CN103983571B - Detector pixel response nonuniform error correction device and correction method thereof - Google Patents

Detector pixel response nonuniform error correction device and correction method thereof Download PDF

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Publication number
CN103983571B
CN103983571B CN201410148101.3A CN201410148101A CN103983571B CN 103983571 B CN103983571 B CN 103983571B CN 201410148101 A CN201410148101 A CN 201410148101A CN 103983571 B CN103983571 B CN 103983571B
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detector
laser
optical fiber
scattering medium
medium solution
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CN103983571A (en
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杨福桂
李明
盛伟繁
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Institute of High Energy Physics of CAS
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Institute of High Energy Physics of CAS
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Abstract

The invention discloses a detector pixel response nonuniform error correction device and a correction method thereof, the device includes a laser light source component, a coupling lens, optical fiber, a container and a black box which are arranged in sequence; the container is provided with a scattering medium solution, the optical fiber inserts into the scattering medium solution, the black box is provided with a detector to be corrected, and the detector to be corrected is connected with a signal acquisition and processing module. The correction method is as follows: alignment laser emitted by the laser light source component is focused to the optical fiber by the coupling lens, the laser is led into the scattering medium solution by the optical fiber from an incident end face, volume scattering of the laser is performed in the scattering medium solution, scattered light is transmitted into the black box from an outgoing end face to form a uniform light field in the position of the detector to be corrected; and the signal acquisition and processing module acquires and processes the test data to obtain correction. By use of the detector pixel response nonuniform error correction device, detector pixel response nonuniform correction wavelength can be matched with actual laser measurement system laser wavelength, so that high accuracy laser measurement can be realized.

Description

Detector pixel responds non-homogeneous error correction device and the method for correction thereof
Technical field
The present invention relates to a kind of laser acquisition field, be specifically related to a kind of detector pixel and respond non-homogeneous error correction device and the method for correction thereof.
Background technology
In high-precision laser measurement equipment, conventional face battle array pixel detector measures the changes in distribution of optical signal, and high-accuracy measurement means that face battle array pixel detector allows for the faint change of sensitive sensing optical signal.But, it being limited to the precision of semiconducter process, the application condition of most battle array pixel detector is serious, the particularly non-homogeneous error of pixel light electroresponse, under the conditions of i.e. same light is shone, the output signal of different pixels is different, and this will distort the change of light field in actual measurement.Such as, in synchrotron radiation optics component side shape detection equipment-long-range profile instrument, in order to reach the surface slope certainty of measurement of 0.1 μ rad rms, the non-homogeneous error requirements of planar array detector pixel response is less than 0.5%rms (Yashchuk, 2006), non-homogeneous error 2-3%rms of the common detector pixel.It is an important job with the non-homogeneous error that calibration pixel responds that generation has the light field of certain uniformity.
In traditional non-homogeneous error calibration system of detector, conventional incoherent light source, such as LED, Halogen light.Such as ALS establishes LED calibration system (Kirschman et al., 2007), to CCD(Charge-coupled Device, charge coupled cell) calibration accuracy reach before 0.5%(for 1.2-1.3%).The LED light source used is highlight flux 44lm, and in calibration system, LED is 670mm apart from the distance of CCD to be corrected.
But, there is spectral response problem in this detector correction scheme.The response of ccd detector is relevant with wavelength, has certain spectral characteristic in other words.And in the calibration program of ALS, the LED of use is the light source of wide spectrum.According to test, its variations in peak scope is at 620nm-645nm, and representative value is at 627nm, and spectral half width is 20nm.Therefore, the non-homogeneous error correcting system of this detector pixel response, it is necessary to use light produced by the LASER Light Source of narrow spectrum to calibrate.But, high relevant laser can form speckle in space, it is impossible to meets the requirement of high-acruracy survey.
Summary of the invention
Brief overview about the present invention given below, in order to the basic comprehension about certain aspects of the invention is provided.Should be appreciated that this general introduction is not that the exhaustive about the present invention is summarized.It is not intended to determine the key of the present invention or pith, and nor is it intended to limit the scope of the present invention.Its purpose is only to provide some concept in simplified form, in this, as the preamble in greater detail discussed after a while.
The purpose of the embodiment of the present invention is the defect for above-mentioned prior art, a kind of simple in construction is provided, using narrow-band spectrum laser as shimming lighting source, it is possible to realize the highest light field uniformity, meet the detector pixel non-homogeneous error correction device of response that high-acruracy survey requires.
To achieve these goals, the present invention adopts the technical scheme that:
A kind of detector pixel responds non-homogeneous error correction device, including the laser light source module set gradually, coupled lens, optical fiber, container, black box and Signal sampling and processing module;
Being provided with scattering medium solution in described container, described optical fiber one end is inserted in scattering medium solution, and described black box is for placing detector to be calibrated, and described detector to be calibrated connects Signal sampling and processing module;
Described laser light source module, for providing the laser of specified wavelength, firm power and collimation;
Described coupled lens, for by laser light source module provide laser focusing and be coupled in optical fiber;
Described optical fiber, inside by the laser transfer of coupled lens to scattering medium solution;
Described scattering medium solution, for scattering the laser that optical fiber is derived;
Described black box, is used for blocking and absorbing veiling glare;
Described Signal sampling and processing module, for the uniform light field formed at detector position to be calibrated is carried out data acquisition and processing (DAP), obtains correction data.
The present invention also provides for a kind of method using the above-mentioned detector pixel non-homogeneous error correction device of response to be corrected, the collimation laser that laser light source module penetrates is focused to described fiber end face through described coupled lens, the laser that described optical fiber will be coupled into enters described scattering medium solution from an end face of described container, nano-particle in described scattering medium solution carries out volume scattering to laser, scattered light is from the other end transmission of described container, enter in the described black box of perforate, and form uniform light field at described detector position to be calibrated;Described Signal sampling and processing module realizes the collection of test data, process to the uniform light field formed at described detector position to be calibrated, the final correction data obtaining one group of detector pixel to be calibrated non-homogeneous error of response.
Compared with prior art, the invention has the beneficial effects as follows:
The present invention is using narrow-band spectrum laser as shimming lighting source, it is capable of detector pixel to respond the laser source wavelength of tuning wavelength heterogeneous and practical laser measurement system and match, realize the highest light field uniformity, thus realize high-precision laser measurement.
Use assembly of the invention, using the teaching of the invention it is possible to provide a kind of efficient speckle suppressing method, and optical energy loss is low.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, the accompanying drawing used required in embodiment or description of the prior art will be briefly described below, apparently, accompanying drawing in describing below is only some embodiments of the present invention, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 responds the structural representation of non-homogeneous error correction device for the detector pixel that the embodiment of the present invention provides;
The structural representation of the container that Fig. 2 provides for the embodiment of the present invention;
The structured flowchart of the Signal sampling and processing module that Fig. 3 provides for the embodiment of the present invention.
Reference:
1-laser light source module;2-coupled lens;3-optical fiber;4-scattering medium solution;5-container, 51-incident end face, 52-outgoing end face, 53-upper surface, 54-the first side wall, 55-the second sidewall, 56-lower surface, 57-the first through hole, 58-the second through hole, 59-third through-hole;6-black box, 61-perforate;7-detector to be calibrated;8-Signal sampling and processing module;
101-CCD drive circuit;102-data collecting card;103-software program;104-display screen.
Detailed description of the invention
For making the purpose of the embodiment of the present invention, technical scheme and advantage clearer, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is a part of embodiment of the present invention rather than whole embodiments.Element and feature described in the accompanying drawing of the present invention or a kind of embodiment can combine with the element shown in one or more other accompanying drawing or embodiment and feature.It should be noted that, for purposes of clarity, accompanying drawing and explanation eliminate unrelated to the invention, parts known to persons of ordinary skill in the art and the expression of process and description.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art are obtained under not paying creative work premise, broadly fall into the scope of protection of the invention.
Seeing Fig. 1, a kind of detector pixel responds non-homogeneous error correction device, including the laser light source module 1 set gradually, coupled lens 2, optical fiber 3, container 5, black box 6 and Signal sampling and processing module 8;
Being provided with scattering medium solution 4 in container 5, optical fiber 3 one end is inserted in scattering medium solution 4, and black box 6 is for placing detector 7 to be calibrated, and detector 7 to be calibrated connects Signal sampling and processing module 8;
Laser light source module 1, for providing the laser of specified wavelength, firm power and collimation;
Coupled lens 2, for the laser focusing that laser light source module 1 provided and be coupled in optical fiber 3;
Optical fiber 3, for internal by the laser transfer of coupled lens 2 to scattering medium solution 4;
Scattering medium solution 4, for scattering the laser that optical fiber 3 is derived;
Black box 5, is used for blocking and absorbing veiling glare;
Signal sampling and processing module 8, for the uniform light field formed in detector 7 position to be calibrated is carried out data acquisition and processing (DAP), obtains correction data.
The present invention is by arranging the irradiation tunnel of laser, realize narrow-band spectrum laser as shimming lighting source, can produce and the correction light field of LASER Light Source Spectral matching in the laser measuring device for measuring of actual application, it is adaptable to the correction of detector in high-accuracy laser measuring equipment.This apparatus structure is simple, it is possible to realize the highest light field uniformity.
Preferably, optical fiber 3 is single-mode fiber or multimode fibre;And/or;Optical fiber 3 inserts one end of scattering medium solution 4 and is provided with collimating lens.
The outfan of optical fiber of the present invention can use collimating lens collimated beam, and collimating lens is positioned in the scattering medium solution of container, is fixed on the outfan of optical fiber, it is also possible to without collimating lens, and directly diverging light is incident, arranges collimating lens and can improve light transmittance.
Seeing Fig. 2, Fig. 2 and give the concrete structure of container 5, the incident end face 51 of container 5 is provided with the first through hole 57, inserts for described optical fiber;The upper surface 53 of container 5 is provided with the second through hole 58 and third through-hole 59, and the second through hole 58 injects for scattering medium solution, and third through-hole 59 takes out for scattering medium solution.
The bore of the present invention the first through hole is identical with the bore of optical fiber.Through hole is set, it is simple to the insertion of optical fiber, and the flowing in or out of scattering medium solution.Second through hole 58 and third through-hole 59 connect pipeline respectively, by pipeline flowing in and out for scattering medium solution.
Preferably, the inner surface of the incident end face 51 of container 5, upper surface 53, the first side wall the 54, second sidewall 55 and lower surface 56 is all coated with reflectance coating;And/or;The outgoing end face 52 of container 5 is optical glass.
The design arranging reflectance coating can be effectively improved light transmission rate.The outgoing end face of scattered light exit end is smooth optical glass, and light transmittance is high, surface cleaning.
In this example, it is preferable that the size of incident end face 51 and outgoing end face 52 is 20mm*20mm, a length of 40mm of container 5, wall thickness is 1mm.Second through hole 58 and a diameter of 1mm of third through-hole 59.
See Fig. 1, it is preferable that scattering medium solution 4 includes that solute and solvent, described solute are that refractive index is big, the nano-particle of low absorption;Preferred index is more than 1.5;Described solvent is the material with the relatively low coefficient of viscosity and absorptance.
In the present invention, the material of nano-particle and particle diameter select to need to consider:
(1) the decoherence time τ=τ of scattered optical field0(l*/L)2, calculate, wherein l*, τ0, L is transmission free path respectively, diffusing scattering time and transmission path length, τ0It is directly proportional to particle diameter, l*Can be calculated by Mie scattering theory.
The present invention can calculate according to the time of exposure T of the decoherence time τ caused by scattering particles Brownian movement and detector to be calibrated, i.e. in uniformity C of uniform light field produced by detector position to be calibrated
C = τ / 4 T
(2) light transmission rateThe selection gist of solute should reduce the decoherence time on the premise of ensureing certain light transmission rate T.To this end, answer, selective refraction rate is big, the nano-particle of low absorption, and particle size range is in the range of 50nm-500nm.
Preferably, described nano-particle is TiO2Nano-particle, styrene bead nano-particle or SiC nano-particle, particle size range should be at 50nm-500nm;And/or;Described solvent is deionized water, acetone or alcohol;And/or;The temperature of described scattering medium solution is 20-100 DEG C;And/or;In described scattering medium solution, the percent by volume of nano-particle is 1-20%.Scattering medium solution 4 is advisable to be full of by container 5.
Preferably, the solute of scattering medium solution is TiO2Nano-particle, refractive index is 2.584, and particle diameter is 100nm, and solvent is deionized water, and the percent by volume of nano-particle is 1.6%, uses this scattering medium solution, path 1mm of transmission light, and light field uniformity is higher than 1 ‰.
Seeing Fig. 1 and Fig. 2, it is preferable that the side of black box 6 is provided with perforate 61, perforate 61 is oppositely arranged with the outgoing end face 52 of container 5;And/or, the material of black box 6 is the black paper of extinction or black cloth, and the area of perforate 61 and circumference are identical with the outgoing end face of described container;The width of black box 6 is at least the outgoing end face 52 of container to 2 times of detector 7 distance to be calibrated;And/or, the outgoing end face 52 of container, perforate 61 and described detector to be calibrated are centrally located on same straight line.
In the present invention, the entry port of black box, i.e. perforate match with the size of the outgoing end face of described container;Ensure that light transmittance, wherein, the length direction that direction is black box along laser light, the horizontal direction in vertical length direction is the direction, width place of black box, the width of black box is at least the outgoing end face of container to 2 times of detector distance to be calibrated, effectively to stop the scattered light of black box sidewall to be detected by detector.
Seeing Fig. 3, representatively illustrate measurement apparatus Embedded real-time signal processing module frame chart, Signal sampling and processing module 8 includes: CCD drive circuit 101, data collecting card 102, data processing module 103 and display screen 104;After the signal of telecommunication is carried out the process such as signal amplification by CCD drive circuit 101, gathered and after analog digital conversion by data collecting card 102, then process through data processing module 103, obtain correction data and shown by display screen 104.Wherein, data processing module 103, for multi collect results averaged a to data collecting card outputj, this meansigma methods is correction data.
The present invention realizes the collection of test data, process by Signal sampling and processing module, the final correction data obtaining one group of detector pixel to be calibrated non-homogeneous error of response.In order to eliminate the random disturbance of the optical signal caused by the noise such as photon noise, reading noise, the scattered optical field produced is taken multiple measurements by system.The correction data of the final jth pixel obtained is to should meansigma methods a of pixel repetitive measurement dataj.In actual application, the signal strength detection of detector to be calibrated is Ij, then after correction, true light field signal intensity is I0j=Ij/aj
Present invention also offers and use above-mentioned detector pixel to respond the method that non-homogeneous error correction device is corrected, the collimation laser that laser light source module penetrates is focused to described fiber end face through described coupled lens, the laser that described optical fiber will be coupled into enters described scattering medium solution from an end face of described container, nano-particle in described scattering medium solution carries out volume scattering to laser, scattered light is from the other end transmission of described container, enter in the described black box of perforate, and form uniform light field at described detector position to be calibrated;Described Signal sampling and processing module realizes the collection of test data, process to the uniform light field formed at described detector position to be calibrated, the final correction data obtaining one group of detector pixel to be calibrated non-homogeneous error of response.
During detector correction, it is ensured that scattering medium solution 4 temperature stabilization in container, as maintained 20-100 DEG C.Higher temperature is conducive to promoting the Brownian movement speed of nano-particle, reduces the coherence of light field further.
Preferably, the uniform light field that described detector position to be calibrated is formed by described Signal sampling and processing module takes multiple measurements;The correction data of jth pixel obtained is to should meansigma methods a of pixel repetitive measurement dataj, this value is correction data.In reality measures application, the signal strength detection of the detector of described calibration is Ij, then real light field signal I0j=Ij/aj
In the various embodiments described above of the present invention, the sequence number of embodiment is merely convenient of description, does not represent the quality of embodiment.Description to each embodiment all emphasizes particularly on different fields, and does not has the part described in detail, may refer to the associated description of other embodiments in certain embodiment.
One of ordinary skill in the art will appreciate that: all or part of step realizing said method embodiment can be completed by the hardware that programmed instruction is relevant, aforesaid program can be stored in a computer read/write memory medium, this program upon execution, performs to include the step of said method embodiment;And aforesaid storage medium includes: the various media that can store program code such as read only memory (Read-Only Memory is called for short ROM), random access memory (Random Access Memory is called for short RAM), magnetic disc or CDs.
In the embodiments such as apparatus and method of the present invention, it is clear that each parts or each step reconfigure after can decomposing, combine and/or decomposing.These decompose and/or reconfigure the equivalents that should be regarded as the present invention.Simultaneously, in description to the specific embodiment of the invention above, the feature described for a kind of embodiment and/or illustrate can use in one or more other embodiment in same or similar mode, combined with the feature in other embodiment, or substitute the feature in other embodiment.
It should be emphasized that term " includes/comprise " existence referring to feature, key element, step or assembly herein when using, but it is not precluded from the existence of one or more further feature, key element, step or assembly or additional.
Although it is last it is noted that the present invention and advantage thereof have been described in detail above it should be appreciated that various change can be carried out in the case of without departing from the spirit and scope of the present invention being defined by the claims appended hereto, substitute and convert.And, the scope of the present invention is not limited only to the specific embodiment of the process described by description, equipment, means, method and steps.One of ordinary skilled in the art will readily appreciate that from the disclosure, can use according to the present invention and performs the function essentially identical to corresponding embodiment described herein or obtain process, equipment, means, method or the step result essentially identical with it, existing and the most to be developed.Therefore, appended claim is directed in the range of them including such process, equipment, means, method or step.

Claims (12)

1. a detector pixel responds non-homogeneous error correction device, it is characterised in that:
Adopt including the laser light source module set gradually, coupled lens, optical fiber, container, black box and signal Collection and processing module;
Being provided with scattering medium solution in described container, described optical fiber one end is inserted in scattering medium solution, institute Stating black box for placing detector to be calibrated, described detector to be calibrated connects Signal sampling and processing Module;
Described laser light source module, for providing the laser of specified wavelength, firm power and collimation;
Described coupled lens, for by laser light source module provide laser focusing and be coupled in optical fiber;
Described optical fiber, inside by the laser transfer of coupled lens to scattering medium solution;
Described scattering medium solution, for scattering the laser that optical fiber is derived;
Described black box, is used for blocking and absorbing veiling glare;
Described Signal sampling and processing module, for the uniform light formed at detector position to be calibrated Field carries out data acquisition and processing (DAP), obtains correction data.
Detector pixel the most according to claim 1 responds non-homogeneous error correction device, and it is special Levy and be: described optical fiber is single-mode fiber or multimode fibre;And/or described optical fiber to insert scattering medium molten One end of liquid is provided with collimating lens.
Detector pixel the most according to claim 1 responds non-homogeneous error correction device, and it is special Levy and be: the incident end face of described container is provided with the first through hole, insert for described optical fiber;Described container Upper surface be provided with the second through hole and third through-hole, described second through hole injects for scattering medium solution, institute State third through-hole to take out for scattering medium solution;And/or the incident end face of described container, upper surface, The inner surface of one sidewall, the second sidewall and lower surface is all coated with reflectance coating;And/or the outgoing of described container End face is optical glass.
Detector pixel the most according to claim 1 responds non-homogeneous error correction device, and it is special Levy and be: described scattering medium solution includes that solute and solvent, described solute are that refractive index is big, low absorption Nano-particle;Described solvent is the material with the relatively low coefficient of viscosity and absorptance.
Detector pixel the most according to claim 4 responds non-homogeneous error correction device, and it is special Levy and be: described nano-particle is TiO2Nano-particle, polystyrene sphere nano-particle or SiC receive Rice grain, particle size range should be at 50nm-500nm;And/or described solvent be deionized water, acetone or Ethanol;And/or the temperature of described scattering medium solution is 20-100 DEG C;And/or described scattering medium solution The percent by volume of middle nano-particle is 1-20%.
Detector pixel the most according to claim 1 responds non-homogeneous error correction device, and it is special Levying and be: the side of described black box is provided with perforate, described perforate is oppositely arranged with the outgoing end face of container.
Detector pixel the most according to claim 6 responds non-homogeneous error correction device, and it is special Levy and be: the material of described black box be the black paper of extinction or black cloth, the area of described perforate and circumference with The outgoing end face of described container is identical;And/or the outgoing end face of described container, perforate and described to be calibrated Detector is centrally located on same straight line.
8. respond non-homogeneous error correction device according to the detector pixel described in claim 1,6 or 7, It is characterized in that: the width of described black box is at least the outgoing end face of described container to described detection to be calibrated 2 times of device distance.
Detector pixel the most according to claim 1 responds non-homogeneous error correction device, and it is special Levy and be: described Signal sampling and processing module includes: CCD drive circuit, data collecting card, number According to processing module and display screen;After the signal of telecommunication is carried out signal processing and amplifying by described CCD drive circuit, Gathered and after analog digital conversion by data collecting card, then process through data processing module, obtain correction data and lead to Cross display screen to show.
Detector pixel the most according to claim 9 responds non-homogeneous error correction device, and it is special Levy and be: described data processing module, for the multi collect result of data collecting card output is averaged Value, this meansigma methods is correction data.
The detector pixel that 11. 1 kinds use described in any one of claim 1-10 responds non-homogeneous error The method that correcting unit is corrected, it is characterised in that:
The collimation laser that laser light source module penetrates is focused to described optical fiber end through described coupled lens Face, it is molten that the laser that described optical fiber will be coupled into enters described scattering medium from an end face of described container In liquid, the nano-particle in described scattering medium solution carries out volume scattering to laser, and scattered light is from described appearance The other end transmission of device, enters in the described black box of perforate, and at described detector position to be calibrated Form uniform light field;Described Signal sampling and processing module is formed at described detector position to be calibrated Uniform light field realize the collection of test data, process, final obtain one group of detector pixel to be calibrated Respond the correction data of non-homogeneous error.
The method of 12. corrections according to claim 11, it is characterised in that: described signals collecting The uniform light field formed described detector position to be calibrated with processing module takes multiple measurements;Obtain The correction data of jth pixel be to should meansigma methods a of pixel repetitive measurement datajTreat described in, The signal strength detection of the detector of calibration is Ij, then real light field signal is I0j=Ij/aj
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