CN202066590U - Laser power detecting apparatus - Google Patents
Laser power detecting apparatus Download PDFInfo
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- CN202066590U CN202066590U CN2011200431837U CN201120043183U CN202066590U CN 202066590 U CN202066590 U CN 202066590U CN 2011200431837 U CN2011200431837 U CN 2011200431837U CN 201120043183 U CN201120043183 U CN 201120043183U CN 202066590 U CN202066590 U CN 202066590U
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- light
- photodiode
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Abstract
The utility model discloses a laser power detecting apparatus, including a spectroscope which divides the output laser of a laser into reflected light and transmitted light, a first ground glass which is used or uniformly distribute the light reflected by the spectroscope, an attenuating plate for attenuating the light passing through the first ground glass; a first photodiode which transforms the light signal of the reflected light passing through the attenuating plate into an electric signal, a first amplifying module which is used for amplifying the electric signal output by the first photodiode, a first detecting module for detecting the voltage value of the electric signal output by the first amplifying module, and a first calculating module for calculating the laser output power based on the voltage value detected by the first detecting module. The laser power detecting apparatus provided in the utility model can realize on-line detection of the power of laser output by a semiconductor laser, the structure is simple, and the volume is small.
Description
Technical field
The utility model relates to photoelectric technology, relates in particular to a kind of laser power detection device.
Background technology
Output power is the important parameter of laser instrument.At the semiconductor laser manufacture field, the laser power of semiconductor laser directly influences parameters such as the range of work, processing technology and crudy.Therefore, the output power pick-up unit is indispensable for the semiconductor laser manufacture field.
At present, the detection of the output power of high-power semiconductor laser mainly is to adopt laser powermeter to carry out off-line measurement.For Laser Processing, this need interrupt process, and the output power of measuring can not reflect the variation of laser power in the process in real time.
In addition, conventional semiconductor laser powermeter complex structure, volume is bigger, is difficult to realize integrated with the less semiconductor laser of volume.
The utility model content
The utility model need cause Laser Processing to interrupt, can not reflect laser power variation in the laser processing procedure, complex structure and bulky problem in real time at the laser powermeter detection laser power chamber of detecting semiconductor laser in the prior art, a kind of laser power detection device is provided, can realize online detection for semiconductor laser power, reflect the laser power variation in the laser processing procedure in real time, and simple in structure, volume is less.
The utility model provides a kind of laser power detection device, comprising:
Be used for the light of semiconductor laser output is divided into the spectroscope of reflected light and transmitted light;
Be positioned at first frosted glass that is used on the described reflected light path through the distribution of reflected light homogenising after the described spectroscope reflection;
Be positioned at the attenuator that is used on the described reflected light path the reflected light decay of described first frosted glass of process;
Be positioned at first photodiode that is used for the catoptrical light signal through described attenuator is become electric signal on the described reflected light path;
First amplification module that the electric signal that is connected and is used for described first photodiode is exported with described first photodiode amplifies;
Be connected and be used to detect the first detection module of magnitude of voltage of the electric signal of described first amplification module output with described first amplification module;
First computing module that is connected and is used for calculating laser output power with described first detection module based on the detected magnitude of voltage of described first detection module.
On the basis of above technical scheme, can also comprise:
Be used for second frosted glass with being evenly distributed of the light after the described spectroscope reflection of the process of object reflection to be processed;
Be used for the convex lens that will focus on through the light of described second frosted glass;
Be used for to become second photodiode of electric signal through the light signal of the light of described convex lens;
Second amplification module that the electric signal that is connected and is used for described second photodiode is exported with described second photodiode amplifies;
Be connected and be used to detect second detection module of magnitude of voltage of the electric signal of described second amplification module output with described second amplification module;
Second computing module that is connected and is used for calculating reflected by objects luminous power to be processed with described second detection module based on the detected magnitude of voltage of described second detection module.
On the basis of above technical scheme, can also comprise respectively first filtration module that is connected with first detection module with described first amplification module.
On the basis of above technical scheme, can also comprise respectively second filtration module that is connected with second detection module with described second amplification module.
Wherein, described spectroscope can become 30 degree-60 degree angles to place with the laser instrument output light path.
Described first frosted glass plate can become 30 degree-60 degree angles to place with the reflected light of described spectroscope emission.
The laser power detection device that the utility model provides, by spectroscope is set, the light of semiconductor laser output is divided into reflected light and transmitted light, make a part of light incide and carry out normal Laser Processing on the object to be processed, another part light reflects, through first frosted glass plate, incide first photodiode behind the attenuator, first photodiode converts the light signal of incident to electric signal, after the process first detection module detected the magnitude of voltage of electric signal, first computing module can calculate the laser output power of laser instrument according to detected magnitude of voltage.This laser power detection device need not to interrupt normal semiconductor laser process, and can measure the variation of laser power in the laser processing procedure in real time; Therefore in addition, this laser power detection device is simple in structure, and used each element body size is less, is convenient to integratedly, and it is less to make the volume of laser detector to accomplish, thereby makes laser detector integrated with the semiconductor laser realization easily.
Also in conjunction with the accompanying drawings the utility model is described in further detail below by specific embodiment.
Description of drawings
Figure 1 shows that the structural representation of the utility model laser power detection device embodiment one;
Figure 2 shows that the structural representation of the utility model laser power detection device embodiment two;
Figure 3 shows that the structural representation of the utility model laser power detection device embodiment three.
The 1-spectroscope; The 2-laser instrument;
3-object to be processed; 11-first frosted glass;
The 12-attenuator; 13-first photodiode;
14-first amplification module; The 15-first detection module;
16-first computing module; 17-first filtration module;
21-second frosted glass; The 22-convex lens;
23-second photodiode; 24-second amplification module;
25-second detection module; 26-second computing module;
27-second filtration module; The 10-laser power detection device.
Embodiment
Be illustrated in figure 1 as the utility model laser power detection device embodiment one structural representation, this laser power detection device comprises: spectroscope 1, first frosted glass 11, attenuator 12, first photodiode 13, first amplification module 14, first detection module 15 and first computing module 16.For convenience of explanation, laser instrument 2 and object to be processed 3 are shown in the lump among Fig. 1.The laser instrument 2 that relates in the utility model specifically can be a semiconductor laser.
Among Fig. 1, spectroscope 1 be a kind of can be with the optical mirror slip of incident light part antireflection part transmission.Spectroscope 1 is used for the light of laser instrument 2 outputs is divided into reflected light and transmitted light.First frosted glass 11 is positioned on the reflected light path, is used for the distribution of reflected light homogenising after reflecting through spectroscope 1.Attenuator 12 is positioned on the reflected light path, is used for the reflected light decay through first frosted glass 11.First photodiode 13 is positioned on the reflected light path, is used for the catoptrical light signal through attenuator 12 is become electric signal.First amplification module 14 is connected with first photodiode 13, and is used for the electric signal of first photodiode, 13 outputs is amplified.First detection module 15 is connected with first amplification module 14, is used to detect the magnitude of voltage of the electric signal of first amplification module, 14 outputs.First computing module 16 and first is put detection module 15 and is connected, and calculates laser output power based on first detection module 15 detected magnitudes of voltage.
Introduce the principle of work of embodiment shown in Figure 1 below in detail.
The light that laser instrument 2 sends is divided into reflected light and transmitted light through behind the spectroscope 1.Transmitted light incides on the object 3 to be processed, treats processing object 3 and handles accordingly.Reflected light incides first frosted glass 11 after reflecting through spectroscope 1.Diffuse reflection takes place through first frosted glass, 11 backs in reflected light, and the light intensity space distribution of light obtains homogenising.Incide attenuator 12 through the reflected light behind first frosted glass 11, attenuator 12 is decayed reflected light.Through a part of light of can decaying behind the attenuator 12, make the light signal that incides first photodiode 13 be unlikely to damage first photodiode 13.First photodiode 13 converts catoptrical light signal to electric signal, thus the linear little current signal Is of catoptrical luminous power behind output and the process attenuator 12.The little current signal Is of first photodiode 13 output converts voltage signal to after through first amplification module 14 and amplifies.First detection module 15 detects the voltage of signals value Us of first amplification module, 14 outputs.First computing module 16 is according to Us=K
1Is, Is=M
1Ps
2, Ps
2=N
1Ps
1, Ps
1=N
0Ps can obtain Us=K
1M
1N
1N
0Ps, i.e. Ps=Us/ (K
1M
1N
1N
0), thereby calculate the laser output power of laser instrument 2.Wherein, K
1Be the enlargement factor of first amplification module 14, M
1Be the photoelectric conversion factors of first photodiode, N
1Be the attenuation coefficient of reflected light R through first frosted glass 11 and attenuator 12, N
0Be the reflection coefficient of spectroscope 1, Ps
2Be through inciding the luminous power of the light of first photodiode 13, Ps behind the attenuator 12
1Be the catoptrical luminous power that incides first frosted glass 11 after the beam split of process spectroscope, Ps is the laser output power of laser instrument 2.
The laser power detection device that the utility model provides, by spectroscope is set, the light of laser instrument output is divided into reflected light and transmitted light, make a part of light incide and carry out normal Laser Processing on the object to be processed, another part light reflects, through inciding first photodiode behind first frosted glass plate, the attenuator, first photodiode converts the light signal of incident to electric signal, after the process first detection module detected the magnitude of voltage of electric signal, first computing module can calculate the laser output power of laser instrument according to detected magnitude of voltage.This laser power detection device need not to interrupt normal laser processing procedure, and can measure the variation of laser power in the laser processing procedure in real time; Therefore in addition, this laser power detection device is simple in structure, and used each element body size is less, is convenient to integratedly, and it is less to make the volume of laser detector to accomplish, thereby makes laser detector integrated with the semiconductor laser realization easily.
Among the embodiment shown in Figure 1, the attenuation coefficient of attenuator can be provided with according to actual needs flexibly, if the output power of laser instrument is bigger, then can adopt the bigger attenuator of attenuation coefficient.If the output power of laser instrument is less, then can adopt the less attenuator of attenuation coefficient.Like this, by the attenuation coefficient of attenuator is set, can realize detection to the laser power of different magnitudes.
Be illustrated in figure 2 as the structural representation of the utility model laser power detection device embodiment two, also comprise on the basis of the structure shown in this embodiment: second frosted glass 21, convex lens 22, second photodiode 23, second amplification module 24, second detection module 25 and second computing module 26.
Among Fig. 2, the light of laser instrument 2 outputs is through behind the spectroscope 1, and a light part that incides on the object 3 to be processed reflects, and the light after the reflection incides on second frosted glass 21 after reflecting once more through spectroscope 1.Second frosted glass 21 is used for being evenly distributed through the light after spectroscope 1 reflection with object 3 reflections to be processed.Convex lens 22 are used for the light through second frosted glass 21 is focused on.Second photodiode 23 is used for the light signal of the light of process convex lens 22 is become electric signal.Second amplification module 24 is connected with second photodiode 23, and is used for the electric signal of second photodiode, 23 outputs is amplified.Second detection module 25 is connected with second amplification module 24, and is used to detect the magnitude of voltage of the electric signal of second amplification module, 24 outputs.Second computing module 26 is connected with second detection module 25, and is used for calculating reflected by objects luminous power to be processed based on second detection module, 25 detected magnitudes of voltage.
Introduce the principle of work of embodiment shown in Figure 2 below in detail.
The light that laser instrument 2 sends is divided into reflected light and transmitted light through behind the spectroscope 1.Transmitted light incides on the object 3 to be processed, treats processing object 3 and handles accordingly.In addition, object 3 to be processed also can be with a laser-bounce part.Laser after object 3 reflections to be processed incides second frosted glass 21 after reflecting through spectroscope 1.Diffuse reflection takes place through second frosted glass, 21 backs in light, and the light intensity space distribution of light obtains homogenising.Through inciding second photodiode 23 after 22 focusing of the process of the light behind second frosted glass 21 convex lens.Because after object reflection to be processed, the power of light has been decayed more, therefore, in order convex lens 22 to be set light to be focused on so accurately measure object laser light reflected power to be processed.Second photodiode 23 converts light signal to electric signal, thus output with through the linear little current signal Ir of luminous power behind the convex lens 22.The little current signal Ir of second photodiode 23 output converts voltage signal to after through second amplification module 24 and amplifies.Second detection module 25 detects the voltage of signals value Ur of second amplification module, 24 outputs.Second computing module 26 is according to Ur=K
2Ir, Ir=M
2Pr
2, Pr
2=N
2Pr
1, Pr
1=N
0Pr can obtain Ur=K
2M
2N
2N
0Pr, i.e. Pr=Ur/ (K
2M
2N
2N
0), thereby calculate the reflected optical power of object 3 to be processed.Wherein, K
2Be the enlargement factor of second amplification module 24, M
2Be the photoelectric conversion factors of second photodiode 23, N
2Be the attenuation coefficient of light through second frosted glass 21, Pr
2Be through inciding the luminous power of the light of second photodiode 23, Pr behind the convex lens 22
1Be the luminous power that incides the light of second frosted glass 21 after 1 beam split of process spectroscope, Pr is the reflected optical power of object 3 to be processed.
Among the embodiment shown in Figure 2, detection and Fig. 1 of laser output power are similar, repeat no more herein.
Among the embodiment as shown in Figure 2, after the optical path spectroscope reflection of object reflection to be processed, through inciding second photodiode behind second frosted glass plate, the convex lens, second photodiode converts the light signal of incident to electric signal, detect the magnitude of voltage of electric signal through second detection module after, second computing module can calculate the laser output power of laser instrument according to detected magnitude of voltage.This laser power detection device need not to interrupt normal laser processing procedure, and can measure reflected by objects luminous power to be processed in real time; Therefore in addition, this laser power detection device is simple in structure, and used each element body size is less, is convenient to integratedly, and it is less to make the volume of laser detector to accomplish, thereby makes laser detector integrated with the semiconductor laser realization easily.
Be illustrated in figure 3 as the structural representation of the utility model laser detector embodiment three, this device also comprises first filtration module 17 and second filtration module 27 on the basis of as shown in Figure 2 device.First filtration module 17 is connected with first detection module 15 with first amplification module 14 respectively, and second filtration module 27 is connected with second detection module 25 with second amplification module 24 respectively.
First filtration module 17 will carry out through the electric signal behind first amplification module 14 being transferred to first detection module 15 after the filtering, make first detection module 15 can detect magnitude of voltage more accurately.Second filtration module 27 will carry out through the electric signal behind second amplification module 24 being transferred to second detection module 25 after the filtering, make second detection module 25 can detect magnitude of voltage more accurately.
In embodiment as shown in Figure 1, also can comprise first filtration module 17.
Among aforementioned each embodiment of the utility model, spectroscope 1 can become 30 degree-60 degree angles to place with the laser instrument output light path, and first frosted glass plate can become 30 degree-60 degree angles to place with the reflected light of spectroscope 1 emission.Certainly, can be provided with flexibly according to actual needs in the laser power detection device each optical element with
The relative angle of light path is not limited to the above-mentioned mode of mentioning.
Although each embodiment is described in detail with reference to accompanying drawing; but content of the present utility model is not limited to disclosed content in the foregoing description; those of ordinary skills can change arbitrarily and change; as long as its method is described consistent with the utility model, all be considered as falling in the protection domain of the present utility model.
Claims (6)
1. a laser power detection device is characterized in that, comprising:
Be used for the light of semiconductor laser output is divided into the spectroscope of reflected light and transmitted light;
Be positioned at first frosted glass that is used on the described reflected light path through the distribution of reflected light homogenising after the described spectroscope reflection;
Be positioned at the attenuator that is used on the described reflected light path the reflected light decay of described first frosted glass of process;
Be positioned at first photodiode that is used for the catoptrical light signal through described attenuator is become electric signal on the described reflected light path;
First amplification module that the electric signal that is connected and is used for described first photodiode is exported with described first photodiode amplifies;
Be connected and be used to detect the first detection module of magnitude of voltage of the electric signal of described first amplification module output with described first amplification module;
First computing module that is connected and is used for calculating laser output power with described first detection module based on the detected magnitude of voltage of described first detection module.
2. laser power detection device according to claim 1 is characterized in that, also comprises:
Be used for second frosted glass with being evenly distributed of the light after the described spectroscope reflection of the process of object reflection to be processed;
Be used for the convex lens that will focus on through the light of described second frosted glass;
Be used for to become second photodiode of electric signal through the light signal of the light of described convex lens;
Second amplification module that the electric signal that is connected and is used for described second photodiode is exported with described second photodiode amplifies;
Be connected and be used to detect second detection module of magnitude of voltage of the electric signal of described second amplification module output with described second amplification module;
Second computing module that is connected and is used for calculating reflected by objects luminous power to be processed with described second detection module based on the detected magnitude of voltage of described second detection module.
3. laser power detection device according to claim 1 and 2 is characterized in that, also comprises respectively first filtration module that is connected with first detection module with described first amplification module.
4. laser power detection device according to claim 1 and 2 is characterized in that, also comprises respectively second filtration module that is connected with second detection module with described second amplification module.
5. laser power detection device according to claim 2 is characterized in that, described spectroscope becomes 30 degree-60 degree angles to place with the laser instrument output light path.
6. laser power detection device according to claim 2 is characterized in that, described first frosted glass plate becomes 30 degree-60 degree angles to place with the reflected light with described spectroscope emission.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200431837U CN202066590U (en) | 2011-02-22 | 2011-02-22 | Laser power detecting apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011200431837U CN202066590U (en) | 2011-02-22 | 2011-02-22 | Laser power detecting apparatus |
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|---|---|
| CN202066590U true CN202066590U (en) | 2011-12-07 |
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| CN2011200431837U Expired - Fee Related CN202066590U (en) | 2011-02-22 | 2011-02-22 | Laser power detecting apparatus |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102747197A (en) * | 2012-06-29 | 2012-10-24 | 中国科学院力学研究所 | Technological parameter real-time monitoring method for laser shock peening process |
| CN106895911A (en) * | 2015-12-17 | 2017-06-27 | 中国科学院大连化学物理研究所 | A kind of high-rate laser power measurement instruments |
| WO2019047923A1 (en) * | 2017-09-07 | 2019-03-14 | 中兴通讯股份有限公司 | Optical power detection device and apparatus |
| CN110687034A (en) * | 2018-07-05 | 2020-01-14 | 深圳迈瑞生物医疗电子股份有限公司 | Laser irradiation system of flow cytometer and flow cytometer |
| CN111238773A (en) * | 2020-01-20 | 2020-06-05 | 中国科学院上海光学精密机械研究所 | High-resolution laser output power variation monitoring device and method |
-
2011
- 2011-02-22 CN CN2011200431837U patent/CN202066590U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102747197A (en) * | 2012-06-29 | 2012-10-24 | 中国科学院力学研究所 | Technological parameter real-time monitoring method for laser shock peening process |
| CN106895911A (en) * | 2015-12-17 | 2017-06-27 | 中国科学院大连化学物理研究所 | A kind of high-rate laser power measurement instruments |
| WO2019047923A1 (en) * | 2017-09-07 | 2019-03-14 | 中兴通讯股份有限公司 | Optical power detection device and apparatus |
| CN110687034A (en) * | 2018-07-05 | 2020-01-14 | 深圳迈瑞生物医疗电子股份有限公司 | Laser irradiation system of flow cytometer and flow cytometer |
| CN111238773A (en) * | 2020-01-20 | 2020-06-05 | 中国科学院上海光学精密机械研究所 | High-resolution laser output power variation monitoring device and method |
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| GR01 | Patent grant | ||
| DD01 | Delivery of document by public notice |
Addressee: Zeng Xia Document name: Notification to Pay the Fees |
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| DD01 | Delivery of document by public notice |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111207 Termination date: 20130222 |