CN201540197U - CCD detector calibration device - Google Patents
CCD detector calibration device Download PDFInfo
- Publication number
- CN201540197U CN201540197U CN2009200347312U CN200920034731U CN201540197U CN 201540197 U CN201540197 U CN 201540197U CN 2009200347312 U CN2009200347312 U CN 2009200347312U CN 200920034731 U CN200920034731 U CN 200920034731U CN 201540197 U CN201540197 U CN 201540197U
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- attenuator
- ccd detector
- integrating sphere
- energy
- probe
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Abstract
The utility model relates to a CCD detector calibration device, which comprises a laser, an attenuator, an integrating sphere and an energy detector, wherein the energy detector is arranged on the integrating sphere, the attenuator is arranged between the laser and the integrating sphere, and the laser, the attenuator and the integrating ball are disposed on the same light path. The CCD detector performance calibration device for laser parameter measurement can resolve problems of performance parameter calibration of CCD detectors for laser parameter measurement, and effectively calibrate performance parameter of CCD detectors and provide correction factors, thereby guaranteeing accuracy of laser parameter measurement well.
Description
Technical field
The utility model relates to a kind of ccd detector caliberating device, relates in particular to a kind of laser parameter measurement ccd detector performance caliberating device.
Background technology
Along with refreshing light three host apparatus big science engineerings are carried out in a deep going way, laser activity parameter measurement diagnosis is seemed more and more important.The used detector of laser activity parameter measurement diagnosis all is the CCD imaging detector.Because refreshing light three optical maser wavelengths are mainly 351nm and 1053nm, response ratio is lower for ccd detector, and performance parameter will descend, and directly influences the accuracy of refreshing light three host apparatus laser activity parameter measurements.Demarcating ccd detector at present has two methods, the combination of laser instrument and wedge shape mirror of a kind of method, and only to the ccd detector dynamic range measurement, other key parameter such as homogeneity, responsiveness, signal to noise ratio (S/N ratio) etc. can't be measured, and measuring accuracy is low.Another kind method integrating sphere equal white light test of light source, the optical maser wavelength of using with reality is not inconsistent, and the parameter and the actual parameter that cause ccd detector to be demarcated differ greatly.With above-mentioned two kinds of scaling methods, the confidence level of ccd detector Laser Measurement parameter is reduced greatly.
The utility model content
In order to solve existing technical matters in the background technology, the utility model proposes a kind of laser parameter measurement ccd detector performance caliberating device, solved the problem that laser parameter measurement ccd detector performance parameter is demarcated, this device can effectively be demarcated the performance parameter of CCD and can provide correction factor, well guarantees the accuracy of laser parameter measurement.
Technical solution of the present utility model is: a kind of ccd detector caliberating device, it is characterized in that: this device comprises laser instrument, attenuator, integrating sphere and energy-probe, described energy-probe is arranged on the integrating sphere, described attenuator is arranged between laser instrument and the integrating sphere, and laser instrument, attenuator and integrating sphere three are positioned on the same light path.
This device also comprises iris, on the described iris person of the being arranged on integrating sphere, is positioned on the same light path with attenuator.
Above-mentioned attenuator, ccd detector and energy-probe all are connected in to be gathered and control computer.
Be provided with the bandpass filter of respective wavelength before the above-mentioned energy-probe, described energy-probe is connected with control computer with collection by control card.
Above-mentioned attenuator is made up of the attenuator of variable gap or different transmitances.
Above-mentioned energy-probe is silicon (si) detector at the 351nm wave band, is indium gallium arsenic (INGaAa) detector at the 1053nm wave band.
The utility model has the advantages that:
1, the utility model adopts laser instrument, attenuator, energy-probe and integrating sphere combination to demarcate ccd detector, can accurately demarcate key parameters such as ccd detector responsiveness, signal to noise ratio (S/N ratio), dynamic range, response linearity;
2, under the situation of input different-energy, with least square method the data of gathering are handled, can obtain the homogeneity correction factor of ccd detector and the dark current noise of response;
3, the caliberating device that provides of the utility model utilizes different optical maser wavelength, can measure refreshing light three laser parameter measurements accurately with the responsiveness of ccd detector at different wave length;
4, add iris in the caliberating device that the utility model provides, can reduce the influence that extraneous veiling glare is demarcated the ccd detector performance, improved the precision that ccd detector is demarcated;
5, utilize the utility model to demarcate the ccd detector performance, data acquisition, processing are finished by computing machine, and stability is high, good reproducibility, measurement result degree of confidence height;
6, the utility model increases substantially the automaticity of ccd detector demarcation, is applicable to the mass check, has saved labour and cost.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Embodiment
Referring to Fig. 1, the ccd detector caliberating device that the utility model provides comprises laser instrument 1, attenuator 2, integrating sphere 3, iris 4, energy-probe 5, collection and control computer 6, laser power supply 8, laser instrument 1, attenuator 2, integrating sphere 3 are successively set on the platform 7, it is the same with the height of attenuator 2 to regulate laser instrument 1, laser instrument 1 requires power stable in a short time, and wavelength can change specifically customization according to the actual requirements.Attenuator 2 is made up of the attenuator of variable gap or different transmitances, is used for the laser energy of decaying.Integrating sphere 3 reaches even after the light beam that enters is repeatedly reflected.Iris 4 be located on the integrating sphere or attenuator 2 and integrating sphere 3 between, be used for eliminating the influence of extraneous veiling glare.Energy-probe 5 is arranged on the integrating sphere 3, surveys the energy of integrating sphere 3 inner light beams; Energy-probe 5 is selected silicon (si) detector for use at the 351nm wave band, selects indium gallium arsenic (INGaAa) detector for use at the 1053nm wave band, is furnished with the respective wavelength bandpass filter before the energy-probe 5, and energy-probe 5 usefulness control cards are connected with computing machine 6.Attenuator 2, ccd detector 9, energy-probe 5 all are connected with computing machine 6, the work of computing machine 6 control attenuators 2, and the data of gathering ccd detector 9 and energy-probe 5.By the control of computing machine 6, attenuator 2 can rotate, thereby the laser energy that sees through can change according to the position is different, can directly control with computing machine 6 like this, obtains the data under the different energy.
During work ccd detector 9 is installed on the integrating sphere 3,9 time shutter of ccd detector, gain are set to normal operating conditions, open laser instrument 1, computing machine 6 control attenuators 2 turn to luminous energy and see through maximum position, and computing machine 6 is gathered ccd detector 9 images and handled image.If image is saturated, rotate 95% the when maximal value of ccd detector 9 gradation of images is reached capacity, the image and the energy-probe data of gathering the ccd detector 9 of this moment with computing machine 6 control attenuators 2.Rotate by certain step pitch control attenuator 2, reduce energy, gather detector image and energy-probe data.When the maximal value of ccd detector 9 gradation of images reaches the value of dark current, stop to gather.The view data that collects is handled by least square method, can be obtained the parameters such as responsiveness, signal to noise ratio (S/N ratio), dynamic range, response linearity and homogeneity correction factor of ccd detector 9.
Claims (7)
1. ccd detector caliberating device, it is characterized in that: this device comprises laser instrument, attenuator, integrating sphere and energy-probe, described energy-probe is arranged on the integrating sphere, described attenuator is arranged between laser instrument and the integrating sphere, and laser instrument, attenuator and integrating sphere three are positioned on the same light path.
2. ccd detector caliberating device according to claim 1 is characterized in that: this device also comprises iris, and described iris is arranged on the integrating sphere, is positioned on the same light path with attenuator.
3. ccd detector caliberating device according to claim 1 is characterized in that: this device also comprises iris, and described iris is arranged between attenuator and the integrating sphere, is positioned on the same light path with attenuator.
4. ccd detector caliberating device according to claim 1 is characterized in that: described attenuator, ccd detector and energy-probe all are connected in to be gathered and control computer.
5. ccd detector caliberating device according to claim 4 is characterized in that: be provided with the bandpass filter of respective wavelength before the described energy-probe, described energy-probe is connected with control computer with collection by control card.
6. according to claim 1 or 2 or 3 or 4 or 5 described ccd detector caliberating devices, it is characterized in that: described attenuator is made up of the attenuator of variable gap or different transmitances.
7. ccd detector caliberating device according to claim 6 is characterized in that: described energy-probe is silicon (si) detector at the 351nm wave band, is indium gallium arsenic (INGaAa) detector at the 1053nm wave band.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200347312U CN201540197U (en) | 2009-09-25 | 2009-09-25 | CCD detector calibration device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200347312U CN201540197U (en) | 2009-09-25 | 2009-09-25 | CCD detector calibration device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201540197U true CN201540197U (en) | 2010-08-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200347312U Expired - Fee Related CN201540197U (en) | 2009-09-25 | 2009-09-25 | CCD detector calibration device |
Country Status (1)
| Country | Link |
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| CN (1) | CN201540197U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103033338A (en) * | 2012-12-12 | 2013-04-10 | 中国科学院长春光学精密机械与物理研究所 | Flat field calibrating device and flat field calibrating method of vacuum ultraviolet band imaging system |
| CN103292980A (en) * | 2013-05-17 | 2013-09-11 | 中国科学院上海光学精密机械研究所 | Measuring device for straightness and surface response uniformity of photodetector |
| CN106596053A (en) * | 2016-10-28 | 2017-04-26 | 中国科学院西安光学精密机械研究所 | Point source transmittance stray light testing system with synchronization control function, and point source transmittance stray light testing method |
-
2009
- 2009-09-25 CN CN2009200347312U patent/CN201540197U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103033338A (en) * | 2012-12-12 | 2013-04-10 | 中国科学院长春光学精密机械与物理研究所 | Flat field calibrating device and flat field calibrating method of vacuum ultraviolet band imaging system |
| CN103292980A (en) * | 2013-05-17 | 2013-09-11 | 中国科学院上海光学精密机械研究所 | Measuring device for straightness and surface response uniformity of photodetector |
| CN103292980B (en) * | 2013-05-17 | 2015-07-29 | 中国科学院上海光学精密机械研究所 | The measurement mechanism of photodetector linearity and cryogenic radiometry |
| CN106596053A (en) * | 2016-10-28 | 2017-04-26 | 中国科学院西安光学精密机械研究所 | Point source transmittance stray light testing system with synchronization control function, and point source transmittance stray light testing method |
| CN106596053B (en) * | 2016-10-28 | 2019-03-08 | 中国科学院西安光学精密机械研究所 | Point source transmitance veiling glare test macro and method with synchronization control function |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100804 Termination date: 20150925 |
|
| EXPY | Termination of patent right or utility model |