CN111982473B - Method and device for detecting and adjusting common sphere center of spherical reflector - Google Patents
Method and device for detecting and adjusting common sphere center of spherical reflector Download PDFInfo
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- CN111982473B CN111982473B CN202010845469.0A CN202010845469A CN111982473B CN 111982473 B CN111982473 B CN 111982473B CN 202010845469 A CN202010845469 A CN 202010845469A CN 111982473 B CN111982473 B CN 111982473B
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- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
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Abstract
The invention relates to a method and a device for detecting and adjusting the common sphere center of a spherical reflector.A point light source becomes parallel light through a collimating lens, and is divided into two beams of reflected light S and transmitted light P with vertical vibration directions by a polarization beam splitter prism; the transmitted light is reflected by the rear surface of the 45-degree optical rotation wafer, and is totally reflected by the polarization beam splitter prism to enter the detector as reference light after passing through the optical rotation wafer again; the transmitted light of the 45-degree optical rotation wafer is focused into a point light source through the focusing lens, the emitted spherical wave returns along the original light path after being reflected by the spherical reflector, is totally reflected by the polarization beam splitter prism after passing through the optical rotation sheet again, enters the receiver as test light to interfere with reference light, and whether the spherical reflector shares the spherical center is judged through the interference pattern and the wavefront information of the interference pattern. The invention adopts the interference pattern and the wave front information to comprehensively detect, improves the precision of the spherical center sharing of the spherical reflector, has no requirements on the caliber size of the spherical reflector and whether the spherical reflector has the same curvature radius, and has higher universality.
Description
Technical Field
The invention belongs to the field of optical detection and optical element adjustment, and particularly relates to a method for adjusting the common spherical center of two or more spherical reflectors with the same or different curvature radiuses, which is mainly applied to the adjustment of a concentric optical system.
Background
The field of optical inspection and the alignment of optical elements often requires adjustment of the optical element concentricity, such as the alignment of a spectrometer, particularly based on the two typical concentric configurations of the Offner configuration and the Dyson configuration, and requires adjustment of the spherical centers of spherical mirrors of the same or different radii of curvature. This requires a method that is universal and has high detection accuracy.
Disclosure of Invention
The technical problems of the invention are as follows: the method overcomes the defects of the prior art, provides a universal method for detecting and adjusting the common sphere center of the spherical reflectors with the same or different curvature radiuses, overcomes the defect that only local common-phase information at the splicing part of the mirror surface can be obtained by using a method for observing Newton's rings, reduces redundant energy loss by using a method for rotating the polarization direction of polarized light, and increases the utilization rate of light energy.
In order to achieve the technical purpose, the invention adopts the following technical scheme: a method for detecting the common sphere center of a spherical reflector is characterized in that: the method comprises the following steps:
1) spherical waves emitted by the point light source are converted into parallel light through the collimating lens;
2) adopting a Polarization Beam Splitter (PBS) to split parallel light into S light and P light with mutually vertical vibration directions;
3) the transmitted P light is divided into transmitted light and reflected light through the emergent surface of the 45-degree optically active wafer; the emergent surface of the 45-degree optical rotation wafer is plated with a semi-transparent semi-reflective film;
after the reflected light passes through the 45-degree optical rotation wafer again, the vibration direction is vertical to the PBS transmission direction, the reflected light is totally reflected by the PBS, enters a receiver after passing through a cross reticle and is used as reference light;
the transmission light is focused at the center of the diaphragm through the focusing lens to form divergent spherical waves; placing the spherical reflector to be detected in the divergent light beam behind the diaphragm;
4) the spherical wave returns along the original light path after being reflected by the spherical reflector to be detected, the vibration direction is vertical to the transmission direction of the PBS after passing through the 45-degree optical rotation wafer, the spherical wave is totally reflected by the PBS, and the spherical wave enters a receiver after passing through a cross reticle and is used as test light to interfere with the reference light in the step 3);
5) and 4) judging the concentric condition of the spherical reflector through the interference pattern in the step 4) and the wavefront information of the interference pattern.
The method is suitable for detecting and adjusting the common sphere center of spherical reflectors with the same or different curvature radii.
As a further improvement of the present invention, in step 1), after the laser light source is coupled into the optical fiber, the emergent light is focused on the pinhole through the focusing lens, and the light emitted from the pinhole serves as the point light source. The light emitted after the laser light source is coupled into the optical fiber is similar to a point light source, and the emergent light can be regarded as an ideal point light source after being focused by the focusing lens and filtered by the pinhole.
As a further improvement of the invention, the interference image is imaged by using a CCD, and the wavefront information of the interference pattern is detected by using a wavefront sensor.
As a further improvement of the present invention, the method further includes 5.1) adjusting the spherical mirrors with different curvature radii to be concentric based on the result of the concentric determination of the spherical mirrors, including:
5.10) shielding other spherical reflectors and reserving one spherical reflector, namely the first spherical reflector;
5.11) roughly adjusting the first spherical reflector, and adjusting the light spot reflected on the diaphragm by the first spherical reflector to be smaller;
5.12) finely adjusting the first spherical reflector to enable the reflected light spot to gradually approach the center of the diaphragm and adjust the size of the light spot to be minimum;
5.13) finely adjusting the first spherical reflector to enable the reflected light spot to coincide with the center of the diaphragm, and finding an interference pattern in the CCD receiver;
5.14) finely adjusting the first spherical reflector to ensure that the images of the cross reticle of the test light and the reference light are superposed;
5.15) replacing the CCD receiver with a wavefront sensor, and limiting a mask of the wavefront sensor in an interference area;
5.16) finely adjusting the posture of the first spherical reflector, keeping the image coincidence of the cross reticle, and enabling the defocusing amount detected by the wavefront sensor to be minimum, wherein the first spherical reflector is in a state that the center of the diaphragm is taken as the center of a sphere;
5.17) shielding the first spherical reflector, and sequentially repeating the processing of the steps 5.11) -5.16) on other spherical reflectors, namely adjusting the spherical reflectors with different curvature radii to be in a state of taking the center of the diaphragm as the center of the sphere.
As a further improvement of the present invention, the method further includes 5.2) adjusting the spherical mirrors with the same radius of curvature to be concentric based on the result of the determination of the concentricity of the spherical mirrors, including:
5.20) shielding other spherical reflectors and reserving one spherical reflector, namely the first spherical reflector;
5.21) roughly adjusting the first spherical reflector, and adjusting the light spot reflected on the diaphragm by the first spherical reflector to be smaller;
5.22) finely adjusting the first spherical reflector to enable the reflected light spot to gradually approach the center of the diaphragm and adjust the size of the light spot to be minimum;
5.23) finely adjusting the first spherical reflector to enable the reflected light spot to coincide with the center of the diaphragm, and finding an interference pattern in the CCD receiver;
5.24) finely adjusting the first spherical reflector to ensure that the image of the cross reticle of the test light and the image of the cross reticle of the reference light coincide, and the boundary of the first spherical reflector coincides with the vertical line of the image of the cross reticle of the reference light;
5.25) placing the second spherical reflector at the symmetrical position of the first spherical reflector, and finely adjusting the second spherical reflector to enable the reflected light spot to coincide with the center of the diaphragm;
5.26) fine tuning the second spherical mirror to observe an interference pattern on the CCD receiver;
5.27) finely adjusting the second spherical reflector to ensure that the image of the cross reticle is superposed with the image of the reference light cross reticle, and the boundary of the image of the second spherical reflector is superposed with the boundary of the image of the first spherical reflector;
5.28) replacing the CCD receiver with a wavefront sensor, and limiting the mask of the wavefront sensor to the area of the two spherical reflectors;
5.29) keeping the boundaries of the first spherical mirror and the second spherical mirror and the images of the respective cross reticles to coincide with the images of the cross reticles of the reference light, finely adjusting the first spherical mirror and the second spherical mirror so that the out-of-focus component of the wavefront is minimized, at which time the first spherical mirror and the second spherical mirror are co-centered and co-phased.
Further, when the number of the spherical reflectors to be measured is larger than two, the processing mode of the second spherical reflector in 5.25) -5.29) is sequentially repeated for other reflectors, and the concentric center adjustment of the spherical reflectors with the same curvature radius is realized.
Another objective of the present invention is to provide a device for detecting and adjusting the common center of a spherical reflector, which comprises a point light source, and a collimating lens, a polarization splitting prism, a 45 ° optical rotation wafer with an exit surface coated with a semi-transparent and semi-reflective film, a focusing lens and a diaphragm sequentially arranged on the optical axis of the light source in the propagation direction;
a light cross reticle and a receiver are sequentially arranged in the emergent direction of the reflected light of the optical rotation wafer;
and placing the spherical reflector to be detected in the divergent light beam behind the diaphragm, so that the light emitted from the diaphragm returns along the original light path after being reflected by the spherical reflector to be detected.
As a further improvement of the present invention, the point light source is formed of a laser light source, a focusing lens, and a pinhole; a focusing lens and a pinhole are sequentially arranged on an optical axis in the propagation direction of the laser light source, and emergent light passing through the pinhole serves as the point light source.
Further, laser emitted by the laser light source is coupled into the optical fiber and then emitted; the outgoing light enters a focusing lens.
As a further development of the invention, the receiver is a CCD or a wavefront sensor.
Compared with the prior art, the invention has the advantages that:
1) the method overcomes the defect of low applicability of the traditional method, can be applied to the common-sphere center adjustment and detection of spherical reflectors with the same curvature radius such as a spliced mirror surface and the like, and is also applied to the common-sphere center adjustment and detection of spherical reflectors with different curvature radii in a spectrometer;
2) the invention adopts the method that the polarization direction of the rotating polarized light is vertical to the transmission direction of the polarization beam splitter prism, so that the returned light wave can not pass through the polarization beam splitter prism, the light energy utilization rate is increased, and the pollution to a light source is reduced;
3) the invention can detect and adjust the posture of each mirror surface and the integral common-phase condition of the spliced mirror surfaces, and has greater superiority compared with the observation that Newton's rings at the splicing positions of the mirror surfaces can only obtain local information.
Drawings
FIG. 1: the invention discloses a schematic diagram of a device for detecting and adjusting a light path of a spherical reflector with a common spherical center.
FIG. 2: ideal interference patterns of two circular spherical reflectors with different curvature radiuses on a CCD receiver.
FIG. 3: ideal interference pattern of two hexagonal spherical mirrors with same curvature radius on CCD receiver.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
Example 1
This example specifically illustrates the structure of the apparatus of the present invention.
The device shown in fig. 1 comprises a laser light source 1, and a focusing lens 2, a pinhole 3, a collimating lens 4, a Polarization Beam Splitter (PBS) 5, a 45 ° optically active wafer 6 with an exit surface coated with a semi-transparent and semi-reflective film, a focusing lens 7 and a diaphragm 8 which are arranged on an optical axis of the light source in sequence; a light cross reticle 11 and a receiver 12 are sequentially arranged in the direction of the emergent reflected light of the optical rotation wafer 6; the spherical reflector to be measured is placed in the divergent light beam behind the diaphragm 8, so that the light emitted from the diaphragm 8 returns along the original light path after being reflected by the spherical reflector to be measured. In the invention, laser emitted by a laser source 1 is coupled into an optical fiber and then emitted; emergent light enters a focusing lens, and can be approximately regarded as an ideal point light source after being filtered by a pinhole 3, and the receiver 12 is a CCD (charge coupled device) or a wavefront sensor.
Example 2
This embodiment specifically describes a method for detecting a common spherical center of a spherical mirror based on the above-mentioned apparatus. The method comprises the following steps:
1) laser emitted by a laser source 1 is coupled into an optical fiber and then emitted out from the other end of the optical fiber, and is imaged on a pinhole 3 through a focusing lens 2, and the laser can be approximately regarded as an ideal point light source after being filtered by the pinhole 3; spherical waves emitted by the ideal point light source become parallel light after passing through the collimating lens 4;
2) parallel light is divided into two beams of S and P linearly polarized light with vertical vibration directions by the PBS5, P transmission light is applied in the invention (a laser with good linear polarization degree can be selected, so that most of light transmits through the PBS5, and the light energy utilization rate is improved);
3) after the light P passes through the 45-degree optical rotation sheet 6 with the second surface coated with the semi-transparent semi-reflective film, the polarization direction rotates by 45 degrees and the light P is divided into transmitted light and reflected light on the second surface of the optical rotation sheet 6;
wherein the reflected light is rotated by 45 degrees after passing through the optical rotation sheet, the polarization direction is vertical to the light transmission direction of the PBS5, and the reflected light is totally reflected and enters the receiver 12 after passing through the cross reticle 11 to be used as interference reference light;
the transmission light is focused on the center of a diaphragm 8 through a focusing lens 7 to become spherical waves; placing the spherical reflector to be detected in the divergent light beam behind the diaphragm;
4) the spherical wave returns along the original light path after being reflected by the spherical reflector, the vibration direction is vertical to the transmission direction of the PBS5 after passing through the optical rotation sheet 6, and the spherical wave is totally reflected by the PBS5 and enters the receiver 12 after passing through the cross reticle 11 to be used as test light; the test light interferes with the reference light, and the posture of the spherical reflector is judged through the interference pattern.
Example 3
In this embodiment, two spherical mirrors with different curvature radii are taken as an example to illustrate the steps of implementing the concentric center adjustment based on the detection method and apparatus of the present invention, as follows:
1) placing the spherical reflector 9 in a divergent light beam behind the diaphragm 8, judging the position relation of the light spot reflected on the diaphragm 8 through the spherical reflector 9, roughly adjusting the position of the spherical reflector 9, and adjusting the reflected light spot to be smaller;
2) finely adjusting the position and the posture of the spherical reflector 9, gradually approaching the reflected light spot to the center of the diaphragm 8, and adjusting the size of the light spot to be minimum;
3) finely adjusting the position and the posture of the spherical reflector 9, superposing a reflected light spot of the spherical reflector with the center of the diaphragm 8, and finding an interference pattern in a receiver 12 (CCD);
4) finely adjusting the position and the posture of the spherical reflector 9 to ensure that the images of the cross reticle of the test light and the reference light are superposed;
5) replacing the receiver 12 (CCD) with a wavefront sensor and confining the MASK of the wavefront sensor to the interference region;
6) finely adjusting the position and the posture of the spherical reflector 9, keeping the image coincidence of the cross reticle, and enabling the defocusing amount detected by the wavefront sensor to be minimum, wherein the spherical reflector 9 is in a state that the center of the diaphragm 8 is taken as the sphere center;
7) the spherical mirror 9 is shielded, the spherical mirrors 10 with different curvature radii are placed in the divergent light path behind the diaphragm 8, and the steps 1-6 are repeated, so that the two spherical mirrors 9 and 10 with different curvature radii can be adjusted to be in a state of taking the center of the diaphragm 8 as the spherical center, as shown in fig. 2.
And when the number of the spherical reflectors to be measured is more than two, repeating the steps 1) -6) to sequentially adjust other spherical reflectors to be measured.
Example 4
In this embodiment, two spherical mirrors with the same curvature are taken as an example (for example, two regular hexagonal splicing spherical mirrors in fig. 3), and the steps of implementing the common-sphere center adjustment based on the detection method and apparatus of the present invention are described as follows:
1) placing the spherical reflector 9 at one side of the divergent light beam behind the diaphragm 8 and close to the central position, judging the position relation of the light spot reflected on the diaphragm 8 through the spherical reflector 9, roughly adjusting the position of the spherical reflector 9, and adjusting the reflected light spot to be smaller;
2) finely adjusting the spherical reflector 9, gradually approaching the reflected light spot to the center of the diaphragm 8, and adjusting the size of the light spot to be minimum;
3) finely adjusting the spherical reflector 9, superposing the reflected light spot with the center of the diaphragm 8, and finding an interference pattern in a receiver 12 (CCD);
4) finely adjusting the spherical reflector 9 to ensure that the image of the cross reticle of the test light and the image of the cross reticle of the reference light coincide, and the boundary of the spherical reflector coincides with the vertical line of the image of the cross reticle of the reference light;
5) placing the spherical reflector 10 at the symmetrical position of the spherical reflector 9, and finely adjusting the spherical reflector 10 to ensure that the reflected light spot of the spherical reflector is superposed with the center of the diaphragm 8;
6) fine tuning the spherical mirror 10, observing the interference pattern on the receiver 12 (CCD);
7) finely adjusting the spherical mirror 10 so that the image of the cross reticle therein coincides with the image of the reference light cross reticle and the boundary of the image of the spherical mirror 10 coincides with the boundary of the image of the spherical mirror 9, when the interference pattern in the receiver 12 (CCD) is as shown in fig. 3;
8) replacing the receiver 12 (CCD) with a wavefront sensor and limiting the MASK thereof to the area of two spherical mirrors;
9) keeping the boundaries of the spherical mirrors 9 and 10 and the images of the respective cross reticles coincident with the image of the cross reticle of the reference light, fine-tuning the spherical mirrors 9 and 10 to minimize the out-of-focus component of the wavefront; in this case, the spherical mirrors 9 and 10 are in a state of being concentric and in phase with each other with respect to the center of the diaphragm 8.
When the number of the spherical reflectors to be measured is more than two, the adjustment method for the spherical reflector 10 in the steps 6) -9) is repeated to sequentially adjust other spherical reflectors to be measured.
Claims (8)
1. A method for detecting the common sphere center of a spherical reflector is characterized in that: the method comprises the following steps:
1) spherical waves emitted by the point light source are converted into parallel light through the collimating lens;
2) adopting a Polarization Beam Splitter (PBS) to split parallel light into S light and P light with mutually vertical vibration directions;
3) the transmitted P light is divided into transmitted light and reflected light through the emergent surface of the 45-degree optically active wafer; the emergent surface of the 45-degree optical rotation wafer is plated with a semi-transparent semi-reflective film;
after the reflected light passes through the 45-degree optical rotation wafer again, the vibration direction is vertical to the PBS transmission direction, the reflected light is totally reflected by the PBS, enters a receiver after passing through a cross reticle and is used as reference light;
the transmission light is focused at the center of the diaphragm through the focusing lens to form divergent spherical waves; placing the spherical reflector to be detected in the divergent light beam behind the diaphragm;
4) the spherical wave returns along the original light path after being reflected by the spherical reflector to be detected, the vibration direction is vertical to the transmission direction of the PBS after passing through the 45-degree optical rotation wafer, the spherical wave is totally reflected by the PBS, and the spherical wave enters a receiver after passing through a cross reticle and is used as test light to interfere with the reference light in the step 3);
5) judging the concentric situation of the spherical reflector through the interference pattern in the step 4) and the wavefront information of the interference pattern:
5.1) based on the concentric judgment result of the spherical reflector, the spherical reflectors with different curvature radiuses are adjusted to be concentric, and the method comprises the following steps:
5.10) shielding other spherical reflectors and reserving one spherical reflector, namely the first spherical reflector;
5.11) roughly adjusting the first spherical reflector, and adjusting the light spot reflected on the diaphragm by the first spherical reflector to be smaller;
5.12) finely adjusting the first spherical reflector to enable the reflected light spot to gradually approach the center of the diaphragm and adjust the size of the light spot to be minimum;
5.13) finely adjusting the first spherical reflector to enable the reflected light spot to coincide with the center of the diaphragm, and finding an interference pattern in the CCD receiver;
5.14) finely adjusting the first spherical reflector to ensure that the images of the cross reticle of the test light and the reference light are superposed;
5.15) replacing the CCD receiver with a wavefront sensor, and limiting a mask of the wavefront sensor in an interference area;
5.16) finely adjusting the posture of the first spherical reflector, keeping the image coincidence of the cross reticle, and enabling the defocusing amount detected by the wavefront sensor to be minimum, wherein the first spherical reflector is in a state that the center of the diaphragm is taken as the center of a sphere;
5.17) shielding the first spherical reflector, and sequentially repeating the processing of the steps 5.11) to 5.16) on other spherical reflectors, namely adjusting the spherical reflectors with different curvature radii to be in a state of taking the center of the diaphragm as the center of a sphere;
5.2) based on the concentric judgment result of the spherical reflector, the spherical reflector with the same curvature radius is adjusted to be concentric, and the method comprises the following steps:
5.20) other spherical reflectors are shielded, and one spherical reflector, namely the first spherical reflector, is reserved;
5.21) roughly adjusting the first spherical reflector, and adjusting the light spot reflected on the diaphragm by the first spherical reflector to be smaller;
5.22) finely adjusting the first spherical reflector to enable the reflected light spot to gradually approach the center of the diaphragm and adjust the size of the light spot to be minimum;
5.23) finely adjusting the first spherical reflector to enable the reflected light spot to coincide with the center of the diaphragm, and finding an interference pattern in the CCD receiver;
5.24) finely adjusting the first spherical reflector to ensure that the image of the cross reticle of the test light and the image of the cross reticle of the reference light coincide, and the boundary of the first spherical reflector coincides with the vertical line of the image of the cross reticle of the reference light;
5.25) placing the second spherical reflector at the symmetrical position of the first spherical reflector, and finely adjusting the second spherical reflector to ensure that the reflected light spot of the second spherical reflector is superposed with the center of the diaphragm;
5.26) fine tuning the second spherical mirror to observe an interference pattern on the CCD receiver;
5.27) finely adjusting the second spherical reflector to ensure that the image of the cross reticle is superposed with the image of the reference cross reticle, and the boundary of the image of the second spherical reflector is superposed with the boundary of the image of the first spherical reflector;
5.28) replacing the CCD receiver with a wave front sensor, and limiting a mask of the wave front sensor in the area of the two spherical reflectors;
5.29) keeping the boundaries of the first spherical mirror and the second spherical mirror and the images of the respective cross reticle coincident with the images of the cross reticle of the reference light, finely adjusting the first spherical mirror and the second spherical mirror so that the defocus component of the wavefront is minimized, at which time the first spherical mirror and the second spherical mirror are concentric in terms of spherical center and in terms of phase.
2. The method of claim 1, wherein: in the step 1), after the laser light source is coupled into the optical fiber, emergent light is focused on the pinhole through the focusing lens, and the light emergent from the pinhole is used as the point light source.
3. The method of claim 1, wherein: and imaging the interference image by adopting a CCD (charge coupled device), and detecting the wavefront information of the interference pattern by adopting a wavefront sensor.
4. The method of claim 1, wherein: further comprising: when the number of the spherical reflectors to be measured is more than two, the processing mode of the second spherical reflector in the steps of 5.25) to 5.29) is sequentially repeated for other reflectors, and the common spherical center adjustment of the spherical reflectors with the same curvature radius is realized.
5. Apparatus for detecting and adjusting the common center of spherical mirrors used in the method of any one of claims 1 to 4, wherein: the device comprises a point light source, a collimating lens (4), a polarization beam splitter prism (5), a 45-degree optical rotation wafer (6) with an emergent surface coated with a semi-transparent semi-reflective film, a focusing lens (7) and a diaphragm (8), wherein the collimating lens (4), the polarization beam splitter prism (5), the focusing lens (7) and the diaphragm are sequentially arranged on an optical axis in the light source transmission direction;
a cross reticle (11) and a receiver (12) are sequentially arranged in the direction of the emergent reflected light of the 45-degree optical rotation wafer (6);
the spherical reflector to be measured is placed in a divergent beam behind the diaphragm (8), so that light emitted by the diaphragm (8) returns along an original light path after being reflected by the spherical reflector to be measured.
6. The apparatus of claim 5, wherein: the point light source is formed by a laser light source (1), a focusing lens (2) and a pinhole (3); a focusing lens (2) and a pinhole (3) are sequentially arranged on an optical axis of a laser light source (1) in the propagation direction, and emergent light passing through the pinhole (3) is used as a point light source.
7. The apparatus of claim 6, wherein: laser emitted by the laser light source (1) is coupled into the optical fiber and then emitted; the outgoing light enters a focusing lens (2).
8. The apparatus of claim 5, wherein: the receiver (12) is a CCD or a wavefront sensor.
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| JPH10137962A (en) * | 1996-11-07 | 1998-05-26 | Matsushita Electric Ind Co Ltd | Laser optical system |
| CN102175433B (en) * | 2011-02-28 | 2012-09-05 | 中国科学院光电技术研究所 | Lens center error measurement system based on interference principle |
| CN102620842B (en) * | 2012-04-10 | 2013-10-30 | 中国科学院光电技术研究所 | Device for detecting optical surface shapes of hole diffraction spherical waves |
| CN107796329B (en) * | 2017-09-29 | 2019-08-06 | 中国科学院长春光学精密机械与物理研究所 | A kind of convex aspheric surface reflecting mirror surface shape detection device and detection method |
| CN109253864B (en) * | 2018-10-10 | 2024-03-22 | 中国科学院上海技术物理研究所 | Optical system for detecting ultra-large caliber convex hyperboloid reflector |
| CN109253865A (en) * | 2018-10-10 | 2019-01-22 | 中国科学院上海技术物理研究所 | It is a kind of for examining the optical system of super large caliber convex paraboloid reflecting mirror |
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