CN114690393A - Internal focusing telescope - Google Patents
Internal focusing telescope Download PDFInfo
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- CN114690393A CN114690393A CN202011628745.4A CN202011628745A CN114690393A CN 114690393 A CN114690393 A CN 114690393A CN 202011628745 A CN202011628745 A CN 202011628745A CN 114690393 A CN114690393 A CN 114690393A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/30—Collimators
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
Abstract
The invention discloses an internal focusing telescope, which comprises a light-emitting marking module, a light-splitting adjusting module, a focusing module and an imaging module, wherein a first light-splitting unit is used for splitting a detection beam into a first detection beam and a second detection beam; the first detection light beam sequentially passes through the first focusing unit, the second light splitting unit and the focusing module and then is incident to a detection surface to be detected, and the first imaging light beam which is reflected by the detection surface to be detected and carries information of the detection surface to be detected sequentially passes through the focusing module, the second light splitting unit and the first focusing unit and then is incident to the first imaging unit; the second detection light beam sequentially passes through the second focusing unit, the second light splitting unit and the focusing module and then is incident to the detection surface to be detected, and the second imaging light beam carrying the information of the detection surface to be detected after being reflected by the detection surface to be detected sequentially passes through the focusing module, the second light splitting unit and the second focusing unit and then is incident to the second imaging unit, so that the common-path dual-channel inner focusing telescope is realized.
Description
Technical Field
The embodiment of the invention relates to the technical field of optical imaging, in particular to an internal focusing telescope.
Background
The traditional inner focusing telescope needs to acquire collimation points on two surfaces of a lens to fix the axis in the optical axis alignment process of the optical lens, and another collimation point becomes a blind area in the alignment process of the collimation point on one surface of the lens, so that the detection point is frequently replaced to confirm the adjustment result in the adjustment process due to the fact that the two surfaces of the lens cannot be decoupled, and the motor error can be additionally introduced in the focal length switching process, so that the debugging efficiency is influenced, and the service life of the motor is influenced. Moreover, if two collimation points are too close in the optical axis alignment process of the optical lens, the problem that the optical lens cannot be accurately resolved is caused.
Disclosure of Invention
In view of this, the embodiment of the present invention provides an inner focusing telescope, which solves the problems that the existing inner focusing telescope has low debugging efficiency and the collimation point cannot be accurately resolved.
The embodiment of the invention provides an internal focusing telescope, which comprises a light-emitting marking module, a light-splitting adjusting module, a focusing module and an imaging module, wherein the light-emitting marking module is arranged on the light-splitting adjusting module;
the light splitting and adjusting module comprises a first light splitting unit and a second light splitting unit;
the focusing module comprises a first focusing unit and a second focusing unit;
the imaging module comprises a first imaging unit and a second imaging unit;
the light-emitting marking module is used for emitting a detection light beam containing marking information;
the first light splitting unit is positioned on a propagation path of the detection light beam and is used for splitting the detection light beam into a first detection light beam and a second detection light beam;
the first detection light beam sequentially passes through the first focusing unit, the second light splitting unit and the focusing module and then is incident to a detection surface to be detected, and a first imaging light beam carrying information of the detection surface to be detected after being reflected by the detection surface to be detected sequentially passes through the focusing module, the second light splitting unit and the first focusing unit and then is incident to the first imaging unit;
the second detection light beam sequentially passes through the second focusing unit, the second light splitting unit and the focusing module and then enters a detection surface to be detected, and the second imaging light beam carrying information of the detection surface to be detected after being reflected by the detection surface to be detected sequentially passes through the focusing module, the second light splitting unit and the second focusing unit and then enters the second imaging unit.
Optionally, the first light splitting unit is configured to transmit the probe beam to form the first probe beam, and further configured to reflect the probe beam to form the second probe beam;
the second light splitting unit is used for transmitting the first detection light beam to the focusing module and transmitting the first imaging light beam to the first focusing unit; and the second focusing unit is used for reflecting the second detection beam to the focusing module and reflecting the second imaging beam to the second focusing unit.
Optionally, the first light splitting unit includes a first half mirror;
the second light splitting unit comprises a second half mirror.
Optionally, the first focusing unit includes a first positive focal lens group and a first movable negative focal lens group, and the first movable negative focal lens group and the first positive focal lens group are sequentially located on a propagation path of the first imaging light beam;
the second focusing unit comprises a second positive focal lens group and a second movable negative focal lens group, and the second movable negative focal lens group and the second positive focal lens group are sequentially located on a propagation path of the second imaging light beam.
Optionally, the inner focusing telescope further includes an optical path adjusting module, where the optical path adjusting module includes a first optical path adjusting unit and a second optical path adjusting unit;
the first optical path adjusting unit is located on a propagation path of the first probe beam and the first imaging beam, and is used for reflecting the first probe beam to the first focusing unit and transmitting the first imaging beam to the first imaging unit;
the second optical path adjusting unit is located on a propagation path of the second probe beam and the second imaging beam, and is configured to reflect the second probe beam to the second focusing unit and transmit the second imaging beam to the second imaging unit.
Optionally, the first optical path adjusting unit includes a third half mirror, and the second optical path adjusting unit includes a fourth half mirror.
Optionally, the first imaging unit includes a first filter and a first charge coupled device;
the second imaging unit comprises a second filter and a second charge coupled device.
Optionally, the first filter segment and the second filter segment have different filtering ranges.
Optionally, the focusing module includes a converging positive focal lens group;
and the focusing module is multiplexed into an aperture diaphragm of the inner focusing telescope.
Optionally, the mark information includes at least one of "cross" mark information, "T" mark information, "X" mark information, "Y" mark information, "O" mark information, and "T" mark information.
The internal focusing telescope provided by the embodiment of the invention is provided with the light splitting adjustment module comprising a first light splitting unit and a second light splitting unit, the focusing module comprises a first focusing unit and a second focusing unit, the imaging module comprises a first imaging unit and a second imaging unit, so that a first detection light beam which sequentially passes through the first focusing unit, the second light splitting unit and the focusing module and is incident to a detection surface to be detected is adjusted into a first imaging light beam carrying information of the detection surface to be detected after being reflected by the detection surface to be detected, and the first imaging light beam is incident to the first imaging unit along a propagation path of the first detection light beam; after sequentially passing through the second focusing unit, the second light splitting unit and the focusing module, a second detection light beam incident to the detection surface to be detected is reflected by the detection surface to be detected and then is adjusted into a second imaging light beam carrying information of the detection surface to be detected, and the second imaging light beam is incident to the second imaging unit along the propagation path of the second detection light beam; the whole inner focusing telescope forms an auto-collimation system, collimation points on two surfaces of the same lens can be respectively aligned based on double-beam detection, the offset condition of the two collimation points can be monitored in real time, the optical axis alignment efficiency is greatly improved, the optical axis positioning speed in the lens integration process of the lens group is improved, the positioning precision is improved, the lens integration is accelerated, and the lens group integration or the adjustment period is reduced; and alignment points on different surfaces are not required to be aligned respectively in a mode of switching focal lengths, so that the use frequency of the motor is reduced. Moreover, the collimation points on the two surfaces of the same lens can be respectively aligned based on double-beam detection, the alignment precision and the application range of the inner focusing telescope can be improved, and the problem that the inner focusing telescope cannot be accurately distinguished due to the fact that the two collimation points are too close in the optical axis alignment process of the optical lens is solved. Meanwhile, a part of propagation path of the first detection beam and a part of propagation path of the first imaging beam share a light path, and a part of propagation path of the second detection beam and a part of propagation path of the second imaging beam share a light path, so that the structure of the internal focusing telescope is simple.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:
FIG. 1 is a schematic structural diagram of an internally focusing telescope according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another internally focusing telescope provided by the embodiment of the invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be fully described by the detailed description with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the embodiments described are only a few embodiments of the present invention and that all other embodiments, which can be derived by one of ordinary skill in the art without inventive faculty, based on the embodiments of the present invention, are within the scope of the present invention.
Fig. 1 is a schematic structural diagram of an internally focusing telescope according to an embodiment of the present invention, and as shown in fig. 1, an internally focusing telescope 10 according to an embodiment of the present invention includes a light emitting marking module 11, a light splitting adjustment module 12, a focusing module 13, a focusing module 14, and an imaging module 15; the spectral adjustment module 12 includes a first spectral unit 121 and a second spectral unit 122; the focusing module 13 includes a first focusing unit 131 and a second focusing unit 132; the imaging module 15 includes a first imaging unit 151 and a second imaging unit 152; the light-emitting marking module 11 is used for emitting a detection light beam a containing marking information;
the first light splitting unit 121 is located on a propagation path of the probe light beam a, and is configured to split the probe light beam into a first probe light beam a1 and a second probe light beam a 2; the first probe light beam a1 sequentially passes through the first focusing unit 131, the second light splitting unit 122 and the focusing module 14 and then enters the probe surface to be detected, and the first imaging light beam b1 reflected by the probe surface to be detected and carrying information of the probe surface to be detected sequentially passes through the focusing module 14, the second light splitting unit 122 and the first focusing unit 131 and then enters the first imaging unit 151; the second probe light beam a2 sequentially passes through the second focusing unit 132, the second beam splitting unit 122 and the focusing module 14 and then enters the probe surface to be detected, and the second imaging light beam b2 reflected by the probe surface to be detected and carrying information of the probe surface to be detected sequentially passes through the focusing module 14, the second beam splitting unit 122 and the second focusing unit 132 and then enters the second imaging unit 152.
The internal focusing telescope provided by the embodiment of the invention can realize double-light-path detection.
Specifically, the first focusing unit 131, the second beam splitting unit 122 and the focusing module 14 may be a first detection light path, the second focusing unit 132, the second beam splitting unit 122 and the focusing module 14 may be a second detection light path, the first detection light beam a1 sequentially passes through the first focusing unit 131, the second beam splitting unit 122 and the focusing module 14 and then enters the detection surface to be detected, and the first imaging light beam b1 reflected by the detection surface to be detected and carrying information of the detection surface to be detected sequentially passes through the focusing module 14, the second beam splitting unit 122 and the first focusing unit 131 and then enters the first imaging unit 151; the second probe beam a2 sequentially passes through the second focusing unit 132, the second beam splitting unit 122 and the focusing module 14 and then enters the probe surface to be tested, the second imaging beam b2 carrying information of the probe surface to be tested after being reflected by the probe surface to be tested sequentially passes through the focusing module 14, the second beam splitting unit 122 and the second focusing unit 132 and then enters the second imaging unit 152, the whole inner focusing telescope forms an auto-collimation system, based on dual optical path detection, the first probe beam a1 can align auto-collimation points on the first surface of the same lens, the second probe beam a2 can align auto-collimation points on the second surface of the same lens, so that the deviation of the two auto-collimation points can be monitored in real time, the optical axis alignment efficiency is greatly improved, the optical axis positioning speed in the lens integration process of the lens set is improved, the positioning accuracy of the inner focusing telescope is improved, and the lens integration is accelerated, the integration or adjustment period of the lens group is reduced; meanwhile, based on double-light-path detection, auto-collimation points on different surfaces are not required to be respectively aligned in a mode of switching focal lengths, and the use frequency of the motor is reduced. Moreover, the auto-collimation points on the two surfaces of the same lens can be respectively aligned based on double-beam detection, the alignment precision and the application range of the inner focusing telescope can be improved, and the problem that the inner focusing telescope cannot be accurately distinguished due to the fact that the two auto-collimation points are too close in the optical axis alignment process of the optical lens is solved.
Furthermore, the internally-focusing telescope provided by the embodiment of the invention can also realize common-path detection.
Specifically, the first probe light beam a1 sequentially passes through the first focusing unit 131, the second beam splitting unit 122 and the focusing module 14 and then enters the detection surface to be detected, and the first imaging light beam b1 reflected by the detection surface to be detected and carrying information of the detection surface to be detected sequentially passes through the focusing module 14, the second beam splitting unit 122 and the first focusing unit 131 and then enters the first imaging unit 151. The first focusing unit 131, the second beam splitting unit 122 and the focusing module 14 are sequentially located on the propagation path of the first probe beam a1, and the focusing module 14, the second beam splitting unit 122 and the first focusing unit 131 are sequentially located on the propagation path of the first imaging beam b1, that is, a part of the propagation path of the first probe beam a1 and a part of the propagation path of the first imaging beam b1 share the same optical path, so that the simple structure of the inner focusing telescope 10 is ensured.
Similarly, the second probe light beam a2 sequentially passes through the second focusing unit 132, the second beam splitting unit 122 and the focusing module 14 and then enters the probe surface to be detected, and the second imaging light beam b2 reflected by the probe surface to be detected and carrying information of the probe surface to be detected sequentially passes through the focusing module 14, the second beam splitting unit 122 and the second focusing unit 132 and then enters the second imaging unit 152. The second focusing unit 132, the second beam splitting unit 122 and the focusing module 14 are sequentially located on the propagation path of the second probe beam a2, and the focusing module 14, the second beam splitting unit 122 and the second focusing unit 132 are sequentially located on the propagation path of the second imaging beam b2, that is, a part of the propagation path of the second probe beam a2 and a part of the propagation path of the second imaging beam b2 share the same optical path, so that the inner focusing telescope 10 is simple in structure.
Further, the second beam splitting unit 122 and the focusing module 14 are located on the propagation paths of the first probe beam a1, the second probe beam a2, the first imaging beam b1 and the second imaging beam b2, which further ensures that the internally focusing telescope 10 is simple in structure.
On the basis of the above-described embodiment, since the probe light beam a contains the marker information, the first imaging light beam b1 and the second imaging light beam b2 contain both the marker information and the information of the probe surface to be detected, and the degree of displacement between the center point of the probe surface to be detected and the optical axis can be detected based on the first imaging light beam b1 and the second imaging light beam b 2. For example, when there is no offset between the central point of the detection surface to be detected and the optical axis, the first imaging beam b1 is imaged at the overlapping position of the optical axis and the first imaging unit 151, and the second imaging beam b2 is imaged at the overlapping position of the optical axis and the second imaging unit 152; when the central point of the detection surface to be detected and the optical axis are offset, the imaging position of the first imaging light beam b1 is offset from the overlapping position of the optical axis and the first imaging unit 151, and the imaging position of the second imaging light beam b2 is offset from the overlapping position of the optical axis and the second imaging unit 152, so that the detection of the detection surface to be detected is realized. Further, the imaging unit 15 can convert the optical signals carried by the first imaging light beam b1 and the second imaging light beam b2 into electrical signals, and convert the electrical signals into measurement object information after final algorithm processing, such as offset information between the central point of the detection surface to be detected and the optical axis. The information type of the structure to be measured is not limited in the embodiments of the present invention, and the above embodiments are described with only two possible information types.
To sum up, the internal focusing telescope provided in the embodiment of the present invention includes, by providing the beam splitting adjustment module including a first beam splitting unit and a second beam splitting unit, the focusing module including a first focusing unit and a second focusing unit, the imaging module including a first imaging unit and a second imaging unit, the first focusing unit, the second beam splitting unit and the focusing module form a first detection light path, the second focusing unit, the second beam splitting unit and the focusing module form a second detection light path, such that a first detection light beam incident on the detection surface to be detected after sequentially passing through the first detection light path is reflected by the detection surface to be detected and adjusted into a first imaging light beam carrying information of the detection surface to be detected, the first imaging light beam is incident on the first imaging unit along a propagation path of the first detection light beam, and a second detection light beam incident on the detection surface to be detected after sequentially passing through the second focusing unit, the second beam splitting unit and the focusing module is reflected by the detection surface to be detected and adjusted into a second imaging light beam carrying information of the detection surface to be detected The light beam, the second imaging light beam is incident to the second imaging unit along the propagation path of the second detection light beam, the whole inner focusing telescope forms an auto-collimation system, auto-collimation points on two surfaces of the same lens can be respectively aligned based on double-beam detection, the offset condition of the two auto-collimation points can be monitored in real time, the optical axis alignment efficiency is greatly improved, the optical axis positioning speed in the lens integration process of the lens group is improved, the positioning precision is improved, the lens integration is accelerated, and the lens group integration or the assembly and adjustment period is reduced; and the auto-collimation points on different surfaces are not required to be respectively aligned in a mode of switching focal lengths, so that the use frequency of the motor is reduced. Moreover, the auto-collimation points on the two surfaces of the same lens can be respectively aligned based on double-beam detection, the alignment precision and the application range of the inner focusing telescope can be improved, and the problem that the inner focusing telescope cannot be accurately distinguished due to the fact that the two auto-collimation points are too close in the optical axis alignment process of the optical lens is solved. Meanwhile, a part of propagation path of the first detection beam and a part of propagation path of the first imaging beam share a light path, and a part of propagation path of the second detection beam and a part of propagation path of the second imaging beam share a light path, so that the structure of the internal focusing telescope is simple.
As a possible implementation manner, fig. 2 is a schematic structural diagram of another internally focusing telescope provided in the embodiment of the present invention, and as shown in fig. 2, the first imaging unit 151 includes a first filter 1511 and a first charge-coupled device 1512; the second imaging unit 152 includes a second filter 1521 and a second charge coupled device 1522.
Illustratively, the first filter 1511 is used to filter stray light in the first imaging light beam b1, ensuring improved image resolution. The first charge-coupled device 1512 (CCD) is configured to convert the optical signal into an electrical signal, and convert the electrical signal into measurement object information after final algorithm processing, such as offset information between the auto-collimation point to be measured and the optical axis, or tilt information between the plane to be measured and the reference plane. Further, the second filter 1521 is used for filtering stray light in the second imaging light beam b2, so as to ensure that the image resolution is improved. The second charge-coupled device 1522 (CCD) is used to convert the optical signal into an electrical signal, and the electrical signal is finally processed by an algorithm and then converted into measurement object information, such as offset information between the auto-collimation point to be measured and the optical axis, or tilt information between the plane to be measured and the reference plane.
On the basis of the above embodiment, the first filter 1511 and the second filter 1521 have different filtering ranges, for example, the first filter 1511 can filter light with shorter wavelength, and the second filter 1521 can filter light with longer wavelength, so that the inner focusing telescope provided by the embodiment of the present invention can realize common-path, dual-channel, dual-band detection, and improve the alignment accuracy and the application range of the inner focusing telescope.
As a possible implementation, with continued reference to fig. 1 and 2, the first beam splitting unit 121 is configured to transmit the probe beam a to form a first probe beam a1, and further configured to reflect the probe beam a to form a second probe beam a 2; the second light splitting unit 122 is configured to transmit the first probe light beam a1 to the focusing module 14, and transmit the first imaging light beam b1 to the first focusing unit 131; and is also used for reflecting the second probe light beam a2 to the focusing module 14 and reflecting the second imaging light beam b2 to the second focusing unit 132.
Illustratively, as shown in fig. 1 and 2, the first light splitting unit 121 forms the first probe light beam a1 by transmitting part of the probe light beam a and forms the second probe light beam a2 by reflecting part of the probe light beam a, thereby ensuring a simple structure of the first light splitting unit 121 while realizing dual probe light beams. Further, the second beam splitting unit 122 reflects the second probe beam a2 and the second imaging beam b2 by transmitting the first probe beam a1 and the first imaging beam b1, so as to ensure that the second beam splitting unit 122 has a simple structure while achieving dual-channel detection.
On the basis of the above embodiment, the first light splitting unit 121 may be a half mirror, and the second light splitting unit 122 may be a half mirror, which ensures that the arrangement of the first light splitting unit 121 and the second light splitting unit 122 is simple.
As a possible implementation, with continued reference to fig. 2, first focusing unit 131 includes a first positive focal mirror set 1311 and a first movable negative focal mirror set 1312, and first movable negative focal mirror set 1312 and first positive focal mirror set 1311 are located in this order on the propagation path of first imaging light beam b 1; the second focusing unit 132 includes a second positive focal lens group 1321 and a second movable negative focal lens group 1322, and the second movable negative focal lens group 1322 and the second positive focal lens group 1321 are located in turn on the propagation path of the second imaging light beam b 2.
Illustratively, as a key component in the internally focusing telescope 10, the first movable negative focus lens set 1312 is movable, and the imaging position of the first imaging light beam b1 can be adjusted, so as to ensure that clear imaging can be performed on the first imaging unit 151 with different defocus amounts. Similarly, the second movable negative focal lens set 1322 can be moved to adjust the imaging position of the second imaging beam b2, thereby ensuring that the second imaging unit 152 with different defocus amounts can be imaged clearly.
Further, since the first focusing unit 131 is located on the propagation paths of the first probe light beam a1 and the first imaging light beam b1 at the same time, the first movable negative focal mirror set 1312 and the first positive focal mirror set 1311 are located on the propagation path of the first imaging light beam b1 in sequence, and correspondingly, the first positive focal mirror set 1311 and the first movable negative focal mirror set 1312 are located on the propagation path of the first probe light beam a1 in sequence. The first movable negative focal mirror group 1312 may not necessarily move during the propagation of the first probe light beam a 1. Similarly, since the second focusing unit 132 is simultaneously located on the propagation paths of the second probe light beam a2 and the second imaging light beam b2, the second movable negative focal mirror set 1322 and the second positive focal mirror set 1321 are sequentially located on the propagation path of the second imaging light beam b2, and correspondingly, the second positive focal mirror set 1321 and the second movable negative focal mirror set 1322 are sequentially located on the propagation path of the second probe light beam a 2. The second movable negative focal lens set 1322 may not necessarily move during the propagation of the second probe light beam a 2.
It should be noted that, the first positive focal lens group 1311, the first movable negative focal lens group 1312, the second positive focal lens group 1321 and the second movable negative focal lens group 1322 may each include one or more lenses, which is not limited in this embodiment of the present invention, and fig. 2 only illustrates, but is not limited to, including one lens.
As a possible implementation manner, with continued reference to fig. 1 and 2, the inner focusing telescope 10 further includes an optical path adjusting module 16, and the optical path adjusting module 16 includes a first optical path adjusting unit 161 and a second optical path adjusting unit 162; the first optical path adjusting unit 161 is located on the propagation path of the first probe light beam a1 and the first imaging light beam b1, and is used for reflecting the first probe light beam a1 to the first focusing unit 131 and transmitting the first imaging light beam b1 to the first imaging unit 151; the second optical path adjusting unit 162 is located on the propagation path of the second probe beam a2 and the second imaging beam b2, and is used for reflecting the second probe beam b2 to the second focusing unit 132 and transmitting the second imaging beam b2 to the second imaging unit 152.
Illustratively, as shown in fig. 1 and fig. 2, the inner focusing telescope 10 further includes an optical path adjusting module 16, the optical path adjusting module 16 may specifically include a first optical path adjusting unit 161 and a second optical path adjusting unit 162, and the first optical path adjusting unit 161 may be a third half mirror, configured to reflect the first probe light beam a1 to the first focusing unit 131, and transmit the first imaging light beam b1 to the first imaging unit 151, so as to ensure that the optical path sharing between the first probe light beam a1 and the first imaging light beam b1 is achieved. Further, the second optical path adjusting unit 162 may be a fourth half mirror, which is used for reflecting the second probe light beam a2 to the second focusing unit 132, and transmitting the second imaging light beam b2 to the second imaging unit 152, so as to ensure that the second probe light beam a2 and the second imaging light beam b2 share the common optical path. By additionally arranging the light path adjusting module 16, the structure of the inner focusing telescope 10 is simple while the realization of the common light path and the double channels is ensured.
As a possible embodiment, the focusing module 14 may comprise a set of converging positive focal lenses, while the focusing module 14 may be multiplexed as an aperture stop of the internally focusing telescope 10.
Illustratively, the focusing module 14 is configured to emit the focused first probe light beam a1 and the focused second probe light beam a2, and collect the imaging light beam reflected by the detection surface to be detected. The focusing module 14 may specifically include a converging positive lens group, for example, one or more lenses, and the specific arrangement manner of the focusing module 14 is not limited in the embodiment of the present invention.
Further, the focusing module 14 can be reused as an aperture diaphragm of the inner focusing telescope 10, so as to ensure that the light flux of the inner focusing telescope 10 is adjustable, and ensure that the inner focusing telescope 10 has a simple structure.
Optionally, the probe beam a is a broad-spectrum probe beam, for example, the spectral range λ of the probe beam a may satisfy 300 ≦ λ ≦ 800nm, which ensures a larger detectable range. It should be noted that the specific range of the probe beam is not limited by the embodiment of the present invention, and the above description is only exemplary of a possible detection range.
Optionally, the specific type of the probe beam a is related to a surface type of the probe surface to be detected, which is not limited in the embodiment of the present invention. For example, when the detection surface to be detected is a plane, the detection light beam a can be a parallel light beam or an approximately parallel light beam, for example, the divergence angle α of the detection light beam a satisfies 0 ≦ α ≦ 5 ″; when the detection surface to be detected is a curved surface, the type of the detection light beam a corresponds to the detection surface to be detected, so that the detection of the detection surface to be detected can be realized.
As a possible implementation manner, the mark information may include at least one of "cross" mark information, "T" mark information, "X" mark information, "Y" mark information, "O" mark information, and "T" mark information, a specific form of the mark information is not limited in the embodiment of the present invention, and other images that can be used as a center positioning mark and realize focusing may be output as the mark information.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will appreciate that the present invention is not limited to the specific embodiments described herein, and that the features of the various embodiments of the invention may be partially or fully coupled to each other or combined and may be capable of cooperating with each other in various ways and of being technically driven. Numerous variations, rearrangements, combinations, and substitutions will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. An inner focusing telescope is characterized by comprising a light emitting marking module, a light splitting adjustment module, a focusing module and an imaging module;
the light splitting and adjusting module comprises a first light splitting unit and a second light splitting unit;
the focusing module comprises a first focusing unit and a second focusing unit;
the imaging module comprises a first imaging unit and a second imaging unit;
the light-emitting marking module is used for emitting a detection light beam containing marking information;
the first light splitting unit is positioned on a propagation path of the detection light beam and is used for splitting the detection light beam into a first detection light beam and a second detection light beam;
the first detection light beam sequentially passes through the first focusing unit, the second light splitting unit and the focusing module and then is incident to a detection surface to be detected, and a first imaging light beam carrying information of the detection surface to be detected after being reflected by the detection surface to be detected sequentially passes through the focusing module, the second light splitting unit and the first focusing unit and then is incident to the first imaging unit;
the second detection light beam sequentially passes through the second focusing unit, the second light splitting unit and the focusing module and then enters the detection surface to be detected, and the second imaging light beam carrying the information of the detection surface to be detected after being reflected by the detection surface to be detected sequentially passes through the focusing module, the second light splitting unit and the second focusing unit and then enters the second imaging unit.
2. The internally focusing telescope of claim 1, wherein the first beam splitting unit is configured to transmit the probe beam to form the first probe beam and is further configured to reflect the probe beam to form the second probe beam;
the second light splitting unit is used for transmitting the first detection light beam to the focusing module and transmitting the first imaging light beam to the first focusing unit; and the second focusing unit is used for reflecting the second detection beam to the focusing module and reflecting the second imaging beam to the second focusing unit.
3. The internally focusing telescope of claim 2, wherein the first beam splitting unit comprises a first half mirror;
the second light splitting unit comprises a second half-mirror.
4. The internally focusing telescope of claim 1, wherein the first focusing unit comprises a first set of positive focal lenses and a first movable set of negative focal lenses, which are in turn located in the propagation path of the first imaging beam;
the second focusing unit comprises a second positive focal lens group and a second movable negative focal lens group, and the second movable negative focal lens group and the second positive focal lens group are sequentially located on a propagation path of the second imaging light beam.
5. The internally focusing telescope of claim 1, further comprising an optical path adjustment module comprising a first optical path adjustment unit and a second optical path adjustment unit;
the first optical path adjusting unit is located on a propagation path of the first probe beam and the first imaging beam, and is used for reflecting the first probe beam to the first focusing unit and transmitting the first imaging beam to the first imaging unit;
the second optical path adjusting unit is located on a propagation path of the second probe beam and the second imaging beam, and is configured to reflect the second probe beam to the second focusing unit and transmit the second imaging beam to the second imaging unit.
6. The internally focusing telescope of claim 5, wherein the first optical path adjustment unit comprises a third half mirror and the second optical path adjustment unit comprises a fourth half mirror.
7. The internally focusing telescope of claim 1, wherein the first imaging unit comprises a first filter and a first charge-coupled device;
the second imaging unit comprises a second filter and a second charge coupled device.
8. The internally focusing telescope of claim 7, wherein the first and second filters have different filter ranges.
9. The internally focusing telescope of claim 1, wherein the focusing module comprises a set of converging positive focal lenses;
and the focusing module is multiplexed into an aperture diaphragm of the inner focusing telescope.
10. The internally focusing telescope of claim 1, wherein the marking information includes at least one of "cross" marking information, "T" marking information, "X" marking information, "Y" marking information, "O" marking information, and "T" marking information.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000187147A (en) * | 1998-10-14 | 2000-07-04 | Asahi Optical Co Ltd | Motor-driven focus mechanism for collimation telescope |
| CN101813458A (en) * | 2010-03-11 | 2010-08-25 | 北京理工大学 | Method and device for measuring optical axis and gap of lens group by differential confocal internal focusing method |
| CN102749027A (en) * | 2011-04-18 | 2012-10-24 | 陈亮嘉 | Linear color confocal microscope system |
| CN103345038A (en) * | 2013-06-27 | 2013-10-09 | 中国科学院西安光学精密机械研究所 | Cube-corner prism vertical type optical axis determining system and method |
| TW202045896A (en) * | 2019-05-31 | 2020-12-16 | 致茂電子股份有限公司 | Device for measuring optolectronic units |
-
2020
- 2020-12-31 CN CN202011628745.4A patent/CN114690393B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000187147A (en) * | 1998-10-14 | 2000-07-04 | Asahi Optical Co Ltd | Motor-driven focus mechanism for collimation telescope |
| CN101813458A (en) * | 2010-03-11 | 2010-08-25 | 北京理工大学 | Method and device for measuring optical axis and gap of lens group by differential confocal internal focusing method |
| CN102749027A (en) * | 2011-04-18 | 2012-10-24 | 陈亮嘉 | Linear color confocal microscope system |
| CN103345038A (en) * | 2013-06-27 | 2013-10-09 | 中国科学院西安光学精密机械研究所 | Cube-corner prism vertical type optical axis determining system and method |
| TW202045896A (en) * | 2019-05-31 | 2020-12-16 | 致茂電子股份有限公司 | Device for measuring optolectronic units |
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| CN114690393B (en) | 2023-04-18 |
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