CN103308280A - Quantum efficiency calibration device and calibrating method for CCD (charge coupled device) - Google Patents

Quantum efficiency calibration device and calibrating method for CCD (charge coupled device) Download PDF

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CN103308280A
CN103308280A CN2013101994999A CN201310199499A CN103308280A CN 103308280 A CN103308280 A CN 103308280A CN 2013101994999 A CN2013101994999 A CN 2013101994999A CN 201310199499 A CN201310199499 A CN 201310199499A CN 103308280 A CN103308280 A CN 103308280A
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integrating sphere
quantum efficiency
ccd device
wavelength
light
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刘红元
王恒飞
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CETC 41 Institute
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Abstract

The invention provides a quantum efficiency calibration device for a CCD (charge coupled device), comprising a light source, a monochromator, an integrating sphere, a monitoring detector, a fiber optic spectrometer, a data acquisition system, a precise displacement platform, a CCD drive circuit and a control system; the output light of the light source and the monochromator is injected to the integrating sphere through four symmetric directions; the fiber optic spectrometer obtains the wavelength of the output light at the output port of the integrating sphere through a light collector; the precise displacement platform adjusts the photosensitive surface of the tested CCD to be positioned in the center of the light outlet hole of the integrating sphere; the data acquisition system collects one frame or multiple frames of the output signal of the tested CCD; the monitoring detector obtains the light power distribution of the integrating sphere at the output port of the integrating sphere; the control system changes the output wavelength of the monochromator according to certain stepping and tests the quantum efficiency of the CCD at the next wavelength point and draws the changing curve of the quantum efficiency of the tested CCD, along with the wavelength.

Description

A kind of CCD device quantum efficiency calibrating installation and calibration steps
Technical field
The present invention relates to technical field of measurement and test, particularly a kind of CCD device quantum efficiency calibrating installation also relates to a kind of CCD device quantum efficiency calibration steps.
Background technology
At present, calibration for CCD device quantum efficiency does not also have relevant device, existing method is mainly and adopts first single-point light to the test of CCD device quantum efficiency, and then by the relative spectral response test macro, measure the light of CCD device to spectral response curve, calculate the CCD device quantum efficiency of the whole wave band of CCD device by the relative spectral response of the CCD device single-point quantum efficiency that records and CCD device.The general needs of this method two cover systems just can be finished the test to CCD device quantum efficiency, and cost is high, efficient is low, also compare time-consuming.
Summary of the invention
The present invention proposes a kind of CCD device quantum efficiency calibrating installation and calibration steps, and having solved needs two cover systems just can finish test to CCD device quantum efficiency in the prior art, and cost is high, efficient is low, the problem of time-consuming.
Technical scheme of the present invention is achieved in that
A kind of CCD device quantum efficiency calibrating installation comprises: light source, monochromator, integrating sphere, monitoring detector, fiber spectrometer, data acquisition system (DAS), precision displacement table, CCD component driving circuit and control system; The quantity of described light source and monochromator is respectively quadruplet, and the monochromator delivery outlet converges in the fibre bundle after focus on amplifying through light collector, and the four direction by symmetry is injected in the described integrating sphere; Described fiber spectrometer obtains the output light wavelength by light collector at the integrating sphere delivery outlet; Described precision displacement table is adjusted the parallel light hole center that is in described integrating sphere of tested CCD device photosurface; Described data acquisition system (DAS) gathers a frame or the tested CCD device of multiframe output signal, deducts dead pixel or overheated pixel, calculates the mean value of all effective pixel output signals as CCD device output signal; Described monitoring detector obtains the optical power distribution of integrating sphere at the integrating sphere delivery outlet; Described control system changes the monochromator output wavelength by certain stepping, tests out the CCD device quantum efficiency of next wavelength points, and take wavelength as horizontal ordinate, quantum efficiency is ordinate, draws out tested CCD device quantum efficiency with the change curve of wavelength.
Alternatively, described light source is the xenon lamp of 500W.
Alternatively, described integrating sphere diameter is 50cm, delivery outlet diameter 12cm.
Alternatively, described fibre bundle is the large core fiber bundle.
The present invention also provides a kind of CCD device quantum efficiency calibration steps, be applicable to above-mentioned CCD device quantum efficiency calibrating installation, may further comprise the steps: adopt quadruplet monochromatic source and quadruplet monochromator output monochromatic light, converging to fibre bundle after focus on amplifying through light collector, being injected into the integrating sphere from the four direction of symmetry; Fiber spectrometer obtains the output light wavelength by light collector at the integrating sphere delivery outlet; Precision displacement table is adjusted the parallel light hole center that is in described integrating sphere of tested CCD device photosurface; Data acquisition system (DAS) gathers a frame or the tested CCD device of multiframe output signal, deducts dead pixel or overheated pixel, calculates the mean value of all effective pixel output signals as CCD device output signal; Described monitoring detector obtains the optical power distribution of integrating sphere at the integrating sphere delivery outlet; Described control system changes the monochromator output wavelength by certain stepping, tests out the CCD device quantum efficiency of next wavelength points, and take wavelength as horizontal ordinate, quantum efficiency is ordinate, draws out tested CCD device quantum efficiency with the change curve of wavelength.
The invention has the beneficial effects as follows: monochrome, large tracts of land, high uniformity source can be provided, can calibrate CCD device quantum efficiency, for CCD device user and the producer provide high-acruracy survey.
Description of drawings
In order to be illustrated more clearly in the embodiment of the invention or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art, apparently, accompanying drawing in the following describes only is some embodiments of the present invention, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of a kind of CCD device of the present invention quantum efficiency calibrating installation;
Fig. 2 is the structural representation of light source among Fig. 1.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the invention, the technical scheme in the embodiment of the invention is clearly and completely described, obviously, described embodiment only is the present invention's part embodiment, rather than whole embodiment.Based on the embodiment among the present invention, those of ordinary skills belong to the scope of protection of the invention not making the every other embodiment that obtains under the creative work prerequisite.
As shown in Figure 1, CCD device quantum efficiency calibrating installation of the present invention comprises: light source 10, monochromator 20, integrating sphere 30, monitoring detector 40, fiber spectrometer 50, data acquisition system (DAS) 60, precision displacement table 71, CCD component driving circuit 80 and control system 90.For eliminating parasitic light to the impact of CCD device quantum efficiency measurement result, CCD device 72 is placed light shield case 70.
Light source 10 adopts the xenon lamp of 500W, and integrating sphere 30 diameters are 50cm, delivery outlet diameter 12cm.Light source 10 and monochromator 20 adopt respectively quadruplet to form, monochromator 20 delivery outlets converge in the fibre bundle after focusing on amplification, be injected into the integrating sphere 30 from the four direction of symmetry, so just avoided the weak and inhomogeneous impact of integrating sphere 30 output light, and by the wavelength variations of fiber spectrometer 50 by light collector 51 continuous detecting integrating spheres 30 delivery outlets, will reduce so the inaccurate uncertainty of bringing into of integrating sphere delivery outlet wavelength.
In measuring process, adjust the parallel light hole center that is in integrating sphere of tested CCD device 72 photosurfaces by precision displacement table 71, adjust CCD component driving circuit 80 and make it be operated in optimum condition.Quadruplet monochromator output light incides in the integrating sphere 30 by four direction, be mapped on the measured device photosurface through the uniform illumination that sends after the integrating sphere diffuse reflection, data acquisition system (DAS) 60 gathers a frame or tested CCD device 72 output signals of multiframe, deduct dead pixel or overheated pixel, calculated the mean value of all effective pixel output signals by (1) formula as CCD device output signal.
I ‾ = 1 m * n - ( h + d ) Σ i = 1 N I i - - - ( 1 )
In the formula: m is the row of CCD device, and n is the row of CCD device, and h is overheated pixel number, and d is dead pixel, and N is that effective pixel is counted N=m*n-(h+d), and Ii is i the effectively electric signal of pixel output,
Figure BSA00000901870700032
Mean value for all effective pixel output signals.
Be the accuracy of raising wavelength, thereby improve the uncertainty of measurement of quantum efficiency, integrating sphere 30 output light wavelengths do not obtain from monochromator 20, but are obtained at integrating sphere 30 delivery outlets by light collector 51 by fiber spectrometer 50.The optical power distribution of integrating sphere 30 can be obtained at the integrating sphere delivery outlet by monitoring detector 40, then carries out data analysis and process by the test mathematical model, and substitution (2) formula obtains tested CCD device in the quantum efficiency of af at wavelength lambda.
Q E λ = I P × h · c e · λ - - - ( 2 )
In the formula: I represents the output of CCD response device signal, and P represents integrating sphere spoke emergent light power, and h represents Planck's constant, and c represents the light velocity in the vacuum, and e elementary charge, λ represent integrating sphere radiation light wavelength.
Control system 90 changes monochromator 20 output wavelengths by certain stepping, tests out the CCD device quantum efficiency of next wavelength points, and take wavelength as horizontal ordinate, quantum efficiency is ordinate, draws out tested CCD device quantum efficiency with the change curve of wavelength.
As shown in Figure 2, for power and the power stability that improves the integrating sphere delivery outlet, light source 10 of the present invention comprises the quadruplet monochromatic source, after focusing on and amplify, quadruplet monochromator 20 output light process light collectors 53 converge to the fibre bundle 52 of large core diameter, be injected into the integrating sphere 30 from the four direction of symmetry, so both greatly improve the output power of integrating sphere, also improved the homogeneity of integrating sphere output.
The present invention also provides a kind of CCD device quantum efficiency calibration steps, be applicable to above-mentioned CCD device quantum efficiency calibrating installation, may further comprise the steps: adopt quadruplet monochromatic source and quadruplet monochromator output monochromatic light, converge to the fibre bundle of large core diameter after focus on amplifying through light collector, be injected into the integrating sphere from the four direction of symmetry; Fiber spectrometer obtains the output light wavelength by light collector at the integrating sphere delivery outlet; Precision displacement table is adjusted the parallel light hole center that is in described integrating sphere of tested CCD device photosurface; Data acquisition system (DAS) gathers a frame or the tested CCD device of multiframe output signal, deducts dead pixel or overheated pixel, calculates the mean value of all effective pixel output signals as CCD device output signal; Monitoring detector obtains the optical power distribution of integrating sphere at the integrating sphere delivery outlet; Control system changes the monochromator output wavelength by certain stepping, tests out the CCD device quantum efficiency of next wavelength points, and take wavelength as horizontal ordinate, quantum efficiency is ordinate, draws out tested CCD device quantum efficiency with the change curve of wavelength.
CCD device quantum efficiency calibrating installation of the present invention and calibration steps can provide monochrome, large tracts of land, high uniformity source, can calibrate CCD device quantum efficiency, for CCD device user and the producer provide high-acruracy survey.
The above only is preferred embodiment of the present invention, and is in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, is equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (5)

1. a CCD device quantum efficiency calibrating installation is characterized in that, comprising: light source, monochromator, integrating sphere, monitoring detector, fiber spectrometer, data acquisition system (DAS), precision displacement table, CCD component driving circuit and control system;
The quantity of described light source and monochromator is respectively quadruplet, and the monochromator delivery outlet converges to fibre bundle after focus on amplifying through light collector, is injected into the described integrating sphere from the four direction of symmetry;
Described fiber spectrometer obtains the output light wavelength by light collector at the integrating sphere delivery outlet;
Described precision displacement table is adjusted the parallel light hole center that is in described integrating sphere of tested CCD device photosurface;
Described data acquisition system (DAS) gathers a frame or the tested CCD device of multiframe output signal, deducts dead pixel or overheated pixel, calculates the mean value of all effective pixel output signals as CCD device output signal;
Described monitoring detector obtains the optical power distribution of integrating sphere at the integrating sphere delivery outlet;
Described control system changes the monochromator output wavelength by certain stepping, tests out the CCD device quantum efficiency of next wavelength points, and take wavelength as horizontal ordinate, quantum efficiency is ordinate, draws out tested CCD device quantum efficiency with the change curve of wavelength.
2. CCD device quantum efficiency calibrating installation as claimed in claim 1 is characterized in that, described light source is the xenon lamp of 500W.
3. CCD device quantum efficiency calibrating installation as claimed in claim 1 is characterized in that, described integrating sphere diameter is 50cm, and the delivery outlet diameter is 12cm.
4. CCD device quantum efficiency calibrating installation as claimed in claim 1 is characterized in that, described fibre bundle is the large core fiber bundle.
5. CCD device quantum efficiency calibration steps, be applicable to each described CCD device quantum efficiency calibrating installation of claim 1 to 4, it is characterized in that, may further comprise the steps: adopt quadruplet monochromatic source and quadruplet monochromator output monochromatic light, converging to fibre bundle after focus on amplifying through light collector, being injected into the integrating sphere from the four direction of symmetry; Fiber spectrometer obtains the output light wavelength by light collector at the integrating sphere delivery outlet; Precision displacement table is adjusted the parallel light hole center that is in described integrating sphere of tested CCD device photosurface; Data acquisition system (DAS) gathers a frame or the tested CCD device of multiframe output signal, deducts dead pixel or overheated pixel, calculates the mean value of all effective pixel output signals as CCD device output signal; Described monitoring detector obtains the optical power distribution of integrating sphere at the integrating sphere delivery outlet; Described control system changes the monochromator output wavelength by certain stepping, tests out the CCD device quantum efficiency of next wavelength points, and take wavelength as horizontal ordinate, quantum efficiency is ordinate, draws out tested CCD device quantum efficiency with the change curve of wavelength.
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CN104125456A (en) * 2014-07-15 2014-10-29 中国电子科技集团公司第四十一研究所 CCD (Charge Coupled Device) system gain measurement device and method
CN104142226A (en) * 2014-08-12 2014-11-12 中国电子科技集团公司第四十一研究所 CCD device quantum efficiency measuring device and method
CN104776915A (en) * 2015-04-01 2015-07-15 清华大学 Video spectrometer correction device
CN106067971A (en) * 2016-05-24 2016-11-02 中国科学院长春光学精密机械与物理研究所 Imageing sensor absolute spectral response test device and method of testing thereof
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CN108896277A (en) * 2018-05-23 2018-11-27 中国电子科技集团公司第四十研究所 A kind of CCD device quantum efficiency calibrating installation and method
CN111157225A (en) * 2019-08-21 2020-05-15 南京理工大学 Labview-based EMCCD chip full-performance parameter testing method
CN114577446A (en) * 2022-03-07 2022-06-03 中国科学院紫金山天文台 CCD/CMOS extreme ultraviolet band quantum efficiency detection device and method

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103616076A (en) * 2013-11-13 2014-03-05 中国电子科技集团公司第四十一研究所 Color calibration device covering complete color gamut
CN104125456A (en) * 2014-07-15 2014-10-29 中国电子科技集团公司第四十一研究所 CCD (Charge Coupled Device) system gain measurement device and method
CN104142226A (en) * 2014-08-12 2014-11-12 中国电子科技集团公司第四十一研究所 CCD device quantum efficiency measuring device and method
CN107003243A (en) * 2014-12-02 2017-08-01 浜松光子学株式会社 Spectroscopic measurement device and spectral photometry method
CN104776915A (en) * 2015-04-01 2015-07-15 清华大学 Video spectrometer correction device
CN106067971A (en) * 2016-05-24 2016-11-02 中国科学院长春光学精密机械与物理研究所 Imageing sensor absolute spectral response test device and method of testing thereof
CN108896277A (en) * 2018-05-23 2018-11-27 中国电子科技集团公司第四十研究所 A kind of CCD device quantum efficiency calibrating installation and method
CN111157225A (en) * 2019-08-21 2020-05-15 南京理工大学 Labview-based EMCCD chip full-performance parameter testing method
CN114577446A (en) * 2022-03-07 2022-06-03 中国科学院紫金山天文台 CCD/CMOS extreme ultraviolet band quantum efficiency detection device and method
CN114577446B (en) * 2022-03-07 2023-08-11 中国科学院紫金山天文台 CCD/CMOS extreme ultraviolet band quantum efficiency detection device and method

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