CN103033338A - Flat field calibrating device and flat field calibrating method of vacuum ultraviolet band imaging system - Google Patents
Flat field calibrating device and flat field calibrating method of vacuum ultraviolet band imaging system Download PDFInfo
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- CN103033338A CN103033338A CN2012105365012A CN201210536501A CN103033338A CN 103033338 A CN103033338 A CN 103033338A CN 2012105365012 A CN2012105365012 A CN 2012105365012A CN 201210536501 A CN201210536501 A CN 201210536501A CN 103033338 A CN103033338 A CN 103033338A
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Abstract
The invention discloses a flat field calibrating device and a flat field calibrating method of a vacuum ultraviolet band imaging system, and relates to the flat field calibrating device and a method of the vacuum ultraviolet band imaging system. The flat field calibrating device and the flat field calibrating method of the vacuum ultraviolet band imaging system solve the problem that flat field calibration cannot be carried out on the vacuum ultraviolet band imaging system due to the limitation of materials, processes and technology in the prior art. A target wavelength calibration light beam is acquired through a vacuum ultraviolet hollow cathode light source and a vacuum ultraviolet monochromator; a rear square pinhole is stimulated as an infinite imaging target through a collimation reflecting mirror; a motion platform inside a vacuum tank rotates to enable the imaging system to be calibrated to receive parallel light at different field angles and to enable the rear square pinhole to be imaged on different positions in an image plane; gray level responses of positions, not covered by field scanning, of the image plane are acquired in an interpolation mode; a field center gray level response is used as a standard, relative response values of different positions are calculated, and a flat field calibration result is obtained. The flat field calibrating device and the flat field calibrating method of the vacuum ultraviolet band imaging system solve the problem of the flat field calibration of an existing vacuum ultraviolet band imaging system.
Description
Technical field
The present invention relates to a kind of flat field robot scaling equipment and calibrating method that is applicable to vacuum ultraviolet wave band imaging system.
Background technology
Increasingly mature along with technical development, imaging system has a wide range of applications in each side such as national economy, national defence, scientific researches.Because conversion efficiency is inconsistent between the different response units of picture receiver (such as CCD) of imaging system, and the impact of the reason such as optical texture vignetting characteristic, the target of same intensity on the imaging system image planes during diverse location imaging gray-tone response output not identical, namely have the response heterogeneity.No matter be ground or space optics Image-forming instrument, before coming into operation, all will carry out flat field calibration, and with the nonlinearity of calibration data correcting image existence.
Current, be widely used the integrating sphere light source imaging system is carried out the flat field calibration; At integrating sphere illuminating lamp is installed, light is through inner diffuse reflection coating repeatedly after the diffuse reflection, the light beam even by surface opening outgoing brightness, that divergence is good.Imaging system at the integrating sphere opening part to the imaging of light beam out of focus, obtain full visual field response image, the ratio of the gradation data of the different response units in this image namely represents the response relative value of image planes diverse location, the response relative value image array that utilizes this calibration to obtain can carry out flat field correction to imaging system.
At present because the restriction of material, technique and technology, can't adopt above-mentioned common integral ball light-source system calibrating method that the vacuum ultraviolet imaging system is carried out flat field calibration, mainly have a following difficulty: one, this wave band coating of not having to use is as integrating sphere inwall diffuse reflection coating; Two, this band of light volume source is larger, can not use as the integrating sphere illuminating lamp; Three, this wave band Image-forming instrument generally all is monochrome or narrowband wavelength imaging, need to carry out the spectrum light splitting to light beam during the flat field calibration; Four, this wave band Image-forming instrument must carry out the flat field calibration under vacuum condition.Therefore the flat field calibration work of vacuum ultraviolet wave band imaging system is a still open question.
Summary of the invention
The present invention because the restriction of material, technique and technology can't realize the vacuum ultraviolet imaging system is carried out the mark problem that flat field is calibrated, provides a kind of flat field calibrating method of vacuum ultraviolet wave band imaging system for solving existing.
The flat field robot scaling equipment of vacuum ultraviolet wave band imaging system, this device comprises vacuum tank, vacuum ultraviolet monochromator, four-dimensional movement platform, collimating mirror and imaging system to be calibrated, and described vacuum ultraviolet monochromator comprises entrance slit, grating chamber, exit slit and pin hole; Described four-dimensional movement platform, collimating mirror and imaging system to be calibrated are arranged in the vacuum tank, imaging system described to be calibrated is fixed on the four-dimensional movement platform, vacuum ultraviolet hollow cathode light beam of light source enters the grating chamber light splitting through the entrance slit of vacuum ultraviolet monochromator, the exit slit place arranges pin hole, and the light beam after the light splitting becomes parallel beam through exit slit and pin hole by collimating mirror successively; The imaging on imaging system to be calibrated of described parallel beam.
The flat field calibrating method of vacuum ultraviolet wave band imaging system, the method is realized by following steps:
Step 2, adjust the four-dimensional movement platform, make the center superposition of the collimated light beam of the entrance pupil center of imaging system to be calibrated and collimating mirror outgoing;
Principle of work of the present invention: the present invention finishes the sampling that the imaging system image planes is responded relative value by same pin-hole imaging at the image planes diverse location, obtains the flat field calibration data.The method adopts vacuum ultraviolet hollow cathode light source and vacuum ultraviolet monochromator to obtain target wavelength calibration light beam; By collimating mirror monochromator rear pin hole is modeled to the infinity imageable target; Motion platform rotation in the vacuum tank makes pin-hole imaging diverse location on image planes so that band calibration imaging system is accepted directional light with different field angle; Obtain the position that visual field scanning do not cover on the image planes with interpolation method and get gray-tone response; Take the field of view center gray-tone response as standard, calculate the relative response of diverse location, obtain the flat field the calibration results.This calibrating method efficiently solves the flat field Scaling Problem of present vacuum ultraviolet wave band imaging system.
Beneficial effect of the present invention: method of the present invention does not need to use integrating sphere, under existing technical conditions, can effectively finish the flat field calibration of vacuum ultraviolet Image-forming instrument, be different from an out of focus imaging of integrating sphere and finish the method for full visual field calibration, the core concept of the calibrating method that the present invention proposes is the mode by visual field scanning, obtains diverse location responding at the charred ashes degree same target on the imaging system image planes.
Description of drawings
Fig. 1 is the scaling system synoptic diagram of the method for vacuum ultraviolet wave band imaging system flat field calibration of the present invention.
Among the figure: 1, vacuum ultraviolet hollow cathode light source, 2, vacuum ultraviolet monochromator, 3, entrance slit, 4, monochromator grating chamber, 5, exit slit, 6, pin hole, 7, vacuum tank, 8, collimating mirror, 9, four-dimensional movement platform, 10, the azimuth rotation axle, 11, pitching rotating shaft, 12, imaging system to be calibrated, 13, industrial computer.
Embodiment
Embodiment one, in conjunction with Fig. 1 present embodiment is described, this device of flat field robot scaling equipment of vacuum ultraviolet wave band imaging system comprises light-source system, vacuum ultraviolet monochromator 2, collimating mirror 8 and four-dimensional movement platform 9; Adopt vacuum ultraviolet hollow cathode light source, select different rare gas (helium, argon gas, neon etc.) as discharge gas according to the wavelength needs; Vacuum ultraviolet monochromator 2 obtains required wavelength homogeneous beam with the light beam of light source light splitting, and settles a pin hole 6 as imageable target at its exit slit 5 places; Collimating mirror 8 focal planes overlap with the position of pin hole 6; When imaging system 12 to be calibrated is installed, should keep entrance pupil center and the azimuth rotation axle 10 of four-dimensional movement platform 9 and the center superposition of pitching rotating shaft 11 of its imaging system 12 to be calibrated.
Present embodiment also comprises industrial computer 13, and described four-dimensional movement platform 9 is driven by industrial computer 13 in orientation and pitch orientation.The entrance pupil center of imaging system 12 described to be calibrated overlaps with the center of rotation of the azimuth rotation axle 10 of four-dimensional movement platform 9 and pitching rotating shaft 11.
Embodiment two, present embodiment are the calibrating method of the flat field robot scaling equipment of embodiment one described vacuum ultraviolet wave band imaging system, and the method is realized by following steps:
One, vacuum ultraviolet hollow cathode light source 1 is calibrated after needing to stablize half an hour again;
Two, adjust the level of four-dimensional movement platform 9, vertical translation, so that the entrance pupil center of imaging system to be calibrated 12 and the center superposition of parallel beam;
Three, according to the calibration demand of imaging system 12 to be calibrated, design the sampling density to image planes response relative value, determine the angle step of visual field scanning; And according to the angle step of visual field scanning of design, adjust orientation, the pitching of four-dimensional movement platform 9, so that pin-hole imaging is in the different position of image planes;
Four, pin hole the position of image and gray scale generate the composite diagram that a width of cloth comprises all pin-hole images in the every width of cloth image of extraction, and the not sample area between the pin hole is carried out gray-level interpolation; All pixel gray scales obtain the flat field calibration data divided by center pixel gray scale, utilize these calibration data to carry out flat field correction to imaging system.
Embodiment three, present embodiment are the embodiment of the method for embodiment two described vacuum ultraviolet wave band imaging system flat field calibrations: the detailed process of this embodiment is:
One, vacuum tank (7) and vacuum ultraviolet monochromator (2) vacuumize, and vacuum tightness satisfies the imaging system condition of work;
Two, open vacuum ultraviolet hollow cathode light source (1), light stability a period of time is stable to electric current, the Voltage-output of its power supply.This light source can send preferably vacuum-ultraviolet light of different wave length, strength stability by using different rare gas (helium, argon gas, neon etc.), and can be by control source current and the light source air inlet air pressure adjustment intensity of light source;
Three, vacuum ultraviolet monochromator (2) scanning wavelength is to the imaging system service band; After light beam of light source enters grating chamber (4) light splitting by entrance slit (3), through exit slit (5) outgoing service band monochromatic light;
Four, be close to the monochromator exit slit and settle pin hole (6), as flat field calibration imageable target;
Five, the light beam by this pin hole becomes directional light behind collimating mirror (8), guarantees during installation that the focus of this catoptron overlaps with the pin hole position, is modeled as the infinite distance imageable target with pin hole;
Six, so that imaging system (12) entrance pupil center roughly overlaps with the collimated light beam center, the relative position of entrance pupil and light beam does not change four-dimensional movement platform (9) substantially when guaranteeing visual field scanning by level, vertical direction translation;
Seven, calculate when using pin-hole image that imaging system image plane scanning is sampled the scanning angle step-length of motion platform; Suppose that the significant response unit is N * N on the image planes, the visual field of corresponding imaging system is θ, image planes pin-hole image scanning sample is spaced apart d, then the number of sampled point is (M+1) * (M+1) (wherein M=N/d), therefore when moving to next sampling location from sampling location of pin-hole image, motion platform in the orientation or pitch orientation need rotational angle ω=θ/d;
Eight, according to the calculating of previous step, by industrial computer (13) actuation movement platform in the orientation, pitch orientation rotates one by one with rotational angle ω, so that pin-hole image obtains (M+1) * (M+1) aperture image according to designing with identical exposure time imaging diverse location on image planes;
Nine, use the ENVI image processing software to read pin hole peak response gray scale and cell coordinate position thereof in every width of cloth image, all pin-hole images are synthesized in piece image;
Ten, take composograph central needle hole gray scale as divisor, other position pin hole gray scale is divided by with it, obtains on the imaging system image planes diverse location with respect to the response relative value of image plane center;
11, can be according to the degree of concrete imaging system response change, design is sampled to its image planes with different pin-hole image sampling densities;
12, obtain on the image planes not the sampling location with respect to the response relative value of field of view center by interpolation method, thereby obtain the response relative value image array of whole image planes, namely finish the flat field calibration;
13, use response relative value image array that the imaging system photographic images is carried out flat field correction.
Claims (7)
1. the flat field robot scaling equipment of vacuum ultraviolet wave band imaging system, this device comprises vacuum tank (7), vacuum ultraviolet monochromator (2), four-dimensional movement platform (9), collimating mirror (8) and imaging system to be calibrated (12), and described vacuum ultraviolet monochromator (2) comprises entrance slit (3), grating chamber (4), exit slit (5) and pin hole (6); It is characterized in that, described four-dimensional movement platform (9), collimating mirror (8) and imaging system to be calibrated (12) are arranged in the vacuum tank (7), imaging system described to be calibrated (12) is fixed on the four-dimensional movement platform (9), the entrance slit (3) of vacuum ultraviolet hollow cathode light source (1) light beam through vacuum ultraviolet monochromator (2) enters grating chamber (4) light splitting, exit slit (5) locates to arrange pin hole (6), and the light beam after the light splitting becomes parallel beam through exit slit (5) and pin hole (6) by collimating mirror (8) successively; Described parallel beam is in the upper imaging of imaging system to be calibrated (12).
2. the flat field robot scaling equipment of vacuum ultraviolet wave band imaging system according to claim 1 is characterized in that, also comprises industrial computer (13), and described four-dimensional movement platform (9) is driven by industrial computer (13) in orientation and pitch orientation.
3. the flat field robot scaling equipment of vacuum ultraviolet wave band imaging system according to claim 1, it is characterized in that the entrance pupil center of imaging system described to be calibrated (12) overlaps with the azimuth rotation axle (10) of four-dimensional movement platform (9) and the center of rotation of pitching rotating shaft (11).
4. based on the calibrating method of the flat field robot scaling equipment of vacuum ultraviolet wave band imaging system claimed in claim 1, it is characterized in that the method is realized by following steps:
Step 1, adjust vacuum ultraviolet monochromator (2) scanning wavelength to the service band of imaging system; After the light beam of vacuum ultraviolet hollow cathode light source (1) enters grating chamber (4) light splitting by entrance slit (3), through exit slit (5) outgoing monochromatic light; Monochromatic light becomes parallel collimated light beam successively behind pin hole (6) and collimating mirror (8);
Step 2, adjust four-dimensional movement platform (9), make the center superposition of the collimated light beam of the entrance pupil center of imaging system to be calibrated (12) and collimating mirror (8) outgoing;
Step 3, determine that imaging system to be calibrated (12) is to the sampling density of image planes responses relative value and the angle step of visual field scanning, adjust azimuth rotation axle (10) and the pitching rotating shaft (11) of four-dimensional movement platform (9), make pin-hole imaging at the diverse location of imaging system to be calibrated (12) image planes; Obtain several aperture images;
Step 4, extract pin hole the position of image and gray scale in every width of cloth aperture image, generate the composograph of pin-hole image, calculate in the composograph on the image planes pixel gray scale of diverse location with respect to the response relative value of the pixel gray scale of image plane center; Then obtain on the image planes not by interpolation method that the pixel gray scale of sampling location finally obtains the response relative value image array of whole image planes with respect to the response relative value of the pixel gray scale of image plane center, realize the flat field calibration of vacuum ultraviolet wave band imaging system.
5. the flat field calibrating method of vacuum ultraviolet wave band imaging system according to claim 4 is characterized in that, described vacuum ultraviolet hollow cathode light source (1) adopts rare helium, argon gas or neon as the gas lamp of discharge.
6. the flat field calibrating method of vacuum ultraviolet wave band imaging system according to claim 4, it is characterized in that, imaging system described to be calibrated (12) is installed on the four-dimensional movement platform (9), and the entrance pupil center of imaging system to be calibrated (12) overlaps with the azimuth rotation axle (10) of four-dimensional movement platform (9) and the center of rotation of pitching rotating shaft (11).
7. the flat field calibrating method of vacuum ultraviolet wave band imaging system according to claim 4 is characterized in that, described four-dimensional movement platform (9) is driven by industrial computer (13) in orientation and pitch orientation.
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| CN104166997A (en) * | 2014-08-13 | 2014-11-26 | 中国科学院国家天文台 | Flat field correction method of ultraviolet CCD pattern |
| CN112288785A (en) * | 2020-10-29 | 2021-01-29 | 中国科学院长春光学精密机械与物理研究所 | Data processing method, system and storage medium for sub-aperture scanning flat field calibration |
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