CN105444878A - High-precision mass measurement device and high-precision mass measurement method of chemical oxygen iodine laser far-field beam - Google Patents
High-precision mass measurement device and high-precision mass measurement method of chemical oxygen iodine laser far-field beam Download PDFInfo
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Abstract
The present invention relates to a high-precision mass measurement device of a chemical oxygen iodine laser far-field beam. The high-precision mass measurement device comprises an attenuation spectroscope, a near-field light distribution measurement device, a focusing lens, a beam splitter, two facula measurement devices and a data processing unit. An optical splitter is arranged on the optical path of a laser beam, the near-field light distribution measurement device is arranged on one of output optical paths of the optical splitter, and the focusing lens and the beam splitter are disposed at the other one of the output optical paths of the optical splitter in turn; the facula measurement devices are respectively arranged at the two output optical paths of the beam splitter, and the facula measurement devices and the near-field light distribution measurement device are connected with the data processing unit. A high-precision mass measurement method comprises: controlling two guide rails to be located at setting positions; and obtaining far-field beam mass data of the beam by the data processing unit according to the facula images and the near-field intensity distribution data of a hard light beam acquired by the near-field light distribution measurement device. According to the invention, because acquisition figures are far away from focuses, the measurement errors of a CCD dynamic range are reduced, and the focal distance requirement of an imaging system is reduced.
Description
Technical field
The invention belongs to far-field analysis measurement mechanism and the method for Chemical oxygen-iodine laser technical field, the laser facula near two infrared CCD camera focusings is specifically utilized to carry out imaging, Phase Retrieve Algorithm is utilized to calculate the wave front data of laser exit, again by near field intensity distribution data, finally obtain the apparatus and method of the far-field analysis data of laser instrument.
Background technology
The scale of Chemical oxygen-iodine laser technology is increasing, and application is constantly expanded, and also more and more higher to the requirement of its beam quality index, and high precision obtains far-field analysis measuring method also becomes and be more badly in need of.
Now conventional far-field analysis measuring method is beam quality factor β measuring method, for national military standard 7367, the concrete enforcement utilizing encircled power method to measure far-field analysis is constrained in High Energy Laser Beam Quality factor-beta measuring method, require Focused Optical system relative aperture should and far-field spot detector between spatial resolution match, make that plane wave ideal beam diffraction-limited diameter one dimension section comprises pixel count and be not less than six.
As shown in Figure 1, measured laser bundle, after attenuation filter system and Focused Optical system, focuses on detector, and data acquisition processing system obtains the distribution of each frame spot intensity, collar diameter d in the far-field spot of measured laser bundle is calculated, according to formula according to intensity distributions
In formula, β
ifor single frames specimen beam quality factor; d
o ηcollar diameter when far-field spot collar power η for the tested light beam of annular beam is annular ideal beam diffraction limit collar power, mm; D is the peripheral diameter that tested light beam enters measuring system, mm; F is measuring system equivalent focal length, mm; λ is by side beam wavelength, mm.
This method depends critically upon the infrared CCD camera properties in system, simultaneously the pixel dimension of camera, dynamic range, and the indexs such as focusing system focal length are all the source of errors measured.Especially for the laser beam that nearly diffraction limit exports, more difficult at the precise acquisition of the diffraction image of focal position hot spot.Due to the Pixel Dimensions comparatively large (20 microns) of infrared CCD camera, this makes the focal length of measuring system must the very long light distribution can telling focus barycenter place.But focal length is systematically processed and testing cost is all very high, it is more difficult that the far-field analysis how accurately recording nearly diffraction limit becomes.Therefore need to study other beam quality measuring methods, with the current demand of satisfied measurement.
Phase recovery mensuration is by strength information, a kind of algorithm of light field phase recovery is carried out by series of iterations algorithm, the ultimate principle of phase recuperation technique is according to the theory of relevant wide ripple at free space diffraction propagation, when light beam is along optical axis, diffractive light field distribution can be formed in certain propagation distance, as shown in Figure 2, the reference wave sent from light source incides tested minute surface, after reflection, the COMPLEX AMPLITUDE in output light field light wave face just contains the control information of tested minute surface, phase recuperation technique is exactly a kind of method that intensity by calculating ejected wave face carrys out inverse incident corrugated phase place.
The detection in place that Phase Retrieve Algorithm is mainly used in large-scale optical element at optical field is measured, the research simultaneously utilizing Phase Retrieve Algorithm to carry out Wavefront also has report, the present invention is based on Phase Retrieve Algorithm and realize Technology of Wave-front Reconstruction, in conjunction with other optical information of laser beam, propose a kind of high-precision oxygen-iodine chemical laser beam quality and measure measuring method, and carry out concrete enforcement.This method overcomes the limitation of traditional far-field analysis β value measuring method, solve in traditional measurement method due to the measuring error that hot spot is less, infrared CCD pixel causes more greatly, reduce the measuring error that CCD dynamic range is introduced, also reduce the focal length requirement to imaging system simultaneously.
Summary of the invention
The object of the invention is to realize a kind of Chemical oxygen-iodine laser beam quality measurement mechanism based on Phase Retrieve Algorithm and method, the method is to effective improvement of traditional far-field analysis measuring method.
The technical scheme that the present invention is adopted for achieving the above object is: a kind of high precision oxygen-iodine chemical laser far-field analysis measurement mechanism, comprises decay spectroscope, near field intensity distribution measurement mechanism, condenser lens, beam splitter, two facula measurement devices and data processing unit;
The light path of laser beam is provided with optical splitter, an output light path of optical splitter is provided with near field intensity distribution measurement mechanism, another output light path is provided with condenser lens and beam splitter successively, two output light paths of beam splitter are respectively equipped with facula measurement device, and described facula measurement device is all connected with data processing unit with near field intensity distribution measurement mechanism.
Described spectroscopical two output light paths are mutually vertical.
Two output light paths of described beam splitter are mutually vertical.
Described facula measurement device comprises guide rail and CCD camera; Described CCD camera is fixed on the slide block of guide rail setting, for moving along laser beam optical axis direction on guide rail; Described CCD camera is connected with facula measurement device and data processing unit.
CCD camera in described two facula measurement devices is placed in the conjugate position before and after focus respectively.
A kind of high precision oxygen-iodine chemical laser far-field analysis measuring method, comprises the following steps:
DCU data control unit controls two guide rails and lays respectively at desired location;
Laser beam is attenuated optical splitter and is divided into orthogonal two-way light beam, and wherein main spot is received by near field intensity distribution measurement mechanism, is again divided into orthogonal two light beams by beam splitter after the secondary hot spot after decay enters condenser lens; Two CCD camera gather light spot image and feed back to data processing unit;
Data processing unit obtains the far-field analysis data of light beam according to the near-field intensity distribution data of the main spot light beam of light spot image and the collection of near-field optical cavity apparatus for measuring distribution, realizes the measurement of oxygen-iodine chemical laser bundle far-field analysis.
Described two CCD camera gather light spot image and are specially several light spot images that two CCD camera gather the forward and backward position of focal plane respectively.
The far-field analysis data that described data processing unit obtains light beam according to the near-field intensity distribution data of the main spot light beam of light spot image and the collection of near-field optical cavity apparatus for measuring distribution comprise the following steps:
Several light spot images of forward and backward for focal plane position utilize Phase Retrieve Algorithm to obtain the wavefront information of time hot spot by data processing unit; The near-field intensity distribution data of the main spot that combined with near field optical cavity apparatus for measuring distribution obtains, obtain the far-field analysis data of light beam by data transformation.
The present invention has following beneficial effect and advantage:
1, the measuring accuracy of far-field analysis of the present invention is high, and the wavefront measurement precision of laser beam can reach 1/10 λ, overcomes the limitation of traditional far-field analysis β value measuring method.
2, the hot spot due to sampling is large, solves because hot spot is less in traditional measurement method, the measuring error that infrared CCD pixel causes more greatly.
3, due to adopt and figure away from focus, reduce CCD dynamic range introduce measuring error, also reduce the focal length requirement to imaging system simultaneously.
4, the method is compared with traditional encircled power method beam quality β factor measuring method, has precision high; Infrared camera Pixel Dimensions index that need not be strict; To advantages such as the focal length of focusing system have no special requirements.
Accompanying drawing explanation
Fig. 1 is measuring principle block diagram of the present invention;
Fig. 2 is Phase Retrieve Algorithm schematic diagram;
Fig. 3 is far-field analysis measurement mechanism schematic diagram of the present invention.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
The invention belongs to a kind of high precision far-field analysis measuring method in Chemical oxygen-iodine laser technical field, its main thought measures the light distribution data of near focal point, calculated the wavefront information of laser exit by Phase Retrieve Algorithm, calculate laser remote field beam quality by wavefront information and near field intensity distribution data.Utilize two infrared CCD cameras to measure laser far field hot spot, obtained the wavefront information of laser exit by phase recovery method by intensity signal.Two infrared camera conjugation are positioned over focus front and back position in light path, by camera obtain the output wave of laser exit compared with the light distribution information of large spot before.Overcome the limitation of traditional far-field analysis β value measuring method, solve in traditional measurement method due to the measuring error that hot spot is less, infrared CCD pixel causes more greatly, reduce the measuring error that CCD dynamic range is introduced, also reduce the focal length requirement to imaging system simultaneously.
As shown in Figure 3, a kind of high precision far-field analysis measurement mechanism, comprise the precise guide rail 5,6 of decay optical splitter 1, near field intensity distribution measurement mechanism 2, condenser lens 3, beam splitter 4, two same sizes, the high-resolution imaging infrared CCD camera 7,8 of two same sizes and data processing unit composition 9.
Near field intensity distribution measurement mechanism 2 is prior art, adopts the indium gallium arsenic probe of two dimension arrangement, the near field intensity distribution of direct measuring laser beam.
Laser beam is attenuated optical splitter 1 and is divided into orthogonal two-way light beam, and wherein comparatively highlights is received by near field intensity distribution measurement mechanism 2, and the low light level part after decay enters condenser lens 3.Low light level part line focus lens are divided into orthogonal two light beams by beam splitter 4 after assembling again.The near focal point of two light beams places two cover facula measurement devices of phase conjugation respectively.
Wherein a set of facula measurement device is made up of precise guide rail 5 and infrared CCD camera 7.Another set of facula measurement device is made up of precise guide rail 6 and infrared CCD camera 8; Infrared CCD camera 7,8 is all connected with DCU data control unit 9, and precise guide rail 5,6 is all connected with DCU data control unit 9 by motor and controller.Guiderail base is fixed, and camera is fixed on the slide block on guide rail, and the slide block being loaded with camera can be controlled by controller, along slide.Precise guide rail can along laser beam optical axis direction Precision trimming.Two precise guide rail specifications are identical, and two infrared CCD camera specifications are identical, can realize synchronous operation under the control of data processing unit.Be mainly used in measuring the position that the preparatory stage determines two cameras, in measuring process, holding position is constant in most cases.
A kind of high precision far-field analysis measuring method:
Precise guide rail 5 is provided by DCU data control unit 9, the position control information of 6, camera 7 is made by Electric Machine Control slide block, 8 are placed in the front/rear appropriate location of respective focus (such as conjugate position) respectively, position choose by infrared CCD camera pixel index, system focal length, the parameters such as incipient beam of light quality determine, ensure that imaging facula is all in effective image planes of infrared CCD camera in camera moving process, infrared CCD camera 7 in photoreduction process is gone out at laser instrument, 8 light spot images obtaining diverse location before and after focal plane, Phase Retrieve Algorithm is utilized to obtain the wavefront information of low light level light beam (secondary hot spot) by the positional information of several spot pattern and two-dimensional intensity distribution data by data processing unit 9, utilize Fu Langhefei (Fraunhofer) diffraction theory, the near-field intensity distribution data of the high light light beam (main spot) that the wavefront information combined with near field optical cavity apparatus for measuring distribution 2 of light beam obtains, the far-field analysis data of light beam are obtained by data transformation, realize the measurement of oxygen-iodine chemical laser bundle far-field analysis.
Claims (8)
1. a high precision oxygen-iodine chemical laser far-field analysis measurement mechanism, is characterized in that comprising decay spectroscope (1), near field intensity distribution measurement mechanism (2), condenser lens (3), beam splitter (4), two facula measurement devices and data processing unit (9);
The light path of laser beam is provided with optical splitter (1), an output light path of optical splitter (1) is provided with near field intensity distribution measurement mechanism (2), another output light path is provided with successively condenser lens (3) and beam splitter (4), two output light paths of beam splitter (4) are respectively equipped with facula measurement device, and described facula measurement device is all connected with data processing unit (9) with near field intensity distribution measurement mechanism (2).
2. a kind of high precision oxygen-iodine chemical laser far-field analysis measurement mechanism according to claim 1, is characterized in that: two output light paths of described spectroscope (1) are mutually vertical.
3. a kind of high precision oxygen-iodine chemical laser far-field analysis measurement mechanism according to claim 1, is characterized in that: two output light paths of described beam splitter (4) are mutually vertical.
4. a kind of high precision oxygen-iodine chemical laser far-field analysis measurement mechanism according to claim 1, is characterized in that: described facula measurement device comprises guide rail (5,6) and CCD camera (7,8); Described CCD camera (7,8) is fixed on the slide block that guide rail (5,6) arranges, for moving along laser beam optical axis direction on guide rail (5,6); Described CCD camera is connected with facula measurement device and data processing unit (9).
5. a kind of high precision oxygen-iodine chemical laser far-field analysis measurement mechanism according to claim 1, is characterized in that: the CCD camera (7,8) in described two facula measurement devices is placed in the conjugate position before and after focus respectively.
6. a high precision oxygen-iodine chemical laser far-field analysis measuring method, is characterized in that comprising the following steps:
DCU data control unit (9) controls two guide rails (5,6) and lays respectively at desired location;
Laser beam is attenuated optical splitter (1) and is divided into orthogonal two-way light beam, wherein main spot is received by near field intensity distribution measurement mechanism (2), is again divided into orthogonal two light beams by beam splitter (4) after the secondary hot spot after decay enters condenser lens (3); Two CCD camera (7,8) gather light spot image and feed back to data processing unit (9);
The near-field intensity distribution data of the main spot light beam that data processing unit (9) gathers according to light spot image and near-field optical cavity apparatus for measuring distribution (2) obtain the far-field analysis data of light beam, realize the measurement of oxygen-iodine chemical laser bundle far-field analysis.
7. a kind of high precision oxygen-iodine chemical laser far-field analysis measuring method according to claim 6, is characterized in that described two CCD camera (7,8) gather light spot image and are specially several light spot images that two CCD camera (7,8) gather the forward and backward position of focal plane respectively.
8. a kind of high precision oxygen-iodine chemical laser far-field analysis measuring method according to claim 6, is characterized in that the far-field analysis data that the near-field intensity distribution data of the main spot light beam that described data processing unit (9) gathers according to light spot image and near-field optical cavity apparatus for measuring distribution (2) obtain light beam comprise the following steps:
Several light spot images of forward and backward for focal plane position utilize Phase Retrieve Algorithm to obtain the wavefront information of time hot spot by data processing unit (9); The near-field intensity distribution data of the main spot that combined with near field optical cavity apparatus for measuring distribution (2) obtains, obtain the far-field analysis data of light beam by data transformation.
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| CN107167301A (en) * | 2017-07-11 | 2017-09-15 | 中国人民解放军国防科学技术大学 | The method for evaluating laser beam quality Improvement |
| CN108088557A (en) * | 2018-01-17 | 2018-05-29 | 南京先进激光技术研究院 | A kind of mid-infrared laser beam analysis device |
| CN108287059A (en) * | 2018-01-16 | 2018-07-17 | 南京理工大学 | High-precision near-infrared laser beam quality measurement analysis device |
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| CN107167301A (en) * | 2017-07-11 | 2017-09-15 | 中国人民解放军国防科学技术大学 | The method for evaluating laser beam quality Improvement |
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| CN108414081A (en) * | 2018-01-16 | 2018-08-17 | 南京理工大学 | The method for improving liquid lens apparatus for measuring quality of laser beam measuring speed |
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| CN109883543A (en) * | 2018-12-29 | 2019-06-14 | 合肥华脉激光科技有限公司 | It is a kind of can continuous synchronization measurement high-power laser pulse energy, spatial distribution and pulse width method and device |
| CN111024225A (en) * | 2019-12-02 | 2020-04-17 | 西北核技术研究院 | Absolute measurement device and method for power distribution curve in laser far-field barrel |
| CN114414212A (en) * | 2021-12-22 | 2022-04-29 | 同济大学 | Portable laser beam quality beta factor testing arrangement |
| CN115683576A (en) * | 2022-12-28 | 2023-02-03 | 中国科学院长春光学精密机械与物理研究所 | Detection device and method for optical coupling device |
| CN115683576B (en) * | 2022-12-28 | 2023-03-10 | 中国科学院长春光学精密机械与物理研究所 | Detection device and method of optical coupling device |
| CN117190865A (en) * | 2023-10-20 | 2023-12-08 | 西安杰瑞测量科技有限公司 | Beam detection positioning instrument |
| CN117191198A (en) * | 2023-11-07 | 2023-12-08 | 四川中久大光科技有限公司 | Beam quality real-time monitoring device and application method thereof |
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