of the spherical reflector 2 by the motion device 4, and know the position of the image point according to the displacement.
Because the measuring precision of the movement device 4 is lower, the invention improves the measuring precision by additionally arranging the displacement measuring system 6 and the plane reflector 7 matched with the displacement measuring system to measure the displacement of the spherical reflector 2.
The displacement measuring system 6 can be a laser ranging system or a DMI dual-frequency laser interference measuring system, and the laser ranging system is a single-frequency laser ranging system or a dual-frequency laser ranging system.
In order to realize the distortion test of the microobjective 3 to be tested under different field angles, the laser confocal system 1 needs to be rotated, so the microobjective distortion test device provided by the embodiment of the invention further comprises a precise turntable 5, the laser confocal system 1 is arranged on the precise turntable 5, and the laser confocal system 1 is driven to rotate by the precise turntable 5.
The precision turntable 5 may be a precision turntable such as a multi-tooth index table, and the angle of view of the laser confocal system 1 is recorded by the precision turntable 5 when the laser confocal system 1 rotates.
Under different field angle states, the position of the image point of the microscope objective 3 to be measured on the image plane changes, the larger the field change is, the image point exceeds the field range of the laser confocal system 1, at this time, the position of the spherical reflector 2 needs to be adjusted by the motion device 4, so that the spherical center of the spherical reflector 2 coincides with the image point again, the position difference is measured twice by the motion device 4 or the displacement measurement system 6, and the field angle recorded by the precision turntable 5 is measured, and the distortion amount of the microscope objective 3 to be measured can be obtained under the condition that the focal length of the microscope objective 3 to be measured is known.
The test principle of the microscope objective distortion test device is as follows:
parallel light generated by the laser confocal system 1 directly enters the microscopic object lens 3 to be measured, the movement device 4 moves the spherical reflector 2 to scan the image surface to find the confocal position, which is recorded as y0(ii) a The laser confocal system 1 is rotated by the precise turntable 5, so that the incident light is incident to the micro object lens 3 to be measured at the angle of view omega, the movement device 4 moves the spherical reflector 2 to scan the image surface to find the confocal position, and the confocal position is recorded as yω；y0And yωCan be accurately measured by the moving device 4 or the displacement measuring system 6, the distortion δ of the measured microscope 3 at the ω field angle can be calculated by the following formula:
δ＝(yω-y0)-f0tanω
wherein f is0Is the focal length of the microscope objective 3 to be measured.
The foregoing describes in detail the structure of a microscope objective distortion testing apparatus provided in an embodiment of the present invention, and in accordance with the foregoing testing apparatus, the embodiment of the present invention further provides a method for testing the distortion of a microscope objective by using the testing apparatus.
As shown in fig. 3, the method for testing distortion of a microscope objective according to an embodiment of the present invention includes the following steps:
Before step S1, the method further includes the following steps:
s0, building a testing device according to the figures 1 and 2, fixedly installing each part according to a reference position, adjusting the positions of the micro objective 3 to be tested and the light source in the laser confocal system 1 through a standard plane mirror, and ensuring that parallel light emitted by the laser confocal system 1 is parallel to the optical axis of the micro objective 3 to be tested, so that the field angle omega is 0.
The laser confocal system 1 obtains a light intensity function after processing light intensity information, and a mathematical expression is as follows:
wherein the content of the first and second substances,
λ is the wavelength of point light source 101, and D isWidth of the effective collimated beam, f0Is the focal length of the microscope objective 3 to be measured, z is the defocusing amount of the spherical center of the spherical reflector 2, and u is the normalized displacement of z.
The response curve of the laser confocal system 1 is shown in fig. 4, the peak position of the laser confocal system accurately corresponds to the image plane position of the microscope objective 3 to be measured, and is also the spherical center position of the spherical reflector 2, and the light spot intensity at the moment is maximum.
The spherical reflector 2 is moved to the approximate position of the image surface of the microscope objective 3 to be detected through the movement device 4, the position of the spherical center of the spherical reflector 2 is judged through the light spot position of the CCD detector 107 and the shape of the confocal response curve, the RS is adjusted to enable the spherical center to be superposed with the image point of the microscope objective 3 to be detected, the light intensity of the Airy spot at the central position of the CCD detector 107 is the maximum at the moment, the confocal detection response curve has a unique peak value as shown in figure 4, and the position y of the image point at the moment is recorded through the movement device 4 or the displacement measurement system 60As the position of the image point in the central field of view.
And 3, rotating the laser confocal system 1 to enable the parallel light beams emitted by the laser confocal system 1 to enter the detected microscope 3 at the angle of view omega.
According to the requirement of measuring the angle of view, the angle of view omega of the laser confocal system 1 is recorded by the precision turntable 5 by adjusting the precision turntable 5 to change the angle of incident light irradiating the microscopic objective lens 3 to be measured.
Changing the angle of incident light irradiating the micro objective lens 3 to be measured, changing the position of the image point of the micro objective lens 3 to be measured, repeating the step 2 to ensure that the sphere center of the spherical reflector 2 is superposed with the image point again, and recording the position y of the image point at the moment through the movement device 4 or the displacement measurement system 6ωAs the position of the image point at the field angle ω.
Step 5, calculating the distortion delta of the microscope objective to be measured under the field angle omega, wherein the calculation formula is as follows:
δ＝(yω-y0)-f0tanω
wherein f is0Is the focal length of the microscope objective 3 to be measured.
And (4) repeating the steps 3 and 4 according to the requirement of the angle of field, measuring the whole field of view and calculating and recording the distortion of the corresponding field of view.
The invention can also replace the light source 101 to test the distortion of the microscope objective lens under different spectral bands.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention, and that variations, modifications, substitutions and alterations can be made to the above embodiments by those of ordinary skill in the art within the scope of the present invention.
The above embodiments of the present invention should not be construed as limiting the scope of the present invention. Any other corresponding changes and modifications made according to the technical idea of the present invention should be included in the protection scope of the claims of the present invention.
Claims (8)
1. A microscope objective distortion testing apparatus, comprising: the laser confocal system comprises a light source, a collimating mirror, a spectroscope, a focusing mirror, a pinhole imaging plate, an imaging microscope objective and a CCD detector; wherein, the light beam that the light source sent warp shine behind the collimating mirror collimation on the spectroscope, the light beam warp the refraction of spectroscope sees through the focus behind the micro objective that awaits measuring on the spherical reflector, the light beam passes through the spherical reflector original circuit reflects back the spectroscope, warp again the spectroscope reflects to the focusing mirror, the warp the focusing mirror focuses on pinhole imaging plate carries out pinhole imaging, the image that pinhole imaging plate becomes passes through after the micro objective that images enlargies passes through the CCD detector receives, the telecontrol equipment is used for the drive the spherical reflector removes, makes to see through the light beam focus of the micro objective that awaits measuring is in the centre of sphere position of spherical reflector.
2. A distortion testing apparatus for a microscope objective lens according to claim 1 wherein the precision turret is a multi-tooth indexing stage.
3. The microscope objective distortion testing device of claim 1, wherein the beam splitter is a polarization beam splitter prism, and the laser confocal system further comprises a quarter wave plate disposed between the microscope objective to be tested and the polarization beam splitter prism.
4. A microscope distortion testing device according to claim 3, further comprising a displacement measuring system and a plane mirror, wherein the plane mirror is used for reflecting the light beam reflected by the spherical mirror, and the displacement measuring system is used for receiving the light beam reflected by the plane mirror.
5. Distortion testing arrangement of a microscope objective according to claim 4, characterized in that the displacement measuring system is a laser ranging system.
6. A microscope objective distortion testing device according to claim 5, wherein the laser ranging system is a single frequency laser ranging system or a dual frequency laser ranging system.
7. A distortion testing method based on the distortion testing device of the microscope objective lens as claimed in any one of claims 1 to 6, characterized by comprising the following steps:
s1, making the collimated light beam emitted by the laser confocal system enter the micro objective to be measured;
s2, adjusting the position of the spherical reflector to make the image point formed by the micro objective to be measured coincide with the spherical center of the spherical reflector, and recording the position of the image point as y0；
S3, rotating the laser confocal system to enable collimated light beams emitted by the laser confocal system to be incident on the microobjective to be measured at an angle of view omega;
s4, adjusting the position of the spherical reflector to make the image point formed by the micro objective to be measured coincide with the spherical center of the spherical reflector again, and recording the position of the image point as yω；
S5, calculating the distortion delta of the microscope objective to be measured under the field angle omega, wherein the calculation formula is as follows:
δ＝(yω-y0)-f0tanω；
wherein f is0The focal length of the microscope objective to be measured.
8. A distortion testing method as set forth in claim 7, further comprising, before step S1, the steps of:
and S0, adjusting the positions of the microobjective to be measured and the light source in the laser confocal system through a standard plane mirror, and ensuring that collimated light emitted by the laser confocal system is parallel to the optical axis of the microobjective to be measured, so that the field angle is 0.
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| CN114858060B (en) * | 2022-03-22 | 2023-07-14 | 合肥工业大学 | Displacement sensor based on coaxial laser triangulation and microscopic imaging and application |
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