CN106442325B - A kind of 2-D optical fibre array spectral detection system for plasma detection - Google Patents
A kind of 2-D optical fibre array spectral detection system for plasma detection Download PDFInfo
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- CN106442325B CN106442325B CN201610958577.2A CN201610958577A CN106442325B CN 106442325 B CN106442325 B CN 106442325B CN 201610958577 A CN201610958577 A CN 201610958577A CN 106442325 B CN106442325 B CN 106442325B
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
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Abstract
The present invention provides a kind of 2-D optical fibre array spectral detection systems for plasma detection comprising: incident optical；Cheney-Tener light channel structure, is arranged in the downstream of the incident optical；Face battle array optical fiber, the face battle array optical fiber includes incidence end and exit end, and the incidence end connects the Cheney-Tener light channel structure output end；Photomultiplier tube array, the photomultiplier tube array are made of multiple Photomultiplier units, wherein each Photomultiplier unit is used to receive the output of a branch of fiber optic bundle of the exit end of the face battle array optical fiber；Amplifier, the amplifier are used to amplify the electric signal of the photomultiplier tube array output；Counter, the counter are electrically connected to the amplifier, and the electric signal for the amplifier transfer to be come in is converted into photon number and counts.Spectral detection system of the invention has many advantages, such as that spatial resolution is high, photomultiplier tube service efficiency is high, at low cost.
Description
Technical field
The present invention relates to field of analytic instrument, and in particular to a kind of 2-D optical fibre array spectrum for plasma detection
Detection system.
Background technique
Spectrometer is general spectrometric instrument, by the photodegradation of complicated component is different wave length by diffraction grating
Light, Application Optics principle, structure and ingredient to substance are observed, analyze and handle, and are widely used in every field.Such as exist
In IC equipment research and development, it can be generated by combining spectrometer with other elements such as photomultiplier tubes with plasma glow discharge
Spectral information be acquired analysis, real-time detection reacting phenomenon obtains plasma physics parameter, in a variety of plasma physical examinations
Have many advantages, such as non-intrusion type, response quickly in measurement equipment.Meanwhile for object complicated in the plasma in non-constant state
Physicochemical process, it usually needs many faint spectral lines of the acquisition other than main intense line, detection difficulty are very big.
There are mainly two types of the detection means mainly used to optic spectrum line at present: one is the companies by spectrometer to detection
Continuous spectrum is divided, the optical signal for cooperating photomultiplier tube to acquire single wavelength by adjusting exit slit；Another kind is logical
The CCD camera with two-dimensional array is crossed, the spectral signal in different wavelength range can be acquired.The first detection method has spirit
The advantages that sensitivity height, response quickly, especially photomultiplier tube is as the highest optical detection original part of current sensitivity, Ke Yishi
The time discrimination measurement of existing single photon nanosecond.And common CCD camera sensitivity and time resolution are poor, occur at present
Although enhanced CCD camera also can achieve nanosecond detection accuracy, by photocathode material and fluorescent plate light receiving efficiency
Etc. factors limitation, the detection efficiency of enhanced CCD camera is lower than photomultiplier tube, and is not used to transient state and does not repeat light letter
Number continuous measurement.
In view of this, the spectra collection for thering is spectroscopic analysis system to carry out spatial discrimination using the mode of fiber array at present,
Wherein fiber array has a first end and a second end, the corresponding photomultiplier tube of each optical fiber of second end.However it is this
Constructing has following deficiency: firstly, less photomultiplier tube can be used when the optical signal data for needing to acquire is less, but
It is the data precision decline that will lead to acquisition in this way, if in order to improve the quantity of data point using more photomultiplier tube
It then will increase cost.Secondly as photomultiplier tube radiates at work, more, more photomultiplier tube works generation together
Heat it is bigger, if radiating treatment cannot be carried out timely, photomultiplier tube operating temperature can be made to steeply rise, generated big
The thermal noise of amount influences the signal-to-noise ratio for acquiring data, cannot get ideal data information.Finally, due to each photomultiplier tube
Response characteristic difference it is very big, not only need that control is individually adjusted to each photomultiplier tube, it is also necessary to mutual coupling
It closes and adjusts, so that each photomultiplier tube has more consistent output signal.
Summary of the invention
The main purpose of the present invention is to provide a kind of 2-D optical fibre array spectral detection systems for plasma detection
System is above-mentioned existing in the prior art at least one insufficient to overcome.
To achieve the goals above, the present invention provides a kind of 2-D optical fibre array spectral detection for plasma detection
System comprising:
Incident optical, the incident optical is for acquiring spectral signal to be detected；
Cheney-Tener light channel structure, the Cheney-Tener light channel structure are arranged in the downstream of the incident optical, are used for
It is exported outward after the collected spectral signal of incident optical is divided the monochromatic light for different wave length；
Face battle array optical fiber, the face battle array optical fiber includes incidence end and exit end, and the incidence end connects the Cheney-Tener light
The output end of line structure；
Photomultiplier tube array, the photomultiplier tube array are made of multiple Photomultiplier units, wherein each institute
State the output of a branch of fiber optic bundle of exit end of the Photomultiplier unit for receiving the face battle array optical fiber；
Amplifier, the amplifier are used to amplify the electric signal of the photomultiplier tube array output；
Counter, the counter are electrically connected to the amplifier, the electric signal for the amplifier transfer to be come in
Photon number is converted into be counted.
The incidence end of the face battle array optical fiber is the two-dimensional surface face battle array being made of M row N column optical fiber, and the face battle array optical fiber goes out
It penetrates end and M row N column optical fiber is divided into multiple fiber units, wherein each fiber unit is made of X row Y column optical fiber, each optical fiber
Unit constitutes a branch of fiber optic bundle.
Each Photomultiplier unit includes:
Photomultiplier transit pipe mounting seat；
Photomultiplier tube is arranged in the inner hole of the photomultiplier transit pipe mounting seat, the photomultiplier tube it is photosensitive
Face is parallel with the outgoing transverse plane of the fiber optic bundle；
Tube socket, the tube socket are electrically connected to the photomultiplier tube to provide operating voltage to the photomultiplier tube；
Wherein, multiple light holes are provided in the photomultiplier transit pipe mounting seat, each light hole corresponds to the optical fiber
An optical fiber in beam, so that the optical signal of the optical fiber output can reach in the case where the light hole is not blocked
The photosurface.
Preferably, the photomultiplier transit pipe mounting seat is additionally provided with shade corresponding with the light hole, the shading
Device is used to open or closes the light hole.
Preferably, the shade includes: the groove being arranged in photomultiplier transit pipe mounting seat upper surface；Shading
Block, the light shielding block are installed in the groove with being slidably matched；And pull rod, the pull rod are fixedly attached to the shading
Block.
Preferably, the mounting means of the photomultiplier tube are as follows: the pin of the photomultiplier tube is inserted into the tube socket
Pin jack in, the photomultiplier tube is integrally inserted into the inner hole of the photomultiplier transit pipe mounting seat, and in the pipe
The O-ring for shutting out the light is provided between seat and the photomultiplier transit pipe mounting seat.
Preferably, each Photomultiplier unit is equipped with independent cooling device.
Preferably, the cooling device includes: the semiconductor chilling plate for being connected to photomultiplier transit pipe mounting seat bottom,
With the radiating seat for conducting the semiconductor chilling plate heat.
Preferably, the photomultiplier transit pipe mounting seat, the optical fiber are fixed to by fiber fixed seat per a branch of fiber optic bundle
Fixing seat is mounted on the upper surface of the photomultiplier transit pipe mounting seat, and the fiber fixed seat is equipped with optical fiber through-hole, described
Optical fiber through-hole and the light hole one are a pair of just, and the end of every optical fiber in the fiber optic bundle is contained in corresponding optical fiber through-hole
In.
Preferably, it is additionally provided with tube socket control circuit, wherein the tube socket control circuit is electrically connected to the photomultiplier transit
Each tube socket in pipe array is to control the control voltage of each tube socket, to make multiple light in the photomultiplier tube array
Electric multiplier tube output response having the same.
Preferably, the tube socket control circuit includes circuit of three-terminal voltage-stabilizing integrated, variable resistance R, chip amplifier
LM324, input end capacitor and output capacitor, wherein input end capacitor is parallel to the input of the circuit of three-terminal voltage-stabilizing integrated
End, output capacitor are parallel to the output end of the circuit of three-terminal voltage-stabilizing integrated, and it is steady that the variable resistance R is parallel to three end
The output end of integrated circuit is pressed, the non-inverting input terminal of the chip amplifier LM324 connects the movable touching of the variable resistance R
Point.
2-D optical fibre array spectral detection system for plasma detection of the invention, passes through Cheney-Tener optical path
Structure and photomultiplier tube array are applied in combination, and can be realized the spectral detection with stronger spatial resolution.
Particularly, spectral detection system according to the present invention, by the exit end classifying rationally of face battle array optical fiber at different
Fiber unit can detect the data of multifiber simultaneously on single photomultiplier tube, can greatly improve photomultiplier tube
Service efficiency, can lead to too small amount of photomultiplier tube can be detected more optical signal data, significantly reduce spectrum
The cost of detection.In addition, each Photomultiplier unit has independent cooling system (cooling system), integrate when using not
It will appear the excessively high problem of heat.Still further, the present invention is the nozzle design control circuit of each photomultiplier tube, Ke Yibao
The output response for demonstrate,proving each photomultiplier tube is consistent, so as to more effectively realize the acquisition to spectroscopic data.
Detailed description of the invention
The accompanying drawings constituting a part of this application is used to provide further understanding of the present invention, and of the invention shows
Examples and descriptions thereof are used to explain the present invention for meaning property, does not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is the schematic diagram of the 2-D optical fibre array spectral detection system in the present invention；
Fig. 2 is Cheney-Tener light channel structure schematic diagram；
Fig. 3 a and 3b are the structural schematic diagram of two kinds of embodiments of face battle array optical fiber；
Fig. 4 is the structural schematic diagram of single Photomultiplier unit；
Fig. 5 is the scheme of installation of fiber optic bundle；
Fig. 6 is the structural schematic diagram of photomultiplier transit pipe mounting seat；
Fig. 7 is the scheme of installation of photomultiplier tube and tube socket；
Fig. 8 is the tube socket control circuit schematic diagram of photomultiplier tube array.
Wherein, the above drawings include the following reference numerals:
100, incident optical；200, Cheney-Tener optical path；300, face battle array optical fiber；400, photomultiplier tube array；500, it manages
Seat control circuit；600, amplifier；700, counter；201, entrance slit；202, collimating mirror；203, diffraction grating；
204, focusing mirror；205, focussing plane；410, radiating seat；420, semiconductor chilling plate；430, photomultiplier transit pipe mounting seat；
431, inner hole；432, light hole；433, light shielding block；434, pull rod；435, photomultiplier transit pipe mounting seat upper surface；436, photoelectricity times
Increase pipe mounting seat side；437, threaded hole is installed；438, radiating groove；440, photomultiplier tube；441, pin；442, photosurface；
450, O-ring；460, tube socket；461, tube socket mounting hole；462, pin jack；463, neck；470, fiber fixed seat；471, close
Seal；472, barn door；480, fiber optic bundle；480a, optical fiber.
Specific embodiment
In the following description, a large amount of concrete details are given so as to provide a more thorough understanding of the present invention.So
And it will be apparent to one skilled in the art that the present invention may not need one or more of these details and be able to
Implement.In other examples, in order to avoid confusion with the present invention, for some technical characteristics well known in the art not into
Row description.
In order to thoroughly understand the present invention, detailed structure will be proposed in following description.Obviously, the embodiment of the present invention
It is not limited to the specific details that those skilled in the art is familiar with.Presently preferred embodiments of the present invention is described in detail as follows, so
And other than these detailed descriptions, the present invention can also have other embodiments.
Pass through Cheney-Tener light channel structure and photomultiplier tube array group the main purpose of the present invention is to provide a kind of
It closes and uses, realizing has the spectral detection system of stronger spatial resolution.As shown in Figure 1, the spectral detection system includes:
Incident optical 100, the incident optical 100 are used to acquire the continuous spectrum signal for needing to detect；
The downstream of the incident optical is arranged in Cheney-Tener light channel structure 200, the Cheney-Tener light channel structure 200,
For being exported after the collected continuous spectrum signal of incident optical 100 is divided the monochromatic light for different wave length；
Face battle array optical fiber 300, face battle array optical fiber 300 includes incidence end and exit end, and wherein incidence end connects Cheney-Tener light
The output end of line structure 200 is preferably mounted on Cheney-Tener light channel structure 200 focal plane；
Photomultiplier tube (PMT) array 400, which is made of multiple Photomultiplier units, wherein
Each Photomultiplier unit is used to receive the output of a branch of fiber optic bundle of the exit end of the face battle array optical fiber 300；
Amplifier 600, the amplifier 600 are used to amplify the electric signal of photomultiplier tube array output；
Counter 700 is mounted on 600 rear end of amplifier, which is used for the telecommunications that amplifier transfer is come in
Number being converted into photon number is counted, and the equipment such as can use such as personal computer PC carry out it is outer aobvious.
Cheney according to the present invention-Tener light channel structure is shown in FIG. 2, as shown in Fig. 2, line with the arrow in figure is
Its schematic optical path.Wherein, the continuous spectrum to be detected from incident optical 100 injects Cheney-Tener light channel structure 200
Spectral signal is irradiated on collimating mirror 202 by entrance slit 201 using the entrance slit, will by collimating mirror 202
Continuous spectrum is reflected into directional light and is transferred to 203 surface of diffraction grating, is divided continuous spectrum by the diffraction of diffraction grating 203
Light is simultaneously transferred on focusing mirror 204, and the monochromatic light of different wave length is focused on focussing plane 205 by focusing mirror 204
At different location.Then, the incidence end of face battle array optical fiber 300 is installed at focussing plane 205, different wave length can be acquired
Monochromatic light.
As shown in figure 3, face battle array optical fiber 300 includes the optical fiber of M row N column arrangement, incidence end is to be made of M row N column optical fiber
Two-dimensional surface face battle array, for acquiring the monochromatic light in Cheney-Tener light channel structure 200.Wherein M and N is natural number, the two
Can be equal, it can also be unequal.The optical fiber of M row N column is subjected to the exit end property of can choose of battle array optical fiber 300 group in face
Close, to form multiple fiber units being made of X row Y column optical fiber, wherein each fiber unit constitute a branch of fiber optic bundle with
In external output.Obviously, wherein X and Y is respectively the natural number for being less than or equal to M and N.
As the example for being not intended to limit the scope of protection of the present invention, the face battle array optical fiber 300 in Fig. 3 a is by 16 row, 16 column light
Fine close-packed arrays composition, i.e. M and N are 16.Wherein, 16 rows 16 column of exit end are divided into following multiple fiber units:
16 row, 16 column optical fiber in the exit end of face battle array optical fiber 300 is divided with 4 rows 1 column for a fiber unit, i.e. X is 4 and Y
It is 1, the box in attached drawing 3a is the single fiber unit identified.Correspondingly for the ease of identifying each optical fiber list
Relative position of the member in exit end can use XOY coordinate representation in fig. 3 a, i.e., 16 row, 16 column optical fiber be divided into the side X
Upward 16 column (i.e. every 1 column optical fiber corresponds to the different coordinate values in the 1-16 in X-axis) and 4 rows in the Y direction are (that is, every 4
Row optical fiber corresponds to the different coordinate values in the 1-4 in Y-axis).In this way, can use coordinate position (x, y) to indicate face battle array light
Any beam fiber optic bundle in fine exit end.For example, as selected (1,1) the i.e. 1-4 row optical fiber conduct of first row in Fig. 3 a
One fiber unit of exit end, the fiber unit are externally exported using a branch of fiber optic bundle, the 13-16 row of (4,4) i.e. first row
Another fiber unit of the optical fiber as exit end, the fiber unit are externally exported using another beam fiber optic bundle.It can thus be seen that
Output end 4 row of totally 16 column namely 64 fiber units of face battle array optical fiber in Fig. 3 a, and externally exported via 64 beam fiber optic bundles,
This 64 beam fiber optic bundle can be inserted into respectively in the PMT array 400 of photomultiplier tube fixing seat composition, so that it may obtain entire
All optical signals at the incident transverse plane of face battle array optical fiber 300.
Another example is shown in fig 3b, similarly, by face battle array optical fiber 300 exit end in 16 row, 16 column optical fiber with
4 rows 4 are classified as a fiber unit and are divided, i.e. X is 4 and Y is 4, and the box in attached drawing 3b is as identified single
Fiber unit.Correspondingly for the ease of identifying relative position of each fiber unit in exit end, can use in fig 3b
XOY coordinate representation, i.e., 16 row, 16 column optical fiber being divided into 4 column in the X direction, (i.e. every 4 column optical fiber corresponds to the 1-4 in X-axis
In different coordinate values) and in the Y direction 4 rows (that is, every 4 row optical fiber correspond to Y-axis on 1-4 in different coordinate values).
As an example, the fiber unit of selection (1,1) i.e. 1-4 column and 1-4 row composition exit end, the fiber unit utilize in fig 3b
A branch of fiber optic bundle externally exports.It can be seen that totally 4 rows 4 column namely 16 beams are defeated for the corresponding output end of face battle array optical fiber in Fig. 3 b
This 16 beam optical fiber is inserted into the PMT array 400 of photomultiplier tube fixing seat composition by optical fiber out respectively, available face battle array
All optical signals at the incident transverse plane of optical fiber 300.
It will be appreciated to those of skill in the art that Fig. 3 a and Fig. 3 b illustrate only 16 row, 16 column face battle array optical fiber 300
Two kinds of way of outputs, can extend to the face battle array optical fiber of any combination of M row N column, and can also have in the output end of optical fiber
Different combinations.By replacing different face battle array optical fiber 300, so that it may obtain different two-dimensional surfaces by detection system
Optical signal.
The signal of a Photomultiplier unit in photomultiplier tube array according to the present invention is shown in figures 4-7
Property structure.Each Photomultiplier unit includes:
Photomultiplier transit pipe mounting seat 430；
Photomultiplier tube 440 is arranged in the inner hole 431 of the photomultiplier transit pipe mounting seat 430, the photomultiplier tube
440 photosurface 442 (or its bus) is parallel with the outgoing transverse plane of corresponding fiber optic bundle；
Tube socket 460, the tube socket 460 are electrically connected to photomultiplier tube 440 to provide work electricity to the photomultiplier tube 440
Pressure；
Wherein, multiple light holes 432 are provided in photomultiplier transit pipe mounting seat 430, each light hole 432 corresponds to described
An optical fiber 480a in light shafts 480, so that the optical fiber 480a is defeated in the case where the light hole 432 is not blocked
Optical signal out can reach the photosurface 442.
Preferably, shade corresponding with light hole 432, shading are additionally provided in the photomultiplier transit pipe mounting seat 430
Device is used to open or closes the light hole 432, thus selectively by the output signal of an optical fiber through corresponding light passing
Hole 432 is transmitted to or is not transferred in photomultiplier transit pipe mounting seat 430.
The preferred structure of shade according to the present invention is shown in FIG. 6.The shade includes: to be arranged in photoelectricity
The multiple grooves to double in 430 upper surface 435 of pipe mounting seat, are arranged in the light shielding block 433 in the corresponding recesses with being slidably matched,
Through-hole, pull rod 434 are provided at position corresponding with each light shielding block 433 on the side of photomultiplier transit pipe mounting seat 436
Across through-hole and it is fixedly attached to the rear end of each light shielding block 433, which for example can be the connection that is screwed, certainly may be used
To be other suitable connection type.As shown in fig. 6, when pulling pull rod 434, so that it may drive light shielding block 433 in photoelectricity times
Increase and moved in the groove of 430 upper surface 435 of pipe mounting seat, realizes the closing and opening to light hole 432.And for example, by four
The cooperation of group pull rod and light shielding block, may be implemented the response to optical signal in optical fiber 480a different in light shafts, to obtain
Spectral information in the battle array optical fiber 300 of face at different location.
The mounting means schematic diagram of photomultiplier tube 440 according to the present invention is shown in Fig. 4 and Fig. 7.Wherein tube socket
460 for voltage needed for providing work for photomultiplier tube 440, the optical signal that photomultiplier tube 440 then is used to receive
Electric signal is converted into export outward.As shown in fig. 6-7, one end of photomultiplier tube is photosurface 442, for being inserted into photoelectricity times
Increase the output signal of reception optical fiber in the inner hole 431 of pipe mounting seat 430, and the other end then has the pin being electrically connected with tube socket
441, which is inserted into the pin jack 462 on tube socket 460, to realize stable electrical connection.Tube socket 460 has peace
Flange is filled, mounting flange is equipped with tube socket mounting hole 461, it is used for after photomultiplier tube 440 is inserted into inner hole 431, with
The realization of installation threaded hole 437 of photomultiplier transit pipe mounting seat 430 is connected and fixed.Wherein, one section is equipped in the side of mounting flange
Neck 463, the outside of neck 463 are provided with O-ring seal 450, and wherein the internal diameter of O-ring seal 450 is less than the outer of neck 463
Diameter, outer diameter are then greater than the diameter of the inner hole 431 of photomultiplier transit pipe mounting seat 430.By this set, installed when by tube socket
It is O-shaped when photomultiplier tube 440, O-ring seal 450, tube socket 460 are fixed to photomultiplier transit pipe mounting seat 430 by hole 461 together
Sealing ring 450 can stop the light of outside to enter in the inner hole 431 of photomultiplier transit pipe mounting seat 430, so as to avoid exterior light
The influence that line acquires fiber-optic signal.
Specifically as shown in figs. 4-7, the fixed form per a branch of light shafts are as follows: by each optical fiber from face battle array optical fiber 300
Beam 480 is fixed on fiber fixed seat 470, is then pacified the fiber fixed seat 470 using fasteners (not shown) such as bolts
It is attached at the upper surface 435 of photomultiplier transit pipe mounting seat 430.Fiber fixed seat 470 is equipped with optical fiber through-hole, the optical fiber through-hole
A pair of just with the light hole 432 1, it is logical that the end of every optical fiber 480a in the fiber optic bundle 480 is contained in corresponding optical fiber
Kong Zhong.
The light in external environment is injected into photomultiplier tube installation through the optical fiber through-hole of fiber fixed seat 470 in order to prevent
In seat 430, barn door 472, barn door 472 can be installed between fiber optic bundle 480 and the optical fiber through-hole of fiber fixed seat 470
Such as it is connected by bolt with fiber fixed seat 470, while sealing ring 471 can be also installed on every optical fiber 480a, is guaranteed extraneous
Light cannot enter in photomultiplier transit pipe mounting seat 430.In addition, the lower surface of fiber optic bundle 480 cannot be below photomultiplier transit
The upper surface 435 of pipe mounting seat 430, to guarantee that light shielding block 433 on the move will not be with the following table face contact of fiber optic bundle 480.
The assembly signal of fiber optic bundle 480, fiber fixed seat 470 and photomultiplier transit pipe mounting seat 430 is shown in FIG. 5
Figure.As shown, fiber optic bundle 480 includes illustratively 4 optical fiber 480a, wherein the end of every optical fiber 480a is contained in light
In optical fiber through-hole in fine fixing seat 470, and photoelectricity is light shone by the light hole 432 of photomultiplier transit pipe mounting seat 430
Inside the pipe mounting seat 430 that doubles, if being equipped with photomultiplier tube 440 inside photomultiplier transit pipe mounting seat 430, by light
It is irradiated on the photosurface 442 of photomultiplier tube 440, wherein the outgoing transverse plane of fiber optic bundle 480 is parallel with photosurface 442.
Since a large amount of heat can be generated when photomultiplier tube 440 works, also pacify in each Photomultiplier unit
Equipped with independent cooling device.Specifically, as shown in figure 4, can be processed in the lower surface of each photomultiplier transit pipe mounting seat 430
Have radiating groove 438, and in radiating groove 438 install semiconductor chilling plate 420, wherein the cold end of semiconductor chilling plate 420 and dissipate
The surface of heat channel 438 contacts, hot end and the radiating seat (such as heat dissipation aluminium block) 420 for 420 heat of conductive semiconductor cooling piece
Plane contact, between radiating groove 438, semiconductor chilling plate 420 and radiating seat 420 pass through electric silica gel be bonded.In order to protect
Better heat dissipation effect is demonstrate,proved, the outer end of radiating seat 420 can install radiator fan (not shown), to improve radiating efficiency.
Since output response difference of each photomultiplier tube to optical signal is larger, in order to enable in spectral detection system
Each road optical signal have consistent response, need to control the photomultiplier tube used in system, guarantee output response
Unanimously.Tube socket 460 provides high voltage power supply required for work to photomultiplier tube 440, and passes through the control voltage to tube socket 460
Accuracy controlling can be met the requirements, and the control voltage of tube socket 460 is DC 0-5V, since 460 pairs of control voltage responsives of tube socket are non-
Chang Lingmin, and the output high pressure of tube socket 460 also depends on control voltage, therefore controls voltage and need to meet stable DC 0-
The controllable adjustment of 5V.Thus, it is preferable that in spectral detection system of the invention, be additionally provided with tube socket control circuit, the tube socket
Control circuit is electrically connected to each tube socket in the photomultiplier tube array 400 to control the control voltage of each tube socket, from
And make multiple photomultiplier tubes output response having the same in the photomultiplier tube array 400.
The preferred embodiment of the control circuit of the tube socket 460 of photomultiplier tube 440 is shown in Fig. 8.Control shown in Fig. 8
In circuit processed, including circuit of three-terminal voltage-stabilizing integrated 7805, variable resistance R, chip amplifier LM324, input end capacitor C1 and defeated
Output capacitance C2, C3, wherein input end capacitor C1 is parallel to the input terminal of the circuit of three-terminal voltage-stabilizing integrated 7805, output end
Capacitor C2, C3 are parallel to the output end of the circuit of three-terminal voltage-stabilizing integrated 7805, and it is steady that the variable resistance R is parallel to three end
The output end of integrated circuit 7805 is pressed, the non-inverting input terminal of the chip amplifier LM324 connects the movable of the variable resistance R
Contact.By DC 12V as input voltage, the input terminal of circuit of three-terminal voltage-stabilizing integrated 7805 is accessed, and passes through input end capacitor
C1 carries out pressure stabilizing, defeated as voltage by output capacitor C2, C3 progress pressure stabilizing, and variable resistance R, variable resistance R in parallel
Outlet, the non-inverting input terminal of access chip amplifier LM324, the output voltage of chip amplifier LM324 can be used as tube socket 460
Control voltage.Preferably, it can also be exported in the output end parallel digital gauge outfit (not shown) of variable resistance R with real-time display
The amplitude of voltage, convenient for adjusting.
According to the needs of use, can in the control circuit of Fig. 8 multiple variable resistance R and chip amplifier LM324 in parallel, from
And can multiple tube socket 460a, 460b ... be waited with the adjusting for being respectively controlled voltage.
The course of work of spectral detection system of the invention is described below.At work, such as in plasma discharge,
Spectral information caused by acquisition electric discharge carries out analysis and real-time monitoring reacting phenomenon to obtain the physical parameter of plasma.Tool
For body, light caused by plasma discharge, the optical signal that incident optical 100 is acquired are received using incident optical 100
It is divided in input Cheney-Tener light channel structure 200, optical path passes through multiple optical sections in Cheney-Tener light channel structure 200
The incidence end of face battle array optical fiber 300 is entered after the effect of part from Cheney-Tener optical path outlet focal plane, and through face battle array optical fiber
300 exit end reaches photomultiplier tube array, using the tube socket control circuit of photomultiplier tube by photomultiplier tube array
Each photomultiplier tube output response is consistent.Specifically, every beam fiber optic bundle of face battle array 300 exit end of optical fiber is inserted into photoelectricity times
Increase in each Photomultiplier unit in pipe array 400, and the output light of optical fiber is made to be irradiated to the photosensitive of photomultiplier tube
On face, so that the photoelectric conversion by photomultiplier tube exports electric signal.When in use, by pull different pull rod 434a from
And the light of different optical fiber is selectively made to reach photomultiplier tube to generate electric signal, so as to obtain in the battle array optical fiber 300 of face
Spectral information at different location.Counting is entered after the amplification of amplifier 600 by the electric signal of photomultiplier tube output
Number of photons statistics is carried out in device 700, is finally shown in PC computer, to complete entire detection process.
Spectral detection system according to the present invention, by the exit end classifying rationally of face battle array optical fiber at different optical fiber lists
Member can detect the data of multifiber simultaneously on single photomultiplier tube, can greatly improve the use of photomultiplier tube
Efficiency, can lead to too small amount of photomultiplier tube can be detected more optical signal data, significantly reduce spectral detection
Cost.In addition, each Photomultiplier unit has independent cooling system (cooling system), be not in when integrating use
The excessively high problem of heat.Still further, the present invention is the nozzle design control circuit of each photomultiplier tube, it is ensured that each
The output response of photomultiplier tube is consistent, so as to more effectively realize the acquisition to spectroscopic data.
Those skilled in the art will readily recognize that above-mentioned each preferred embodiment can be free under the premise of not conflicting
Ground combination, superposition.
It should be appreciated that above-mentioned embodiment is merely exemplary, and not restrictive, without departing from of the invention basic
In the case where principle, those skilled in the art can be directed to the various apparent or equivalent modification or replace that above-mentioned details is made
It changes, is all included in scope of the presently claimed invention.
Claims (9)
1. a kind of 2-D optical fibre array spectral detection system for plasma detection characterized by comprising
Incident optical, the incident optical is for acquiring spectral signal to be detected；
Cheney-Tener light channel structure, the downstream of the incident optical is arranged in the Cheney-Tener light channel structure, for that will enter
Penetrate collecting fiber to spectral signal light splitting be different wave length monochromatic light after export outward；
Face battle array optical fiber, the face battle array optical fiber includes incidence end and exit end, and the incidence end connects the Cheney-Tener optical path knot
The output end of structure；
Photomultiplier tube array, the photomultiplier tube array are made of multiple Photomultiplier units, wherein each light
Electricity multiplication pipe unit is used to receive the output of a branch of fiber optic bundle of the exit end of the face battle array optical fiber；
Amplifier, the amplifier are used to amplify the electric signal of the photomultiplier tube array output；
Counter, the counter are electrically connected to the amplifier, the electric signal conversion for the amplifier transfer to be come in
It is counted at photon number；
The incidence end of the face battle array optical fiber is the two-dimensional surface face battle array being made of M row N column optical fiber, the exit end of the face battle array optical fiber
M row N column optical fiber is divided into multiple fiber units, wherein each fiber unit is made of X row Y column optical fiber, each fiber unit
Constitute a branch of fiber optic bundle；
Each Photomultiplier unit includes:
Photomultiplier transit pipe mounting seat；
Photomultiplier tube is arranged in the inner hole of the photomultiplier transit pipe mounting seat, the photosurface of the photomultiplier tube with
The outgoing transverse plane of the fiber optic bundle is parallel；
Tube socket, the tube socket are electrically connected to the photomultiplier tube to provide operating voltage to the photomultiplier tube；
Wherein, multiple light holes are provided in the photomultiplier transit pipe mounting seat, each light hole corresponds in the fiber optic bundle
An optical fiber so that in the case where the light hole is not blocked, the optical signal of the optical fiber output can reach described
Photosurface.
2. spectral detection system according to claim 1, which is characterized in that the photomultiplier transit pipe mounting seat be additionally provided with
The corresponding shade of the light hole, the shade are used to open or close the light hole.
3. spectral detection system according to claim 2, which is characterized in that the shade includes: to be arranged described
Groove in photomultiplier transit pipe mounting seat upper surface；Light shielding block, the light shielding block are installed in the groove with being slidably matched；With
And pull rod, the pull rod are fixedly attached to the light shielding block.
4. spectral detection system described in one of -3 according to claim 1, which is characterized in that the installation side of the photomultiplier tube
Formula are as follows: the pin of the photomultiplier tube is inserted into the pin jack of the tube socket, and the photomultiplier tube is integrally inserted into institute
In the inner hole for stating photomultiplier transit pipe mounting seat, and it is provided with and is used between the tube socket and the photomultiplier transit pipe mounting seat
The O-ring to shut out the light.
5. spectral detection system described in one of -3 according to claim 1, which is characterized in that each Photomultiplier unit installation
There is independent cooling device.
6. spectral detection system according to claim 5, which is characterized in that the cooling device include: be connected to it is described
The semiconductor chilling plate of photomultiplier transit pipe mounting seat bottom, and the radiating seat for conducting the semiconductor chilling plate heat.
7. spectral detection system described in one of -3 according to claim 1, which is characterized in that solid by optical fiber per a branch of fiber optic bundle
Reservation is fixed to the photomultiplier transit pipe mounting seat, and the fiber fixed seat is mounted on the upper table of the photomultiplier transit pipe mounting seat
On face, the fiber fixed seat is equipped with optical fiber through-hole, and the optical fiber through-hole and the light hole one are a pair of just, the fiber optic bundle
In the end of every optical fiber be contained in corresponding optical fiber through-hole.
8. spectral detection system described in one of -3 according to claim 1, which is characterized in that it is additionally provided with tube socket control circuit,
Wherein the tube socket control circuit is electrically connected to each tube socket in the photomultiplier tube array to control the control of each tube socket
Voltage processed, to make multiple photomultiplier tubes output response having the same in the photomultiplier tube array.
9. spectral detection system according to claim 8, which is characterized in that the tube socket control circuit includes three-terminal voltage-stabilizing
Integrated circuit, variable resistance R, chip amplifier LM324, input end capacitor and output capacitor, wherein input end capacitor is in parallel
In the input terminal of the circuit of three-terminal voltage-stabilizing integrated, output capacitor is parallel to the output end of the circuit of three-terminal voltage-stabilizing integrated,
The variable resistance R is parallel to the output end of the circuit of three-terminal voltage-stabilizing integrated, the homophase input of the chip amplifier LM324
End connects the moving contact of the variable resistance R.
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| CN201610958577.2A CN106442325B (en) | 2016-10-28 | 2016-10-28 | A kind of 2-D optical fibre array spectral detection system for plasma detection |
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| CN201610958577.2A CN106442325B (en) | 2016-10-28 | 2016-10-28 | A kind of 2-D optical fibre array spectral detection system for plasma detection |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101251419A (en) * | 2008-03-21 | 2008-08-27 | 中国海洋大学 | Pulse spectrograph capable of choosing wavelength |
| CN103592025A (en) * | 2013-10-30 | 2014-02-19 | 清华大学 | Spectrum analysis system |
| CN204227748U (en) * | 2014-10-09 | 2015-03-25 | 中国石油化工股份有限公司 | A kind of cooling system of photomultiplier |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6975788B2 (en) * | 2002-12-09 | 2005-12-13 | Lucent Technologies, Inc. | Optical switch having combined input/output fiber array |
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2016
- 2016-10-28 CN CN201610958577.2A patent/CN106442325B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101251419A (en) * | 2008-03-21 | 2008-08-27 | 中国海洋大学 | Pulse spectrograph capable of choosing wavelength |
| CN103592025A (en) * | 2013-10-30 | 2014-02-19 | 清华大学 | Spectrum analysis system |
| CN204227748U (en) * | 2014-10-09 | 2015-03-25 | 中国石油化工股份有限公司 | A kind of cooling system of photomultiplier |
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