CN103592025B - Spectroscopic analysis system - Google Patents

Spectroscopic analysis system Download PDF

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Publication number
CN103592025B
CN103592025B CN201310525282.2A CN201310525282A CN103592025B CN 103592025 B CN103592025 B CN 103592025B CN 201310525282 A CN201310525282 A CN 201310525282A CN 103592025 B CN103592025 B CN 103592025B
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China
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photomultiplier
optical fiber
light
analysis system
spectroscopic analysis
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Expired - Fee Related
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CN201310525282.2A
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CN103592025A (en
Inventor
陈文聪
蒲以康
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Tsinghua University
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Tsinghua University
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Priority to CN201310525282.2A priority Critical patent/CN103592025B/en
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Priority to PCT/CN2014/089330 priority patent/WO2015062445A1/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/443Emission spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/1804Plane gratings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The invention discloses a kind of spectroscopic analysis system, comprising: Cheney-Tener light channel structure; Photomultiplier tube array, photomultiplier tube array comprises N number of photomultiplier, and N is positive integer; Fiber array, fiber array comprises N group optical fiber, the first end of each group of optical fiber is lined up and is arranged on the focussing plane of Cheney-Tener light channel structure with row of entrance slit parallel direction, the first end wherein respectively organizing optical fiber collects different wave length monochromatic light, the second end of N group optical fiber and N number of photomultiplier correspondingly connected with by the light signal transduction of different wave length to different photomultipliers; Hyperchannel time gate counter; High-voltage power supply; And temperature control modules, temperature control modules is connected with photomultiplier tube array, for photomultiplier tube array being maintained constant low temperature environment when carrying out spectral measurement.The advantage of this system is to have high sensitivity and high time resolution ability simultaneously, can be used for gathering faint Rapid Variable Design and unduplicated spectral signal.

Description

Spectroscopic analysis system
Technical field
The invention belongs to field of analytic instrument, be specifically related to a kind of spectroscopic analysis system.
Background technology
Spectrometer is general spectrometric instrument, is commonly employed in the research field such as plasma physics, atomic and molecular physics.For low temperature plasma physics research, understand the Behavior law of various particle in plasma, the most basic method is the spectral line of emission by measuring various particle.The emission spectrum of low temperature plasma comprises many atom and molecule spectral lines, and is distributed in from ultraviolet in infrared very wide wavelength coverage.Meanwhile, for the plasma of non-constant state, its emission spectrum is time dependent, and may be that aperiodicity is unduplicated.For understanding physical and chemical process complicated in plasma, usually need to gather the many faint spectral line except main intense line.Therefore, the difficulty of spectral measurement is very large, is required to meet following requirement: the first, can measures the line strength at different wave length place at synchronization; The second, the sensitivity of system and signal to noise ratio (S/N ratio) are enough high to measure faint spectral line; 3rd, detecting device have fast time response ability and data acquisition ability, to complete the collection of a large amount of fast-changing spectral signal at short notice.
Now widely used spectrometer is mainly Cheney-Tener structure, mainly comprises: entrance slit, collimating mirror, diffraction grating, focusing mirror, exit slit (optional) and detecting device.Conventional detecting device mainly contains photomultiplier and CCD camera.Photomultiplier needs to coordinate exit slit to use usually, and each moment only gathers the light signal of certain wavelength, is therefore single channel detector.The advantage of photomultiplier is high sensitivity and rapid time response, particularly when it is operated in photon counting mode, its sensitivity is the highest in existing all fluorescence detectors, can carry out the time discrimination measurement of single photon nanosecond order to the photon entering its window., need by rotating shutter scanning wavelength when its shortcoming is and uses as single channel detector, need the time long for the spectral signal measurement in large wavelength coverage, efficiency is low meanwhile.Comparatively speaking, CCD camera has two-dimensional array, does not need exit slit, and can gather the light signal at different wave length place, the data acquisition time therefore needed for Measurement sensibility light signal is shorter simultaneously.Compare photomultiplier, sensitivity and the time resolution of common CCD camera are poor.Therefore, when time dependent faint light spectrum signal measured by needs, usually use enhancement mode CCD camera.Enhancement mode CCD camera, by increasing electron multiplication section to improve sensitivity, can realize other time shutter of nanosecond with the switch of electric signal control electron multiplication section simultaneously.By the restriction of the factors such as photocathode material and fluorescent plate luminescence efficiency, the detection efficiency of enhancement mode CCD camera is lower than photomultiplier.Simultaneously, although the time shutter of enhancement mode CCD camera can reach nanosecond, but add up by signal, the restriction of the factor such as CCD Charger transfer speed and analog-to-digital conversion rate cannot continuous acquisition signal, necessary multiple periodic accumulation signal, therefore collecting efficiency is lower and require that light signal must be periodically repeat, and cannot be used for the measurement that transient state does not repeat light signal.
Summary of the invention
The present invention is intended at least to solve one of technical matters existed in prior art.
For this reason, the object of the invention is to propose a kind of spectroscopic analysis system.
To achieve these goals, according to the spectroscopic analysis system of the embodiment of the present invention, comprising: Cheney-Tener light channel structure, it is export abreast after different wave length monochromatic light that described Cheney-Tener light channel structure is used for the spectrum of light source; Photomultiplier tube array, described photomultiplier tube array comprises N number of photomultiplier, and N is positive integer; Fiber array, described fiber array comprises N group optical fiber, the first end of each group of optical fiber is lined up and is arranged on the focussing plane of described Cheney-Tener light channel structure with row of entrance slit parallel direction, the first end of wherein said each group of optical fiber collects different wave length monochromatic light, the second end of described N group optical fiber and described N number of photomultiplier correspondingly connected with by the light signal transduction of different wave length to different photomultipliers; Hyperchannel time gate counter, described hyperchannel time gate counter and described multiple photomultiplier are electrically connected respectively; High-voltage power supply, described high-voltage power supply and described photomultiplier tube array are electrically connected; And temperature control modules, described temperature control modules is connected with described photomultiplier tube array, for described photomultiplier tube array being maintained constant low temperature environment when carrying out spectral measurement.
According to the spectroscopic analysis system of the embodiment of the present invention, utilize photomultiplier tube array as the detecting device of spectrometer, utilize fiber array that the spectral signal of different wave length on spectrometer focal plane is transferred to different photomultipliers, the pulse output signals of photomultiplier tube array is counted by hyperchannel gate control counter device, thus makes this system have the time resolution of other high sensitivity of single-photon-level and nanosecond order.Meanwhile, the present invention utilizes fiber array transmission spectrum signal, decreases the impact of electromagnetic interference (EMI) and X ray.Meanwhile, undertaken freezing to photomultiplier tube array by temperature control modules and temperature controls, be conducive to reducing background signal, improve signal to noise ratio (S/N ratio), realize steady operation, improve precision of analysis.Compare the spectrometer system of the single photomultiplier of existing use or CCD camera, the advantage of spectroscopic analysis system of the present invention is to have high sensitivity and high time resolution ability simultaneously, can be used for gathering faint Rapid Variable Design and unduplicated spectral signal.
In addition, following additional technical feature can also be had according to the spectroscopic analysis system of the embodiment of the present invention:
In one embodiment of the invention, described Cheney-Tener light channel structure specifically comprises: entrance slit, collimating mirror, diffraction grating and focusing mirror, wherein, the continuous spectrum that light source sends through described entrance slit to being irradiated on described collimating mirror, then directional light is reflected to form through described collimating mirror, described directional light, after described diffraction grating diffraction, makes the monochromatic light of different wave length focus on diverse location on same focal plane by described focusing mirror.
In one embodiment of the invention, the number of fibers that comprises of each group optical fiber is identical.
In one embodiment of the invention, described photomultiplier works in photon counting mode, and described hyperchannel gate control counter device carries out photon counting to described N number of photomultiplier simultaneously.
In one embodiment of the invention, described optical fiber is multimode optical fiber.
In one embodiment of the invention, the wavelength of the light signal that each photomultiplier gathers surely can be determined by known discharged atomic gas beacon light.
In one embodiment of the invention, when needing the spectral line gathering specified wavelength, by regulating fiber array at the often row optical fiber pitch of first end to change wavelength corresponding to each photomultiplier.
Additional aspect of the present invention and advantage will part provide in the following description, and part will become obvious from the following description, or be recognized by practice of the present invention.
Accompanying drawing explanation
Above-mentioned and/or additional aspect of the present invention and advantage will become obvious and easy understand from accompanying drawing below combining to the description of embodiment, wherein:
Fig. 1 is the structural representation of the spectroscopic analysis system of the embodiment of the present invention;
Fig. 2 is the sectional view of the fiber array first end of the spectroscopic analysis system of Fig. 1, fiber array second end and photomultiplier tube array; With
Fig. 3 is the structural representation of Cheney-Tener light channel structure.
Embodiment
Be described below in detail embodiments of the invention, the example of described embodiment is shown in the drawings, and wherein same or similar label represents same or similar element or has element that is identical or similar functions from start to finish.Be exemplary below by the embodiment be described with reference to the drawings, be intended to for explaining the present invention, and can not limitation of the present invention be interpreted as.
The present invention is intended to propose a kind of spectral signal intensity obtaining different wave length place in a wavelength range at synchronization, has other high sensitivity of single-photon-level and other time resolution of nanosecond, and can the spectroscopic analysis system of continuous acquisition signal.
According to the spectroscopic analysis system of the embodiment of the present invention, as depicted in figs. 1 and 2, can comprise: Cheney-Tener light channel structure 10, photomultiplier tube array 20, fiber array 30, hyperchannel time gate counter 40, high-voltage power supply 50 and temperature control modules 60.Cheney-Tener light channel structure 10 is for being export the spectrum of light source abreast after different wave length monochromatic light.Photomultiplier tube array 20 comprises N number of photomultiplier, and N is positive integer.Fiber array 30 comprises N group optical fiber, and the first end of each group optical fiber is lined up and is arranged on the focussing plane of Cheney-Tener light channel structure 10 with row of entrance slit parallel direction.Wherein respectively organize the monochromatic light that different wave length collected by optical fiber.Second end of N group optical fiber is connected the light signal transduction of different wave length to different photomultipliers correspondingly from N number of photomultiplier.Hyperchannel time gate counter 40 and multiple photomultiplier are electrically connected respectively.High-voltage power supply 50 and photomultiplier tube array 20 are electrically connected.The photomultiplier tube array 20 required high direct voltage that works is powered and to be provided by high stable high-voltage power supply 50.Temperature control modules 60 is connected with photomultiplier tube array 20, and this temperature control modules 60 is in low temperature environment for maintaining photomultiplier tube array when carrying out spectral measurement.
Although it should be noted that in Fig. 1 and Fig. 2 and the situation of N=4 has been shown, be only the convenience for example herein but not restriction of the present invention.Photomultiplier number and fiber array columns should be increased as required during real work.Such as, fiber array adopts 100 row diameters to be the optical fiber of 200 microns, then fiber array in the horizontal direction under minimum length be 20 millimeters, suitable with the pixel faces battle array size of normally used CCD camera, namely can gather the spectral signal of 100 wavelength points with CCD camera in similar wavelength coverage.Now, corresponding photomultiplier tube array is made up of 100 photomultipliers.
The course of work of this spectroscopic analysis system is: the one end on the focal plane of the bright dipping near Cheney-Tener light path 10, optical fiber arrangement in fiber array 30 becomes two-dimentional square array, collects the spectral signal of Same Wavelength with the often row optical fiber in entrance slit parallel direction.One end that often row optical fiber is connecting photomultiplier tube array 20 is converged into a branch of, the spectral signal of different wave length is conducted to different photomultipliers, can be obtained the spectral information in certain spectral range by the signal of multiple photomultiplier simultaneously.
The spectroscopic analysis system of above-described embodiment utilizes photomultiplier tube array as the detecting device of spectrometer, utilize fiber array that the spectral signal of different wave length on spectrometer focal plane is transferred to different photomultipliers, the pulse output signals of photomultiplier tube array is counted by hyperchannel gate control counter device, thus makes this system have the time resolution of other high sensitivity of single-photon-level and nanosecond order.Meanwhile, the present invention utilizes fiber array transmission spectrum signal, decreases the impact of electromagnetic interference (EMI) and X ray., by temperature control modules photomultiplier tube array to be freezed and temperature controls meanwhile, be conducive to reducing background signal, improve signal to noise ratio (S/N ratio), realize steady operation, improve analysis result accuracy.Compare the spectrometer system of the single photomultiplier of existing use or CCD camera, the advantage of spectroscopic analysis system of the present invention is to have high sensitivity and high time resolution ability simultaneously, can be used for gathering faint Rapid Variable Design and unduplicated spectral signal.
In one embodiment of the invention, as shown in Figure 3, Cheney-Tener light channel structure 10 specifically can comprise: entrance slit 11, collimating mirror 12, diffraction grating 13 and focusing mirror 14.The continuous spectrum that light source sends through entrance slit 11 to being irradiated on collimating mirror 12, then directional light is reflected to form through collimating mirror 12, this directional light, after diffraction grating 13 diffraction, makes the monochromatic light of different wave length focus on diverse location on same focal plane finally by focusing mirror 14.
In one embodiment of the invention, the number of fibers that comprises of each group optical fiber is identical.It should be noted that, when the number in each group of optical fiber is different, also can be multiplied by a correction factor to obtain correct Spectroscopic analysis results by adding the count results of hyperchannel gate control counter device.But preferably adopt the scheme that each group of number of fibers is identical.
In one embodiment of the invention, photomultiplier works in photon counting mode, and hyperchannel gate control counter device 40 carries out photon counting to N number of photomultiplier simultaneously.Particularly, the pulse output signals of each photomultiplier is counted by a passage of hyperchannel gate control counter device 40.The present invention adopts photomultiplier as detecting device, to have in current existing all optical signal detectors optimum sensitivity and preferably time resolution, can continuous acquisition signal.During the spectral signal changed when needing collection period, being only required to be hyperchannel gate control counter device and one-period synchronizing signal is provided.When light signal be transient state not repeating signal time, need for hyperchannel gate control counter device provide one slightly early than light signal trigger pip and suitable time gate-width and acquisition sequence length are set.This system has played the high sensitivity of photomultiplier and the feature of high time resolution ability, has the ability of the multichannel collecting of CCD camera simultaneously.
In one embodiment of the invention, optical fiber is multimode optical fiber.Utilize optical fiber to carry out impact that Signal transmissions also can reduce electromagnetic interference (EMI) and X ray, the light signal be applicable under strong jamming condition is measured.
In one embodiment of the invention, the signal by gathering different photomultiplier can obtain the light signal at different wave length place.Surely the wavelength of the light signal that each photomultiplier gathers can be determined by known discharged atomic gas beacon light.
In one embodiment of the invention, when needing the spectral line gathering specified wavelength, by suitably regulating the often row optical fiber pitch of fiber array in one end, spectrometer focal plane to change wavelength corresponding to each photomultiplier.
In describing the invention, it will be appreciated that, term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ", " thickness ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", " outward ", " clockwise ", " counterclockwise ", " axis ", " radial direction ", orientation or the position relationship of the instruction such as " circumference " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore limitation of the present invention can not be interpreted as.
In addition, term " first ", " second " only for describing object, and can not be interpreted as instruction or hint relative importance or imply the quantity indicating indicated technical characteristic.Thus, be limited with " first ", the feature of " second " can express or impliedly comprise one or more these features.In describing the invention, the implication of " multiple " is two or more, unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, the term such as term " installation ", " being connected ", " connection ", " fixing " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or integral; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals or the interaction relationship of two elements.For the ordinary skill in the art, above-mentioned term concrete meaning in the present invention can be understood as the case may be.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be that the first and second features directly contact, or the first and second features are by intermediary indirect contact.And, fisrt feature second feature " on ", " top " and " above " but fisrt feature directly over second feature or oblique upper, or only represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " below " and " below " can be fisrt feature immediately below second feature or tiltedly below, or only represent that fisrt feature level height is less than second feature.
In the description of this instructions, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means to describe in conjunction with this embodiment or example are contained at least one embodiment of the present invention or example.In this manual, to the schematic representation of above-mentioned term not must for be identical embodiment or example.And the specific features of description, structure, material or feature can combine in one or more embodiment in office or example in an appropriate manner.In addition, the different embodiment described in this instructions or example can carry out combining and combining by those skilled in the art.
Although illustrate and describe embodiments of the invention above, be understandable that, above-described embodiment is exemplary, can not be interpreted as limitation of the present invention, and those of ordinary skill in the art can change above-described embodiment within the scope of the invention, revises, replace and modification.

Claims (7)

1. a spectroscopic analysis system, is characterized in that, comprising:
Cheney-Tener light channel structure, it is export abreast after different wave length monochromatic light that described Cheney-Tener light channel structure is used for the spectrum of light source;
Photomultiplier tube array, described photomultiplier tube array comprises N number of photomultiplier, and N is positive integer;
Fiber array, described fiber array comprises N group optical fiber, the first end of each group of optical fiber is lined up and is arranged on the focussing plane of described Cheney-Tener light channel structure with row of entrance slit parallel direction, the first end of wherein said each group of optical fiber collects different wave length monochromatic light, the second end of described N group optical fiber and described N number of photomultiplier correspondingly connected with by the light signal transduction of different wave length to different photomultipliers;
Hyperchannel time gate counter, described hyperchannel time gate counter and described multiple photomultiplier are electrically connected respectively;
High-voltage power supply, described high-voltage power supply and described photomultiplier tube array are electrically connected; With
Temperature control modules, described temperature control modules is connected with described photomultiplier tube array, for described photomultiplier tube array being maintained constant low temperature environment when carrying out spectral measurement.
2. spectroscopic analysis system as claimed in claim 1, it is characterized in that, described Cheney-Tener light channel structure specifically comprises: entrance slit, collimating mirror, diffraction grating and focusing mirror, wherein, the continuous spectrum that light source sends through described entrance slit to being irradiated on described collimating mirror, then directional light is reflected to form through described collimating mirror, described directional light, after described diffraction grating diffraction, makes the monochromatic light of different wave length focus on diverse location on same focal plane by described focusing mirror.
3. spectroscopic analysis system as claimed in claim 1 or 2, is characterized in that, the number of fibers that each group optical fiber comprises is identical.
4. spectroscopic analysis system as claimed in claim 1, it is characterized in that, described photomultiplier works in photon counting mode, and described hyperchannel time gate counter carries out photon counting to described N number of photomultiplier simultaneously.
5. spectroscopic analysis system as claimed in claim 1, it is characterized in that, described optical fiber is multimode optical fiber.
6. spectroscopic analysis system as claimed in claim 1, be is characterized in that, surely can be determined the wavelength of the light signal that each photomultiplier gathers by known discharged atomic gas beacon light.
7. spectroscopic analysis system as claimed in claim 1, is characterized in that, when needing the spectral line gathering specified wavelength, by regulating fiber array at the often row optical fiber pitch of first end to change wavelength corresponding to each photomultiplier.
CN201310525282.2A 2013-10-30 2013-10-30 Spectroscopic analysis system Expired - Fee Related CN103592025B (en)

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* Cited by examiner, † Cited by third party
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CN105043930B (en) * 2015-07-24 2017-12-12 中国电子科技集团公司第四十九研究所 Using the detection method of the detection means with micro-structural alkali metal air chamber alkali-metal vapor atoms density
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CN111965152A (en) * 2020-08-13 2020-11-20 公安部物证鉴定中心 A identification appearance that is used for on-spot biological spot of criminal investigation to detect
CN113009292B (en) * 2021-02-25 2021-12-28 西安交通大学 Partial discharge low-light spectrum detector
CN113203727B (en) * 2021-05-12 2023-04-28 华中科技大学 Spectrum measuring device and method
CN117420083B (en) * 2023-12-19 2024-04-09 哈尔滨工业大学 Online monitoring device and method for trace products of plasma erosion

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101320138A (en) * 2008-05-16 2008-12-10 中国科学院西安光学精密机械研究所 Method and apparatus for simultaneously acquiring stereo and multi-spectral images
CN202708649U (en) * 2012-05-15 2013-01-30 李刚 LED lamp bulb structure

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004191244A (en) * 2002-12-12 2004-07-08 Minolta Co Ltd Spectrograph and correction method
DE102006006277B4 (en) * 2006-02-10 2016-09-22 Carl Zeiss Microscopy Gmbh Laser scanning microscope with spectrally resolving radiation detection and associated method
ATE472078T1 (en) * 2006-08-25 2010-07-15 Abb Research Ltd FLAME DETECTOR WITH CAMERA
CN101889192B (en) * 2007-10-25 2012-07-04 纽约州立大学研究基金会 Single photon spectrometer
CN101256144B (en) * 2008-03-28 2010-06-02 清华大学 Device for detecting vacuum ultraviolet spectrum
CN102478517A (en) * 2010-11-24 2012-05-30 上海复莱信息技术有限公司 Sulfur dioxide detector
CN202066593U (en) * 2011-05-13 2011-12-07 卢利根 Ultraviolet spectrum measuring system based on photomultiplier tube array
CN103592025B (en) * 2013-10-30 2015-07-29 清华大学 Spectroscopic analysis system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101320138A (en) * 2008-05-16 2008-12-10 中国科学院西安光学精密机械研究所 Method and apparatus for simultaneously acquiring stereo and multi-spectral images
CN202708649U (en) * 2012-05-15 2013-01-30 李刚 LED lamp bulb structure

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
一种红外多光谱成像光学系统设计;项建胜等;《红外技术》;20091231;第31卷(第12期);第683-686页 *

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