CN106550528B - A kind of multimode fibre focal plane regulating device for plasma detection - Google Patents
A kind of multimode fibre focal plane regulating device for plasma detection Download PDFInfo
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- CN106550528B CN106550528B CN201610973016.XA CN201610973016A CN106550528B CN 106550528 B CN106550528 B CN 106550528B CN 201610973016 A CN201610973016 A CN 201610973016A CN 106550528 B CN106550528 B CN 106550528B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0012—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
- H05H1/0037—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by spectrometry
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- Spectroscopy & Molecular Physics (AREA)
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optical Couplings Of Light Guides (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention provides a kind of multimode fibre focal plane regulating devices for plasma detection, it is used to for the plane of incidence of multimode fibre being adjusted to Cheney-Tener light channel structure outgoing focal plane and be overlapped, it includes multimode fibre adjusting seat, and the first adjustment device and second adjustment device being set side by side, wherein, the Cheney-Tener light channel structure is mounted on the first adjustment device, the multimode fibre adjusting seat is mounted on second adjustment device, the first adjustment device and the second adjustment device respectively have multiple freedom degrees, the multimode fibre is accommodated in the multimode fibre adjusting seat, so that the plane of incidence of multimode fibre is towards the outlet of the Cheney-Tener light channel structure.Regulating device of the invention can be realized for the plane of incidence of multimode fibre to be adjusted to Cheney-Tener light channel structure outgoing focal plane and be overlapped, and may be implemented quickly flexibly to adjust, to improve the sensitivity and accuracy of plasma spectrometry information collection.
Description
Technical field
The present invention relates to field of analytic instrument, and in particular to a kind of multimode fibre focal plane tune for plasma detection
Regulating device.
Background technique
Spectrometer is general spectrometric instrument, by the photodegradation of complicated component is different wave length by diffraction grating
Light, Application Optics principle, structure and ingredient to substance are observed, analyze and handle, and are widely used in every field.Such as exist
In IC equipment research and development, it can be generated by combining spectrometer with other elements such as photomultiplier tubes with plasma glow discharge
Spectral information be acquired analysis, real-time detection reacting phenomenon obtains plasma physics parameter, in a variety of plasma physical examinations
Have many advantages, such as non-intrusion type, response quickly in measurement equipment.Meanwhile for object complicated in the plasma in non-constant state
Physicochemical process, it usually needs many faint spectral lines of the acquisition other than main intense line, detection difficulty are very big.
There are mainly two types of the detection means mainly used to optic spectrum line at present: one is being divided by spectrometer, passing through
Exit slit adjusts the optical signal that cooperation photomultiplier tube acquires single wavelength；Another kind is by the CCD with two-dimensional array
Camera can acquire the spectral signal in different wavelength range.The first detection method has high sensitivity, response quickly etc. excellent
Point, especially photomultiplier tube as the highest optical detection original part of current sensitivity, may be implemented single photon nanosecond when
Between resolved measurement.And common CCD camera sensitivity and time resolution are poor, though the enhanced CCD camera occurred at present
It so also can achieve nanosecond detection accuracy, but limited by the factors such as photocathode material and fluorescent plate luminous efficiency, enhanced
The detection efficiency of type CCD camera is lower than photomultiplier tube, and is not used to the measurement that transient state does not repeat optical signal.
For this purpose, having started to consider by using array fibre to replace ccd array as spectra collection element, then in this field
Photoelectric signal transformation is carried out in the output end access photomultiplier tube array of array fibre, and photomultiplier tube is to be currently known
Most sensitive optical detection device, thus, fiber array used by this system need with light channel structure middle outlet focal plane
Position height coincidence can just collect accurate spectral signal.However, there is no be directed to this multimode fibre and Jiao Ping at present
The regulating device of positional relationship between face is all that spectrometer is affixed directly on optical platform in the prior art, although guaranteeing
The stability of spectrometer, but cannot achieve and be overlapped the outlet focal plane of spectrometer with fiber array face, cause precision compared with
It is low.
Summary of the invention
The main object of the present invention is to provide a kind of multimode fibre focal plane regulating device for plasma detection,
The quick soft readjustment that multimode fibre plane of incidence and spectrometer outlet focal plane can be conveniently realized is focused.
To achieve the above object, the technical solution adopted is as follows:
A kind of multimode fibre focal plane regulating device for plasma detection, is used to put down the incidence of multimode fibre
Face is adjusted to Cheney-Tener light channel structure outgoing focal plane and is overlapped comprising multimode fibre adjusting seat and is set side by side
The first adjustment device and second adjustment device, wherein the Cheney-Tener light channel structure is mounted on the first adjustment device,
The multimode fibre adjusting seat is mounted on second adjustment device, and the first adjustment device and the second adjustment device are respectively
With multiple freedom degrees, the multimode fibre is accommodated in the multimode fibre adjusting seat, so that the plane of incidence court of multimode fibre
To the outlet of the Cheney-Tener light channel structure, the first adjustment device includes: that can rotate around first direction first is adjusted
Whole group part；It is mounted on second adjustment component on the first adjustment component, can rotating around second direction；Wherein described
One direction is different from the second direction, wherein the Cheney-Tener light channel structure is mounted on the second adjustment component.
, it is preferable that the first adjustment component and/or second adjustment component include:
Bottom plate is fixed, is provided with the first arc-shaped guide rail on the fixed bottom plate；
Movable platform, the movable platform are provided with the second arc-shaped guide rail matched with first arc-shaped guide rail；
The jacking block being fixedly connected below the movable platform, the jacking block have contact surface；
The push rod device being fixedly mounted on the fixed bottom plate, the push rod device has telescopic push rod, described
When the contact surface of jacking block described in push rod pushing tow, the movable platform is driven to rotate relative to the fixed bottom plate.
Preferably, the push rod device is electric pushrod device.
Preferably, the contact surface includes the planar section and/or curved sections that multistage is smoothly connected.
Preferably, the contact surface include side plate bending and above and below the side plate bending two sides planar section.
Preferably, the multimode fibre adjusting seat includes:
It is fixedly attached to the fixing seat of the second adjustment device；
Optical fiber installing pipe, first end are connected to the fixing seat, and second end is towards the Cheney-Tener light channel structure
Outlet, is mounted in the optical fiber installing pipe to the multimode fibre clearance fit, the plane of incidence of the multimode fibre is located at
The second end of the optical fiber installing pipe.
Preferably, the multimode fibre adjusting seat further includes interface flange and hose, wherein the interface flange is fixed to be connected
It is connected to the Cheney-Tener light channel structure outlet side, the second end of the optical fiber installing pipe protrudes into the interior of the interface flange
Kong Zhong, the outer diameter of the second end of the optical fiber installing pipe are less than the diameter of the inner hole of the interface flange, and the hose is by impermeable
Luminescent material is made, and the hose is set in the periphery of the optical fiber installing pipe, and the both ends of the hose are connected respectively to described connect
Mouth flange and the fixing seat.
Preferably, the second adjustment device includes:
Third adjusts component, can rotate around third direction, be equipped with the multimode fibre adjusting seat thereon；
First parallel moving mechanism can be translatable along first direction, be equipped with the third adjustment component thereon；
Second parallel moving mechanism, can be translatable in a second direction, be equipped with first parallel moving mechanism thereon；
Third parallel moving mechanism can be translatable along third direction, be equipped with second parallel moving mechanism thereon.
Preferably, first parallel moving mechanism and/or second parallel moving mechanism include:
Support base which is provided with linear guide；
Be translatable platform, can slide along the linear guide；
Screw pair connects the support base and the translation platform.
Preferably, the third parallel moving mechanism include: bottom plate, fixed plate, fixed support rod, third screw pair,
Nut support plate, third translation platform and sliding supporting bar, wherein the fixed support rod is installed on the bottom plate, described
Fixed plate is installed on the top of the fixed support rod, and the lead screw in the third screw pair is rotatably supported in institute
It states between bottom plate and the fixed plate, the nut in the third screw pair is fixed on the nut support plate, institute
It states sliding supporting bar and passes through the fixed plate with being slidably matched, the nut support is fixed in the lower end of the sliding supporting bar
On plate, the third translation platform is fixed on the upper end of the sliding supporting bar.
Preferably, the area of the upper surface of first parallel moving mechanism is greater than the face of the bottom surface of third adjustment component
Product, the third adjustment component are fixedly installed to first parallel moving mechanism via right angle block；
And/or the area of the bottom surface of any of first parallel moving mechanism, the second parallel moving mechanism and third parallel moving mechanism is small
In the area of mounting surface below, thus its mounting surface for being fixedly installed to lower section via right angle block.
Multimode fibre focal plane regulating device for plasma detection of the invention can be realized multimode fibre
Plane of incidence is adjusted to Cheney-Tener light channel structure outgoing focal plane and is overlapped, and may be implemented quickly flexibly to adjust,
To improve the sensitivity and accuracy of plasma spectrometry information collection.
Detailed description of the invention
The Figure of description for constituting a part of the invention is used to provide further understanding of the present invention, and of the invention shows
Examples and descriptions thereof are used to explain the present invention for meaning property, does not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is the outline structural diagram of the multimode fibre focal plane regulating device of the preferred embodiment of the present invention；
Fig. 2 a and Fig. 2 b are the installation diagram schematic diagram and decomposition diagram of rotatable platform respectively；
Fig. 3 a and 3b are the main section view and left view structural representation of the movable platform part of rotatable platform respectively；
Fig. 4 is Cheney-Tener light channel structure schematic diagram；
Fig. 5 a and 5b are the decomposition diagram and assembling schematic diagram of multimode fibre adjusting seat respectively；
Fig. 6 a and 6b are the end view and side structure schematic view of multimode fibre respectively；
Fig. 7 is the assembling structure schematic diagram of the first translation platform；
Fig. 8 is the left view decomposition diagram of the first translation platform；
Fig. 9 is the assembling structure schematic diagram of third translation platform；
Figure 10 is the attachment structure schematic diagram between third rotatable platform and the first translation platform.
Wherein, the above drawings include the following reference numerals:
10, optical platform；20, the first rotatable platform；30, the second rotatable platform；40, Cheney-Tener light channel structure；50,
Multimode fibre adjusting seat；60, third rotatable platform；70, the first translation platform；80, the second translation platform；90, third translation is flat
Platform；100, firm banking；110a, 110b, right angle block；201, movable platform；202a, 202b, arc-shaped guide rail；203, jacking block；
203a, 203c, planar section；203b, side plate bending；203d, interconnecting piece；204, fixed bottom plate；205, push rod fixing seat；206, push rod
Device；206a, push rod；401, entrance slit；402, collimating mirror；403, diffraction grating；404, focusing mirror；405, burnt
Plane；501, fixing seat；501a, fixing seat inner hole；502, hose；503, interface flange；503a, interface flange groove；503b,
Interface flange inner hole；504, multimode fibre；504a, plane of incidence；504b, ferrule；505, optical fiber installing pipe；505a, installation
Pipe groove；505b, optical fiber mounting hole；505c, installation pipe orifice；505d, optical fiber installing pipe first end；604, third rotatable platform
Fixed bottom plate；701, be translatable platform；702, nut；703, lead screw；704, motor；705, guide support；706, support base；707,
707a, 707b, bearing support platform；708a, 708b, bearing；709, linear guide；901, third translation platform；902, fixed plate；
903, fixed support rod；904, bottom plate；905, driving motor；906, nut；907, lead screw；908, sliding supporting bar；909, spiral shell
Female support plate.
Specific embodiment
In the following description, a large amount of concrete details are given so as to provide a more thorough understanding of the present invention.So
And it will be apparent to one skilled in the art that the present invention may not need one or more of these details and be able to
Implement.In other examples, in order to avoid confusion with the present invention, for some technical characteristics well known in the art not into
Row description.
In order to thoroughly understand the present invention, detailed structure will be proposed in following description.Obviously, the embodiment of the present invention
It is not limited to the specific details that those skilled in the art is familiar with.Presently preferred embodiments of the present invention is described in detail as follows, so
And other than these detailed descriptions, the present invention can also have other embodiments.
The invention proposes a kind of multimode fibre focal plane regulating devices for plasma detection, are used for multimode
The plane of incidence of optical fiber is adjusted to Cheney-Tener light channel structure outgoing focal plane and is overlapped.The regulating device includes multimode light
Fine adjusting seat and the first adjustment device and second adjustment device being set side by side, wherein as shown in Figure 1, the Cheney-spy
Light channel structure 40 of receiving is mounted on the first adjustment device, and the multimode fibre adjusting seat 50 is mounted on second adjustment device, institute
Stating the first adjustment device and the second adjustment device respectively has multiple freedom degrees, and the multimode fibre is accommodated in the multimode
In optical fiber adjusting seat 50, so that the plane of incidence of multimode fibre is towards the outlet of the Cheney-Tener light channel structure 40.
By the adjustment of multiple freedom degrees of the first adjustment device and second adjustment device, can be realized multimode fibre
Plane of incidence is adjusted to Cheney-Tener light channel structure outgoing focal plane and coincides with one another.
Referring specifically to Fig. 1, the multimode fibre focal plane being shown according to the preferred embodiment of the present invention adjusts dress
The schematic diagram set.For the ease of instruction direction, the coordinate system as composed by X, Y and three directions of Z-direction is shown in FIG. 1,
Wherein X-direction is expressed as the transverse direction on horizontal plane, and Y-direction is expressed as the longitudinal direction on horizontal plane, and Z-direction is expressed as perpendicular to level
Face it is vertical.As shown in Figure 1, the bracket being for example placed on ground is shown, such as optical platform 10, the optical platform
10 for placing the multimode fibre focal plane regulating device.
Illustratively, in the multimode fibre focal plane regulating device, the first adjustment device includes: can be around first direction
The first adjustment component of (such as Y-direction) rotation, such as the first rotatable platform 20；It is mounted on the first adjustment component, energy
Enough second adjustment components rotated around second direction (such as X-direction), such as the second rotatable platform 30；Wherein the first direction is not
It is same as the second direction, and wherein, the Cheney-Tener light channel structure 40 is mounted on the second adjustment component 30.
Illustratively, the second adjustment device includes:
Third adjusts component, can rotate around third direction (such as Z-direction), for example, third rotatable platform 60, thereon
The multimode fibre adjusting seat 50 is installed；
First parallel moving mechanism can be translatable along first direction, and for example, first translation platform 70 is equipped with described thereon
Third adjusts component；
Second parallel moving mechanism can be translatable in a second direction, and for example, second translation platform 80 is equipped with described thereon
First parallel moving mechanism；
Third parallel moving mechanism can be translatable along third direction, for example, third translation platform 90, be equipped with thereon described
Second parallel moving mechanism.
Illustratively, there are also firm banking 100 on optical platform 10, third translation platform 90 is installed on firm banking 100.
Therefore, Cheney-Tener light channel structure 40 can adjust two via the first rotatable platform 20 and the second rotatable platform 30
The rotational freedom in a direction, multimode fibre then can be flat via the translation translation of platform 70, second of third rotatable platform 60, first
Platform 80 and third translation platform 90 adjust the translation in three directions and the rotational freedom in a direction, to realize whole six
The adjusting of a freedom degree is finally convenient to put down the plane of incidence of multimode fibre and Cheney-Tener light channel structure outgoing coke
Face is adjusted to coincidence.
The structural schematic diagram of the first rotatable platform 20 according to the present invention is shown in detail in Fig. 2 a-3b, in the present invention
In, the first, second, and third rotatable platform can have identical mechanical structure, as an example, only to the first rotatable platform 20
It is described.
As shown in figures 2 a through 3b, the first rotatable platform 20 is made of upper and lower two parts, and middle and lower part point includes for by first
The fixation bottom plate 204 that rotatable platform itself is fixed, upper part then include for providing the movable platform 201 of rotational motion.
Wherein, the first arc-shaped guide rail 202b is provided on the fixed bottom plate 204, the movable platform 201 is then provided with and described
The second arc-shaped guide rail 202a that one arc-shaped guide rail 202b is matched, when the second arc-shaped guide rail 202a and the first arc-shaped guide rail 202b it
Between when relatively moving, movable platform 201 generates rotation relative to fixed bottom plate 202.
Easily to realize rotation of the movable platform 201 relative to fixed bottom plate 202, below the movable platform 201
It is fixedly connected with jacking block 203, the jacking block 203 has contact surface, such as is connected to activity by means of interconnecting piece 204d and puts down
On the lower surface of platform 201；Meanwhile push rod device 206 is fixedly installed on the fixed bottom plate 204, preferably electric pushrod fills
It sets, the push rod device has telescopic push rod 206a, with the contact surface for pushing tow jacking block 203, thus described in driving
Movable platform 201 is rotated relative to the fixed bottom plate 204.
To guarantee that push rod 206a can reliably the contact surface of pushing tow jacking block 203, the cross section of jacking block 203 be preferred always
It is arranged to swallow-tail form, thus its contact surface includes the planar section and/or curved sections that multistage is smoothly connected.Preferably, described to connect
Touching surface includes side plate bending 203b and planar section 203c and 203a positioned at the two sides side plate bending 203b or more, and push rod 206 is main
Want pushing tow side plate bending 203b.
Preferably, on the upper surface of fixed bottom plate 204, a pair of push rods dress is symmetrically provided in the two sides of jacking block 203
206 are set, and 203 two sides of jacking block also have symmetrical contact surface, thereby may be ensured that in both direction while pushing tow jacking block
203, to guarantee the accuracy and reliability of the turned position of movable platform 201.For example, when being located at the push rod 206a on right side to the left
(the push rod also retraction movement to the left in left side is simutaneously arranged) when stretching motion, and push rod 206a and the abutting of jacking block 203 just push
The upper part of first rotatable platform 20 along guide rail 202a and 202b slide, thus realize the first rotatable platform 20 around the side Y
To rotate clockwise, the rotational freedom of Y-direction is adjusted.
Wherein, which includes being connected to the push rod fixing seat 205 of the upper surface of fixed bottom plate 204, in the push rod
The electric pushrod being for example driven by motor is provided in fixing seat 205, wherein the push rod 206a in electric pushrod can be in electricity
Stretching motion is realized under the action of machine.
Preferably, the second arc-shaped guide rail 202b is crossed roller arc-shaped guide rail.
It will be appreciated by those skilled in the art that being based on identical structure and principle, second and third rotation also can be realized
Rotation of the platform rotating around X-direction and Z-direction.
Cheney according to the present invention-Tener light channel structure 40 is shown in FIG. 4, wherein the light channel structure includes: incidence
Slit 401, wherein continuous spectrum to be detected is entered in light channel structure by the entrance slit 401；Collimating mirror 402,
It receives the incident light from entrance slit 401 and is reflected as directional light；Diffraction grating 403, the diffraction grating 403 connect
The directional light reached makes diffraction light reach focusing mirror 404 after by its diffraction；Focusing mirror 404, focusing reflection
Mirror focuses on the monochromatic light of different wave length at the different location of focal plane 405；And it is flat with the ipsilateral coke of entrance slit 401
Face 405.
The multimode fibre adjusting seat 50 in the present invention is shown in figs. 5 a and 5 b, in Fig. 5 b in the multimode fibre adjusting seat
Multimode fibre 504 is installed.
Wherein the multimode fibre adjusting seat includes:
Fixing seat 501, such as right angle fixing seat, the multimode fibre adjusting seat 50 are connected to second via the fixing seat 501
It adjusts on the third rotatable platform 60 in device, fixing seat inner hole 501a is provided in the vertical section of the fixing seat 501；
Optical fiber installing pipe 505, first end is connected to the fixing seat 501, such as is ordinatedly mounted on fixing seat inner hole
In 501a, so that its second end 505d is towards the outlet of the Cheney-Tener light channel structure 40,504 gap of multimode fibre
It is ordinatedly mounted in the optical fiber installing pipe 505, the plane of incidence 504a of the multimode fibre 504 is located at optical fiber installation
The second end of pipe 505, so as to be weighed in order to be adjusted with focal plane towards the outlet of the Cheney-Tener light channel structure 40
It closes.
The annular convex platform outwardly protruded is equipped with outside optical fiber installing pipe 505, the end face of annular convex platform can be used for optical fiber
Installing pipe is limited itself.Optical fiber mounting hole 505b is equipped with inside optical fiber installing pipe 505, optical fiber mounting hole 505b setting exists
At second end, for ferrule 504b (referring to Fig. 6 a and 6b) clearance fit with multimode fibre 504.In addition to the optical fiber mounting hole
Except 505b, the rest part diameter of the inner hole 505c of optical fiber installing pipe becomes larger, in order to which optical fiber is without interferingly passing through.It is using
When the left end of optical fiber installing pipe 505 is inserted into the fixing seat inner hole 501a of fixing seat 501, dress between the two can be completed
Match.
Preferably, multimode fibre adjusting seat further includes interface flange 503 and hose 502.Wherein, interface flange 503 is preferred
It is connected to Cheney-Tener light channel structure 40 outlet side by threaded fastener, which has annular convex platform and method
Blue inner hole 503b, the second end of the optical fiber installing pipe 505 protrude into the inner hole 503b of the interface flange 503, and wherein this connects
The diameter of mouth flange inner hole 503b is greater than the diameter of the second end 505d of optical fiber installing pipe 505, so that optical fiber installing pipe 505
Radial position adjustment can be carried out relative to interface flange 503.The hose 502 is preferably opaque material and has good
Elasticity, the both ends of hose 502 are separately mounted at the boss of interface flange 503 and the boss of installing pipe 505, are set in the light
The periphery of fine installing pipe 505 can preferably process groove 503a on the boss radially-outer surface of interface flange 503, pacify
Groove 505a is processed on the radially-outer surface of the boss of tubulature 505, then the both ends of hose 502 can be fixed on two by cassette tape
A groove.
The right end of optical fiber installing pipe 505 is mounted in the inner hole 501a of fixing seat 501, is preferably also fixed by jackscrew
(not shown).When fixing seat 501 drives optical fiber installing pipe 505 to move, flexible motion is may be implemented in multimode fibre 504, passes through
The movement of each motion structure can make the incident end face 504a of multimode fibre 504 and Cheney-Tener light channel structure 40 coke flat
Face 405 is overlapped.
The end view and side structure schematic view of multimode fibre head according to the present invention are shown in Fig. 6 a and Fig. 6 b.Such as figure
Shown, the optical fiber plane of incidence 504a of multimode fibre 504 in distributed rectangular and is embedded in ferrule 504b, and wherein optical fiber is incident
The array quantity of optical fiber can be customized according to actual needs in plane 504a, but the size of optical fiber plane of incidence 504a need to be small
In the size of ferrule 504b.
The structure of the first translation platform 70 is shown in Fig. 7-8.In the present invention, the second translation platform 80 can have phase
Same mechanical structure, as an example, only the first translation platform 70 is described.
Specifically, which is to drive lead screw to rotate by motor so that pair of nut drives translation platform straight line
The mechanism of movement.This first translation platform include:
Support base 706 which is provided with linear guide 709, and it is used to be fixedly mounted first platform itself, and straight line is led
Rail 709 is fixedly mounted on support base 706 by means of guide support 705；
Be translatable platform 701, can slide along the linear guide 709, for example including guide rail slide block (not shown)；
Screw pair connects the support base 706 and the translation platform 701, including nut 702 and lead screw 703, example
Such as, nut 702 is fixed on translation 701 lower surface of platform, and lead screw 703 (is specifically included positioned at both ends via bearing support platform 707
Two bearing support platforms 707a and 707b) in bearing 708a and 708b rotatably support, bearing support platform 707 is fixedly connected on
On support base 706.One end of lead screw 703 is connected with motor 704.
When motor 704 rotates, lead screw 703 is driven to rotate, due to being that worm drive connect between nut 702 and lead screw 703
It connects, with the rotation of lead screw 703, the displacement on linearly can occur on lead screw 703 for nut 702, and then drive translation
Platform 701 is translatable in an x or y direction relative to support base 706.
The structure chart of the third translation platform 90 moved in Z-direction is shown in FIG. 9.Wherein third translation platform 90
Include: bottom plate 904, fixed plate 902, fixed support rod 903, third screw pair (including lead screw 907 and nut 906),
Nut support plate 909, third translation platform 901 and sliding supporting bar 908.Wherein, the fixed support rod 903 is installed on institute
It states on bottom plate 904, the fixed plate 902 is installed on the top of the fixed support rod 903, and three constitutes a stable frame
Frame structure.Lead screw 907 in the third screw pair is rotatably supported in the bottom plate 904 and the fixed plate
Between 902, motor 905 is connect in bottom end with the lead screw 907, and the nut 906 in the third screw pair is fixed on institute
It states on nut support plate 909, the sliding supporting bar 908 passes through the fixed plate 902, the sliding support with being slidably matched
The lower end of bar 908 is fixed on the nut support plate 909, and the third translation platform 901 is fixed on the sliding supporting bar 908
Upper end, nut support plate 909, third translation platform 901 and sliding supporting bar 908 also constitute a stable frame structure.
When motor 905 rotates, lead screw 907 is driven to rotate, due to being that worm drive connect between nut 906 and lead screw 907
It connects, with the rotation of lead screw 907, the displacement on along the vertical direction can occur on lead screw 907 for nut 906, and then drive nut
Support plate 909 and the third of connection fixed thereto translation platform 901 are translatable in z-direction.
The connection structure diagram between adjacent rotatable platform and/or translation platform is shown in FIG. 10.As an example, its
In show around Z-direction rotation third rotatable platform 60 and in X direction be translatable first translation platform 70 between connection knot
Composition.Wherein the area of the bottom surface (bottom surface of i.e. fixed bottom plate 604) of third rotatable platform 60 is less than mounting surface below
The area of (in this example, for the upper surface of the first translation platform 70) is threaded hole in the side of fixed bottom plate 604, and first
It is also threaded hole on the upper surface of the translation platform 701 of translation platform 70, can will be put down by right angle block 110a and 110b
Dynamic platform 701 is secured together with fixed bottom plate 604, that is, third rotatable platform 60 is fixed to the first translation platform 70.It is similar
Ground, the present invention in, optical platform 10 and around Y-direction rotation the first rotatable platform 20 between, around Y-direction rotation first turn
Moving platform 20 and around X-direction rotation the second rotatable platform 30 between, be translatable in X direction first translation platform 70 with along the side Y
To between the second translation platform 80 of translation, the second translation platform 80 and the third along Z-direction translation along Y-direction translation are translatable
Between platform 90, between the third translation platform 90 and firm banking 100 of Z-direction translation, firm banking 100 and optical platform
Between 10, etc., installation positioning can be carried out using this right angle block 110a, 110b.
The operating method of multimode fibre focal plane according to the present invention regulating device is described below.
When in use, the rotation around Y-direction and X-direction may be implemented by the first adjustment device, and passes through second adjustment
Device may be implemented around Z-direction and the translation on tri- directions XYZ, thus may be implemented between the two the 6 of 3 D stereo from
It is adjusted by degree, and then Cheney-Tener light channel structure focal plane can be made strictly to be overlapped with the realization of the plane of incidence of multimode fibre, with
Accurately acquire the spectral signal transmitted by Cheney-Tener light channel structure.
Those skilled in the art will readily recognize that above-mentioned each preferred embodiment can be free under the premise of not conflicting
Ground combination, superposition.
It should be appreciated that above-mentioned embodiment is merely exemplary, and not restrictive, without departing from of the invention basic
In the case where principle, those skilled in the art can be directed to the various apparent or equivalent modification or replace that above-mentioned details is made
It changes, is all included in scope of the presently claimed invention.
Claims (11)
1. a kind of multimode fibre focal plane regulating device for plasma detection, is used for the plane of incidence of multimode fibre
Be adjusted to and be overlapped with Cheney-Tener light channel structure outgoing focal plane, which is characterized in that including multimode fibre adjusting seat and
The first adjustment device and second adjustment device being set side by side, wherein the Cheney-Tener light channel structure is mounted on the first adjustment
On device, the multimode fibre adjusting seat is mounted on second adjustment device, the first adjustment device and the second adjustment
Device respectively has multiple freedom degrees, and the multimode fibre is accommodated in the multimode fibre adjusting seat, so that multimode fibre
For the plane of incidence towards the outlet of the Cheney-Tener light channel structure, the first adjustment device includes: that can rotate around first direction
The first adjustment component；It is mounted on second adjustment component on the first adjustment component, can rotating around second direction；Its
Described in first direction be different from the second direction, wherein the Cheney-Tener light channel structure is mounted on the second adjustment
On component.
2. regulating device according to claim 1, which is characterized in that the first adjustment component and/or second adjustment group
Part includes:
Bottom plate is fixed, is provided with the first arc-shaped guide rail on the fixed bottom plate；
Movable platform, the movable platform are provided with the second arc-shaped guide rail matched with first arc-shaped guide rail；
The jacking block being fixedly connected below the movable platform, the jacking block have contact surface；
The push rod device being fixedly mounted on the fixed bottom plate, the push rod device have telescopic push rod, the push rod
When the contact surface of jacking block described in pushing tow, the movable platform is driven to rotate relative to the fixed bottom plate.
3. regulating device according to claim 2, which is characterized in that the push rod device is electric pushrod device.
4. regulating device according to claim 2, which is characterized in that the contact surface include multistage be smoothly connected it is flat
Face section and/or curved sections.
5. regulating device according to claim 4, which is characterized in that the contact surface includes side plate bending and is located at described
The planar section of two sides above and below side plate bending.
6. regulating device according to claim 1, which is characterized in that the multimode fibre adjusting seat includes:
It is fixedly attached to the fixing seat of the second adjustment device；
Optical fiber installing pipe, first end are connected to the fixing seat, and second end goes out towards the Cheney-Tener light channel structure
Mouthful, it is mounted in the optical fiber installing pipe to the multimode fibre clearance fit, the plane of incidence of the multimode fibre is located at institute
State the second end of optical fiber installing pipe.
7. regulating device according to claim 6, which is characterized in that the multimode fibre adjusting seat further includes interface flange
And hose, wherein the interface flange is fixedly attached to the Cheney-Tener light channel structure outlet side, the optical fiber installation
The second end of pipe protrudes into the inner hole of the interface flange, and the outer diameter of the second end of the optical fiber installing pipe is less than the interface method
The diameter of blue inner hole, the hose are made of light-proof material, and the hose is set in the periphery of the optical fiber installing pipe, institute
The both ends for stating hose are connected respectively to the interface flange and the fixing seat.
8. regulating device described in one of -7 according to claim 1, which is characterized in that the second adjustment device includes:
Third adjusts component, can rotate around third direction, be equipped with the multimode fibre adjusting seat thereon；
First parallel moving mechanism can be translatable along first direction, be equipped with the third adjustment component thereon；
Second parallel moving mechanism, can be translatable in a second direction, be equipped with first parallel moving mechanism thereon；
Third parallel moving mechanism can be translatable along third direction, be equipped with second parallel moving mechanism thereon.
9. regulating device according to claim 8, which is characterized in that first parallel moving mechanism and/or described second flat
Motivation structure includes:
Support base which is provided with linear guide；
Be translatable platform, can slide along the linear guide；
Screw pair connects the support base and the translation platform.
10. regulating device according to claim 8, which is characterized in that the third parallel moving mechanism includes: bottom plate, fixation
Plate, fixed support rod, third screw pair, nut support plate, third translation platform and sliding supporting bar, wherein described
Fixed support rod is installed on the bottom plate, and the fixed plate is installed on the top of the fixed support rod, the third silk
Lead screw in thick stick pair of nut is rotatably supported between the bottom plate and the fixed plate, in the third screw pair
Nut be fixed on the nut support plate, the sliding supporting bar be slidably matched pass through the fixed plate, the cunning
The lower end of dynamic support rod is fixed on the nut support plate, and the third translation platform is fixed on the upper of the sliding supporting bar
End.
11. regulating device according to claim 8, which is characterized in that the area of the upper surface of first parallel moving mechanism
Greater than the area of the bottom surface of third adjustment component, the third adjustment component is fixedly installed to described first via right angle block
Parallel moving mechanism；
And/or the area of the bottom surface of any of first parallel moving mechanism, the second parallel moving mechanism and third parallel moving mechanism is less than it
The area of the mounting surface of lower section, thus its mounting surface for being fixedly installed to lower section via right angle block.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610973016.XA CN106550528B (en) | 2016-10-28 | 2016-10-28 | A kind of multimode fibre focal plane regulating device for plasma detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610973016.XA CN106550528B (en) | 2016-10-28 | 2016-10-28 | A kind of multimode fibre focal plane regulating device for plasma detection |
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| Publication Number | Publication Date |
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| CN106550528A CN106550528A (en) | 2017-03-29 |
| CN106550528B true CN106550528B (en) | 2019-03-26 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7016035B2 (en) * | 2003-09-25 | 2006-03-21 | General Electric Company | Fiber optical apparatus and system for in situ laser plasma spectroscopy |
| ES2401143R1 (en) * | 2011-04-07 | 2013-04-19 | Univ Madrid Complutense | DISCRIMINATION OF INDIVIDUALS FROM OSEO FABRIC USING LASER ABLATION SPECTROSCOPY AND MATHEMATICAL PROCEDURES. |
| KR20130087846A (en) * | 2012-01-30 | 2013-08-07 | 한국원자력연구원 | Detecting method and apparatus using laser-induced breakdown spectroscopy |
| CN103592025A (en) * | 2013-10-30 | 2014-02-19 | 清华大学 | Spectrum analysis system |
| CN104458665A (en) * | 2014-12-28 | 2015-03-25 | 冶金自动化研究设计院 | Measuring device and method for spectral spatial distribution in LIBS (Laser-Induced Breakdown Spectroscopy) component analysis |
-
2016
- 2016-10-28 CN CN201610973016.XA patent/CN106550528B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7016035B2 (en) * | 2003-09-25 | 2006-03-21 | General Electric Company | Fiber optical apparatus and system for in situ laser plasma spectroscopy |
| ES2401143R1 (en) * | 2011-04-07 | 2013-04-19 | Univ Madrid Complutense | DISCRIMINATION OF INDIVIDUALS FROM OSEO FABRIC USING LASER ABLATION SPECTROSCOPY AND MATHEMATICAL PROCEDURES. |
| KR20130087846A (en) * | 2012-01-30 | 2013-08-07 | 한국원자력연구원 | Detecting method and apparatus using laser-induced breakdown spectroscopy |
| CN103592025A (en) * | 2013-10-30 | 2014-02-19 | 清华大学 | Spectrum analysis system |
| CN104458665A (en) * | 2014-12-28 | 2015-03-25 | 冶金自动化研究设计院 | Measuring device and method for spectral spatial distribution in LIBS (Laser-Induced Breakdown Spectroscopy) component analysis |
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| CN106550528A (en) | 2017-03-29 |
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