CN115061270A - Tilt-mode telescopic microscope combined imaging method - Google Patents
Tilt-mode telescopic microscope combined imaging method Download PDFInfo
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- CN115061270A CN115061270A CN202210600535.7A CN202210600535A CN115061270A CN 115061270 A CN115061270 A CN 115061270A CN 202210600535 A CN202210600535 A CN 202210600535A CN 115061270 A CN115061270 A CN 115061270A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 78
- 230000003287 optical effect Effects 0.000 claims abstract description 12
- 238000000386 microscopy Methods 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000000034 method Methods 0.000 description 2
- 210000001747 pupil Anatomy 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/361—Optical details, e.g. image relay to the camera or image sensor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B23/00—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
- G02B23/02—Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices involving prisms or mirrors
Abstract
The invention relates to the technical field of microscopic imaging, and provides a tilt-mode telescopic microscopic combined imaging method which comprises the steps that emergent light of an LED light source is collimated through a collimating lens, and is converged through a microscopic focusing lens after passing through a reflector I, a broadband light splitting sheet and a reflector II to illuminate an observed object; the reflected light of the observed object passes through the micro-focusing lens, the reflecting mirror II, the broadband light splitting sheet and then is focused on the rake face of the CCD camera through the telescopic imaging lens. The inclined mode telescopic microscope combined imaging device overcomes the size limitation of the traditional microscope, only places a small-size microscope focusing lens in vacuum, extends the reflected light of an observed object to a far position outside a vacuum cavity, and finally images through the telescopic imaging lens, wherein other optical elements are positioned at far positions outside the vacuum cavity. The optical system has large working distance, can observe an observed object in an inclined mode, and has clear imaging contour without distortion.
Description
Technical Field
The invention relates to the technical field of microscopic imaging, in particular to a tilt mode telescopic microscopic combined imaging method.
Background
A microscope is an optical system that magnifies and images a small object at a short distance. The conventional microscope is to observe an image through human eyes, and thus is divided into two parts, an objective lens and an eyepiece lens. The objective lens is used for forming an enlarged real image of the target; the eyepiece functions to magnify the virtual image while pulling the system exit pupil to the eye entrance pupil location for viewing by the human eye.
The object distance of a general microscope objective is short, and the whole microscope is large, and some devices (such as ultra-high vacuum devices and the like) cannot make the microscope close to an observed object due to space limitation. The optical system has large working distance, can observe an observed object in an inclined mode, and has clear imaging contour without distortion. Due to structural space and function limitations in ultrahigh vacuum equipment, an observed object and an observation lens cannot be coaxially imaged, a certain angle is required, and a conventional lens cannot be specially designed and cannot be used for large-angle imaging.
Disclosure of Invention
In order to solve the technical problems in the prior art, the present invention mainly aims to provide a tilt-mode telescopic microscopy combined imaging method.
In a first aspect, the present invention provides a tilt-mode telescopic microscope combined imaging method, including the following steps:
emergent light of the LED light source is collimated through the collimating lens, and is converged by the micro-focus lens after passing through the reflector I, the broadband light splitting sheet and the reflector II, so that an observed object is illuminated;
the reflected light of the observed object passes through the micro-focusing lens, the reflecting mirror II, the broadband light splitting sheet and then is focused on the rake face of the CCD camera through the telescopic imaging lens.
As a further scheme of the invention, the tilt mode telescopic microscope combined imaging method is based on a tilt mode telescopic microscope combined imaging device configured with a power supply device to carry out microscopic magnification imaging on an observed object, wherein the tilt mode telescopic microscope combined imaging device comprises a collimated light source, a reflector I, a broadband light splitting sheet, a reflector II, a microscopic focusing lens, a telescopic imaging lens and a CCD camera; the reflector I is arranged on an emergent light path of the collimation light source, and emergent light of the collimation light source is reflected by the reflector I and is converged by the micro-focus lens to illuminate an observed object after passing through the broadband light splitting sheet and the reflector II; the micro-focusing lens is also used for receiving the reflected light of the observed object, and the reflected light passes through the micro-focusing lens, the reflecting mirror II, the broadband light splitting sheet and then is focused on the rake face of the CCD camera through the telescopic imaging lens.
As a further scheme of the invention, the collimating light source comprises an LED light source and a collimating lens, and the collimating lens is used for collimating light rays emitted by the LED light source and then irradiating the light rays on the reflecting mirror I of the emergent light path.
As a further scheme of the invention, the micro focusing lens is a single lens, a lens group or a zone plate.
As a further scheme of the invention, the observed object is placed at the focus of the micro-focusing lens, and the micro-focusing lens allows the observed object to have an included angle range of 0-45 degrees with the observed object, so that the profile of the observed object can be observed in the included angle range.
As a further scheme of the invention, the focal length range of the micro-focusing lens is 6-20mm, the distortion is less than 5%, the working distance between the micro-focusing lens and an observed object is more than 5mm, and the distance between the micro-focusing lens and a reflector II (4) is 0.2-6 m.
As a further scheme of the invention, the telescopic imaging lens is a single lens or a lens group, the focal length range is 35-500mm, and the distortion is less than < 5%.
As a further scheme of the invention, the wave band of the broadband light splitting sheet covers the visible light wave band, and the splitting ratio of the broadband light splitting sheet ranges from 30:70 to 70: 30.
As a further scheme of the invention, the collimating lens is a single lens, a lens group or a zone plate.
As a further scheme of the invention, a collimation light source, a reflector I, a broadband light splitting sheet, a reflector II and a telescopic imaging lens of the inclined mode telescopic microscopic combined imaging device are arranged in the air, a microscopic focusing lens is arranged in the vacuum, the reflector II and the microscopic focusing lens are isolated from the vacuum by an optical window and penetrate light, and the inclined mode telescopic microscopic combined imaging device is used for forming a microscopic magnifying telescopic imaging lens group for sample observation.
The technical scheme provided by the invention has the following beneficial effects:
the invention provides a tilt-mode telescopic microscope combined imaging method, which is characterized in that emergent light of a collimated light source passes through a reflector I, a broadband beam splitter and a reflector II and is converged by a microscope focusing lens to illuminate an observed object, and reflected light of the observed object passes through the microscope focusing lens, the reflector II and the broadband beam splitter and is focused to a rake face of a CCD camera through the telescopic imaging lens. The micro-focusing objective lens is small in size and suitable for being installed in vacuum, extends the reflected light of an observed object to a far position outside a vacuum cavity, is isolated from vacuum by an optical window, and is finally focused by a telescopic imaging lens, so that the function of magnifying imaging is realized. The optical system has large working distance, can observe an observed object in an inclined mode, and has clear imaging contour without distortion.
These and other aspects of the invention will be apparent from and elucidated with reference to the embodiments described hereinafter. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention. In the drawings:
fig. 1 is an optical path diagram of a tilt-mode telescopic microscope combined imaging apparatus in a tilt-mode telescopic microscope combined imaging method according to an embodiment of the present invention.
In the figure: the system comprises a 1-collimation light source, a 2-reflector I, a 3-broadband light splitting sheet, a 4-reflector II, a 5-micro-focusing lens, a 6-telescopic imaging lens, a 7-CCD camera, an 8-optical window, a 9-analyzer, a 10-vacuum cavity, an 11-LED light source and a 12-collimation lens.
The objects, features and advantages of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
Reference will now be made in detail to the present preferred embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to like elements throughout.
In the description of the present invention, the meaning of a plurality of means is one or more, the meaning of a plurality of means is two or more, and larger, smaller, larger, etc. are understood as excluding the number, and larger, smaller, inner, etc. are understood as including the number.
In the description of the present invention, the consecutive reference numbers of the method steps are for convenience of examination and understanding, and the implementation order between the steps is adjusted without affecting the technical effect achieved by the technical solution of the present invention by combining the whole technical solution of the present invention and the logical relationship between the steps.
In the description of the present invention, unless otherwise explicitly defined, terms such as set, etc. should be broadly construed, and those skilled in the art can reasonably determine the specific meanings of the above terms in the present invention in combination with the detailed contents of the technical solutions.
In an embodiment of the present invention, a tilt mode telescopic microscopy combined imaging method is provided, wherein the tilt mode telescopic microscopy combined imaging method can be applied to ultrahigh vacuum equipment, but is not limited thereto.
Referring to fig. 1, in an embodiment of the present invention, the oblique-mode telescopic microscope combined imaging method includes the following steps:
firstly, the emergent light of an LED light source 11 is collimated through a collimating lens 12, passes through a reflector I2, a broadband beam splitter 3 and a reflector II 4, and is converged by a micro-focus lens 5 to illuminate an observed object;
and step two, the reflected light of the observed object passes through the micro-focusing lens 5, the reflecting mirror II 4, the broadband light splitter 3 and the telescopic imaging lens 6 to be focused on the rake face of the CCD camera 7.
In the embodiment of the application, the tilt-mode telescopic microscope combined imaging method is based on a tilt-mode telescopic microscope combined imaging device configured with a power supply device to perform microscopic magnification imaging on an observed object, and the tilt-mode telescopic microscope combined imaging device comprises a collimated light source 1, a reflector I2, a broadband light splitting sheet 3, a reflector II 4, a microscopic focusing lens 5, a telescopic imaging lens 6 and a CCD camera 7.
Referring to fig. 1, the reflective mirror i 2 is arranged on an emergent light path of the collimation light source 1, and emergent light of the collimation light source 1 is reflected by the reflective mirror i 2, passes through the broadband light splitting sheet 3 and the reflective mirror ii 4, and is converged by the micro-focusing lens 5 to illuminate an observed object.
Wherein the observed object is placed in a vacuum chamber 10, an analyzer 9 is obliquely installed in the vacuum chamber 10, and the analyzer 9 is arranged towards the observed object and used for amplifying the observed object.
The micro-focusing lens 5 is also used for receiving the reflected light of the observed object, and the reflected light passes through the micro-focusing lens 5, the reflecting mirror II, the broadband light splitting sheet 3 and the telescopic imaging lens 6 to be focused on the rake face of the CCD camera 7.
In the embodiment of the invention, the collimation light source 1 comprises an LED light source 11 and a collimation lens 12, and the collimation lens 12 is used for collimating light emitted by the LED light source 11 and irradiating the collimated light on a reflective mirror i 2 of an emergent light path.
The collimating lens 12 may be a single lens, a lens group, or a zone plate, and in this embodiment, the collimating lens 12 is a single lens having a collimating function and capable of collimating the emergent light of the LED light source 11.
In some embodiments of the present invention, the incident light path may also determine whether a mirror is needed according to the actual position of the collimator lens 12.
In the embodiment of the invention, the observed object is placed at the focus of the micro-focus lens 5, and the micro-focus lens 5 allows the observed object to have an included angle range of 0-45 degrees with the observed object, so that the profile of the observed object can be observed in the included angle range.
The focal length range of the micro-focusing lens 5 is 6-20mm, the distortion is less than 5%, the working distance between the micro-focusing lens and an observed object is greater than 5mm, and the distance between the micro-focusing lens and the reflector II 4 is 0.2-6 m.
In the present invention, the micro focusing lens 5 is a single lens, a lens group or a zone plate, and in this embodiment, the micro focusing lens 5 is a lens group for converging light rays.
In the invention, the focal length f of the micro-focusing lens 5 is 12mm, the working distance between the micro-focusing lens 5 and an observed object is 7.6mm, the distance between the micro-focusing lens 5 and the reflector II 4 is 1.7m, the focal depth of the micro-focusing lens 5 is larger, the observed object is placed at the focus of the micro-focusing lens, and the outline of the observed object can be clearly seen when the included angle between the micro-focusing lens 5 and the observed object is within the range of 0-45 degrees.
In the embodiment of the invention, the telescopic imaging lens 6 is a single lens or a lens group, the focal length range is 35-500mm, and the distortion is less than < 5%.
In the embodiment of the present invention, the wavelength band of the broadband light-splitting sheet 3 covers the visible light wavelength band, and the splitting ratio of the broadband light-splitting sheet 3 ranges from 30:70 to 70: 30.
In the tilt-mode telescopic microscope combined imaging device, the magnification calculation mode of the whole system is as follows: 17 diagonal dimension of display (mm)/diagonal dimension of CCD target surface (mm).
In the embodiment of the invention, the collimation light source 1, the reflector I2, the broadband light splitter 3, the reflector II 4 and the telescopic imaging lens 6 of the inclined mode telescopic microscopic combined imaging device are arranged in the air, the microscopic focusing lens 5 is arranged in the vacuum, the reflector II 4 and the microscopic focusing lens 5 are isolated from the vacuum by the optical window 8 and transmit light, and the inclined mode telescopic microscopic combined imaging device is used for forming a microscopic magnifying telescopic imaging lens group for observing a sample.
In summary, the invention provides a tilt-mode telescopic microscope combined imaging method, the emergent light of a collimation light source 1 is converged by a micro-focusing objective 5 after passing through a reflector I2, a broadband light-splitting sheet 3 and a reflector II 4 to illuminate an observed object, the reflected light of the observed object is focused to the rake face of a CCD camera 7 through a telescopic imaging lens 6 after passing through the micro-focusing objective 5, the reflector II 4 and the broadband light-splitting sheet 3, the micro-focusing objective 5 has a small size and is suitable for being installed in vacuum, the reflected light of the observed object is extended out of a vacuum cavity 10, the vacuum is isolated by an optical window 8, and the reflected light is finally focused through the telescopic imaging lens 6, so that the magnifying imaging function is realized. The optical system has large working distance, can observe an observed object in an inclined mode, and has clear imaging contour without distortion.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes, which are made by using the contents of the present specification and the accompanying drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. A tilt-mode telescopic microscope combined imaging method is characterized by comprising the following steps:
step 1), collimating emergent light of an LED light source (11) through a collimating lens (12), converging the collimated emergent light through a reflector I (2), a broadband light splitting sheet (3) and a reflector II (4) through a micro-focus lens (5), and illuminating an observed object;
and 2) the reflected light of the observed object passes through the micro-focusing lens (5) and the reflecting mirror II (4), passes through the broadband light splitting sheet (3), and is focused on the rake face of the CCD camera (7) through the telescopic imaging lens (6).
2. The tilt-mode telescopic microscope combined imaging method according to claim 1, wherein the tilt-mode telescopic microscope combined imaging method is based on a tilt-mode telescopic microscope combined imaging device configured with a power supply device for microscopic magnification imaging of an observed object, and the tilt-mode telescopic microscope combined imaging device comprises a collimated light source (1), a reflector I (2), a broadband beam splitter (3), a reflector II (4), a microscopic focusing lens (5), a telescopic imaging lens (6) and a CCD camera (7);
the reflector I (2) is arranged on an emergent light path of the collimation light source (1), emergent light of the collimation light source (1) is reflected by the reflector I (2), and is converged by the micro-focus lens (5) to illuminate an observed object after passing through the broadband light splitting sheet (3) and the reflector II (4);
the micro-focusing lens (5) is also used for receiving the reflected light of the observed object, and the reflected light passes through the micro-focusing lens (5) and the reflecting mirror II, passes through the broadband light splitting sheet (3), and is focused to the rake face of the CCD camera (7) through the telescopic imaging lens (6).
3. The combined oblique-mode telescopic microscope imaging method according to claim 2, wherein the collimating light source (1) comprises an LED light source (11) and a collimating lens (12), and the collimating lens (12) is used for collimating light emitted from the LED light source (11) and irradiating the collimated light on the reflector i (2) of an outgoing light path.
4. The tilt-mode telescopic microscopy combined imaging method according to claim 2, characterized in that the collimator lens (12) is a single lens, a lens group or a zone plate.
5. The tilt-mode telescopic microscope combined imaging method according to claim 2, wherein the tilt-mode telescopic microscope combined imaging apparatus is suitable for being used in a tilt mode, that is, the observed object is placed at a focal point of the microscope focusing lens (5), and the microscope focusing lens (5) allows the observed object to have an included angle range of 0-45 ° with the observed object, so that the profile of the observed object can be observed in the included angle range.
6. The combined imaging method of the inclined-mode telescope and microscope as claimed in claim 2 or 5, wherein the focal length of the microscope focusing lens (5) is in the range of 6-20mm, the distortion is less than < 5%, the working distance between the microscope focusing objective lens (5) and the observed object is >5mm, and the distance between the microscope focusing lens (5) and the reflector II (4) is in the range of 0.2-6 m.
7. The tilt-mode telescopic microscopy combined imaging method according to claim 6, characterized in that the micro-focusing lens (5) is a single lens, a lens group or a zone plate.
8. The combined oblique-mode telescopic microscopy imaging method according to claim 2, characterized in that the telescopic imaging lens (6) is a single lens or a lens group, the focal length is 35-500mm, and the distortion is less than < 5%.
9. The oblique-mode telescopic microscopy combined imaging method according to claim 2, wherein the wavelength band of the broadband beam splitter (3) covers the visible light wavelength band, and the splitting ratio of the broadband beam splitter (3) is in the range of 30:70 to 70: 30.
10. The oblique-mode telescopic microscopic combined imaging method according to claim 2, wherein the collimated light source (1), the reflective mirror i (2), the broadband beam splitter (3), the reflective mirror ii (4), and the telescopic imaging lens (6) of the oblique-mode telescopic microscopic combined imaging device are disposed in air, the microscopic focusing lens (5) is disposed in vacuum, the reflective mirror ii (4) and the microscopic focusing lens (5) are isolated from vacuum by the optical window (8) and transmit light, and the oblique-mode telescopic microscopic combined imaging device is used for forming a microscopic magnifying telescopic imaging lens group for sample observation.
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