CN105444993A - Optical system comprehensive performance tester - Google Patents
Optical system comprehensive performance tester Download PDFInfo
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- CN105444993A CN105444993A CN201410430593.5A CN201410430593A CN105444993A CN 105444993 A CN105444993 A CN 105444993A CN 201410430593 A CN201410430593 A CN 201410430593A CN 105444993 A CN105444993 A CN 105444993A
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Abstract
The invention discloses an optical system comprehensive performance tester which can realize focal distance measurement and light spot analysis (including off-axis light spot analysis) through one-time focusing and simplify measurement and debugging, and is of high measurement precision and a good light spot analysis effect. According to the structure of the optical system comprehensive performance tester, a light source, a light spot/light focus switching device, a parallel light tube, a tested optical system seat and a photoelectric receiver which are sequentially arranged on a main optical axis in the horizontal direction. The light source, the light spot/light focus switching device and the parallel light tube are fixed onto a round turntable for supplying on-axis light or off-axis light. The light spot/light focus switching device is disposed on the focal plane of the parallel light tube, includes a Perot plate, a star tester and a switching device, and is used for carrying out switching between the Perot plate and the start tester. The tested optical system seat is fixed. The photoelectric receiver is an area array photoelectric coupler, and is fixed on a translation stage.
Description
Technical field
The invention belongs to optical device field tests, more specifically, relate to a kind of optical system general performance test.
Background technology
Focal length is the most important parameter of optical system, and illuminating bundle then reflects the height of optical system imaging quality by the energy distribution of imaging facula after optical system, and both are the most basic marks of optical system.
The large multiplex focometer of focal length is measured.Glass sieve plate (being carved with the sheet glass of several transmissive slit known to interval) is placed on the focal plane of parallel light tube, in directional light after transmissive slit is illuminated, be imaged on the focal plane of tested optical system, then be imaged on the receiving plane of detector by the microcobjective of fixed multiplying power.Read the interval of slit image on the detector, try to achieve the focal length of tested optical system.The detector CCD of digital display, because be one-dimensional measurement, conventional is line array CCD.
Hot spot test gets focal beam spot with parallel beam tested optical system (laser beam of direct collimation or star tester is placed in focal surface of collimator tube generation directional light) formation in tested optical system of throwing light on, and focal plane photodetector being adjusted to tested optical system receives.Then must add precision fine motion device as received with photoelectric devices such as 4 quadrant detectors, reading process is moved in pointwise, and efficiency is low, and precision is low.
But, also to find out " node " when the hot spot instrument tested optical system of rotation and CCD measure the focal beam spot of axle outer optical illumination.Tested optical system is seldom thin lens, and when thick lens rotates, there is movement focal position, and amount of movement is not known, only just fixing around joint rotation amount.Mobile CCD receives to appropriate location, therefore accident axle outer hot spot during most speckle analysis.
Current focometry and speckle analysis need to measure through different optical instruments respectively, and Measurement and analysis process is complicated, and precision has much room for improvement.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides a kind of optical system general performance test, its object is on the measuring instrument of horizontal type structure by face battle array photoelectrical coupler (CCD), replace existing linear array photoelectrical coupler, adopt the eager changing device multiplexed light of hot spot/light simultaneously, solve existing hot spot or focometry system thus, function singleness, need repeatedly to focus and the not high technical matters of measuring accuracy
For achieving the above object, according to one aspect of the present invention, provide a kind of optical system general performance test, the primary optical axis of level is disposed with light source, the eager changing device of hot spot/light, parallel light tube, tested optical system seat and photelectric receiver;
Described light source, the eager changing device of hot spot/light and parallel light tube are fixed on circular turntable, for providing axle glazing or the outer light of axle;
The eager changing device of described hot spot/light, is arranged on parallel light tube focal plane, comprises glass sieve plate, star tester and switching device shifter, for switching between glass sieve plate and star tester;
Described tested optical system seat can be fixed;
Described photelectric receiver, is face battle array photoelectrical coupler, is fixed on translation stage.
Preferably, described optical system general performance test, its light source comprises lighting device, intensity adjustment device and wavelength selection system; The light that described lighting device produces, its light path is provided with intensity adjustment device and wavelength selection system.
Preferably, described optical system general performance test, its intensity adjustment device, comprises one or more attenuator.
Preferably, described optical system general performance test, its wavelength selection system is optical filter.
Preferably, described optical system general performance test, when described optical system general performance test is in focometry state, described light source, the eager changing device of hot spot/light and parallel light tube provide axle glazing, and the eager changing device of hot spot/light switches to glass sieve plate; When described optical system general performance test is in speckle analysis state, described light source, the eager changing device of hot spot/light and parallel light tube provide axle glazing or the outer light of axle, and the eager changing device of hot spot/light switches to star tester.
Preferably, described optical system general performance test, described glass sieve plate is slit glass sieve plate, it has paired groove, and often pair of groove interval is known.
Preferably, described optical system general performance test, star tester described in it is opaque optical device primary optical axis having printing opacity aperture, and its hole diameter is between 0.1mm to 0.5mm.
In general, the above technical scheme conceived by the present invention compared with prior art, can obtain following beneficial effect:
(1) owing to present invention achieves path multiplexing, therefore by once focusing, focometry and speckle analysis can be realized.Focus respectively relative to prior art thus focal length measurement and analysis hot spot, the technical scheme running cost that the present invention conceives and manufacturing cost all significantly reduce;
(2) the present invention adopts horizontal key light shaft design, photelectric receiver setting range is large, and light source and photelectric receiver can adjust, shorten the focal length measuring equipment of areas imaging perpendicular through microcobjective relative to existing primary optical axis, achieve the multiplexing of focal length optical system for testing and speckle analysis light path, can provide axle outer light due to light source can be adjusted simultaneously, instead of adopt receiver to accept the mode of deflection simulation, the therefore outer speckle analysis more true and accurate of axle;
(3) when installing, tested optical system can not avoid setting angle deviation, tester disclosed by the invention, can evade setting angle error after tested, thus improves measuring accuracy, reduces installation requirement, and debugging is convenient.
(4) the present invention is when carrying out speckle analysis, and because photelectric receiver has been positioned on the focal plane of system under test (SUT), therefore imaging effect is good, and measuring accuracy is high, and analysis speed is fast.
Accompanying drawing explanation
Fig. 1 is optical system general performance test structural representation provided by the invention;
Fig. 2 is optical system general performance test provided by the invention index path when carrying out focometry;
Fig. 3 is hot spot/light eager changing device connect-disconnect structure schematic diagram;
Fig. 4 is that embodiment 2 carries out CCD imaging when focal length is tested;
Fig. 5 is that embodiment 3 hot spot tests the focal beam spot obtained;
Fig. 6 is that embodiment 3 hot spot tests the focal beam spot energy profile obtained;
Fig. 7 is that embodiment 3 hot spot tests the outer hot spot of the axle obtained;
Fig. 8 is that embodiment 3 hot spot tests the outer spot energy distribution figure of the axle obtained.
In all of the figs, identical Reference numeral is used for representing identical element or structure, and wherein: 1 is light source, 2 is the eager changing device of hot spot/light, 3 is parallel light tube, and 4 is tested optical system seat, and 5 is photelectric receiver, 6 is circular turntable, and 7 is translation stage, and 8 is optical table, 9 is guide rail, and 11 is lighting device, and 12 is intensity adjustment device, 13 is wavelength selection system, and 21 is glass sieve plate, and 22 is star tester, 23 is switching device shifter, and 31 is collimation lens, and 41 is tested optical system.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
Optical system general performance test provided by the invention, as shown in Figure 1, the primary optical axis of level is disposed with light source 1, the eager changing device of hot spot/light 2, parallel light tube 3, tested optical system seat 4 and photelectric receiver 5.
The eager changing device 2 of described light source 1, hot spot/light and parallel light tube 3 are fixed on circular turntable 6, for providing axle glazing or the outer light of axle.
Described light source 1 comprises lighting device 11, intensity adjustment device 12 and wavelength selection system 13.The light that described lighting device 11 produces, its light path is provided with intensity adjustment device 12 and wavelength selection system 13.Described lighting device 11, the lighting device 11 that preferably energy is adjustable, makes that photelectric receiver 5 has response.Preferably, described lighting device 11, with condenser, can form uniform illumination bright to ensure hot spot/light eager changing device 2 maintaining uniform illumination.The energy of the different wave spectrum of wide spectral lighting device 11 differs, and the energy of general visible ray is comparatively large, and the amount of infrared light is less, regulates the source current of lighting device 11 to realize energy adjusting.Described intensity adjustment device 12, comprises one or more attenuator, when lighting device 11 energy is too large, uses attenuator that light intensity is in photelectric receiver 5 sensitive volume.Attenuator can insert light path easily or release light path to reduce energy.Described wavelength selection system 13, for selecting the bandwidth of lighting device 11, is preferably optical filter.Survey different wave length by broad spectrum light source or the monochromatic source with several different wave length, add different-waveband optical filter.The conventional optical filter having wavelength 540nm, for green light source; The optical filter of wavelength 632.8nm, for helium class laser light source; The optical filter of wavelength 880nm is the optical filter of light field common wavelengths, wavelength 1064nm, is conventional near infrared light.
The eager changing device 2 of described hot spot/light, is arranged on parallel light tube 3 focal plane, comprises glass sieve plate 21, star tester 22 and switching device shifter 23, for switching between glass sieve plate 21 and star tester 22.Described glass sieve plate 21 is that glass sieve plate 21 has paired groove, and often pair of groove interval is known, and described glass sieve plate is preferably slit glass sieve plate.Described star tester 22 is opaque optical device primary optical axis having printing opacity aperture, and its hole diameter is between 0.1mm to 0.5mm.Described switching device shifter 23 is for glass sieve plate 21, and micro-displacement major requirement groove during reset can not tilt.Calculate when focometry relative error is 0.1% and allow inclination 0.5 °, splice by glass sieve plate 21 and asterism half-plane, hinged or plug and the mode such as to switch and realize.
Described tested optical system seat 4 can be fixed, and can be lens folder, and lens folder is accurate standard component, and several one group, for pressing from both sides the lens of different-diameter, it can ensure lens and optical axis concentricity, share very convenient.Because being parallel beam before measured lens, tested optical system 41 is to the distance no requirement (NR) of parallel light tube 3, and in order to compact conformation, distance should be little.
Described photelectric receiver 5, is fixed on translation stage 7.Described translation stage 7 can drive photelectric receiver 5 along primary optical axis to-and-fro movement, perpendicular to primary optical axis translation.Described photelectric receiver 5, because surveying two dimensional spot, and needs the energy variation of fine unit, preferred face battle array photoelectrical coupler (CCD).The spectral response range of CCD is determined by measurement range, and generally from visible ray near infrared, (1064um) has response.Described CCD picture dot size is even, and responsiveness is even.CCD picture dot is little, and resolution is high, and picture dot number is good at most.
During work, tested optical system 41 is fixed on the tested optical system seat 4 of optical system general performance test, the primary optical axis of tested optical system 41 is overlapped with the primary optical axis of optical system general performance test, carries out focometry and speckle analysis successively.
When carrying out focometry, the eager changing device 2 of described light source 1, hot spot/light and parallel light tube 3 provide axle glazing, and the eager changing device 2 of hot spot/light switches to glass sieve plate 21.Photelectric receiver 5 is moved, until photelectric receiver 5 obtains glass sieve plate 21 groove imaging clearly along primary optical axis.Now optical system for testing as shown in Figure 2.
On glass sieve plate 21, the distance of a pair groove is known, and numerical value is y, measure groove on CCD corresponding as its interval y', the focal length of the collimation lens 31 of parallel light tube 3 is known, is f'
c, then tested optical system 41 focal distance f ' according to the following formula calculate:
When focal length measurement, in the many groups groove imaging on CCD, the maximum groove of chosen distance, as interval y', makes measuring error minimum.
When carrying out speckle analysis, by adjustment circular turntable 6, make the eager changing device 2 of affiliated light source 1, hot spot/light and parallel light tube 3 provide axle glazing or the outer light of axle, the eager changing device 2 of hot spot/light switches to star tester 22.Aperture on star tester 22, on the focal plane of measured lens, imaging should be round spot, i.e. a hot spot.Desirable optical system spot energy distribution should become Airy disk or Gaussian distribution.Photelectric receiver 5 can measure the luminous energy of focal beam spot each point, shows its image quality.When surveying hot spot on axle, circular turntable makes zero, and because CCD after carrying out focometry is on the focal plane of tested optical system 41, the energy now on CCD directly shows focal beam spot energy distribution; When surveying hot spot outside axle, circular turntable rotates the angle of specifying, and focal beam spot not only energy distribution is different, and there is translation position.Therefore adjust translation stage 7, CCD is moved horizontally perpendicular to primary optical axis on the focal plane of tested optical system, and to hot spot at the range of receiving being in photelectric receiver 5, the energy now on CCD directly shows focal beam spot energy distribution.
The outer speckle analysis technology of existing axle adopts tested optical system 41 and sonde rotary, and not around joint rotation, thus use the mode of approaching the outer light of axle, the outer hot spot of analysis axis.Unlike this, the present invention is owing to being tilt to measure the outer hot spot of axle with illuminating bundle, and it meets the definition of the outer hot spot of axle, does not need to look for node, simple and realistic requirement, the outer speckle analysis result more true and accurate of axle.
First the present invention is be the key character of optical system two different aspects based on focal length and hot spot, reflects the character of optical system simultaneously, ites is desirable to measure simultaneously.Secondly, both receiving planes are all on focal plane, and measure each, the determination (" focusing " or " focusing ") of position of focal plane is all important step, and especially to facula measurement, position of focal plane determines that difficulty is larger.And this comprehensive instrument, once finding focal plane when surveying focal length, two kinds of measurements can be completed, saved the time, improve precision.
Be below embodiment:
Embodiment 1
A kind of optical system general performance test, as shown in Figure 1, on optical table 8, according to the primary optical axis of level, is disposed with light source 1, the eager changing device of hot spot/light 2, parallel light tube 3, tested optical system seat 4 and photelectric receiver 5.
Described parallel light tube 3 collimation lens 31 focal length is 300mm.
The eager changing device 2 of described light source 1, hot spot/light and parallel light tube 3 are fixed on circular turntable 6, for providing axle glazing or the outer light of axle.Circular turntable 6 has translation adjustment platform.
Described light source 1 comprises bulb, attenuator 12 and optical filter 13.The light that described bulb produces, its light path is disposed with attenuator 12 and optical filter 13.
The eager changing device 2 of described hot spot/light, is arranged on parallel light tube 3 focal plane, comprises glass sieve plate 21, star tester 22 and switching device shifter 23, for switching between glass sieve plate 21 and star tester 22.Described glass sieve plate 21 is that glass sieve plate 21 has 4 right grooves, and often pair of groove interval is respectively 26.004mm, 13.002mm, 5.997mm and 2.800mm, and described glass sieve plate is slit glass sieve plate.Described star tester 22 is opaque optical device primary optical axis having printing opacity aperture, and its hole diameter is 0.1mm.Described switching device shifter 23 is for glass sieve plate 21, and micro-displacement major requirement groove during reset can not tilt.Calculate when focometry relative error is 0.1% and allow inclination 0.5 °.Conversion equipment adopts connect-disconnect structure, be illustrated in figure 3 and comprise external member base, when the glass sieve plate 21 matched with it or star tester 22 are loaded on external member base by the mode of inserted sheet, on the focus that star tester 22 or glass sieve plate 21 are positioned at parallel light tube 3 collimation lens 31 or focal plane.
Described tested optical system seat 4 is fixed, and can be lens folder, height adjustable.
Described photelectric receiver 5 is area array CCD, is fixed on translation stage 7.Described translation stage 7 can drive photelectric receiver 5 perpendicular to primary optical axis translation.Belonging to the spectral response range of CCD from visible ray to infrared light, picture dot 3.75 μm, size 1/3 inch.
Described optical system general performance test adopts the horizontal type guide rail 9 parallel with primary optical axis; The described translation stage 7 being fixed with photelectric receiver 5 arranges on the rail 9, along guide rail 9 to-and-fro movement.
Embodiment 2
Optical system general performance test in Application Example 1, measures the focal length of measured lens.
(1) wavelength be suitable for according to tested optical system 41 inserts color filter and attenuator:
Select wavelength to be the optical filter of 540nm, insert attenuator.
(2) by eager for described hot spot/light changing device 2, glass sieve plate 21 is switched to.
(3) measured lens is fixed on tested optical system seat 4, and regulator height.
(4) open the light source 1 power supply, and CCD is moved on motorized rails 9, until glass sieve plate 21 score line imaging clearly.
Index path as shown in Figure 2.
On described CCD, imaging as shown in Figure 4.
Measure: on glass sieve plate 21, the distance of a pair groove is known, and numerical value is y=5.997mm, measure groove on CCD corresponding as its interval y'=4.200mm, the focal length of the collimation lens 31 of parallel light tube 3 is known, is f'
c=300 ± 0.3mm, then tested optical system 41 focal distance f ' according to the following formula calculate:
Obtain tested optical system 41 focal distance f '=210.1 ± 0.3mm
Embodiment 3
Optical system general performance test in Application Example 1, measures the focal beam spot of measured lens.
After the step of embodiment 2, proceed as follows:
(5) take out glass sieve plate 21, insert star tester 22;
(6) process the signal that CCD receives, obtain:
Focal beam spot as shown in Figure 5; Focal beam spot energy distribution as shown in Figure 6.
(7) to outer 1 °, the light inclination angle of dead axle, circular turntable 6 rotates 1 °, provides axle outer light, and translation translation stage receives the outer hot spot of axle to CCD.
The outer light hot spot of axle as shown in Figure 7; Energy distribution as shown in Figure 8.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1. an optical system general performance test, it is characterized in that, the primary optical axis of level is disposed with light source (1), the eager changing device of hot spot/light (2), parallel light tube (3), tested optical system seat (4) and photelectric receiver (5);
Described light source (1), the eager changing device of hot spot/light (2) and parallel light tube (3) are fixed on circular turntable (6), for providing axle glazing or the outer light of axle;
The eager changing device of described hot spot/light (2), be arranged on parallel light tube (3) focal plane, comprise glass sieve plate (21), star tester (22) and switching device shifter (23), for switching between glass sieve plate (21) and star tester (22);
Described photelectric receiver (5), is face battle array photoelectrical coupler, is fixed on translation stage (7).
2. optical system general performance test as claimed in claim 1, it is characterized in that, described light source (1) comprises lighting device (11), intensity adjustment device (12) and wavelength selection system (13); Described lighting device (11), for producing light, its light path is provided with intensity adjustment device (12) and wavelength selection system (13).
3. optical system general performance test as claimed in claim 2, it is characterized in that, described intensity adjustment device (12), comprises one or more attenuator.
4. optical system general performance test as claimed in claim 2, it is characterized in that, described wavelength selection system (13) is optical filter.
5. optical system general performance test as claimed in claim 1, it is characterized in that, when described optical system general performance test is in focometry state, described light source (1), the eager changing device of hot spot/light (2) and parallel light tube (3) provide axle glazing, and the eager changing device of hot spot/light (2) switches to glass sieve plate (21); When described optical system general performance test is in speckle analysis state, described light source (1), the eager changing device of hot spot/light (2) and parallel light tube (3) provide axle glazing or the outer light of axle, and the eager changing device of hot spot/light (2) switches to star tester (22).
6. optical system general performance test as claimed in claim 1, it is characterized in that, described glass sieve plate (21) is slit glass sieve plate (21), it has paired groove, and often pair of groove interval is known.
7. optical system general performance test as claimed in claim 1, it is characterized in that, described star tester (22) is for primary optical axis there being the opaque optical device of printing opacity aperture, and its hole diameter is between 0.1mm to 0.5mm.
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| CN109297927A (en) * | 2018-08-21 | 2019-02-01 | 深圳市太赫兹科技创新研究院 | The debugging device and method of spectrometer |
| CN110161486A (en) * | 2019-07-03 | 2019-08-23 | 南昌航空大学 | A kind of device of testing laser radar lens performance |
| CN112683494A (en) * | 2020-12-03 | 2021-04-20 | 西安科佳光电科技有限公司 | Device and method for testing comprehensive performance parameters of optical lens |
| CN112904171A (en) * | 2021-01-19 | 2021-06-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | Four-quadrant photoelectric detector test system and test method |
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