CN106442325A - Two-dimensional fiber array spectrum detection system for plasma detection - Google Patents
Two-dimensional fiber array spectrum detection system for plasma detection Download PDFInfo
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- CN106442325A CN106442325A CN201610958577.2A CN201610958577A CN106442325A CN 106442325 A CN106442325 A CN 106442325A CN 201610958577 A CN201610958577 A CN 201610958577A CN 106442325 A CN106442325 A CN 106442325A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
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Abstract
The invention provides a two-dimensional fiber array spectrum detection system for plasma detection. The two-dimensional fiber array spectrum detection system comprises an incident fiber, a Czemy-Turne optical path structure, an area array fiber, a photomultiplier tube array, an amplifier and a counter, wherein the Czemy-Turne optical path structure is arranged on the downstream of the incident fiber; the area array fiber consists of an incident end and an emergent end, the incident end is connected with an output end of the Czemy-Turne optical path structure; the photomultiplier tube array comprises a plurality of photomultiplier tube units, each photomultiplier tube unit is used for receiving the output of one fiber beam from the emergent end of the area array fiber; the amplifier is used for amplifying an electric signal output by the photomultiplier tube array; and the counter is electrically connected with the amplifier, and used for counting the number of photon transformed from the electric signal transmitted by the amplifier. The spectrum detection system has the advantages of high space resolution, high use efficiency of photomultiplier tubes, low cost and the like.
Description
Technical field
The present invention relates to field of analytic instrument is and in particular to a kind of 2-D optical fibre array spectrum for plasma detection
Detecting system.
Background technology
Spectrogrph is general spectrometric instrument, is different wave length by diffraction grating by the photolysis of complicated component
Light, Application Optics principle, the structure to material and composition are observed, analyze and process, and are widely used in every field.As
In IC equipment research and development, can be produced with plasma glow discharge by combining spectrogrph with other elements such as photomultiplier tubes
Spectral information be acquired analyze, real-time detection reacting phenomenon, obtain plasma physics parameter, in multiple plasma health check-ups
There is in measurement equipment non-intrusion type, response quickly.Simultaneously for the thing being in complexity in the plasma of non-constant state
Physicochemical process, it usually needs the faint spectral line of many in addition to main intense line for the collection, detection difficulty is very big.
The detection meanss at present optic spectrum line mainly being adopted mainly have two kinds：A kind of is the company to detection by spectrogrph
Continuous spectrum carries out light splitting, coordinates photomultiplier tube to gather the optical signal of single wavelength by adjusting exit slit；Another kind is logical
Cross the CCD camera with two-dimensional array, the spectral signal in different wavelength range can be gathered.The first detection method has spirit
The advantages of sensitivity height, response quickly, particularly photomultiplier tube is as current sensitivity highest optical detection original paper, Ke Yishi
The time discrimination measurement of existing single photon nanosecond.And common CCD camera sensitivity and time resolution are poor, occur at present
Although enhancement mode CCD camera can also reach nanosecond accuracy of detection, be subject to photocathode material and fluorescent screen light receiving efficiency
Etc. the restriction of factor, the detection efficiency of enhancement mode CCD camera is less than photomultiplier tube, and is not used to transient state and does not repeat light letter
Number continuous measurement.
Pin in this regard, there being the pattern that spectroscopic analysis system employs fiber array to carry out the spectra collection of spatial discrimination at present,
Wherein fiber array has first end and the second end, and each optical fiber at the second end corresponds to a photomultiplier tube.But it is this
Construction has following deficiency：First, when the optical signal data needing collection is less, less photomultiplier tube can be adopted, but
It is so to lead to the data precision gathering to decline, if adopting more photomultiplier tube to improve the quantity of data point
Cost then can be increased.Secondly as photomultiplier tube operationally radiates, more, more photomultiplier tube works generation together
Heat bigger, if timely radiating treatment can not be carried out, photomultiplier tube operating temperature can be made to steeply rise, produce big
The thermal noise of amount, the signal to noise ratio of impact gathered data, cannot preferable data message.Finally, due to each photomultiplier tube
Response characteristic difference very big, not only need each photomultiplier tube is individually adjusted controlling in addition it is also necessary to coupling each other
Close and adjust so that each photomultiplier tube has more consistent output signal.
Content of the invention
Present invention is primarily targeted at providing a kind of 2-D optical fibre array spectral detection system for plasma detection
System is at least one not enough present in above-mentioned prior art to overcome.
To achieve these goals, the present invention provides a kind of 2-D optical fibre array spectral detection for plasma detection
System, it includes：
Incident optical, described incident optical is used for gathering spectral signal to be detected；
Cheney-Tener light channel structure, described Cheney-Tener light channel structure is arranged on the downstream of described incident optical, is used for
The spectral signal light splitting that incident optical is collected be different wave length monochromatic light after outwards export；
Face battle array optical fiber, described face battle array optical fiber includes incidence end and exit end, and described incidence end connects described Cheney-Tener light
The outfan of line structure；
Photomultiplier tube array, described photomultiplier tube array is made up of multiple Photomultiplier units, wherein each institute
State Photomultiplier unit for receiving the output of a branch of fibre bundle of exit end of described face battle array optical fiber；
Amplifier, described amplifier is used for amplifying the signal of telecommunication of described photomultiplier tube array output；
Enumerator, described enumerator is electrically connected to described amplifier, for the signal of telecommunication that described amplifier transfer is come in
It is converted into photon number to be counted.
Preferably, the incidence end of described face battle array optical fiber is the two dimensional surface face battle array being made up of M row N row optical fiber, described face battle array
M row N row optical fiber is divided into multiple fiber units by the exit end of optical fiber, and wherein each fiber unit is made up of X row Y row optical fiber,
Each fiber unit constitutes a branch of fibre bundle.
Preferably, each described Photomultiplier unit includes：
Photomultiplier transit pipe mounting seat；
Photomultiplier tube, it is arranged in the endoporus of described photomultiplier transit pipe mounting seat, described photomultiplier tube photosensitive
Face is parallel with the outgoing transverse plane of described fibre bundle；
Base, described base is electrically connected to described photomultiplier tube to provide running voltage to described photomultiplier tube；
Wherein, described photomultiplier transit pipe mounting seat is provided with multiple light holes, each light hole corresponds to described optical fiber
An optical fiber in bundle is so that in the case that described light hole is not blocked, the optical signal of described optical fiber output can reach
Described photosurface.
Preferably, described photomultiplier transit pipe mounting seat is additionally provided with light shielding device corresponding with described light hole, described shading
Device is used for opening or closing described light hole.
Preferably, described light shielding device includes：It is arranged on the groove in described photomultiplier transit pipe mounting seat upper surface；Shading
Block, described light shielding block is arranged in described groove with being slidably matched；And, pull bar, described pull bar is fixedly attached to described shading
Block.
Preferably, the mounting means of described photomultiplier tube is：The pin of described photomultiplier tube is inserted into described base
Pin jack in, described photomultiplier tube integrally inserts in the endoporus of described photomultiplier transit pipe mounting seat, and in described pipe
It is provided with the O-ring for shutting out the light between seat and described photomultiplier transit pipe mounting seat.
Preferably, each Photomultiplier unit is provided with independent chiller；Described chiller preferably includes：Even
It is connected to the semiconductor chilling plate of described photomultiplier transit pipe mounting seat bottom, and for conducting dissipating of described semiconductor chilling plate heat
Hot seat.
Preferably, often a branch of fibre bundle is fixed to described photomultiplier transit pipe mounting seat, described optical fiber by fiber fixed seat
Fixed seat is arranged on the upper surface of described photomultiplier transit pipe mounting seat, and described fiber fixed seat is provided with optical fiber through hole, described
Optical fiber through hole is aligned one by one with described light hole, and the end of every optical fiber in described fibre bundle is contained in corresponding optical fiber through hole
In.
Preferably, it is additionally provided with base control circuit, wherein said base control circuit is electrically connected to described photomultiplier transit
The control voltage to control each base for each base in pipe array, so that the multiple light in described photomultiplier tube array
Electric multiplier tube has identical output response.
Preferably, described base control circuit includes circuit of three-terminal voltage-stabilizing integrated, variable resistance R, chip amplifier
LM324, input end capacitor and output capacitor, wherein, input end capacitor is parallel to the input of described circuit of three-terminal voltage-stabilizing integrated
End, output capacitor is parallel to the outfan of described circuit of three-terminal voltage-stabilizing integrated, and it is steady that described variable resistance R is parallel to described three ends
The outfan of pressure integrated circuit, the in-phase input end of described chip amplifier LM324 connects movably touching of described variable resistance R
Point.
The 2-D optical fibre array spectral detection system for plasma detection of the present invention, by Cheney-Tener light path
Structure is applied in combination with photomultiplier tube array, is capable of the spectral detection with stronger spatial resolution.
Especially, the spectral detection system according to the present invention, the exit end classifying rationally of face battle array optical fiber is become different by it
Fiber unit, can detect the data of multifiber on single photomultiplier tube simultaneously, can be greatly enhanced photomultiplier tube
Service efficiency, too small amount of photomultiplier tube can be led to and can detect more optical signal data, significantly reduce spectrum
The cost of detection.In addition, each Photomultiplier unit has independent cooling system (cooling system), during integrated use not
Heat too high problem occurs.Still further, the present invention be the nozzle design of each photomultiplier tube control circuit, Ke Yibao
The output response demonstrate,proving each photomultiplier tube is unanimously such that it is able to more effectively realize the collection to spectroscopic data.
Brief description
The Figure of description constituting the part of the application is used for providing a further understanding of the present invention, and the present invention shows
Meaning property embodiment and its illustrate for explaining the present invention, does not constitute inappropriate limitation of the present invention.In the accompanying drawings：
Fig. 1 is the schematic diagram of the 2-D optical fibre array spectral detection system in the present invention；
Fig. 2 is Cheney-Tener light channel structure schematic diagram；
Fig. 3 a and 3b is the structural representation of two kinds of embodiments of face battle array optical fiber；
Fig. 4 is the structural representation of single Photomultiplier unit；
Fig. 5 is the scheme of installation of fibre bundle；
Fig. 6 is the structural representation of photomultiplier transit pipe mounting seat；
Fig. 7 is the scheme of installation of photomultiplier tube and base；
Fig. 8 is the base control circuit schematic diagram of photomultiplier tube array.
Wherein, above-mentioned accompanying drawing includes the following drawings labelling：
100th, incident optical；200th, Cheney-Tener light path；300th, face battle array optical fiber；400th, photomultiplier tube array；500th, manage
Seat control circuit；600th, amplifier；700th, enumerator；201st, entrance slit；202nd, collimating mirror；203rd, diffraction grating；
204th, focusing mirror；205th, focussing plane；410th, radiating seat；420th, semiconductor chilling plate；430th, photomultiplier transit pipe mounting seat；
431st, endoporus；432nd, light hole；433rd, light shielding block；434th, pull bar；435th, photomultiplier transit pipe mounting seat upper surface；436th, photoelectricity times
Increase pipe mounting seat side；437th, screwed hole is installed；438th, radiating groove；440th, photomultiplier tube；441st, pin；442nd, photosurface；
450th, O-ring；460th, base；461st, base installing hole；462nd, pin jack；463rd, neck；470th, fiber fixed seat；471st, close
Seal；472nd, dark slide；480th, fibre bundle；480a, optical fiber.
Specific embodiment
In the following description, a large amount of concrete details are given to provide more thorough understanding of the invention.So
And, it will be apparent to one skilled in the art that the present invention can one or more of these details and be able to
Implement.In other examples, in order to avoid obscuring with the present invention, some technical characteristics well known in the art are not entered
Row description.
In order to thoroughly understand the present invention, detailed structure will be proposed in following description.Obviously, embodiments of the invention
It is not limited to the specific details that those skilled in the art is familiar with.Presently preferred embodiments of the present invention is described in detail as follows, so
And in addition to these describe in detail, the present invention can also have other embodiment.
Present invention is primarily targeted at providing a kind of group by Cheney-Tener light channel structure and photomultiplier tube array
Close and use, realize the spectral detection system with stronger spatial resolution.As shown in figure 1, this spectral detection system includes：
Incident optical 100, this incident optical 100 is used for collection needs the continuous spectrum signal of detection；
Cheney-Tener light channel structure 200, this Cheney-Tener light channel structure 200 is arranged on the downstream of described incident optical,
Export after the monochromatic light being different wave length for the continuous spectrum signal light splitting that collects incident optical 100；
Face battle array optical fiber 300, this face battle array optical fiber 300 includes incidence end and exit end, and wherein incidence end connects Cheney-Tener light
The outfan of line structure 200, is preferably mounted on the focal plane of Cheney-Tener light channel structure 200；
Photomultiplier tube (PMT) array 400, this photomultiplier tube array is made up of multiple Photomultiplier units, wherein
Each Photomultiplier unit is used for receiving the output of a branch of fibre bundle of exit end of described face battle array optical fiber 300；
Amplifier 600, this amplifier 600 is used for amplifying the signal of telecommunication of photomultiplier tube array output；
Enumerator 700, it is arranged on amplifier 600 rear end, and this enumerator 700 is used for the telecommunications that amplifier transfer is come in
Number being converted into photon number is counted, and for example can be carried out outer aobvious using equipment such as personal computer PC.
Figure 2 illustrates the Cheney-Tener light channel structure according to the present invention, as shown in Fig. 2 the line with arrow for the in figure is
Its schematic light path.Wherein, the continuous spectrum to be detected from incident optical 100 injects Cheney-Tener light channel structure 200
Entrance slit 201, using this entrance slit, spectral signal is irradiated on collimating mirror 202, will through collimating mirror 202
Continuous spectrum is reflected into directional light and is transferred to diffraction grating 203 surface, is divided continuous spectrum by the diffraction of diffraction grating 203
Light is simultaneously transferred on focusing mirror 204, and the monochromatic light of different wave length is focused on focussing plane 205 by focusing mirror 204
Various location.Then, the incidence end of face battle array optical fiber 300 is installed at focussing plane 205, just can gather different wave length
Monochromatic light.
As shown in figure 3, face battle array optical fiber 300 includes the optical fiber of M row N row arrangement, its incidence end is to be made up of M row N row optical fiber
Two dimensional surface face battle array, for gathering the monochromatic light in Cheney-Tener light channel structure 200.Wherein M and N is natural number, the two
Can equal it is also possible to unequal.Optionally the optical fiber of M row N row can be carried out group in the exit end of face battle array optical fiber 300
Close, thus forming multiple fiber units being made up of X row Y row optical fiber, wherein each fiber unit constitute a branch of fibre bundle with
Export in external.Obviously, wherein X and Y is respectively the natural number being less than or equal to M and N.
As the example being not intended to restriction protection scope of the present invention, the face battle array optical fiber 300 in Fig. 3 a is by 16 row 16 row light
Fine close-packed arrays composition, that is, M and N is 16.Wherein, 16 row 16 row of exit end are divided into following multiple fiber units：
16 row 16 row optical fiber in the exit end of face battle array optical fiber 300 is arranged with 4 row 1 and is divided for a fiber unit, that is, X is 4 and Y
For 1, the square frame in accompanying drawing 3a is the single fiber unit being identified.Correspondingly for the ease of identifying each optical fiber list
Relative position in exit end for the unit, can use XOY coordinate representation in fig. 3 a, will 16 row 16 row optical fiber be divided in X side
16 row (i.e. every 1 row optical fiber corresponds to the different coordinate figures in the 1-16 in X-axis) upwards and 4 row (that is, every 4 in the Y direction
Row optical fiber corresponds to the different coordinate figures in the 1-4 in Y-axis).So, it is possible to use coordinate position (x, y) is representing face battle array light
Arbitrary bundle fibre bundle in fine exit end.For example, as selected (1,1) the i.e. 1-4 row optical fiber conduct of first row in Fig. 3 a
One fiber unit of exit end, this fiber unit is externally exported using a branch of fibre bundle, (4,4) the i.e. 13-16 row of first row
Optical fiber is externally exported using another bundle fibre bundle as the another fiber unit of exit end, this fiber unit.It can thus be seen that
The outfan of the face battle array optical fiber in Fig. 3 a totally 16 row 4 row namely 64 fiber units, and externally export via 64 bundle fibre bundles,
Respectively this 64 bundle fibre bundle can be inserted in the PMT array 400 of photomultiplier tube fixed seat composition it is possible to obtain whole
All optical signals at the incident transverse plane of face battle array optical fiber 300.
Another example illustrates in fig 3b, similarly, by the 16 row 16 row optical fiber in the exit end of face battle array optical fiber 300 with
4 row 4 are classified as a fiber unit and are divided, and that is, X is 4 for 4 and Y, and it is single that the square frame in accompanying drawing 3b is as identified
Fiber unit.Correspondingly for the ease of identifying relative position in exit end for each fiber unit, can use in fig 3b
XOY coordinate representation, will 16 row 16 row optical fiber be divided in the X direction 4 row (i.e. every 4 row optical fiber correspond to X-axis on 1-4
In different coordinate figures) and 4 row in the Y direction (that is, every 4 row optical fiber correspond to the different coordinate figures in the 1-4 in Y-axis).
As an example, (1,1) i.e. 1-4 row and 1-4 row is selected to form the fiber unit of exit end in fig 3b, this fiber unit utilizes
A branch of fibre bundle externally exports.As can be seen here, the corresponding outfan of face battle array optical fiber in Fig. 3 b totally 4 row 4 arrange namely 16 bundle defeated
Go out optical fiber, respectively this 16 bundle optical fiber is inserted in the PMT array 400 of photomultiplier tube fixed seat composition, face battle array can be obtained
All optical signals at the incident transverse plane of optical fiber 300.
It will be appreciated to those of skill in the art that Fig. 3 a and Fig. 3 b illustrate only 16 row 16 row face battle array optical fiber 300
Two kinds of way of outputs, can expand to the face battle array optical fiber of the combination in any of M row N row, and the outfan in optical fiber can also have
Different compound modes.By changing different face battle array optical fiber 300 it is possible to different two dimensional surfaces are obtained by detecting system
Optical signal.
Show the signal of one of photomultiplier tube array according to present invention Photomultiplier unit in figures 4-7
Property structure.Each Photomultiplier unit includes：
Photomultiplier transit pipe mounting seat 430；
Photomultiplier tube 440, it is arranged in the endoporus 431 of this photomultiplier transit pipe mounting seat 430, this photomultiplier tube
440 photosurface 442 (or its bus) is parallel with the outgoing transverse plane of corresponding fibre bundle；
Base 460, this base 460 is electrically connected to photomultiplier tube 440 to provide work electricity to this photomultiplier tube 440
Pressure；
Wherein, photomultiplier transit pipe mounting seat 430 is provided with multiple light holes 432, each light hole 432 corresponds to described
An optical fiber 480a in light shafts 480 is so that in the case that described light hole 432 is not blocked, described optical fiber 480a is defeated
The optical signal going out can reach described photosurface 442.
Preferably, described photomultiplier transit pipe mounting seat 430 is additionally provided with light shielding device corresponding with light hole 432, shading
Device is used for opening or closing described light hole 432, thus optionally by the output signal of an optical fiber through corresponding thang-kng
Hole 432 is sent to or is not transferred in photomultiplier transit pipe mounting seat 430.
Figure 6 illustrates the preferred structure of the light shielding device according to the present invention.This light shielding device includes：It is arranged on photoelectricity
Multiple grooves in multiplication pipe mounting seat 430 upper surface 435, are arranged on the light shielding block 433 in this corresponding recesses with being slidably matched,
It is provided with through hole, pull bar 434 at the position corresponding with each light shielding block 433 on the side 436 of photomultiplier transit pipe mounting seat
Through through hole and be fixedly attached to the rear end of each light shielding block 433, this connection can be for example the connection that is screwed, and certainly also may be used
To be other connected mode being suitable for.As shown in fig. 6, when pulling pull bar 434 it is possible to drive light shielding block 433 in photoelectricity times
Move in the groove increasing pipe mounting seat 430 upper surface 435, realize the closing to light hole 432 and open.And pass through such as four
Group pull bar and the cooperation of light shielding block, it is possible to achieve the response to optical signal in different optical fiber 480a in light shafts, thus obtain
The spectral information of various location in face battle array optical fiber 300.
The mounting means schematic diagram of the photomultiplier tube 440 according to the present invention is shown in Fig. 4 and Fig. 7.Wherein base
460 are used for the voltage needed for photomultiplier tube 440 offer work, and photomultiplier tube 440 is then used for the optical signal receiving
It is converted into the signal of telecommunication outwards to export.As shown in fig. 6-7, one end of photomultiplier tube is photosurface 442, is used for being inserted into photoelectricity times
Increase the output signal of reception optical fiber in the endoporus 431 of pipe mounting seat 430, and the other end then carries the pin electrically connecting with base
441, this pin 441 is inserted in the pin jack 462 on base 460, to realize stable electrical connection.Base 460 has peace
Dress flange, mounting flange is provided with base installing hole 461, for after photomultiplier tube 440 is inserted in endoporus 431, with
The installation screwed hole 437 of photomultiplier transit pipe mounting seat 430 is realized being connected.Wherein, the side in mounting flange is provided with one section
Neck 463, the outside of neck 463 is provided with O-ring seal 450, and the wherein internal diameter of O-ring seal 450 is less than the outer of neck 463
Footpath, its external diameter is then more than the diameter of the endoporus 431 of photomultiplier transit pipe mounting seat 430.By this set, when being installed by base
When photomultiplier tube 440, O-ring seal 450, base 460 are fixed to photomultiplier transit pipe mounting seat 430 by hole 461 together, O-shaped
Sealing ring 450 can stop that the light of outside enters in the endoporus 431 of photomultiplier transit pipe mounting seat 430, thus avoiding exterior light
The impact that line gathers for fiber-optic signal.
Specifically as shown in figs. 4-7, often the fixed form of a branch of light shafts is：By each optical fiber from face battle array optical fiber 300
Bundle 480 is fixed on fiber fixed seat 470, then utilizes the securing members (not shown) such as bolt to pacify this fiber fixed seat 470
It is attached at the upper surface 435 of photomultiplier transit pipe mounting seat 430.Fiber fixed seat 470 is provided with optical fiber through hole, described optical fiber through hole
Align one by one with described light hole 432, the end of every optical fiber 480a in described fibre bundle 480 is contained in corresponding optical fiber and leads to
Kong Zhong.
Install to prevent the optical fiber through hole through fiber fixed seat 470 for the light in external environment condition to be injected into photomultiplier tube
In seat 430, dark slide 472, dark slide 472 can be installed between the optical fiber through hole of fibre bundle 480 and fiber fixed seat 470
As being connected with fiber fixed seat 470 by bolt, also on every optical fiber 480a, sealing ring 471 can be installed it is ensured that the external world simultaneously
Light can not enter in photomultiplier transit pipe mounting seat 430.In addition, the lower surface of fibre bundle 480 cannot be below photomultiplier transit
The upper surface 435 of pipe mounting seat 430, to ensure that light shielding block 433 will not be contacted with the lower surface of fibre bundle 480 in movement.
The assembling that figure 5 illustrates fibre bundle 480, fiber fixed seat 470 and photomultiplier transit pipe mounting seat 430 is illustrated
Figure.As illustrated, fibre bundle 480 exemplarily includes 4 optical fiber 480a, the end of wherein every optical fiber 480a is contained in light
In optical fiber through hole in fine fixed seat 470, and photoelectricity is light shone by the light hole 432 of photomultiplier transit pipe mounting seat 430
Inside multiplication pipe mounting seat 430, if being provided with photomultiplier tube 440 inside photomultiplier transit pipe mounting seat 430, then by light
It is irradiated on the photosurface 442 of photomultiplier tube 440, the outgoing transverse plane of wherein fibre bundle 480 is parallel with photosurface 442.
Substantial amounts of heat can be produced due to when photomultiplier tube 440 works, therefore also pacify in each Photomultiplier unit
Equipped with independent chiller.Specifically, as shown in figure 4, can process in the lower surface of each photomultiplier transit pipe mounting seat 430
Have radiating groove 438, and in radiating groove 438 install semiconductor chilling plate 420, wherein the cold end of semiconductor chilling plate 420 with dissipate
The surface contact of heat channel 438, hot junction and the radiating seat (for example radiate aluminium block) 420 for conductive semiconductor cooling piece 420 heat
Plane contact, between radiating groove 438, semiconductor chilling plate 420 and radiating seat 420 pass through electric silica gel bonding.In order to protect
Demonstrate,prove more preferable radiating effect, radiator fan (not shown) can be installed, to improve radiating efficiency in the outer end of radiating seat 420.
Because each photomultiplier tube is larger to the output response difference of optical signal, so that in spectral detection system
Each road optical signal there is consistent response, need the photomultiplier tube used in system to be controlled it is ensured that exporting response
Unanimously.Base 460 provides the high voltage power supply required for work to photomultiplier tube 440, and by the control voltage to base 460
Accuracy controlling just can meet requirement, and the control voltage of base 460 is DC 0-5V, because base 460 is non-to control voltage response
Chang Lingmin, and the output high pressure of base 460 also depends on control voltage, and therefore control voltage needs to meet stable DC 0-
The controllable adjustment of 5V.For this reason, preferably, in the spectral detection system of the present invention, it is additionally provided with base control circuit, described base
Control circuit is electrically connected to each base in described photomultiplier tube array 400 control voltage to control each base, from
And make the multiple photomultiplier tubes in described photomultiplier tube array 400 have identical output response.
The preferred implementation of the control circuit of base 460 of photomultiplier tube 440 is shown in Fig. 8.Control shown in Fig. 8
In circuit processed, including circuit of three-terminal voltage-stabilizing integrated 7805, variable resistance R, chip amplifier LM324, input end capacitor C1 and defeated
Output capacitance C2, C3, wherein, input end capacitor C1 is parallel to the input of described circuit of three-terminal voltage-stabilizing integrated 7805, outfan
Electric capacity C2, C3 are parallel to the outfan of described circuit of three-terminal voltage-stabilizing integrated 7805, and it is steady that described variable resistance R is parallel to described three ends
The outfan of pressure integrated circuit 7805, the in-phase input end of described chip amplifier LM324 connects the movable of described variable resistance R
Contact.Input voltage is used as by DC 12V, accesses the input of circuit of three-terminal voltage-stabilizing integrated 7805, and pass through input end capacitor
C1 carries out voltage stabilizing, carries out voltage stabilizing by output capacitor C2, C3, and variable resistance R in parallel, and variable resistance R is defeated as voltage
Go out end, the in-phase input end of access chip amplifier LM324, the output voltage of chip amplifier LM324 can be used as base 460
Control voltage.Preferably, also can be in the outfan parallel digital gauge outfit (not shown) of variable resistance R, with real-time display output
The amplitude of voltage, is easy to adjust.
According to using needs, can in the control circuit of Fig. 8 multiple variable resistance R and chip amplifier LM324 in parallel, from
And the regulation being respectively controlled voltage can be waited to multiple base 460a, 460b ....
The work process of the spectral detection system of the present invention is described below.Operationally, for example in plasma discharge,
Spectral information produced by collection electric discharge is analyzed and real-time monitoring reacting phenomenon is to obtain the physical parameter of plasma.Tool
For body, receive light produced by plasma discharge, the optical signal that incident optical 100 is gathered using incident optical 100
Carry out light splitting, light path is in Cheney-Tener light channel structure 200 through multiple optical sections in input Cheney-Tener light channel structure 200
Enter into the incidence end of face battle array optical fiber 300 from Cheney-Tener light way outlet focal plane after the effect of part, and through face battle array optical fiber
300 exit end reaches photomultiplier tube array, using photomultiplier tube base control circuit by photomultiplier tube array
The output response of each photomultiplier tube is consistent.Specifically, the often bundle fibre bundle of face battle array optical fiber 300 exit end is inserted into photoelectricity times
Increase in each Photomultiplier unit in pipe array 400, and make the output light of optical fiber be irradiated to the photosensitive of photomultiplier tube
On face, thus the opto-electronic conversion through photomultiplier tube exports the signal of telecommunication.When using, by pull different pull bar 434a from
And optionally make the light of different optical fiber reach photomultiplier tube to produce the signal of telecommunication, such that it is able to obtain in face battle array optical fiber 300
The spectral information of various location.The signal of telecommunication being exported by photomultiplier tube enters into counting after amplifier 600 amplifies
Carry out number of photons statistics in device 700, be finally shown in PC computer, thus completing whole detection process.
According to the spectral detection system of the present invention, the exit end classifying rationally of face battle array optical fiber is become different optical fiber lists by it
Unit, can detect the data of multifiber on single photomultiplier tube simultaneously, can be greatly enhanced the use of photomultiplier tube
Efficiency, can lead to too small amount of photomultiplier tube and can detect more optical signal data, significantly reduce spectral detection
Cost.In addition, each Photomultiplier unit has independent cooling system (cooling system), during integrated use be not in
The too high problem of heat.Still further, the present invention control circuit that has been the nozzle design of each photomultiplier tube it is ensured that each
The output response of photomultiplier tube is unanimously such that it is able to more effectively realize the collection to spectroscopic data.
Those skilled in the art is it is easily understood that on the premise of not conflicting, above-mentioned each preferred version can be free
Ground combination, superposition.
It should be appreciated that above-mentioned embodiment is only illustrative, and not restrictive, basic without departing from the present invention
In the case of principle, those skilled in the art for the various obvious or equivalent modification that above-mentioned details is made or can replace
Change, be all included in scope of the presently claimed invention.
Claims (10)
1. a kind of 2-D optical fibre array spectral detection system for plasma detection is it is characterised in that include：
Incident optical, described incident optical is used for gathering spectral signal to be detected；
Cheney-Tener light channel structure, described Cheney-Tener light channel structure is arranged on the downstream of described incident optical, for entering
Penetrate collecting fiber to spectral signal light splitting be different wave length monochromatic light after outwards export；
Face battle array optical fiber, described face battle array optical fiber includes incidence end and exit end, and described incidence end connects described Cheney-Tener light path knot
The outfan of structure；
Photomultiplier tube array, described photomultiplier tube array is made up of multiple Photomultiplier units, wherein each described light
Electricity multiplication pipe unit is used for receiving the output of a branch of fibre bundle of exit end of described face battle array optical fiber；
Amplifier, described amplifier is used for amplifying the signal of telecommunication of described photomultiplier tube array output；
Enumerator, described enumerator is electrically connected to described amplifier, for the signal of telecommunication conversion that described amplifier transfer is come in
Photon number is become to be counted.
2. spectral detection system according to claim 1 is it is characterised in that the incidence end of described face battle array optical fiber is by M row N
The two dimensional surface face battle array of row optical fiber composition, M row N row optical fiber is divided into multiple fiber units by the exit end of described face battle array optical fiber,
Wherein each fiber unit is made up of X row Y row optical fiber, and each fiber unit constitutes a branch of fibre bundle.
3. spectral detection system according to claim 2 is it is characterised in that each described Photomultiplier unit includes：
Photomultiplier transit pipe mounting seat；
Photomultiplier tube, it is arranged in the endoporus of described photomultiplier transit pipe mounting seat, the photosurface of described photomultiplier tube with
The outgoing transverse plane of described fibre bundle is parallel；
Base, described base is electrically connected to described photomultiplier tube to provide running voltage to described photomultiplier tube；
Wherein, described photomultiplier transit pipe mounting seat is provided with multiple light holes, each light hole corresponds in described fibre bundle
An optical fiber so that in the case that described light hole is not blocked, the optical signal of described optical fiber output can reach described
Photosurface.
4. spectral detection system according to claim 3 it is characterised in that described photomultiplier transit pipe mounting seat be additionally provided with
The corresponding light shielding device of described light hole, described light shielding device is used for opening or closing described light hole.
5. spectral detection system according to claim 4 is it is characterised in that described light shielding device includes：It is arranged on described
Groove in photomultiplier transit pipe mounting seat upper surface；Light shielding block, described light shielding block is arranged in described groove with being slidably matched；With
And, pull bar, described pull bar is fixedly attached to described light shielding block.
6. the spectral detection system according to one of claim 3-5 is it is characterised in that the installation side of described photomultiplier tube
Formula is：The pin of described photomultiplier tube is inserted in the pin jack of described base, and described photomultiplier tube integrally inserts institute
State in the endoporus of photomultiplier transit pipe mounting seat, and be provided between described base and described photomultiplier transit pipe mounting seat for
The O-ring shutting out the light.
7. the spectral detection system according to one of claim 3-6 is it is characterised in that each Photomultiplier unit is installed
There is independent chiller；Described chiller preferably includes：It is connected to the quasiconductor of described photomultiplier transit pipe mounting seat bottom
Cooling piece, and for conducting the radiating seat of described semiconductor chilling plate heat.
8. the spectral detection system according to one of claim 3-7 it is characterised in that often a branch of fibre bundle to pass through optical fiber solid
Reservation is fixed to described photomultiplier transit pipe mounting seat, and described fiber fixed seat is arranged on the upper table of described photomultiplier transit pipe mounting seat
On face, described fiber fixed seat is provided with optical fiber through hole, and described optical fiber through hole and described light hole align one by one, described fibre bundle
In the end of every optical fiber be contained in corresponding optical fiber through hole.
9. the spectral detection system according to one of claim 3-8 is it is characterised in that be additionally provided with base control circuit,
The control to control each base for each base that wherein said base control circuit is electrically connected in described photomultiplier tube array
Voltage processed, so that the multiple photomultiplier tubes in described photomultiplier tube array have identical output response.
10. spectral detection system according to claim 9 it is characterised in that described base control circuit to include three ends steady
Pressure integrated circuit, variable resistance R, chip amplifier LM324, input end capacitor and output capacitor, wherein, input end capacitor is simultaneously
It is coupled to the input of described circuit of three-terminal voltage-stabilizing integrated, output capacitor is parallel to the output of described circuit of three-terminal voltage-stabilizing integrated
End, described variable resistance R is parallel to the outfan of described circuit of three-terminal voltage-stabilizing integrated, the homophase of described chip amplifier LM324
Input connects the moving contact of described variable resistance R.
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| CN201610958577.2A CN106442325B (en) | 2016-10-28 | 2016-10-28 | A kind of 2-D optical fibre array spectral detection system for plasma detection |
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| CN201610958577.2A CN106442325B (en) | 2016-10-28 | 2016-10-28 | A kind of 2-D optical fibre array spectral detection system for plasma detection |
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040109634A1 (en) * | 2002-12-09 | 2004-06-10 | Basavanhally Nagesh R. | Optical switch having combined input/output fiber array |
| CN101251419A (en) * | 2008-03-21 | 2008-08-27 | 中国海洋大学 | Pulse spectrograph capable of choosing wavelength |
| CN103592025A (en) * | 2013-10-30 | 2014-02-19 | 清华大学 | Spectrum analysis system |
| CN204227748U (en) * | 2014-10-09 | 2015-03-25 | 中国石油化工股份有限公司 | A kind of cooling system of photomultiplier |
-
2016
- 2016-10-28 CN CN201610958577.2A patent/CN106442325B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040109634A1 (en) * | 2002-12-09 | 2004-06-10 | Basavanhally Nagesh R. | Optical switch having combined input/output fiber array |
| CN101251419A (en) * | 2008-03-21 | 2008-08-27 | 中国海洋大学 | Pulse spectrograph capable of choosing wavelength |
| CN103592025A (en) * | 2013-10-30 | 2014-02-19 | 清华大学 | Spectrum analysis system |
| CN204227748U (en) * | 2014-10-09 | 2015-03-25 | 中国石油化工股份有限公司 | A kind of cooling system of photomultiplier |
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| CN106442325B (en) | 2018-12-25 |
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