CN103438993A - Device for measuring linear interval and face response characteristics of photoelectric detector - Google Patents

Abstract

The invention discloses a device for measuring the linear interval and the face response characteristics of a photoelectric detector. The device comprises a laser source, a first diaphragm, a laser power stabilizer, a laser power attenuator, a second diaphragm, a beam splitter prism, a first optical switch, a second optical switch, a first reflection mirror, a second reflection mirror, an integrating sphere, the photoelectric detector to be measured, an electrical signal amplifier, a data acquisition card, a computer and a thermostat. According to the device, the characteristic that the illumination of outgoing laser of the integrating sphere is even is mainly used, the advantages of being narrow in line width, stable in power and the like of the laser source are used, accurate measurement on the straightness and the face response evenness of different photoelectric detectors under the specific wave length can be achieved, and the device has the advantages of being rapid and convenient to use, large in dynamic range, high in interference resistance and the like. The repeated measurement accuracy of the device is higher than 0.05%.

Description

Between the photodetector linear zone and face response characteristic measurement device

Technical field

The invention belongs to the detector characterisitic parameter and measure pick-up unit, especially for the measurement of photodetector linearity and cryogenic radiometry.

Background technology

Along with the development and application of infrared detection technique, the infrared eye of a series of function admirables has appearred, how to improve measuring accuracy and estimates objectively its technical feature, for practical application provides reliable Measure Guarantee, more and more be subject to people's attention.The linearity is the important sign amount of of photoelectric detector performance, and linearity measure is one of basic problem of meteorological study.All there are linear problem in most sensors and measuring system, to the calibration of a sensor or surveying instrument, may be generally only to carry out at finite point, for other zones beyond scaling point, can only lean on the linearity of sensor and surveying instrument to calculate, so the homogeneity of IR detectors degree and rectilinearity are considered to estimate the key technical index of performances of IR always, the measuring accuracy of the linearity has important realistic meaning.But in reality, producer does not all provide the large area detector cryogenic radiometry, simultaneously because parameter detector is widely different, also be difficult to find suitable photodetector straight line degree measurement instrument on market, so the measurement detector linearity that a kind of precision of needs is high, responding range is large and the device of cryogenic radiometry, measured the characterisitic parameter of various photodetectors.

Summary of the invention

The technical problem to be solved in the present invention is to overcome above-mentioned existing technical matters and deficiency, measurement mechanism and the measuring method of a kind of photodetector linearity and cryogenic radiometry are provided, this device should be able to be realized the accurate measurement to photodetector linearity and cryogenic radiometry, can realize the measurement of luminous power in the dynamic range of 0.06nw～0.6mw, and there are characteristics stable, that antijamming capability strong, the duplicate measurements precision is high.

The technical scheme that the present invention solves is as follows:

Between a kind of photodetector linear zone and face response characteristic measurement device, be characterised in that its formation comprises: light source, the first diaphragm, light power stabilising device, optical power attenuation device, the second diaphragm, Amici prism, the first photoswitch, the second photoswitch, the first catoptron, the second catoptron, integrating sphere, photodetector to be measured, electric signal amplifier, data collecting card, computing machine and constant temperature oven, the position relationship of above-mentioned components and parts is as follows:

Described light source, the first diaphragm, the light power stabilising device, the optical power attenuation device, the second diaphragm, Amici prism, the first photoswitch, the second photoswitch, the first catoptron, the second catoptron, integrating sphere, photodetector to be measured and electric signal amplifier all are placed in described constant temperature oven, along the single mode linearly polarized light direction of described light source outgoing, are described the first diaphragm successively, the light power stabilising device, light optical power attenuation device, the second diaphragm and Amici prism, incident light is divided into transmitted light and reflected light through described Amici prism, and described transmitted light is successively through the first photoswitch, the first catoptron enters the first entrance of integrating sphere, and described reflected light passes through described the second photoswitch successively, the second catoptron enters the second entrance of integrating sphere, and light beam incides photodetector to be measured from the outlet of integrating sphere, and described photodetector output terminal to be measured is through described electric signal amplifier, the input end of data collecting card and described computing machine is connected, described photodetector to be measured is placed on two-dimentional adjustable mechanical mobile platform, the output terminal of described computing machine is connected with the control end of described two-dimentional adjustable mechanical mobile platform, described Amici prism is to have certain prism of inverse ratio thoroughly, from Amici prism through the first photoswitch, the first catoptron to the light path of integrating sphere with from Amici prism through the second photoswitch, the second catoptron is to the equivalent optical path of integrating sphere.

Described integrating sphere outlet comprises an iris.

Described photodetector light-sensitive surface to be measured is close to the outlet of described integrating sphere.

Described measurement optical power adjustment realizes by light source (power tunable laser) and the acting in conjunction of optical power attenuation device.

The invention has the advantages that:

1, adopt high precision light power stabilising device, uncertainty<0.02%, can guarantee the light source stable output.

2, adopt bifocal path technique, further reduced the impact of light source shake on system, use the sealing constant temperature oven to reduce the impact of temperature and parasitic light, therefore install antijamming capability strong, can stable operation.

3, adopt integrating sphere, the light beam that arrives like this photodetector to be measured has high homogeneity, avoided the error caused because light beam is inhomogeneous under the laser direct projection, integrating sphere outlet size is adjustable in addition, can measure the performance of detector under different spot sizes.

4, adopt the electric signal multiplying arrangement, amplify detector signal, can under the very little error of introducing, greatly improve measurement range.

The accompanying drawing explanation

Fig. 1 is between photodetector linear zone of the present invention and the light path schematic diagram of face response characteristic measurement device

Embodiment

Below in conjunction with embodiment and accompanying drawing, the invention will be further described, but should not limit the scope of the invention with this.

Refer to Fig. 1, Fig. 1 is between photodetector linear zone of the present invention and the light path schematic diagram of face response characteristic measurement device, as seen from the figure, between photodetector linear zone of the present invention and face response characteristic measurement device, formation comprises: light source 1, the first diaphragm 2, light power stabilising device 3, optical power attenuation device 4, the second diaphragm 5, Amici prism 6, the first photoswitch 7, the second photoswitch 8, the first catoptron 9, the second catoptron 10, integrating sphere 11, photodetector 12 to be measured, electric signal amplifier 13, data collecting card 14, computing machine 15 and constant temperature oven 16, the position relationship of above-mentioned components and parts is as follows:

Described light source 1, the first diaphragm 2, light power stabilising device 3, light optical power attenuation device 4, the second diaphragm 5, Amici prism 6, the first photoswitch 7, the second photoswitch 8, the first catoptron 9, the second catoptron 10, integrating sphere 11, photodetector 12 to be measured and electric signal amplifier 13 all are placed in described constant temperature oven 16, along the single mode linearly polarized light direction of described light source 1 outgoing, are described the first diaphragm 2 successively, light power stabilising device 3, light optical power attenuation device 4, the second diaphragm 5 and Amici prism 6, incident light is divided into transmitted light and reflected light through described Amici prism 6, and described transmitted light is successively through the first photoswitch 7, the first catoptron 9 enters the first entrance of integrating sphere 11, and described reflected light passes through described the second photoswitch 8 successively, the second catoptron 10 enters the second entrance of integrating sphere 11, and light beam incides photodetector 12 to be measured from the outlet of integrating sphere 11, and described photodetector 12 output terminals to be measured are through described electric signal amplifier 13, data collecting card 14 is connected with the input end of described computing machine 15, described photodetector to be measured 12 is placed on two-dimentional adjustable mechanical mobile platform, the output terminal of described computing machine 15 is connected with the control end of described two-dimentional adjustable mechanical mobile platform, described Amici prism 6 is for having certain prism of inverse ratio thoroughly, from Amici prism 6 through the first photoswitch 7, the first catoptron 9 to the light path of integrating sphere 11 with from Amici prism 6 through the second photoswitch 8, the second catoptron 10 is to the equivalent optical path of integrating sphere 11.

Described integrating sphere 11 outlets comprise an iris.

Described photodetector to be measured 12 light-sensitive surfaces are close to the outlet of described integrating sphere 11.

Below the parameter of an embodiment:

Described light source 1 is power tunable laser 1, output single mode linearly polarized light laser, incide light power stabilising device 3 by the first diaphragm 2, stable output laser, peak power output 100mw, adjustable extent is greater than a magnitude, wavelength 1053nm, adjustable extent 0～10mW, output facula is 3mm, the fluctuation of light power stabilising device 3<0.02%; Laser output power is adjusted to 85mW, to make output power be 80mW to regulating optical power stabilizator 3 again, regulate again light optical power attenuation device 4, laser 100% is seen through, this time arrives Amici prism 6 by the second diaphragm 5, the Transflective of this Amici prism is than being 1:1, and transmitted light, reflected light finally enter integrating sphere 11 by different paths, from the illumination of integrating sphere 11 outlet outgoing, is mapped to the light-sensitive surface of photodetector to be measured; Described integrating sphere 11 Output optical power under 3mm output bore is about 1.5% of incident optical power, under 10mm output bore, Output optical power is about 24.2% of incident optical power, described smooth optical power attenuation device 4 has 6 magnitude attenuation ranges, can be by the light minimal attenuation of optical path to 80nW, the minimum power that light arrives integrating sphere 11 by Amici prism 6 is 40nW, the minimum power finally shone on photodetector 12 to be measured is 0.6nw, laser instrument 1 and light optical power attenuation device 4 are used in conjunction with, and can realize dynamic range 0.06nw～0.6mw.

Photodetector 12 output terminals to be measured connect electric signal amplifier 13, and the output terminal of electric signal amplifier 13 is connected with data collecting card 14, finally by computing machine 15, controls collection; Described electric signal amplifier 13 provides the amplification of 0～70dB, and described photodetector 12 to be measured is placed on two dimensional motor tool platform, by computing machine 15, controls two dimensional motor tool platform.

The linearity of photodetector 12 to be measured is measured.

Suppose that electric signal amplifier 13 enlargement factors are 0dB, the power that arrives separately photodetector 12 to be measured by Amici prism 6 transmitted lights is P _t, electric signal amplifier 13 is output as V (P _t); Order is P by the independent power that arrives photodetector 12 to be measured of the reflected light of Amici prism 6 _r, electric signal amplifier 13 is output as V (P _r); The power that makes transmission arrive photodetector 12 to be measured together with reflected light is P _t+ P _r, electric signal amplifier 13 is output as V (P _t+ P _r), linearity is defined as formula:

$k=\frac{V(P_T+P_R)}{V\left(P_T\right)+V\left(P_R\right)}---\left(1\right)$

By regulating optical power attenuator 4, with 50% attenuation amplitude, decayed at every turn, decay altogether 20 times, can obtain 21 data, calculate corresponding power (P _t+ P _r) _i(i=1,2,3 ..., 21) under linearity:

$k_i=\frac{V{(P_T+P_R)}_i}{V{\left(P_T\right)}_i+V{\left(P_R\right)}_i}(i=\mathrm{1,2,3},......,21)---\left(2\right)$

First do following setting before measurement: not decay of optical power attenuation device 4, integrating sphere 11 outlets are 3mm, and the first photoswitch 9 in the transmitted light of Amici prism 6 and reflected light path, the second photoswitch 10 are opened simultaneously, the power that enters photodetector 12 to be measured be 1.2mw(this for the benchmark probe power).

Open the first photoswitch 9 of transmitted light path, close the second photoswitch 10 of reflected light path light path, computing machine 15 is controlled data collecting card 14 and is carried out data acquisition, gathers 2000 data, gets the mean value of institute's image data, obtains V (P _t) ₁; Open the second photoswitch 10 of reflected light path again, close the first photoswitch 9 of transmitted light path, data collecting card 14 carries out data acquisition, gathers 2000 data, gets the mean value of institute's image data, obtains V (P _r) ₁; Then open the first photoswitch 9, second photoswitch 10 of transmitted light path and reflected light path, data collecting card 14 carries out data acquisition, gathers 2000 data, gets the mean value of institute's image data, obtains V (P simultaneously _t+ P _r) ₁; Finally utilize following formula (3) to ask for the linearity of power when 0.6mw:

${\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="HDA0000370554570000011.png"\; state="\{\{state\}\}">k</figure-callout>}}_1=\frac{V{(P_T+P_R)}_1}{V{\left(P_T\right)}_1+V{\left(P_R\right)}_1}---\left(3\right)$

Then the regulating optical power attenuator 4, by optical power attenuation 50%, repeat top operation, the linearity k that just to have obtained by that analogy power bracket be 0.6nw-0.6mw _i(i=1,2,3 ..., 21), as shown in (2) formula, totally 21 data are selected k in these 21 data _iapproach most 1 one, suppose k _n(1≤n≤21) approach 1 most, the linearity correction factor C that makes n order _n=1, the linearity correction factor of all the other arbitrfary point m is (4) formula so:

$\left\{\begin{array}{cc}{C}_m=\underset{j=m}{\overset{n-1}{\mathrm{\&Pi;}}}{k}_j& (m<n)\\ C_m=\underset{j=n}{\overset{m-1}{\mathrm{\&Pi;}}}{k}_j& (m>n)\end{array}\right.---\left(4\right)$

Correction factor C according to linearity _m(m=1,2,3 ..., 21) can judge between corresponding linear zone and quality, judge as follows:

linearity is poor: | C _m-1|>0.01(m=1,2,3 ..., 21)

linearity is relatively good: 0.001<| C _m-1|<0.01(m=1,2,3 ..., 21)

linearity is very good: | C _m-1|<0.001(m=1,2,3 ..., 21)

So far, can obtain between photodetector 12 probe power linearitys to be measured and linear zone.

Next treating the cryogenic radiometry of photometry electric explorer 12 is measured, the first photoswitch 9 in whole measuring process, the second photoswitch 10 is opened all the time, the spot diameter of integrating sphere 11 outputs on photodetector 12 to be measured is 1mm, control two dimensional motor tool platform by computing machine 15, the spacing of scan control is 1mm, the profile of scanning is rectangle (circular detector is also by rectangular scanning), the full-size that rectangular dimension is photodetector 12 test surfaces to be measured (supposes that the maximum length recorded is the L millimeter, breadth extreme is the W millimeter, the point that needs scanning is N, N=L * W), so just can scan the whole test surface of photodetector 12 to be measured, take the test surface lower left corner as scanning starting point (true origin), false coordinate is (X, Y) (0≤X≤L, 0≤Y≤W).

Regulating optical power stabilizator 3, be 80mW by stable output power, and regulating optical power attenuator 4 is unattenuated, and making to measure light, to incide the power of photodetector 12 to be measured as far as possible larger; After regulating, guarantee that position, luminous power and other configurations of optical path is constant, establishing and regulating the rear actual luminous power that incides detector is P _oUT.

Computing machine 15 is controlled the test surface scanning that the two-dimentional machinery motorized stage is carried out photodetector 12 to be measured, from true origin (0,0) start, scanning coordinate is (X, Y) (0≤X≤L, 0≤Y≤W), photodetector 12 to be measured first carries out the One-Dimensional Water simple scan from (0,0) point to (L, 0) point, horizontal scanning point is L, horizontal scanning moves on to photodetector to be measured (L, 1) point after finishing, then to (0,1) motion of some direction, carry out the One-Dimensional Water simple scan, carries out by that analogy the scanning of whole, horizontal scanning point is L, and vertical scanning point is W.

In scanning process, computing machine 15 is controlled data collecting card 14 and is carried out data acquisition and processing (DAP).Whenever a scanning point (X, Y) (0≤X≤L, 0≤Y≤W), gather 2000 data, averaged, acquired results is V (P _oUT) _{(X, Y)}, then obtain mean value

, obtain the response δ under each coordinate _{(X, Y)}, see (5) formula:

${\mathrm{\&delta;}}_{(X,Y)}=V{\left(P_{\mathrm{OUT}}\right)}_{(X,Y)}/\stackrel{\&OverBar;}{V\left(P_{\mathrm{OUT}}\right)}(0\&le;X\&le;L,0\&le;Y\&le;W)---\left(5\right)$

The response δ a little obtaining _{(X, Y)}(0≤X≤L, 0≤Y≤W) afterwards, gives up response δ _{(X, Y)}<0.8 and δ _{(X, Y)}1.2 point, response 0.8≤δ retained _{(X, Y)}≤ 1.2 point, ask for all residual response value δ _{(X, Y}) standard deviation, mean uncertainty of measurement with 3 σ, characterize the cryogenic radiometry of photodetector 12 to be measured by uncertainty of measurement, so just obtain the cryogenic radiometry of photodetector 12 to be measured.

Experiment shows, apparatus of the present invention can realize the accurate measurement of photodetector linearity and cryogenic radiometry, has convenient and swift, the advantages such as dynamic range large, strong interference immunity, and its duplicate measurements precision is better than 0.05%.

Claims (3)

1. between a photodetector linear zone and face response characteristic measurement device, be characterised in that its formation comprises: light source (1), the first diaphragm (2), light power stabilising device (3), optical power attenuation device (4), the second diaphragm (5), Amici prism (6), the first photoswitch (7), the second photoswitch (8), the first catoptron (9), the second catoptron (10), integrating sphere (11), photodetector to be measured (12), electric signal amplifier (13), data collecting card (14), computing machine (15) and constant temperature oven (16), the position relationship of above-mentioned components and parts is as follows:

Described light source (1), the first diaphragm (2), light power stabilising device (3), optical power attenuation device (4), the second diaphragm (5), Amici prism (6), the first photoswitch (7), the second photoswitch (8), the first catoptron (9), the second catoptron (10), integrating sphere (11), photodetector to be measured (12) and electric signal amplifier (13) all are placed in described constant temperature oven (16), along the single mode linearly polarized light direction of described light source (1) outgoing, are described the first diaphragm (2) successively, light power stabilising device (3), optical power attenuation device (4), the second diaphragm (5) and Amici prism (6), incident light is divided into transmitted light and reflected light through described Amici prism (6), and described transmitted light is successively through the first photoswitch (7), the first catoptron (9) enters the first entrance of integrating sphere (11), and described reflected light passes through described the second photoswitch (8) successively, the second catoptron (10) enters the second entrance of integrating sphere (11), from the light beam of the outlet outgoing of integrating sphere (11), incides photodetector to be measured (12), and described photodetector to be measured (12) output terminal is through described electric signal amplifier (13), data collecting card (14) is connected with the input end of described computing machine (15), described photodetector to be measured (12) is placed on two-dimentional adjustable mechanical mobile platform, and the output terminal of described computing machine (15) is connected with the control end of described two-dimentional adjustable mechanical mobile platform, from described Amici prism (6) through the first photoswitch (7), the first catoptron (9) to the light path of integrating sphere (11) with from Amici prism (6) through the second photoswitch (8), the second catoptron (9) equivalent optical path to integrating sphere (11).

2. between photodetector linear zone according to claim 1 and face response characteristic measurement device, it is characterized in that, described integrating sphere (11) outlet comprises an iris.

3. according between the described photodetector linear zone of claim 1 to 2 and face response characteristic measurement device, it is characterized in that, described photodetector to be measured (12) light-sensitive surface is close to the outlet of described integrating sphere (11).

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