CN104330172B - A kind of wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule - Google Patents
A kind of wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule Download PDFInfo
- Publication number
- CN104330172B CN104330172B CN201410616547.4A CN201410616547A CN104330172B CN 104330172 B CN104330172 B CN 104330172B CN 201410616547 A CN201410616547 A CN 201410616547A CN 104330172 B CN104330172 B CN 104330172B
- Authority
- CN
- China
- Prior art keywords
- liquid crystal
- battle array
- face battle
- controlled liquid
- lenticule
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The invention discloses a kind of wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule.Lenticule and face battle array visible-light detector are converged including face battle array electrically-controlled liquid crystal；Face battle array electrically-controlled liquid crystal convergence lenticule includes liquid crystal material layer, the first liquid crystal initial orientation layer, patterned electrode layer, the first substrate and the first anti-reflection film of liquid crystal material layer upper surface are successively set on, and is successively set on the second liquid crystal initial orientation layer, common electrode layer, the second substrate and the second anti-reflection film of liquid crystal material layer lower surface；Common electrode layer is made up of one layer of homogeneous conducting film, and patterned electrode layer is made up of one layer of homogeneous conducting film of the square hole or circular hole that are furnished with the distribution of m × n element array thereon；Face battle array visible-light detector is divided into the sub- face battle array visible-light detector of m × n element array distribution, and every sub- face battle array visible-light detector includes the photosensitive member of j × j element array distribution.The chip wavefront measurement scope is big, target and good environmental adaptability, is easily coupled with optical photoconductor mechanical structure.
Description
Technical field
The invention belongs to optical precision measurement and control technology field, is converged more particularly, to one kind based on electrically-controlled liquid crystal
The wavefront measurement chip of poly- lenticule.
Background technology
Wavefront is a basic parameter for characterizing light wave.The wavefront information of transmission light field is timely and accurately obtained, is analysis
The temporal-spatial evolution behavior of light wave, the interaction attribute with the structure of matter, influence of the surrounding medium to transmission light field, carry and transmit
The ability and its variation feature of target image information, and basis and the premise of controlled modulation etc. are carried out to light field.So far,
Diversified wavefront directly or indirectly measuring method has been developed.In the wavefront measurement means with small miniaturization feature
In, based on the quick Measurement architecture of wavefront of Shack-Hartmaan (SH) effect, with it by coupling CCD or CMOS light-sensitive arrays
With micro-nano optical beam transformation structure, perform point range image measurement and wavefront and quickly generate and the category such as compatibility standard microelectronic technique
Property, in non-destructive and the i.e. slotting real-time context of detection of wavefront surveyed shows clear superiority, receives significant attention and payes attention to.Mesh
Before, by the lasting high performance arrayed optical sensing structure of research and development, including increase photosensor array scale, reduce photosensitive first chi
It is very little, using quantum wire or quantum dot light sensing structure, the photoelectric respone sensitivity of light-sensitive material is improved, reduces photosensitive structure noise,
The mode such as image information processing module, persistently strengthens base when development and the single chip integrated face battle array pack lenticule of light-sensitive array and piece
In the chip-scale wavefront measurement ability of SH effects.
At present, the wide variety of Wavefront measuring apparatus based on SH effects has been obtained, has been based on the face of specific morphology profile
Battle array refraction, diffraction microlens couple with the matching of light-sensitive array, perform the discretization segmentation of incident light wave, beamlet focuses on, point
Row image obtains and the operation such as processing and wavefront inverting structure.Due to lenticule do not possess focusing, regulate and control photosensitive visual field and
This ability of modulation point spread function, can not effectively play a role in some special occasions.Such as targeted cache convergence, it is remote or
When acute variation, surrounding medium be in metastable state even for example typical atmospheric turbulance of unstability state, Hypersonic Flow Field or
In nonequilibrium state environment of high temperature gas, by intense radiation, dazzle, flash of light or strong laser irradiation, target is in that night is dark and intensity
Or the brightness contrast extremely occasion such as interface environments of great disparity, it will drastically reduce or even lose wavefront measurement ability, including extreme feelings
The situations such as the photosensitive device damage under condition.For the above situation, mainly develop special image by transforming primary optical system at present
Information processing algorithm, build and microlens array is placed in modulation and CCD or CMOS light-sensitive array spacing etc. on MEMS frameworks
Reply, it is only capable of solving subproblem or plays extremely limited effect, and cost price is high, efficiency wretched insufficiency, there is an urgent need to
New technical support means.
In the last few years, electrically-controlled liquid crystal microlens array technology was quickly grown, and the major function possessed includes：(1) plane
The liquid crystal microlens array of end face, it can effectively perform focusing under electric driving control signal effect, regulate and control photosensitive visual field and modulation
Point spread function etc. operates；(2) the automatically controlled conversion time as little as sub- Millisecond between the convergence state of not sharing the same light of liquid crystal microlenses,
The as little as Microsecond grade of laboratory level；(3) the modulation operation of its light gathering of liquid crystal microlenses can be according to the automatically controlled order exhibition of setting
Open, possess intelligent control light feature；(4) planar end and the liquid crystal microlenses structure with micron order liquid crystal material thickness, can
Flexibly inserted in control light framework or couple or even integrate with other optical photoconductor mechanical structures；(5) have by regulating and controlling electricity ginseng
Count to maintain or change liquid-crystal refractive-index spatial distribution form, effectively adapt to device supply variation, environmental factor change, target spy
Sign changes and conditions of demand this features.At present, how to be developed based on electrically-controlled liquid crystal micro lens technology and be applied to complex background
Dexterous wavefront measurement means under the conditions of environment and mobilism, it has also become optical precision measurement continues to develop institute face with control technology
The accidental challenge faced, there is an urgent need to new breakthrough.
The content of the invention
It is micro- based on electrically-controlled liquid crystal convergence the invention provides one kind for the disadvantages described above or Improvement requirement of prior art
The wavefront measurement chip of mirror, is operated in visible spectrum, is converged by the face battle array electrically-controlled liquid crystal of optical collection efficiency electricity modulation micro-
Lens couple with light-sensitive array performs optical wavefront measurement operation, and measurement range is big before having electric harmonic, and volume and quality are small, mesh
Mark and good environmental adaptability, the features such as easily coupling with optical photoconductor mechanical structure.
To achieve the above object, the invention provides a kind of wavefront measurement chip, it is characterised in that including the automatically controlled liquid of face battle array
Crystalline substance converges lenticule, face battle array visible-light detector and controls pretreatment module；Wherein, the face battle array electrically-controlled liquid crystal convergence lenticule
Including liquid crystal material layer, the first liquid crystal initial orientation layer, the patterned electrodes of the liquid crystal material layer upper surface are successively set on
Layer, the first substrate and the first anti-reflection film, and it is successively set on the second liquid crystal initial orientation of the liquid crystal material layer lower surface
Layer, common electrode layer, the second substrate and the second anti-reflection film；The common electrode layer is made up of one layer of homogeneous conducting film, the figure
Shape polarizing electrode layer is made up of one layer of homogeneous conducting film of the square hole or circular hole that are furnished with the distribution of m × n element array thereon, wherein, m, n are equal
For the integer more than 1；The face battle array electrically-controlled liquid crystal convergence lenticule is divided into the unit electrically-controlled liquid crystal of m × n element array distribution
Lenticule is converged, the unit electrically-controlled liquid crystal convergence lenticule corresponds with the square hole or circular hole, each square hole or circular hole
The center of unit electrically-controlled liquid crystal convergence lenticule corresponding to being respectively positioned on, the Top electrode of unit electrically-controlled liquid crystal convergence lenticule is formed,
The bottom electrode of all unit electrically-controlled liquid crystal convergence lenticules is provided by the common electrode layer；The face battle array visible-light detector quilt
The sub- face battle array visible-light detector of m × n element array distribution is divided into, the sub- face battle array visible-light detector and the unit are automatically controlled
Liquid crystal convergence lenticule corresponds, and every sub- face battle array visible-light detector includes the photosensitive member of j × j element array distribution, wherein,
J is the integer more than 1；It is that its relative light is incident that the face battle array electrically-controlled liquid crystal convergence lenticule, which is used for incident light wave separate division,
The different sub- plane incident wavefront in the inclination angle in face, and lenticule is converged by each sub- plane incident wavefront by each unit electrically-controlled liquid crystal
Orientation is converged in the photosensitive member of corresponding sub- face battle array visible-light detector；The face battle array visible-light detector is used to converge
Poly- optical signal is converted to electric signal；The pretreatment module that controls is used to resolve with each sub- plane entering for each sub- planar array detector
The two-dimensional position information of corresponding electric signal before ejected wave, the two-dimentional obliquity information of each sub- plane incident wavefront is obtained, then based on each
Each sub- plane incident wavefront of locus arrangement of unit electrically-controlled liquid crystal convergence lenticule, each sub- plane incident wavefront is further
Fitting structure incident wavefront data simultaneously export.
Preferably, the area of single square hole or circular hole converges the light receiving area of lenticule with corresponding unit electrically-controlled liquid crystal
Ratio be electrode hole coefficient, the electrode hole coefficient is 4%~16%.
Preferably, the chip also includes chip carrier and support heat sink；The chip carrier radiates positioned at the support
The top of plate, its bottom are connected with the support heat sink；It is described to control pretreatment module, face battle array visible-light detector and face battle array
Electrically-controlled liquid crystal convergence lenticule is coaxially sequentially placed in the chip carrier, wherein, the face battle array visible-light detector is located at institute
The top for controling pretreatment module is stated, the face battle array electrically-controlled liquid crystal convergence lenticule is located at the upper of the face battle array visible-light detector
Square and its light entrance face is exposed outside by the top drilling of the chip carrier.
Preferably, the 4th port, the common electrode layer and patterned electrodes are provided with the side of the chip carrier
Layer is respectively drawn by a wire, and common electrode layer lead and patterned electrode layer lead are accessed in the 4th port, are used for
Input driving and regulate and control face battle array electrically-controlled liquid crystal convergence lenticule control voltage signal.
Preferably, first port, second port, the 3rd port, fifth port are provided with the side of the chip carrier
With the 6th port, and the first indicator lamp, the second indicator lamp, the 3rd indicator lamp, the 4th indicator lamp and the 5th indicator lamp；Wherein,
The first port is used to access power line so that described control pretreatment module connection external power source；The second port is used for
Driving and adjustment signal that pretreatment module is supplied to the face battle array visible-light detector are controled described in output, it is outer to be additionally operable to input
The work order that portion's equipment is sent to the measurement chip；6th port carries for inputting the face battle array visible-light detector
The photoelectric respone signal of pretreatment module is controled described in supply, is additionally operable to measurement data before output wave；First indicator lamp is used
Whether connected in the power supply that pretreatment module is controled described in instruction；Second indicator lamp is used to indicating described to control pretreatment mould
Whether block is in normal operating conditions；5th indicator lamp is used to indicating described to control whether pretreatment module is in normally
Wavefront measurement data output state；3rd port, which is used to inputting, described to be controled pretreatment module and is supplied to the face battle array visible
The driving of photo-detector and adjustment signal；The fifth port is supplied to the drive for exporting the face battle array visible-light detector
Control the photoelectric respone signal of pretreatment module；3rd indicator lamp is used to indicate whether the face battle array visible-light detector is in
Normal operating conditions；4th indicator lamp is used to indicate whether the face battle array visible-light detector is in normal signal output
State.
In general, by the contemplated above technical scheme of the present invention compared with prior art, have below beneficial to effect
Fruit：
1st, measurement range before electric harmonic.The light aggregate capabilities of modulation liquid crystal convergence lenticule are powered up, change can be measured
Sub- its inclination angle of plane wave front mobility scale, there is automatically controlled modulation wavefront variable morphology traverse the advantages of spending.
2nd, strong antijamming capability, adaptability are good.Due to liquid crystal convergence lenticule, its bunching type light bends ability by telecommunications
Number regulation, have and dynamic regulation is carried out to wavefront measurement to adapt to environment, radiation variation and the advantages of tackle Fluctuation of Light Field.
3rd, measurement accuracy is high, due to using face battle array electrically-controlled liquid crystal convergence lenticule and face battle array visible-light detector, Ta Menjun
With high structure and stability and control accuracy, thus there is the advantages of measurement accuracy is high.
4th, it is intelligent.The automatically controlled shaping of liquid crystal convergence lenticule and the electric modulation operation of light gathering, can be in priori
Or the lower expansion of constraint, intervention or guiding of wavefront situation, there is intelligent feature.
5th, it is easy to use.As a result of integrated face battle array electrically-controlled liquid crystal convergence lenticule, face battle array visible-light detector and drive
Architectural framework as pretreatment module is controlled, has and patches conveniently, easily coupled with optical system, electronics and mechanical device excellent
Point.
Brief description of the drawings
Fig. 1 is the structural representation of the wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule of the embodiment of the present invention；
Fig. 2 is the structural representation of face battle array electrically-controlled liquid crystal convergence lenticule, wherein, (a) diagrammatic cross-section, (b) unit electricity
The Top electrode of the brilliant convergence lenticule of draining is made up of micro- square hole, and the Top electrode of (c) unit electrically-controlled liquid crystal convergence lenticule is by micro- circle
Hole is formed；
Fig. 3 is the wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule of the embodiment of the present invention in optical system for testing
Configuration schematic diagram；
Fig. 4 is the operation principle signal of the wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule of the embodiment of the present invention
Figure；
Fig. 5 is the wavefront test chart of one embodiment of the invention.
In all of the figs, identical reference is used for representing identical element or structure, wherein：1- first is indicated
Lamp, 2- first ports, the indicator lamps of 3- second, the indicator lamps of 4- the 3rd, 5- second ports, the ports of 6- the 3rd, 7- control pretreatment mould
Block, 8- faces battle array visible-light detector, the ports of 9- the 4th, 10- faces battle array electrically-controlled liquid crystal convergence lenticule, the indicator lamps of 11- the 4th, 12-
5th indicator lamp, 13- fifth ports, the ports of 14- the 6th, 15- chip carriers, 16- metals support heat sink.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Conflict can is not formed each other to be mutually combined.
As shown in figure 1, the wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule of the embodiment of the present invention includes chip
Shell 15, wavefront measurement framework and metal support heat sink 16.Wavefront measurement framework include control pretreatment module 7, face battle array can
Meet photo-detector 8 and battle array electrically-controlled liquid crystal convergence lenticule 10.Metal support heat sink 16 is used to support and radiate, chip carrier
15 are connected positioned at the top of metal support heat sink 16, its bottom with metal support heat sink 16.Control pretreatment module 7, face
Battle array visible-light detector 8 and face battle array electrically-controlled liquid crystal convergence lenticule 10 are coaxially sequentially placed in chip carrier 15, face battle array visible ray
Detector 8 is located at the top for controling pretreatment module 7, and battle array electrically-controlled liquid crystal convergence lenticule 10 in face is located at face battle array visible-light detector
8 top and its light entrance face is exposed outside by the top drilling of chip carrier 15.
The side of chip carrier 15 is provided with first port 2, second port 5, the 6th port 14, the first indicator lamp 1, second
The indicator lamp 12 of indicator lamp 3 and the 5th.Wherein, first port 2 is used to access power line so that controling pretreatment module 7 connects outside
Power supply；Second port 5, which is used to export, controls driving and adjustment signal that pretreatment module 7 is supplied to face battle array visible-light detector 8,
It is additionally operable to input the work order that external equipment is sent to measurement chip；6th port 14 is used for input face battle array visible-light detector
8 are supplied to the photoelectric respone signal for controling pretreatment module 7, are additionally operable to measurement data before output wave；First indicator lamp 1 is used to refer to
Show whether the power supply for controling pretreatment module 7 is connected；Second indicator lamp 3 controls whether pretreatment module 7 is in just for instruction
Normal working condition；5th indicator lamp 12 controls whether pretreatment module 7 is in normal wavefront measurement data output for instruction
State.
The 3rd port 6, fifth port 13, the 3rd indicator lamp 4 and the 4th indicator lamp are additionally provided with the side of chip carrier 15
11.Wherein, the 3rd port 6, which is used to input, controls driving and regulation and control letter that pretreatment module 7 is supplied to face battle array visible-light detector 8
Number；Fifth port 13 is supplied to the photoelectric respone signal for controling pretreatment module 7 for output face battle array visible-light detector 8；The
Whether three indicator lamps 4 are in normal operating conditions for index plane battle array visible-light detector 8；4th indicator lamp 11 is used for index plane
Whether battle array visible-light detector 8 is in normal signal output state.
The 4th port 9 is additionally provided with the side of chip carrier 15, for input face battle array electrically-controlled liquid crystal convergence lenticule 10
Driving and adjustment signal.
As shown in Fig. 2 (a), battle array electrically-controlled liquid crystal convergence lenticule 10 in face includes liquid crystal material layer, is successively set on liquid crystal material
The first liquid crystal initial orientation layer, patterned electrode layer, the first substrate and the first anti-reflection film of bed of material upper surface, and set gradually
The second liquid crystal initial orientation layer, common electrode layer, the second substrate and the second anti-reflection film in liquid crystal material layer lower surface.Common electrical
Pole layer is made up of one layer of homogeneous conducting film.Patterned electrode layer is by the micro- square hole for being furnished with the distribution of m × n element array thereon or micro- circular hole
One layer of homogeneous conducting film form, wherein, m, n are the integer more than 1.Common electrode layer and patterned electrode layer respectively pass through one
Root wire is drawn, and common electrode layer lead and patterned electrode layer lead are accessed in the 4th port 9, for the automatically controlled liquid of input face battle array
The driving of crystalline substance convergence lenticule 10 and adjustment signal.
Above-mentioned face battle array electrically-controlled liquid crystal convergence lenticule 10 is divided into the unit electrically-controlled liquid crystal convergence of m × n element array distribution
Lenticule, unit electrically-controlled liquid crystal convergence lenticule correspond with micro- square hole or micro- circular hole, each micro- square hole or the equal position of micro- circular hole
In the center of corresponding unit electrically-controlled liquid crystal convergence lenticule, the Top electrode that unit electrically-controlled liquid crystal converges lenticule, such as Fig. 2 are formed
(b) and shown in Fig. 2 (c).The bottom electrode of all unit electrically-controlled liquid crystal convergence lenticules is provided by common electrode layer.Single micro- square hole
Or the area of micro- circular hole is referred to as electrode with the ratio of the light receiving area of corresponding unit electrically-controlled liquid crystal convergence lenticule
Coefficient, its representative value is between 4% to 16%.
Face battle array visible-light detector 8 is divided into the sub- face battle array visible-light detector of m × n element array distribution.Sub- face battle array can
See that photo-detector corresponds with unit electrically-controlled liquid crystal convergence lenticule, every sub- face battle array visible-light detector includes j × j member battle arrays
The photosensitive member of column distribution, wherein, j is the integer more than 1.
The wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule of the embodiment of the present invention can quilt in strong laser field environment
It is placed directly within optical system for testing, can be placed at the focal plane for the optical system being made up of primary mirror or enter in weak radiation light field environment
The weak defocus configuration of row, performs wavefront measurement operation, as shown in Figure 3.Its operation principle is as follows.
By the common electrode layer lead and patterned electrode layer lead in the 4th port 9, voltage signal V loadings will be controled
On face battle array electrically-controlled liquid crystal convergence lenticule 10, each unit electrically-controlled liquid crystal convergence lenticule is controled voltage signal V and synchronously powered up
Control.It is distributed in double layer planar battery lead plate (including anti-reflection film, substrate, electrode layer and the liquid crystal initial orientation for forming liquid crystal microcavity
Layer) liquid crystal molecule near inner surface, it is fabricated on two relative plane electrode plate surfaces and with parallel groove orientation
Liquid crystal initial orientation layer secure anchorage, the space electricity that the liquid crystal molecule in liquid crystal layer is then encouraged by double layer planar battery lead plate
Field driving, incident wave beam is performed can the electric converge operation adjusted.
After light wave entering surface battle array electrically-controlled liquid crystal convergence lenticule, the inclination angle by separate division for the light entrance face of opposite chip
Different sub- plane incident wavefront, such as sub- plane incident wavefront-A ,-B and-C shown in Fig. 4 etc..Each sub- plane incident wavefront
The specific photosensitive member of corresponding sub- face battle array visible-light detector is converged in by each unit electrically-controlled liquid crystal convergence lenticule orientation
On, form typical focal spot-A as shown in Figure 41、-B1With-C1Further perform photoelectricity Deng, each sub- face battle array visible-light detector and turn
Change operation and convert optical signals to electric signal.It is resolving each sub- planar array detector with each sub- plane incidence wave to control pretreatment module
The two-dimensional position information of electric signal corresponding to preceding is simultaneously calibrated, and obtains the two-dimentional obliquity information of each sub- plane incident wavefront, then
Each sub- plane incident wavefront of locus arrangement based on each unit electrically-controlled liquid crystal convergence lenticule, structure incident wavefront data are simultaneously
Output, will each sub- plane incident wavefront further fitting is built into the incident wavefront of specific modality, so as to complete based on photosensitive
The wavefront measurement operation that signal location arrangement information resolves.
Voltage signal V frequency or mean square amplitude is controled by regulation, modulation each unit electrically-controlled liquid crystal convergence lenticule
Light aggregate capabilities, it is micro- to be equivalent to the convex refraction of routine that modulation has similar light convergence efficiency with unit electrically-controlled liquid crystal convergence lenticule
The surface curvature degree of lens, such as the equivalent automatically controlled state -1 and -2 shown in Fig. 4, so as to each sub- plane incident wave beam warp of modulation
Convergence form after unit electrically-controlled liquid crystal convergence lenticule, such as in Fig. 4, accordingly, convergence focal spot is transformed into-C2 from-C1.Institute
The typical wavefront of measurement is as shown in Figure 5.By the above-mentioned means, can both change the inclination angle mobility scale of sub- plane incident wavefront,
The modulation of the measurable mobility scale of incident wavefront is realized, and can enough changes the son coupled with unit electrically-controlled liquid crystal convergence lenticule
Illuminance on planar array detector, the irradiation intensity change of target or ambient light field is effectively adapted to, and to because of environment or target
The perturbation wavefront that factor introduces, which changes, to be modified.Specifically, draw for target or ambient light field disturbance and chip vibration
The wavefront that enters changes, and the voltage signal that controls being carried in by modulation on chip adjusts wavefront, chip possess anti-Fluctuation of Light Field or
The wavefront measurement ability of vibration；For strong light or weak radiation light field, lenticule is converged by the face battle array electrically-controlled liquid crystal in chip
Electric focusing function modulation pack beam configuration, chip possess the wider light irradiation scope of application；For moving target and time-varying ripple
Before, by and time modulation be carried on chip control voltage signal carry out wavefront measurement, it is timely that chip possesses moving-target wavefront
Become wavefront measurement ability.Light aggregation feature disappears after powering down chips, terminates wavefront measurement.
There is the present invention automatically controlled execution and this notable feature of modulation wavefront measurement, chip to patch easy to operate, Yi Yuchang
The features such as advising the coupling of optical photoconductor mechanical structure.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (4)
1. a kind of wavefront measurement chip, it is characterised in that including face battle array electrically-controlled liquid crystal convergence lenticule, face battle array visible-light detector
With control pretreatment module；Wherein,
The face battle array electrically-controlled liquid crystal convergence lenticule includes liquid crystal material layer, is successively set on the liquid crystal material layer upper surface
First liquid crystal initial orientation layer, patterned electrode layer, the first substrate and the first anti-reflection film, and it is successively set on the liquid crystal material
The second liquid crystal initial orientation layer, common electrode layer, the second substrate and the second anti-reflection film of bed of material lower surface；The common electrode layer
Be made up of one layer of homogeneous conducting film, the patterned electrode layer by be furnished with thereon m × n element array distribution square hole or circular hole one
Layer homogeneous conducting film is formed, wherein, m, n are the integer more than 1；The face battle array electrically-controlled liquid crystal convergence lenticule is divided into m
The unit electrically-controlled liquid crystal convergence lenticule of × n element array distribution, unit electrically-controlled liquid crystal convergence lenticule and the square hole or
Circular hole corresponds, and each square hole or circular hole are respectively positioned on the center of corresponding unit electrically-controlled liquid crystal convergence lenticule, form unit
Electrically-controlled liquid crystal converges the Top electrode of lenticule, and the bottom electrode of all unit electrically-controlled liquid crystal convergence lenticules is by the common electrode layer
There is provided, wherein, the area of single square hole or circular hole converges the ratio of the light receiving area of lenticule with corresponding unit electrically-controlled liquid crystal
It is 4%~16% to be worth for electrode hole coefficient, the electrode hole coefficient；
The face battle array visible-light detector is divided into the sub- face battle array visible-light detector of m × n element array distribution, the sub- face battle array
Visible-light detector corresponds with unit electrically-controlled liquid crystal convergence lenticule, and every sub- face battle array visible-light detector includes j
The photosensitive member of × j element array distribution, wherein, j is the integer more than 1；
The face battle array electrically-controlled liquid crystal convergence lenticule is used for the inclination angle that incident light wave separate division is its relative light entrance face is each
Different sub- plane incident wavefront, and lenticule is converged by each unit electrically-controlled liquid crystal and converges in each sub- plane incident wavefront orientation
In the photosensitive member of corresponding sub- face battle array visible-light detector；The face battle array visible-light detector is used for the optical signal of convergence
Be converted to electric signal；The pretreatment module that controls is used to resolve the corresponding with each sub- plane incident wavefront of each sub- planar array detector
Electric signal two-dimensional position information, obtain the two-dimentional obliquity information of each sub- plane incident wavefront, then based on the automatically controlled liquid of each unit
Each sub- plane incident wavefront of locus arrangement of crystalline substance convergence lenticule, by each sub- plane incident wavefront, further fitting is built into
Penetrate wave front data and export.
2. wavefront measurement chip as claimed in claim 1, it is characterised in that also including chip carrier and support heat sink；Institute
Chip carrier is stated to be connected with the support heat sink positioned at the top of the support heat sink, its bottom；It is described to control pretreatment
Module, face battle array visible-light detector and face battle array electrically-controlled liquid crystal convergence lenticule are coaxially sequentially placed in the chip carrier, wherein,
The face battle array visible-light detector is positioned at the top for controling pretreatment module, the face battle array electrically-controlled liquid crystal convergence lenticule position
In the top of the face battle array visible-light detector and its light entrance face it is exposed outside by the top drilling of the chip carrier.
3. wavefront measurement chip as claimed in claim 2, it is characterised in that be provided with the 4th on the side of the chip carrier
Port, the common electrode layer and patterned electrode layer are respectively drawn by a wire, common electrode layer lead and graphical electricity
Pole layer lead is accessed in the 4th port, for inputting driving and regulating and controlling controling for the face battle array electrically-controlled liquid crystal convergence lenticule
Voltage signal.
4. wavefront measurement chip as claimed in claim 2, it is characterised in that be provided with first on the side of the chip carrier
Port, second port, the 3rd port, fifth port and the 6th port, and the first indicator lamp, the second indicator lamp, the 3rd instruction
Lamp, the 4th indicator lamp and the 5th indicator lamp；Wherein,
The first port is used to access power line so that described control pretreatment module connection external power source；The second port
For exporting driving and the adjustment signal for controling pretreatment module and being supplied to the face battle array visible-light detector, it is additionally operable to defeated
Enter the work order that external equipment is sent to the measurement chip；6th port is used to input the visible optical detection of the face battle array
Device is supplied to the photoelectric respone signal for controling pretreatment module, is additionally operable to measurement data before output wave；First instruction
Lamp is used to indicate whether the power supply for controling pretreatment module is connected；Second indicator lamp is used to indicating described to control pre- place
Whether reason module is in normal operating conditions；5th indicator lamp is used to indicating described to control whether pretreatment module is in just
Normal wavefront measurement data output state；
3rd port be used to inputting it is described control pretreatment module be supplied to the face battle array visible-light detector driving and
Adjustment signal；The fifth port is supplied to the light for controling pretreatment module for exporting the face battle array visible-light detector
Electroresponse signal；3rd indicator lamp is used to indicate whether the face battle array visible-light detector is in normal operating conditions；Institute
The 4th indicator lamp is stated to be used to indicate whether the face battle array visible-light detector is in normal signal output state.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410616547.4A CN104330172B (en) | 2014-11-05 | 2014-11-05 | A kind of wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410616547.4A CN104330172B (en) | 2014-11-05 | 2014-11-05 | A kind of wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104330172A CN104330172A (en) | 2015-02-04 |
| CN104330172B true CN104330172B (en) | 2017-11-14 |
Family
ID=52404941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410616547.4A Active CN104330172B (en) | 2014-11-05 | 2014-11-05 | A kind of wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104330172B (en) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105486415B (en) * | 2015-12-04 | 2018-12-14 | 华中科技大学 | A kind of imaging detection chip of addressable measurement local wavefront |
| CN105509894B (en) * | 2015-12-07 | 2019-11-12 | 华中科技大学 | A kind of liquid crystal basic image and wavefront bimodulus electricity are tuned into as detection chip |
| CN105791645B (en) * | 2016-03-15 | 2019-01-04 | 华中科技大学 | A kind of electricity leveling face and 3 d light fields double-mode imaging detection chip |
| CN105826341B (en) * | 2016-03-15 | 2018-11-30 | 华中科技大学 | A kind of liquid crystal base imaging detection chip of addressable chromatography visual field |
| CN109001924A (en) * | 2018-08-09 | 2018-12-14 | 南京奥谱依电子科技有限公司 | A kind of liquid crystal optically focused micro mirror array and preparation method thereof controled based on frequency signal |
| CN108803163B (en) * | 2018-08-09 | 2021-05-07 | 南京奥谱依电子科技有限公司 | Electric control liquid crystal objective lens and ten-thousand-level magnification optical microscope using same |
| CN109269638A (en) * | 2018-09-04 | 2019-01-25 | 京东方科技集团股份有限公司 | Optical sensor mould group and its working method |
| CN109782498B (en) * | 2019-01-24 | 2022-02-18 | 南京奥谱依电子科技有限公司 | Liquid crystal micro-mirror for wave-front addressing testing and adjusting, preparation method thereof and optical microscope |
| CN113538300B (en) * | 2021-06-22 | 2023-07-14 | 武汉工程大学 | High-definition light field imaging method based on liquid crystal D-type optical element |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853919A (en) * | 2012-08-29 | 2013-01-02 | 华中科技大学 | Wavefront measuring chip of hybrid integrated planar array liquid crystal micro-lens and infrared detector |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004086389A1 (en) * | 2003-03-27 | 2004-10-07 | Tokyo University Of Agriculture And Technology Tlo Co.,Ltd. | Wavefront aberration correcting device and optical pickup equipped with the same |
| US7268849B2 (en) * | 2005-09-28 | 2007-09-11 | Teledyne Licensing, Llc | Spatial light modulator employing voltage gradient pixels, and associated methods |
| CN203587226U (en) * | 2013-09-25 | 2014-05-07 | 华中科技大学 | Wave vector measurement based infrared imaging detection chip |
-
2014
- 2014-11-05 CN CN201410616547.4A patent/CN104330172B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102853919A (en) * | 2012-08-29 | 2013-01-02 | 华中科技大学 | Wavefront measuring chip of hybrid integrated planar array liquid crystal micro-lens and infrared detector |
Non-Patent Citations (2)
| Title |
|---|
| 电控可变焦128元×128元自适应液晶微透镜阵列;李晖等;《光学精密工程》;20091031;第17卷(第10期);第2352-2356页 * |
| 自适应电控液晶微透镜及透镜阵列;吴立丰;《中国优秀硕士学位论文全文数据库 基础科学辑》;20100515(第5期);正文第16-34页，第43-54页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104330172A (en) | 2015-02-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104330172B (en) | A kind of wavefront measurement chip based on electrically-controlled liquid crystal convergence lenticule | |
| CN206115116U (en) | High definition imaging system of double -colored light simple lens | |
| CN210090835U (en) | Diffuser and light projector | |
| CN102853919B (en) | Wavefront measuring chip of hybrid integrated planar array liquid crystal micro-lens and infrared detector | |
| CN101581770B (en) | Method for testing lumen efficiency of LED lamps | |
| CN102829879A (en) | Infrared imaging detection chip integrated with liquid crystal optically-controlled array and area array photosensitive structure | |
| CN104459510A (en) | LED array junction temperature quick on-line detecting device | |
| CN101718589B (en) | Optical readout method for infrared thermal imagery imager | |
| CN102650547B (en) | Optical reading method for micro lens array of non-refrigeration infrared imaging system | |
| CN103256990B (en) | A kind of diffraction pyramid wave-front sensor | |
| Chamani et al. | A proposal for optical antenna in VLC communication receiver system | |
| CN201429463Y (en) | Lumen efficiency test device of LED lamp | |
| CN103558558B (en) | A kind of silicon solar cell conversion efficiency detection device and detection method | |
| CN204188272U (en) | One converges lenticular wavefront measurement chip based on electrically-controlled liquid crystal | |
| CN208705553U (en) | A kind of novel optical focusing array structure | |
| CN203587226U (en) | Wave vector measurement based infrared imaging detection chip | |
| CN103322971A (en) | Sunlight azimuth detector | |
| Zhou et al. | Back-illuminate fiber system research for multi-object fiber spectroscopic telescope | |
| CN202947797U (en) | Wave front measuring chip mixedly integrated with planar array liquid crystal micro lens and infrared detector | |
| CN204167322U (en) | The bionical imaging detection chip of a kind of liquid crystal Quito eye intussusception | |
| CN104319280B (en) | A kind of liquid crystal Quito eye bionical imaging detection chip of intussusception | |
| CN103512668B (en) | A kind of infrared image and the double-mode integrated imaging detection chip of wavefront | |
| CN209310921U (en) | A kind of measuring device of faint parallel illuminance | |
| CN207037223U (en) | A kind of equipment for improving LED light source coherency | |
| CN102650549B (en) | FPA (focal plane array)-based uncooled thermal imaging optical system modulated by point grid beamsplitter |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |