CN115061270B - Inclination mode telescopic microscopic combined imaging method - Google Patents
Inclination mode telescopic microscopic combined imaging method Download PDFInfo
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- CN115061270B CN115061270B CN202210600535.7A CN202210600535A CN115061270B CN 115061270 B CN115061270 B CN 115061270B CN 202210600535 A CN202210600535 A CN 202210600535A CN 115061270 B CN115061270 B CN 115061270B
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- 238000003384 imaging method Methods 0.000 title claims abstract description 74
- 230000003287 optical effect Effects 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/02—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors
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- Microscoopes, Condenser (AREA)
Abstract
The invention relates to the technical field of microscopic imaging, and provides a tilt mode telescopic microscopic combined imaging method, which comprises the steps that emergent light of an LED light source is collimated by a collimating lens, and is converged by a microscopic focusing lens after passing through a reflector I, a broadband beam splitter and a reflector II, so as to illuminate an observed object; reflected light of the observed object passes through the microscopic focusing lens and the reflector II, and is focused on the CCD camera rake face through the telescopic imaging lens after passing through the broadband beam splitter. The tilt mode telescopic microscope combined imaging device overcomes the size limitation of the traditional microscope, only a small-size microscope focusing lens is placed in vacuum, reflected light rays of an observed object extend to a far position outside a vacuum cavity, other optical elements are located at a far position outside the vacuum cavity, and finally imaging is carried out through a telescopic imaging lens. The optical system has large working distance, can observe an observed object in an inclined mode, and has clear and undistorted imaging outline.
Description
Technical Field
The invention relates to the technical field of microscopic imaging, in particular to a tilt mode telescopic microscopic combined imaging method.
Background
A microscope is an optical system that magnifies and images small objects at close distances. A conventional microscope observes an image through a human eye, and thus the microscope is divided into an objective lens and an eyepiece. The objective lens is used for forming an amplified real image of the target; the eyepiece functions to magnify the virtual image, and to pull the system exit pupil to the human eye entrance pupil position for human eye viewing.
The object distance of a general microscope objective lens is short, the whole volume of the microscope is large, and certain devices (such as ultra-high vacuum devices and the like) cannot enable the microscope to be close to an observed object due to space limitation. The optical system has large working distance, can observe an observed object in an inclined mode, and has clear and undistorted imaging outline. Because of the structural space and functional limitation in the ultra-high vacuum equipment, the observed object and the observation lens cannot be imaged coaxially, a certain angle is needed, and the conventional lens cannot be imaged at a large angle without special design.
Disclosure of Invention
In order to solve the technical problems in the prior art, the main purpose of the invention is to provide a tilt mode telescopic microscopic combined imaging method.
In a first aspect, the present invention provides a tilt-mode telescopic microscopic combined imaging method, comprising the steps of:
the emergent light of the LED light source is collimated by the collimating lens, passes through the reflector I, the broadband light splitting sheet and the reflector II, and is converged by the micro-focusing lens to illuminate the observed object;
reflected light of the observed object passes through the microscopic focusing lens and the reflector II, and is focused on the CCD camera rake face through the telescopic imaging lens after passing through the broadband beam splitter.
As a further scheme of the invention, the tilt mode telescopic microscopic combined imaging method is characterized in that a power supply device is configured to microscopic amplifying imaging of an observed object based on a tilt mode telescopic microscopic combined imaging device, and the tilt mode telescopic microscopic combined imaging device comprises a collimation light source, a reflector I, a broadband beam splitter, a reflector II, a microscopic focusing lens, a telescopic imaging lens and a CCD camera; the reflector I is arranged on an emergent light path of the collimation light source, the emergent light of the collimation light source is reflected by the reflector I, passes through the broadband beam splitter and the reflector II, and is converged and illuminated by the micro-focusing lens to be observed; the micro-focusing lens is also used for receiving reflected light of an observed object, and the reflected light passes through the micro-focusing lens and the reflecting mirror II and is focused on the CCD camera rake face through the telescopic imaging lens after passing through the broadband beam splitter.
As a further scheme of the invention, the collimating light source comprises an LED light source and a collimating lens, and the collimating lens is used for collimating light rays emitted by the LED light source and irradiating the light rays on a reflector I of an emergent light path.
As a further scheme of the invention, the micro-focusing lens is a single lens, a lens group or a zone plate.
As a further aspect of the present invention, the object to be observed is placed at the focal point of the micro-focusing lens, and the micro-focusing lens allows the object to be observed to have an angle range of 0-45 ° with the object to be observed, so that the profile of the object to be observed can be observed in the range.
As a further scheme of the invention, the focal length range of the micro-focusing lens is 6-20mm, the distortion is less than 5%, the working distance between the micro-focusing lens and an observed object is more than 5mm, and the distance between the micro-focusing lens and a reflector II (4) is 0.2-6 m.
As a further scheme of the invention, the telescopic imaging lens is a single lens or a lens group, the focal length range is 35-500mm, and the distortion is less than <5%.
As a further scheme of the invention, the wave band of the broadband light-splitting sheet covers the visible light wave band, and the light-splitting ratio of the broadband light-splitting sheet ranges from 30:70 to 70:30.
As a further scheme of the invention, the collimating lens is a single lens, a lens group or a zone plate.
As a further scheme of the invention, the collimation light source, the reflector I, the broadband light splitting sheet, the reflector II and the telescopic imaging lens of the tilt mode telescopic microscopic combined imaging device are arranged in air, the microscopic focusing lens is arranged in vacuum, the reflector II and the microscopic focusing lens are isolated from vacuum by an optical window and transmit light, and the tilt mode telescopic microscopic combined imaging device is used for forming a microscopic amplifying telescopic imaging lens group for observing a sample.
The technical scheme provided by the invention has the following beneficial effects:
the invention provides a tilt mode telescope microscopic combined imaging method, which comprises the steps of converging and illuminating an observed object through a microscopic focusing lens after passing through a reflector I, a broadband beam splitter and a reflector II, and focusing reflected light of the observed object to a CCD camera rake face through a telescope imaging lens after passing through the microscopic focusing lens, the reflector II and the broadband beam splitter. The microscopic focusing objective lens is small in size, is suitable for being installed in vacuum, extends reflected light rays of an observed object to a position far outside a vacuum cavity, isolates vacuum through an optical window, and finally focuses through a telescopic imaging lens, so that an amplifying imaging function is realized. The optical system has large working distance, can observe an observed object in an inclined mode, and has clear and undistorted imaging outline.
These and other aspects of the invention will be more readily apparent from the following description of the embodiments. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention as claimed.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following description will briefly introduce the drawings that are needed in the embodiments or the description of the prior art, and it is obvious that the drawings in the following description are only some embodiments of the present invention. In the drawings:
fig. 1 is a light path diagram of a tilt-mode telescopic microscopic combined imaging device in a tilt-mode telescopic microscopic combined imaging method according to an embodiment of the present invention.
In the figure: 1-collimation light source, 2-reflector I, 3-broadband beam splitter, 4-reflector II, 5-micro focusing lens, 6-telescope imaging lens, 7-CCD camera, 8-optical window, 9-analyzer, 10-vacuum cavity, 11-LED light source, 12-collimation lens.
The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
Reference will now be made in detail to the present embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present invention, but not to limit the scope of the present invention.
In the description of the present invention, a number means one or more, a number means two or more, and greater than, less than, exceeding, etc. are understood to not include the present number, and above, below, within, etc. are understood to include the present number.
In the description of the present invention, the continuous reference numerals of the method steps are used for facilitating examination and understanding, and by combining the overall technical scheme of the present invention and the logic relationships between the steps, the implementation sequence between the steps is adjusted without affecting the technical effect achieved by the technical scheme of the present invention.
In the description of the present invention, unless explicitly defined otherwise, terms such as arrangement and the like should be construed broadly, and those skilled in the art can reasonably determine the specific meaning of the terms in the present invention in combination with the specific contents of the technical scheme.
In an embodiment of the present invention, a tilt-mode telescopic microscopic combined imaging method is provided, wherein the tilt-mode telescopic microscopic combined imaging method can be applied to ultra-high vacuum equipment, and is not limited to the above.
Referring to fig. 1, in an embodiment of the present invention, the tilt mode telescopic microscope combined imaging method includes the following steps:
the first step, the emergent light of the LED light source 11 is collimated by the collimating lens 12, and is converged by the micro-focusing lens 5 after passing through the reflector I2, the broadband light-splitting sheet 3 and the reflector II 4, so as to illuminate an observed object;
and secondly, reflected light of the observed object passes through a micro-focusing lens 5 and a reflector II 4, passes through a broadband beam splitter 3, and is focused on the harrow surface of a CCD camera 7 through a telescopic imaging lens 6.
In the embodiment of the application, the tilt mode telescopic microscopic combined imaging method is based on the configuration of a power supply device for microscopic amplified imaging of an observed object by the tilt mode telescopic microscopic combined imaging device, and the tilt mode telescopic microscopic combined imaging device comprises a collimation light source 1, a reflector I2, a broadband beam splitter 3, a reflector II 4, a microscopic focusing lens 5, a telescopic imaging lens 6 and a CCD camera 7.
Referring to fig. 1, the reflector i 2 is disposed on an outgoing light path of the collimated light source 1, and outgoing light of the collimated light source 1 is reflected by the reflector i 2, passes through the broadband beam splitter 3 and the reflector ii 4, and is focused by the micro-focusing lens 5 to illuminate the observed object.
The observed object is placed in a vacuum cavity 10, an analyzer 9 is obliquely installed in the vacuum cavity 10, and the analyzer 9 is arranged towards the observed object and used for amplifying the observed object.
The micro-focusing lens 5 is also used for receiving reflected light of an observed object, and the reflected light passes through the micro-focusing lens 5 and the reflecting mirror II and is focused to the rake face of the CCD camera 7 through the telescopic imaging lens 6 after passing through the broadband light splitting sheet 3.
In the embodiment of the present invention, the collimating light source 1 includes an LED light source 11 and a collimating lens 12, where the collimating lens 12 is used to collimate the light emitted by the LED light source 11 and then irradiate the light on the reflector i 2 of the outgoing light path.
The collimating lens 12 may be a single lens, a lens group or a zone plate, and in this embodiment, the collimating lens 12 is a single lens with a collimating function and capable of collimating the light emitted from the LED light source 11.
In some embodiments of the present invention, the incident light path may also determine whether a mirror is required according to the actual position of the collimating lens 12.
In the embodiment of the present invention, the observed object is placed at the focal point of the micro-focusing lens 5, and the micro-focusing lens 5 allows the observed object to have an included angle ranging from 0 ° to 45 ° with respect to the observed object, so that the profile of the observed object can be observed in the range.
The focal length range of the micro-focusing lens 5 is 6-20mm, the distortion is less than 5%, the working distance between the micro-focusing lens and an observed object is more than 5mm, and the distance between the micro-focusing lens and the reflecting mirror II 4 is 0.2-6 m.
In the present invention, the micro-focusing lens 5 is a single lens, a lens group or a zone plate, and in this embodiment, the micro-focusing lens 5 is a lens group that converges light.
In the invention, the focal length f of the micro-focusing lens 5 is 12mm, the working distance between the micro-focusing lens 5 and an observed object is 7.6mm, the distance between the micro-focusing lens 5 and the reflecting mirror II 4 is 1.7m, the focal depth of the micro-focusing lens 5 is large, the observed object is arranged at the focal point of the micro-focusing lens, and the outline of the observed object can be seen clearly when the included angle between the micro-focusing lens 5 and the observed object is within the range of 0-45 degrees.
In the embodiment of the invention, the telescopic imaging lens 6 is a single lens or a lens group, the focal length range is 35-500mm, and the distortion is less than <5%.
In the embodiment of the present invention, the wavelength band of the broadband light splitting sheet 3 covers the visible light wavelength band, and the light splitting ratio of the broadband light splitting sheet 3 ranges from 30:70 to 70:30.
In the tilt mode telescopic microscopic combined imaging device, the amplification rate of the whole system is calculated in the following way: display diagonal dimension (mm)/CCD target face angle dimension (mm).
In the embodiment of the invention, the collimating light source 1, the reflector I2, the broadband light-splitting sheet 3, the reflector II 4 and the telescopic imaging lens 6 of the tilt-mode telescopic microscopic combined imaging device are arranged in air, the microscopic focusing lens 5 is arranged in vacuum, the reflector II 4 and the microscopic focusing lens 5 are isolated from vacuum by the optical window 8 and transmit light, and the tilt-mode telescopic microscopic combined imaging device is used for forming a microscopic amplifying telescopic imaging lens group for observing a sample.
In summary, the invention provides a tilt mode telescopic microscopic combined imaging method, which is characterized in that the outgoing light of a collimation light source 1 passes through a reflector I2, a broadband beam splitter 3 and a reflector II 4, and then is converged and illuminated by a microscopic focusing objective 5, the reflected light of the observed object is focused to a rake face of a CCD camera 7 through a telescopic imaging lens 6 after passing through the microscopic focusing objective 5, the reflector II 4 and the broadband beam splitter 3, the microscopic focusing objective 5 has a smaller size and is suitable for being installed in vacuum, the reflected light of the observed object extends out of a vacuum cavity 10, the vacuum is isolated by an optical window 8, and finally the reflected light is focused through the telescopic imaging lens 6, so that the amplifying imaging function is realized. The optical system has large working distance, can observe an observed object in an inclined mode, and has clear and undistorted imaging outline.
The foregoing description is only of the preferred embodiments of the present invention, and is not intended to limit the scope of the invention, but rather is intended to cover any equivalents of the structures or equivalent processes disclosed herein or in the alternative, which may be employed directly or indirectly in other related arts.
Claims (5)
1. The tilt mode telescopic microscopic combined imaging method is characterized by comprising the following steps of:
the method comprises the following steps that 1) emergent light of an LED light source (11) is collimated by a collimating lens (12), and is converged by a micro-focusing lens (5) after passing through a reflector I (2), a broadband light-splitting sheet (3) and a reflector II (4), so as to illuminate an observed object;
step 2), reflected light of an observed object passes through a microscopic focusing lens (5) and a reflector II (4), and is focused to the harrow surface of a CCD camera (7) through a telescopic imaging lens (6) after passing through a broadband beam splitter (3);
the tilt mode telescopic microscopic combined imaging method is characterized in that a power supply device is configured to microscopic amplifying imaging of an observed object based on a tilt mode telescopic microscopic combined imaging device, and the tilt mode telescopic microscopic combined imaging device comprises a collimation light source (1), a reflector I (2), a broadband beam splitter (3), a reflector II (4), a microscopic focusing lens (5), a telescopic imaging lens (6) and a CCD camera (7);
the reflector I (2) is arranged on an emergent light path of the collimation light source (1), emergent light of the collimation light source (1) is reflected by the reflector I (2), passes through the broadband beam splitter (3) and the reflector II (4), and is converged and illuminated by the micro-focusing lens (5) to be observed;
the microscopic focusing lens (5) is also used for receiving reflected light of an observed object, and the reflected light passes through the microscopic focusing lens (5) and the reflecting mirror II and is focused on the rake surface of the CCD camera (7) through the telescopic imaging lens (6) after passing through the broadband beam splitter (3); the telescopic imaging lens (6) is a single lens or a lens group, the focal length range is 35-500mm, and the distortion is less than 5%;
the tilt mode telescopic microscopic combined imaging device is suitable for being used in a tilt mode, namely the observed object is placed at the focus of the microscopic focusing lens (5), and the microscopic focusing lens (5) allows the observed object to have an included angle range of 0-45 degrees with the microscopic focusing lens, so that the outline of the observed object can be observed in the range;
the focal length range of the micro-focusing lens (5) is 6-20mm, the distortion is less than <5%, the working distance between the micro-focusing objective lens (5) and an observed object is more than 5mm, and the distance range between the micro-focusing lens (5) and the reflector II (4) is 0.2-6 m;
the tilt mode telescopic microscopic combined imaging device comprises a collimation light source (1), a reflector I (2), a broadband light splitting sheet (3), a reflector II (4) and a telescopic imaging lens (6), wherein the collimation light source, the reflector I (2), the broadband light splitting sheet, the reflector II (4) and the telescopic imaging lens (6) are arranged in air, a microscopic focusing lens (5) is arranged in vacuum, the reflector II (4) and the microscopic focusing lens (5) are isolated from vacuum through an optical window (8) and transmit light, and the tilt mode telescopic microscopic combined imaging device is used for forming a microscopic amplifying telescopic imaging lens group for observing samples.
2. The tilt-mode telescopic microscopic combined imaging method according to claim 1, wherein the collimating light source (1) comprises an LED light source (11) and a collimating lens (12), and the collimating lens (12) is used for collimating light rays emitted by the LED light source (11) and irradiating the light rays on a reflector i (2) of an emergent light path.
3. The tilt-mode telescopic microscopic combined imaging method according to claim 2, wherein the collimator lens (12) is a single lens, a lens group or a zone plate.
4. A tilt-mode telescopic micro-assembly imaging method according to claim 3, wherein the micro-focus lens (5) is a single lens, a lens group or a zone plate.
5. The tilt-mode telescopic microscopic combined imaging method according to claim 1, wherein the broadband light splitting sheet (3) has a wavelength band covering a visible light wavelength band, and the broadband light splitting sheet (3) has a light splitting ratio ranging from 30:70 to 70:30.
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