CN105444993B - A kind of optical system general performance test - Google Patents
A kind of optical system general performance test Download PDFInfo
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- CN105444993B CN105444993B CN201410430593.5A CN201410430593A CN105444993B CN 105444993 B CN105444993 B CN 105444993B CN 201410430593 A CN201410430593 A CN 201410430593A CN 105444993 B CN105444993 B CN 105444993B
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Abstract
The invention discloses a kind of optical system general performance test, can once focus and realize speckle analysis outside focometry and speckle analysis, including axis, simplifies measurement and debugging process, while high certainty of measurement, speckle analysis effect are good.The structure of the optical system general performance test is：Light source, hot spot/light focus switching device, parallel light tube, tested optical system seat and photelectric receiver are disposed with horizontal primary optical axis；The light source, hot spot/light focus switching device and parallel light tube are fixed on circular turntable, for providing light outside axis glazing or axis；The hot spot/light focus switching device, is arranged on parallel light tube focal plane, including glass sieve plate, star tester and switching device, for switching between glass sieve plate and star tester；The tested optical system seat is fixed；The photelectric receiver, is face battle array photoelectrical coupler, is fixed on translation stage.
Description
Technical field
The invention belongs to optical device testing field, more particularly, to a kind of optical system general performance test.
Background technology
Focal length is the most important parameter of optical system, and illuminating bundle passes through the Energy distribution of imaging facula after optical system
The height of optical system imaging quality is then reflected, both are the most basic marks of optical system.
Focal length focometer measurement multi-purpose greatly.Glass sieve plate (being carved with several plate glass to transmissive slit known to interval) is placed in
On the focal plane of parallel light tube, it is in directional light after transmissive slit is illuminated, is imaged on the focal plane of tested optical system, then by solid
The microcobjective for determining multiplying power is imaged on the receiving plane of detector.The interval of slit image is read on the detector, tries to achieve tested light
The focal length of system.The detector CCD of digital display, because being one-dimensional measurement, common is line array CCD.
Hot spot test is to illuminate tested optical system with collimated light beam (directly to put with the laser beam of collimation or by star tester
Produce directional light in focal surface of collimator tube) formed in tested optical system and take focal beam spot, by photodetector be adjusted to by
Received on the focal plane of photometry system.It must add precision fine motion device if being received with photoelectric devices such as 4 quadrant detectors, by
The mobile reading processing of point, efficiency is low, and precision is low.
But also to be found out when the tested optical system of hot spot instrument rotation and the focal beam spot of the outer optical illumination of CCD measurement axis
" node ".Tested optical system is seldom thin lens, and there is movement in focal position during thick lens rotation, and amount of movement is not known,
It is only just fixed around joint rotation amount.Mobile CCD is received to appropriate location, therefore accident axis outer hot spot during most speckle analysis.
Current focometry and speckle analysis need to measure through different optical instruments respectively, and measurement analytic process is answered
Miscellaneous, precision has much room for improvement.
The content of the invention
For the disadvantages described above or Improvement requirement of the prior art, the present invention provides a kind of optical system all-round property testing
Instrument, its object is on the measuring instrument of horizontal type structure by face battle array photoelectrical coupler (CCD), instead of existing linear array photoelectricity coupling
Clutch, while hot spot/light focus switching device multiplexed light is used, thus solve existing hot spot or focometry system, function
It is single, it is necessary to repeatedly focusing and the not high technical problem of measurement accuracy
To achieve the above object, one side according to the invention, there is provided a kind of optical system general performance test,
Light source, hot spot/light focus switching device, parallel light tube, tested optical system seat and light are disposed with horizontal primary optical axis
Electric receiver；
The light source, hot spot/light focus switching device and parallel light tube are fixed on circular turntable, for providing axis glazing or axis
Outer light；
The hot spot/light focus switching device, is arranged on parallel light tube focal plane, including glass sieve plate, star tester and switching
Device, for switching between glass sieve plate and star tester；
The tested optical system seat can be fixed；
The photelectric receiver, is face battle array photoelectrical coupler, is fixed on translation stage.
Preferably, the optical system general performance test, its light source include lighting device, intensity adjustment device and ripple
Long selection device；The light that the lighting device produces, is provided with intensity adjustment device and wavelength selection system in its light path.
Preferably, the optical system general performance test, its intensity adjustment device, including one or more decay
Piece.
Preferably, the optical system general performance test, its wavelength selection system are optical filter.
Preferably, the optical system general performance test, when the optical system general performance test is in Jiao
During away from measuring state, the light source, hot spot/light focus switching device and parallel light tube provide axis glazing, hot spot/light focus switching device
It is switched to glass sieve plate；When the optical system general performance test is in speckle analysis state, the light source, hot spot/light
Eager changing device and parallel light tube provide axis glazing or the outer light of axis, hot spot/light focus switching device are switched to star tester.
Preferably, the optical system general performance test, glass sieve plate are slit glass sieve plate, are had thereon paired
Groove, known to each pair groove interval.
Preferably, the optical system general performance test, its described star tester are to have printing opacity aperture on primary optical axis
Opaque optics, its hole diameter is in 0.1mm between 0.5mm.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it can obtain down and show
Beneficial effect：
(1) since the present invention realizes path multiplexing, by once focusing, you can realize focometry and hot spot point
Analysis.Focus respectively relative to the prior art so as to focal length measurement and analysis hot spot, the contemplated technical solution operation of the present invention into
This and manufacture cost are all greatly reduced；
(2) present invention uses horizontal key light shaft design, and photelectric receiver adjusting range is big, and light source and photelectric receiver
It can adjust, shorten the focal length measuring equipment of areas imaging perpendicular through microcobjective relative to existing primary optical axis, realize
The multiplexing of focal length optical system for testing and speckle analysis light path, can provide axis outer light simultaneously because light source can be adjusted, rather than uses and connect
Receive the mode that device receives deflection simulation, therefore the outer speckle analysis more true and accurate of axis；
(3) when installing, tested optical system is not avoided that setting angle deviation, tester disclosed by the invention, after tested
Setting angle error can be evaded, so as to improve measurement accuracy, reduce installation requirement, debugging is convenient.
(4) present invention is when carrying out speckle analysis, since photelectric receiver is had been located on the focal plane of system under test (SUT),
Imaging effect is good, high certainty of measurement, and analyze speed is fast.
Brief description of the drawings
Fig. 1 is optical system general performance test structure diagram provided by the invention；
Fig. 2 is that optical system general performance test provided by the invention carries out index path during focometry；
Fig. 3 is hot spot/light focus switching device connect-disconnect structure schematic diagram；
Fig. 4 is that embodiment 2 carries out CCD imagings during focal length test；
Fig. 5 is the focal beam spot that 3 hot spot of embodiment is tested；
Fig. 6 is the focal beam spot energy profile that 3 hot spot of embodiment is tested；
Fig. 7 is the outer hot spot of axis that 3 hot spot of embodiment is tested；
Fig. 8 is the outer spot energy distribution figure of axis that 3 hot spot of embodiment is tested.
In all of the figs, identical reference numeral is used for representing identical element or structure, wherein：1 is light source, and 2 are
Hot spot/light focus switching device, 3 be parallel light tube, and 4 be tested optical system seat, and 5 be photelectric receiver, and 6 be circular turntable, and 7 be flat
Moving stage, 8 be optical table, and 9 be guide rail, and 11 be lighting device, and 12 be intensity adjustment device, and 13 be wavelength selection system, and 21 are
Glass sieve plate, 22 be star tester, and 23 be switching device, and 31 be collimation lens, and 41 be tested optical system.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, it is right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below
Not forming conflict each other can be mutually combined.
Optical system general performance test provided by the invention, as shown in Figure 1, being set gradually on horizontal primary optical axis
There are light source 1, hot spot/light focus switching device 2, parallel light tube 3, tested optical system seat 4 and photelectric receiver 5.
The light source 1, hot spot/light focus switching device 2 and parallel light tube 3 are fixed on circular turntable 6, for providing axis glazing
Or the outer light of axis.
The light source 1 includes lighting device 11, intensity adjustment device 12 and wavelength selection system 13.The lighting device 11
The light of generation, is provided with intensity adjustment device 12 and wavelength selection system 13 in its light path.The lighting device 11, is desirable to
Measure adjustable lighting device 11 so that have response on photelectric receiver 5.Preferably, the lighting device 11 carries condenser, energy
Uniform light illumination is formed to ensure hot spot/2 maintaining uniform illumination of light focus switching device.The energy of the different wave spectrums of wide spectrum lighting device 11
Differ, the energy of general visible ray is larger, and the amount of infrared light is smaller, adjusts the source current of lighting device 11 and can realize energy tune
It is whole.The intensity adjustment device 12, including one or more attenuators, when 11 energy of lighting device is too big, use attenuator
So that light intensity is in 5 sensitive volume of photelectric receiver.Attenuator can easily be inserted into light path or release light path to reduce energy.
The wavelength selection system 13, is preferably optical filter for selecting the bandwidth of lighting device 11.That surveys different wave length uses wide spectrum
Light source or the monochromatic source with several different wave lengths, add different-waveband optical filter.The common optical filter for having wavelength 540nm, is used
In green light source；The optical filter of wavelength 632.8nm, for helium class laser light source；The optical filter of wavelength 880nm, leads for light
The optical filter of domain common wavelengths, wavelength 1064nm, to commonly use near infrared light.
The hot spot/light focus switching device 2, is arranged on 3 focal plane of parallel light tube, including glass sieve plate 21, star tester 22
And switching device 23, for switching between glass sieve plate 21 and star tester 22.Glass sieve plate 21 is paired to have on glass sieve plate 21
Groove, each pair groove interval is it is known that glass sieve plate is preferably slit glass sieve plate.The star tester 22 is to have on primary optical axis
The opaque optics of light aperture, its hole diameter is in 0.1mm between 0.5mm.The switching device 23 is for glass sieve plate
21, micro-displacement major requirement groove during reset cannot tilt.Calculate focometry relative error be 0.1% when allow to incline
Oblique 0.5 °, it can splice, be hinged or plug the modes such as switching with asterism half-plane by glass sieve plate 21 and realize.
The tested optical system seat 4 can be fixed, and can be that lens press from both sides, lens folder is quasi- standard component, several one groups, for pressing from both sides
The lens of different-diameter, it can ensure lens degree of being concentric with the optical axis, and share very convenient.Because being directional light before measured lens
Beam, is tested optical system 41 to parallel light tube 3 apart from no requirement (NR), in order to compact-sized, distance is preferably small.
The photelectric receiver 5, is fixed on translation stage 7.The translation stage 7 can drive photelectric receiver 5 along primary optical axis
Move back and forth, translated perpendicular to primary optical axis.The photelectric receiver 5, because of two dimensional spot to be surveyed, and needs the energy of fine unit
Change, preferably face battle array photoelectrical coupler (CCD).The spectral response range of CCD determines by measurement range, generally from visible ray near
Infrared (1064um) has response.The CCD picture dots are uniform in size, and responsiveness is uniform.CCD picture dots are small, high resolution, and picture dot number is more
It is then good.
During work, tested optical system 41 is fixed on the tested optical system seat 4 of optical system general performance test,
So that the key light overlapping of axles of the primary optical axis and optical system general performance test of tested optical system 41, carries out focal length survey successively
Amount and speckle analysis.
When carrying out focometry, the light source 1, hot spot/light focus switching device 2 and parallel light tube 3 provide axis glazing, light
Spot/light focus switching device 2 is switched to glass sieve plate 21.Photelectric receiver 5 is set to be moved along primary optical axis, until photelectric receiver 5 obtains
Clearly 21 groove of glass sieve plate is imaged.Optical system for testing is as shown in Figure 2 at this time.
The distance of a pair of of groove is it is known that numerical value be y on glass sieve plate 21, and it is corresponding as its interval y' to measure groove on CCD, flat
The focal length of the collimation lens 31 of row light pipe 3 is it is known that be f'c, then be tested optical system 41 focal length f' calculate according to the following formula：
In focal length measurement, in multigroup groove imaging on CCD, the groove of chosen distance maximum makes as interval y'
It is minimum to obtain measurement error.
Carry out speckle analysis when, by adjusting circular turntable 6 so that affiliated light source 1, hot spot/light focus switching device 2 with it is parallel
Light pipe 3 provides axis glazing or the outer light of axis, hot spot/light focus switching device 2 are switched to star tester 22.Aperture on star tester 22,
Imaging should be a round spot, i.e. hot spot on the focal plane of measured lens.Preferable optical system spot energy distribution should be into
Airy or Gaussian Profile.Photelectric receiver 5 can measure the luminous energy of focal beam spot each point, show its image quality.When on survey axis
During hot spot, circular turntable zero, since CCD is on the focal plane of tested optical system 41 after carrying out focometry, at this time on CCD
Energy directly display focal beam spot Energy distribution；When surveying hot spot outside axis, circular turntable rotates the angle specified, and focal beam spot is not only
Energy distribution is different, and there is translation in position.Therefore adjustment translation stage 7 so that CCD hangs down on the focal plane of tested optical system
Directly move horizontally in primary optical axis, to hot spot in the range of receiving in photelectric receiver 5, the energy on CCD is directly aobvious at this time
Show focal beam spot Energy distribution.
The outer speckle analysis technology of existing axis, is using tested optical system 41 and sonde rotary, without turning around node
It is dynamic, thereby using the mode for approaching light outside axis, the outer hot spot of analysis axis.Unlike this, the present invention is due to being tilted with illuminating bundle
To measure the outer hot spot of axis, it meets the definition of the outer hot spot of axis, it is not necessary to and node is looked for, simply meets actual requirement, the outer hot spot of axis
Analysis result more true and accurate.
The key character that it is two different aspects of optical system based on focal length and hot spot that the present invention is first, reflects at the same time
The property of optical system, it would be desirable to measure at the same time.Secondly, both receiving planes are all on focal plane, to each measurement, focal plane
Position determines that (" focusing " or " focusing ") is all important step, and especially to facula measurement, position of focal plane determines that difficulty is larger.And
This comprehensive instrument, focal plane is once found when surveying focal length, can be completed two kinds of measurements, saved the time, improved precision.
It is embodiment below：
Embodiment 1
A kind of optical system general performance test, as shown in Figure 1, on optical table 8, according to horizontal primary optical axis,
It is disposed with light source 1, hot spot/light focus switching device 2, parallel light tube 3, tested optical system seat 4 and photelectric receiver 5.
3 collimation lens of parallel light tube, 31 focal length is 300mm.
The light source 1, hot spot/light focus switching device 2 and parallel light tube 3 are fixed on circular turntable 6, for providing axis glazing
Or the outer light of axis.Circular turntable 6 has translation adjustment platform.
The light source 1 includes light bulb, attenuator 12 and optical filter 13.The light that the light bulb produces, sets in its light path successively
It is equipped with attenuator 12 and optical filter 13.
The hot spot/light focus switching device 2, is arranged on 3 focal plane of parallel light tube, including glass sieve plate 21, star tester 22
And switching device 23, for switching between glass sieve plate 21 and star tester 22.Glass sieve plate 21 is to have 4 pairs on glass sieve plate 21
Groove, each pair groove interval are respectively 26.004mm, 13.002mm, 5.997mm and 2.800mm, and glass sieve plate is slit glass
Sieve plate.For the star tester 22 to there is the opaque optics of printing opacity aperture on primary optical axis, its hole diameter is 0.1mm.It is described
For glass sieve plate 21, micro-displacement major requirement groove during reset cannot tilt switching device 23.Calculate to obtain focometry phase
Allow to tilt 0.5 ° when being 0.1% to error.Conversion equipment uses connect-disconnect structure, is illustrated in figure 3 including external member base, when with
When its matched glass sieve plate 21 or star tester 22 are loaded in by way of inserted sheet on external member base, star tester 22 or glass sieve plate
21 in the focus of 3 collimation lens 31 of parallel light tube or focal plane.
The tested optical system seat 4 is fixed, and can be that lens press from both sides, highly adjustable.
The photelectric receiver 5 is area array CCD, is fixed on translation stage 7.The translation stage 7 can drive photelectric receiver 5
Translated perpendicular to primary optical axis.The spectral response range of affiliated CCD is from visible ray to infrared light, 3.75 μm of picture dot, 1/3 English of size
It is very little.
The optical system general performance test uses the horizontal type guide rail 9 parallel with primary optical axis；It is described to be fixed with light
The translation stage 7 of electric receiver 5 is set on the rail 9, is moved back and forth along guide rail 9.
Embodiment 2
Optical system general performance test in Application Example 1, measures the focal length of measured lens.
(1) according to tested optical system 41 applicable wavelength insertion colour filter and attenuator：
Optical filter of the wavelength for 540nm is selected, is inserted into attenuator.
(2) by the hot spot/light focus switching device 2, it is switched to glass sieve plate 21.
(3) measured lens are fixed on tested optical system seat 4, and adjuster height.
(4) open the light 1 power supply of source, CCD is moved on motorized rails 9, until 21 score line imaging clearly of glass sieve plate.
Index path is as shown in Figure 2.
It is imaged on the CCD as shown in Figure 4.
Measure：The distance of a pair of of groove measures groove pair on CCD it is known that numerical value is y=5.997mm on glass sieve plate 21
Its interval of the picture answered y'=4.200mm, the focal length of the collimation lens 31 of parallel light tube 3 is it is known that be f'c=300 ± 0.3mm, then
The focal length f' of tested optical system 41 is calculated according to the following formula：
Obtain focal length f'=210.1 ± 0.3mm of tested optical system 41
Embodiment 3
Optical system general performance test in Application Example 1, measures the focal beam spot of measured lens.
After the step of embodiment 2, proceed as follows：
(5) glass sieve plate 21 is taken out, is inserted into star tester 22；
(6) CCD received signals are handled, are obtained：
Focal beam spot is as shown in Figure 5；Focal beam spot Energy distribution is as shown in Figure 6.
(7) give dead axle outer 1 ° of light inclination angle, circular turntable 6 rotates 1 °, there is provided the outer light of axis, translation translation stage to CCD receive axis
Outer hot spot.
The outer light hot spot of axis is as shown in Figure 7；Energy distribution is as shown in Figure 8.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., should all include
Within protection scope of the present invention.
Claims (7)
1. a kind of optical system hot spot/light focus general performance test, it is characterised in that set gradually on horizontal primary optical axis
There are light source (1), hot spot/light focus switching device (2), parallel light tube (3), tested optical system seat (4) and photelectric receiver (5)；
The light source (1), hot spot/light focus switching device (2) and parallel light tube (3) are fixed on circular turntable (6), for providing axis
Glazing or the outer light of axis；
The hot spot/light focus switching device (2), is arranged on parallel light tube (3) focal plane, including glass sieve plate (21), star tester
(22) and switching device (23), for switching between glass sieve plate (21) and star tester (22)；
The photelectric receiver (5), is face battle array photoelectrical coupler, is fixed on translation stage (7).
2. optical system hot spot/light focus general performance test as claimed in claim 1, it is characterised in that the light source (1)
Including lighting device (11), intensity adjustment device (12) and wavelength selection system (13)；The lighting device (11) is used to produce light,
Intensity adjustment device (12) and wavelength selection system (13) are provided with its light path.
3. optical system hot spot/light focus general performance test as claimed in claim 2, it is characterised in that the intensity tune
Regulating device (12), including one or more attenuators.
4. optical system hot spot/light focus general performance test as claimed in claim 2, it is characterised in that the wavelength choosing
It is optical filter to select device (13).
5. optical system hot spot/light focus general performance test as claimed in claim 1, it is characterised in that when the optics
When overall system performance tester is in focometry state, the light source (1), hot spot/light focus switching device (2) and directional light
Manage (3) and axis glazing is provided, hot spot/light focus switching device (2) is switched to glass sieve plate (21)；When the optical system comprehensive performance is surveyed
When examination instrument is in speckle analysis state, the light source (1), hot spot/light focus switching device (2) and parallel light tube (3) are provided on axis
Light or the outer light of axis, hot spot/light focus switching device (2) are switched to star tester (22).
6. optical system hot spot/light focus general performance test as claimed in claim 1, it is characterised in that glass sieve plate
(21) it is slit glass sieve plate (21), there is paired groove thereon, known to each pair groove interval.
7. optical system hot spot/light focus general performance test as claimed in claim 1, it is characterised in that the star tester
(22) to there is the opaque optics of printing opacity aperture on primary optical axis, its hole diameter is in 0.1mm between 0.5mm.
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| CN109297927B (en) * | 2018-08-21 | 2020-10-13 | 深圳市太赫兹科技创新研究院 | Adjusting device and method for spectrometer |
| CN110161486B (en) * | 2019-07-03 | 2023-09-01 | 南昌航空大学 | Device for testing laser radar lens performance |
| CN112683494B (en) * | 2020-12-03 | 2023-05-09 | 西安科佳光电科技有限公司 | Device and method for testing comprehensive performance parameters of optical lens |
| CN112904171A (en) * | 2021-01-19 | 2021-06-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | Four-quadrant photoelectric detector test system and test method |
| CN113188580B (en) * | 2021-03-29 | 2022-11-08 | 深圳市华怡丰科技有限公司 | Photoelectric sensor calibrating device |
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