CN103983571A - Detector pixel response nonuniform error correction device and correction method thereof - Google Patents
Detector pixel response nonuniform error correction device and correction method thereof Download PDFInfo
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Abstract
The invention discloses a detector pixel response nonuniform error correction device and a correction method thereof, the device includes a laser light source component, a coupling lens, optical fiber, a container and a black box which are arranged in sequence; the container is provided with a scattering medium solution, the optical fiber inserts into the scattering medium solution, the black box is provided with a detector to be corrected, and the detector to be corrected is connected with a signal acquisition and processing module. The correction method is as follows: alignment laser emitted by the laser light source component is focused to the optical fiber by the coupling lens, the laser is led into the scattering medium solution by the optical fiber from an incident end face, volume scattering of the laser is performed in the scattering medium solution, scattered light is transmitted into the black box from an outgoing end face to form a uniform light field in the position of the detector to be corrected; and the signal acquisition and processing module acquires and processes the test data to obtain correction. By use of the detector pixel response nonuniform error correction device, detector pixel response nonuniform correction wavelength can be matched with actual laser measurement system laser wavelength, so that high accuracy laser measurement can be realized.
Description
Technical field
The present invention relates to a kind of laser acquisition field, be specifically related to a kind of method that detector pixel responds non-homogeneous error correction device and correction thereof.
Background technology
In high-precision laser measuring equipment, conventional face battle array pixel detector is measured the changes in distribution of light signal, and high-accuracy measurement means the faint variation that face battle array pixel detector must sensitive induction light signal.Yet, being limited to the precision of semiconducter process, the error ratio of most battle array pixel detector is more serious, the non-homogeneous error of pixel light electroresponse particularly, be under identical illumination condition, the output signal of different pixels is different, this by distortion the variation of light field in actual measurement.For example, in synchrotron radiation optics component side shape checkout equipment-long-range profile instrument, in order to reach the surface slope measuring accuracy of 0.1 μ rad rms, the non-homogeneous error requirements of planar array detector pixel response is less than 0.5%rms (Yashchuk, 2006), and the non-homogeneous error 2-3%rms of the common detector pixel.The light field that generation has certain uniformity coefficient is an important job with the non-homogeneous error of calibration pixel response.
In the non-homogeneous error calibration system of traditional detector, conventional incoherent light source, as LED, Halogen lamp LED.For example ALS has set up LED calibration system (Kirschman et al., 2007), to CCD(Charge-coupled Device, charge coupled cell) calibration accuracy to reach before 0.5%(be 1.2-1.3%).The LED light source using is highlight flux 44lm, and in calibration system, the distance of LED distance CCD to be corrected is 670mm.
Yet there is spectral response problem in this detector correction scheme.The response of ccd detector is relevant with wavelength, has in other words certain spectral characteristic.And in the calibration program of ALS, the LED of use is the light source of wide spectrum.According to test, its variations in peak scope is at 620nm-645nm, and representative value is at 627nm, and spectral half width is 20nm.Therefore, the non-homogeneous error correcting system of this detector pixel response, must be used the light that the LASER Light Source of narrow spectrum produces to calibrate.Yet high relevant laser can form speckle in space, cannot meet the requirement of high-acruracy survey.
Summary of the invention
Provide hereinafter about brief overview of the present invention, to the basic comprehension about some aspect of the present invention is provided.Should be appreciated that this general introduction is not about exhaustive general introduction of the present invention.It is not that intention is determined key of the present invention or pith, and nor is it intended to limit the scope of the present invention.Its object is only that the form of simplifying provides some concept, usings this as the preorder in greater detail of discussing after a while.
The object of the embodiment of the present invention is the defect for above-mentioned prior art, provide a kind of simple in structure, using narrow-band spectrum laser as shimming lighting source, can realize very high light field uniformity coefficient, the detector pixel that meets high-acruracy survey requirement responds non-homogeneous error correction device.
To achieve these goals, the technical scheme that the present invention takes is:
Detector pixel responds a non-homogeneous error correction device, comprises LASER Light Source assembly, coupled lens, optical fiber, container, black box and the signals collecting and the processing module that set gradually;
In described container, be provided with scattering medium solution, insert in scattering medium solution described optical fiber one end, and described black box is for placing detector to be calibrated, and described detector to be calibrated connects signals collecting and processing module;
Described LASER Light Source assembly, for providing the laser of specified wavelength, firm power and collimation;
Described coupled lens, for Laser Focusing that LASER Light Source assembly is provided and be coupled to optical fiber;
Described optical fiber, for inner to scattering medium solution by the laser transfer through coupled lens;
Described scattering medium solution, the laser of deriving for scattering optical fiber;
Described black box, for blocking and absorbing parasitic light;
Described signals collecting and processing module, the uniform light field forming for the detector position to be calibrated is carried out data acquisition and processing (DAP), obtains correction data.
The present invention also provides a kind of and uses above-mentioned detector pixel to respond the method that non-homogeneous error correction device is proofreaied and correct, the collimation laser that LASER Light Source assembly is penetrated focuses to described fiber end face through described coupled lens, the laser that described optical fiber is come in coupling enters described scattering medium solution from an end face of described container, nano particle in described scattering medium solution carries out volume scattering to laser, scattered light is from the other end transmission of described container, enter in the described black box of perforate, and form uniform light field at described detector position to be calibrated; Described signals collecting and processing module realize collection, the processing of test figure to the uniform light field forming at described detector position to be calibrated, finally obtain the correction data that one group of detector pixel to be calibrated responds non-homogeneous error.
Compared with prior art, the invention has the beneficial effects as follows:
The present invention is usingd narrow-band spectrum laser as shimming lighting source, can realize the laser source wavelength that detector pixel responds tuning wavelength heterogeneous and practical laser measuring system matches, realize very high light field uniformity coefficient, thereby realize high-precision laser measurement.
Adopt device of the present invention, can provide a kind of efficiently loose speckle suppression method, and optical energy loss is low.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The detector pixel that Fig. 1 provides for the embodiment of the present invention responds the structural representation of non-homogeneous error correction device;
The structural representation of the container that Fig. 2 provides for the embodiment of the present invention;
The signals collecting that Fig. 3 provides for the embodiment of the present invention and the structured flowchart of processing module.
Reference numeral:
1-LASER Light Source assembly; 2-coupled lens; 3-optical fiber; 4-scattering medium solution; 5-container, 51-incident end face, 52-outgoing end face, 53-upper surface, 54-the first side wall, 55-the second sidewall, 56-lower surface, 57-the first through hole, 58-the second through hole, 59-third through-hole; 6-black box, 61-perforate; 7-detector to be calibrated; 8-signals collecting and processing module;
101-CCD driving circuit; 102-data collecting card; 103-software program; 104-display screen.
Embodiment
For making object, technical scheme and the advantage of the embodiment of the present invention clearer, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is the present invention's part embodiment, rather than whole embodiment.The element of describing in an accompanying drawing of the present invention or a kind of embodiment and feature can combine with element and feature shown in one or more other accompanying drawing or embodiment.It should be noted that for purposes of clarity, in accompanying drawing and explanation, omitted expression and the description of unrelated to the invention, parts known to persons of ordinary skill in the art and processing.Embodiment based in the present invention, those of ordinary skills, not paying the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
Referring to Fig. 1, a kind of detector pixel responds non-homogeneous error correction device, comprises LASER Light Source assembly 1, coupled lens 2, optical fiber 3, container 5, black box 6 and the signals collecting and the processing module 8 that set gradually;
In container 5, be provided with scattering medium solution 4, insert in scattering medium solution 4 optical fiber 3 one end, and black box 6 is for placing detector to be calibrated 7, and detector 7 to be calibrated connects signals collecting and processing module 8;
LASER Light Source assembly 1, for providing the laser of specified wavelength, firm power and collimation;
Coupled lens 2, for Laser Focusing that LASER Light Source assembly 1 is provided and be coupled to optical fiber 3;
Optical fiber 3, for by the laser transfer through coupled lens 2 to scattering medium solution 4 inside;
Scattering medium solution 4, the laser of deriving for scattering optical fiber 3;
Black box 5, for blocking and absorbing parasitic light;
Signals collecting and processing module 8, the uniform light field forming for detector 7 positions to be calibrated is carried out data acquisition and processing (DAP), obtains correction data.
The present invention is by arranging the irradiation tunnel of laser, realize narrow-band spectrum laser as shimming lighting source, the correction light field that can produce LASER Light Source Spectral matching in the laser measuring device for measuring with practical application, is applicable to the correction of detector in high-accuracy laser measuring equipment.This apparatus structure is simple, can realize very high light field uniformity coefficient.
Preferably, optical fiber 3 is single-mode fiber or multimode optical fiber; And/or; One end that optical fiber 3 inserts scattering medium solution 4 is provided with collimation lens.
The output terminal of optical fiber of the present invention can be used collimation lens collimated light beam, and collimation lens is arranged in the scattering medium solution of container, is fixed on the output terminal of optical fiber, also can be without collimation lens, and directly diverging light incident arranges collimation lens and can improve transmittance.
Referring to Fig. 2, Fig. 2 has provided the concrete structure of container 5, and the incident end face 51 of container 5 is provided with the first through hole 57, for described optical fiber, inserts; The upper surface 53 of container 5 is provided with the second through hole 58 and third through-hole 59, the second through holes 58 inject for scattering medium solution, and third through-hole 59 takes out for scattering medium solution.
The bore of the present invention's the first through hole is identical with the bore of optical fiber.Through hole is set, is convenient to the insertion of optical fiber, and the inflow of scattering medium solution or outflow.The second through hole 58 and third through-hole 59 be connecting tube respectively, the inflow and the outflow that by pipeline, supply scattering medium solution.
Preferably, the inside surface of the incident end face 51 of container 5, upper surface 53, the first side wall 54, the second sidewall 55 and lower surface 56 is all coated with reflectance coating; And/or; The outgoing end face 52 of container 5 is optical mirror slip.
The design that reflectance coating is set can effectively improve light transmission rate.The outgoing end face of scattered light exit end is level and smooth optical mirror slip, and transmittance is high, surface cleaning.
In this example, preferably, incident end face 51 and outgoing end face 52 are of a size of 20mm*20mm, and container 5 length are 40mm, and wall thickness is 1mm.The diameter of the second through hole 58 and third through-hole 59 is 1mm.
Referring to Fig. 1, preferably, scattering medium solution 4 comprises solute and solvent, and described solute is that refractive index is large, the nano particle of low absorption; Preferred index is greater than 1.5; Described solvent is to have the lower coefficient of viscosity and the material of absorption coefficient.
In the present invention, the material of nano particle and particle diameter are selected to need to consider:
(1) the decoherence time τ=τ of scattered optical field
0(l
*/ L)
2, calculate, wherein l
*, τ
0, L is respectively transmission free path, diffuse scattering time and transmission path length, τ
0be directly proportional to particle diameter, l
*can calculate by Mie scattering theory.
The uniformity coefficient C of the uniform light field that the present invention produces at detector position to be calibrated can calculate according to the time shutter T of scattering particles Brownian movement caused decoherence time τ and detector to be calibrated,
(2) light transmission rate
the selection of solute is according to guaranteeing, under the prerequisite of certain light transmission rate T, to reduce the decoherence time.For this reason, answer that selective refraction rate is large, the nano particle of low absorption, grain diameter scope is within the scope of 50nm-500nm.
Preferably, described nano particle is TiO
2nano particle, styrene bead nano particle or SiC nano particle, particle size range should be at 50nm-500nm; And/or; Described solvent is deionized water, acetone or alcohol; And/or; The temperature of described scattering medium solution is 20-100 ℃; And/or; In described scattering medium solution, the percent by volume of nano particle is 1-20%.Scattering medium solution 4 is to be full of container 5 to be advisable.
Preferably, the solute of scattering medium solution is TiO
2nano particle, refractive index is 2.584, and particle diameter is 100nm, and solvent is deionized water, and the percent by volume of nano particle is 1.6%, adopts this scattering medium solution, the path 1mm of transmitted light, light field uniformity coefficient is higher than 1 ‰.
Referring to Fig. 1 and Fig. 2, preferably, a side of black box 6 is provided with perforate 61, and perforate 61 is oppositely arranged with the outgoing end face 52 of container 5; And/or the material of black box 6 is the black paper of extinction or black cloth, the area of perforate 61 and peripheral profile are identical with the outgoing end face of described container; The width of black box 6 is at least 2 times that the outgoing end face 52 of container arrives detector 7 distances to be calibrated; And/or, being centered close on same straight line of the outgoing end face 52 of container, perforate 61 and described detector to be calibrated.
The incident port of black box in the present invention, i.e. the size of the outgoing end face of perforate and described container matches; Guaranteed transmittance, wherein, the direction seeing through along laser is the length direction of black box, the horizontal direction of vertical length direction is the width place direction of black box, the width of black box is at least 2 times that the outgoing end face of container arrives detector distance to be calibrated, effectively to stop the scattered light of black box sidewall to be detected device, is surveyed.
Referring to Fig. 3, schematically provided measurement mechanism Embedded real-time signal processing module frame chart, signals collecting and processing module 8 comprise: CCD driving circuit 101, data collecting card 102, data processing module 103 and display screen 104; After CCD driving circuit 101 carries out electric signal signal amplification etc. and processes, by data collecting card 102, gathered and analog to digital conversion after, then process through data processing module 103, obtain correction data and show by display screen 104.Wherein, data processing module 103, for the multi collect results averaged a to data collecting card output
j, this mean value is correction data.
The present invention, by collection, the processing of signals collecting and processing modules implement test figure, finally obtains the correction data that one group of detector pixel to be calibrated responds non-homogeneous error.For the random perturbation of eliminating photon noise, reading the caused light signals of noise such as noise, system takes multiple measurements the scattered optical field producing.The correction data of final j the pixel obtaining be to should pixel the mean value a of measurement data repeatedly
j.In practical application, the signal strength detection of detector to be calibrated is I
j, after proofreading and correct, true light field signal intensity is I0
j=I
j/ a
j.
The present invention also provides and has used above-mentioned detector pixel to respond the method that non-homogeneous error correction device is proofreaied and correct, the collimation laser that LASER Light Source assembly is penetrated focuses to described fiber end face through described coupled lens, the laser that described optical fiber is come in coupling enters described scattering medium solution from an end face of described container, nano particle in described scattering medium solution carries out volume scattering to laser, scattered light is from the other end transmission of described container, enter in the described black box of perforate, and form uniform light field at described detector position to be calibrated; Described signals collecting and processing module realize collection, the processing of test figure to the uniform light field forming at described detector position to be calibrated, finally obtain the correction data that one group of detector pixel to be calibrated responds non-homogeneous error.
In detector correction process, guarantee scattering medium solution 4 temperature stabilizations in container, as maintain 20-100 ℃.Higher temperature is conducive to promote the Brownian movement speed of nano particle, the coherence who further reduces light field.
Preferably, the uniform light field that described signals collecting and processing module form described detector position to be calibrated takes multiple measurements; The correction data of j the pixel obtaining be to should pixel the mean value a of measurement data repeatedly
j, this value is correction data.In actual measurement application, the signal strength detection of the detector of described calibration is I
j, real light field signal I0
j=I
j/ a
j.
In the various embodiments described above of the present invention, the sequence number of embodiment is only convenient to describe, and does not represent the quality of embodiment.Description to each embodiment all emphasizes particularly on different fields, and there is no the part of detailed description in certain embodiment, can be referring to the associated description of other embodiment.
One of ordinary skill in the art will appreciate that: all or part of step that realizes said method embodiment can complete by the relevant hardware of programmed instruction, aforesaid program can be stored in a computer read/write memory medium, this program, when carrying out, is carried out the step that comprises said method embodiment; And aforesaid storage medium comprises: various media that can be program code stored such as ROM (read-only memory) (Read-Only Memory is called for short ROM), random access memory (Random Access Memory is called for short RAM), magnetic disc or CDs.
In the embodiment such as apparatus and method of the present invention, obviously, each parts or each step reconfigure after can decomposing, combine and/or decomposing.These decomposition and/or reconfigure and should be considered as equivalents of the present invention.Simultaneously, in the above in the description of the specific embodiment of the invention, the feature of describing and/or illustrating for a kind of embodiment can be used in same or similar mode in one or more other embodiment, combined with the feature in other embodiment, or substitute the feature in other embodiment.
Should emphasize, term " comprises/comprises " existence that refers to feature, key element, step or assembly while using herein, but does not get rid of the existence of one or more further feature, key element, step or assembly or add.
Finally it should be noted that: although described above the present invention and advantage thereof in detail, be to be understood that in the situation that do not exceed the spirit and scope of the present invention that limited by appended claim and can carry out various changes, alternative and conversion.And scope of the present invention is not limited only to the specific embodiment of the described process of instructions, equipment, means, method and step.One of ordinary skilled in the art will readily appreciate that from disclosure of the present invention, can use carry out with the essentially identical function of corresponding embodiment described herein or obtain process, equipment, means, method or step result essentially identical with it, that existing and will be developed future according to the present invention.Therefore, appended claim is intended to comprise such process, equipment, means, method or step in their scope.
Claims (10)
1. detector pixel responds a non-homogeneous error correction device, it is characterized in that:
Comprise LASER Light Source assembly, coupled lens, optical fiber, container, black box and the signals collecting and the processing module that set gradually;
In described container, be provided with scattering medium solution, insert in scattering medium solution described optical fiber one end, and described black box is for placing detector to be calibrated, and described detector to be calibrated connects signals collecting and processing module;
Described LASER Light Source assembly, for providing the laser of specified wavelength, firm power and collimation;
Described coupled lens, for Laser Focusing that LASER Light Source assembly is provided and be coupled to optical fiber;
Described optical fiber, for inner to scattering medium solution by the laser transfer through coupled lens;
Described scattering medium solution, the laser of deriving for scattering optical fiber;
Described black box, for blocking and absorbing parasitic light;
Described signals collecting and processing module, the uniform light field forming for the detector position to be calibrated is carried out data acquisition and processing (DAP), obtains correction data.
2. detector pixel according to claim 1 responds non-homogeneous error correction device, it is characterized in that: described optical fiber is single-mode fiber or multimode optical fiber; And/or; One end that described optical fiber inserts scattering medium solution is provided with collimation lens.
3. detector pixel according to claim 1 responds non-homogeneous error correction device, it is characterized in that: the incident end face of described container is provided with the first through hole, for described optical fiber, inserts; The upper surface of described container is provided with the second through hole and third through-hole, and described the second through hole injects for scattering medium solution, and described third through-hole takes out for scattering medium solution; And/or; The inside surface of the incident end face of described container, upper surface, the first side wall, the second sidewall and lower surface is all coated with reflectance coating; And/or; The outgoing end face of described container is optical mirror slip.
4. detector pixel according to claim 1 responds non-homogeneous error correction device, it is characterized in that: described scattering medium solution comprises solute and solvent, and described solute is that refractive index is large, the nano particle of low absorption; Described solvent is to have the lower coefficient of viscosity and the material of absorption coefficient.
5. detector pixel according to claim 4 responds non-homogeneous error correction device, it is characterized in that: described nano particle is TiO
2nano particle, polystyrene sphere nano particle or SiC nano particle, particle size range should be at 50nm-500nm; And/or; Described solvent is deionized water, acetone or alcohol; And/or; The temperature of described scattering medium solution is 20-100 ℃; And/or; In described scattering medium solution, the percent by volume of nano particle is 1-20%.
6. detector pixel according to claim 1 responds non-homogeneous error correction device, it is characterized in that: a side of described black box is provided with perforate, and the outgoing end face of described perforate and container is oppositely arranged; And/or the material of described black box is the black paper of extinction or black cloth, the area of described perforate and peripheral profile are identical with the outgoing end face of described container; And/or the width of described black box is at least 2 times that the outgoing end face of described container arrives described detector distance to be calibrated; And/or, being centered close on same straight line of outgoing end face, perforate and the described detector to be calibrated of described container.
7. detector pixel according to claim 1 responds non-homogeneous error correction device, it is characterized in that: described signals collecting and processing module comprise: CCD driving circuit, data collecting card, data processing module and display screen; Described CCD driving circuit carries out electric signal after signal amplify to process, by data collecting card, gathered and analog to digital conversion after, then process through data processing module, obtain correction data and show by display screen.
8. detector pixel according to claim 7 responds non-homogeneous error correction device, it is characterized in that: described data processing module, for the multi collect results averaged to data collecting card output, this mean value is correction data.
9. the detector pixel described in right to use requirement 1-8 any one responds the method that non-homogeneous error correction device is proofreaied and correct, and it is characterized in that:
The collimation laser that LASER Light Source assembly is penetrated focuses to described fiber end face through described coupled lens, the laser that described optical fiber is come in coupling enters described scattering medium solution from an end face of described container, nano particle in described scattering medium solution carries out volume scattering to laser, scattered light is from the other end transmission of described container, enter in the described black box of perforate, and form uniform light field at described detector position to be calibrated; Described signals collecting and processing module realize collection, the processing of test figure to the uniform light field forming at described detector position to be calibrated, finally obtain the correction data that one group of detector pixel to be calibrated responds non-homogeneous error.
10. the method for correction according to claim 9, is characterized in that: the uniform light field that described signals collecting and processing module form described detector position to be calibrated takes multiple measurements; The correction data of j the pixel obtaining be to should pixel the mean value a of measurement data repeatedly
j, the signal strength detection of described detector to be calibrated is I
j, real light field signal is I0
j=I
j/ a
j.
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| CN108007677A (en) * | 2017-12-27 | 2018-05-08 | 杭州远方光电信息股份有限公司 | A kind of laser projection speckle measurement system |
| CN108007677B (en) * | 2017-12-27 | 2023-10-27 | 杭州远方光电信息股份有限公司 | Laser projection speckle measurement system |
| CN109031394A (en) * | 2018-05-03 | 2018-12-18 | 中国科学院高能物理研究所 | A method of measurement scintillator detector location information |
| CN109031394B (en) * | 2018-05-03 | 2019-11-26 | 中国科学院高能物理研究所 | A method of measurement scintillator detector location information |
| CN111610460A (en) * | 2019-10-31 | 2020-09-01 | 广州市浩洋电子股份有限公司 | Optical parameter detector |
| CN111238775A (en) * | 2020-03-11 | 2020-06-05 | 中国工程物理研究院激光聚变研究中心 | Three-dimensional distribution measuring device for scattering power of photonic crystal fiber |
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