CN102012310A - Novel full-band CCD detector performance evaluating system and method - Google Patents
Novel full-band CCD detector performance evaluating system and method Download PDFInfo
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Abstract
The invention discloses a novel full-band CCD detector performance evaluating system and method. The system comprises an ultraviolet visible section spectroscopic detecting system, a CCD detector data collection system, and a CCD detector performance evaluating system, wherein the ultraviolet visible section spectroscopic detecting system is connected with the CCD detector performance evaluating system through the CCD detector data collection system. The method comprises the following steps of: (1) correcting wavelengths of the system; (2) calibrating energy of the system; (3) detecting stability and sensitivity of the full-wavelength data of the CCD detector; and (4) evaluating the full-wavelength performances of the CCD detector. The invention provides the cheap, portable and fast full-band CCD detector performance evaluating system and method, thereby ensuring that the evaluation of the performances of the CCD detector is simple, fast and comprehensive and the good application of the CCD detector to the optical spectrum instrument.
Description
Technical field:
The present invention relates to a kind of spectral analysis device, relate in particular to system that the performance of optical signal detector in a kind of spectral instrument estimates and this system and realize the method estimated.
Background technology:
The optical signal detector of spectral instrument mainly contains three classes, i.e. thermal detector, photon detector, semiconductor image sensor.The optical signal detector of modern spectral instrument mainly is the PMT detecting device based on common different size, and what also have is detecting device with CCD.PMT is as using main detecting device always, and it is high, highly sensitive to gain, response is fast, cost hangs down the course that radiance was arranged in the Atomic Absorption Spectrometer development, and its technology is now also in continuous development and update.And the CCD detecting device is the storage by electronics and shifts detection signal, its quantum efficiency height, based on metering system difference to detection signal, its relative PMT can improve 5-6 order of magnitude of setting-out line shape scope when being equipped with the echelle grating of continuous light source and big chromatic dispersion, also can carry out multielement analysis simultaneously.The CCD detecting device has than higher sensitivity in overall optical analysis of spectrum district scope, is more suitable for the detection of faint light, can suitably increase optical-integral-time to the detection of the low light level time, because it is a kind of integral detector.Because it has very low distributed capacitance, thus its to read noise lower, dark current (temperature influence needs the refrigerated constant temperature environment) is also obviously lower than PMT.No matter from photon efficiency, dark current, read its performance the each side such as noise, multielement are analyzed simultaneously, line style scope and all have clearly advantage, be after a kind of inexorable trend of Atomic Absorption Spectrometer development.
The detecting device of inductive coupling high-frequency plasma ICP-AES spectrometer is existing much to use 300,000 pixel CCD, and spectral resolution reaches 0.0035nm.
Therefore, the highly sensitive CCD detecting device in UV, visible light district also is the direction of medium-to-high grade spectral instrument development in the application of spectral instrument.
Because the CCD receiving device has advantages such as wide spectral response, high resolving power, low noise, high photoresponse consistance, direct opto-electronic conversion, high dynamic range, be widely used in fields such as spatial image remote sensing, real time monitoring, scientific research, become the critical component of shooting.External by improvement CCD structure, the exploitation new technology, the CCD operating wavelength range of development can reach 190nm～1000nm, is well positioned to meet the requirement of spectrometer, has extensively adopted wide spectrum CCD on the external advanced large-scale spectral instrument.
The CCD receiving device to be used for spectral instrument, specific requirement must be arranged the performance index of CCD receiving device, but present highly sensitive CCD detection means has only independently method of testing and detection means to self performance parameters index, testing tool is large-scale visible light integrating sphere test macro, big (the diameter＞80Cm) of test macro volume, the expense costliness, test duration is long, and only can provide effective pixel (as 800 * 800 (lining by line scan)) of CCD detection means, sensitivity: (as 0.01Lx (640nm)), spectral response range is (as 190nm～1000nm), response unevenness parameters such as (as≤10%), the parameters of operating part limitation that the parts supplier is provided very big (performance of no ultraviolet band), and spectral instrument requires to understand the sensitivity and the stability of parts device in whole test spectral scope, so can not allow the user accept.Therefore, the implementation method of the CCD detector performance evaluation system of cheap, light, all band (UV, visible light section) of design one cover and this system be very necessary with realistic meaning is arranged.
Summary of the invention:
The present invention is directed to prior art and detect existing a series of problem in performance index to the CCD receiving device, and the method for a kind of cheapness, light, quick, full wave CCD detector performance evaluation system and this system evaluation CCD detector performance.
In order to achieve the above object, the present invention adopts following technical scheme:
A kind of novel full wave CCD detector performance evaluation system, this system comprises UV, visible light section spectral detection system, CCD detector data acquisition system and CCD detector performance evaluation system,
Described UV, visible light section spectral detection system comprises light source, optical splitter, CCD detecting device, described light source is originated as light signal, and light converged to optical splitter inlet, described optical splitter is separated into the light of different wave length with the light beam of incident with certain optical resolution, and the light of dispersion is in the receiving plane that projects the CCD detecting device that is placed in the optical splitter outlet that wire distributes;
Described CCD detector data acquisition system drive controlling CCD detecting device, and the photocurrent that CCD detecting device each point is received amplifies and is converted into digital signal;
Described CCD detector performance evaluation system comprises CCD detector data acquisition module, CCD video and image display module, wavelength calibration module, CCD detecting device all-wave long data stability and sensitivity analysis module; Described CCD detector data acquisition module is gathered each point data of the resulting CCD detecting device of CCD detector data acquisition system face battle array in real time; Described CCD video and image display module utilize the space distribution of the data exhibiting CCD detecting device face battle array value data size of CCD detector data acquisition module collection; Described wavelength calibration module will be set up mutual relationship one to one between CCD detecting device face each point data of battle array that obtain and the spectral wavelength numerical value; Described CCD detecting device all-wave long data stability and sensitivity analysis module are tested CCD detecting device all-wave long data stability and sensitivity according to the data that obtain, and according to test data the CCD detecting device are carried out the long performance evaluation of all-wave.
Described light source comprises a hollow cathode lamp and a quartz lens, and described hollow cathode lamp disposes a regulated power supply, can regulate the hollow cathode lamp current magnitude by regulating regulated power supply; Described hollow cathode lamp compiles light to the optical splitter that is sent and enters the mouth by quartz lens.
Described hollow cathode lamp has 194.23nm, 253.65nm, 365.01nm, 435.83nm, 546.07nm, 640.22nm, eight characteristic spectral lines of 724.52nm, 871.67nm.
Described optical splitter comprises a concave surface flat field grating, a wavelength regulation mechanism, a darkroom outer cover, a light path base plate; Described darkroom outer cover is placed in and forms a darkroom on the light path base plate, and side, described darkroom and the corresponding position of concave surface flat field grating offer slit formation inlet and an outlet is used to settle the CCD detecting device; Described concave surface flat field grating is placed in this darkroom, by its anglec of rotation of wavelength regulation mechanism controls, to change the scope that spectral wavelength receives.
Described concave surface flat field grating is a flat field concave surface anaberration grating.
Described CCD detector data acquisition system comprises CCD detector drive system and data collecting card, described CCD detector drive system provides the CCD detecting device required quiescent potential, and drive controlling CCD detecting device receives the photocurrent of each point on the CCD detecting device face battle array, and will receive photocurrent and amplify and be converted into image digital signal output; Described data collecting card is gathered the image digital signal of CCD detector drive system output.
Detector data acquisition module 301 is responsible for the collection of CCD detecting device real time data.It is by the device driver of data collecting card 202, application layer and capture card equipment room at software are set up data communication link, obtain the data of each point on the CCD detecting device face battle array real-time, and in real time with the data storage array space that predefined is good in calculator memory, with the utilization of other module
The corresponding relation that described CCD detecting device all-wave long data stability and sensitivity analysis module obtain according to the wavelength calibration module, test obtains CCD detecting device face corresponding stability of battle array each point and sensitivity under a plurality of characteristic wavelengths, and comes the performance of assay CCD detecting device under all-wave is long with this.
Described stability comprises drift and two indexs of instantaneous noise, the drift index is used for characterizing the long-time stability of CCD detecting device, the instantaneous noise index is used for characterizing the short time noise size of CCD detecting device, and evaluation criterion is that drift and instantaneous noise are low more, and stability is good more;
Wherein drift is measured by following formula:
Drift=(Ifmax-Ifmin)/If * 100%
In the formula: Ifmax is a light intensity maximal value in detection time, and Ifmin is a light intensity minimum value in detection time, and If is the light intensity initial value;
Instantaneous noise is measured by following formula:
Instantaneous noise=(IFmax-IFmin)/IF * 100%
In the formula: IFmax is the noise maximal value of CCD detecting device in detection time, and IFmin is the noise minimum value of CCD detecting device in detection time, and IF is the noise initial value of CCD detecting device.
Described sensitivity is the signal magnitude that the CCD detecting device produces under the unit light intensity, i.e. the hollow cathode lamp signal magnitude that the CCD detecting device produces under certain electric current.
Based on the evaluation method of above-mentioned evaluation system, it may further comprise the steps:
(1) correction of system wavelength: by system's medium wavelength correction module the characteristic wavelength of the hollow cathode lamp of light source is carried out wavelength location and proofread and correct, and between characteristic wavelength and each point data of CCD detecting device face battle array, set up a nonlinear relationship;
(2) demarcation of system capacity: choose a representative linear array or area array CCD detecting device and demarcate, be fit in the native system after the demarcation and test, record the energy coefficient of a plurality of unique points under all-wave is long as the reference device.
(3) stability of CCD detecting device all-wave long data and the test of sensitivity: under parametric device same test condition, by the CCD detecting device all-wave long data in system stability and sensitivity analysis module CCD detecting device to be evaluated is tested to obtain stability and the sensitivity data of this CCD detecting device face battle array each point under the individual features wavelength;
(4) the long performance evaluation of CCD detecting device all-wave: the CCD detecting device face battle array each point that obtains according to step (3) under the individual features wavelength stability and sensitivity data the CCD detecting device is carried out the long comprehensive evaluation of all-wave; Wherein drift in the stability indicator and instantaneous noise are low more, and stability is good more; Sensitivity is high more, and the relative opto-electronic conversion ability of CCD detecting device is good more.
When described step (2) is only carried out relative measurement in system, can not carry out the demarcation of system capacity, calibration coefficient is 1.
The evaluation system that obtains according to technique scheme is compared with the common planar grating owing to adopted concave surface flat field grating to carry out beam split, and is very succinct by the monochromator that it is formed, the collimating mirror that need not assist, and light path is shorter, and energy loss is little, when it and linear array and planar array detector are used in combination, CCD medium wavelength position is linear distribution, and can reach the purpose of high speed analysis, realize the miniaturization and the lightness of instrument, therefore, native system is simple in structure, and volume is little; Use simultaneously have ultraviolet to the hollow cathode lamp of visible range different characteristic wavelength as light source, the system that makes can carry out the wavelength self-correcting in real time, has guaranteed the accuracy of the wavelength, of system; The performance evaluation software systems adopt the dynamic property that 8 characteristic wavelengths (evenly distributing in all-wave is long) data stability and sensitivity come evaluation analysis CCD detecting device in addition, and whether performance that can the long evaluation and test of all-wave CCD detecting device satisfies the requirement of spectral instrument.
Evaluation method provided by the invention is simple to operate simultaneously, matches with system to use and can realize the low expense to the CCD detecting device, quick and full wave performance evaluation.
Description of drawings:
Further specify the present invention below in conjunction with the drawings and specific embodiments.
Fig. 1 is the block diagram of evaluation system among the present invention.
Fig. 2 is the front view of optical splitter among the present invention.
Fig. 3 is the vertical view of optical splitter among the present invention.
Fig. 4 is the process flow diagram of method among the present invention.
Embodiment:
For technological means, creation characteristic that the present invention is realized, reach purpose and effect is easy to understand, below in conjunction with concrete diagram, further set forth the present invention.
The present invention is directed to the existing in prior technology problem, and the CCD detector performance evaluation system of a kind of cheapness, light, quick, all band (UV, visible light section) and the evaluation method of using with this system support be provided, make the evaluation of CCD detector performance become fast simple and comprehensive, and more help the application of CCD in spectral instrument.
Referring to Fig. 1, full wave CCD detector performance evaluation system provided by the invention comprises: UV, visible light section spectral detection system 100, CCD detector data acquisition system 200 and CCD detector performance evaluation system 300 3 parts.
Wherein UV, visible light section spectral detection system 100 is structure realization parts of evaluation system, is made up of the complete light path of a cover; Described CCD detector data acquisition system drive controlling CCD detecting device, and the photocurrent that CCD detecting device each point is received amplifies and is converted into digital signal; CCD detector performance evaluation system 300 is the final realization part that system estimates, and is used to carry out collection, processing, the demonstration of data and carries out the evaluation of CCD detector performance at last.
Referring to Fig. 2 and Fig. 3, UV, visible light section spectral detection system comprises light source 101, optical splitter 102,103 3 parts of CCD detecting device.Wherein light source comprises a hollow cathode lamp 104 and a quartz lens 105 as the source of light signal.Hollow cathode lamp 104 is used to provide the sharp linear light of different optical wavelength, during concrete enforcement, can use a H element hollow cathode lamp, its wavelength characteristic spectral line has 194.23nm, 253.65nm, 365.01nm, 435.83nm, 546.07nm, 640.22nm, 724.52nm, 871.67nm.The power supply of hollow cathode lamp configuration is a kind of regulated power supply, to reach the purpose that the hollow cathode lamp current magnitude can be regulated according to user's needs.Quartz lens 105 is arranged on hollow cathode lamp 104 fronts, is used to converge light that hollow cathode lamp sends to optical splitter 102 inlets.
Wherein darkroom outer cover 108 is placed in and forms a darkroom on the light path base plate 109, and concave surface flat field grating 106 is placed in this darkroom simultaneously, settled on the light path base plate 109 to realize the control to concave surface flat field grating 106 by the wavelength regulation machine; Side, darkroom and the corresponding position of concave surface flat field grating offer a slit 110 formation light path inlets and light path outlet 111 is used to settle CCD detecting device 103.Simultaneously light source 100 integral body are placed on the light path base plate 109, and with optical splitter 102 in as the slit 110 relative arrangements of inlet.
Concave surface flat field grating 106 is beam split critical pieces, it is divided into monochromatic spectrum with a complex light, can adopt a kind of flat field concave surface anaberration grating, the spectrum continuous distribution of this grating in one plane, be fit to very much be used in combination with linear array and planar array detector, reach the purpose of high speed analysis, and realize the miniaturization and the lightness of instrument.Wavelength regulation mechanism 107 is used for changing the anglec of rotation of concave surface flat field grating 106, thereby changes the projected position of continuous spectrum in light path outlet 111, has promptly changed the scope of CCD detecting device 103 receiving spectrum wavelength.Medium wavelength scope of the present invention can be fixed as 190-1000nm, can make eight characteristic wavelengths of H element hollow cathode lamp be evenly distributed in the complete section wavelength like this.But wavelength coverage can be regulated, and must use the characteristic wavelength of light source to carry out the wavelength location correction after wavelength coverage is regulated, and can use after the correction.
The optical splitter 102 concrete operations that obtain according to technique scheme are: the light from light source 101 hollow cathode lamps 104 enters optical splitter 102 from slit 110, light incides in the optical splitter 102 in the concave surface flat field grating 106 then, after 106 beam split of concave surface flat field grating, light directly projects in the receiving plane battle array of CCD detecting device 112 that light path exports 111 places.
Require difference according to estimating, CCD detecting device 112 can be face battle array or linear array detector type.This partial action is that one section continuous spectral signal is converted to electric signal.And this electric signal reached CCD detector data acquisition system 200.
CCD detector data acquisition system 200 comprises CCD detector drive system 201 and data collecting card 202.Quiescent potential and necessary control signal that CCD detector drive system 201 can provide the CCD detecting device to need, the photo-signal that CCD detecting device face battle array each point is received is amplified and is converted into image digital signal and reaches data collecting card 202.Data collecting card 202 places the pci interface type image digitization capture card of working computer inside, the input end of data collecting card 202 links to each other with the output of CCD detector drive system 201, its can high speed acquisition CCD detector drive system 201 outputs image digital signal and reach CCD detector performance evaluation system 300 and carry out final CCD detector performance evaluation.
CCD detector performance evaluation system 300 is used to carry out collection, processing, the demonstration of data and carries out the evaluation of CCD detector performance at last.Form by CCD detector data acquisition module 301, CCD video and image display module 302, wavelength calibration module 303, CCD detecting device all-wave long data stability and sensitivity analysis module 304.
Wherein CCD detector data acquisition module 301 is responsible for the collection of CCD detecting device real time data.It is by the device driver of data collecting card 202, application layer and capture card equipment room at software are set up data communication link, obtain the data of each point on the CCD detecting device face battle array real-time, and in real time with the data storage array space that predefined is good in calculator memory, with the utilization of other module.
CCD video and image display module 302 propose the data of the CCD face battle array each point of CCD detector data acquisition module 301 acquisitions, and these data are represented the space distribution of numerical values recited with the forms of image or 3 dimensions or 2 dimension figures.Promptly this module utilizes the data of CCD detector data acquisition module collection to carry out the drawing of difference in functionality, for example image or 3 dimensions or 2 dimension figures.Wherein draw ccd image: setting up the x-y plane with the position of CCD each point, is the gray-scale value of respective pixel in the x-y plane with the data of CCD each point (characterizing the luminous energy height), sets up a bitmap; Draw 3 dimension figures: setting up the x-y plane with the position of CCD each point, is the Z axle with the data of CCD each point, sets up (x, y, z) 3 dimension figures; Draw 2 dimension figures: with certain row of CCD or the institute of certain row is a little X-axis, is the y axle with the data of CCD respective point, sets up the x-y planar graph).
CCD video and image display module 302 can need be saved in graph data or image in the disk file according to the user, be convenient to the evaluation of CCD detector performance, wherein ccd image and 3 dimension figures can get information about the overall sensitivity of CCD detecting device, by contrasting the brightness of image of different CCD device same positions, its sensitivity of bright more device is high more; 2 dimensional plane figures can get information about certain row of CCD detecting device or the sensitivity and the stability of certain row, by contrasting the data line height of different CCD device same row or columns, compare their sensitivity and stability intuitively, its sensitivity of device that data line is high more is high more, and its stability of gadget is high more more for the noise of data line fluctuation.
The corresponding relation that CCD detecting device all-wave long data stability and sensitivity analysis module 304 obtain according to wavelength calibration module 303, test obtains in (concrete enforcement adopted under above-mentioned eight characteristic wavelengths) the CCD detecting device face corresponding stability of battle array each point and sensitivity under a plurality of characteristic wavelengths, and comes the performance of assay CCD detecting device under all-wave is long with this.
The present invention adopts 8 characteristic wavelengths (evenly distributing in all-wave is long: 194.23nm, 253.65nm, 365.01nm, 435.83nm, 546.07nm, 640.22nm, 724.52nm, 871.67nm) CCD detecting device face battle array each point data stability and sensitivity dynamic property under all-wave is long of coming evaluation analysis CCD detecting device down.
Stability indicator wherein: refer to two indexs of drift and instantaneous noise.The drift index is used for characterizing the long-time stability of CCD detecting device, and the instantaneous noise index is used for characterizing the short time noise size of CCD detecting device.Drift and instantaneous noise are low more, and stability is good more.
1) CCD detecting device all-wave long data stability and sensitivity analysis module 304 adopt formula (1) to measure the drift value
Drift=(Ifmax-Ifmin)/If * 100% (1)
In the formula: Ifmax records the light intensity maximal value in the 30min, and Ifmin records the light intensity minimum value in the 30min, and If is the light intensity initial value.
During concrete mensuration, normal operating conditions is arrived in system debug, hollow cathode lamp is mercury (Hg) element lamp, regulate lamp current, make to detect that the light intensity initial value is 500 ± 50 under certain characteristic wavelength, press in the 0.5min and measure once, continuous coverage 30min, measurement result is got its maximum value and minimal value, and by formula (1) calculates baseline drift value.Using such method is measured 8 drift values under the characteristic wavelength.
2) CCD detecting device all-wave long data stability and sensitivity analysis module 304 adopt formula (2) to measure the instantaneous noise value
Instantaneous noise=(IFmax-IFmin)/IF * 100% (2)
In the formula: IFmax is the noise maximal value of CCD detecting device in detection time, and IFmin is the noise minimum value of CCD detecting device in detection time, and IF is the noise initial value of CCD detecting device.
During concrete mensuration, to normal operating conditions, hollow cathode lamp is mercury (Hg) element lamp with system debug, regulate lamp current, make to detect that the light intensity initial value is 500 ± 50 under certain characteristic wavelength, press in the 0.5min mensuration once, continuous coverage 3min gets its maximal value and minimum value with measurement result.Calculate instantaneous noise by formula (2).Using such method is measured 8 instantaneous noise values under the characteristic wavelength.
Sensitivity index: refer under the specified conditions signal magnitude that CCD produces under the unit light intensity.Among the present invention, use the signal magnitude of hollow cathode lamp under a certain specific currents to weigh.Sensitivity index is used for characterizing the relative opto-electronic conversion ability of CCD detecting device.Sensitivity is high more, and the relative opto-electronic conversion ability of CCD detecting device is good more.
It is the mean value of light intensity value under the individual features wavelength that CCD detecting device all-wave long data stability and sensitivity analysis module 304 are measured Sensitirity va1ue.Concrete mensuration is as follows:
To normal operating conditions, hollow cathode lamp is mercury (Hg) element lamp with system debug, regulates lamp current at 1mA, measuring intervals of TIME is 1 second, light intensity value under certain characteristic wavelength is write down in continuous coverage 7 times, measurement result is got its mean value be sensitivity under this characteristic wavelength.Using such method is measured 8 Sensitirity va1ues under the characteristic wavelength.
According to the evaluation system that technique scheme obtains, concrete implementing procedure following (as shown in Figure 4):
The 1st step, the correction of system wavelength:
Using the characteristic wavelength (characteristic spectral line has 194.23nm, 253.65nm, 365.01nm, 435.83nm, 546.07nm, 640.22nm, 724.52nm, 871.67nm) of light source H element hollow cathode lamp to carry out wavelength location by intrasystem wavelength calibration module 303 proofreaies and correct, sets up a nonlinear relationship between characteristic wavelength and each point data of CCD detecting device face battle array.
The 2nd step, the demarcation of system capacity: the system capacity that relates among the present invention is meant the some concrete application of this evaluation system, promptly under light source and light-splitting device immobilize condition, several wavelength data value down of system's regulation of CCD detecting device reflection, it is used for the whole numerical value of characterization system and responds.
In order to obtain the absolute quantized data of CCD detector sensitivity, must demarcate native system, the alleged demarcation of native system is meant with certain specific object as unified specification, and as reference frame, is convenient to tracing to the source of value.Demarcate concrete grammar: choose a representative linear array or area array CCD detecting device and demarcate to professional analytical unit as the reference device, be fit in the native system after the demarcation and test, the energy coefficient of record a plurality of unique points in 190nm to the 1000nm scope.This energy coefficient is used for characterizing data that native system tests out and the relation between the CCD device absolute sensitivity.Specifically be expressed as: data value * 100% of certain characteristic wavelength point under the sensitivity data value/native system of the energy coefficient of certain characteristic wavelength point=certain characteristic wavelength point that specialty mensuration obtains, this energy coefficient can be used for obtaining the absolute value of certain CCD detector sensitivity.If only carry out relative measurement, can not carry out the demarcation of system capacity, demarcating this energy coefficient is 1.
The 3rd step, the stability of CCD detecting device all-wave long data and the mensuration of sensitivity:
Under parametric device same test condition, the energy value under 8 characteristic wavelengths (characteristic spectral line has 194.23nm, 253.65nm, 365.01nm, 435.83nm, 546.07nm, 640.22nm, 724.52nm, 871.67nm) by the CCD detecting device all-wave long data in system stability and sensitivity analysis module measurement CCD detecting device is the response data value of CCD detecting device under the respective wavelength that native system obtains; And carry out dynamic time scan, obtain the stability of last every of CCD detecting device face battle array, and represent (concrete grammar is not given unnecessary details with aforementioned consistent) herein with instantaneous noise with drift, more than the test of each wavelength points all finish fast at one time section.Simultaneously, measure the last every some Sensitirity va1ue (concrete grammar is not given unnecessary details with aforementioned consistent) under 8 characteristic wavelengths of CCD detecting device face battle array herein.
The 4th step, the long performance evaluation of CCD detecting device all-wave:
Applied environment according to different customizes corresponding performance evaluation operative norm (this standard can be formulated according to company standard, national standard, industry standard or the customer requirements of product).According to step (3) obtain CCD detecting device face battle array each point under 8 characteristic wavelengths stability and sensitivity data, the requirement of contrast operative norm, this CCD detecting device is carried out the long comprehensive evaluation of all-wave, and whether the performance of evaluation and test CCD detecting device satisfies the requirement of spectral instrument.General, drift and instantaneous noise are low more, and stability is good more; Sensitivity is high more, and the relative opto-electronic conversion ability of CCD detecting device is good more.
More than show and described ultimate principle of the present invention and principal character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; that describes in the foregoing description and the instructions just illustrates principle of the present invention; without departing from the spirit and scope of the present invention; the present invention also has various changes and modifications, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (10)
1. a novel full wave CCD detector performance evaluation system is characterized in that this system comprises UV, visible light section spectral detection system, CCD detector data acquisition system and CCD detector performance evaluation system;
Described UV, visible light section spectral detection system comprises light source, optical splitter, CCD detecting device, described light source is originated as light signal, and light converged to optical splitter inlet, described optical splitter is separated into the light of different wave length with the light beam of incident with certain optical resolution, and the light of dispersion is in the receiving plane that projects the CCD detecting device that is placed in the optical splitter outlet that wire distributes;
Described CCD detector data acquisition system drive controlling CCD detecting device, and the photocurrent that CCD detecting device each point is received amplifies and is converted into digital signal;
Described CCD detector performance evaluation system comprises CCD detector data acquisition module, CCD video and image display module, wavelength calibration module, CCD detecting device all-wave long data stability and sensitivity analysis module; Described CCD detector data acquisition module is gathered each point data of the resulting CCD detecting device of CCD detector data acquisition system face battle array in real time; Described CCD video and image display module utilize the space distribution of the data exhibiting CCD detecting device face battle array value data size of CCD detector data acquisition module collection; Described wavelength calibration module will be set up mutual relationship one to one between CCD detecting device face each point data of battle array that obtain and the spectral wavelength numerical value; Described CCD detecting device all-wave long data stability and sensitivity analysis module are tested CCD detecting device all-wave long data stability and sensitivity according to the data that obtain, and according to test data the CCD detecting device are carried out the long performance evaluation of all-wave.
2. a kind of novel full wave CCD detector performance evaluation system according to claim 1, it is characterized in that, described light source comprises a hollow cathode lamp and a quartz lens, described hollow cathode lamp disposes a regulated power supply, can regulate the hollow cathode lamp current magnitude by regulating regulated power supply; Described hollow cathode lamp compiles light to the optical splitter that is sent and enters the mouth by quartz lens.
3. a kind of novel full wave CCD detector performance evaluation system according to claim 2, it is characterized in that described hollow cathode lamp has 194.23nm, 253.65nm, 365.01nm, 435.83nm, 546.07nm, 640.22nm, eight characteristic spectral lines of 724.52nm, 871.67nm.
4. a kind of novel full wave CCD detector performance evaluation system according to claim 1 is characterized in that described optical splitter comprises a concave surface flat field grating, a wavelength regulation mechanism, a darkroom outer cover, a light path base plate; Described darkroom outer cover is placed in and forms a darkroom on the light path base plate, and side, described darkroom and the corresponding position of concave surface flat field grating offer slit formation inlet and an outlet is used to settle the CCD detecting device; Described concave surface flat field grating is placed in this darkroom, by its anglec of rotation of wavelength regulation mechanism controls, to change the scope that spectral wavelength receives.
5. a kind of novel full wave CCD detector performance evaluation system according to claim 4 is characterized in that described concave surface flat field grating is a flat field concave surface anaberration grating.
6. a kind of novel full wave CCD detector performance evaluation system according to claim 1, it is characterized in that, described CCD detector data acquisition system comprises CCD detector drive system and data collecting card, described CCD detector drive system provides the CCD detecting device required quiescent potential, and drive controlling CCD detecting device receives the photocurrent of each point on the CCD detecting device face battle array, and will receive photocurrent and amplify and be converted into image digital signal output; Described data collecting card is gathered the image digital signal of CCD detector drive system output.
7. a kind of novel full wave CCD detector performance evaluation system according to claim 1, it is characterized in that, the corresponding relation that described CCD detecting device all-wave long data stability and sensitivity analysis module obtain according to the wavelength calibration module, test obtains CCD detecting device face corresponding stability of battle array each point and sensitivity under a plurality of characteristic wavelengths, and comes the performance of assay CCD detecting device under all-wave is long with this.
8. a kind of novel full wave CCD detector performance evaluation system according to claim 7, it is characterized in that, described stability comprises drift and two indexs of instantaneous noise, the drift index is used for characterizing the long-time stability of CCD detecting device, the instantaneous noise index is used for characterizing the short time noise size of CCD detecting device, and evaluation criterion is that drift and instantaneous noise are low more, and stability is good more;
Wherein drift is measured by following formula:
Drift=(Ifmax-Ifmin)/If * 100%
In the formula: Ifmax is a light intensity maximal value in detection time, and Ifmin is a light intensity minimum value in detection time, and If is the light intensity initial value;
Instantaneous noise is measured by following formula:
Instantaneous noise=(IFmax-IFmin)/IF * 100%
In the formula: IFmax is the noise maximal value of CCD detecting device in detection time, and IFmin is the noise minimum value of CCD detecting device in detection time, and IF is the noise initial value of CCD detecting device.
9. a kind of novel full wave CCD detector performance evaluation system according to claim 7, it is characterized in that, described sensitivity is the signal magnitude that the CCD detecting device produces under the unit light intensity, i.e. the hollow cathode lamp signal magnitude that the CCD detecting device produces under certain electric current.
10. based on the described a kind of novel full wave CCD detector performance evaluation system of claim 1, evaluation method, it is characterized in that, may further comprise the steps:
(1) correction of system wavelength: by system's medium wavelength correction module the characteristic wavelength of the hollow cathode lamp of light source is carried out wavelength location and proofread and correct, and between characteristic wavelength and each point data of CCD detecting device face battle array, set up a nonlinear relationship;
(2) demarcation of system capacity: choose a representative linear array or area array CCD detecting device and demarcate, be fit in the native system after the demarcation and test, record the energy coefficient of a plurality of unique points under all-wave is long as the reference device.
(3) stability of CCD detecting device all-wave long data and the test of sensitivity: under parametric device same test condition, by the CCD detecting device all-wave long data in system stability and sensitivity analysis module CCD detecting device to be evaluated is tested to obtain stability and the sensitivity data of this CCD detecting device face battle array each point under the individual features wavelength;
(4) the long performance evaluation of CCD detecting device all-wave: the CCD detecting device face battle array each point that obtains according to step (3) under the individual features wavelength stability and sensitivity data the CCD detecting device is carried out the long comprehensive evaluation of all-wave; Wherein drift in the stability indicator and instantaneous noise are low more, and stability is good more; Sensitivity is high more, and the relative opto-electronic conversion ability of CCD detecting device is good more.
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Cited By (6)
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| CN103033338A (en) * | 2012-12-12 | 2013-04-10 | 中国科学院长春光学精密机械与物理研究所 | Flat field calibrating device and flat field calibrating method of vacuum ultraviolet band imaging system |
| CN103308280A (en) * | 2013-05-24 | 2013-09-18 | 中国电子科技集团公司第四十一研究所 | Quantum efficiency calibration device and calibrating method for CCD (charge coupled device) |
| CN103592285A (en) * | 2013-11-26 | 2014-02-19 | 长春新产业光电技术有限公司 | Non-linear calibration method of Raman spectrum wavelength and CCD picture element |
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| CN114295565A (en) * | 2021-12-28 | 2022-04-08 | 上海集成电路装备材料产业创新中心有限公司 | Method, apparatus, device and medium for determining quantum efficiency of image sensor |
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| CN101408503B (en) * | 2007-10-11 | 2011-01-05 | 上海光谱仪器有限公司 | Method for automatically detecting and dynamically substracting stray light of spectrometer and spectrometer |
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| CN103033338A (en) * | 2012-12-12 | 2013-04-10 | 中国科学院长春光学精密机械与物理研究所 | Flat field calibrating device and flat field calibrating method of vacuum ultraviolet band imaging system |
| CN103308280A (en) * | 2013-05-24 | 2013-09-18 | 中国电子科技集团公司第四十一研究所 | Quantum efficiency calibration device and calibrating method for CCD (charge coupled device) |
| CN103592285A (en) * | 2013-11-26 | 2014-02-19 | 长春新产业光电技术有限公司 | Non-linear calibration method of Raman spectrum wavelength and CCD picture element |
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